CN1565710A - 现场处理废气流的装置和方法 - Google Patents

现场处理废气流的装置和方法 Download PDF

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Publication number
CN1565710A
CN1565710A CNA2004100716728A CN200410071672A CN1565710A CN 1565710 A CN1565710 A CN 1565710A CN A2004100716728 A CNA2004100716728 A CN A2004100716728A CN 200410071672 A CN200410071672 A CN 200410071672A CN 1565710 A CN1565710 A CN 1565710A
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CN
China
Prior art keywords
gas
scrubbing
water
gas stream
reducing agent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2004100716728A
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English (en)
Chinese (zh)
Inventor
乔斯·I·阿尔诺
马克·R·霍尔斯特
萨姆·伊
约瑟夫·D·斯威尼
杰夫·洛里里
贾森·德塞夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Technology Materials Inc
Original Assignee
Advanced Technology Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/212,107 external-priority patent/US6759018B1/en
Application filed by Advanced Technology Materials Inc filed Critical Advanced Technology Materials Inc
Publication of CN1565710A publication Critical patent/CN1565710A/zh
Pending legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/77—Liquid phase processes
    • B01D53/78—Liquid phase processes with gas-liquid contact
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D19/00—Degasification of liquids
    • B01D19/02—Foam dispersion or prevention
    • B01D19/04—Foam dispersion or prevention by addition of chemical substances
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B01D53/70—Organic halogen compounds
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23M—CASINGS, LININGS, WALLS OR DOORS SPECIALLY ADAPTED FOR COMBUSTION CHAMBERS, e.g. FIREBRIDGES; DEVICES FOR DEFLECTING AIR, FLAMES OR COMBUSTION PRODUCTS IN COMBUSTION CHAMBERS; SAFETY ARRANGEMENTS SPECIALLY ADAPTED FOR COMBUSTION APPARATUS; DETAILS OF COMBUSTION CHAMBERS, NOT OTHERWISE PROVIDED FOR
    • F23M5/00—Casings; Linings; Walls
    • F23M5/08—Cooling thereof; Tube walls
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2209/00—Specific waste
    • F23G2209/14—Gaseous waste or fumes
    • F23G2209/142—Halogen gases, e.g. silane
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Environmental & Geological Engineering (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • General Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Toxicology (AREA)
  • Combustion & Propulsion (AREA)
  • Dispersion Chemistry (AREA)
  • Treating Waste Gases (AREA)
  • Gas Separation By Absorption (AREA)
  • Separation Of Suspended Particles By Flocculating Agents (AREA)
  • Water Treatment By Electricity Or Magnetism (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Chemical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
CNA2004100716728A 1998-12-15 1999-12-15 现场处理废气流的装置和方法 Pending CN1565710A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/212,107 1998-12-15
US09/212,107 US6759018B1 (en) 1997-05-16 1998-12-15 Method for point-of-use treatment of effluent gas streams

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CNB998161152A Division CN1167497C (zh) 1998-12-15 1999-12-15 现场处理废气流的装置和方法

Publications (1)

Publication Number Publication Date
CN1565710A true CN1565710A (zh) 2005-01-19

Family

ID=22789590

Family Applications (2)

Application Number Title Priority Date Filing Date
CNA2004100716728A Pending CN1565710A (zh) 1998-12-15 1999-12-15 现场处理废气流的装置和方法
CNB998161152A Expired - Fee Related CN1167497C (zh) 1998-12-15 1999-12-15 现场处理废气流的装置和方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
CNB998161152A Expired - Fee Related CN1167497C (zh) 1998-12-15 1999-12-15 现场处理废气流的装置和方法

Country Status (7)

Country Link
EP (1) EP1146958A4 (ja)
JP (1) JP2002539912A (ja)
KR (1) KR100481256B1 (ja)
CN (2) CN1565710A (ja)
AU (1) AU2188900A (ja)
TW (1) TW492891B (ja)
WO (1) WO2000035573A1 (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101801505B (zh) * 2007-09-20 2013-06-12 宝虹(新加坡)私人有限公司 电子组件制造流出物的环境空气减弱的设备与方法
CN105537207A (zh) * 2015-12-11 2016-05-04 上海交通大学 一种高温用石英管的清洗方法
CN106098525A (zh) * 2016-07-06 2016-11-09 武汉华星光电技术有限公司 干蚀刻设备
CN106512664A (zh) * 2016-12-15 2017-03-22 江苏诺斯特拉环保科技有限公司 一种聚氯化铝废气吸收塔
CN114025864A (zh) * 2019-05-20 2022-02-08 巴克曼实验室国际公司 通过在线测量和控制洗涤器液体中的夹带的气体来优化湿法洗涤器工艺流程

