DE50114317D1 - Turbomolekularvakuumpumpe mit rotor- und statorschaufeln - Google Patents

Turbomolekularvakuumpumpe mit rotor- und statorschaufeln

Info

Publication number
DE50114317D1
DE50114317D1 DE50114317T DE50114317T DE50114317D1 DE 50114317 D1 DE50114317 D1 DE 50114317D1 DE 50114317 T DE50114317 T DE 50114317T DE 50114317 T DE50114317 T DE 50114317T DE 50114317 D1 DE50114317 D1 DE 50114317D1
Authority
DE
Germany
Prior art keywords
shovels
stator
rotor
vacuum pump
turbomolecular vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE50114317T
Other languages
English (en)
Inventor
Christian Beyer
Heinz Englaender
Peter Klingner
Martin Laerbusch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Application granted granted Critical
Publication of DE50114317D1 publication Critical patent/DE50114317D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/70—Shape

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
DE50114317T 2001-01-25 2001-11-15 Turbomolekularvakuumpumpe mit rotor- und statorschaufeln Expired - Lifetime DE50114317D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10103230A DE10103230A1 (de) 2001-01-25 2001-01-25 Turbomolekularvakuumpumpe mit Rotor-und Statorschaufeln
PCT/EP2001/013204 WO2002059483A1 (de) 2001-01-25 2001-11-15 Turbomolekularvakuumpumpe mit rotor- und statorschaufeln

Publications (1)

Publication Number Publication Date
DE50114317D1 true DE50114317D1 (de) 2008-10-23

Family

ID=7671659

Family Applications (2)

Application Number Title Priority Date Filing Date
DE10103230A Withdrawn DE10103230A1 (de) 2001-01-25 2001-01-25 Turbomolekularvakuumpumpe mit Rotor-und Statorschaufeln
DE50114317T Expired - Lifetime DE50114317D1 (de) 2001-01-25 2001-11-15 Turbomolekularvakuumpumpe mit rotor- und statorschaufeln

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE10103230A Withdrawn DE10103230A1 (de) 2001-01-25 2001-01-25 Turbomolekularvakuumpumpe mit Rotor-und Statorschaufeln

Country Status (5)

Country Link
US (1) US6910861B2 (de)
EP (1) EP1354138B1 (de)
JP (1) JP3974529B2 (de)
DE (2) DE10103230A1 (de)
WO (1) WO2002059483A1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004012713A1 (de) * 2004-03-16 2005-10-06 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
DE102006020081A1 (de) * 2006-04-29 2007-10-31 Pfeiffer Vacuum Gmbh Rotor- oder Statorscheibe für eine Molekularpumpe
JP4519185B2 (ja) 2008-07-22 2010-08-04 株式会社大阪真空機器製作所 ターボ分子ポンプ
US8221098B2 (en) * 2009-03-09 2012-07-17 Honeywell International Inc. Radial turbomolecular pump with electrostatically levitated rotor
DE102013219043A1 (de) 2013-09-23 2015-03-26 Oerlikon Leybold Vacuum Gmbh Legierungen von Rotoren einer Turbomolekularpumpe
DE102013219050B3 (de) * 2013-09-23 2015-01-22 Oerlikon Leybold Vacuum Gmbh Hochleistungsrotoren einer Turbomolekularpumpe
EP3093496B1 (de) * 2015-05-15 2019-03-06 Pfeiffer Vacuum Gmbh Rotor einer vakuumpumpe
GB2592043A (en) * 2020-02-13 2021-08-18 Edwards Ltd Axial flow vacuum pump
GB2612781B (en) * 2021-11-10 2024-04-10 Edwards Ltd Turbomolecular pump bladed disc

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3128939A (en) * 1964-04-14 Szydlowski
US2484554A (en) * 1945-12-20 1949-10-11 Gen Electric Centrifugal impeller
FR1306013A (fr) 1961-08-04 1962-10-13 Snecma Perfectionnements aux pompes à vide turbomoléculaires
DE7237362U (de) 1972-10-12 1973-01-11 Leybold Heraeus Gmbh & Co Kg Turbomolekularvakuumpumpe
US4227855A (en) * 1978-08-25 1980-10-14 Cummins Engine Company, Inc. Turbomachine
US4653976A (en) * 1982-09-30 1987-03-31 General Electric Company Method of compressing a fluid flow in a multi stage centrifugal impeller
JPH1089284A (ja) 1996-09-12 1998-04-07 Seiko Seiki Co Ltd ターボ分子ポンプ
JP3047292B1 (ja) * 1998-11-24 2000-05-29 セイコー精機株式会社 ターボ分子ポンプ及び真空装置

Also Published As

Publication number Publication date
WO2002059483A1 (de) 2002-08-01
DE10103230A1 (de) 2002-08-01
EP1354138B1 (de) 2008-09-10
US20040037695A1 (en) 2004-02-26
EP1354138A1 (de) 2003-10-22
US6910861B2 (en) 2005-06-28
JP3974529B2 (ja) 2007-09-12
JP2004536989A (ja) 2004-12-09

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition