AU2188900A - Apparatus and method for point-of-use treatment of effluent gas streams - Google Patents

Apparatus and method for point-of-use treatment of effluent gas streams

Info

Publication number
AU2188900A
AU2188900A AU21889/00A AU2188900A AU2188900A AU 2188900 A AU2188900 A AU 2188900A AU 21889/00 A AU21889/00 A AU 21889/00A AU 2188900 A AU2188900 A AU 2188900A AU 2188900 A AU2188900 A AU 2188900A
Authority
AU
Australia
Prior art keywords
point
gas streams
effluent gas
use treatment
treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU21889/00A
Inventor
Jose I. Arno
Jason Deseve
Mark R Holst
Jeff Lorelli
Joseph D. Sweeney
Sam Yee
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Technology Materials Inc
Original Assignee
Advanced Technology Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/212,107 external-priority patent/US6759018B1/en
Application filed by Advanced Technology Materials Inc filed Critical Advanced Technology Materials Inc
Publication of AU2188900A publication Critical patent/AU2188900A/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/77—Liquid phase processes
    • B01D53/78—Liquid phase processes with gas-liquid contact
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D19/00—Degasification of liquids
    • B01D19/02—Foam dispersion or prevention
    • B01D19/04—Foam dispersion or prevention by addition of chemical substances
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B01D53/70—Organic halogen compounds
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23M—CASINGS, LININGS, WALLS OR DOORS SPECIALLY ADAPTED FOR COMBUSTION CHAMBERS, e.g. FIREBRIDGES; DEVICES FOR DEFLECTING AIR, FLAMES OR COMBUSTION PRODUCTS IN COMBUSTION CHAMBERS; SAFETY ARRANGEMENTS SPECIALLY ADAPTED FOR COMBUSTION APPARATUS; DETAILS OF COMBUSTION CHAMBERS, NOT OTHERWISE PROVIDED FOR
    • F23M5/00—Casings; Linings; Walls
    • F23M5/08—Cooling thereof; Tube walls
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2209/00—Specific waste
    • F23G2209/14—Gaseous waste or fumes
    • F23G2209/142—Halogen gases, e.g. silane
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Environmental & Geological Engineering (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • General Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Toxicology (AREA)
  • Combustion & Propulsion (AREA)
  • Dispersion Chemistry (AREA)
  • Treating Waste Gases (AREA)
  • Gas Separation By Absorption (AREA)
  • Separation Of Suspended Particles By Flocculating Agents (AREA)
  • Water Treatment By Electricity Or Magnetism (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Chemical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
AU21889/00A 1998-12-15 1999-12-15 Apparatus and method for point-of-use treatment of effluent gas streams Abandoned AU2188900A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09212107 1998-12-15
US09/212,107 US6759018B1 (en) 1997-05-16 1998-12-15 Method for point-of-use treatment of effluent gas streams
PCT/US1999/029910 WO2000035573A1 (en) 1998-12-15 1999-12-15 Apparatus and method for point-of-use treatment of effluent gas streams

Publications (1)

Publication Number Publication Date
AU2188900A true AU2188900A (en) 2000-07-03

Family

ID=22789590

Family Applications (1)

Application Number Title Priority Date Filing Date
AU21889/00A Abandoned AU2188900A (en) 1998-12-15 1999-12-15 Apparatus and method for point-of-use treatment of effluent gas streams

Country Status (7)

Country Link
EP (1) EP1146958A4 (en)
JP (1) JP2002539912A (en)
KR (1) KR100481256B1 (en)
CN (2) CN1565710A (en)
AU (1) AU2188900A (en)
TW (1) TW492891B (en)
WO (1) WO2000035573A1 (en)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6491884B1 (en) 1999-11-26 2002-12-10 Advanced Technology Materials, Inc. In-situ air oxidation treatment of MOCVD process effluent
EP1306769A3 (en) * 2001-08-31 2003-05-21 Horiba, Ltd. System for determining a greenhouse effect gas emission index
GB0505674D0 (en) * 2005-03-22 2005-04-27 Boc Group Plc Trap device
GB0605232D0 (en) * 2006-03-16 2006-04-26 Johnson Matthey Plc Oxygen removal
CN101801505B (en) * 2007-09-20 2013-06-12 宝虹(新加坡)私人有限公司 Apparatus and methods for ambient air abatement of electronic device manufacturing effluent
US9387428B2 (en) 2008-02-05 2016-07-12 Applied Materials, Inc. Systems and methods for treating flammable effluent gases from manufacturing processes
KR100945520B1 (en) 2008-03-12 2010-03-09 엔텍이앤씨 주식회사 Method for eliminating odorous gas
CN101816904B (en) * 2010-05-19 2012-05-09 马铭傈 Movable air stirring system for preventing and clearing away sediment of phosphoric acid slag in tank
JP2013539717A (en) * 2010-09-15 2013-10-28 ソルヴェイ（ソシエテ アノニム） Method of removing F2 and / or OF2 from gas
NO336115B1 (en) * 2011-07-05 2015-05-18 Aker Engineering & Technology Process for trapping acid gas and using a polypropylene composition for producing a tower for trapping acid gas
US9259683B2 (en) 2014-01-22 2016-02-16 Micron Technology, Inc. Methods and apparatus for treating fluorinated greenhouse gases in gas streams
CN105067062B (en) * 2015-07-16 2017-12-12 国乐忠 A kind of composite fertilizer's anti-caking oil accurate metering system and method
JPWO2017094418A1 (en) * 2015-12-01 2018-09-20 昭和電工株式会社 Method for treating exhaust gas containing elemental fluorine
KR20180075622A (en) * 2015-12-01 2018-07-04 쇼와 덴코 가부시키가이샤 Process for treating exhaust gas containing fluorine element
CN105537207B (en) * 2015-12-11 2018-09-25 上海交通大学 A kind of cleaning method of high temperature quartz ampoule
JP6854611B2 (en) * 2016-01-13 2021-04-07 東京エレクトロン株式会社 Substrate processing method, substrate processing equipment and substrate processing system
CN106098525B (en) * 2016-07-06 2018-01-30 武汉华星光电技术有限公司 Dry ecthing equipment
CN106178876A (en) * 2016-08-12 2016-12-07 东方日升新能源股份有限公司 The apparatus and method of the nitrogenous waste gas of industrial treatment
CN106512664A (en) * 2016-12-15 2017-03-22 江苏诺斯特拉环保科技有限公司 Polyaluminum chloride waste gas absorption tower
KR102362761B1 (en) * 2017-11-22 2022-02-15 씨에스케이(주) Gas treating apparatus
CN109011983B (en) * 2018-08-24 2020-09-18 郑州釜鼎热能技术有限公司 Magnetic liquid purifies gaseous pollution's dust removal and takes off dirty device
CN109289477A (en) * 2018-10-25 2019-02-01 南京博酝化工科技有限公司 A kind of spray equipment handling chemical exhaust
CN110038409B (en) * 2019-04-30 2021-06-01 无锡市道格环保科技有限公司 Combined desulfurization and denitrification device and process
CN114025864A (en) * 2019-05-20 2022-02-08 巴克曼实验室国际公司 Optimization of wet scrubber process flow by on-line measurement and control of entrained gas in scrubber liquid
CN112875822B (en) * 2020-12-30 2022-11-01 江西楚杭环保科技有限公司 Be used for landfill integrated deodorization and sewage treatment plant
CN113797953B (en) * 2021-09-29 2023-07-04 广州珠矶科技有限公司 Preparation and application methods of nano catalyst for repairing organic pollution of underground water
CN114082731B (en) * 2021-11-17 2022-08-23 苏州金宏气体股份有限公司 Treatment method and device for returning electronic-grade ethyl orthosilicate to steel cylinder

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4005010A (en) * 1973-09-21 1977-01-25 Imperial Chemical Industries Limited Method of packing media in a tower or bed
DE2352039B2 (en) * 1973-10-17 1977-02-17 Metallgesellschaft AG, 6000 Frankfurt; Bayer AG, 5090 Leverkusen-Bayerwerk PROCESS FOR DRYING SO DEEP 2 CONTAINING GASES OR FROM AIR TO BURNING SULFUR
US4029576A (en) * 1976-02-23 1977-06-14 The Goodyear Tire & Rubber Company System for softening water
DE2740039A1 (en) * 1977-09-06 1979-03-15 Heinz Hoelter Two=stage gas scrubber - with acid and alkaline treatment branch over common fluid sump
JPS60139313A (en) * 1983-12-27 1985-07-24 Matsushita Electric Ind Co Ltd Apparatus for scrubbing methane fermentation gas with water
US4555389A (en) * 1984-04-27 1985-11-26 Toyo Sanso Co., Ltd. Method of and apparatus for burning exhaust gases containing gaseous silane
JPS62136230A (en) * 1985-12-10 1987-06-19 Showa Denko Kk Treatment of dry etching exhaust gas
US5238665A (en) * 1991-06-10 1993-08-24 Beco Engineering Company Method for minimizing environmental release of toxic compounds in the incineration of wastes
DE69223288T2 (en) * 1991-07-09 1998-03-19 Inst Francais Du Petrol Distillation reactor and its use for equilibrium reactions
US5683587A (en) * 1992-03-30 1997-11-04 Ferrara; Marcello Process for treating industrial wastes
US5480557A (en) * 1992-05-08 1996-01-02 Heisei Riken Kabushiki Kaisha Method for preventing adhesion of scales in service water or circulating industrial water by applying the magnetic field
US5405590A (en) * 1993-02-05 1995-04-11 Pedro Buarque de Macedo Off-gas scrubber system
US5522461A (en) * 1995-03-31 1996-06-04 Weatherford U.S., Inc. Mill valve
US5622682A (en) * 1994-04-06 1997-04-22 Atmi Ecosys Corporation Method for concentration and recovery of halocarbons from effluent gas streams
AU7109596A (en) * 1995-09-27 1997-04-17 Technicat, Inc. Water treatment arrangement
KR100326623B1 (en) * 1996-12-31 2002-03-02 추후제출 Inlet structures for introducing a particulate solids containing and/or solids forming gas stream to a gas processing system
US5846275A (en) * 1996-12-31 1998-12-08 Atmi Ecosys Corporation Clog-resistant entry structure for introducing a particulate solids-containing and/or solids-forming gas stream to a gas processing system
US20010009652A1 (en) * 1998-05-28 2001-07-26 Jose I. Arno Apparatus and method for point-of-use abatement of fluorocompounds

Also Published As

Publication number Publication date
EP1146958A4 (en) 2006-06-21
EP1146958A1 (en) 2001-10-24
CN1565710A (en) 2005-01-19
JP2002539912A (en) 2002-11-26
CN1167497C (en) 2004-09-22
TW492891B (en) 2002-07-01
KR100481256B1 (en) 2005-04-11
CN1367713A (en) 2002-09-04
WO2000035573A1 (en) 2000-06-22
KR20010093838A (en) 2001-10-29

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase