CN103901228B - A kind of accelerometer - Google Patents
A kind of accelerometer Download PDFInfo
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- CN103901228B CN103901228B CN201410138619.9A CN201410138619A CN103901228B CN 103901228 B CN103901228 B CN 103901228B CN 201410138619 A CN201410138619 A CN 201410138619A CN 103901228 B CN103901228 B CN 103901228B
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Abstract
The invention discloses a kind of accelerometer, including substrate and the accelerometer main body being fixed on substrate, and acceleration main body includes the sensing unit of some parallel connections, wherein, sensing unit includes: mass, its longitudinal two ends are affixed with substrate by elastic component, and elastic component is arranged on longitudinal two ends of mass, and its first end is affixed with substrate；First affixed with substrate of the transverse side being arranged on mass fixes seat；Be arranged on the first tooth group fixing between seat and mass, it include being fixed on first fix seat, extend transversely, along longitudinally spaced from one another some determine tooth and crisscross some that determine between tooth, be fixed on the some dynamic tooth of mass.The present invention improves sensitivity and resolution by multiple sensing unit parallel connections, is improved the nonlinear problem of acceleration gamut by the capacitance variations mode of variable area.
Description
Technical field
The present invention relates to Micromechanical Inertial Instruments technical field, specifically, relate to a kind of accelerometer.
Background technology
High range micro-mechanical accelerometer all has in fields such as blast, shock-testings and has been widely used.At these
In application scenario, the amplitude of instantaneous strike acceleration can exceed that 100000g, and shock duration is the shortest (logical
Often within hundreds of microsecond), it is therefore desirable to accelerometer has higher range and resonant frequency.
Capacitance silicon micromechanical accelerometer has technical maturity, frequency response is high, low in energy consumption, temperature drift is little and anti-
Overload capacity waits by force unique advantage, and it disclosure satisfy that high range and the requirement of high resonant frequency, is a kind of development
The accelerometer with high g values type that potentiality are bigger.
The version of condenser type high range silicon micromechanical accelerometer mainly has two kinds at present: U.S. Draper
The torsional pendulum type structure of laboratory and the structure of the band reference capacitance of Sandia National Laboratory of the U.S..Draper tests
Room have developed a kind of high range micro-mechanical accelerometer being applied to shell in nineteen ninety, and it uses torsion bar to support
The seesaw type structure of pendulum, it is 44g that range reaches 100000g, 15h offset drift, and nonlinearity is 3.1%.
The arrangements of accelerometers unit of Sandia laboratory design includes reference capacitance, detection electric capacity and support beam, sensing
Tolerance Cheng Da 50000g, resolution is 50g, and resonant frequency is 151kHz, and second-order modal segregation ratio is 1.59.
But, both accelerometers are sensitive form outside Varied clearance face, and anti-overload ability still can not meet certain
A little particular/special requirements.
Existing high range micro-mechanical accelerometer is generally operational in open loop situations, during the input of amplitude acceleration,
The deformation of sensor sensing quality is relatively big, and the variable condenser sensitive fashion of above two accelerometer can cause entirely
The range linearity is deteriorated.Limited by range and resonant frequency, the spirit of existing high range micro-mechanical accelerometer
Sensitivity is less.These problems all constrain the further raising of condenser type high range micro-mechanical accelerometer performance.
Based on above-mentioned situation, need the High-g accelerometer that a kind of linearity is good, highly sensitive badly.
Summary of the invention
For solving the problems referred to above, the invention provides a kind of accelerometer, including substrate be fixed on described substrate
On accelerometer main body, described acceleration main body includes the sensing unit of some parallel connections,
Wherein, described sensing unit includes:
Mass, its longitudinal two ends are affixed with described substrate by elastic component, and described elastic component is arranged on
Longitudinal two ends of described mass, its first end is affixed with described substrate；
First affixed with described substrate of the transverse side being arranged on described mass fixes seat；
It is arranged on the described first tooth group fixing between seat and mass, comprising: be fixed on described
One fix seat, extend transversely, some determine tooth along longitudinally spaced from one another；Crisscross described some
Determine some dynamic tooth between tooth, that be fixed on described mass；
When accelerometer has acceleration, described elastic component produces deformation along the direction contrary with acceleration, makes
Described dynamic tooth and the right opposite determine between tooth amass and correspondingly increase or reduce, cause described dynamic tooth and determine between tooth
Electric capacity the most correspondingly increase or reduce, thus obtain acceleration according to described capacitance variations.
According to one embodiment of present invention, described sensing unit also includes another horizontal stroke being arranged on described mass
What sideways and described substrate was affixed second fixes seat,
Fix described second and between seat and mass, be provided with tooth group, fix comprising: be fixed on described second
Seat, extend transversely and some determine tooth along longitudinally spaced from one another；Crisscross some that determine between tooth,
It is fixed on the some dynamic tooth of described mass.
According to one embodiment of present invention, adjacent dynamic tooth is equal with the gap determined between tooth.
According to one embodiment of present invention, described mass is H-shaped structure, the second end of described elastic component
Affixed with the intermediate transverse girder position of H-shaped structure.
According to one embodiment of present invention, described mass is provided with damping hole, to regulate described mass
Quality.
According to one embodiment of present invention, if described elastic component includes the dry elasticity of laid out in parallel in transverse direction
Sheet.
According to one embodiment of present invention,
Connected by the metal routing on described substrate between first end of the elastic component in different sensing units；
In different sensing units first is fixed and is connected by the metal routing on described substrate between seat；
In different sensing units second is fixed and is connected by the metal routing on described substrate between seat.
According to one embodiment of present invention, described substrate material is glass or silicon.
The accelerometer that the present invention provides improves basis capacitance by the way of multiple sensitive segment units are in parallel, this
Be conducive to improving sensitivity and the resolution of accelerometer, improve the certainty of measurement of accelerometer.Meanwhile, this
The capacitance variations mode of bright employing variable area, compared to the capacitance variations mode of existing Varied clearance, this mode
Unintentional nonlinearity factor can not only be eliminated, additionally it is possible to improve the license mobility scale of dynamic tooth, be conducive to improving
The range of sensor.
Meanwhile, the elastic component in the accelerometer that the present invention provides uses the mode that multiple flexure strips connect side by side.
So, in the case of same support stiffness, compared to existing accelerometer, which has higher mould
State segregation ratio, it is possible to the intersecting axle coupling influence of preferably consistent accelerometer, thus reduce the horizontal stroke of accelerometer
To effect.So contribute to reducing the measurement error of accelerometer, improve the accuracy of accelerometer.And use
The mode that multiple flexure strips connect side by side can also make the parameter area meeting the flexure strip of performance requirement increase,
Be conducive to adjustment during structure design.
The accelerometer that the present invention provides uses the sensitive fashion of variable area, the compatible existing scheme of processing technique.Should
Accelerometer can realize single-chip by combined with existing high range silicon micromechanical accelerometer structure
Three axle high range silicon micromechanical accelerometers integrated, for improving accelerometer performance further, reducing and accelerate
Degree meter cost and volume improve feasibility.
Other features and advantages of the present invention will illustrate in the following description, and, partly from description
In become apparent, or by implement the present invention and understand.The purpose of the present invention and other advantages can be passed through
Structure specifically noted in description, claims and accompanying drawing realizes and obtains.
Accompanying drawing explanation
In order to be illustrated more clearly that the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment
Or the accompanying drawing required in description of the prior art does and simply introduces:
Fig. 1 is the structure chart of accelerometer according to an embodiment of the invention；
Fig. 2 is the structure chart of sensing unit in the accelerometer that the present invention provides；
Fig. 3 a is the tooth group structural representation in existing accelerometer；
Fig. 3 b is the tooth group structural representation in the accelerometer that the present invention provides；
Fig. 4 is elastic component parameter-relation chart according to an embodiment of the invention.
Detailed description of the invention
Embodiments of the present invention are described in detail, whereby to the present invention such as below with reference to drawings and Examples
What application technology means solves technical problem, and the process that realizes reaching technique effect can fully understand and evidence
To implement.As long as it should be noted that do not constitute conflict, each embodiment in the present invention and respectively implementing
Each feature in example can be combined with each other, the technical scheme formed all protection scope of the present invention it
In.
Fig. 1 shows the structure chart of the accelerometer provided according to the present embodiment.
As it is shown in figure 1, in the present embodiment, accelerometer includes substrate 101 and is fixed on adding on substrate 101
Velometer main body 102.Wherein, accelerometer main body 102 includes the sensing unit 103 of some parallel connections.Multiple
Sensing unit 103 parallel connection can be effectively improved the basic capacitance of accelerometer, thus is favorably improved acceleration
The sensitivity of meter and resolution, additionally aid the certainty of measurement improving accelerometer.
Fig. 2 shows the structure chart of the sensing unit 103 of the accelerometer that the present embodiment provides.
As in figure 2 it is shown, in the present embodiment, sensing unit 103 includes mass 201, elastic component 202 and
One fixes seat 203.The version differential in order to constitute electric capacity further, eliminates common mode disturbances, the present embodiment
The sensing unit provided also includes that second fixes seat 204, but the invention is not restricted to this.
Longitudinal direction (the most along the y-axis direction) two ends of mass 201 are affixed with substrate 101 by elastic component 202.
And elastic component 202 is arranged on longitudinal both sides of mass 201, its first end 202a be fixed on substrate 101
On fixed pedestal 205 affixed, the second end 202b is affixed with mass 201.From figure 2 it can be seen that
In the present embodiment, mass 201 have employed H-shaped structure, and the second end 202b and H-shaped of elastic component 202
The intermediate transverse girder position of structure is affixed.
Accelerometer when high range inputs, non-sensitive direction (i.e. y-axis in the present embodiment and z-axis direction)
Response can increase, and in the direction, the increase of response can produce bigger measurement error.In order to reduce acceleration
Count the response on non-sensitive direction, namely reduce the transversal effect of accelerometer, in the present embodiment, elastic
Part 202 is made up of some flexure strips 209 of (i.e. x-axis direction) laid out in parallel in transverse direction.Elastic component 202
This structure can be effectively improved the modal separation ratio of accelerometer such that it is able to effectively reduce accelerometer
Transversal effect, contribute to reduce accelerometer measurement error, improve accelerometer degree of accuracy.
When accelerometer has an acceleration, elastic component 202 can produce along the direction contrary with this acceleration
Deformation, so that mass 201 and first fixes the distance difference that seat 203 and second is fixed between seat 204
Correspondingly increase or reduce.And accelerometer is to fix seat 203 and second based on mass 201 and first to consolidate
The change of the distance between reservation 204 realizes the measurement of acceleration.
Again as in figure 2 it is shown, in the present embodiment, mass 201 is additionally provided with some damping holes 206.No
In the case of Tong, the quality requirement of mass 201 is different.So by arranging damping hole on mass 201
206, the quality of mass 201 can be regulated.The quantity of damping hole 206 is the fewest, the quality of mass 201
The biggest；The quantity of damping hole 206 is the most, and the quality of mass 201 is the least.Within the specific limits, quality
The quality of block 201 is the biggest, and accelerometer is the sensitiveest.So by the quality adjusting mass 201, energy
Enough adjust the sensitivity of accelerometer.
Additionally, it can also be seen that first fixes seat 203 and second and fix seat 204 and be separately positioned on from Fig. 2
The both sides of horizontal (the i.e. x-axis direction) side of mass 201, they are respectively and fixedly connected with on substrate 101.Meanwhile,
First fixing between seat 203 and mass 201, second fix and be respectively provided with between seat 204 and mass 201
There is tooth group.This tooth group includes: be fixed on first fix seat and second fix seat, along longitudinally (i.e. y-axis direction)
Be spaced some determines tooth 208；Be fixed on mass 201, crisscross determine between tooth 208 some
Dynamic tooth 207.
Fig. 3 a shows the tooth group structure chart in existing accelerometer, and Fig. 3 b then shows that the present embodiment is provided
Accelerometer in tooth group structure chart.
It can be seen that existing accelerometer uses the sensitive fashion of Varied clearance from Fig. 3 a.When accelerometer has
Have one along the acceleration of y-axis time, dynamic tooth 301 can produce displacement along the direction in opposite direction with this acceleration, from
And make dynamic tooth 301 and the distance determined between tooth 302 correspondingly increase or reduce, thus cause dynamic tooth 301 He
Determine the electric capacity respective change between tooth 302.The acceleration of accelerometer can be reflected by the change of this electric capacity
Degree.
But the gamut linearity that the mode of this Varied clearance can cause open loop accelerometer is deteriorated, thus leads
The measurement error causing accelerometer becomes big.In order to solve this problem, in the present embodiment, accelerometer uses such as
The mode of the variable area shown in Fig. 3 b.
As shown in Figure 3 b, in the present embodiment, when accelerometer has an acceleration along the x-axis direction, dynamic
Tooth 207 can produce displacement along the direction contrary with this acceleration, so that move tooth 207 and determine between tooth 208
Corresponding area correspondingly increase or reduce, thus cause dynamic tooth 207 and the electric capacity determined between tooth 208 to strain mutually
Change.The acceleration that now accelerometer is had can be reflected by the change of this electric capacity.The present embodiment institute
The variable area sensitive fashion used can not only improve the moving range of dynamic tooth 207, thus increased acceleration meter
Range, additionally it is possible to improve the non-linear of accelerometer gamut, this is favorably improved the accurate of accelerometer
Degree.
In order to improve the non-linear of accelerometer gamut further, in the present embodiment, adjacent dynamic tooth 207
Equal with the gap determined between tooth 208.
Meanwhile, the variable area sensitive fashion that the accelerometer that the present embodiment provides uses, its processing technique is compatible
The processing technique of existing accelerometer.This mode can by with existing high range silicon micro mechanical acceleration
Meter structure is combined, it is achieved three axle high range silicon micromechanical accelerometers of single-chip integrated, and this is for entering one
Step improves the performance of accelerometer, the volume reducing accelerometer and cost and provides possibility.
Again as it is shown in figure 1, for the elasticity in the different sensing units of accelerometer provided by the present invention
Part, is connected by the metal routing 104 on substrate 101 between they first ends, and first fixes and also lead between seat
The metal routing 104 crossed on substrate 101 connects, and second fixes between seat again by the metal on substrate 101
Cabling 104 connects, and the most just achieves the parallel connection of multiple sensing unit.
It can further be seen from figure 1 that for the structure optimizing accelerometer further, reduce accelerometer
Volume and cost, in the present embodiment, two adjacent fixed pedestals 205 can be reduced to a fixed pedestal,
But the invention is not restricted to this.
According to the application characteristic of high range micro-mechanical accelerometer, need during specific design to consider acceleration
The shadow of the performance indications such as the meter resonant frequency of micro structure, second-order modal segregation ratio, anti-overload ability and sensitivity
Ring.Below by way of one accelerometer meeting preset requirement of design, in order to the acceleration obtained by design
The advantage that the present invention is provided by the performance of meter illustrates further.
In the present embodiment, the preset requirement of accelerometer is:
Range amax>=20e4g, resonant frequency f0>=200kHz, second-order modal segregation ratio ψ0>=2, adding of micro structure
The sensitivity S that speed is changed to electric capacityca0≥1e-6pF/g。
By researching and analysing preset requirement and flexure strip, the present embodiment has obtained at different flexure strips in parallel
Quantity under, meet the parameter area of flexure strip that design requires, this parameter area is as shown in Figure 4.
Fig. 4 also show when connection has 6 flexure strips and 2 flexure strips side by side, for meeting above-mentioned design
Requirement, the desirable scope of the physical dimension of flexure strip.Figure 4, it is seen that the flexure strip that ought connect side by side
Quantity difference time, in order to meet design requirement, the physical dimension of flexure strip is also required to become accordingly
Change.Under certain limit, when the increasing number of the flexure strip connected side by side, meet the elasticity of design objective requirement
The physical dimension scope of sheet also increases, and is conducive to being adjusted flexibly during design.
Being set as elastic component in the present embodiment being connected and composed side by side by 6 flexure strips, the width of flexure strip sets
It is set to 9.5 μm, by the graph of a relation shown in Fig. 4, the length of flexure strip is set as 190 μm.
In the present embodiment, the length (length the most along the x-axis direction) determining tooth and dynamic tooth is all set to 50 μm,
The width (the most along the z-axis direction) determining tooth and dynamic tooth is all set to 5 μm, determines tooth long with the lap of dynamic tooth
45 μm, non-overlapped part length 5 μm, the adjacent gap determining tooth and dynamic tooth is 4 μm, and tooth group logarithm is 17 × 2,
The equivalent mass of single sensing unit is 1.03e-9kg.
Additionally, in the present embodiment, sensing unit uses the parallel form of employing 6 × 6, the list of such accelerometer
Basis, side capacitance is 4.88pF, and chip area is 3.4mm × 3.9mm.
According to above-mentioned parameter, the basic mechanical design feature index of the accelerometer obtained involved by the present embodiment is such as
Under:
Range 200000g, resonant frequency 266.2kHz, second-order modal segregation ratio 2.5, micro structure sensitivity
8.37e-6pF/g。
It can thus be seen that compared to existing accelerometer, the accelerometer that the present embodiment provides has more
High range, resonant frequency and sensitivity.This accelerometer also has the separation of higher second-order modal simultaneously
Ratio, this can effectively reduce the response in the non-sensitive direction of accelerometer, thus improve acceleration accuracy and
Reliability.
Although the embodiment that disclosed herein is as above, but described content is only to facilitate understand this
Bright and the embodiment that uses, is not limited to the present invention.Skill in any the technical field of the invention
Art personnel, on the premise of without departing from the spirit and scope that disclosed herein, can be formal implement
And in details, make any amendment and change, but the scope of patent protection of the present invention, still must be with appended right
Claim is defined in the range of standard.
Claims (7)
1. an accelerometer, including substrate and fixing accelerometer main body on the substrate, its feature
Being, described acceleration main body includes the sensing unit of some parallel connections,
Wherein, described sensing unit includes:
Mass, its longitudinal two ends are affixed with described substrate by elastic component, and described elastic component is arranged on
Longitudinal two ends of described mass, its first end is affixed with described substrate；
First affixed with described substrate of the transverse side being arranged on described mass fixes seat；
It is arranged on the described first tooth group fixing between seat and mass, comprising: be fixed on described
One fix seat, extend transversely, some determine tooth along longitudinally spaced from one another；Crisscross described some
Determine some dynamic tooth between tooth, that be fixed on described mass；
When accelerometer has acceleration, described elastic component produces deformation along the direction contrary with acceleration, makes
Described dynamic tooth and the right opposite determine between tooth amass and correspondingly increase or reduce, cause described dynamic tooth and determine between tooth
Electric capacity the most correspondingly increase or reduce, thus obtain acceleration according to described capacitance variations；
Wherein, described elastic component includes some flexure strips of laid out in parallel in transverse direction.
2. accelerometer as claimed in claim 1, it is characterised in that described sensing unit also includes arranging
Second affixed with described substrate at another transverse side of described mass fixes seat,
Fix described second and between seat and mass, be provided with tooth group, fix comprising: be fixed on described second
Seat, extend transversely and some determine tooth along longitudinally spaced from one another；Crisscross some that determine between tooth,
It is fixed on the some dynamic tooth of described mass.
3. accelerometer as claimed in claim 2, it is characterised in that adjacent dynamic tooth and determining between tooth
Gap is equal.
4. accelerometer as claimed in claim 2, it is characterised in that described mass is H-shaped structure,
Second end of described elastic component is affixed with the intermediate transverse girder position of H-shaped structure.
5. the accelerometer as according to any one of Claims 1 to 4, it is characterised in that on described mass
It is provided with damping hole, to regulate the quality of described mass.
6. accelerometer as claimed in claim 1, it is characterised in that
Connected by the metal routing on described substrate between first end of the elastic component in different sensing units；
In different sensing units first is fixed and is connected by the metal routing on described substrate between seat；
In different sensing units second is fixed and is connected by the metal routing on described substrate between seat.
7. the accelerometer as according to any one of Claims 1 to 4, it is characterised in that the material of described substrate
Material is glass or silicon.
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| CN201410138619.9A CN103901228B (en) | 2014-04-08 | 2014-04-08 | A kind of accelerometer |
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| CN201410138619.9A CN103901228B (en) | 2014-04-08 | 2014-04-08 | A kind of accelerometer |
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| CN103901228B true CN103901228B (en) | 2017-01-04 |
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