CN110333372A - A kind of magnetic scanning microscope probe and preparation method thereof - Google Patents
A kind of magnetic scanning microscope probe and preparation method thereof Download PDFInfo
- Publication number
- CN110333372A CN110333372A CN201910652075.0A CN201910652075A CN110333372A CN 110333372 A CN110333372 A CN 110333372A CN 201910652075 A CN201910652075 A CN 201910652075A CN 110333372 A CN110333372 A CN 110333372A
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- Prior art keywords
- probe
- magnetic
- scanning microscope
- nano crystal
- fixedly connected
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- 239000000523 sample Substances 0.000 title claims abstract description 109
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 75
- 238000002360 preparation method Methods 0.000 title claims abstract description 11
- 239000002159 nanocrystal Substances 0.000 claims abstract description 36
- 239000000463 material Substances 0.000 claims abstract description 15
- 239000000696 magnetic material Substances 0.000 claims abstract description 12
- 238000004621 scanning probe microscopy Methods 0.000 claims abstract description 9
- 238000000034 method Methods 0.000 claims description 11
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 6
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 6
- 238000010884 ion-beam technique Methods 0.000 claims description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 5
- 239000003292 glue Substances 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 4
- 239000000956 alloy Substances 0.000 claims description 3
- 229910045601 alloy Inorganic materials 0.000 claims description 3
- 229910017052 cobalt Inorganic materials 0.000 claims description 3
- 239000010941 cobalt Substances 0.000 claims description 3
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 3
- 229910052742 iron Inorganic materials 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 238000003466 welding Methods 0.000 claims description 3
- 239000013078 crystal Substances 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 230000005389 magnetism Effects 0.000 abstract description 9
- 230000009897 systematic effect Effects 0.000 abstract description 3
- 239000011248 coating agent Substances 0.000 description 7
- 238000000576 coating method Methods 0.000 description 7
- 238000001514 detection method Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 6
- 238000012545 processing Methods 0.000 description 4
- 238000013461 design Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 238000002465 magnetic force microscopy Methods 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000002210 silicon-based material Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 230000003319 supportive effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/50—MFM [Magnetic Force Microscopy] or apparatus therefor, e.g. MFM probes
- G01Q60/54—Probes, their manufacture, or their related instrumentation, e.g. holders
- G01Q60/56—Probes with magnetic coating
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
- G01Q70/08—Probe characteristics
- G01Q70/10—Shape or taper
- G01Q70/12—Nanotube tips
Abstract
The present invention provides a kind of magnetic scanning microscope probes and preparation method thereof.The probe includes probe base platform, cantilever beam and the needle point for connecting scanning probe microscopy, one end of cantilever beam is fixedly connected with probe base platform, the other end of cantilever beam is fixedly connected with needle point, needle point is integrally made of magnetic nano crystal, cantilever beam is made of with probe base platform non-magnetic material, the magnetic properties of detectable material, since only needle point has magnetism, other parts do not have magnetic and avoid introducing systematic error, realize the accurately detecting of magnetic signal, and prepare simple to operation, long service life.
Description
Technical field
The invention belongs to scanning probe microscopy technical field more particularly to a kind of magnetic scanning microscope probe and its systems
Preparation Method.
Background technique
Scanning probe microscopy (SPM) be it is a kind of with atomic resolution for surface topography acquisition, electromagnetic performance
The important instrument of analysis is the important characterization tool in the fields such as Surface Science, nanotechnology.Wherein, probe is that scanning probe is aobvious
Important component in micro mirror belongs to the common consumptive material of the high technology equipment.
Probe in SPM generally utilizes the micro electro mechanical system (MEMS) technology processing materials such as silicon or silicon nitride to be made, for detecting material
Expect the simple informations such as pattern, mechanics.Probe includes probe base platform, cantilever beam and needle point, and probe base platform is for connecting
SPM, cantilever beam linking probe matrix platform and needle point, needle point carry out infomation detection for close or contact sample.With device
The development trend of part miniaturization, needs to carry out material the observation of nanoscale correlated performance, such as magnetics, electricity etc., this is just
It needs to prepare additional coating, generally metal layer in average probe needle surface.For example, magnetism SPM probe is commonly to visit
One side surface of needle point of needle plate tens nanometer thickness magnetic metallic layers (such as iron, cobalt, nickel and its alloy) and other for mentioning
The metal layer (such as titanium, chromium, platinum and iridium) of high binding force of cladding material.But since probe tip is smaller, only prepared in needle surface
Coating avoids covering coating at cantilever, technology difficulty and cost will dramatically increase.Therefore at present in addition to probe tip table
Face, magnetic coating also tend to the probe cantilever surface of covering part or whole.What it is due to magnetic force microscopy (MFM) detection is magnetic
The interaction of remote force (attraction and repulsive force) between property probe and magnetic sample, therefore the magnetic coating at probe tip
And the magnetic coating at cantilever can all generate interaction between magnetic sample, so that some systematic errors can be introduced, it is right
The accurate observation of magnetic material, especially three-dimensional manometer magnetic material domain structure generates interference.
