DE3888060D1 - Lichtempfindliche Harzzusammensetzung. - Google Patents
Lichtempfindliche Harzzusammensetzung.Info
- Publication number
- DE3888060D1 DE3888060D1 DE88115250T DE3888060T DE3888060D1 DE 3888060 D1 DE3888060 D1 DE 3888060D1 DE 88115250 T DE88115250 T DE 88115250T DE 3888060 T DE3888060 T DE 3888060T DE 3888060 D1 DE3888060 D1 DE 3888060D1
- Authority
- DE
- Germany
- Prior art keywords
- resin composition
- photosensitive resin
- photosensitive
- composition
- resin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
- G03C1/00—Photosensitive materials
- G03C1/72—Photosensitive compositions not covered by the groups G03C1/005 - G03C1/705
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Materials For Photolithography (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62233292A JPH0814696B2 (ja) | 1987-09-17 | 1987-09-17 | 感光性樹脂組成物 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3888060D1 true DE3888060D1 (de) | 1994-04-07 |
DE3888060T2 DE3888060T2 (de) | 1994-07-07 |
Family
ID=16952818
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE3888060T Expired - Lifetime DE3888060T2 (de) | 1987-09-17 | 1988-09-16 | Lichtempfindliche Harzzusammensetzung. |
Country Status (5)
Country | Link |
---|---|
US (1) | US4883739A (de) |
EP (1) | EP0307951B1 (de) |
JP (1) | JPH0814696B2 (de) |
KR (1) | KR960015637B1 (de) |
DE (1) | DE3888060T2 (de) |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA1337625C (en) * | 1988-06-13 | 1995-11-28 | Yasunori Uetani | Resist composition |
US5456995A (en) * | 1988-07-07 | 1995-10-10 | Sumitomo Chemical Company, Limited | Radiation-sensitive positive resist composition |
US5861229A (en) * | 1988-07-07 | 1999-01-19 | Sumitomo Chemical Company, Limited | Radiation-sensitive positive resist composition comprising a 1,2-quinone diazide compound, an alkali-soluble resin and a polyphenol compound |
US4965167A (en) | 1988-11-10 | 1990-10-23 | Olin Hunt Specialty Products, Inc. | Positive-working photoresist employing a selected mixture of ethyl lactate and ethyl 3-ethoxy propionate as casting solvent |
US5063138A (en) * | 1988-11-10 | 1991-11-05 | Ocg Microelectronic Materials, Inc. | Positive-working photoresist process employing a selected mixture of ethyl lactate and ethyl 3-ethoxy propionate as casting solvent during photoresist coating |
JP2589803B2 (ja) * | 1989-03-22 | 1997-03-12 | 富士写真フイルム株式会社 | 感電離放射線性樹脂組成物 |
JP2645587B2 (ja) * | 1989-03-29 | 1997-08-25 | 富士写真フイルム株式会社 | 微細パターン形成材料及び微細パターン形成方法 |
JP2700918B2 (ja) * | 1989-04-26 | 1998-01-21 | 富士写真フイルム株式会社 | ポジ型フオトレジスト組成物 |
JP2584672B2 (ja) * | 1989-04-28 | 1997-02-26 | 富士写真フイルム株式会社 | 感光性組成物 |
JPH02287545A (ja) * | 1989-04-28 | 1990-11-27 | Tokyo Ohka Kogyo Co Ltd | ポジ型感光性組成物 |
US5196517A (en) * | 1989-10-30 | 1993-03-23 | Ocg Microelectronic Materials, Inc. | Selected trihydroxybenzophenone compounds and their use as photoactive compounds |
US5219714A (en) * | 1989-10-30 | 1993-06-15 | Ocg Microelectronic Materials, Inc. | Selected trihydroxybenzophenone compounds and their use in photoactive compounds and radiation sensitive mixtures |
JP2629990B2 (ja) * | 1989-12-20 | 1997-07-16 | 住友化学工業株式会社 | ポジ型レジスト用組成物 |
US5075194A (en) * | 1990-01-09 | 1991-12-24 | Industrial Technology Research Institute | Positive photoresist composition containing 4,4-diester, 4,5-diester, or 5,5-diester of spiroglycol and 1-oxo-2-diazonaphthalene-5-sulfonic acid chloride |
JP2715327B2 (ja) * | 1990-01-19 | 1998-02-18 | 富士写真フイルム株式会社 | 感光性樹脂組成物 |
JP2761786B2 (ja) * | 1990-02-01 | 1998-06-04 | 富士写真フイルム株式会社 | ポジ型フオトレジスト組成物 |
JPH0460548A (ja) * | 1990-06-29 | 1992-02-26 | Fuji Photo Film Co Ltd | パターン形成用組成物及び微細パターン形成方法 |
KR100209107B1 (ko) * | 1991-01-11 | 1999-07-15 | 고사이 아끼오 | 포지티브 레지스트 조성물 |
JP2944296B2 (ja) | 1992-04-06 | 1999-08-30 | 富士写真フイルム株式会社 | 感光性平版印刷版の製造方法 |
JP2744557B2 (ja) * | 1992-09-11 | 1998-04-28 | 富士写真フイルム株式会社 | 感光性樹脂組成物 |
JP3503839B2 (ja) | 1994-05-25 | 2004-03-08 | 富士写真フイルム株式会社 | ポジ型感光性組成物 |
