CN1503451B - 滤波器元件以及包含它的滤波器器件、双工器和高频电路 - Google Patents
滤波器元件以及包含它的滤波器器件、双工器和高频电路 Download PDFInfo
- Publication number
- CN1503451B CN1503451B CN200310113761XA CN200310113761A CN1503451B CN 1503451 B CN1503451 B CN 1503451B CN 200310113761X A CN200310113761X A CN 200310113761XA CN 200310113761 A CN200310113761 A CN 200310113761A CN 1503451 B CN1503451 B CN 1503451B
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- resonator
- thin film
- series arm
- piezoelectric thin
- parallel branch
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- 229910052804 chromium Inorganic materials 0.000 claims description 2
- 238000001914 filtration Methods 0.000 claims description 2
- 239000011521 glass Substances 0.000 claims description 2
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- 229910052703 rhodium Inorganic materials 0.000 claims description 2
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Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/56—Monolithic crystal filters
- H03H9/564—Monolithic crystal filters implemented with thin-film techniques
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/0023—Balance-unbalance or balance-balance networks
- H03H9/0095—Balance-unbalance or balance-balance networks using bulk acoustic wave devices
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/10—Mounting in enclosures
- H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
- H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/56—Monolithic crystal filters
- H03H9/566—Electric coupling means therefor
- H03H9/568—Electric coupling means therefor consisting of a ladder configuration
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Transceivers (AREA)
Abstract
Description
Claims (13)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002339611A JP3963824B2 (ja) | 2002-11-22 | 2002-11-22 | フィルタ素子、それを有するフィルタ装置、分波器及び高周波回路 |
JP339611/2002 | 2002-11-22 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1503451A CN1503451A (zh) | 2004-06-09 |
CN1503451B true CN1503451B (zh) | 2012-04-18 |
Family
ID=32321924
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200310113761XA Expired - Lifetime CN1503451B (zh) | 2002-11-22 | 2003-11-21 | 滤波器元件以及包含它的滤波器器件、双工器和高频电路 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7271684B2 (zh) |
JP (1) | JP3963824B2 (zh) |
KR (1) | KR100625701B1 (zh) |
CN (1) | CN1503451B (zh) |
Families Citing this family (47)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2006180304A (ja) * | 2004-12-24 | 2006-07-06 | Hitachi Media Electoronics Co Ltd | 圧電バルク共振子およびその製造方法、圧電バルク共振子を用いたフィルタ、それを用いた半導体集積回路装置、並びにそれを用いた高周波モジュール |
WO2006137275A1 (ja) * | 2005-06-20 | 2006-12-28 | Murata Manufacturing Co., Ltd. | 圧電薄膜フィルタ |
KR100622393B1 (ko) * | 2005-07-05 | 2006-09-12 | 삼성전자주식회사 | 일 표면 상에 딤플이 제작된 공진부를 포함하는 벌크 음향공진기 및 그 제조방법 |
JP4680727B2 (ja) * | 2005-09-08 | 2011-05-11 | 株式会社日立メディアエレクトロニクス | 共振器型フィルタ |
US7639103B2 (en) | 2006-06-26 | 2009-12-29 | Panasonic Corporation | Piezoelectric filter, antenna duplexer, and communications apparatus employing piezoelectric resonator |
US7535323B2 (en) * | 2006-07-10 | 2009-05-19 | Skyworks Solutions, Inc. | Bulk acoustic wave filter with reduced nonlinear signal distortion |
JP5036435B2 (ja) * | 2006-09-01 | 2012-09-26 | 太陽誘電株式会社 | 弾性波デバイス、フィルタおよび分波器 |
JP5072642B2 (ja) * | 2007-03-28 | 2012-11-14 | 京セラ株式会社 | 弾性表面波装置及びこれを用いた分波器並びに通信装置 |
US7548140B2 (en) * | 2007-04-16 | 2009-06-16 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Bulk acoustic wave (BAW) filter having reduced second harmonic generation and method of reducing second harmonic generation in a BAW filter |
WO2009025055A1 (ja) * | 2007-08-23 | 2009-02-26 | Fujitsu Limited | 弾性波フィルタ、それを用いたデュプレクサおよびそのデュプレクサを用いた通信機 |
CN101796722B (zh) * | 2007-11-15 | 2014-05-28 | 太阳诱电株式会社 | 弹性波器件、使用其的双工器以及使用该双工器的通信机 |
US8291559B2 (en) * | 2009-02-24 | 2012-10-23 | Epcos Ag | Process for adapting resonance frequency of a BAW resonator |
JP5333654B2 (ja) * | 2010-03-19 | 2013-11-06 | 株式会社村田製作所 | ラダー型フィルタ及びデュプレクサ |
JP5877043B2 (ja) | 2011-11-22 | 2016-03-02 | 太陽誘電株式会社 | デュプレクサ |
DE112012005948T5 (de) * | 2012-02-27 | 2014-12-11 | Taiyo Yuden Co., Ltd. | Akustikwellenvorrichtung |
JP6200705B2 (ja) * | 2013-06-27 | 2017-09-20 | 太陽誘電株式会社 | 分波器 |
US10333494B2 (en) * | 2014-12-24 | 2019-06-25 | Qorvo Us, Inc. | Simplified acoustic RF resonator parallel capacitance compensation |
US20160191015A1 (en) * | 2014-12-27 | 2016-06-30 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Split current bulk acoustic wave (baw) resonators |
US10581403B2 (en) | 2016-07-11 | 2020-03-03 | Qorvo Us, Inc. | Device having a titanium-alloyed surface |
US11050412B2 (en) | 2016-09-09 | 2021-06-29 | Qorvo Us, Inc. | Acoustic filter using acoustic coupling |
JP6656135B2 (ja) * | 2016-10-21 | 2020-03-04 | 太陽誘電株式会社 | フィルタおよびマルチプレクサ |
KR102217438B1 (ko) * | 2016-11-22 | 2021-02-19 | 가부시키가이샤 무라타 세이사쿠쇼 | 필터 장치 및 멀티플렉서 |
US11165412B2 (en) | 2017-01-30 | 2021-11-02 | Qorvo Us, Inc. | Zero-output coupled resonator filter and related radio frequency filter circuit |
US11165413B2 (en) | 2017-01-30 | 2021-11-02 | Qorvo Us, Inc. | Coupled resonator structure |
JP6872387B2 (ja) * | 2017-03-14 | 2021-05-19 | 日本電波工業株式会社 | 複合フィルタ |
JP6534406B2 (ja) * | 2017-03-21 | 2019-06-26 | 太陽誘電株式会社 | マルチプレクサ |
JP6923365B2 (ja) * | 2017-06-08 | 2021-08-18 | 太陽誘電株式会社 | 弾性波デバイス |
US10153934B1 (en) * | 2017-10-11 | 2018-12-11 | Qualcomm Incorporated | Reconfigurable wideband current-mode filters |
US11152913B2 (en) | 2018-03-28 | 2021-10-19 | Qorvo Us, Inc. | Bulk acoustic wave (BAW) resonator |
CN111342808B (zh) * | 2018-12-18 | 2023-08-15 | 天津大学 | 基于元素掺杂缩小有效面积的谐振器、滤波器和电子设备 |
CN111342811B (zh) * | 2018-12-18 | 2023-12-15 | 天津大学 | 多通道滤波器及其组件、电子设备 |
