CN1359007A - Comb teeth type body silicon working microchemical accelerometer - Google Patents
Comb teeth type body silicon working microchemical accelerometer Download PDFInfo
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- CN1359007A CN1359007A CN 02103612 CN02103612A CN1359007A CN 1359007 A CN1359007 A CN 1359007A CN 02103612 CN02103612 CN 02103612 CN 02103612 A CN02103612 A CN 02103612A CN 1359007 A CN1359007 A CN 1359007A
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Abstract
The structure of comb tooth type silicon processing micromachinery accelerometer includes the tooth comb formed by means of body processing, sensing quality element formed from several groups of moving teeth and folded beam group fixed tooth biased fixed tooth and substrate, and its circuit includes the portions of microcapacitor detection and force feedback servocircuit, etc. Said invention can develope the face-processed comb tooth structure into body-processed comb tooth sturcture by means of fixed tooth biased structure, and can increase detection and thrust capacitance so as to greatly raise its resolution and accuracy. Besides, in its preamplifier low input impedance circuit is used and in closed loop feedback thrust the differential D.C. voltage mode is used, so that it can make instrument possess high accuracy.
Description
Technical field
The present invention relates to a kind of comb teeth type body silicon working microchemical accelerometer, belong to the MEMS (micro electro mechanical system) field.
Background technology
Micro-mechanical accelerometer is a development in recent years.The ADXL50 of U.S. AD company is a micro-mechanical accelerometer the most representative on the market.AD company is in the research of beginning comb-tooth-type capacitance accelerometer in 1989, and nineteen ninety is developed its electronic measurement circuit cooperatively with German Seimens company, has now formed series of products in operation in 1993.The accelerometer of this dynamic balance adopts surface processing technique to make, sensitive axes and substrate parallel, and Fig. 1 is its structural representation.Detecting quality is " H " shape.The wide thin beam of four 2 μ m of " H " shape will detect quality and be fixed on the substrate, and detecting quality can be freely along moving perpendicular to the direction of thin beam.Practical structures has 42 broach, is stretched out laterally by central quality bar.Each broach is a float electrode of variable capacitance; Fixed electorde and float electrode are interconnected.Device is processed by the thick polysilicon surface of 2 μ m, and total length is 380 μ m, and width is 580 μ m.The long 120 μ m of broach, wide 4 μ m.The gap of capacitance electrode equals 1.3 μ m.The total capacitance of 42 broach electric capacity is 0.1pF.Testing circuit adopts the capacitance bridge scheme.On the fixed electorde that detects electric capacity, apply the carrier signal that frequency is 1MHz.The output voltage of sensor and two values that detect electric capacity are directly proportional.This signal amplifies and synchronous demodulation through buffering, feeds back to the capacitor plate of torquer, produces electrostatic force, makes that detecting quality gets back to zero-bit.Entire circuit and microstructure are integrated on a slice silicon chip, and with a 5V single power supply, the noise index is
1996, AD company released its second generation accelerometer product---ADXL05.Compare the accelerometer of this range 5g changing in design with the accelerometer of previous generation 50g: will measure electrode and afterburning electrode separately, and produce the static restoring forces with 8 pairs of fixed electordes wherein, other 46 pairs then are used for displacement detecting; Increase responsive quality and reduce the elastic constant of beam, thus the displacement that each g produces when increasing open loop; Strengthen the performance of measuring capacitance and having improved circuit.Make the total noise level of this device be lower than the ADXL50 of previous generation.
1998, AD company released its twin-axis accelerometer product line again.Range is from ± 2g to ± 100g.As ADXL202, range is ± 2g, and bandwidth can be transferred to 5KHz by extraneous electric capacity always, and noise figure is
, and adopted the output of pulsed modulation dutycycle, and directly can enter single-chip microcomputer and handle, perhaps can convert analog quantity to by filtering.
The comb-tooth-type micro mechanical structure is a kind of typical structure of micro mechanical sensor, and existing comb-tooth-type micro mechanical structure is that the even configuration structure of tooth is decided in face processing.But, influenced the further raising of comb-tooth-type micro mechanical sensor resolution and precision because the comb-tooth-type structure measurement electric capacity that surface working obtains is less than normal.Replacing surface working with the processing of body silicon is the effective way that overcomes above-mentioned shortcoming, but for body processing comb structure, the even configuration structure bonding face of tooth is little, body silicon is processed responsive quality activity sheet thickening in addition owing to deciding, quality strengthens, after process flow gets off, the tooth of deciding of bonding comes off seriously, and it is very big to record the resistance of deciding between cog by probe station, and this mainly is that bond strength is not enough.In addition, the bonding contact resistance also becomes big.Name is called the Chinese patent of " comb-shaped stereo silicon processing micro mechanical structure of fixed tooth offset ", and (application number is: the comb-shaped stereo silicon processing micro mechanical structure that 01141718.8) has proposed a kind of fixed tooth offset, but the moving plate and the gap between the substrate of this structure are little, the time be subjected to stuckly in work easily, make work undesired.
Summary of the invention
The purpose of this invention is to provide a kind of bond strength height, bonding area is big, and the bonding difficulty is low, the comb teeth type body silicon working microchemical accelerometer that the bonding contact resistance is little, even, yield rate is high.
Comb teeth type body silicon working microchemical accelerometer of the present invention comprises comb-shaped stereo silicon processing micro mechanical structure and circuit two large divisions.
Comb-shaped stereo silicon processing micro mechanical structure comprises a responsive mass elements of being made up of tooth pivot, the moving tooth of many groups and folded beam, fixed teeth and substrate; Should be stretched out to both sides by the tooth pivot by moving tooth, form bilateral comb-tooth-type structure, the folded beam at these tooth pivot two ends is fixed on the substrate by column, makes tooth pivot, moving unsettled the be arrangeding in parallel of the relative substrate of tooth of many groups; The moving tooth of each of said responsive mass elements is a float electrode of variable capacitance, and is interconnected with each broach of fixed teeth, totally forms differential capacitor; Said fixed teeth is for directly being fixed on the one-sided comb structure of on-chip many groups, and the distance between the fixed teeth that the moving tooth of responsive mass elements is adjacent does not wait.Too small for the gap that solves between tooth pivot and the substrate, so on the substrate below the responsive mass elements, have deep trouth, and on the tooth pivot, have some apertures.
The most important advantage of fixed tooth offset structure of the present invention is exactly that the bonding piece is few, bonding area is big, greatly reduce the bonding difficulty, and the bonding contact resistance is little, even.Because all the tooth of deciding on each moving tooth both sides of interposed structure is an opposed polarity, because the relation of lead-in wire is all wanted independent bonding, bond strength is little, is easy to come off; And fixed tooth offset structure centre line of the present invention is a kind of electrode with a left side, and center line is another kind of electrode with the right side, so can adopt several fixed meshing bondings together, has alleviated contradiction greatly.Prove that through process flow the present invention has significantly improved yield rate, make micro mechanical sensor be worked into body and be processed into possibility, thereby the resolution of making and precision improve greatly from face.
In addition, fixed tooth offset structure of the present invention has obviously reduced the necessary many inner leads of the scheme of all putting on the glass pole plate, electrode.The distributed capacitance between electrode, lead-in wire and the interference of electric signal have been avoided like this, on the one hand; On the other hand, reduce lead-in wire output number, reduced the workload of lead-in wire bonding.
Decide the equal interposed structure of tooth though the lateral dimension of bias structure of the present invention is slightly larger than, equal interposed structure is decided tooth and is grown (with electric capacity and the bonding area that satisfies equal interposed structure), and in the process, tooth flexural deformation is bigger, and technology difficulty is big; Simultaneously, decide the operate as normal that the long flexural deformation meeting that causes of tooth directly influences sensor.In addition, all the longitudinal size of interposed structure is big, and utilization ratio of spaces is low.So on space of a whole page utilization, processing technology, fixed tooth offset structure of the present invention also is better than equal interposed structure.
Circuit (see figure 3) of the present invention is by sinusoidal signal generation circuit (I), the transformer of coiling (II) on little magnet ring, pre-amplification circuit (IV) ac amplifier circuit (V) of the tagblock that is connected with reference point on the micro mechanical structure (III) Low ESR input, phase-adjusting circuit (VI), the afterburning circuit of detuner (VII) low-pass filtering electrical equipment (VIII) proportional-plus-integral correcting circuit (IX) close-loop feedback (X, XI) totally 11 parts are formed.Specifically describe circuit conditions below: among Fig. 4 tagblock III leaded with micro mechanical structure (Fig. 3) on relevant point link to each other CAR11, CAR12, CAR21, CAR22, POW11, POW12, POW21, POW22, SEN1, SEN2 respectively with micro mechanical structure on CAR11, CAR12, CAR21, CAR22, POW11, POW12, POW21, POW22, SEN1, SEN2 links to each other.The output terminal SINO of sinusoidal signal generation circuit (I) links to each other with the former limit of transformer (II), and transformer secondary output terminal SIN+, SIN-link to each other with SIN+ and SIN-in the tagblock (III) respectively, and the output terminal of tagblock (III) passes through capacitor C
3Link to each other with amplifier inverting input in the pre-amplification circuit (IV), realize the Low ESR input, the output terminal of pre-amplification circuit (IV) passes through capacitor C
6, resistance R 11 links to each other with amplifier inverting input in the ac amplifier circuit (V), and the output terminal of ac amplifier circuit (V) passes through capacitor C
8, resistance R
13Link to each other with the inverting input of amplifier in the phase-adjusting circuit (VI), the output terminal in the phase-adjusting circuit (VI) passes through capacitor C
10, linking to each other with input end in the detuner (VII), detuner is AD630, and the output terminal of detuner AD630 links to each other with low-pass filter circuit (VIII), and the output terminal of low-pass filter circuit passes through resistance R
24Link to each other with the amplifier inverting input in the proportional-plus-integral correcting circuit (IX), the output terminal direct output of DC current pressure value of proportional-plus-integral correcting circuit (IX), the size of acceleration is experienced in representative.And link to each other with input end in the afterburning circuit of close-loop feedback (X, XI).The output terminal of the afterburning circuit of close-loop feedback respectively with the POW11 of tagblock III, POW21 links to each other, the feature of circuit of the present invention is to have adopted the pre-amplification circuit of Low ESR input and feedback electrostatic force to adopt differential DC voltage mode.
The turn ratio of its webbing of the transformer of coiling and secondary is 10: 50 on little magnet ring.
Description of drawings
Fig. 1: be correlation technique ADXL50 structural representation
Fig. 2: be the synoptic diagram of the micro mechanical structure of comb teeth type body silicon working microchemical accelerometer of the present invention
Fig. 3: be circuit theory diagrams of the present invention
Fig. 4: be the B-B cut-open view of Fig. 2
Embodiment
Embodiments of the invention comb teeth type body silicon working microchemical accelerometer (seeing Fig. 2,4).Comprise: a responsive mass elements 21 of forming by tooth pivot 24, the moving tooth 23 of many groups and folded beam 22, fixed teeth 25 and substrate 27; Should moving tooth 23 be stretched out to both sides by tooth pivot 24, form bilateral comb-tooth-type structure, the folded beam 22 at these tooth pivot two ends is fixed on the substrate 27 by column 26, makes tooth pivot, moving unsettled the be arrangeding in parallel of the relative substrate of tooth of many groups; This fixed teeth 25 is for directly being fixed on the one-sided comb-tooth-type structure of on-chip many groups; The moving tooth of each of said responsive mass elements is a float electrode of variable capacitance, and is interconnected with each broach of fixed teeth, totally forms differential capacitor; Present embodiment is with existing difference of deciding the comb-tooth-type surface working micro mechanical structure of the even configuration of tooth, each broach of said responsive mass elements two constant pitch adjacent with it are from not waiting, the both sides distance ratio is 1: 10, and form and be symmetrically distributed with tooth pivot mid point, the electric capacity that the little side of main responsive distance forms can be ignored the electric capacity apart from a big side.Some to moving electric capacity and the differential afterburning electric capacity that tooth and quiet tooth form overall differential detection.In addition, the fixed teeth structure of present embodiment is more simple, is convenient to bonding.
The micro mechanical structure of present embodiment can be used for accelerometer, specifically is of a size of:
The responsive mass elements 1500 μ m of general plane size 2.8mm * 2.8mm * 1000 μ m;
The long 270 μ m of broach, wide 6 μ m, it is long by 250 to decide tooth and moving tooth lap, the long 20 μ m of non-overlapped part;
Total number of teeth 22 * 2 * 2, broach gap d 0=2 μ m D0=2 μ m;
One-sided detection comb quantity n
1=13 force feedback broach are counted n
2=9;
Detect electric capacity 1.15pF, afterburning electric capacity 0.8pF; Responsive mass elements quality 77.6 μ g
The folding wide 2.5 μ m of beam length 370 μ m, the long 27 μ m in folded beam termination, wide 30 μ m;
Deciding tooth two the moving space widths adjacent with it in the present embodiment is d
0(2.0 μ m) and D
0(be about d
010 times).Like this, just formed the comb-tooth-type accelerometer of fixed tooth offset structure.Work as D
0＞＞d
0The time, D
0One lateral capacitance can be ignored.
The whole big rectangular channel (hole) of opening below the whole moving plate structure of accelerometer, because this groove is darker, so the bottom surface of groove just can ignore the influence of the electrostatic force of accelerometer broach, pendulum, therefore, surface requirements to groove is very low, easier realization on the technology.Concrete grammar is: with buffered hydrofluoric acid (BHF) solution corrosion, by the reaction time controlling depth.In addition,, there is bigger sideetching, must reserves the etching surplus in order to avoid lateral erosion has been annexed the bonding area of fixed fingers and had influence on bond strength so choose at the planar dimension of groove because groove on glass is darker.By list of references and individual event technological experiment, for the dark groove of 20 μ m, etch amount is to get final product about 10 μ m, for the sake of assurance, stays 20 μ m.
Claims (2)
1, a kind of micro mechanical structure of comb teeth type body silicon working microchemical accelerometer comprises a responsive mass elements of being made up of tooth pivot, the moving tooth of many groups and folded beam, fixed teeth and substrate; Should be stretched out to both sides by the tooth pivot by moving tooth, form bilateral comb-tooth-type structure, these tooth pivot two ends are fixed on the substrate by column, make tooth pivot, moving unsettled the be arrangeding in parallel of the relative substrate of tooth of many groups; The moving tooth of each of said responsive mass elements is a float electrode of variable capacitance, and is interconnected with each broach of fixed teeth, totally forms differential capacitor, it is characterized in that having on the substrate below the responsive mass elements groove.
2, a kind of circuit of comb teeth type body silicon working microchemical accelerometer, comprise sinusoidal signal generation circuit, the transformer of coiling on little magnet ring, the tagblock that is connected with reference point on the micro mechanical structure, pre-amplification circuit, ac amplifier circuit, phase-adjusting circuit, detuner, low-pass filter circuit, the proportional-plus-integral correcting circuit is characterized in that pre-amplification circuit is that the closed loop static that Low ESR input circuit and proportional-plus-integral correcting circuit output terminal add differential DC voltage mode feeds back afterburning circuit.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021036128A CN1139815C (en) | 2002-01-29 | 2002-01-29 | Comb teeth type body silicon working microchemical accelerometer |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021036128A CN1139815C (en) | 2002-01-29 | 2002-01-29 | Comb teeth type body silicon working microchemical accelerometer |
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| CN1359007A true CN1359007A (en) | 2002-07-17 |
| CN1139815C CN1139815C (en) | 2004-02-25 |
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Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101382564B (en) * | 2007-09-07 | 2011-03-02 | 原相科技股份有限公司 | Micromachined sensors |
| CN102030302A (en) * | 2009-10-06 | 2011-04-27 | 罗伯特·博世有限公司 | Micromechanical structure and method for manufacturing micromechanical structure |
| CN102879607A (en) * | 2012-09-20 | 2013-01-16 | 北京金禾天晟高新技术有限责任公司 | Micro-electro-mechanical accelerometer and manufacturing method thereof |
| CN103792268A (en) * | 2014-02-19 | 2014-05-14 | 苏州能斯达电子科技有限公司 | Differential capacitance type hydrogen sensor |
| CN103792267A (en) * | 2014-02-19 | 2014-05-14 | 苏州能斯达电子科技有限公司 | Differential capacitive humidity sensor |
| CN103901228A (en) * | 2014-04-08 | 2014-07-02 | 清华大学 | Accelerometer |
| CN104535796A (en) * | 2014-12-18 | 2015-04-22 | 清华大学 | Three-electrode micromechanical accelerometer digital close-loop control circuit and interface circuit thereof and three-electrode micromechanical accelerometer system |
| CN104614552A (en) * | 2014-12-18 | 2015-05-13 | 清华大学 | Five-electrode micromechanical accelerometer digital closed loop control circuit and interface circuit thereof and five-electrode micromechanical accelerometer system |
| CN105021087A (en) * | 2015-07-28 | 2015-11-04 | 安徽工程大学 | Interaction force measuring device of human-gun system |
| CN105372452A (en) * | 2014-08-15 | 2016-03-02 | 精工爱普生株式会社 | Physical quantity sensor, physical quantity sensor apparatus, electronic device, and mobile body |
| CN106841682A (en) * | 2015-09-18 | 2017-06-13 | 精工爱普生株式会社 | Physical quantity transducer, physical quantity sensor device, electronic equipment and moving body |
| CN109425756A (en) * | 2017-08-25 | 2019-03-05 | 精工爱普生株式会社 | Physical quantity transducer, physical quantity sensor device, electronic equipment and moving body |
| CN111551761A (en) * | 2020-04-03 | 2020-08-18 | 四川知微传感技术有限公司 | Low-noise MEMS accelerometer |
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2002
- 2002-01-29 CN CNB021036128A patent/CN1139815C/en not_active Expired - Fee Related
Cited By (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101382564B (en) * | 2007-09-07 | 2011-03-02 | 原相科技股份有限公司 | Micromachined sensors |
| CN102030302B (en) * | 2009-10-06 | 2015-08-26 | 罗伯特·博世有限公司 | Micro mechanical structure and the method for the manufacture of micro mechanical structure |
| CN102030302A (en) * | 2009-10-06 | 2011-04-27 | 罗伯特·博世有限公司 | Micromechanical structure and method for manufacturing micromechanical structure |
| CN102879607B (en) * | 2012-09-20 | 2014-08-06 | 北京金禾天晟高新技术有限责任公司 | Micro-electro-mechanical accelerometer and manufacturing method thereof |
| CN102879607A (en) * | 2012-09-20 | 2013-01-16 | 北京金禾天晟高新技术有限责任公司 | Micro-electro-mechanical accelerometer and manufacturing method thereof |
| CN103792267A (en) * | 2014-02-19 | 2014-05-14 | 苏州能斯达电子科技有限公司 | Differential capacitive humidity sensor |
| CN103792268A (en) * | 2014-02-19 | 2014-05-14 | 苏州能斯达电子科技有限公司 | Differential capacitance type hydrogen sensor |
| CN103792267B (en) * | 2014-02-19 | 2015-12-02 | 苏州能斯达电子科技有限公司 | A kind of differential capacitance type humidity sensor |
| CN103792268B (en) * | 2014-02-19 | 2015-12-09 | 苏州能斯达电子科技有限公司 | A kind of differential capacitance type hydrogen gas sensor |
| CN103901228A (en) * | 2014-04-08 | 2014-07-02 | 清华大学 | Accelerometer |
| CN103901228B (en) * | 2014-04-08 | 2017-01-04 | 清华大学 | A kind of accelerometer |
| CN105372452B (en) * | 2014-08-15 | 2019-09-20 | 精工爱普生株式会社 | Physical quantity transducer, physical quantity sensor device, electronic equipment and moving body |
| CN105372452A (en) * | 2014-08-15 | 2016-03-02 | 精工爱普生株式会社 | Physical quantity sensor, physical quantity sensor apparatus, electronic device, and mobile body |
| CN104535796A (en) * | 2014-12-18 | 2015-04-22 | 清华大学 | Three-electrode micromechanical accelerometer digital close-loop control circuit and interface circuit thereof and three-electrode micromechanical accelerometer system |
| CN104614552A (en) * | 2014-12-18 | 2015-05-13 | 清华大学 | Five-electrode micromechanical accelerometer digital closed loop control circuit and interface circuit thereof and five-electrode micromechanical accelerometer system |
| CN105021087A (en) * | 2015-07-28 | 2015-11-04 | 安徽工程大学 | Interaction force measuring device of human-gun system |
| CN106841682A (en) * | 2015-09-18 | 2017-06-13 | 精工爱普生株式会社 | Physical quantity transducer, physical quantity sensor device, electronic equipment and moving body |
| CN109425756A (en) * | 2017-08-25 | 2019-03-05 | 精工爱普生株式会社 | Physical quantity transducer, physical quantity sensor device, electronic equipment and moving body |
| CN111551761A (en) * | 2020-04-03 | 2020-08-18 | 四川知微传感技术有限公司 | Low-noise MEMS accelerometer |
| CN111551761B (en) * | 2020-04-03 | 2021-11-30 | 四川知微传感技术有限公司 | Low-noise MEMS accelerometer |
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| CN1139815C (en) | 2004-02-25 |
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