CN204955158U - 线监测***和线锯装置 - Google Patents
线监测***和线锯装置 Download PDFInfo
- Publication number
- CN204955158U CN204955158U CN201520113413.0U CN201520113413U CN204955158U CN 204955158 U CN204955158 U CN 204955158U CN 201520113413 U CN201520113413 U CN 201520113413U CN 204955158 U CN204955158 U CN 204955158U
- Authority
- CN
- China
- Prior art keywords
- line
- monitoring system
- gauze
- sensor
- line monitoring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000012544 monitoring process Methods 0.000 title claims abstract description 68
- 230000010485 coping Effects 0.000 title abstract 7
- 239000004065 semiconductor Substances 0.000 claims description 7
- 229910052594 sapphire Inorganic materials 0.000 claims description 2
- 239000010980 sapphire Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 description 40
- 238000005520 cutting process Methods 0.000 description 31
- 230000000694 effects Effects 0.000 description 16
- 238000010586 diagram Methods 0.000 description 15
- 235000012431 wafers Nutrition 0.000 description 13
- 238000001514 detection method Methods 0.000 description 11
- 238000009826 distribution Methods 0.000 description 10
- 239000002826 coolant Substances 0.000 description 7
- 239000000463 material Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 239000010432 diamond Substances 0.000 description 4
- 229910003460 diamond Inorganic materials 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 239000002002 slurry Substances 0.000 description 3
- 230000002159 abnormal effect Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 239000004484 Briquette Substances 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011449 brick Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0064—Devices for the automatic drive or the program control of the machines
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Description
Claims (13)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP14190926.7A EP3015237A1 (en) | 2014-10-29 | 2014-10-29 | Wire monitoring system |
EP14190926.7 | 2014-10-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN204955158U true CN204955158U (zh) | 2016-01-13 |
Family
ID=51870847
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201520113413.0U Expired - Fee Related CN204955158U (zh) | 2014-10-29 | 2015-02-16 | 线监测***和线锯装置 |
CN201510086478.5A Pending CN105984041A (zh) | 2014-10-29 | 2015-02-16 | 线监测*** |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201510086478.5A Pending CN105984041A (zh) | 2014-10-29 | 2015-02-16 | 线监测*** |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP3015237A1 (zh) |
CN (2) | CN204955158U (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107866918A (zh) * | 2016-09-27 | 2018-04-03 | 松下电器产业株式会社 | 锭料的切断装置及锭料的切断装置使用的载荷检测装置 |
CN108407116A (zh) * | 2018-03-30 | 2018-08-17 | 青岛高测科技股份有限公司 | 并线检测装置、方法及包括该并线检测装置的金刚线切片机 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106891451A (zh) * | 2017-02-22 | 2017-06-27 | 平凉中电科新能源技术有限公司 | 一种金刚线多线切割机断线检测方法 |
FR3088838B1 (fr) * | 2018-11-28 | 2022-11-25 | Commissariat Energie Atomique | Procédé de mesure d’au moins un paramètre d’usure d’un fil de coupe, son application à un procédé de coupe ou de fabrication des fils et dispositif associé |
CN117656266A (zh) * | 2022-08-31 | 2024-03-08 | 天津市环智新能源技术有限公司 | 一种线网异常的处理方法及处理*** |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB9903081D0 (en) * | 1999-02-12 | 1999-03-31 | Shin Etsu Handotai Europ Limit | Improvements in or relating to the slicing of monocrystalline silicon ingots |
DE10232768A1 (de) * | 2002-07-18 | 2004-02-05 | Scanwafer Gmbh | Verfahren und Vorrichtung zur Vorschubregelung an einer Drahtsäge |
EP2313233A2 (en) * | 2008-07-11 | 2011-04-27 | Saint-Gobain Abrasives, Inc. | Wire slicing system |
EP2377147A2 (en) * | 2008-12-20 | 2011-10-19 | Cabot Microelectronics Corporation | Wiresaw cutting method |
WO2011070386A1 (en) * | 2009-12-11 | 2011-06-16 | Applied Materials, Inc. | Monitoring device for the wire of a wire saw device and method for operating the same |
CN102744796A (zh) * | 2012-06-20 | 2012-10-24 | 常州天合光能有限公司 | 硅锭切片质量监控***及监测方法 |
EP2708342B1 (en) * | 2012-09-14 | 2017-05-03 | Toyo Advanced Technologies Co., Ltd. | Wire bow monitoring system for a wire saw |
WO2014167392A1 (en) * | 2013-04-09 | 2014-10-16 | Meyer Burger Ag | Monitoring device and method for wire web monitoring and wire saw |
-
2014
- 2014-10-29 EP EP14190926.7A patent/EP3015237A1/en not_active Withdrawn
-
2015
- 2015-02-16 CN CN201520113413.0U patent/CN204955158U/zh not_active Expired - Fee Related
- 2015-02-16 CN CN201510086478.5A patent/CN105984041A/zh active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107866918A (zh) * | 2016-09-27 | 2018-04-03 | 松下电器产业株式会社 | 锭料的切断装置及锭料的切断装置使用的载荷检测装置 |
CN108407116A (zh) * | 2018-03-30 | 2018-08-17 | 青岛高测科技股份有限公司 | 并线检测装置、方法及包括该并线检测装置的金刚线切片机 |
Also Published As
Publication number | Publication date |
---|---|
CN105984041A (zh) | 2016-10-05 |
EP3015237A1 (en) | 2016-05-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20160506 Address after: American California Patentee after: Applied Materials Inc. Address before: Lausanne Patentee before: Applied Materials Switzerland Sarl |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20161031 Address after: Hiroshima County Patentee after: Toyo Advanced Machine Tool Co., Ltd. Address before: American California Patentee before: Applied Materials Inc. |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160113 Termination date: 20180216 |
|
CF01 | Termination of patent right due to non-payment of annual fee |