CN103792268A - Differential capacitance type hydrogen sensor - Google Patents
Differential capacitance type hydrogen sensor Download PDFInfo
- Publication number
- CN103792268A CN103792268A CN201410056439.6A CN201410056439A CN103792268A CN 103792268 A CN103792268 A CN 103792268A CN 201410056439 A CN201410056439 A CN 201410056439A CN 103792268 A CN103792268 A CN 103792268A
- Authority
- CN
- China
- Prior art keywords
- comb electrodes
- folding spring
- fixed
- electrode
- hydrogen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
The invention discloses a differential capacitance type hydrogen sensor which comprises a substrate, a fixed comb teeth electrode, a movable comb teeth electrode, a first folding spring, a second folding spring and a hydrogen sensitive strain layer, wherein one end of the first folding spring is connected with the upper end of the movable comb teeth electrode, and the other end of the first folding spring is fixed on the substrate; one end of the second folding spring is connected with the lower end of the movable comb teeth electrode, and the other end of the second folding spring is fixed on the substrate; the first folding spring, the second folding spring and the movable comb teeth electrode are in a cantilever beam structure and are suspended above the substrate; the fixed comb teeth electrode and the movable comb teeth electrode are staggered to form differential capacitance; the hydrogen sensitive strain layer is arranged in the first or second folding spring, so that the hydrogen sensitive strain layer can drive the cantilever beam structure to move after absorbing hydrogen to swell, and the distance between the movable comb teeth electrode and the fixed comb teeth electrode is changed. According to the technical scheme in the embodiment of the invention, the defects that the traditional hydrogen sensor is high in operating temperature and short in service life and the like are overcome.
Description
Technical field
The present invention relates to hydrogen gas sensor technical field, relate in particular to a kind of differential capacitance type hydrogen gas sensor.
Background technology
Hydrogen, as one of a kind of free of contamination clean secondary energy, receives much concern in worldwide.But the molecular weight of hydrogen is very little, in production, use and transportation, very easily leak, and the explosion limits of hydrogen is 4.0～74.2%, thereby the hydrogen content in air and specific environment is carried out in site measurement fast and accurately, have broad application prospects.Existing hydrogen gas sensor comprises semi-conductor type, electrothermic type, optical type etc.The working temperature of semi-conductor type and electrothermic type is often very high, both consumes energy, and also can bring in actual applications potential safety hazard.It is β phase by α phase transformation afterwards that optical type hydrogen gas sensor utilizes palladium to absorb hydrogen, and its optical property changes to measure, and without heating, compares semi-conductor type safer.But up to the present, also there are some shortcomings in optical type hydrogen gas sensor, and as being prone to delamination, foaming at palladium layer after circulation repeatedly, thereby serviceable life is shorter, and its measurement often relies on complicated optical device, and cost of manufacture is very high.The mechanism changing according to noble metal absorption hydrogen physical characteristicss such as palladiums, hydrogen gas sensor based on surperficial bulk acoustic wave was also proposed in recent years, hydrogen gas sensor as micro-in patent surface acoustic wave and preparation technology thereof (application number: the hydrogen gas sensor 200710025221.4) is made up of palladium-silver film and tin dioxide thin film, tin dioxide thin film depends in piezoelectric substrate, palladium-silver film depends on above tin dioxide thin film, thereby form double-deck sensitive thin film, its working temperature is also normal temperature, but its shortcoming is the same with optical type, and the life-span is shorter.
Summary of the invention
For the defect of hydrogen gas sensor in prior art, the embodiment of the present invention proposes a kind of differential capacitance type hydrogen gas sensor, and the working temperature that overcomes traditional hydrogen gas sensor is high, and serviceable life, short grade was not enough.
The embodiment of the present invention provides a kind of differential capacitance type hydrogen gas sensor, comprises the responsive strained layer of substrate, fixed fingers electrode, activity comb electrodes, the first folding spring, the second folding spring and hydrogen; Described the first folding spring one end in flexible direction is connected with the upper end of described activity comb electrodes, and the other end in flexible direction is fixed on described substrate; Described the second folding spring one end in flexible direction is connected with the lower end of described activity comb electrodes, and the other end in flexible direction is fixed on described substrate; Described the first folding spring, described the second folding spring and described activity comb electrodes form cantilever beam structure, are suspended at the top of described substrate; Described fixed fingers electrode is fixed on described substrate, and described fixed fingers electrode and the interlaced formation differential type of activity comb electrodes electric capacity; The responsive strained layer of described hydrogen is arranged in described the first folding spring or described the second folding spring, the responsive strained layer of described hydrogen is being absorbed after hydrogen expander, can drive described the first folding spring, described the second folding spring and described activity comb electrodes to move, change the spacing of described activity comb electrodes and described fixed fingers electrode; The responsive strained layer of described hydrogen comprises: palladium or palldium alloy sense hydrogen layer; On described the first folding spring, the second folding spring and fixed fingers electrode, be provided with the metal electrode of the capacitance for measuring described differential type electric capacity.
Further, described activity comb electrodes comprises coupling shaft, the first float electrode unit and the second float electrode unit; Described the first float electrode unit comprises multiple comb electrodes, and the spacing between adjacent fingers electrode is X; Described the second float electrode unit comprises multiple comb electrodes, and the spacing between adjacent fingers electrode is X; Wherein, X > 0; Each comb electrodes in described the first float electrode unit is connected to the left side of described coupling shaft, and perpendicular to described coupling shaft; Each comb electrodes in described the second float electrode unit is connected to the right side of described coupling shaft, and perpendicular to described coupling shaft; Each comb electrodes in each comb electrodes in described the first float electrode unit and described the second float electrode unit is mutually staggered, and the spacing staggering is Y; Y < X.
Further, described fixed fingers electrode comprises: the first fixed electorde unit and the second fixed electorde unit; Described the first fixed electorde unit comprises multiple comb electrodes, and the spacing between adjacent fingers electrode is X; Described the second fixed electorde unit comprises multiple comb electrodes, and the spacing between adjacent fingers electrode is X; Interlaced formation the first electric capacity of comb electrodes in comb electrodes in described the first fixed electorde unit and described the first float electrode unit; Interlaced formation the second electric capacity of comb electrodes in comb electrodes in described the second fixed electorde unit and described the second float electrode unit; Comb electrodes in comb electrodes in described the first fixed fingers electrode unit and described the second fixed fingers unit, about described coupling shaft symmetry, makes the first electric capacity and the second electric capacity form described differential type electric capacity.
Further, described the first folding spring one end in flexible direction is connected with the upper end of described activity comb electrodes, is specially: described the first folding spring one end in flexible direction is connected with the upper end of described coupling shaft; Described the second folding spring one end in flexible direction is connected with the lower end of described activity comb electrodes, is specially: described the second folding spring one end in flexible direction is connected with the lower end of described coupling shaft.
Further, described fixed fingers electrode is fixed on described substrate by pressure welding bar, and described pressure welding bar is also for connecting each comb electrodes of described fixed fingers electrode.
Further, the other end and the described second folding spring other end on flexible direction of described the first folding spring in flexible direction is fixed on described substrate by anchor point respectively.
Further, the responsive strained layer of described hydrogen is arranged in described the first folding spring or the second folding spring, be specially: in described the first folding spring or the second folding spring, be provided with outstanding frame, the responsive strained layer of described hydrogen is arranged in described outstanding frame.
Further, described fixed fingers electrode and described activity comb electrodes are N-type and mix silicon comb electrodes; Described the first folding spring and described the second folding spring are N-type and mix silicon spring.
Further, described substrate is glass, quartz or one side oxidized silicon chip substrate.
Further, described metal electrode is aluminium or gold electrode.
Therefore, the differential capacitance type hydrogen gas sensor that the embodiment of the present invention provides, the interlaced formation differential capacitance of fixed fingers electrode and activity comb electrodes, the top and bottom of activity comb electrodes are respectively arranged with the first folding spring and the second folding spring, and three forms a cantilever beam structure.When being arranged on that the responsive strained layer of hydrogen in the first or second folding spring absorbs hydrogen and when volumetric expansion, folding spring can be in telescopic spring direction promotion activity comb electrodes, spacing between fixed fingers electrode and activity comb electrodes is changed, thereby generation differential capacitance, then calculate corresponding density of hydrogen according to differential capacitance.Compared with three kinds of capacitive transducers of the prior art, the present embodiment technical scheme is without heating, and the responsive strained layer of its hydrogen adopts palladium or its alloy of block, the defect of having avoided adopting the solution of palladium film to bubble or come off after repeatedly circulating.And adopt MEMS fabrication techniques, and also thering is volume little, response is fast, and cost is low, is easy to the advantages such as integrated and large-scale production.
Further, activity comb electrodes comprises the first float electrode unit and the second float electrode unit, fixed fingers electrode comprises the first fixed electorde unit and the second fixed electorde unit, interlaced composition the first electric capacity in the first float electrode unit and the first fixed electorde unit, interlaced composition the second electric capacity in the second float electrode unit and the second fixed electorde unit.Be subject to density of hydrogen and while changing volume at the responsive strained layer of hydrogen, move up as volumetric expansion makes activity comb electrodes, because the first float electrode unit and the second float electrode unit exist the spacing Y staggering, the first electric capacity is reduced, the second electric capacity increases, thereby produces differential capacitance.Calculate density of hydrogen value by the capacitance of differential capacitance again, further improve the accuracy of measuring.
Accompanying drawing explanation
Fig. 1 is the structural representation of a kind of differential capacitance type hydrogen gas sensor provided by the invention.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is clearly and completely described, obviously, described embodiment is only the present invention's part embodiment, rather than whole embodiment.Based on the embodiment in the present invention, those of ordinary skills, not making the every other embodiment obtaining under creative work prerequisite, belong to the scope of protection of the invention.
Referring to Fig. 1, be the structural representation of differential capacitance type hydrogen gas sensor provided by the invention, this differential capacitance type hydrogen gas sensor comprises by substrate 10, fixed fingers electrode 2 and activity comb electrodes 1, the first folding spring 31, the second folding spring 32, the responsive strained layer 4 of hydrogen, contact conductor 9 and metal electrode 5 and 8.
Wherein, the first folding spring 31 one end in flexible direction is connected with the upper end of activity comb electrodes 1, and the other end in flexible direction is fixed on substrate 10; The second folding spring 21 one end in flexible direction is connected with the lower end of activity comb electrodes 1, is fixed on substrate 10 at the other end stretching in direction; The first folding spring 31, the second folding spring 32 and activity comb electrodes 1 form cantilever beam structure, are suspended at the top of substrate 10.Fixed fingers electrode 2 is fixed on described substrate, and fixed fingers electrode 2 and the interlaced formation differential type of activity comb electrodes 1 electric capacity.The responsive strained layer 4 of hydrogen is arranged in the first folding spring 31 or described the second folding spring 32, make the responsive strained layer 4 of hydrogen after moisture expantion, can drive the first folding spring 31, the second folding spring 32 and activity comb electrodes 1 to move, the spacing of change activity comb electrodes 1 and fixed fingers electrode 2.On the first folding spring 31, the second folding spring 32 and fixed fingers electrode 2, be provided with the metal electrode 5 and 8 of the capacitance for measuring described differential type electric capacity.
In the present embodiment, hydrogen sensitive layer 4 is arranged in the second folding spring 32, and hydrogen sensitive layer 4 can be, but not limited to as palladium or palldium alloy sense hydrogen layer.
In the present embodiment, activity comb electrodes 1 comprises coupling shaft, the first float electrode unit and the second float electrode unit; The first float electrode unit comprises multiple comb electrodes, and the spacing between adjacent fingers electrode is X; The second float electrode unit comprises multiple comb electrodes, and the spacing between adjacent fingers electrode is X; Wherein, X > 0.As shown in Figure 1, the each comb electrodes in the first float electrode unit is connected to the left side of coupling shaft, and perpendicular to coupling shaft.Each comb electrodes in the second float electrode unit is connected to the right side of coupling shaft, and perpendicular to coupling shaft; Each comb electrodes in each comb electrodes in the first float electrode unit and the second float electrode unit is mutually staggered, and the spacing staggering is Y; And Y < X.
In the present embodiment, fixed fingers electrode 2 comprises: the first fixed electorde unit and the second fixed electorde unit; The first fixed electorde unit comprises multiple comb electrodes, and the spacing between adjacent fingers electrode is X.The second fixed electorde unit comprises multiple comb electrodes, and the spacing between adjacent fingers electrode is X.Interlaced formation the first electric capacity of comb electrodes (left side electric capacity as shown in Figure 1) in comb electrodes in the first fixed electorde unit and the first float electrode unit.Interlaced formation the second electric capacity of comb electrodes (right side electric capacity as shown in Figure 1) in comb electrodes in the second fixed electorde unit and described the second float electrode unit.Comb electrodes in comb electrodes in the first fixed fingers electrode unit and the second fixed fingers unit, about coupling shaft symmetry, makes the first electric capacity and the second electric capacity form described differential type electric capacity.
