DE3751485T2 - Prazisionslinsenfassung. - Google Patents

Prazisionslinsenfassung.

Info

Publication number
DE3751485T2
DE3751485T2 DE3751485T DE3751485T DE3751485T2 DE 3751485 T2 DE3751485 T2 DE 3751485T2 DE 3751485 T DE3751485 T DE 3751485T DE 3751485 T DE3751485 T DE 3751485T DE 3751485 T2 DE3751485 T2 DE 3751485T2
Authority
DE
Germany
Prior art keywords
lens frame
precision lens
precision
frame
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE3751485T
Other languages
English (en)
Other versions
DE3751485D1 (de
Inventor
John J Bacich
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SVG Lithography Systems Inc
Original Assignee
SVG Lithography Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SVG Lithography Systems Inc filed Critical SVG Lithography Systems Inc
Publication of DE3751485D1 publication Critical patent/DE3751485D1/de
Application granted granted Critical
Publication of DE3751485T2 publication Critical patent/DE3751485T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Optics & Photonics (AREA)
  • Lens Barrels (AREA)
DE3751485T 1986-01-15 1987-01-15 Prazisionslinsenfassung. Expired - Fee Related DE3751485T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/818,925 US4733945A (en) 1986-01-15 1986-01-15 Precision lens mounting

Publications (2)

Publication Number Publication Date
DE3751485D1 DE3751485D1 (de) 1995-10-05
DE3751485T2 true DE3751485T2 (de) 1996-02-22

Family

ID=25226777

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3751485T Expired - Fee Related DE3751485T2 (de) 1986-01-15 1987-01-15 Prazisionslinsenfassung.

Country Status (4)

Country Link
US (1) US4733945A (de)
EP (1) EP0230277B1 (de)
KR (1) KR940008680B1 (de)
DE (1) DE3751485T2 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004018659A1 (de) * 2004-04-13 2005-11-03 Carl Zeiss Smt Ag Abschlussmodul für eine optische Anordnung
US7369332B2 (en) 2004-04-13 2008-05-06 Carl Zeiss Smt Gmbh Closing module for an optical arrangement

Families Citing this family (104)

* Cited by examiner, † Cited by third party
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US4961115A (en) * 1989-01-03 1990-10-02 Eastman Kodak Company Lens adjustment apparatus
JP2767468B2 (ja) * 1989-09-28 1998-06-18 京セラ株式会社 レンズ鏡胴
JPH0358609U (de) * 1989-10-12 1991-06-07
JPH03208008A (ja) * 1990-01-10 1991-09-11 Brother Ind Ltd レーザスキャナ装置
JP2532200Y2 (ja) * 1990-05-25 1997-04-09 旭光学工業株式会社 円形部材の支持装置
US5493452A (en) * 1990-10-31 1996-02-20 Olympus Optical Company Limited Lens retaining barrel
US5249082A (en) * 1991-05-08 1993-09-28 Eastman Kodak Company Exact constraint arrangement for and methods of mounting an element such as a lens
JPH0516126U (ja) * 1991-08-19 1993-03-02 コニカ株式会社 レンズの保持装置
US5428482A (en) * 1991-11-04 1995-06-27 General Signal Corporation Decoupled mount for optical element and stacked annuli assembly
US5671088A (en) * 1992-06-03 1997-09-23 Leupold & Stevens, Inc. Variable optical aiming devices
JPH08194145A (ja) * 1995-01-17 1996-07-30 Asahi Optical Co Ltd レンズ支持装置
DE19825716A1 (de) * 1998-06-09 1999-12-16 Zeiss Carl Fa Baugruppe aus optischem Element und Fassung
DE19859634A1 (de) * 1998-12-23 2000-06-29 Zeiss Carl Fa Optisches System, insbesondere Projektionsbelichtungsanlage der Mikrolithographie
DE19904152A1 (de) 1999-02-03 2000-08-10 Zeiss Carl Fa Baugruppe aus einem optischen Element und einer Fassung
US6239924B1 (en) 1999-08-31 2001-05-29 Nikon Corporation Kinematic lens mounting with distributed support and radial flexure
US6650412B1 (en) * 1999-09-10 2003-11-18 Kaiser Optical Systems Thermal compensation for optical apparatus
US6525802B1 (en) 1999-11-05 2003-02-25 Nikon Corporation Kinematic mounted reference mirror with provision for stable mounting of alignment optics
JP4809987B2 (ja) * 2000-03-30 2011-11-09 キヤノン株式会社 光学要素の支持構造、それを用いた露光装置及び半導体デバイスの製造方法
JP4945845B2 (ja) * 2000-03-31 2012-06-06 株式会社ニコン 光学素子保持装置、鏡筒及び露光装置並びにマイクロデバイスの製造方法。
DE10030495A1 (de) 2000-06-21 2002-01-03 Zeiss Carl Verfahren zum Verbinden einer Vielzahl von optischen Elementen mit einem Grundkörper
US6400516B1 (en) 2000-08-10 2002-06-04 Nikon Corporation Kinematic optical mounting
US6577457B1 (en) 2000-08-10 2003-06-10 Nikon Corporation Catadioptric lens barrel structure having a kinematic alignment structure and method for aligning two planar surfaces
US6574053B1 (en) 2000-08-10 2003-06-03 Nikon Corporation Kinematic alignment structure for placement between components axially aligned in a cylindrical body
US6473245B1 (en) 2000-08-10 2002-10-29 Nikon Corporation Catadioptric lens barrel structure having a plurality of support platforms and method of making the same
US6639740B1 (en) 2000-08-10 2003-10-28 Nikon Corporation Catadioptric lens barrel structure having a plurality of split lens barrels and a support structure supporting the split lens barrels
DE10046379A1 (de) 2000-09-20 2002-03-28 Zeiss Carl System zur gezielten Deformation von optischen Elementen
US6717159B2 (en) 2000-10-18 2004-04-06 Nikon Corporation Low distortion kinematic reticle support
DE10053899A1 (de) 2000-10-31 2002-05-08 Zeiss Carl Vorrichtung zur Lagerung eines optischen Elementes
AU2002214269A1 (en) * 2000-11-10 2002-05-21 Nikon Corporation Optical device, exposure device and device manufacturing method
US6439139B1 (en) * 2000-11-17 2002-08-27 Owens Corning Fiberglas Technology, Inc. Method for recycling building materials
DE10106605A1 (de) 2001-02-13 2002-08-22 Zeiss Carl System zur Beseitigung oder wenigstens Dämpfung von Schwingungen
DE10115915A1 (de) 2001-03-30 2002-10-02 Zeiss Carl Vorrichtung zur Justierung von Einrichtungen und zum Einstellen von Verstellwegen
DE10115914A1 (de) 2001-03-30 2002-10-02 Zeiss Carl Vorrichtung zur Lagerung eines optischen Elementes in einer Optik
US7014328B2 (en) 2001-04-12 2006-03-21 Carl Zeiss Smt Ag Apparatus for tilting a carrier for optical elements
US6674584B2 (en) * 2001-07-03 2004-01-06 Pts Corporation Optical surface-mount lens cell
US6625342B2 (en) * 2001-07-03 2003-09-23 Network Photonics, Inc. Systems and methods for overcoming stiction using a lever
DE10140608A1 (de) * 2001-08-18 2003-03-06 Zeiss Carl Vorrichtung zur Justage eines optischen Elements
