JP4519185B2 - ターボ分子ポンプ - Google Patents
ターボ分子ポンプ Download PDFInfo
- Publication number
- JP4519185B2 JP4519185B2 JP2008188085A JP2008188085A JP4519185B2 JP 4519185 B2 JP4519185 B2 JP 4519185B2 JP 2008188085 A JP2008188085 A JP 2008188085A JP 2008188085 A JP2008188085 A JP 2008188085A JP 4519185 B2 JP4519185 B2 JP 4519185B2
- Authority
- JP
- Japan
- Prior art keywords
- blade
- section
- cross
- rotor
- root
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 238000011144 upstream manufacturing Methods 0.000 claims description 15
- 238000005452 bending Methods 0.000 description 8
- 230000003187 abdominal effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/32—Rotors specially for elastic fluids for axial flow pumps
- F04D29/38—Blades
- F04D29/384—Blades characterised by form
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/54—Fluid-guiding means, e.g. diffusers
- F04D29/541—Specially adapted for elastic fluid pumps
- F04D29/542—Bladed diffusers
- F04D29/544—Blade shapes
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Geometry (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Description
2a 翼断面
12a、12b 翼の先端部
12b、22b 翼の根部
22e、22h 翼の背面側
22f、22g 翼の腹面側
Z 回転方向
Claims (1)
- 多段の軸流翼列からなるターボ分子ポンプにおいて、ロータを形成している少なくとも1段の動翼段の動翼の前記ロータの円周方向の翼断面において、前記動翼の先端部の翼断面形状は、該先端部の翼断面の上流側部分の背面側を回転方向後方に凸状に膨出させると共に該上流側部分の腹面側を回転方向後方に凹状となるように凹ませ、該先端部翼断面の下流側部分の背面側を回転方向前方に凹状となるように凹ませると共に、該下流側部分の腹面側を回転方向前方に凸状に膨出させて、該先端部翼断面の形状をS字状又は逆S字状に形成し、又前記動翼の根部の断面形状は、該根部翼断面の上流側部分の背面側を回転方向後方に凸状に膨出させると共に該上流側部分の腹面側は凹みのない直線状に形成し、更に該根部翼断面の下流側部分の腹面側を回転方向前方に凸状に膨出させると共に該下流側部分の背面側は凹みのない直線状に形成し、更に前記動翼の先端部と該動翼の根部との間の該動翼の側面は、該先端部の外形曲線と該根部の外形曲線とを結ぶ曲線群により形成の包絡面によって形成され、且つ該動翼の断面は、該先端部から該根部にかけて順次翼の断面積が大となるように形成されているターボ分子ポンプ。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008188085A JP4519185B2 (ja) | 2008-07-22 | 2008-07-22 | ターボ分子ポンプ |
US12/500,066 US8337164B2 (en) | 2008-07-22 | 2009-07-09 | Turbomolecular pump |
DE102009027834A DE102009027834B4 (de) | 2008-07-22 | 2009-07-20 | Turbomolekularpumpe |
CN200910161320.4A CN101634307B (zh) | 2008-07-22 | 2009-07-20 | 涡轮分子泵 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008188085A JP4519185B2 (ja) | 2008-07-22 | 2008-07-22 | ターボ分子ポンプ |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2010025002A JP2010025002A (ja) | 2010-02-04 |
JP2010025002A5 JP2010025002A5 (ja) | 2010-05-13 |
JP4519185B2 true JP4519185B2 (ja) | 2010-08-04 |
Family
ID=41428915
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008188085A Active JP4519185B2 (ja) | 2008-07-22 | 2008-07-22 | ターボ分子ポンプ |
Country Status (4)
Country | Link |
---|---|
US (1) | US8337164B2 (ja) |
JP (1) | JP4519185B2 (ja) |
CN (1) | CN101634307B (ja) |
DE (1) | DE102009027834B4 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7122364B1 (en) * | 1998-03-24 | 2006-10-17 | Third Wave Technologies, Inc. | FEN endonucleases |
EP3569817B1 (en) * | 2018-05-14 | 2020-10-14 | ArianeGroup GmbH | Guide vane arrangement for use in a turbine |
GB2592043A (en) * | 2020-02-13 | 2021-08-18 | Edwards Ltd | Axial flow vacuum pump |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58202396A (ja) * | 1982-05-21 | 1983-11-25 | Hitachi Ltd | タ−ボ分子ポンプ |
