DE60023216D1 - Vakuumpumpen mit doppeltem eintritt - Google Patents
Vakuumpumpen mit doppeltem eintrittInfo
- Publication number
- DE60023216D1 DE60023216D1 DE60023216T DE60023216T DE60023216D1 DE 60023216 D1 DE60023216 D1 DE 60023216D1 DE 60023216 T DE60023216 T DE 60023216T DE 60023216 T DE60023216 T DE 60023216T DE 60023216 D1 DE60023216 D1 DE 60023216D1
- Authority
- DE
- Germany
- Prior art keywords
- vacuum pumps
- double entry
- entry
- double
- pumps
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Revoked
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
- F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
- F04F9/00—Diffusion pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/241,899 US6193461B1 (en) | 1999-02-02 | 1999-02-02 | Dual inlet vacuum pumps |
US241899 | 1999-02-02 | ||
PCT/US2000/002583 WO2000046508A1 (en) | 1999-02-02 | 2000-02-01 | Dual inlet vacuum pumps |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60023216D1 true DE60023216D1 (de) | 2006-03-02 |
DE60023216T2 DE60023216T2 (de) | 2006-07-20 |
Family
ID=22912618
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60023216T Revoked DE60023216T2 (de) | 1999-02-02 | 2000-02-01 | Vakuumpumpen mit doppeltem einlass |
Country Status (5)
Country | Link |
---|---|
US (1) | US6193461B1 (de) |
EP (1) | EP1068456B1 (de) |
JP (1) | JP3995419B2 (de) |
DE (1) | DE60023216T2 (de) |
WO (1) | WO2000046508A1 (de) |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19821634A1 (de) * | 1998-05-14 | 1999-11-18 | Leybold Vakuum Gmbh | Reibungsvakuumpumpe mit Stator und Rotor |
DE10008691B4 (de) * | 2000-02-24 | 2017-10-26 | Pfeiffer Vacuum Gmbh | Gasreibungspumpe |
DE10111546A1 (de) * | 2000-05-15 | 2002-01-03 | Pfeiffer Vacuum Gmbh | Gasreibungspumpe |
DE10032607B4 (de) | 2000-07-07 | 2004-08-12 | Leo Elektronenmikroskopie Gmbh | Teilchenstrahlgerät mit einer im Ultrahochvakuum zu betreibenden Teilchenquelle und kaskadenförmige Pumpanordnung für ein solches Teilchenstrahlgerät |
JP2002048088A (ja) * | 2000-07-31 | 2002-02-15 | Seiko Instruments Inc | 真空ポンプ |
DE10056144A1 (de) * | 2000-11-13 | 2002-05-23 | Pfeiffer Vacuum Gmbh | Gasreibungspumpe |
DE10111603A1 (de) * | 2001-03-10 | 2002-09-12 | Pfeiffer Vacuum Gmbh | Gasreibungspumpe mit zusätzlichem Gaseinlass |
DE10150015A1 (de) * | 2001-10-11 | 2003-04-17 | Leybold Vakuum Gmbh | Mehrkammeranlage zur Behandlung von Gegenständen unter Vakuum, Verfahren zur Evakuierung dieser Anlage und Evakuierungssystem dafür |
GB0124731D0 (en) | 2001-10-15 | 2001-12-05 | Boc Group Plc | Vacuum pumps |
ITTO20030420A1 (it) * | 2003-06-05 | 2004-12-06 | Varian Spa | Metodo per la realizzazione di statori per pompe da vuot0 e statori cosi' ottenuti |
GB0409139D0 (en) * | 2003-09-30 | 2004-05-26 | Boc Group Plc | Vacuum pump |
GB0322883D0 (en) * | 2003-09-30 | 2003-10-29 | Boc Group Plc | Vacuum pump |
US7293320B2 (en) * | 2004-08-27 | 2007-11-13 | Van Norden Byron T | Vacuum attachment for converting a standard vacuum into a centralized dust collection system |
US20060153721A1 (en) * | 2005-01-11 | 2006-07-13 | Dodds Kemma S | Dual inlet rotary tool |
US7927066B2 (en) * | 2005-03-02 | 2011-04-19 | Tokyo Electron Limited | Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component |
