DE60237942D1 - Vakuumpumpe - Google Patents

Vakuumpumpe

Info

Publication number
DE60237942D1
DE60237942D1 DE60237942T DE60237942T DE60237942D1 DE 60237942 D1 DE60237942 D1 DE 60237942D1 DE 60237942 T DE60237942 T DE 60237942T DE 60237942 T DE60237942 T DE 60237942T DE 60237942 D1 DE60237942 D1 DE 60237942D1
Authority
DE
Germany
Prior art keywords
vacuum pump
vacuum
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60237942T
Other languages
English (en)
Inventor
Takaharu Ishikawa
Akira Yamauchi
Yoshinobu Ohtachi
Hirotaka Namiki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Japan Ltd
Original Assignee
Edwards Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Japan Ltd filed Critical Edwards Japan Ltd
Application granted granted Critical
Publication of DE60237942D1 publication Critical patent/DE60237942D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
    • F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
DE60237942T 2001-06-22 2002-06-18 Vakuumpumpe Expired - Lifetime DE60237942D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001189448A JP4250353B2 (ja) 2001-06-22 2001-06-22 真空ポンプ

Publications (1)

Publication Number Publication Date
DE60237942D1 true DE60237942D1 (de) 2010-11-25

Family

ID=19028364

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60237942T Expired - Lifetime DE60237942D1 (de) 2001-06-22 2002-06-18 Vakuumpumpe

Country Status (5)

Country Link
US (1) US6840736B2 (de)
EP (1) EP1270949B1 (de)
JP (1) JP4250353B2 (de)
KR (1) KR100732281B1 (de)
DE (1) DE60237942D1 (de)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0309830D0 (en) * 2003-04-29 2003-06-04 Boc Group Plc A vacuum pump
GB0402625D0 (en) * 2004-02-06 2004-03-10 Boc Group Plc Vibration damper
WO2006041113A1 (ja) * 2004-10-15 2006-04-20 Boc Edwards Japan Limited ダンパおよび真空ポンプ
DE102005052792B4 (de) * 2004-11-24 2017-12-14 Pfeiffer Vacuum Gmbh Splitterschutz für Vakuumpumpe mit schnelldrehendem Rotor
JP2006144783A (ja) * 2004-11-24 2006-06-08 Pfeiffer Vacuum Gmbh 高速回転ロータを有する真空ポンプのフランジと結合可能な破損防止装置
JP5097967B2 (ja) * 2006-03-28 2012-12-12 タイゲン バイオテクノロジー カンパニー，リミテッド リンゴ酸塩類、及び（３ｓ，５ｓ）−７−［３−アミノ−５−メチルーピペリジニル］−１−シクロプロピル−１，４−ジヒドロ−８−メトキシ−４−オキソ−３−キノリンカルボン酸の多形体類
US7528264B2 (en) * 2006-03-28 2009-05-05 The Procter & Gamble Company Hydride reduction process for preparing quinolone intermediates
KR20110082635A (ko) * 2006-03-28 2011-07-19 워너 칠콧 컴퍼니 엘엘씨 퀴놀론 중간체를 제조하기 위한 커플링 방법
DE102007008859A1 (de) * 2007-02-23 2008-08-28 Oerlikon Leybold Vacuum Gmbh Vakuumleitung
DE202008011489U1 (de) * 2008-08-28 2010-01-07 Oerlikon Leybold Vacuum Gmbh Stator-Rotor-Anordnung für eine Vakuumpumpe sowie Vakuumpumpe
JP5483684B2 (ja) * 2009-09-03 2014-05-07 株式会社大阪真空機器製作所 分子ポンプ
IT1399567B1 (it) * 2010-04-16 2013-04-19 Varian Spa Smorzatore di vibrazioni per pompe di vuoto
KR20120003368A (ko) * 2010-07-02 2012-01-10 무라텍 오토메이션 가부시키가이샤 천정 반송차의 그리퍼 장치 및 천정 반송차
JP5494807B2 (ja) * 2010-08-06 2014-05-21 株式会社島津製作所 真空ポンプ
US9816530B2 (en) 2010-11-24 2017-11-14 Edwards Japan Limited Splinter shield for vacuum pump, and vacuum pump with the splinter shield
JP5999176B2 (ja) * 2012-04-04 2016-09-28 株式会社島津製作所 真空ポンプ
JP6735058B2 (ja) * 2013-07-31 2020-08-05 エドワーズ株式会社 真空ポンプ
DE102013110251A1 (de) 2013-09-17 2015-03-19 Pfeiffer Vacuum Gmbh Anordnung mit einer Vakuumpumpe sowie Verfahren zur Kompensation eines Magnetfeldes wenigstens eines in einer Vakuumpumpe angeordneten, ein magnetisches Störfeld erzeugenden Bauteiles
DE102014103510B4 (de) 2014-03-14 2016-02-25 Pfeiffer Vacuum Gmbh Vakuumpumpen-Dämpfer
DE202015008803U1 (de) * 2015-12-23 2017-03-24 Leybold Gmbh Verbindungseinrichtung
JP6834845B2 (ja) * 2017-08-15 2021-02-24 株式会社島津製作所 ターボ分子ポンプ
EP3447298B1 (de) * 2017-08-21 2022-02-09 Pfeiffer Vacuum Gmbh Dämpfungskörper zur verbindung eine vakuumpumpe
JP7009274B2 (ja) 2018-03-20 2022-01-25 エドワーズ株式会社 真空ポンプ及び真空ポンプ用ダンパ
JP6950962B2 (ja) * 2018-07-25 2021-10-13 株式会社不二工機 排水ポンプ
KR101991909B1 (ko) * 2018-10-05 2019-06-24 (주)오메가오토메이션 진공펌프의 수납조립체
WO2020071872A1 (ko) * 2018-10-05 2020-04-09 (주)오메가오토메이션 수봉식 진공펌프의 수납조립체
GB2579791B (en) * 2018-12-13 2021-07-14 Edwards Ltd Vacuum pump with variable axial position
JP7378697B2 (ja) * 2019-03-26 2023-11-14 エドワーズ株式会社 真空ポンプ
US11905968B2 (en) 2019-03-26 2024-02-20 Edwards Japan Limited Vacuum pump, casing, and inlet port flange
WO2020217407A1 (ja) * 2019-04-25 2020-10-29 株式会社島津製作所 真空ポンプ
JP2021161917A (ja) * 2020-03-31 2021-10-11 エドワーズ株式会社 真空ポンプおよび真空ポンプの配管構造部
GB2598762B (en) * 2020-09-11 2024-01-31 Thermo Fisher Scient Bremen Gmbh Coupling for connecting analytical systems with vibrational isolation
TWI834063B (zh) * 2020-09-30 2024-03-01 荷蘭商Ａｓｍｌ荷蘭公司 減輕幫浦故障造成之損害之真空系統

