CN108931667A - Have both the flying-spot microscope probe and preparation method thereof of electricity and magnetics signal acquisition function - Google Patents
Have both the flying-spot microscope probe and preparation method thereof of electricity and magnetics signal acquisition function Download PDFInfo
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- CN108931667A CN108931667A CN201710373454.7A CN201710373454A CN108931667A CN 108931667 A CN108931667 A CN 108931667A CN 201710373454 A CN201710373454 A CN 201710373454A CN 108931667 A CN108931667 A CN 108931667A
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- probe
- carbon nanotube
- electricity
- flying
- signal acquisition
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
- G01Q70/08—Probe characteristics
Abstract
The present invention provides a kind of flying-spot microscope probes for having both electricity and magnetics signal acquisition function, including probe bodies and a carbon nanotube；Along the length direction of carbon nanotube, one end of carbon nanotube is electrically connected with probe tip formation, and in the tube wall of carbon nanotube, other than the tube wall apart from other end certain length, remaining tube wall cladded magnetic metal layer.The probe can obtain the electricity and magnetics signal of material, have high detection resolution, and can guarantee to detect stability, increase the service life of probe.
Description
Technical field
The invention belongs to nanotechnology research and testing field more particularly to one kind to have both electricity and magnetics signal acquisition function
The flying-spot microscope probe and preparation method thereof of energy.
Background technique
Scanning probe microscopy (SPM) be it is a kind of with atomic resolution for surface topography acquisition, electromagnetic performance
The important instrument of analysis is the important characterization tool in the fields such as Surface Science, nanotechnology.Wherein, probe is that scanning probe is aobvious
Important component in micro mirror belongs to the common consumptive material of the high technology equipment.
Common SPM probe is mainly prepared by processing silicon or silicon nitride using micro electro mechanical system (MEMS) technology means, generally
The simple informations such as material morphology, mechanics can only be provided.With the development trend of device miniaturization, need to carry out nanometer ruler to material
The observation of correlated performance, such as magnetics, electricity etc. is spent, this just needs to deposit additional coating in ordinary silicon detecting probe surface, generally
For metal layer.For example, conduction SPM probe be ordinary silicon probe tip surface plating 10nm-50nm thickness metal platinum and other
Improve binding force of cladding material metal, such as titanium, chromium, platinum and iridium etc. and obtain.Magnetic SPM probe is then in ordinary silicon probe tip
Plate the magnetic metallic layers of one layer of tens nanometer thickness, such as iron, cobalt, nickel and its alloy in surface.
But tens nanometers of metal layer is plated on probe tip surface, the diameter of probe tip will greatly increase, and cause to visit
Needle is difficult to test some fine micro-nano structures, seriously reduces detection resolution, to seriously affect the test to material property
Precision.Moreover, either conduction SPM probe or magnetism SPM probe, its coat of metal is prone to wear out in use, is led
It causes its electric conductivity or magnetism to be difficult to permanently effective holding, constrains the service life of probe.
Therefore, a kind of novel probe with high-resolution and more long life is needed.
Summary of the invention
In view of the above technical problems, the present invention provides a kind of flying-spot microscope for having both electricity and magnetics signal acquisition function
Probe has the characteristics of high-resolution, long life.
To achieve the goals above, the technical scheme adopted by the invention is that：Have both electricity and magnetics signal acquisition function
Flying-spot microscope probe, including probe bodies and a carbon nanotube, the probe bodies include feeler arm and probe tip；
Along the length direction of carbon nanotube, one end of carbon nanotube is electrically connected that (end is known as carbon nanotube with probe tip formation
Rear end, the other end are known as the front end of carbon nanotube), and in the tube wall of carbon nanotube, in addition to the pipe apart from front end certain length
Except wall, remaining tube wall cladded magnetic metal layer.
The feeler arm plays a supportive role, and the probe tip is used for close to sample or contact sample, with measurement
Each performance of sample.One end of carbon nanotube is electrically connected with probe tip formation, can be with probe bodies by probe tip
Other positions form electrical connection.
The formation of the probe bodies and carbon nanotube is electrically connected, and the probe bodies are unlimited, can be common silicon probe or
Person's silicon nitrate probes.
The magnetic metal layer material is unlimited, including iron, cobalt, nickel and its alloy etc..
Preferably, the magnetic metallic layers are with a thickness of 1nm-50nm.
Compared with prior art, the present invention has the advantages that：
(1) carbon nanotube is alongst connected with probe tip, since carbon nanotube has big draw ratio (general
For 100-1000) and small diameter, (generally 1nm to 10nm), not only effectively extends the length of probe tip, Er Qieneng
Enough keep high detection resolution；
(2) carbon nanotube has certain electric conductivity, can be with the electric property of test material；
(3) the outer wall cladded magnetic metal layer of carbon nanotube, and along the length direction of carbon nanotube, retain apart from carbon
The tube wall of nanotube front end certain length does not cover metal thin film magnetic layer.On the one hand this structure design can be such that the probe uses
In the magnetic properties of detection material, the thickness on the other hand allowing for metal thin film magnetic layer will increase the straight of carbon nanotube
Diameter, to reduce detection resolution, therefore the tube wall that the present invention retains apart from carbon nanotube front end certain length does not cover magnetism
Metal film layer had not only realized magnetic properties detection, but also has maintained the high detection resolution of carbon nanotube；
(4) needle point is easy to wear in use for prior art middle probe, easily leads to detection failure, carbon nanometer in the present invention
Pipe front end is contacted with sample, since carbon nanotube has big draw ratio, can guarantee the validity and stability of detection,
And considerably increase the service life of probe.
The present invention also provides a kind of preparation sides of flying-spot microscope probe for having both electricity and magnetics signal acquisition function
Method includes the following steps：
(1) carbon nanotube is welded in probe tip growth in situ, chemical gluing or bias, makes the carbon nanotube edge
One end of length direction (end is known as the rear end of carbon nanotube, and the other end is known as the front end of carbon nanotube) and probe tip shape
At electrical connection, extension terminal of the other end as probe tip；
(2) along the length direction of carbon nanotube, the position of the front end certain length apart from carbon nanotube is as start bit
It sets, using the method for focused ion beam, in the tube wall deposited magnetic metal layer from the initial position to carbon nanotube rear end；Or
Person,
Along the length direction of carbon nanotube, the position of the front end certain length apart from carbon nanotube as final position,
Using the method for focused ion beam, in the tube wall deposited magnetic metal layer from carbon nanotube rear end to the final position.
The growth in situ is：Catalyst granules is placed in probe tip, then utilizes carbon nano tube growth technology,
In-situ growing carbon nano tube at catalyst granules.It include but is not limited to that nanometer is visited in the technology that probe tip places catalyst granules
Needle technology etc..Catalyst granules includes but are not limited to the nanoparticles such as gold, nickel.Carbon nano tube growth technology includes but is not limited to
Chemical vapour deposition technique (CVD) etc..The diameter of carbon nanotube and length etc. can be by changing catalyst particle size and growth
The regulation such as condition.
The chemical gluing is：By probe tip close to carbon nanotube, make the carbon nanotube alongst
Rear end chemistry is adhesive in probe tip, forms electrical connection, extension terminal of the other end as probe tip.
The bias is welded as：By probe tip close to carbon nanotube, the rear end of carbon nanotube is made using bias welding
It is fixed on probe tip, forms electrical connection, extension terminal of the other end as probe tip.
The probe bodies are electrically connected with carbon nanotube formation, and the probe bodies are unlimited, can be general commercial probe, such as
Silicon probe or silicon nitrate probes, also or covering metal layer probe etc..
Preferably, the magnetic metallic layers are with a thickness of 1nm-50nm.