In the present embodiment, because the each comb electrodes in each comb electrodes and the second float electrode unit of the first movable comb unit is mutually staggered, as shown in Figure 1, the spacing of each activity comb electrodes in left side and the each fixed fingers electrode below it is less, is designated as A; Be designated as more greatly B with the spacing of the fixed fingers electrode above it.B can be, but not limited to equal the arbitrary numerical value between 2A to 5A.The spacing of each activity comb electrodes on right side and the each fixed fingers electrode below it is larger, is designated as C; With the spacing of the fixed fingers electrode above it be D compared with short biography.C can be, but not limited to equal the arbitrary numerical value between 2D to 5D.The capacitance of the first electric capacity depends on the size of A, and the capacitance of the second electric capacity depends on the size of D.When responsive strained layer 4 moisture expantions of hydrogen, while driving the first folding spring 31, activity comb electrodes 1 and the second folding spring 32 to move up, A increases, and D reduces, and the first electric capacity is reduced, and the second electric capacity increases, thereby produces differential capacitance.
In the present embodiment, the first folding spring 31 one end in flexible direction is connected with the upper end of activity comb electrodes 1, is specially: the first folding spring 31 one end in flexible direction is connected with the upper end of coupling shaft.The second folding spring 32 one end in flexible direction is connected with the lower end of activity comb electrodes 1, is specially: the second folding spring 32 one end in flexible direction is connected with the lower end of coupling shaft.
In the present embodiment, the other end and second folding spring 32 other end on flexible direction of the first folding spring 31 in flexible direction is fixed on substrate 10 by anchor point 7 respectively.
In the present embodiment, be provided with pressure welding bar 6 in the bearing of fixed fingers electrode 2 and substrate 10, to be connected and fixed each comb electrodes in comb electrodes 2.
In the present embodiment, in the first folding spring 31 or the second folding spring 32, be provided with outstanding frame, the responsive strained layer 4 of hydrogen is arranged in outstanding frame.
In the present embodiment, metal electrode 5 is connected with fixed fingers 2, the first folding spring 31 and the second folding spring 32 respectively by contact conductor 9 with 8.This metal electrode can connect external circuit for measuring the capacitance of differential type electric capacity, thereby calculates corresponding density of hydrogen.The measuring method of this capacitance is prior art, does not repeat them here.
In the present embodiment, the layout of contact conductor 9 as shown in Figure 1 and metal electrode 5 and 8 is for balance inductance, can be, but not limited to adopt other connected mode.
In the present embodiment, fixed fingers 2 and movable broach 1 are N-type and mix silicon broach.The first folding spring 31 and the second folding spring 32 are N-type and mix silicon spring.
In the present embodiment, substrate 10 is glass, quartz or one side oxidized silicon chip substrate.
In the present embodiment, metal electrode is aluminium or gold electrode; Contact conductor is aluminium or gold wire.
Therefore, the differential capacitance type hydrogen gas sensor that the embodiment of the present invention provides, the interlaced formation differential capacitance of fixed fingers electrode 2 and activity comb electrodes 1, the top and bottom of activity comb electrodes 1 are respectively arranged with the first folding spring 31 and the second folding spring 32, and three forms a cantilever beam structure.When being arranged on that the responsive strained layer 4 of hydrogen in the first or second folding spring absorbs hydrogen and when volumetric expansion, the folding spring activity comb electrodes 1 that can move up in telescopic spring side, spacing between fixed fingers electrode 2 and activity comb electrodes 1 is changed, thereby generation differential capacitance, then calculate corresponding density of hydrogen according to differential capacitance.Compared with three kinds of capacitive transducers of the prior art, the present embodiment technical scheme is without heating, and the responsive strained layer of its hydrogen adopts palladium or its alloy of block, has avoided the defect of employing palladium film solution (repeatedly bubble or come off after circulation).And adopt MEMS fabrication techniques, and also thering is volume little, response is fast, and cost is low, is easy to the advantages such as integrated and large-scale production.
Further, activity comb electrodes 1 comprises the first float electrode unit and the second float electrode unit, fixed fingers electrode 2 comprises the first fixed electorde unit and the second fixed electorde unit, interlaced composition the first electric capacity in the first float electrode unit and the first fixed electorde unit, interlaced composition the second electric capacity in the second float electrode unit and the second fixed electorde unit.Be subject to density of hydrogen and while changing volume at the responsive strained layer 4 of hydrogen, as expanded, activity comb electrodes is moved up, because the first float electrode unit and the second float electrode unit exist the spacing Y staggering, the first electric capacity is reduced, the second electric capacity increases, thereby produces differential capacitance.Calculate density of hydrogen by the capacitance of differential capacitance again, further improve the accuracy of measuring.
The above is the preferred embodiment of the present invention; it should be pointed out that for those skilled in the art, under the premise without departing from the principles of the invention; can also make some improvements and modifications, these improvements and modifications are also considered as protection scope of the present invention.
Claims (10)
1. a differential capacitance type hydrogen gas sensor, is characterized in that, comprises the responsive strained layer of substrate, fixed fingers electrode, activity comb electrodes, the first folding spring, the second folding spring and hydrogen;
Described the first folding spring one end in flexible direction is connected with the upper end of described activity comb electrodes, and the other end in flexible direction is fixed on described substrate; Described the second folding spring one end in flexible direction is connected with the lower end of described activity comb electrodes, and the other end in flexible direction is fixed on described substrate; Described the first folding spring, described the second folding spring and described activity comb electrodes form cantilever beam structure, are suspended at the top of described substrate;
Described fixed fingers electrode is fixed on described substrate, and described fixed fingers electrode and the interlaced formation differential type of activity comb electrodes electric capacity;
The responsive strained layer of described hydrogen is arranged in described the first folding spring or described the second folding spring, described hydrogen strained layer is being absorbed after hydrogen expander, can drive described the first folding spring, described the second folding spring and described activity comb electrodes to move, change the spacing of described activity comb electrodes and described fixed fingers electrode;
The responsive strained layer of described hydrogen comprises: palladium or palldium alloy sense hydrogen layer;
On described the first folding spring, the second folding spring and fixed fingers electrode, be provided with the metal electrode of the capacitance for measuring described differential type electric capacity.
2. differential capacitance type hydrogen gas sensor according to claim 1, is characterized in that,
Described activity comb electrodes comprises coupling shaft, the first float electrode unit and the second float electrode unit; Described the first float electrode unit comprises multiple comb electrodes, and the spacing between adjacent fingers electrode is X; Described the second float electrode unit comprises multiple comb electrodes, and the spacing between adjacent fingers electrode is X; Wherein, X > 0;
Each comb electrodes in described the first float electrode unit is connected to the left side of described coupling shaft, and perpendicular to described coupling shaft; Each comb electrodes in described the second float electrode unit is connected to the right side of described coupling shaft, and perpendicular to described coupling shaft; Each comb electrodes in each comb electrodes in described the first float electrode unit and described the second float electrode unit is mutually staggered, and the spacing staggering is Y; Y < X.
3. differential capacitance type hydrogen gas sensor according to claim 2, is characterized in that,
Described fixed fingers electrode comprises: the first fixed electorde unit and the second fixed electorde unit; Described the first fixed electorde unit comprises multiple comb electrodes, and the spacing between adjacent fingers electrode is X; Described the second fixed electorde unit comprises multiple comb electrodes, and the spacing between adjacent fingers electrode is X;
Interlaced formation the first electric capacity of comb electrodes in comb electrodes in described the first fixed electorde unit and described the first float electrode unit;
Interlaced formation the second electric capacity of comb electrodes in comb electrodes in described the second fixed electorde unit and described the second float electrode unit;
Comb electrodes in comb electrodes in described the first fixed fingers electrode unit and described the second fixed fingers unit, about described coupling shaft symmetry, makes the first electric capacity and the second electric capacity form described differential type electric capacity.
4. differential capacitance type hydrogen gas sensor according to claim 2, is characterized in that,
Described the first folding spring one end in flexible direction is connected with the upper end of described activity comb electrodes, is specially: described the first folding spring one end in flexible direction is connected with the upper end of described coupling shaft;
Described the second folding spring one end in flexible direction is connected with the lower end of described activity comb electrodes, is specially: described the second folding spring one end in flexible direction is connected with the lower end of described coupling shaft.
5. differential capacitance type hydrogen gas sensor according to claim 3, is characterized in that,
Described fixed fingers electrode is fixed on described substrate by pressure welding bar, and described pressure welding bar is also for connecting each comb electrodes of described fixed fingers electrode.
6. differential capacitance type hydrogen gas sensor according to claim 1, is characterized in that,
The other end and the described second folding spring other end on flexible direction of described the first folding spring in flexible direction is fixed on described substrate by anchor point respectively.
7. be worth 6 arbitrary described differential capacitance type hydrogen gas sensors according to claim 1, it is characterized in that,
The responsive strained layer of described hydrogen is arranged in described the first folding spring or the second folding spring, is specially:
In described the first folding spring or the second folding spring, be provided with outstanding frame, the responsive strained layer of described hydrogen is arranged in described outstanding frame.
8. according to the arbitrary described differential capacitance type hydrogen gas sensor of claim 1 to 6, it is characterized in that,
Described fixed fingers electrode and described activity comb electrodes are N-type and mix silicon comb electrodes;
Described the first folding spring and described the second folding spring are N-type and mix silicon spring.
9. according to the arbitrary described differential capacitance type hydrogen gas sensor of claim 1 to 6, it is characterized in that,
Described substrate is glass, quartz or one side oxidized silicon chip substrate.
10. according to the arbitrary described differential capacitance type hydrogen gas sensor of claim 1 to 6, it is characterized in that,
Described metal electrode is aluminium or gold electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410056439.6A CN103792268B (en) | 2014-02-19 | 2014-02-19 | A kind of differential capacitance type hydrogen gas sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410056439.6A CN103792268B (en) | 2014-02-19 | 2014-02-19 | A kind of differential capacitance type hydrogen gas sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103792268A true CN103792268A (en) | 2014-05-14 |
| CN103792268B CN103792268B (en) | 2015-12-09 |
Family
ID=50668139
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410056439.6A Active CN103792268B (en) | 2014-02-19 | 2014-02-19 | A kind of differential capacitance type hydrogen gas sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103792268B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105731359A (en) * | 2014-12-26 | 2016-07-06 | 株式会社东芝 | Sensor and its manufacturing method |
| CN107589155A (en) * | 2017-09-12 | 2018-01-16 | 华南师范大学 | A kind of capacitance type sensor and preparation method thereof |
| CN108226235A (en) * | 2016-12-21 | 2018-06-29 | 中国矿业大学 | A kind of capacitive MEMS gas sensor |
| CN110086376A (en) * | 2019-05-07 | 2019-08-02 | 湖南工程学院 | Small-sized wind energy collector with frequency and displacement equations effect |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1359007A (en) * | 2002-01-29 | 2002-07-17 | 清华大学 | Comb teeth type body silicon working microchemical accelerometer |
| CN1820191A (en) * | 2004-02-13 | 2006-08-16 | 东京毅力科创株式会社 | Capacitive sensor |
| US20080257037A1 (en) * | 2007-04-20 | 2008-10-23 | Denso Corporation | Humidity sensor |
| CN202049131U (en) * | 2011-04-20 | 2011-11-23 | 东南大学 | Capacitive relative humidity sensor of microelectronic mechanical system |
| CN102269868A (en) * | 2011-07-08 | 2011-12-07 | 西安励德微***科技有限公司 | Micro torsion mirror with trench-isolated mirror surface and manufacturing method thereof |
| WO2012148254A1 (en) * | 2011-04-26 | 2012-11-01 | Mimos Berhad | A humidity sensor device |
-
2014
- 2014-02-19 CN CN201410056439.6A patent/CN103792268B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1359007A (en) * | 2002-01-29 | 2002-07-17 | 清华大学 | Comb teeth type body silicon working microchemical accelerometer |
| CN1820191A (en) * | 2004-02-13 | 2006-08-16 | 东京毅力科创株式会社 | Capacitive sensor |