CN109936344A (zh) * | 2018-12-29 | 2019-06-25 | 天津大学 | 一种拆分结构谐振器 |
WO2020133316A1 (zh) * | 2018-12-29 | 2020-07-02 | 天津大学 | 一种拆分结构谐振器 |
JP7343992B2 (ja) * | 2019-03-20 | 2023-09-13 | 太陽誘電株式会社 | フィルタおよびマルチプレクサ |
US11146247B2 (en) | 2019-07-25 | 2021-10-12 | Qorvo Us, Inc. | Stacked crystal filter structures |
JP7377450B2 (ja) * | 2019-07-29 | 2023-11-10 | 株式会社村田製作所 | フィルタ回路及び複合フィルタ装置 |
US11211676B2 (en) * | 2019-10-09 | 2021-12-28 | Com Dev Ltd. | Multi-resonator filters |
US11757430B2 (en) | 2020-01-07 | 2023-09-12 | Qorvo Us, Inc. | Acoustic filter circuit for noise suppression outside resonance frequency |
US11146246B2 (en) | 2020-01-13 | 2021-10-12 | Qorvo Us, Inc. | Phase shift structures for acoustic resonators |
US11146245B2 (en) | 2020-01-13 | 2021-10-12 | Qorvo Us, Inc. | Mode suppression in acoustic resonators |
WO2021200677A1 (ja) * | 2020-03-31 | 2021-10-07 | 株式会社村田製作所 | 弾性波装置 |
US11632097B2 (en) | 2020-11-04 | 2023-04-18 | Qorvo Us, Inc. | Coupled resonator filter device |
US11575363B2 (en) | 2021-01-19 | 2023-02-07 | Qorvo Us, Inc. | Hybrid bulk acoustic wave filter |
WO2022211056A1 (ja) * | 2021-03-31 | 2022-10-06 | 株式会社村田製作所 | 弾性波装置 |
WO2023191070A1 (ja) * | 2022-04-01 | 2023-10-05 | 株式会社村田製作所 | 弾性波装置 |
CN115567027B (zh) * | 2022-11-03 | 2023-07-07 | 常州承芯半导体有限公司 | 换能装置、声表面波谐振装置及其形成方法、滤波装置 |
CN115986345B (zh) * | 2022-11-30 | 2024-02-06 | 北京芯溪半导体科技有限公司 | 一种改善非线性特性的滤波器、双工器和多工器 |
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CN1263651A (zh) * | 1998-02-13 | 2000-08-16 | 西门子公司 | 用于在超高频频段工作的无线电收发机、特别是无绳电话机进行频率预处理的可集成电路 |
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WO2002017483A1 (fr) * | 2000-08-21 | 2002-02-28 | Murata Manufacturing Co.,Ltd. | Dispositif de filtration d'ondes acoustiques de surface |
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-
2002
- 2002-11-22 JP JP2002339611A patent/JP3963824B2/ja not_active Expired - Lifetime
-
2003
- 2003-11-21 US US10/717,487 patent/US7271684B2/en not_active Expired - Lifetime
- 2003-11-21 CN CN200310113761XA patent/CN1503451B/zh not_active Expired - Lifetime
- 2003-11-21 KR KR1020030083098A patent/KR100625701B1/ko active IP Right Grant
Patent Citations (3)
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CN1289478A (zh) * | 1998-02-06 | 2001-03-28 | 汤姆森公司 | 带有声表面波谐振器的滤波器 |
CN1263651A (zh) * | 1998-02-13 | 2000-08-16 | 西门子公司 | 用于在超高频频段工作的无线电收发机、特别是无绳电话机进行频率预处理的可集成电路 |
WO2002017483A1 (fr) * | 2000-08-21 | 2002-02-28 | Murata Manufacturing Co.,Ltd. | Dispositif de filtration d'ondes acoustiques de surface |
Also Published As
Publication number | Publication date |
---|---|
KR20040045355A (ko) | 2004-06-01 |
KR100625701B1 (ko) | 2006-09-20 |
US7271684B2 (en) | 2007-09-18 |
JP2004173191A (ja) | 2004-06-17 |
JP3963824B2 (ja) | 2007-08-22 |
CN1503451A (zh) | 2004-06-09 |
US20040100342A1 (en) | 2004-05-27 |
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