CN1614085A - 布线修复设备 - Google Patents
布线修复设备 Download PDFInfo
- Publication number
- CN1614085A CN1614085A CNA200410079893XA CN200410079893A CN1614085A CN 1614085 A CN1614085 A CN 1614085A CN A200410079893X A CNA200410079893X A CN A200410079893XA CN 200410079893 A CN200410079893 A CN 200410079893A CN 1614085 A CN1614085 A CN 1614085A
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- Prior art keywords
- gas
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- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000008439 repair process Effects 0.000 title claims abstract description 45
- 239000000758 substrate Substances 0.000 claims abstract description 56
- 238000001182 laser chemical vapour deposition Methods 0.000 claims description 25
- 239000004411 aluminium Substances 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- -1 dimethyl aluminium Chemical compound 0.000 claims description 4
- 238000005984 hydrogenation reaction Methods 0.000 claims description 3
- RXCXTWLPFKKEMF-UHFFFAOYSA-H chromium(6+);hexahydroxide Chemical compound [OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[Cr+6] RXCXTWLPFKKEMF-UHFFFAOYSA-H 0.000 claims description 2
- 229910019813 Cr(CO)6 Inorganic materials 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 180
- 239000011651 chromium Substances 0.000 description 43
- 210000004027 cell Anatomy 0.000 description 29
- 239000010408 film Substances 0.000 description 20
- 239000000463 material Substances 0.000 description 18
- 239000011521 glass Substances 0.000 description 13
- 238000010926 purge Methods 0.000 description 12
- 239000004973 liquid crystal related substance Substances 0.000 description 9
- 238000000034 method Methods 0.000 description 9
- 230000003287 optical effect Effects 0.000 description 9
- 229910052804 chromium Inorganic materials 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 8
- 239000012528 membrane Substances 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 239000002994 raw material Substances 0.000 description 6
- 229910021417 amorphous silicon Inorganic materials 0.000 description 5
- 238000004020 luminiscence type Methods 0.000 description 5
- 238000005067 remediation Methods 0.000 description 5
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 4
- 210000002858 crystal cell Anatomy 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 230000001105 regulatory effect Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910021419 crystalline silicon Inorganic materials 0.000 description 2
- 238000004821 distillation Methods 0.000 description 2
- 238000002309 gasification Methods 0.000 description 2
- 230000003760 hair shine Effects 0.000 description 2
- 230000005764 inhibitory process Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000008646 thermal stress Effects 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000001143 conditioned effect Effects 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- TUTOKIOKAWTABR-UHFFFAOYSA-N dimethylalumane Chemical compound C[AlH]C TUTOKIOKAWTABR-UHFFFAOYSA-N 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45519—Inert gas curtains
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
- C23C16/047—Coating on selected surface areas, e.g. using masks using irradiation by energy or particles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Chemical Vapour Deposition (AREA)
- Liquid Crystal (AREA)
- Thin Film Transistor (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
Description
组成 | 材料 | |
TFT | 功能膜 | a-Si,n+a-Si,poly-Si |
绝缘膜 | Si3N4 | |
保护膜 | SiNx | |
电极膜 | Al,Mo,Cr | |
MIN | 金属膜 | Ta,Cr |
绝缘膜 | TaxOy | |
像素电极 | ITO(In2O3+Sn),IO(In2O3) | |
配线膜 | 聚酰亚胺,SiOx |
Claims (5)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP332211/2003 | 2003-09-24 | ||
JP2003332211A JP4334308B2 (ja) | 2003-09-24 | 2003-09-24 | 配線修正装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1614085A true CN1614085A (zh) | 2005-05-11 |
CN100334253C CN100334253C (zh) | 2007-08-29 |
Family
ID=34308968
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB200410079893XA Expired - Fee Related CN100334253C (zh) | 2003-09-24 | 2004-09-24 | 布线修复设备 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7371286B2 (zh) |
JP (1) | JP4334308B2 (zh) |
KR (1) | KR100787725B1 (zh) |
CN (1) | CN100334253C (zh) |
TW (1) | TWI315353B (zh) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100422797C (zh) * | 2005-05-13 | 2008-10-01 | Nec液晶技术株式会社 | 断线修复方法、用其制造有源矩阵基片的方法和显示装置 |
CN102759829A (zh) * | 2012-07-03 | 2012-10-31 | 深圳市华星光电技术有限公司 | 阵列基板的断线修补装置及修补方法 |
CN102828166A (zh) * | 2012-08-24 | 2012-12-19 | 京东方科技集团股份有限公司 | 化学气相沉积维修设备 |
CN103074614A (zh) * | 2012-12-25 | 2013-05-01 | 王奉瑾 | 激光cvd镀膜设备 |
CN106773177A (zh) * | 2017-01-03 | 2017-05-31 | 京东方科技集团股份有限公司 | 一种信号线的修复***及修复方法 |
WO2019120189A1 (zh) * | 2017-12-18 | 2019-06-27 | 上海微电子装备(集团)股份有限公司 | 一种增材制造装置和制造方法 |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7579224B2 (en) * | 2005-01-21 | 2009-08-25 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing a thin film semiconductor device |
JP4980672B2 (ja) * | 2006-08-23 | 2012-07-18 | 大陽日酸株式会社 | 気相成長装置 |
TW200818276A (en) * | 2006-08-23 | 2008-04-16 | Taiyo Nippon Sanso Corp | Vapor phase epitaxy apparatus |
JP5214862B2 (ja) * | 2006-08-23 | 2013-06-19 | 大陽日酸株式会社 | 気相成長装置 |
JP4987435B2 (ja) * | 2006-11-15 | 2012-07-25 | Ntn株式会社 | 欠陥修正方法および欠陥修正装置 |
TWI421916B (zh) * | 2006-09-07 | 2014-01-01 | Ntn Toyo Bearing Co Ltd | A pattern correction method and a pattern correction device |
KR100824964B1 (ko) * | 2006-12-26 | 2008-04-28 | 주식회사 코윈디에스티 | 레이저를 이용한 금속박막 형성장치 및 그 방법 |
JP5481715B2 (ja) * | 2007-10-22 | 2014-04-23 | 株式会社ブイ・テクノロジー | レーザ加工装置及びレーザ加工方法 |
JP5206979B2 (ja) * | 2009-03-13 | 2013-06-12 | オムロン株式会社 | レーザcvdによる薄膜形成方法、及び同方法に好適なガスウィンドウ |
US8211782B2 (en) | 2009-10-23 | 2012-07-03 | Palo Alto Research Center Incorporated | Printed material constrained by well structures |
JP5476519B2 (ja) * | 2010-01-20 | 2014-04-23 | 株式会社ブイ・テクノロジー | レーザ加工装置 |
KR101069809B1 (ko) * | 2010-04-08 | 2011-10-04 | 주식회사 코윈디에스티 | 패드 패턴 수리장치 |
JP5663776B1 (ja) * | 2014-03-27 | 2015-02-04 | 福井県 | 吸引方法及び吸引装置並びにレーザ加工方法及びレーザ加工装置 |
CN105970210B (zh) * | 2016-05-26 | 2018-03-30 | 京东方科技集团股份有限公司 | 一种阵列基板的断线修复装置及阵列基板的断线修复方法 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4778693A (en) * | 1986-10-17 | 1988-10-18 | Quantronix Corporation | Photolithographic mask repair system |
JPH0799746B2 (ja) * | 1994-02-10 | 1995-10-25 | 株式会社日立製作所 | 配線形成装置 |
KR0126101B1 (ko) * | 1994-07-07 | 1997-12-26 | 김주용 | 리페어 마스크 형성방법 |
KR0158780B1 (ko) * | 1994-12-22 | 1998-11-16 | 가네꼬 히사시 | 화학 증착법에 의한 박막형성 방법 및 장치 |
JP2785803B2 (ja) * | 1996-05-01 | 1998-08-13 | 日本電気株式会社 | フォトマスクの白点欠陥修正方法および装置 |
JPH10280152A (ja) | 1997-04-14 | 1998-10-20 | Nec Corp | チャンバレスレーザcvd装置 |
JP3036687B2 (ja) | 1997-05-23 | 2000-04-24 | 日本電気株式会社 | レーザcvd装置 |
US6057180A (en) * | 1998-06-05 | 2000-05-02 | Electro Scientific Industries, Inc. | Method of severing electrically conductive links with ultraviolet laser output |
JP3175731B2 (ja) | 1999-05-18 | 2001-06-11 | 日本電気株式会社 | レーザcvd装置 |
JP3525841B2 (ja) * | 2000-01-26 | 2004-05-10 | 日本電気株式会社 | レーザリペア方法および装置 |
KR100382456B1 (ko) * | 2000-05-01 | 2003-05-01 | 엘지.필립스 엘시디 주식회사 | 액정표시장치의 리페어 패턴 형성방법 |
JP2002124380A (ja) * | 2000-10-19 | 2002-04-26 | Ushio Inc | 有機発光膜の加工方法 |
JP3479838B2 (ja) * | 2000-10-19 | 2003-12-15 | 日本電気株式会社 | パターン修正方法及びパターン修正装置 |
KR100866283B1 (ko) * | 2000-10-30 | 2008-10-31 | 어플라이드 머티어리얼스, 인코포레이티드 | 액면 센서, 액체 용기 및 액체량 검지 방법 |
US6656539B1 (en) * | 2000-11-13 | 2003-12-02 | International Business Machines Corporation | Method and apparatus for performing laser CVD |
KR100877537B1 (ko) | 2001-12-29 | 2009-01-07 | 엘지디스플레이 주식회사 | 액정패널의 불량화소 리페어 방법 |
-
2003
- 2003-09-24 JP JP2003332211A patent/JP4334308B2/ja not_active Expired - Fee Related
-
2004
- 2004-09-10 TW TW093127446A patent/TWI315353B/zh not_active IP Right Cessation
- 2004-09-15 US US10/940,982 patent/US7371286B2/en not_active Expired - Fee Related
- 2004-09-23 KR KR1020040076587A patent/KR100787725B1/ko active IP Right Grant
- 2004-09-24 CN CNB200410079893XA patent/CN100334253C/zh not_active Expired - Fee Related
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100422797C (zh) * | 2005-05-13 | 2008-10-01 | Nec液晶技术株式会社 | 断线修复方法、用其制造有源矩阵基片的方法和显示装置 |
CN102759829A (zh) * | 2012-07-03 | 2012-10-31 | 深圳市华星光电技术有限公司 | 阵列基板的断线修补装置及修补方法 |
WO2014005331A1 (zh) * | 2012-07-03 | 2014-01-09 | 深圳市华星光电技术有限公司 | 阵列基板的断线修补装置及修补方法 |
CN102828166A (zh) * | 2012-08-24 | 2012-12-19 | 京东方科技集团股份有限公司 | 化学气相沉积维修设备 |
CN102828166B (zh) * | 2012-08-24 | 2014-07-16 | 京东方科技集团股份有限公司 | 化学气相沉积维修设备 |
CN103074614A (zh) * | 2012-12-25 | 2013-05-01 | 王奉瑾 | 激光cvd镀膜设备 |
CN103074614B (zh) * | 2012-12-25 | 2015-10-28 | 王奉瑾 | 激光cvd镀膜设备 |
CN106773177A (zh) * | 2017-01-03 | 2017-05-31 | 京东方科技集团股份有限公司 | 一种信号线的修复***及修复方法 |
CN106773177B (zh) * | 2017-01-03 | 2020-03-06 | 京东方科技集团股份有限公司 | 一种信号线的修复***及修复方法 |
WO2019120189A1 (zh) * | 2017-12-18 | 2019-06-27 | 上海微电子装备(集团)股份有限公司 | 一种增材制造装置和制造方法 |
Also Published As
Publication number | Publication date |
---|---|
JP2005101222A (ja) | 2005-04-14 |
KR20050030155A (ko) | 2005-03-29 |
CN100334253C (zh) | 2007-08-29 |
US7371286B2 (en) | 2008-05-13 |
JP4334308B2 (ja) | 2009-09-30 |
TW200512312A (en) | 2005-04-01 |
US20050061780A1 (en) | 2005-03-24 |
TWI315353B (en) | 2009-10-01 |
KR100787725B1 (ko) | 2007-12-24 |
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Owner name: TECHNOLOGY CO. LTD V. Free format text: FORMER OWNER: OMRON LASERFRONT INC. Effective date: 20140307 |
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Address after: Kanagawa, Japan Patentee after: Omron Laserfront, Inc. Address before: Kanagawa, Japan Patentee before: Laserfront Technologies, Inc. |
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Granted publication date: 20070829 Termination date: 20200924 |
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CF01 | Termination of patent right due to non-payment of annual fee |