DE10156884A1 (de) 2001-11-20 2003-05-28 Zeiss Carl Smt Ag Vorrichtung zur Halterung einer Fassung eines optischen Elements
JP2003241049A (ja) * 2002-02-22 2003-08-27 Nikon Corp 光学素子保持方法、光学素子研磨加工方法及び光学素子成膜方法
TWI223863B (en) * 2002-04-22 2004-11-11 Nikon Corp Support apparatus, optical apparatus, exposure apparatus and manufacturing method of device
US7245361B2 (en) * 2002-06-04 2007-07-17 Nikon Corporation Method for evaluating refractive index homogeneity of optical member
DE10228053B4 (de) * 2002-06-19 2006-06-14 Carl Zeiss Jena Gmbh Element und Verfahren zu seiner Herstellung, bei dem zwei in Bezug zu mindestens einer Justierachse positionierte Körper stoffschlüssig miteinander verbunden sind
US6873478B2 (en) * 2002-06-21 2005-03-29 Nikon Corporation Kinematic lens mount with reduced clamping force
JP4565261B2 (ja) * 2002-06-24 2010-10-20 株式会社ニコン 光学素子保持機構、光学系鏡筒及び露光装置
US6922293B2 (en) 2002-07-02 2005-07-26 Nikon Corporation Kinematic optical mounting assembly with flexures
EP1576408B1 (de) * 2002-12-23 2017-03-01 BAE Systems PLC Verformbarer spiegel
AU2003290284A1 (en) * 2002-12-23 2004-07-14 Bae Systems Plc Deformable-mirror holder
US7264363B2 (en) * 2002-12-23 2007-09-04 Bae Systems Plc Deformable-mirror cooling
ATE449978T1 (de) † 2003-06-06 2009-12-15 Nikon Corp Halteeinrichtung für optische elemente, objektivtubus, belichtungseinrichtung und herstellungsverfahren für bauelemente
DE10331390A1 (de) 2003-07-11 2005-01-27 Carl Zeiss Smt Ag Verfahren zur Herstellung von asphärischen optischen Flächen
DE10339362A1 (de) * 2003-08-27 2005-03-24 Carl Zeiss Smt Ag Vorrichtung zur Verhinderung des Kriechens eines optischen Elementes
US6816325B1 (en) 2003-09-11 2004-11-09 Carl Zeiss Smt Ag Mounting apparatus for an optical element
AU2003296244A1 (en) * 2003-10-02 2005-05-11 Carl Zeiss Smt Ag Optical subassembly and projection objective for semiconductor lithography
US7760327B2 (en) 2003-10-02 2010-07-20 Carl Zeiss Smt Ag Reflecting optical element with eccentric optical passageway
US7085080B2 (en) 2003-12-06 2006-08-01 Carl Zeiss Smt Ag Low-deformation support device of an optical element
WO2007006577A1 (en) * 2005-07-14 2007-01-18 Carl Zeiss Smt Ag Optical element
WO2007010011A2 (en) * 2005-07-19 2007-01-25 Carl Zeiss Smt Ag Optical element module
WO2007020067A1 (en) 2005-08-16 2007-02-22 Carl Zeiss Smt Ag Immersion lithography objective
EP1882983A1 (de) * 2006-07-25 2008-01-30 Carl Zeiss SMT AG Halterung mit Schwerkraftausgleich für ein optisches Element
DE102006038634A1 (de) * 2006-08-17 2008-02-21 Carl Zeiss Smt Ag Halteeinrichtung für ein optisches Element mit Stützkraftausgleich
EP2444829A1 (de) 2006-09-14 2012-04-25 Carl Zeiss SMT GmbH Optische Elementeinheit und Verfahren zum Stützen eines optischen Elements
US8441747B2 (en) * 2006-09-14 2013-05-14 Carl Zeiss Smt Gmbh Optical module with minimized overrun of the optical element
DE112007003294T5 (de) 2007-03-30 2010-03-11 Carl Zeiss Smt Ag Abstützung einer Komponente einer optischen Einrichtung
WO2008133234A1 (ja) * 2007-04-23 2008-11-06 Nikon Corporation 光学素子保持装置、鏡筒及び露光装置ならびにデバイスの製造方法
WO2008146655A1 (ja) * 2007-05-25 2008-12-04 Nikon Corporation 光学素子保持装置、鏡筒及び露光装置ならびにデバイスの製造方法
DE102009031690A1 (de) * 2009-06-26 2010-09-23 Carl Zeiss Laser Optics Gmbh Optische Anordnung
DE102009045163B4 (de) * 2009-09-30 2017-04-06 Carl Zeiss Smt Gmbh Optische Anordnung in einer mikrolithographischen Projektionsbelichtungsanlage
GB2481476B (en) * 2010-11-29 2012-07-04 Ophir Optronics Ltd Centring method for optical elements
DE102010021539B4 (de) 2010-05-19 2014-10-09 Carl Zeiss Smt Gmbh Projektionsobjektiv mit Blenden
US8919724B2 (en) * 2010-08-24 2014-12-30 Raytheon Company Mount for cryogenic fast switching mechanism
US8100377B1 (en) 2010-09-02 2012-01-24 The Boeing Company Pin mount assemblies and methods
US8507839B2 (en) 2010-09-22 2013-08-13 Exelis, Inc. Image intensifier tube with a mounting surface
CN102590974B (zh) * 2011-01-14 2014-02-19 上海微电子装备有限公司 位置微调装置及应用其的物镜
US9308617B2 (en) * 2011-03-16 2016-04-12 Satisloh North America, Inc. Securing structure for optic device
