CN1304885C

CN1304885C - Sticking device for flat panel substrate

Info

Publication number: CN1304885C
Application number: CNB038011646A
Authority: CN
Inventors: 关川利夫; 横田明义; 石坂一朗
Original assignee: Shin Etsu Engineering Co Ltd
Current assignee: Shin Etsu Engineering Co Ltd
Priority date: 2002-04-24
Filing date: 2003-04-18
Publication date: 2007-03-14
Anticipated expiration: 2023-04-18
Also published as: KR100666021B1; TW200305743A; KR20040096490A; WO2003091970A1; AU2003227422A1; CN1568493A; JPWO2003091970A1; TWI228612B; JP3572307B2

Abstract

The present invention provides a sticking device for flat panel substrate so that two substrates can be smoothly moved for alignment from the outside in XYtheta direction in vacuum without using an XYtheta stage. In the present invention, both holding plates (1, 2) are adjustably moved relative to each other in XYtheta directions by a positioning moving means (8) disposed on the outside of a closed space (S) while maintaining the closed space (S) in vacuum state by maintaining the clearances between the peripheral edge parts (1a, 2a) of both holding plates (1, 2) in the sealed state by moving seal means (4), so that the positioning adjustment means (5) are moved in the same directional to position both substrates (A, B) relative to each other, and that the clearance between the peripheral edge parts (1a, 2a) of both holding plates (1, 2) is held at a specified clearance by the large rigidity of the positioning adjusting means (5) in Z direction, whereby a support resistance applied to the moving seal means (4) can be maintained at a proper value.

Description

The bonder of flat panel substrate

Technical field

The present invention relates to, in the manufacture process of the flat-panel screens of for example LCD (LCD) or plasma display (PDP) etc., be used for employed two plate bases of this display are implemented the bonder of contrapositions (position alignment) and bonding flat panel substrate.

Specifically, the bonder of flat panel substrate involved in the present invention, be that two plate bases on a pair of holding plate about being maintained at removably respectively are overlapping in a vacuum, its adjustment of relatively carrying out XY θ direction is moved and carry out substrate contraposition to each other, press till the predetermined gap with the inside and outside draught head that is produced of two substrates.

Background technology

In the past, bonder as this flat panel substrate, for example with reference to (the 4th page in Japanese patent laid-open 6-34983 communique, Fig. 1, Fig. 4, Fig. 5), be by making a pair of up and down holding plate near each other, between two holding plates, clip encapsulant and form confined space, implement in will this confined space that decompression attracts and after arriving the specified vacuum degree, make a holding plate carry out the displacement fine setting of horizontal direction with respect to another holding plate, after making the correct contraposition of two substrates (glass substrate) in view of the above, make and recover atmospheric pressure in the confined space, utilize air pressure in the confined space between two substrates and the pressure reduction between atmospheric pressure, come two substrates is imposed pressurization.

Open 2001-5405 communique the (the 3rd with reference to the Jap.P. spy again, 4 pages, Fig. 1, Fig. 2), it discloses another bonder, be a pair of vacuum chamber unit to be adapted to and can to separate along the Z direction in the mode of surrounding a pair of increased pressure board, on pallet, will descend chamber unit support to become and to move freely adjustment in XY θ direction by XY θ platform, two vacuum chamber unit are engaged and under the state that forms vacuum chamber (confined space), carry out vacuum attraction, make the inside of this vacuum chamber form vacuum state in view of the above, and make up and down with XY θ platform that chamber unit relatively moves in XY θ direction keeping under the air-tight state, make two substrates carry out high-precision contraposition to each other according to this from the vacuum chamber outside.

In addition, this XY θ platform, be to be equipped with the X platform that to move back and forth by CD-ROM drive motor, to come the Y platform that moves back and forth in Y direction, and on the Y platform, be equipped with by another CD-ROM drive motor and the θ platform that horizontally rotates of Y platform relatively by another CD-ROM drive motor in X-direction by rolling bearing.

On the other hand, in recent years aspect the liquid crystal usefulness bonder of substrate, continuous maximization with work TFT glass and CF glass, now begun to make the product that the length of side surpasses 1000mm, this glass substrate is when carrying out contraposition, its amount of movement in XY θ direction is about about 20 μ m-50 μ m at present, just is the large-size glass substrate that the length of side surpasses 1000mm, the also unlikely hundreds of μ m that surpasses of its amount of movement.

Yet, the bonder of this existing flat panel substrate, be to use XY θ platform to be used as that contraposition mechanism of two substrates, existing XY θ platform, basically for to move and to design in XY θ direction more than or equal to mm unit, the amount of movement below the hundreds of μ m only as the contraposition of substrate particularly, be less than the amount that the rotor of its rolling bearing turns around, when carrying out the substrate contraposition of each only amount of movement below the hundreds of μ m repeatedly, because of lack of lubrication can cause the wearing and tearing of sliding part, so can produce the problem of permanance variation.

In addition, formed confined space on the above-mentioned XY θ platform is in order to obtain to bear the structure of specified vacuum degree, its weight must increase the weight of, so also can cause the sliding part of XY θ platform to wear and tear easily,, then have the problem of the frequent maintenance operation of necessary enforcement for being prevented.

Also have, textural at XY θ platform wholely maximizes and becomes heavy because of installing, therefore the problem that exists manufacturing cost and shipment and delivery cost to rise.

And follow the maximization tendency of nearest substrate, device constantly maximizes, and it is more and more obvious that the problems referred to above then become.

Summary of the invention

The invention that the 1st technical scheme of the present invention is put down in writing, its purpose are, must not use XY θ platform can make two substrates carry out XY θ swimmingly in a vacuum from the outside and move also contraposition.

The invention that the 2nd technical scheme is put down in writing, outside the goal of the invention of the 1st technical scheme, its purpose also comprises, make position adjusting mechanism simple structureization, make the drive source miniaturization of location with travel mechanism.

The invention that the 3rd technical scheme is put down in writing, outside the goal of the invention of the 1st technical scheme, its purpose also comprises, makes the simple structureization of position adjusting mechanism.

The invention that the 4th technical scheme is put down in writing, outside the goal of the invention of the 1st～the 3rd technical scheme, its purpose also comprises, makes high-precision contraposition become possibility.

In order to reach aforementioned purpose, the 1st technical scheme of the present invention is characterized in that possessing: hydrodynamic reciprocating sealing mechanism, with two holding plates relatively to circumference between keep air-tight state, and two holding plate supports are become and can relatively move freely in XY θ direction; Position adjusting mechanism sets up to the either party of two holding plates from this hydrodynamic reciprocating sealing mechanism, can follow the relative adjustment of two holding plates on XY θ direction to move and move in the same direction, and have high rigidity in the Z direction; Elevating mechanism make two holding plates relatively near mobile, and it is besieged to divide formation confined air chien shih two substrates between two holding plates; And the location uses travel mechanism, is equipped on outside the confined space, and that two holding plates are relatively adjusted on XY θ direction is mobile while be used for making above-mentioned confined space to keep vacuum state; Mobile by with travel mechanism two holding plates relatively being adjusted on XY θ direction by the location, utilize moving of this position adjusting mechanism to make two substrates relatively on XY θ direction, carry out contraposition.

Effect by the 1st technical scheme that said structure produced, be to make between the circumference of two holding plates by hydrodynamic reciprocating sealing mechanism to keep air-tight state, make on one side and keep vacuum state in the confined space, with travel mechanism two holding plates are relatively moved by being provided in the outer location of this confined space along the adjustment of XY θ direction, in view of the above, move along the equidirectional position adjusting mechanism, carry out two substrates position to each other involutory in, by the high rigidity that this position adjusting mechanism had along the Z direction, can make the interval that remains on regulation between the circumference of two holding plates, therefore, the support resistance that born of hydrodynamic reciprocating sealing mechanism can remain on suitable value.

The invention of the 2nd technical scheme, be in the invention of the 1st technical scheme constitutes, to add in addition, this position adjusting mechanism is made of a plurality of member towards the almost parallel of Z direction extension, one end of this member is when engaging one another, the other end then is engaged in the either party of hydrodynamic reciprocating sealing mechanism and two holding plates respectively, and at least a portion support of a plurality of members is become can be at XY θ direction Free Transform.

At this, with at least a portion support of a plurality of members become can be on XY θ direction the structure of Free Transform, for example to be use with a plurality of movable rods connect to crooked linkage assembly freely etc. and make the flexible distortion of at least a portion of plural member, but be not limited thereto, it comprises simultaneously, do not use this mechanism, and, utilize its flexible structure that is out of shape at least a portion of plural member member supports with elastically deformable.

Effect from the 2nd technical scheme that architectural feature produced of above-mentioned increase, be on the basis of the effect of the 1st technical scheme, even little with the driving load of travel mechanism, at least a portion of a plurality of parts that constitute position adjusting mechanism can be out of shape swimmingly on XY θ direction according to the location.

The invention of the 3rd technical scheme is to add in addition in the invention of the 1st technical scheme constitutes, and this position adjusting mechanism is duplexer flexure strip and sheet metal is alternately stacked and that then form.

Effect from the 3rd technical scheme that architectural feature produced of above-mentioned increase, be on the basis of the effect of the 1st technical scheme, by keeping vacuum state in the confined space while making, with travel mechanism two holding plates relatively being moved along the adjustment of XY θ direction by the location, in view of the above, utilize the distortion that is layered in the flexure strip between each sheet metal respectively, two substrates is relatively involutory along XY θ direction position.

The invention of the 4th technical scheme, be to add in addition during the invention of the 1st～the 3rd technical scheme constitutes, when this location is connected with up holding plate with travel mechanism, the top holding plate supported to adjust mobilely in XY θ direction, the below holding plate supported to have high rigidity and can't move in XY θ direction.

From the effect of the 4th technical scheme that architectural feature produced of above-mentioned increase, be that the below holding plate can not followed the action of top holding plate on the basis of the effect of the 1st to the 3rd technical scheme.

Description of drawings

Fig. 1 is the vertical profile front elevation of the flat panel substrate bonder of expression one embodiment of the present of invention.

Fig. 2 is along the cross-sectional vertical view of Fig. 1 (2)-(2) line.

Fig. 3 is the amplification stereogram of position adjusting mechanism.

(a)-(d) of Fig. 4 is the part key diagram of representing the flat panel substrate adhesive bonding method by the order of operation.

The (a) and (b) of Fig. 5 are represented the amplification stereogram of the modified example of position adjusting mechanism.

Fig. 6 is the vertical profile front elevation of the flat panel substrate bonder of expression other embodiment of the present invention.

Fig. 7 is the vertical profile front elevation of the flat panel substrate bonder of expression other embodiment of the present invention.

Embodiment

Below, the embodiment of this explanation is described with reference to the accompanying drawings.

Present embodiment as Fig. 1～top holding plate 1 shown in Figure 4, is to be hung as back and forth to move freely and can carry out freely adjusting the last price fixing that moves on XY θ (level) direction in Z direction (up and down); Below holding plate 2 is supported to and can't move and following price fixing with high rigidity toward Z direction and XY θ direction by pallet 9.Make two sheet glass system substrate A, B on the opposite face that remains in top holding plate 1 and below holding plate 2 respectively overlapping in vacuum environment air pressure, it is mobile that two substrates is relatively adjusted on XY θ direction, after carrying out the thick contraposition and little contraposition (position alignment) of two substrates A, B in view of the above, two substrates A, B are pressed till the specified gap of interval with the inside and outside draught head that is produced of two substrates A, B.

Either party at the opposite face of substrate A, B, illustrated example is along lower substrate B surface periphery portion, for example the bonding agent C (sealing liquid crystal is with sealing material) of wire is applied as the frame shape of sealing, the liquid crystal of portion's filling within it (not shown) disperses to be provided with a plurality of gaps adjustment sept (not shown) as required.

Last price fixing 1 reaches price fixing 2 down, for example the rigid body by metal or pottery etc. is constituted, central portion at each other subtend face, as two substrates A, B being held in irremovable maintaining body 3, the situation of present embodiment is to be equipped with: the attraction adsorbing mechanism 3a, the 3a that for example attract with the attraction source (not shown) of vacuum pump etc. from a plurality of attractions hole of wearing respectively, and, be used for a pair of Electrostatic Absorption 3b of mechanism, the 3b that absorption in the assisted vacuum keeps.

These attract adsorbing mechanism 3a, the attraction source of 3a and the power supply of the 3b of Electrostatic Absorption mechanism, 3b, be that controlled device (not shown) is controlled its action, begin to attract absorption and Electrostatic Absorption from the A-stage of mounting two substrates A, B, after finishing, little contraposition of two substrates A, B removes either party, present embodiment for removing the Electrostatic Absorption of upper substrate A, after the confined space S of aftermentioned recovers atmospheric pressure, remove attraction absorption and the Electrostatic Absorption of lower substrate B, return A-stage.

This maintaining body 3 is not limited to said structure, for example as long as for low vacuum, replace the 3b of Electrostatic Absorption mechanism, 3b with the vacuum suction mechanism that utilizes vacuum pressure reduction and use also passable.

And, between the circumference 2a of the circumference 1a of last price fixing 1 and following price fixing 2, with the hydrodynamic reciprocating sealing mechanism 4 that both supports become between the two to keep air-tight state and can relatively move freely on XY θ direction, be to be set as ring-type in mode around two substrates A, B.

The situation of illustrated example because two substrates A, B be rectangular, hydrodynamic reciprocating sealing mechanism 4 forms plane frame shape, but is not limited thereto, for example as wafer when two substrates A, B be circle, then formation carries over the similar shapes of its periphery.

This hydrodynamic reciprocating sealing mechanism 4, the situation cording of present embodiment is equipped with: the cross section circle of the flat shape of price fixing 2 or the movable block 4a of rectangle under price fixing 1 reaches in the cooperation, be installed in movable block 4a top, can with the annular seal material 4b at Z direction elastically deformable of the circumference 1a of last price fixing 1 contact or for example O type ring that separates etc., the ring-shaped vacuum seal 4c of for example O type ring that the circumference 2a that is installed in the following of movable block 4a and following price fixing 2 contacts usually, can move on XY θ direction etc.

This vacuum seal 4c can use for example vacuum lubricant as required.

In addition, in the illustrated example, circumference 1a at last price fixing 1, only to be equipped with at Z direction and chimeric holding section 4a above the movable block 4a with its mode that forms one, below the 4d of holding section, above movable block 4a, be folded with the annular seal material 4b of substance, circumference 2a to following price fixing 2 below movable block 4a is folded with dual vacuum seal 4c, but be not limited thereto, though not shownly go out, but with the vacuum seal 4c of annular seal 4b all sides in the overlapping mode of Z direction only keeps of substance, and the vacuum seal 4c of deletion outer circumferential side also can.

Also have, reach the either party of price fixing 2 down from hydrodynamic reciprocating sealing mechanism 4 to last price fixing 1, set up position adjusting mechanism 5, it can follow price fixing 1 and moving and moving toward equidirectional relative to adjustment on the XY θ direction of price fixing 2 down, and has high rigidity in Z (up and down or vertical) direction.

The situation of present embodiment, this position adjusting mechanism 5 is that a plurality of member by the almost parallel that extends the Z direction is constituted, the one end engages one another, the other end then is engaged in the either party of hydrodynamic reciprocating sealing mechanism 4 and last price fixing 1 and following price fixing 2 respectively, and at least a portion of these a plurality of members only is supported as and can be out of shape on XY θ direction.

If illustrate in greater detail, aforementioned a plurality of member is shown in Fig. 1～3, possess: the central component 5a that downward price fixing 2 dangles from the bottom surface of movable block 4a, surround the member 5b on every side that central component overhangs down price fixing 2 bottom surfaces on every side, engage also centre of support member and the coupling member 5c of the bottom of member on every side.By last price fixing 1 and down price fixing 2 these members of a plurality of configurations of periphery the integrated unit that forms, the power of the weight of last price fixing 1 and movable block 4a etc., with act on central component 5a and following price fixing 2 bonding part, central component 5a and around member 5b respectively with the bonding part of coupling member 5c, so with regard to can not over effect in the vacuum seal 4c of hydrodynamic reciprocating sealing mechanism 4.

Particularly in Fig. 1～3 and example shown in Figure 4, with central component 5a form have as its axial Z direction high rigidity and XY θ direction can't be out of shape cylindric, it is inserted and leads in descending the through hole 2b that is worn on the price fixing 2 circumference 2a and can move in XY θ direction, around this central component 5a, that disposes many (illustrated example is 4) for example can carry out diastrophic member 5b on every side by what linkage assembly constituted in XY θ direction.For example be to use cup-and-ball joint etc. to be used as the bottom and the employed bent member 5b1 in upper end of these linkage assemblys again, and coupling member 5c be form discoideus.

At last price fixing 1, in last price fixing 1 and 2 clamping hydrodynamic reciprocating sealings of price fixing mechanism 4 and mark off confined space S around two substrates A, B down, for example linking has by driving the elevating mechanism 6 that constitutes with institutes such as cylinder or lifting jack up and down.

This elevating mechanism 6, control its action by controller (not shown), A-stage at mounting substrate A, B, shown in Fig. 4 (a), make price fixing 1 standby in upper limit position, after the mounting of substrate A, B is finished, price fixing 1 is descended, divide the confined space S that forms around two substrates A, B at itself and 2 of following price fixings, after little contraposition of two substrates A, B is finished, or after confined space S described later recovers atmospheric pressure, make price fixing 1 rising and return A-stage.

In addition, except elevating mechanism 6, and substrate adjusting mechanism at interval is set in addition, the either party of price fixing 1,2 or two sides adjusted the interval of two substrates A, B about it was used for making toward parallel the moving of Z direction.

This substrate is adjusting mechanism at interval, situation at present embodiment, be the circumference 1a that Zhou Fangxiang equally spaced is equipped on price fixing 1 dash forward the holding section 4d front end established, and and above the chimeric movable block 4a of this front end between, be that a plurality of for example linear actuators etc. are at the scalable moving driving body 4e of Z direction ... by with these driving bodies 4e ... make annular seal 4b carry out compression deformation in Z direction shorteningization in the Z direction, will be by elevating mechanism 6 approaching two substrates A, B, the position of further furthering and being sealed by ring-type bonding agent C to therebetween.

These driving bodies 4e ... action also be that controlled device (not shown) is controlled, state such as Fig. 4 (a) Z direction that is shown in is extended in the early stage, after finishing, the thick contraposition of two substrates A, B shown in Fig. 4 (c), shortens, after little contraposition of two substrates A, B is finished or after confined space S described later recovers atmospheric pressure, then extend and return A-stage.

In addition, at this confined space S, be that the outside for example vacuum pump that is equipped on shown in the symbol 7 with Fig. 1 links to each other, and the gas that makes in this confined space S is set, be that air in the present embodiment passes in and out and reaches the suction mechanism of specified vacuum degree.

The action of this suction mechanism 7 is controlled by controller (not shown), by last price fixing 1 and following price fixing 2 near mobile form confined space S after, begin to carry out air-breathing from this confined space S, after little contraposition of two substrates A, B is finished, then make it recover atmospheric pressure to confined space S air supply.

And, setting location travel mechanism 8 in the outside of confined space S, it is used for confined space S being kept vacuum state and making price fixing 1 and following price fixing 2 relatively adjust mobile in XY θ direction.

The situation of present embodiment, this location with travel mechanism 8 as shown in Figure 1, possess: be used for making price fixing 1 to move and connect the drive source 8a that for example cam or actuator etc. constituted of setting, and be used for detecting the detecting device 8b last shown mark of two substrates A, B, that form by microscope and video camera in XY θ direction.The data of being exported according to this detecting device 8b make drive source 8a action, in view of the above with movable block 4a and with the last price fixing 1 of its binding toward the promotion of XY θ direction, and make the upper substrate A that remains in price fixing 1 on this carry out thick contraposition and little contraposition.

In the situation of illustrated example, as shown in Figure 2, be that the movable block 4a towards hydrodynamic reciprocating sealing mechanism 4 is provided with 3 drive source 8a.

The adhesive bonding method of this flat panel substrate then, is described according to the order of operation.

At first, shown in Fig. 4 (a), on the opposite face of last price fixing 1 and following price fixing 2, respectively prealignment and mounting upper substrate A, scribble bonding agent C and be filled into the lower substrate B of liquid crystal in advance, by attracting

adsorbing mechanism

3a, 3a and the 3b of Electrostatic Absorption mechanism, 3b two substrates A, B absorption is held in and can't moves.

Afterwards, start by elevating mechanism 6 makes price fixing 1 near each other with following price fixing 2 shown in Fig. 4 (b), the annular seal 4b of holding section 4d fluid-tight engagement on movable block 4a that makes on last price fixing 1 circumference 1a to dash forward and establish is to divide the confined space S that forms around two substrates A, B at last price fixing 1 and 2 of following price fixings.

At the same time, two substrates A, B pass through top support plate 1 and move with the approaching of below support plate 2, and the position stands facing each other in the gap about the 1mm of interval under this state closely to predetermined distance.

But substrate B goes up coated ring-type bonding agent C and does not contact another substrate A, so be communicated with confined space S between two substrates A, B.

Afterwards, the start by suction mechanism 7 deflates from confined space S and arrives the specified vacuum degree, forms vacuum from deflating between two substrates A, B simultaneously.

Under this state, it is mobile with the start of travel mechanism 8 price fixing 1 and following price fixing 2 relatively to be adjusted by the location in XY θ direction, and carries out the thick contraposition of two substrates A, B.

Then, when confined space S arrived specified vacuum and spends, the pressure reduction between the atmospheric pressure that is born by confined space S and last price fixing 1 and following price fixing 2 made the more approaching strength of price fixing 1 and following price fixing 2 with generation.Yet, driving body 4e by substrate interval adjusting mechanism ... under reach, as Fig. 4 (c) though shown in above-mentioned holding section 4d or go up price fixing 1 circumference 1a and become more approaching above the movable block 4a, but still keep the interval set therebetween, and do not cause annular seal 4b compression deformation or flatten fully.

In view of the above, approach under the state of predetermined distance at another substrate A, by the start of location with travel mechanism 8, with little contraposition (at this moment being called the little contraposition of substrate noncontact) of carrying out two substrates A, B, or, make the more approaching and contact coated ring-type bonding agent C on substrate B of another substrate A as shown in the figure, and form between the two under the state of seal cavity, carry out little contraposition (at this moment being called the little contraposition of substrate contacts) of two substrates A, B with the start of travel mechanism 8 by the location.

At this, when describing contraposition (thick contraposition, little contraposition) action in detail according to Fig. 4, be from the two substrates A shown in Fig. 4 (a), the stalemate of B, start by elevating mechanism 6 make price fixing 1 and following price fixing 2 near the time, shown in Fig. 4 (b) when the holding section 4d fluid-tight engagement that is based in price fixing 1 circumference 1a during in annular seal 4b, the top of the holding section 4d of last price fixing 1 and movable block 4a will be chimeric mutually on the Z direction, and the two mobile formation in XY θ direction is integrated.

In addition, between movable block 4a bottom surface and following price fixing 2 circumference 2a, rely on the vacuum seal 4c that contact with following price fixing 2 circumference 2a usually, constitute a plurality of members of position adjusting mechanism 5, promptly be engaged in movable block 4a bottom surface central component 5a, be engaged in down price fixing 2 circumference 2b bottom surfaces around member 5b, reach these the coupling member 5c etc. of bottom of joint, and be supported as the interval more than the 1mm of interval.

So, adjust and when the location is moved with the drive source 8a of travel mechanism 8 in order to make price fixing 1 and following price fixing 2 carry out relatively moving in XY θ direction, shown in the double dot dash line of the solid line of Fig. 1 and Fig. 4 (b), by vacuum seal 4c confined space S is kept under the vacuum state, movable block 4a reaches and the last price fixing 1 of its binding moves toward XY θ directions with respect to following price fixing 2.

Promptly, if the drive source 8a with travel mechanism 8 promotes movable block 4a toward XY θ direction with the location, be out of shape toward equidirectional by the member 5b on every side that makes position adjusting mechanism 5, central component 5a and movable block 4a move parallel, be linked on the movable block 4a price fixing 1 and can move and make toward XY θ direction, utilize the high rigidity of the Z direction that this central component 5a possessed, owing to can be on bearing to keep predetermined distance between movable block 4a bottom surface and following price fixing 2 circumference 2a under the atmospheric pressure that born of price fixing 1 and following price fixing 2, and the sliding resistance that vacuum seal 4c can be born remains on appropriate value.

Its result must not use XY θ platform, can make two substrates A, B carry out XY θ swimmingly in a vacuum from the outside and move and finish high-precision contraposition (thick contraposition, little contraposition).

And, situation at present embodiment, at least a portion of a plurality of members of the almost parallel that position adjusting mechanism 5 will extend to the Z direction, i.e. member 5b on every side, for example be to adopt linkage assembly etc. and be supported as can be toward the distortion of XY θ direction, therefore, even the location diminishes with the driving load of travel mechanism 8, at least a portion that also can make a plurality of

member

5a, 5b is swimmingly toward the distortion of XY θ direction.

Its result can make the benefit of location with the drive source 8a miniaturization of travel mechanism 8 and have with the simple structureization of position adjusting mechanism 5.

In addition, structure according to above-mentioned position adjusting mechanism 5, owing to not having to follow the adjustment of XY θ direction to move the part that produces rubbing contact, can not produce the dust that causes because of this rubbing contact, and can prevent from two substrates A, B to be caused harmful effect because of the dust in the contraposition.

Also have, constitute the position and adjust the structure of a plurality of members of structure machine 5, be not limited to illustrated structure, can be toward member 5b around the distortion of XY θ direction, except that aforementioned link mechanism, for example dispose the cylinder 5b ' of elastically deformable shown in Fig. 5 (a) and (b), or the elasticity pole stock 5 that constituted by the post of many elastically deformables, steel wire etc. of configuration "; or make on every side member 5b form high rigidity on the contrary and become can't be toward the distortion of XY θ direction but make the central component 5a can be toward XY θ direction distortion or the like, even if adopt other structures also can obtain same effect.

Make the member supports of at least a portion of a plurality of members like this by elastically deformable, when utilizing its flexible distortion, can seek the reduction of simple structureization and manufacturing cost, simultaneously owing to not having to follow the adjustment of XY θ direction to move the part that produces rubbing contact, therefore, can prevent fully that the dust that causes because of this rubbing contact from producing.

In addition, be linked to price fixing 1, and make down price fixing 2 possess high rigidity, then descend price fixing 2 to follow moving of price fixing 1 and can reach high-precision contraposition unlikely as long as will locate with travel mechanism 8.

In addition, after finishing thick contraposition and little contraposition as described above, approach at two substrates A, B under the state of predetermined distance and carry out under the situation of the little contraposition of substrate noncontact of little contraposition, make two substrates A, B more near and almost formed between the two under the state of seal cavity, perhaps under the situation of the little contraposition of substrate contacts, maintain the original state, remove the absorption of the 3b of Electrostatic Absorption mechanism of top, the start by suction mechanism 7 sucks air and makes its ambiance recover atmospheric pressure in the confined space S.

In view of the above, upper substrate A can leave price fixing 1 shown in Fig. 4 (d), and by bonding agent C mounting on lower substrate B, rely on the pressure of formed seal cavity between two substrates A, B and pressure reduction at air pressure, two substrates A, B are pressed equably, and form predetermined gap.

In addition, the moment before carrying out above-mentioned thick contraposition, particularly when mounting two substrates A, B, need only the liquid crystal of enclosing appropriate amount with appropriate state, by making the ambiance in the confined space S return to atmospheric pressure, utilize the inside and outside draught head that is produced of two substrates A, B can carry out impartial pressing, and under the state of enclosing liquid crystal, form specified gap, so must in subsequent handling, not inject liquid crystal and can produce liquid crystal panel.

Afterwards, make seal cavity S return to atmospheric pressure, the start by elevating mechanism 6 makes price fixing 1 separate with following price fixing 2 and opens confined space S, takes out two substrates A, B after the contraposition, repeats above-mentioned action.

Other embodiment of the present invention are shown among Fig. 6 and Fig. 7.

Formation shown in Figure 6, aforementioned hydrodynamic reciprocating sealing mechanism 4, only by movable block 4a, annular seal material 4b and ring-shaped vacuum seal 4c constitute, at last price fixing 1 circumference 1a and above the movable block 4a, equally spaced be equipped with a plurality of for example linear actuators etc. at the scalable moving substrate of Z direction adjusting mechanism 4f at interval, by extending these substrates adjusting mechanism 4f at interval ... and make the top of price fixing 1 circumference 1a and movable block 4a snap into one moving of XY θ direction, and make the top interval of price fixing 1 circumference 1a and movable block 4a approach to two substrates A, the distance of being sealed by ring-type bonding agent C between B, except that aforementioned formation was different with the embodiment shown in Fig. 1～5, other formations were all identical with the embodiment shown in Fig. 1～5.

In addition, in the illustrated example, be with substrate interval adjusting mechanism 4f ... be configured to from last price fixing 1 circumference 1a above movable block 4a, but it be configured to above movable block 4a, also can on the contrary towards last price fixing 1 circumference 1a.

Then, shown in the dot-and-dash line of Fig. 6, by the elevating mechanism 6 that lifting jack constituted move up go up price fixing 1 make its with state that movable block 4a separates under, mounting substrate A, B, afterwards shown in the solid line of Fig. 6, move down price fixing 1 and pass through substrate adjusting mechanism 4f at interval ... itself and movable block 4a are snapped on XY θ direction, be one so to form confined space S around two substrates A, B.

Under this state, by the start of locating the drive source 8a that forms with the motor of travel mechanism 8 cam 8 is rotated, make the spring 8c that is set up in 2 of movable block 4a and following price fixings flexible, in view of the above shown in double dot dash line, shift position adjusting mechanism 5 and make price fixing 1 and movable block 4a, carry out the adjustment of XY θ direction with respect to following price fixing 2 and move, and finish thick contraposition between two substrates A, B.

Afterwards, by shortening substrate adjusting mechanism 4f at interval ... make price fixing 1 more approaching with following price fixing 2, carry out equally under this state as described above on price fixing 1 and following price fixing 2 moving on XY θ direction relative to adjustment, and finish little contraposition between two substrates A, B.

Therefore, structure shown in Figure 6, can and Fig. 1～5 shown in embodiment obtain same effect.

The situation of illustrated example particularly, inferolateral surface is provided with outer wall 1b, the 2c that bloats laterally respectively on last price fixing 1 and following price fixing 2, form spatial portion 1c, 2d to divide, and connect suction mechanism 1d, 2e with pipe arrangement respectively at spatial portion 1c, 2d, by making each inside reach the specified vacuum degree, when utilizing the inside and outside draught head that is produced of two substrates A, B to press to specified gap, atmospheric pressure will only put on outer wall 1b, the 2c of spatial portion 1c, 2d and unlikely price fixing 1 and the following price fixing 2 of putting on, therefore, can prevent the distortion that atmospheric pressure causes.

And, be used for making confined space S to form the suction mechanism 7 of specified vacuum degree, be last price fixing 1 and following price fixing 2, and the tabular Electrostatic Absorption mechanism 3 that is mounted thereon between form gap 3c, 3c respectively, utilize this gap 3c, 3c, can prevent that the only past folk prescription of the interior air of confined space S is to the harmful effect of flowing and being caused.So-called harmful effect for example comprises that the two substrates A, the B that are kept produce, the liquid crystal of filling on lower substrate B disperses or the like in advance.

Structure shown in Figure 7, aforementioned location adjusting mechanism 5 is the mutual lamination of sheet metal 5e of thin flexure strip 5d and for example steel plate of for example rubber etc. etc., the bonding and duplexer that is shaped and, except that this constitute different with Fig. 1～Fig. 5 or embodiment shown in Figure 6, other formations are all identical with Fig. 1～Fig. 5 or embodiment shown in Figure 6.

As above-mentioned flexure strip 5d,, for example can use highly purified natural picture glue or silicon rubber etc. in order to keep high strength and elasticity and to reduce long-term creep (viscoelasticity).

As mentioned above, the invention that the 1st technical scheme of the present invention is put down in writing, be by keeping air-tight state between the circumference of hydrodynamic reciprocating sealing mechanism and will keeping in the confined space under the vacuum state with two holding plates, make two holding plates relatively adjust mobile with being equipped on the outer location of confined space with travel mechanism in XY θ direction, position adjusting mechanism is moved toward identical direction, to carry out two substrates contraposition to each other, utilize the high rigidity on the Z direction that this position adjusting mechanism possesses, make between the circumference of two holding plates and keep specified gap, therefore the support resistance that hydrodynamic reciprocating sealing mechanism is born remains on appropriate value, can make two substrates carry out XY θ swimmingly in a vacuum from the outside without XY θ platform and move and finish contraposition.

Therefore, the structure that is used as two substrates contraposition mechanism to each other with in the past use XY θ platform is compared, and can make the structure miniaturization of position adjusting mechanism, can reduce abrasion in view of the above and permanance when improving the repetitiousness contraposition, and the maintenance transfiguration is easy, the reduction that can seek to carry cost again.

The invention of the 2nd technical scheme, still comprise the effect of the invention of putting down in writing except the 1st technical scheme, even locate little with the driving load that travel mechanism produced, at least a portion of a plurality of members that constitute position adjusting mechanism is out of shape swimmingly in XY θ direction, therefore, can under the simplification of reaching the position adjusting mechanism structure, will locate drive source miniaturization simultaneously with travel mechanism.

Therefore, can seek the attenuating of manufacturing cost, and the adjustment that does not have to follow XY θ direction is moved and is produced the part of rubbing contact, can not produce the dust that causes because of this rubbing contact, and can prevent from because of the dust in the contraposition two substrates A, B to be caused harmful effect.

The invention of the 3rd technical scheme, still comprise the effect of the invention of putting down in writing except the 1st technical scheme, make two holding plates in XY θ direction relatively adjust mobile with the location with travel mechanism by in confined space, keeping under the vacuum state, utilize the elastic deformation that is laminated in the flexure strip between each sheet metal respectively to make two substrates relatively on XY θ direction, carry out contraposition, and the manufacturing of position adjusting mechanism is oversimplified.

Therefore, can seek the reduction of manufacturing cost.

The effect of the invention of the 4th technical scheme still comprises except the invention effect that the 1st to 3 technical scheme is put down in writing, and the below holding plate can not followed the top holding plate and be moved, and therefore can reach high-precision contraposition.

Claims

1. the bonder of a flat panel substrate, two substrates (A, B) are overlapped in the confined space (S) of vacuum, these two substrates (A, B) are held respectively with respect to a pair of holding plate (1,2) up and down detachable, the confined space of this vacuum is divided and is formed between two holding plates (1,2), this two holding plate (1,2) is relatively moved to the adjustment of XY θ direction, carry out two substrates (A, B) contraposition to each other, press to predetermined gap by draught head, it is characterized in that: have in the inside and outside generation of two substrates (A, B):

Hydrodynamic reciprocating sealing mechanism (4), this hydrodynamic reciprocating sealing mechanism (4) is at above-mentioned two holding plates (1,2) relative circumference (1a, the movable block (4a) that ring-type is set 2a) is to surround two substrates (A, B), make holding plate (1) integrated and transportable while on XY θ direction of this movable block (4a) and a side, between the circumference (2a) of these movable blocks (4a) and the opposing party's holding plate (2), the vacuum seal (4c) of the ring-type that common contact is set and can moves to XY θ direction, make and keep air-tight state between two holding plates (1,2) and be supported for and relatively to move freely to XY θ direction;

Position adjusting mechanism (5), this position adjusting mechanism (5) sets up along a plurality of member (5a of the almost parallel of Z direction extension up to the opposing party's holding plate (2) from the movable block (4a) of this hydrodynamic reciprocating sealing mechanism (4), 5b), make this a plurality of member (5a, part 5b) and the opposing party's holding plate (2) connect, with these a plurality of member (5a, when end 5b) is bonded with each other, with a plurality of member (5a, the other end 5b) engages with movable block (4a) and the opposing party's holding plate (2) respectively, in view of the above, relatively adjust mobile with respect to the opposing party's holding plate (2) to XY θ direction by the holding plate (1) that makes a side, position adjusting mechanism (5) but the identical direction of moving direction of the holding plate (1) of Xiang Yuyi side move, and have big rigidity in the Z direction;

Location travel mechanism (8), this location is provided in the outside of confined space (S) with travel mechanism (8), keeps vacuum state Yi Bian be used for making in the above-mentioned confined space (S), Yi Bian two holding plates (1,2) are relatively moved along the adjustment of XY θ direction;

By utilizing the location to make a side holding plate (1) relatively adjust mobile to XY θ direction with respect to the opposing party's holding plate (2) with travel mechanism (8), the identical direction of moving direction of holding plate (1) of a plurality of parts (5a, 5b) Xiang Yuyi side of position adjusting mechanism (5) is moved, when making two substrates (A, B) relatively carry out contraposition along XY θ direction, by the big rigidity that this position adjusting mechanism (5) is had, make the interval that keeps regulation between movable block (4a) and the opposing party's the holding plate (2) along the Z direction.

2. the bonder of flat panel substrate as claimed in claim 1, it is characterized in that, above-mentioned position adjusting mechanism (5) is by central component (5a), member (5b) and connecting elements (5c) constitute on every side, this central component (5a) can run through movably and engages with respect to through hole (2b) from movable block (4a) along XY θ direction, this through hole (2b) is located on the opposing party's the circumference (2a) of holding plate (2), should around member (5b) surround it and engage with the opposing party's holding plate (2) peripherally, this connecting elements (5c) engages and supports these central components (5a) and the bottom of member (5b) on every side.

3. the bonder of flat panel substrate as claimed in claim 1 or 2, it is characterized in that, above-mentioned location is connected with on up the holding plate (1) with travel mechanism (8), simultaneously the holding plate (1) of top supports to and can move along the adjustment of XY θ direction, the holding plate (2) of below is supported to have high rigidity and can not move along XY θ direction.