Summary of the invention
In view of the above technical problems, the present invention provides a kind of magnetic scanning microscope probe, has magnetics signal detection essence
The advantages that degree is high, long service life.
The technical scheme adopted by the invention is that: a kind of magnetic scanning microscope probe, including for connecting scanning probe
Microscopical probe base platform, cantilever beam and needle point, one end of cantilever beam are fixedly connected with probe base platform, cantilever beam
The other end is fixedly connected with needle point, it is characterized in that: the needle point is made of magnetic nano crystal, the cantilever beam is by non-magnetic material
It constitutes, the probe base platform is made of non-magnetic material.
The mode being fixedly connected is unlimited, including connector is used to be fixedly connected, and is fixed by physical bond method
Connection.
The probe base platform is non-magnetic material, in including but not limited to common silicon materials, silicon nitride material etc.
It is one or two kinds of.
The cantilever beam is non-magnetic material, one of including but not limited to common silicon materials, silicon nitride material etc. or
Two kinds of person.
The magnetic nano crystal material is unlimited, including iron, cobalt, nickel and its alloy and oxide crystal etc..
Preferably, the needle point is in cone.As further preferred, cone base is having a size of 50nm-200nm, centrum
Height is 50nm-400nm.
Compared with prior art, the invention has the following beneficial effects:
(1) middle probe cantilever of the present invention plays a supportive role, and probe tip is used for close to sample or contact sample, with measurement
Pattern, magnetism of sample etc., probe tip is made of magnetic nano crystal, and cantilever beam and probe base platform are by non-magnetic material
It constitutes without magnetism.On the one hand this structure design can use the magnetic properties of probe detection material, on the other hand only
Retaining needle point has magnetism, and other parts do not have magnetism, avoid the introducing of systematic error, realize the accurate spy of magnetic signal
It surveys.
(2) in the present invention, probe tip generally magnetic nano crystal, the material selection of magnetic nano crystal extensively, can
Need flexible choice or design that there is high/low magnetic moment or high/low coercitive magnetic probe according to test sample.
(3) in the prior art, needle point magnetism coating is easy to wear in use for probe, easily leads to detection failure.This hair
Bright middle probe needle point is the whole nanocrystal for keeping homogeneous magnetic, and nanocrystal top is contacted with sample, the mill of needle point local
Damage not will cause the significant decaying of probe magnetism, therefore can guarantee the validity and stability of detection, and considerably increase
The service life of probe.
The present invention also provides a kind of methods for preparing the magnetic scanning microscope probe, include the following steps:
Using magnetic nano crystal, which is fixed on to one end of micro cantilever probe, micro cantilever probe
The other end is fixedly connected with probe base platform；Then, magnetic nano crystal is cut into probe tip structure；
Alternatively, the magnetic nano crystal is cut into probe tip structure using magnetic nano crystal；Then, by the magnetic
Property nanocrystal is fixed on one end of micro cantilever probe, the other end linking probe substrate platform of micro cantilever probe.
It is unlimited that magnetic nano crystal is fixed on the method on micro cantilever probe, including chemical glue cementation is determined, is welded and fixed.
The method that magnetic nano crystal is cut into probe tip structure is unlimited, as a kind of implementation, utilizes focusing
Ion beam cuts magnetic nano crystal.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the magnetic scanning microscope probe in the embodiment of the present invention 1；
Fig. 2 is the preparation process schematic diagram of the magnetic scanning microscope probe in the embodiment of the present invention 1.
Specific embodiment
Below with reference to embodiment, present invention is further described in detail, it should be pointed out that embodiment described below purport
It is being convenient for the understanding of the present invention, and is not playing any restriction effect to it.
Probe base platform 1, needle point 2, cantilever beam 3, interconnecting piece 4, magnetic nano crystal 5.
Embodiment 1:
Magnetic scanning microscope probe structure is as shown in Figure 1, include the probe base for connecting scanning probe microscopy
Platform 1, cantilever beam 3 and needle point 2,3 one end of cantilever beam are fixedly connected with needle matrix platform 1, and the other end of cantilever beam 3 passes through company
Socket part is fixedly connected with needle point 2, and interconnecting piece is chemical glue.Needle point 2 is tapered.Needle point 2 is made of magnetic nano crystal, cantilever beam 3
It is made of non-magnetic material, probe base platform 1 is made of non-magnetic material.
The preparation method of the magnetic scanning microscope probe is as shown in Figure 2, comprising the following steps:
(1) magnetic nano crystal 3 is connected in 2 front end of probe cantilever using Mechanical Method
Magnetism is made using chemical glue by cantilever beam 3 close to block-like magnetic nano crystal 5 using robotic manipulation technology
One end of nanocrystal 5 and micro cantilever probe 3 bond, and the other end of micro cantilever probe 3 is fixedly connected with probe base platform 1；
(2) according to the shape of probe tip, using the method for focused ion beam to the shape and size of magnetic nano crystal 5
Excision processing is carried out, probe tip shape is obtained.
Embodiment 2:
In the present embodiment, magnetic scanning microscope probe structure and the probe structure in embodiment 1 are essentially identical, and institute is different
Be interconnecting piece be welding material.
The preparation method of the magnetic scanning microscope probe comprises the steps of:
(1) robotic manipulation technology is utilized, by cantilever beam 3 close to block-like magnetic nano crystal 5, is welded using being biased
The method connect is fixedly connected with one end of magnetic nano crystal 5 with cantilever beam 3, and the other end of cantilever beam 3 is fixedly connected with probe base
Bottom platform 1；
(2) according to the shape of probe tip, using the method for focused ion beam to the shape and size of magnetic nano crystal 5
Excision processing is carried out, probe tip shape is obtained.
Embodiment 3:
In the present embodiment, magnetic scanning microscope probe structure is identical as the probe structure in embodiment 2.
The preparation method of the magnetic scanning microscope probe comprises the steps of:
(1) according to the shape of probe tip, using the method for focused ion beam to the shape and size of magnetic nano crystal 5
Excision processing is carried out, probe tip shape is obtained.
(2) robotic manipulation technology is utilized, by cantilever beam 3 close to step (1) treated magnetic nano crystal 5, is used
The method for being biased welding is fixedly connected with one end of magnetic nano crystal 5 with cantilever beam 3, and the other end of cantilever beam 3 is fixed
Linking probe substrate platform 1.
Technical solution of the present invention is described in detail in embodiment described above, it should be understood that the above is only
For specific embodiments of the present invention, it is not intended to restrict the invention, all any modifications made in spirit of the invention,
Supplement or similar fashion substitution etc., should all be included in the protection scope of the present invention.
Claims (10)
1. a kind of magnetic scanning microscope probe, including the probe base platform for connecting scanning probe microscopy, cantilever beam
And needle point, one end of cantilever beam are fixedly connected with probe base platform, the other end of cantilever beam is fixedly connected with needle point, feature
Be: the needle point is made of magnetic nano crystal, and the cantilever beam is made of non-magnetic material, and the probe base platform is by non-
Magnetic material is constituted.
2. magnetic scanning microscope probe as described in claim 1, it is characterized in that: the mode being fixedly connected includes using
Connector is fixedly connected, and is fixedly connected by physical bond method.
3. magnetic scanning microscope probe as described in claim 1, it is characterized in that: the material of the probe base platform includes
Silicon and/or silicon nitride.
4. magnetic scanning microscope probe as described in claim 1, it is characterized in that: the material of the cantilever beam includes including silicon
And/or silicon nitride.
5. magnetic scanning microscope probe as described in claim 1, it is characterized in that: the magnetic nano crystal material includes
Iron, cobalt, nickel and its alloy and oxide crystal.
6. magnetic scanning microscope probe as described in claim 1, it is characterized in that: the needle point is cone.
7. magnetic scanning microscope probe as claimed in claim 6, it is characterized in that: the bottom size of the cone is 50nm-
200nm, vertebral height 50nm-400nm.
8. the preparation method of the magnetic scanning microscope probe as described in any claim in claim 1 to 7, feature
It is: includes the following steps:
Using magnetic nano crystal, which is fixed on to one end of micro cantilever probe, micro cantilever probe it is another
End is fixedly connected with probe base platform；Then, magnetic nano crystal is cut into probe tip structure；
Alternatively, the magnetic nano crystal is cut into probe tip structure using magnetic nano crystal；Then, which is received
Meter Jing Ti is fixed on one end of micro cantilever probe, and the other end of micro cantilever probe is fixedly connected with probe base platform.
9. the preparation method of magnetic scanning microscope probe as claimed in claim 8, it is characterized in that: the magnetic nano crystal
It is scheduled on micro cantilever probe, or is fixed by welding on micro cantilever probe by chemical glue cementation.
10. the preparation method of magnetic scanning microscope probe as claimed in claim 8, it is characterized in that: utilizing focused ion beam
Magnetic nano crystal is cut into probe tip structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910652075.0A CN110333372A (en) | 2019-07-18 | 2019-07-18 | A kind of magnetic scanning microscope probe and preparation method thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910652075.0A CN110333372A (en) | 2019-07-18 | 2019-07-18 | A kind of magnetic scanning microscope probe and preparation method thereof |
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| CN110333372A true CN110333372A (en) | 2019-10-15 |
Family
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Family Applications (1)
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| CN201910652075.0A Pending CN110333372A (en) | 2019-07-18 | 2019-07-18 | A kind of magnetic scanning microscope probe and preparation method thereof |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111089988A (en) * | 2019-12-27 | 2020-05-01 | 季华实验室 | High-uniformity magnetic probe and preparation method thereof |
| CN111825056A (en) * | 2020-07-17 | 2020-10-27 | 杭州电子科技大学 | Method for forming cantilever probe based on femtosecond laser and high temperature and cantilever probe |
| CN114088981A (en) * | 2021-10-21 | 2022-02-25 | 华南理工大学 | Side wall scanning probe and processing method thereof |
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