JPS61210293A (ja) * | 1985-03-01 | 1986-09-18 | バルツェルスープファイファー・ゲーエムベーハー | 翼羽を有する円板およびその製造方法および装置 |
JPH0261387A (ja) * | 1988-08-24 | 1990-03-01 | Seiko Seiki Co Ltd | ターボ分子ポンプ |
JP2000161285A (ja) * | 1998-11-24 | 2000-06-13 | Seiko Seiki Co Ltd | ターボ分子ポンプ及び真空装置 |
JP2004526090A (ja) * | 2000-09-20 | 2004-08-26 | ライボルト ヴァークウム ゲゼルシャフト ミット ベシュレンクテル ハフツング | ロータ羽根列とステータ羽根列とを備えたターボ分子真空ポンプ |
JP3974529B2 (ja) * | 2001-01-25 | 2007-09-12 | ライボルト ヴァークウム ゲゼルシャフト ミット ベシュレンクテル ハフツング | ロータ羽根とステータ羽根とを備えたターボ分子真空ポンプ |
WO2008136084A1 (ja) * | 2007-04-23 | 2008-11-13 | Shimadzu Corporation | ターボ分子ポンプ |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3128939A (en) * | 1964-04-14 | Szydlowski | ||
US2935246A (en) * | 1949-06-02 | 1960-05-03 | Onera (Off Nat Aerospatiale) | Shock wave compressors, especially for use in connection with continuous flow engines for aircraft |
US4622687A (en) * | 1981-04-02 | 1986-11-11 | Arthur H. Iversen | Liquid cooled anode x-ray tubes |
JPS60125795A (ja) * | 1983-12-09 | 1985-07-05 | Osaka Shinku Kiki Seisakusho:Kk | 複合真空ポンプ |
CN1006491B (zh) * | 1985-04-01 | 1990-01-17 | 株式会社岛津制作所 | 涡轮分子泵 |
JPH07101039B2 (ja) * | 1987-04-24 | 1995-11-01 | 株式会社大阪真空機器製作所 | 複合真空ポンプ |
CN1009297B (zh) * | 1987-06-03 | 1990-08-22 | 中国科学院北京真空物理实验室 | 盘形涡轮分子泵 |
JP3532653B2 (ja) | 1995-03-07 | 2004-05-31 | 株式会社大阪真空機器製作所 | ターボ分子ポンプ |
JP3092063B2 (ja) * | 1998-06-17 | 2000-09-25 | セイコー精機株式会社 | ターボ分子ポンプ |
US6641361B2 (en) * | 2001-12-12 | 2003-11-04 | Visteon Global Technologies, Inc. | Fuel pump impeller for high flow applications |
JP4749054B2 (ja) * | 2005-06-22 | 2011-08-17 | エドワーズ株式会社 | ターボ分子ポンプ、およびターボ分子ポンプの組み立て方法 |
JP4710613B2 (ja) * | 2006-01-05 | 2011-06-29 | 株式会社日立プラントテクノロジー | 軸流ポンプ |
JP2008188085A (ja) | 2007-02-01 | 2008-08-21 | Nichiei:Kk | 化粧用シート体 |
-
2008
- 2008-07-22 JP JP2008188085A patent/JP4519185B2/ja active Active
-
2009
- 2009-07-09 US US12/500,066 patent/US8337164B2/en active Active
- 2009-07-20 DE DE102009027834A patent/DE102009027834B4/de active Active
- 2009-07-20 CN CN200910161320.4A patent/CN101634307B/zh active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58202396A (ja) * | 1982-05-21 | 1983-11-25 | Hitachi Ltd | タ−ボ分子ポンプ |
JPS61210293A (ja) * | 1985-03-01 | 1986-09-18 | バルツェルスープファイファー・ゲーエムベーハー | 翼羽を有する円板およびその製造方法および装置 |
JPH0261387A (ja) * | 1988-08-24 | 1990-03-01 | Seiko Seiki Co Ltd | ターボ分子ポンプ |
JP2000161285A (ja) * | 1998-11-24 | 2000-06-13 | Seiko Seiki Co Ltd | ターボ分子ポンプ及び真空装置 |
JP2004526090A (ja) * | 2000-09-20 | 2004-08-26 | ライボルト ヴァークウム ゲゼルシャフト ミット ベシュレンクテル ハフツング | ロータ羽根列とステータ羽根列とを備えたターボ分子真空ポンプ |
JP3974529B2 (ja) * | 2001-01-25 | 2007-09-12 | ライボルト ヴァークウム ゲゼルシャフト ミット ベシュレンクテル ハフツング | ロータ羽根とステータ羽根とを備えたターボ分子真空ポンプ |
WO2008136084A1 (ja) * | 2007-04-23 | 2008-11-13 | Shimadzu Corporation | ターボ分子ポンプ |
Also Published As
Publication number | Publication date |
---|---|
DE102009027834A1 (de) | 2010-01-28 |
CN101634307B (zh) | 2013-06-12 |
DE102009027834B4 (de) | 2013-04-11 |
JP2010025002A (ja) | 2010-02-04 |
US8337164B2 (en) | 2012-12-25 |
US20110008176A1 (en) | 2011-01-13 |
CN101634307A (zh) | 2010-01-27 |
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