GB2447860B (en) * | 2006-11-21 | 2011-08-03 | Salamander Pumped Shower Systems Ltd | Improvements in fluid pumping systems |
DE102007010068B4 (de) * | 2007-02-28 | 2024-06-13 | Thermo Fisher Scientific (Bremen) Gmbh | Vakuumpumpe oder Vakuumapparatur mit Vakuumpumpe |
DE102007027352A1 (de) * | 2007-06-11 | 2008-12-18 | Oerlikon Leybold Vacuum Gmbh | Massenspektrometer-Anordnung |
GB0901872D0 (en) | 2009-02-06 | 2009-03-11 | Edwards Ltd | Multiple inlet vacuum pumps |
GB2474507B (en) * | 2009-10-19 | 2016-01-27 | Edwards Ltd | Vacuum pump |
GB201005459D0 (en) * | 2010-03-31 | 2010-05-19 | Edwards Ltd | Vacuum pumping system |
DE202010011790U1 (de) * | 2010-08-25 | 2011-12-05 | Oerlikon Leybold Vacuum Gmbh | Turbomolekularpumpen |
JP6117423B2 (ja) * | 2014-11-17 | 2017-04-19 | 株式会社日立製作所 | 圧縮装置 |
EP3327293B1 (de) * | 2016-11-23 | 2019-11-06 | Pfeiffer Vacuum Gmbh | Vakuumpumpe mit mehreren einlässen |
US10559451B2 (en) * | 2017-02-15 | 2020-02-11 | Applied Materials, Inc. | Apparatus with concentric pumping for multiple pressure regimes |
GB2584603B (en) * | 2019-04-11 | 2021-10-13 | Edwards Ltd | Vacuum chamber module |
US11519419B2 (en) | 2020-04-15 | 2022-12-06 | Kin-Chung Ray Chiu | Non-sealed vacuum pump with supersonically rotatable bladeless gas impingement surface |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3133781A1 (de) | 1981-08-26 | 1983-03-10 | Leybold-Heraeus GmbH, 5000 Köln | Fuer die durchfuehrung der gegenstrom-lecksuche geeignete turbomolekularpumpe |
FR2611819B1 (fr) | 1987-02-25 | 1989-05-05 | Cit Alcatel | Pompe a vide, rotative |
DE3919529C2 (de) | 1988-07-13 | 1994-09-29 | Osaka Vacuum Ltd | Vakuumpumpe |
EP0408792B1 (de) | 1989-07-20 | 1993-09-29 | Leybold Aktiengesellschaft | Gasreibungspumpe mit mindestens einer auslassseitigen Gewindestufe |
US5238362A (en) | 1990-03-09 | 1993-08-24 | Varian Associates, Inc. | Turbomolecular pump |
US5733104A (en) | 1992-12-24 | 1998-03-31 | Balzers-Pfeiffer Gmbh | Vacuum pump system |
GB9318801D0 (en) * | 1993-09-10 | 1993-10-27 | Boc Group Plc | Improved vacuum pumps |
DE19508566A1 (de) | 1995-03-10 | 1996-09-12 | Balzers Pfeiffer Gmbh | Molekularvakuumpumpe mit Kühlgaseinrichtung und Verfahren zu deren Betrieb |
DE29516599U1 (de) | 1995-10-20 | 1995-12-07 | Leybold AG, 50968 Köln | Reibungsvakuumpumpe mit Zwischeneinlaß |
GB9603434D0 (en) | 1996-02-19 | 1996-04-17 | Boc Group Plc | Improvements in diffusion pumps |
-
1999
- 1999-02-02 US US09/241,899 patent/US6193461B1/en not_active Expired - Lifetime
-
2000
- 2000-02-01 JP JP2000597555A patent/JP3995419B2/ja not_active Expired - Fee Related
- 2000-02-01 EP EP00907109A patent/EP1068456B1/de not_active Revoked
- 2000-02-01 WO PCT/US2000/002583 patent/WO2000046508A1/en active IP Right Grant
- 2000-02-01 DE DE60023216T patent/DE60023216T2/de not_active Revoked
Also Published As
Publication number | Publication date |
---|---|
WO2000046508A1 (en) | 2000-08-10 |
DE60023216T2 (de) | 2006-07-20 |
EP1068456A1 (de) | 2001-01-17 |
EP1068456B1 (de) | 2005-10-19 |
US6193461B1 (en) | 2001-02-27 |
JP2002536583A (ja) | 2002-10-29 |
JP3995419B2 (ja) | 2007-10-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8363 | Opposition against the patent | ||
8331 | Complete revocation |