USD666229S1 (en) 2011-03-16 2012-08-28 Satisloh North America, Inc. Optic device securing structure
USD666231S1 (en) * 2011-03-16 2012-08-28 Satisloh North America, Inc. Optic device securing structure
USD666230S1 (en) * 2011-03-16 2012-08-28 Satisloh North America, Inc. Optic device securing structure
USD666228S1 (en) 2011-03-16 2012-08-28 Satisloh North America, Inc. Optic device securing structure
US9417422B2 (en) * 2011-08-23 2016-08-16 Bae Systems Information And Electronic Systems Integration Inc. Rigid adaptor ring for CTE mismatched optical device components
FR2986336B1 (fr) * 2012-01-27 2014-03-21 Centre Nat Rech Scient Dispositif de fixation d'un organe optique, systeme de fixation et dispositif cryogenique comportant un tel dispositif, procede de fabrication d'un tel dispositif et procede de fixation correspondant
CN102854596A (zh) * 2012-08-29 2013-01-02 中国科学院长春光学精密机械与物理研究所 光学透镜高精度支撑结构
CN102854597A (zh) * 2012-08-29 2013-01-02 中国科学院长春光学精密机械与物理研究所 光刻物镜中光学元件高精度支撑结构
CN103389558B (zh) * 2013-07-29 2015-12-02 中国科学院长春光学精密机械与物理研究所 光刻物镜中透镜轴向调整装置
US9244245B2 (en) 2013-11-08 2016-01-26 Institut National D'optique Auto-centering of an optical element within a barrel
JP6096377B2 (ja) * 2014-03-28 2017-03-15 富士フイルム株式会社 レンズ装置およびレンズ装置の補正方法
JP5969728B2 (ja) * 2014-03-31 2016-08-17 富士フイルム株式会社 ズームレンズ装置およびその制御方法
WO2016011544A1 (en) 2014-07-25 2016-01-28 Institut National D'optique Optical assemblies with tilt-controlled mounting of an optical element in a barrel
WO2016044927A1 (en) 2014-09-22 2016-03-31 Institut National D'optique Mounting of an optical element in a barrel using a flexible ring
JP6877354B2 (ja) 2015-03-31 2021-05-26 アンスティチュ・ナシオナル・ドプティーク 平行移動可能で芯出しされたスリーブを有する光学組立体
DE102015115929B3 (de) 2015-09-21 2016-10-06 Jenoptik Optical Systems Gmbh Monolithische Linsenfassung
CN105572043A (zh) * 2015-12-21 2016-05-11 中国科学院长春光学精密机械与物理研究所 一种用于光学均匀性测试的柔性支撑装置
US20170363833A1 (en) * 2016-06-17 2017-12-21 Corning Incorporated Polymer-free compliant optical member support
US10015378B2 (en) 2016-09-15 2018-07-03 Microsoft Technology Licensing, Llc Kinematic mount for split camera
TWI597536B (zh) * 2016-10-27 2017-09-01 財團法人國家實驗硏究院 用於支撐鏡片的支撐裝置與方法及用於支 撐功能元件的支撐組件
US20180239102A1 (en) * 2017-02-20 2018-08-23 Corning Incorporated Optical mount
US10895711B2 (en) * 2017-06-28 2021-01-19 Corning Incorporated Polymer-free compliant optical member support
DE102017212950B4 (de) 2017-07-27 2018-05-30 Carl Zeiss Smt Gmbh Spannvorrichtung, bearbeitungs- und/oder messmaschine sowie verfahren
JP6951967B2 (ja) 2017-12-28 2021-10-20 日本電産サンキョー株式会社 レンズユニット及び金型の製造方法
DE102018103053B3 (de) 2018-02-12 2018-10-11 Jenoptik Optical Systems Gmbh Bauraumoptimierte Linsenfassung mit elastischen Verbindungsstrukturen
JP2019168488A (ja) * 2018-03-22 2019-10-03 セイコーエプソン株式会社 調芯機構、レンズユニット、投射光学系及びプロジェクター
EP3980833A4 (de) * 2019-06-05 2023-07-05 Sheltered Wings, Inc. D/b/a/ Vortex Optics Dioptrieneinstellmechanismus
GB2588160B (en) * 2019-10-10 2022-09-21 Univ Brunel Adaptive precision chuck
DE102022205143A1 (de) 2022-05-24 2023-11-30 Carl Zeiss Smt Gmbh Optisches Element sowie Baugruppe und optisches System damit
KR102577850B1 (ko) * 2023-02-21 2023-09-13 국방과학연구소 광학부용 일체형 유연 힌지 마운트

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US4239364A (en) * 1978-10-23 1980-12-16 Kiyoshi Doi Camera body mount
JPS58178306A (ja) * 1982-04-14 1983-10-19 Olympus Optical Co Ltd レンズ保持装置
JPS5919911A (ja) * 1982-07-27 1984-02-01 Olympus Optical Co Ltd レンズ保持装置
JPS5931914A (ja) * 1982-08-17 1984-02-21 Olympus Optical Co Ltd レンズ保持装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004018659A1 (de) * 2004-04-13 2005-11-03 Carl Zeiss Smt Ag Abschlussmodul für eine optische Anordnung
US7369332B2 (en) 2004-04-13 2008-05-06 Carl Zeiss Smt Gmbh Closing module for an optical arrangement

Also Published As

Publication number Publication date
US4733945A (en) 1988-03-29
KR940008680B1 (ko) 1994-09-24
EP0230277A3 (en) 1989-11-15
DE3751485D1 (de) 1995-10-05
EP0230277A2 (de) 1987-07-29
KR880009283A (ko) 1988-09-14
EP0230277B1 (de) 1995-08-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee