CN114264841B - High-sensitivity open-loop MEMS accelerometer sensor structure - Google Patents
High-sensitivity open-loop MEMS accelerometer sensor structure Download PDFInfo
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- CN114264841B CN114264841B CN202111422447.4A CN202111422447A CN114264841B CN 114264841 B CN114264841 B CN 114264841B CN 202111422447 A CN202111422447 A CN 202111422447A CN 114264841 B CN114264841 B CN 114264841B
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- 238000001514 detection method Methods 0.000 claims abstract description 43
- 230000001133 acceleration Effects 0.000 claims abstract description 18
- 238000006073 displacement reaction Methods 0.000 claims abstract description 12
- 244000126211 Hericium coralloides Species 0.000 claims description 60
- 230000035945 sensitivity Effects 0.000 claims description 12
- 239000003990 capacitor Substances 0.000 claims description 5
- 230000003139 buffering effect Effects 0.000 claims description 4
- 238000001179 sorption measurement Methods 0.000 abstract description 2
- 238000010276 construction Methods 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
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- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
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Abstract
The invention provides a high-sensitivity open-loop MEMS accelerometer sensor structure, wherein all the structural parts are symmetrically distributed; the sensitive mass body is supported by a plurality of groups of support beams in parallel connection, when the sensitive mass body is input by external acceleration signals, tiny displacement occurs, and the capacitance value of the detection electrode is changed. The magnitude of the input acceleration is detected by demodulating the capacitance value of the detection electrode. And a certain voltage is applied to the orthogonal compensation electrode, so that the sensitive mass body can be driven to rotate slightly, the processing error of the sensor structure is eliminated, and the accuracy of the sensor is improved. The anchor point on the frame construction can physically prevent the sensitive period mass body from generating excessive displacement when the sensitive period mass body is input by excessive acceleration, thereby causing structural body damage and comb teeth adsorption. The device reduces the processing error of the sensor, improves the working stability of the sensor, is firm in support, and does not limit and improves the working characteristics of the MEMS accelerometer.
Description
Technical Field
The invention belongs to the field of MEMS capacitive acceleration sensors, and particularly relates to a high-sensitivity open-loop MEMS accelerometer sensor structure.
Background
The MEMS accelerometer sensor structure is a component of a MEMS accelerometer that is an actuating structure for the MEMS accelerometer to measure acceleration signals. Under the control of the control circuit, the sensor structure can change the position of the sensitive mass under the action of inertial force when the acceleration signal acts, and then the control circuit calculates the acceleration signal. The existing MEMS accelerometer is heavy, the sensor structure adopts 4 cantilever beams to support, and in addition, the sensor processing error causes the defects of poor working stability, easy torsion and the like of the sensor, and limits the working characteristics of the MEMS accelerometer.
Disclosure of Invention
The invention aims to provide a novel high-sensitivity open-loop MEMS accelerometer sensor structure to overcome the asymmetry in accelerometer structure processing, improve the orthogonality of an acceleration sensitive axis and finally improve the nonlinear index of the MEMS accelerometer.
