CN111033687B - 支承玻璃基板和使用其的层叠基板 - Google Patents
支承玻璃基板和使用其的层叠基板 Download PDFInfo
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- CN111033687B CN111033687B CN201880054592.1A CN201880054592A CN111033687B CN 111033687 B CN111033687 B CN 111033687B CN 201880054592 A CN201880054592 A CN 201880054592A CN 111033687 B CN111033687 B CN 111033687B
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- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
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Landscapes
- Surface Treatment Of Glass (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311199194.8A CN117228966A (zh) | 2017-08-31 | 2018-06-28 | 支承玻璃基板和使用其的层叠基板 |
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017-166517 | 2017-08-31 | ||
| JP2017166517 | 2017-08-31 | ||
| JP2018061106A JP7276644B2 (ja) | 2017-08-31 | 2018-03-28 | 支持ガラス基板及びこれを用いた積層基板 |
| JP2018-061106 | 2018-03-28 | ||
| PCT/JP2018/024617 WO2019044148A1 (ja) | 2017-08-31 | 2018-06-28 | 支持ガラス基板及びこれを用いた積層基板 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311199194.8A Division CN117228966A (zh) | 2017-08-31 | 2018-06-28 | 支承玻璃基板和使用其的层叠基板 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111033687A CN111033687A (zh) | 2020-04-17 |
| CN111033687B true CN111033687B (zh) | 2023-10-24 |
Family
ID=65812939
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201880054592.1A Active CN111033687B (zh) | 2017-08-31 | 2018-06-28 | 支承玻璃基板和使用其的层叠基板 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP7276644B2 (ja) |
| CN (1) | CN111033687B (ja) |
| TW (1) | TWI835738B (ja) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7303081B2 (ja) * | 2019-09-24 | 2023-07-04 | 日本碍子株式会社 | 仮固定基板、複合基板および電子部品の剥離方法 |
| JP7342785B2 (ja) * | 2020-05-14 | 2023-09-12 | 信越化学工業株式会社 | 微小構造体の移載用基板およびその製造方法 |
| CN112234017B (zh) * | 2020-10-19 | 2023-07-14 | 绍兴同芯成集成电路有限公司 | 一种玻璃载板与晶圆双面加工工艺 |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09278494A (ja) * | 1996-04-15 | 1997-10-28 | Corning Japan Kk | ガラス基板へのマーキング方法 |
| JP2000223382A (ja) * | 1998-11-25 | 2000-08-11 | Komatsu Ltd | レ―ザビ―ムによる微小ドットマ―ク形態、そのマ―キング方法 |
| JP2004272182A (ja) * | 2002-04-24 | 2004-09-30 | Mitsubishi Chemicals Corp | 画像形成方法 |
| JP2011135102A (ja) * | 2011-03-23 | 2011-07-07 | Renesas Electronics Corp | 半導体装置 |
| WO2016088868A1 (ja) * | 2014-12-04 | 2016-06-09 | 日本電気硝子株式会社 | ガラス板 |
| JP2016160135A (ja) * | 2015-03-02 | 2016-09-05 | 日本電気硝子株式会社 | 支持ガラス基板及びこれを用いた積層体 |
| CN106103369A (zh) * | 2014-04-07 | 2016-11-09 | 日本电气硝子株式会社 | 支承玻璃基板及使用其的层叠体 |
| WO2017018275A1 (ja) * | 2015-07-24 | 2017-02-02 | 旭硝子株式会社 | ガラス基板、積層基板、積層基板の製造方法、積層体、梱包体、およびガラス基板の製造方法 |
| WO2017046967A1 (ja) * | 2015-09-15 | 2017-03-23 | 大日本印刷株式会社 | 情報保存装置および情報読出装置 |
| CN107074618A (zh) * | 2014-12-16 | 2017-08-18 | 日本电气硝子株式会社 | 支承玻璃基板及使用其的层叠体 |
| CN107112203A (zh) * | 2015-02-23 | 2017-08-29 | 日本电气硝子株式会社 | 玻璃基板及使用其的层叠体 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW430873B (en) * | 1998-11-25 | 2001-04-21 | Komatsu Mfg Co Ltd | Form of microscopic dot mark using laser beam and marking method thereof |
| JP4109371B2 (ja) * | 1999-01-28 | 2008-07-02 | Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 | 半導体ウェハ |
| JP4071476B2 (ja) * | 2001-03-21 | 2008-04-02 | 株式会社東芝 | 半導体ウェーハ及び半導体ウェーハの製造方法 |
| JP2003089553A (ja) * | 2001-09-13 | 2003-03-28 | Shin Etsu Chem Co Ltd | 内部マーキングされた石英ガラス、光学部材用石英ガラス基板及びマーキング方法 |
| JP4409459B2 (ja) * | 2005-02-17 | 2010-02-03 | 東京エレクトロン株式会社 | プラズマ処理装置およびその部品と部品の寿命検出方法 |
| JP5040977B2 (ja) * | 2009-09-24 | 2012-10-03 | 住友電気工業株式会社 | 窒化物半導体基板、半導体装置およびそれらの製造方法 |
-
2018
- 2018-03-28 JP JP2018061106A patent/JP7276644B2/ja active Active
- 2018-06-28 CN CN201880054592.1A patent/CN111033687B/zh active Active
- 2018-07-09 TW TW107123627A patent/TWI835738B/zh active
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09278494A (ja) * | 1996-04-15 | 1997-10-28 | Corning Japan Kk | ガラス基板へのマーキング方法 |
| JP2000223382A (ja) * | 1998-11-25 | 2000-08-11 | Komatsu Ltd | レ―ザビ―ムによる微小ドットマ―ク形態、そのマ―キング方法 |
| JP2004272182A (ja) * | 2002-04-24 | 2004-09-30 | Mitsubishi Chemicals Corp | 画像形成方法 |
| JP2011135102A (ja) * | 2011-03-23 | 2011-07-07 | Renesas Electronics Corp | 半導体装置 |
| CN106103369A (zh) * | 2014-04-07 | 2016-11-09 | 日本电气硝子株式会社 | 支承玻璃基板及使用其的层叠体 |
| WO2016088868A1 (ja) * | 2014-12-04 | 2016-06-09 | 日本電気硝子株式会社 | ガラス板 |
| CN107074618A (zh) * | 2014-12-16 | 2017-08-18 | 日本电气硝子株式会社 | 支承玻璃基板及使用其的层叠体 |
| CN107112203A (zh) * | 2015-02-23 | 2017-08-29 | 日本电气硝子株式会社 | 玻璃基板及使用其的层叠体 |
| JP2016160135A (ja) * | 2015-03-02 | 2016-09-05 | 日本電気硝子株式会社 | 支持ガラス基板及びこれを用いた積層体 |
| WO2017018275A1 (ja) * | 2015-07-24 | 2017-02-02 | 旭硝子株式会社 | ガラス基板、積層基板、積層基板の製造方法、積層体、梱包体、およびガラス基板の製造方法 |
| WO2017046967A1 (ja) * | 2015-09-15 | 2017-03-23 | 大日本印刷株式会社 | 情報保存装置および情報読出装置 |
Non-Patent Citations (1)
| Title |
|---|
| 一种基于虚拟ID的液晶玻璃基板生产信息管理***;石宝钱;邹垂国;陆小军;;通信与广播电视(第04期);正文全文 * |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201913716A (zh) | 2019-04-01 |
| CN111033687A (zh) | 2020-04-17 |
| JP7276644B2 (ja) | 2023-05-18 |
| TWI835738B (zh) | 2024-03-21 |
| JP2019047106A (ja) | 2019-03-22 |
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