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US6491884B1 (en) 1999-11-26 2002-12-10 Advanced Technology Materials, Inc. In-situ air oxidation treatment of MOCVD process effluent
EP1306769A3 (en) * 2001-08-31 2003-05-21 Horiba, Ltd. System for determining a greenhouse effect gas emission index
GB0505674D0 (en) * 2005-03-22 2005-04-27 Boc Group Plc Trap device
GB0605232D0 (en) * 2006-03-16 2006-04-26 Johnson Matthey Plc Oxygen removal
US9387428B2 (en) 2008-02-05 2016-07-12 Applied Materials, Inc. Systems and methods for treating flammable effluent gases from manufacturing processes
KR100945520B1 (ko) 2008-03-12 2010-03-09 엔텍이앤씨 주식회사 악취 가스 제거 방법
CN101816904B (zh) * 2010-05-19 2012-05-09 马铭傈 用于防止及清理罐内磷酸渣沉淀的可移动空气搅拌***
JP2013539717A (ja) * 2010-09-15 2013-10-28 ソルヴェイ（ソシエテ アノニム） ガスからのｆ２および／またはｏｆ２の除去方法
NO336115B1 (no) * 2011-07-05 2015-05-18 Aker Engineering & Technology Fremgangsmåte for fanging av sur gass og anvendelse av en polypropylensammensetning for fremstilling av et tårn for fanging av sur gass
US9259683B2 (en) 2014-01-22 2016-02-16 Micron Technology, Inc. Methods and apparatus for treating fluorinated greenhouse gases in gas streams
CN105067062B (zh) * 2015-07-16 2017-12-12 国乐忠 一种复合肥防结油精确计量***及方法
JPWO2017094418A1 (ja) * 2015-12-01 2018-09-20 昭和電工株式会社 フッ素元素を含有する排ガスの処理方法
KR20180075622A (ko) * 2015-12-01 2018-07-04 쇼와 덴코 가부시키가이샤 불소 원소를 함유하는 배기 가스의 처리 방법
JP6854611B2 (ja) * 2016-01-13 2021-04-07 東京エレクトロン株式会社 基板処理方法、基板処理装置及び基板処理システム
CN106178876A (zh) * 2016-08-12 2016-12-07 东方日升新能源股份有限公司 工业化处理含氮废气的装置和方法
KR102362761B1 (ko) * 2017-11-22 2022-02-15 씨에스케이(주) 가스 처리 장치
CN109011983B (zh) * 2018-08-24 2020-09-18 郑州釜鼎热能技术有限公司 一种磁性液体净化污染气体的除尘脱污装置
CN109289477A (zh) * 2018-10-25 2019-02-01 南京博酝化工科技有限公司 一种处理化学废气的喷淋装置
CN110038409B (zh) * 2019-04-30 2021-06-01 无锡市道格环保科技有限公司 一种联合脱硫脱硝装置及工艺
CN112875822B (zh) * 2020-12-30 2022-11-01 江西楚杭环保科技有限公司 一种用于垃圾填埋场一体化除臭和污水处理装置
CN113797953B (zh) * 2021-09-29 2023-07-04 广州珠矶科技有限公司 一种用于地下水有机污染修复的纳米催化剂的制备及其使用方法
CN114082731B (zh) * 2021-11-17 2022-08-23 苏州金宏气体股份有限公司 一种电子级正硅酸乙酯返回钢瓶的处理方法及装置

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DE2352039B2 (de) * 1973-10-17 1977-02-17 Metallgesellschaft AG, 6000 Frankfurt; Bayer AG, 5090 Leverkusen-Bayerwerk Verfahren zur trocknung von so tief 2 -haltigen gasen bzw. von luft zur verbrennung von schwefel
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JPS60139313A (ja) * 1983-12-27 1985-07-24 Matsushita Electric Ind Co Ltd メタン発酵ガス水洗装置
US4555389A (en) * 1984-04-27 1985-11-26 Toyo Sanso Co., Ltd. Method of and apparatus for burning exhaust gases containing gaseous silane
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US5846275A (en) * 1996-12-31 1998-12-08 Atmi Ecosys Corporation Clog-resistant entry structure for introducing a particulate solids-containing and/or solids-forming gas stream to a gas processing system
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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101801505B (zh) * 2007-09-20 2013-06-12 宝虹(新加坡)私人有限公司 电子组件制造流出物的环境空气减弱的设备与方法
CN105537207A (zh) * 2015-12-11 2016-05-04 上海交通大学 一种高温用石英管的清洗方法
CN106098525A (zh) * 2016-07-06 2016-11-09 武汉华星光电技术有限公司 干蚀刻设备
CN106098525B (zh) * 2016-07-06 2018-01-30 武汉华星光电技术有限公司 干蚀刻设备
CN106512664A (zh) * 2016-12-15 2017-03-22 江苏诺斯特拉环保科技有限公司 一种聚氯化铝废气吸收塔
CN114025864A (zh) * 2019-05-20 2022-02-08 巴克曼实验室国际公司 通过在线测量和控制洗涤器液体中的夹带的气体来优化湿法洗涤器工艺流程

Also Published As

Publication number Publication date
EP1146958A4 (en) 2006-06-21
EP1146958A1 (en) 2001-10-24
JP2002539912A (ja) 2002-11-26
CN1167497C (zh) 2004-09-22
TW492891B (en) 2002-07-01
KR100481256B1 (ko) 2005-04-11
CN1367713A (zh) 2002-09-04
WO2000035573A1 (en) 2000-06-22
AU2188900A (en) 2000-07-03
KR20010093838A (ko) 2001-10-29

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