The technical scheme of the invention is as follows: a high-sensitivity open-loop MEMS accelerometer sensor structure comprises an orthogonal compensation electrode comb structure 1, a frame structure 2, a detection electrode comb structure 3, a sensitive mass body 4, an anchor point 5, a supporting beam 6 and a limiting structure 7;
the anchor points 5 are used for fixing sensors and are distributed at four corners of the frame structure 2;
the orthogonal compensation electrode comb tooth structure 1, the detection electrode comb tooth structure 3, the sensitive mass body 4 and the limiting structure 7 are positioned at the inner side of the frame structure 2, the sensitive mass body 4 is supported by a supporting beam 6, one end of the supporting beam 6 is fixedly connected with the sensitive mass body 4, and the other end is fixedly connected with the frame structure 2;
the orthogonal compensation electrode comb tooth structure 1 comprises an orthogonal compensation electrode movable comb tooth and an orthogonal compensation electrode fixed comb tooth, wherein the orthogonal compensation electrode movable comb tooth is fixedly connected with the sensitive mass body 4, the orthogonal compensation electrode fixed comb tooth is fixed on the anchor point 5, and the orthogonal compensation electrode movable comb tooth and the orthogonal compensation electrode fixed comb tooth are mutually spliced to form the orthogonal compensation electrode comb tooth structure 1;
the detection electrode comb tooth structure 3 comprises a detection electrode movable comb tooth and a detection electrode fixed comb tooth, wherein the detection electrode movable comb tooth is fixedly connected with the sensitive mass body 4, the detection electrode fixed comb tooth is fixed on the anchor point 5, and the detection electrode movable comb tooth and the detection electrode fixed comb tooth are mutually spliced to form the detection electrode comb tooth structure 3;
the gaps between the movable comb teeth of the orthogonal compensation electrode and the fixed comb teeth of the orthogonal compensation electrode at two sides are divided into a wide gap and a narrow gap, and the wide gap is 3 to 5 times of the narrow gap; the gaps between the movable comb teeth of the detection electrode and the fixed comb teeth of the detection electrode at two sides are divided into a wide gap and a narrow gap, and the wide gap is 3 to 5 times of the narrow gap;
and two ends of the sensitive mass body 4 are provided with limiting structures 7, and in a stable state, a gap exists between the sensitive mass body 4 and the limiting structures 7, wherein the gap is not more than a set value, and the set value is determined according to the maximum displacement allowed by the sensitive mass body under the action of acceleration.
The invention further adopts the technical scheme that: the narrow gap is 2-8 um, and the wide gap is 5-25 um.
The invention further adopts the technical scheme that: the supporting beam 6 is formed by combining a plurality of elastic beams in parallel, and is symmetrically distributed on the upper side and the lower side of the sensitive mass body 4.
The invention further adopts the technical scheme that: the comb tooth structures are divided into four pairs of eight groups, wherein the four groups of orthogonal compensation electrode comb tooth structures 1 are distributed at four corners of the frame structure 2 and symmetrically positioned at the upper side and the lower side of the two ends of the sensitive mass body 4 to form orthogonal compensation electrode differential capacitance pairs; the detecting electrode comb tooth structures 3 are four groups and distributed on the upper side and the lower side of the sensitive mass body 4 in the middle of the frame structure 2, and detecting electrode differential capacitance pairs are arranged.
The invention further adopts the technical scheme that: the orthogonal compensation electrode comb tooth structure 1 is formed in a film pressing capacitance mode.
The invention further adopts the technical scheme that: the detection electrode comb tooth structure 3 is formed in a film pressing capacitance mode.
The invention further adopts the technical scheme that: the width of the supporting beam 6 is 5-15 um.
The invention further adopts the technical scheme that: the number of anchor points 5 is at least 4 and even and is evenly distributed along the sensitive mass.
The invention further adopts the technical scheme that: the limiting points 7 can prevent the sensitive mass body 4 from continuing to precess, limit and prevent the comb teeth from being attracted and twisted, and realize the rebound buffering function.
Effects of the invention
The invention has the technical effects that:
the invention provides a high-sensitivity open-loop MEMS accelerometer sensor structure, wherein all the structural parts are symmetrically distributed; the sensitive mass body is supported by a plurality of groups of support beams in parallel connection, when the sensitive mass body is input by external acceleration signals, tiny displacement occurs, and the capacitance value of the detection electrode is changed. The magnitude of the input acceleration is detected by demodulating the capacitance value of the detection electrode. And a certain voltage is applied to the orthogonal compensation electrode, so that the sensitive mass body can be driven to rotate slightly, the processing error of the sensor structure is eliminated, and the accuracy of the sensor is improved. And the limiting structure on the frame structure can physically prevent the mass body in the sensitive period from excessively displacing when the mass body in the sensitive period is subjected to excessive acceleration input, so that the structural body is damaged and the comb teeth are adsorbed. By means of orthogonal electrode compensation, sensor processing errors are reduced, and stability of sensor operation is improved, so that the sensor is free from torsion. The sensitive mass body and the frame are connected through a plurality of groups of parallel supporting beams which are vertically and bilaterally symmetrical, the supporting points are more, the supporting is firm, and the working characteristics of the MEMS accelerometer are improved.
Drawings
Fig. 1 is a schematic diagram of a MEMS capacitive acceleration mass limit point.
Fig. 2 is an enlarged view of the comb structure.
Reference numerals illustrate: 1-an orthogonal compensation electrode comb tooth structure; 2-frame structure; 3-detecting an electrode comb structure; 4-sensitive mass; 5-anchor points; 6-a support beam; 7-limit point
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments. The components of the embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the invention, as presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, based on the embodiments of the invention, which are apparent to those of ordinary skill in the art without inventive faculty, are intended to be within the scope of the invention.
In addition, the embodiments of the present invention and the features of the embodiments may be combined with each other without collision.
The present invention will be described in detail below with reference to the drawings and the detailed description, but is not limited thereto.
The exemplary embodiments and descriptions of the present invention are provided herein for the purpose of illustration and are not intended to be limiting.
A sensor structure of a high-sensitivity open-loop MEMS accelerometer is formed by one-step processing by adopting a deep silicon etching process, and comprises an orthogonal compensation electrode comb tooth structure 1, a frame structure 2, a detection electrode comb tooth structure 3, a sensitive mass body 4, an anchor point 5, a supporting beam 6 and a limit point 7. The sensitive mass body is fixedly connected with the movable comb teeth of the orthogonal compensation electrode comb tooth structure and the movable comb teeth of the detection electrode comb tooth structure and supported by the supporting beam. The frame structure is fixedly connected with the limiting point, the fixed end of the supporting beam and the anchor point. The anchor points are used to fix the entire sensor structure.
The supporting beam 6 is formed by combining a plurality of elastic beams which are connected in parallel and symmetrically distributed on the upper side and the lower side of the sensitive mass body 4. The support beam 6 is rigidly connected to the sensitive mass 4.
The movable comb teeth of the orthogonal compensation electrode comb tooth structure 1 are fixedly connected with the sensitive mass body 4 and are distributed symmetrically up and down along the sensitive mass body 4. The movable comb teeth of the detection electrode comb tooth structure 3 are fixedly connected with the sensitive mass body 4 and are distributed symmetrically up and down along the sensitive mass body 4.
The anchor points 5 are fixedly connected with the frame structure 2 and support the entire sensor structure. The number of anchor points is at least 4, but may be greater than 4, but even in number and evenly distributed along the sensitive mass. In this embodiment, the anchor points 5 are symmetrically distributed at the 4 corner positions of the frame structure 2. The anchor point 5 is fixedly connected with the fixed comb teeth of the orthogonal compensation electrode comb tooth structure 1 and the fixed comb teeth of the detection electrode comb tooth structure 3, and has a fixing effect on the fixed comb teeth of the orthogonal compensation electrode comb tooth structure 1 and the fixed comb teeth of the detection electrode comb tooth structure 3.
The orthogonal compensation electrode comb tooth structure 1 and the detection electrode comb tooth structure 3 are formed by adopting a film pressing capacitance mode. Two pairs of orthogonal compensation electrode comb tooth structures which are distributed vertically symmetrically on the sensitive mass body form an orthogonal compensation electrode differential capacitance pair; the two pairs of detection electrode comb teeth which are distributed vertically symmetrically on the sensitive mass body form a detection electrode differential capacitance pair.
For the rest of the comb teeth except the comb teeth at two ends, the distance between each comb tooth and the adjacent comb teeth is divided into a wide gap and a narrow gap, in order to improve the sensitivity, the gap is required to be 2-8 um, the wide gap is required to be 5-25 um, the same time slot is 3-5 times of the narrow gap, the sensitivity is improved through the range setting of the narrow gap, the quadrature compensation force is provided, the narrow gap cannot be too small, otherwise, structural damage is easily caused by absorption collision, the structure damage cannot be too large, and otherwise, the sensitivity is too low.
The width of the supporting beam for supporting the sensitive mass body structure is 5-15 um, and the purpose of the supporting beam is to improve the sensitivity, and the width of the supporting beam is not too small, so that structural damage caused by adsorption collision is prevented, and the supporting beam is not too large, otherwise, the sensitivity is too low.
The limiting points 7 are uniformly distributed on two sides of the sensitive mass body 4, and in a stable state, gaps exist between the sensitive mass body 4 and the limiting points 7, wherein the gaps are not larger than a set value, and the set value is determined according to the maximum displacement allowed by the sensitive mass body under the action of acceleration.
In the example, the sensitive mass body 4 is a movable part in the sensor structure, four pairs of eight groups of comb teeth are uniformly distributed on the sensitive mass body 4, the sensitive mass body 4 is connected with the supporting beam 6, a mass block with displacement and direction influenced by the supporting beam 6 is formed through the restraint and the support of the supporting beam 6, the other end of the supporting beam 6 is connected with an anchor point 5, the movable comb teeth structure of the orthogonal compensation electrode on the sensitive mass body 4 and the fixed comb teeth of the comb teeth structure of the orthogonal compensation electrode 1 are crossed with each other to form orthogonal capacitance pairs, and the purpose of applying external acting force to the sensitive mass body 4 to finely adjust the movement direction of the sensitive mass body 4 is achieved. The movable comb tooth structure of the detection electrode on the sensitive mass body 4 and the fixed comb teeth of the comb tooth structure 3 of the detection electrode are intersected with each other to form a detection capacitance pair which is used as an output structure of the structure sensitive acceleration. The limiting point 7 plays a role in buffering and limiting, and when the structural sensitive acceleration exceeds a large range, the limiting point 7 can prevent the sensitive mass body 4 from continuing to precess, and plays a role in limiting, preventing the comb teeth from engaging and rebounding for buffering.
After the sensor structure is controlled by using an external circuit, a carrier signal can be applied to the sensitive mass body 4 of the sensor structure, the carrier signal acts on the movable comb teeth of the orthogonal compensation electrode of the sensitive mass body, and by applying a signal to the fixed comb teeth of the orthogonal compensation electrode, the orthogonal capacitor generates acting force between the upper polar plate and the lower polar plate, and the displacement mode of the sensitive mass body is adjusted, so that the included angle between the displacement direction of the sensitive mass body 4 and the sensitive axis of the structure is reduced, and the orthogonal characteristic of the structure is adjusted. When the displacement of the sensor changes, the capacitance value of a detection capacitor pair formed by the fixed comb teeth of the detection electrode comb tooth structure and the movable comb teeth on the sensitive mass body 4 changes, the capacitance change is converted into voltage change through the C2V functional circuit, and a voltage signal proportional to the sensed acceleration is output.
Claims (10)
1. The high-sensitivity open-loop MEMS accelerometer sensor structure is characterized by comprising an orthogonal compensation electrode comb structure (1), a frame structure (2), a detection electrode comb structure (3), a sensitive mass body (4), an anchor point (5), a supporting beam (6) and a limiting structure (7);
the anchor points (5) are used for fixing sensors and are distributed at four corners of the frame structure (2);
the orthogonal compensation electrode comb tooth structure (1), the detection electrode comb tooth structure (3), the sensitive mass body (4) and the limiting structure (7) are positioned at the inner side of the frame structure (2), the sensitive mass body (4) is supported by the supporting beam (6), one end of the supporting beam (6) is fixedly connected with the sensitive mass body (4), and the other end of the supporting beam is fixedly connected with the frame structure (2);
the orthogonal compensation electrode comb tooth structure (1) comprises an orthogonal compensation electrode movable comb tooth and an orthogonal compensation electrode fixed comb tooth, wherein the orthogonal compensation electrode movable comb tooth is fixedly connected with the sensitive mass body (4), the orthogonal compensation electrode fixed comb tooth is fixed on an anchor point (5), and the orthogonal compensation electrode movable comb tooth and the orthogonal compensation electrode fixed comb tooth are mutually spliced to form the orthogonal compensation electrode comb tooth structure (1);
the detection electrode comb tooth structure (3) comprises a detection electrode movable comb tooth and a detection electrode fixed comb tooth, wherein the detection electrode movable comb tooth is fixedly connected with the sensitive mass body (4), the detection electrode fixed comb tooth is fixed on an anchor point (5), and the detection electrode movable comb tooth and the detection electrode fixed comb tooth are mutually inserted to form the detection electrode comb tooth structure (3);
the gaps between the movable comb teeth of the orthogonal compensation electrode and the fixed comb teeth of the orthogonal compensation electrode at two sides are divided into a wide gap and a narrow gap, and the wide gap is 3 to 5 times of the narrow gap; the gaps between the movable comb teeth of the detection electrode and the fixed comb teeth of the detection electrode at two sides are divided into a wide gap and a narrow gap, and the wide gap is 3 to 5 times of the narrow gap;
and limiting structures (7) are arranged at two ends of the sensitive mass body (4), and in a stable state, gaps exist between the sensitive mass body (4) and the limiting structures (7), wherein the gaps are not larger than a set value, and the set value is determined according to the maximum displacement allowed by the sensitive mass body under the action of acceleration.
2. A high sensitivity open loop MEMS accelerometer sensor structure according to claim 1, wherein the narrow gap is between 2 um and 8um and the wide gap is between 5um and 25um.
3. A high sensitivity open loop MEMS accelerometer sensor structure according to claim 1, wherein the support beam (6) is formed by a plurality of elastic beams in parallel and symmetrically distributed on the upper and lower sides of the sensitive mass body (4).
4. The high-sensitivity open-loop MEMS accelerometer sensor structure according to claim 1, wherein the comb structure is divided into four pairs of eight groups, wherein the four groups of orthogonal compensation electrode comb structures (1) are distributed at four corners of the frame structure (2) and symmetrically positioned at the upper side and the lower side of two ends of the sensitive mass body (4) to form orthogonal compensation electrode differential capacitance pairs; the detecting electrode comb tooth structures (3) are four groups and distributed on the upper side and the lower side of the sensitive mass body (4) in the middle of the frame structure (2), and detecting electrode differential capacitance pairs are arranged.
5. A high sensitivity open loop MEMS accelerometer sensor structure according to claim 1, wherein the quadrature compensation electrode comb structure (1) is formed by means of a pressed film capacitor.
6. A high sensitivity open loop MEMS accelerometer sensor structure according to claim 1, wherein the detection electrode comb structures (3) are formed by means of a pressed film capacitor.
7. A high sensitivity open loop MEMS accelerometer sensor structure according to claim 1, wherein the support beam (6) has a width of 5-15 um.
8. A high sensitivity open loop MEMS accelerometer sensor structure according to claim 1, wherein the number of anchor points (5) is at least 4 and even and evenly distributed along the sensitive mass.
9. A high sensitivity open loop MEMS accelerometer sensor structure according to claim 1, wherein the limiting structure (7) is configured to prevent the sensitive mass (4) from continuing to advance to the limit position, to limit and prevent the teeth from engaging and twisting, and to achieve a rebound buffering effect.
10. The sensor structure of the high-sensitivity open-loop MEMS accelerometer according to claim 1, wherein a carrier signal is applied to the sensitive mass body (4), the carrier signal acts on the movable comb teeth of the orthogonal compensation electrode of the sensitive mass body, and a signal is applied to the fixed comb teeth of the orthogonal compensation electrode, so that an acting force is generated between the orthogonal capacitor and the upper polar plate and the lower polar plate, the displacement mode of the sensitive mass body is adjusted, and the included angle between the displacement direction of the sensitive mass body and the sensitive axis of the structure is reduced, thereby adjusting the orthogonal characteristic of the structure.
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014178195A (en) * | 2013-03-14 | 2014-09-25 | Mitsubishi Precision Co Ltd | Vibration type gyro having bias correcting function |
| CN206321662U (en) * | 2016-12-22 | 2017-07-11 | 四川纳杰微电子技术有限公司 | A kind of MEMS twin-axis accelerometers |
| CN107064558A (en) * | 2016-12-09 | 2017-08-18 | 杭州电子科技大学 | A kind of capacitance acceleration transducer with self-calibration shake table |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014178195A (en) * | 2013-03-14 | 2014-09-25 | Mitsubishi Precision Co Ltd | Vibration type gyro having bias correcting function |
| CN107064558A (en) * | 2016-12-09 | 2017-08-18 | 杭州电子科技大学 | A kind of capacitance acceleration transducer with self-calibration shake table |
| CN206321662U (en) * | 2016-12-22 | 2017-07-11 | 四川纳杰微电子技术有限公司 | A kind of MEMS twin-axis accelerometers |
Non-Patent Citations (1)
| Title |
|---|
| 新型双轴电容式加速度传感器设计;朱彬彬;王路文;汶飞;王高峰;;传感器与微***(第02期);全文 * |
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