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3239328C2 (de) * 1982-10-23 1993-12-23 Pfeiffer Vakuumtechnik Magnetisch gelagerte Turbomolekularpumpe mit Schwingungsdämpfung
DE3537822A1 (de) * 1985-10-24 1987-04-30 Leybold Heraeus Gmbh & Co Kg Vakuumpumpe mit gehaeuse und rotor
US4926648A (en) * 1988-03-07 1990-05-22 Toshiba Corp. Turbomolecular pump and method of operating the same
JP2662341B2 (ja) * 1992-05-20 1997-10-08 浜松ホトニクス株式会社 電子増倍管
JP3046533B2 (ja) * 1995-10-11 2000-05-29 株式会社荏原製作所 軸受ユニット
US6213737B1 (en) * 1997-04-18 2001-04-10 Ebara Corporation Damper device and turbomolecular pump with damper device
IT1297347B1 (it) * 1997-12-24 1999-09-01 Varian Spa Pompa da vuoto.
JP2001241393A (ja) * 1999-12-21 2001-09-07 Seiko Seiki Co Ltd 真空ポンプ

Also Published As

Publication number Publication date
JP2003003988A (ja) 2003-01-08
US6840736B2 (en) 2005-01-11
KR20030001300A (ko) 2003-01-06
JP4250353B2 (ja) 2009-04-08
EP1270949B1 (de) 2010-10-13
KR100732281B1 (ko) 2007-06-25
EP1270949A1 (de) 2003-01-02
US20030007862A1 (en) 2003-01-09

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