| US20080257037A1 (en) * | 2007-04-20 | 2008-10-23 | Denso Corporation | Humidity sensor |
| CN202049131U (en) * | 2011-04-20 | 2011-11-23 | 东南大学 | Capacitive relative humidity sensor of microelectronic mechanical system |
| WO2012148254A1 (en) * | 2011-04-26 | 2012-11-01 | Mimos Berhad | A humidity sensor device |
| CN102269868A (en) * | 2011-07-08 | 2011-12-07 | 西安励德微***科技有限公司 | Micro torsion mirror with trench-isolated mirror surface and manufacturing method thereof |
Non-Patent Citations (2)
| Title |
|---|
| TAMAL MUKHERJEE, GARY K. FEDDER.: "《Structured Design Of Microelectromechanical Systems》", 《PROCEEDINGS OF 34TH DESIGN AUTOMATION CONFERENCE》, 31 December 1997 (1997-12-31) * |
| 胡建东 等.: "《表面等离子共振金/钯复合膜氢敏传感器》", 《光学技术》, vol. 30, no. 6, 30 November 2004 (2004-11-30) * |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105731359A (en) * | 2014-12-26 | 2016-07-06 | 株式会社东芝 | Sensor and its manufacturing method |
| US9921238B2 (en) | 2014-12-26 | 2018-03-20 | Kabushiki Kaisha Toshiba | Sensor and its manufacturing method |
| CN108226235A (en) * | 2016-12-21 | 2018-06-29 | 中国矿业大学 | A kind of capacitive MEMS gas sensor |
| CN108226235B (en) * | 2016-12-21 | 2020-12-15 | 中国矿业大学 | Capacitive MEMS gas sensor |
| CN107589155A (en) * | 2017-09-12 | 2018-01-16 | 华南师范大学 | A kind of capacitance type sensor and preparation method thereof |
| WO2019052037A1 (en) * | 2017-09-12 | 2019-03-21 | 深圳市国华光电科技有限公司 | Capacitive sensor and preparation method therefor |
| CN110086376A (en) * | 2019-05-07 | 2019-08-02 | 湖南工程学院 | Small-sized wind energy collector with frequency and displacement equations effect |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103792268B (en) | 2015-12-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103792267B (en) | A kind of differential capacitance type humidity sensor | |
| CN101692099B (en) | Piezoresistive double-shaft micro-accelerometer with on-chip zero offset compensation and manufacturing method thereof | |
| CN103792268B (en) | A kind of differential capacitance type hydrogen gas sensor | |
| CN103543287B (en) | A kind of spherical wind speed wind direction sensor structure | |
| CN103076464B (en) | Wind-speed and wind-direction sensor | |
| CN103487474B (en) | A kind of have the MEMS capacitive humidity sensor that high sensitivity quickly responds | |
| CN103983395B (en) | A kind of micropressure sensor and preparation thereof and detection method | |
| CN103063876A (en) | Variable area type capacitive horizontal accelerated speed sensor and manufacture method | |
| CN202815008U (en) | Accelerometer | |
| CN103278659A (en) | Wind speed sensor based on stress measurement | |
| CN101482441B (en) | Dual-spindle surface shearing stress sensor | |
| CN104133080A (en) | Comb tooth capacitance-typed micro-accelerometer | |
| CN104198762A (en) | Eight-beam symmetrical silicon micro-accelerometer | |
| CN202815009U (en) | Accelerometer | |
| CN109818088A (en) | A kind of Fast Evaluation lithium ion battery pressure risk device | |
| CN103604535B (en) | Residual stress testing structure based on difference capacitor bridge | |
| CN209894749U (en) | Double-capacitor temperature and humidity sensor | |
| CN104034575B (en) | Thin film silicon material Poisson ratio test structure and method in dielectric substrate | |
| CN103645219B (en) | Multrirange CMOS MEMS capacitive humidity sensor | |
| CN204028106U (en) | Comb capacitance type micro-acceleration gauge | |
| CN2862025Y (en) | Portable oil-water interface detector | |
| CN103675041A (en) | Multi-range interdigital capacitive humidity sensor | |
| CN206671407U (en) | A kind of thermoelectric material test device | |
| CN105241584A (en) | Capacitive pressure sensor | |
| CN202676161U (en) | Resistance strain type level gauge |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CB03 | Change of inventor or designer information |
Inventor after: Shen Fangping Inventor after: Qi Mingfeng Inventor after: Liu Rui Inventor after: Ding Haiyan Inventor before: Shen Fangping Inventor before: Zhang Ting Inventor before: Qi Mingfeng Inventor before: Liu Rui Inventor before: Ding Haiyan |
|
| CB03 | Change of inventor or designer information |