DE3787409T2 - Transportvorrichtung für einen Retikel. - Google Patents
Transportvorrichtung für einen Retikel.Info
- Publication number
- DE3787409T2 DE3787409T2 DE87108418T DE3787409T DE3787409T2 DE 3787409 T2 DE3787409 T2 DE 3787409T2 DE 87108418 T DE87108418 T DE 87108418T DE 3787409 T DE3787409 T DE 3787409T DE 3787409 T2 DE3787409 T2 DE 3787409T2
- Authority
- DE
- Germany
- Prior art keywords
- reticle
- transport device
- transport
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/02—Sliding-contact bearings
- F16C29/025—Hydrostatic or aerostatic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0662—Details of hydrostatic bearings independent of fluid supply or direction of load
- F16C32/0666—Details of hydrostatic bearings independent of fluid supply or direction of load of bearing pads
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/0002—Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
- G01B5/0004—Supports
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
- G03F7/70741—Handling masks outside exposure position, e.g. reticle libraries
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2322/00—Apparatus used in shaping articles
- F16C2322/39—General build up of machine tools, e.g. spindles, slides, actuators
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S33/00—Geometrical instruments
- Y10S33/02—Air
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Library & Information Science (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Machine Tool Units (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/877,817 US4719705A (en) | 1986-06-24 | 1986-06-24 | Reticle transporter |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3787409D1 DE3787409D1 (de) | 1993-10-21 |
DE3787409T2 true DE3787409T2 (de) | 1994-01-13 |
Family
ID=25370785
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE87108418T Expired - Lifetime DE3787409T2 (de) | 1986-06-24 | 1987-06-11 | Transportvorrichtung für einen Retikel. |
Country Status (6)
Country | Link |
---|---|
US (1) | US4719705A (de) |
EP (1) | EP0250964B1 (de) |
JP (1) | JP2550075B2 (de) |
KR (1) | KR950001724B1 (de) |
CA (1) | CA1271313C (de) |
DE (1) | DE3787409T2 (de) |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5098204A (en) * | 1989-11-03 | 1992-03-24 | John H. Blanz Company, Inc. | Load balanced planar bearing assembly especially for a cryogenic probe station |
US5166606A (en) * | 1989-11-03 | 1992-11-24 | John H. Blanz Company, Inc. | High efficiency cryogenic test station |
US5077523A (en) * | 1989-11-03 | 1991-12-31 | John H. Blanz Company, Inc. | Cryogenic probe station having movable chuck accomodating variable thickness probe cards |
US5160883A (en) * | 1989-11-03 | 1992-11-03 | John H. Blanz Company, Inc. | Test station having vibrationally stabilized X, Y and Z movable integrated circuit receiving support |
WO1995011103A1 (en) * | 1993-10-19 | 1995-04-27 | Steven Edward Goostrey | Electro-pneumatic machining jig |
JP3247554B2 (ja) * | 1994-07-19 | 2002-01-15 | キヤノン株式会社 | 基板搬送装置およびこれを用いた露光装置 |
JPH08293459A (ja) * | 1995-04-21 | 1996-11-05 | Nikon Corp | ステージ駆動制御方法及びその装置 |
JP3709896B2 (ja) * | 1995-06-15 | 2005-10-26 | 株式会社ニコン | ステージ装置 |
JPH0953640A (ja) * | 1995-08-18 | 1997-02-25 | Mitsutoyo Corp | 静圧軸受装置 |
US5883703A (en) * | 1996-02-08 | 1999-03-16 | Megapanel Corporation | Methods and apparatus for detecting and compensating for focus errors in a photolithography tool |
US6315450B1 (en) * | 1999-02-01 | 2001-11-13 | Etec Systems, Inc. | Diaphragm preload air bearing |
US6271530B1 (en) * | 1999-04-19 | 2001-08-07 | Applied Materials, Inc. | Apparatus for reducing distortion in fluid bearing surfaces |
US6239863B1 (en) | 1999-10-08 | 2001-05-29 | Silicon Valley Group, Inc. | Removable cover for protecting a reticle, system including and method of using the same |
US6847434B2 (en) * | 2000-02-10 | 2005-01-25 | Asml Holding N.V. | Method and apparatus for a pellicle frame with porous filtering inserts |
US6507390B1 (en) | 2000-02-10 | 2003-01-14 | Asml Us, Inc. | Method and apparatus for a reticle with purged pellicle-to-reticle gap |
US6307619B1 (en) | 2000-03-23 | 2001-10-23 | Silicon Valley Group, Inc. | Scanning framing blade apparatus |
DE60219844T2 (de) * | 2001-03-01 | 2008-01-17 | Asml Netherlands B.V. | Verfahren zur Übernahme einer lithographischen Maske |
US6809793B1 (en) | 2002-01-16 | 2004-10-26 | Advanced Micro Devices, Inc. | System and method to monitor reticle heating |
US6906783B2 (en) * | 2002-02-22 | 2005-06-14 | Asml Holding N.V. | System for using a two part cover for protecting a reticle |
US6822731B1 (en) * | 2003-06-18 | 2004-11-23 | Asml Holding N.V. | Method and apparatus for a pellicle frame with heightened bonding surfaces |
US6862817B1 (en) * | 2003-11-12 | 2005-03-08 | Asml Holding N.V. | Method and apparatus for kinematic registration of a reticle |
KR100568207B1 (ko) * | 2004-02-13 | 2006-04-05 | 삼성전자주식회사 | 이송장치 |
US20060201848A1 (en) * | 2005-03-14 | 2006-09-14 | Ting-Yu Lin | Method for reducing mask precipitation defects |
US8029947B2 (en) | 2005-09-01 | 2011-10-04 | Micron Technology, Inc. | Systems and methods for implementing and manufacturing reticles for use in photolithography tools |
US8282281B2 (en) * | 2007-02-14 | 2012-10-09 | Integrated Dynamics Engineering Gmbh | Air bearing with consideration of high-frequency resonances |
JP4445528B2 (ja) * | 2007-07-11 | 2010-04-07 | 住友重機械工業株式会社 | 静圧軸受 |
DE102022133619A1 (de) | 2022-12-16 | 2024-06-27 | Schaeffler Technologies AG & Co. KG | Hydrodynamisches oder hydrostatisches Gleitlager |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1117095A (fr) * | 1954-12-18 | 1956-05-16 | Gendron Freres Sa | Dispositif de graissage sous pression pour glissières ou analogues |
CH415188A (de) * | 1963-08-23 | 1966-06-15 | Max Fehr C O Liberia Mining Co | Magnetische Vorrichtung zum Festhalten und zum berührungslosen Verschieben zweier Teile an- bzw. relativ zueinander |
GB1107721A (en) * | 1963-12-18 | 1968-03-27 | Mach Tool Industry Res Ass | Improvements in or relating to fluid bearings |
US3393648A (en) * | 1965-12-28 | 1968-07-23 | Optomechanisms Inc | Air bearing table |
US3476444A (en) * | 1968-04-04 | 1969-11-04 | James D Dunfee | Hydrostatic bearing unit |
US3722996A (en) * | 1971-01-04 | 1973-03-27 | Electromask Inc | Optical pattern generator or repeating projector or the like |
GB1393035A (en) * | 1971-07-09 | 1975-05-07 | Olivetti & Co Spa | Precision measuring apparatus with aerostatic bearings |
US4013280A (en) * | 1976-08-09 | 1977-03-22 | Anwar Chitayat | Workpiece positioning table |
DE3144120A1 (de) * | 1981-11-06 | 1983-05-19 | Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar | Schlittenmikrotom |
JPS58116735A (ja) * | 1981-12-29 | 1983-07-12 | Canon Inc | 投影焼付方法 |
EP0121829B1 (de) * | 1983-03-30 | 1987-05-20 | Wyler AG Wasserwaagen und Messwerkzeuge | Lagerkörper für Luftlagerungen |
US4643590A (en) * | 1985-03-15 | 1987-02-17 | Federal Products Corporation | Guide system |
-
1986
- 1986-06-24 US US06/877,817 patent/US4719705A/en not_active Expired - Lifetime
-
1987
- 1987-06-04 CA CA538882A patent/CA1271313C/en not_active Expired
- 1987-06-11 EP EP87108418A patent/EP0250964B1/de not_active Expired - Lifetime
- 1987-06-11 DE DE87108418T patent/DE3787409T2/de not_active Expired - Lifetime
- 1987-06-19 KR KR1019870006193A patent/KR950001724B1/ko not_active IP Right Cessation
- 1987-06-22 JP JP62153600A patent/JP2550075B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0250964B1 (de) | 1993-09-15 |
EP0250964A3 (en) | 1989-03-22 |
KR950001724B1 (ko) | 1995-02-28 |
DE3787409D1 (de) | 1993-10-21 |
JPS63260020A (ja) | 1988-10-27 |
KR880001033A (ko) | 1988-03-31 |
US4719705A (en) | 1988-01-19 |
EP0250964A2 (de) | 1988-01-07 |
CA1271313A (en) | 1990-07-10 |
JP2550075B2 (ja) | 1996-10-30 |
CA1271313C (en) | 1990-07-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |