CN1757440B - 基板处理装置 - Google Patents
基板处理装置 Download PDFInfo
- Publication number
- CN1757440B CN1757440B CN2005101068318A CN200510106831A CN1757440B CN 1757440 B CN1757440 B CN 1757440B CN 2005101068318 A CN2005101068318 A CN 2005101068318A CN 200510106831 A CN200510106831 A CN 200510106831A CN 1757440 B CN1757440 B CN 1757440B
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- CN
- China
- Prior art keywords
- mentioned
- nozzle
- substrate
- detected
- stereotyped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
- B05B1/04—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape in flat form, e.g. fan-like, sheet-like
- B05B1/044—Slits, i.e. narrow openings defined by two straight and parallel lips; Elongated outlets for producing very wide discharges, e.g. fluid curtains
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
- G03F7/70525—Controlling normal operating mode, e.g. matching different apparatus, remote control or prediction of failure
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/7085—Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Coating Apparatus (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Materials For Photolithography (AREA)
Abstract
Description
Claims (3)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004291299 | 2004-10-04 | ||
JP2004-291299 | 2004-10-04 | ||
JP2004291299A JP4490779B2 (ja) | 2004-10-04 | 2004-10-04 | 基板処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1757440A CN1757440A (zh) | 2006-04-12 |
CN1757440B true CN1757440B (zh) | 2011-05-11 |
Family
ID=36372911
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2005101068318A Active CN1757440B (zh) | 2004-10-04 | 2005-09-23 | 基板处理装置 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP4490779B2 (zh) |
KR (1) | KR100658460B1 (zh) |
CN (1) | CN1757440B (zh) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006224089A (ja) * | 2005-01-18 | 2006-08-31 | Toppan Printing Co Ltd | 塗布装置および塗布方法 |
JP2007250851A (ja) * | 2006-03-16 | 2007-09-27 | Dainippon Screen Mfg Co Ltd | 基板処理装置、基板処理システムおよび基板処理方法 |
KR100775086B1 (ko) * | 2006-06-02 | 2007-11-08 | 주식회사 케이씨텍 | 이물질 감지 장치 및 방법 |
JP5105152B2 (ja) * | 2007-06-15 | 2012-12-19 | Nskテクノロジー株式会社 | 近接スキャン露光装置及びその制御方法 |
JP5303129B2 (ja) * | 2007-09-06 | 2013-10-02 | 東京応化工業株式会社 | 塗布装置及び塗布方法 |
KR101037187B1 (ko) * | 2008-11-27 | 2011-05-26 | 세메스 주식회사 | 기판 코팅 장치 |
JP2010214342A (ja) * | 2009-03-19 | 2010-09-30 | Toray Eng Co Ltd | 塗布装置 |
JP5256345B2 (ja) * | 2009-06-19 | 2013-08-07 | タツモ株式会社 | 基板用塗布装置 |
JP5437134B2 (ja) * | 2010-03-31 | 2014-03-12 | 大日本スクリーン製造株式会社 | 塗布装置 |
JP5679866B2 (ja) * | 2011-02-28 | 2015-03-04 | 東レエンジニアリング株式会社 | 塗布装置および塗布方法 |
WO2012162642A2 (en) | 2011-05-26 | 2012-11-29 | Advenira Enterprises, Inc. | System and process for coating an object |
CN102974508B (zh) * | 2012-12-10 | 2016-08-10 | 京东方科技集团股份有限公司 | 涂布嘴防护件、涂布喷头组件 |
JP5714616B2 (ja) * | 2013-01-21 | 2015-05-07 | 中外炉工業株式会社 | 塗工装置 |
CN103245678B (zh) | 2013-04-26 | 2015-12-09 | 深圳市华星光电技术有限公司 | 一种异物检测装置 |