US5552256A (en) * | 1994-09-29 | 1996-09-03 | International Business Machines Corporation | Positive resist composition containing naphthoquinonediazide compound having non-metallic atom directly bonded to the naphthalene ring |
JP3278306B2 (ja) | 1994-10-31 | 2002-04-30 | 富士写真フイルム株式会社 | ポジ型フォトレジスト組成物 |
US5537695A (en) * | 1995-01-27 | 1996-07-23 | Ander; Anthony T. | Musical toilet training device |
EP0920306A2 (de) | 1996-07-12 | 1999-06-09 | Leukosite, Inc. | Chemokinrezeptor antagoniste und verfahren zu deren herstellung |
US5719004A (en) * | 1996-08-07 | 1998-02-17 | Clariant Finance (Bvi) Limited | Positive photoresist composition containing a 2,4-dinitro-1-naphthol |
US7052743B2 (en) * | 2003-08-29 | 2006-05-30 | Eastman Kodak Company | Chiral compounds and compositions containing the same |
US7150900B2 (en) * | 2003-12-16 | 2006-12-19 | Eastman Kodak Company | Liquid-crystal compositions comprising chiral compounds |
US7329368B2 (en) | 2005-12-08 | 2008-02-12 | Industrial Technology Research Institute | Temperature compensating chiral dopants |
US8513650B2 (en) | 2009-05-29 | 2013-08-20 | Xerox Corporation | Dielectric layer for an electronic device |
EP2776498B1 (de) * | 2011-11-09 | 2018-12-26 | 3M Innovative Properties Company | Härtbare zusammensetzungen für fluorpolymere |
JP6238845B2 (ja) * | 2014-03-10 | 2017-11-29 | 日本化薬株式会社 | フェノール樹脂、フェノール樹脂混合物、エポキシ樹脂、エポキシ樹脂組成物およびそれらの硬化物 |
JP7145818B2 (ja) * | 2019-06-24 | 2022-10-03 | 富士フイルム株式会社 | ポリマー、吸着剤 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1222071A (en) * | 1967-03-13 | 1971-02-10 | Agfa Gevaert Nv | Light-sensitive photographic material |
GB1278775A (en) * | 1968-07-01 | 1972-06-21 | Agfa Gevaert | Light-sensitive photographic material |
GB1303996A (de) * | 1969-07-08 | 1973-01-24 | ||
JPS5645127B2 (de) * | 1974-02-25 | 1981-10-24 | ||
FR2272082B1 (de) * | 1974-05-24 | 1978-08-11 | Issec | |
NL7604219A (nl) * | 1975-04-24 | 1976-10-26 | Cellophane Sa | Werkwijze voor het bereiden van gestabiliseerde fotochrome preparaten en registratiematerialen vervaardigd met behulp van deze preparaten. |
DE2547905C2 (de) * | 1975-10-25 | 1985-11-21 | Hoechst Ag, 6230 Frankfurt | Lichtempfindliches Aufzeichnungsmaterial |
US4267961A (en) * | 1978-09-06 | 1981-05-19 | Eastman Kodak Company | Photocrosslinkable, high-temperature-resistant polymers and their use in color imaging devices |
JPS5570840A (en) * | 1978-11-24 | 1980-05-28 | Konishiroku Photo Ind Co Ltd | Color photographic material containing dye image fading preventing agent |
JPS5635130A (en) * | 1979-08-31 | 1981-04-07 | Fujitsu Ltd | Resist material and method for forming resist pattern |
JPS57204037A (en) * | 1981-06-10 | 1982-12-14 | Fuji Photo Film Co Ltd | Color photographic sensitive material |
US4626492A (en) * | 1985-06-04 | 1986-12-02 | Olin Hunt Specialty Products, Inc. | Positive-working o-quinone diazide photoresist composition containing a dye and a trihydroxybenzophenone compound |
JPH0619534B2 (ja) * | 1985-06-10 | 1994-03-16 | 富士写真フイルム株式会社 | カラ−写真材料 |
JPS62244045A (ja) * | 1986-04-16 | 1987-10-24 | Fuji Photo Film Co Ltd | ハロゲン化銀カラ−写真感光材料 |
-
1987
- 1987-09-17 JP JP62233292A patent/JPH0814696B2/ja not_active Expired - Lifetime
-
1988
- 1988-09-15 KR KR1019880011899A patent/KR960015637B1/ko not_active IP Right Cessation
- 1988-09-16 US US07/245,190 patent/US4883739A/en not_active Expired - Lifetime
- 1988-09-16 DE DE3888060T patent/DE3888060T2/de not_active Expired - Lifetime
- 1988-09-16 EP EP88115250A patent/EP0307951B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0814696B2 (ja) | 1996-02-14 |
EP0307951A3 (en) | 1990-10-10 |
DE3888060T2 (de) | 1994-07-07 |
KR960015637B1 (ko) | 1996-11-18 |
US4883739A (en) | 1989-11-28 |
KR890005574A (ko) | 1989-05-15 |
JPS6476047A (en) | 1989-03-22 |
EP0307951B1 (de) | 1994-03-02 |
EP0307951A2 (de) | 1989-03-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8328 | Change in the person/name/address of the agent |
Free format text: BARZ, P., DIPL.-CHEM. DR.RER.NAT., PAT.-ANW., 80803 MUENCHEN |
|
8327 | Change in the person/name/address of the patent owner |
Owner name: FUJIFILM CORP., TOKIO/TOKYO, JP |