CN103353459A (zh) * | 2013-06-18 | 2013-10-16 | 深圳市华星光电技术有限公司 | 一种检测装置及检测方法 |
KR102323080B1 (ko) * | 2013-12-23 | 2021-11-09 | 세메스 주식회사 | 기판 처리 장치 및 방법 |
JP6721956B2 (ja) * | 2015-07-28 | 2020-07-15 | 株式会社Screenホールディングス | 塗布装置および塗布方法 |
CN106186717B (zh) * | 2016-08-04 | 2018-11-23 | 武汉华星光电技术有限公司 | 玻璃基板涂布装置 |
JP6797698B2 (ja) * | 2017-01-11 | 2020-12-09 | 株式会社Screenホールディングス | 基板処理装置および基板処理装置の異状検知方法 |
CN107398396A (zh) * | 2017-08-24 | 2017-11-28 | 武汉华星光电技术有限公司 | 光阻材料的涂布装置及涂布方法 |
CN109701960B (zh) * | 2018-12-28 | 2021-07-27 | 惠科股份有限公司 | 基板清洗设备和清洗方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1406156A (zh) * | 2000-12-27 | 2003-03-26 | 东丽株式会社 | 喷嘴及涂布液的涂布装置和涂布方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63212690A (ja) * | 1987-02-27 | 1988-09-05 | 株式会社東芝 | エスカレ−タ或いは動く歩道の安全装置 |
JP3380321B2 (ja) * | 1994-02-16 | 2003-02-24 | 富士写真フイルム株式会社 | 表面検査装置 |
KR20000000515U (ko) * | 1998-06-11 | 2000-01-15 | 김영환 | 이물질 감지 기능이 구비된 액정표시소자용 코팅장치 |
JP3653688B2 (ja) * | 1998-07-10 | 2005-06-02 | 平田機工株式会社 | スリットコート式塗布装置とスリットコート式塗布方法 |
JP4325084B2 (ja) * | 2000-06-19 | 2009-09-02 | 東レ株式会社 | 塗布方法およびそれを用いたカラーフィルタの製造方法 |
JP3696164B2 (ja) | 2002-02-08 | 2005-09-14 | 株式会社東芝 | 液状膜の処理方法及び液状膜の処理装置 |
JP4342147B2 (ja) * | 2002-05-01 | 2009-10-14 | 大日本スクリーン製造株式会社 | 基板処理装置 |
KR100958256B1 (ko) * | 2003-12-18 | 2010-05-17 | 엘지디스플레이 주식회사 | 코팅장비 |
JP2005236152A (ja) * | 2004-02-23 | 2005-09-02 | Tokyo Electron Ltd | 基板処理装置 |
KR101074952B1 (ko) * | 2004-08-31 | 2011-10-18 | 엘지디스플레이 주식회사 | 포토레지스트 코팅장치 및 코팅방법 |
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2004
- 2004-10-04 JP JP2004291299A patent/JP4490779B2/ja active Active
-
2005
- 2005-09-23 CN CN2005101068318A patent/CN1757440B/zh active Active
- 2005-09-30 KR KR1020050091897A patent/KR100658460B1/ko active IP Right Grant
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1406156A (zh) * | 2000-12-27 | 2003-03-26 | 东丽株式会社 | 喷嘴及涂布液的涂布装置和涂布方法 |
Non-Patent Citations (1)
Title |
---|
JP 2002-1195 A,全文. |
Also Published As
Publication number | Publication date |
---|---|
CN1757440A (zh) | 2006-04-12 |
JP4490779B2 (ja) | 2010-06-30 |
JP2006102609A (ja) | 2006-04-20 |
KR20060051901A (ko) | 2006-05-19 |
KR100658460B1 (ko) | 2006-12-15 |
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Legal Events
Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee |
Owner name: SCREEN GROUP CO., LTD. Free format text: FORMER NAME: DAINIPPON SCREEN MFG. CO., LTD. Owner name: DAINIPPON SCREEN MFG. CO., LTD. Free format text: FORMER NAME: DAINIPPON MESH PLATE MFR. CO., LTD. |
|
CP01 | Change in the name or title of a patent holder |
Address after: Kyoto City, Kyoto, Japan Patentee after: Skilling Group Address before: Kyoto City, Kyoto, Japan Patentee before: DAINIPPON SCREEN MFG Co.,Ltd. Address after: Kyoto City, Kyoto, Japan Patentee after: DAINIPPON SCREEN MFG Co.,Ltd. Address before: Kyoto City, Kyoto, Japan Patentee before: Dainippon Screen Mfg. Co.,Ltd. |