In the present invention, it can also be controlled using length of the focused ion beam to carbon nanotube, that is, in step (1),
Carbon nanotube is cut using focused ion beam, guarantees that the length of carbon nanotube probes is uniform, to guarantee probe performance
Stability.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the flying-spot microscope probe in embodiment 1；
Fig. 2 is the schematic diagram controlled using focused ion beam the length of carbon nanotube in embodiment 1；
Fig. 3 is to use focused ion beam in the schematic diagram of the tube wall deposited magnetic metal layer of carbon nanotube in embodiment 1.
Specific embodiment
Below with reference to embodiment, present invention is further described in detail, it should be pointed out that embodiment described below purport
It is being convenient for the understanding of the present invention, and is not playing any restriction effect to it.
Probe bodies 1, probe tip 2, carbon nanotube 3, carbon nanotube front end 4, carbon nanotube rear end 5, magnetic metallic layers
6。
Embodiment 1：
In the present embodiment, probe structure is as shown in Figure 1, probe bodies 1 include feeler arm and probe tip 2, probe tip 2
Positioned at probe bodies front end, the one end of carbon nanotube 3 alongst is front end 4, and the other end is rear end 5, rear end 5 and probe
Needle point 2 forms electrical connection.Also, in the tube wall of carbon nanotube, other than the tube wall apart from 4 certain length of front end, remaining pipe
Wall is coated with magnetic metallic layers 6.
The preparation method of the probe comprises the steps of：
(1) in the top in-situ growing carbon nano tube of probe tip 2
Firstly, placing the nanoparticles such as gold, nickel as catalyst particles on 2 top of probe tip using nano-probe technology
Then grain utilizes carbon nano tube growth technology, such as chemical vapour deposition technique (CVD), the growth in situ carbon at catalyst granules
Nanotube makes its one end alongst, i.e. rear end 5, be electrically connected with the formation of probe tip 2, the other end, i.e. front end 4, work
For the extension terminal of probe tip 2.As described in Figure 2, carbon nanotube can be cut by focused ion beam, to control carbon
The length of nanotube.
(2) along the length direction of carbon nanotube, the position A of 4 certain length of front end apart from carbon nanotube is as starting
Position, as shown in figure 3, being deposited using the method for focused ion beam from initial position A to the tube wall of carbon nanotube rear end 5
With a thickness of the magnetic metallic layers of 1nm-50nm.
Embodiment 2：
In the present embodiment, probe structure is identical as the probe structure in embodiment 1.
The preparation method of the probe comprises the steps of：
(1) using Mechanical Method in 2 connecting carbon nanotube of probe tip
Using robotic manipulation technology, by probe tip 2 close to carbon nanotube 3, using chemical glue make carbon nanotube along
One end of length direction, i.e. rear end 5 are bonded with probe tip 2, form electrical connection, the other end, i.e. front end 4, as probe tip
2 extension terminal.
(2) along the length direction of carbon nanotube, the position A of 4 certain length of front end apart from carbon nanotube is as termination
Position, as shown in figure 3, using the method for focused ion beam, in the tube wall deposition from carbon nanotube rear end 5 to the final position
With a thickness of the magnetic metallic layers of 1nm-50nm.
Embodiment 3：
In the present embodiment, probe structure is identical as the probe structure in embodiment 1.
The preparation method of the probe comprises the steps of：
(1) using Mechanical Method in 2 connecting carbon nanotube of probe tip
Made by probe tip 2 close to carbon nanotube 3 using the method for being biased welding using robotic manipulation technology
The one end of carbon nanotube alongst, i.e. rear end 5, are fixed on probe tip 2, form electrical connection, the other end, i.e. front end
4, the extension terminal as probe tip 2.
(2) along the length direction of carbon nanotube, the position A of 4 certain length of front end apart from carbon nanotube is as termination
Position, as shown in figure 3, using the method for focused ion beam, in the tube wall deposition of thick from carbon nanotube rear end 5 to the final position
Degree is the magnetic metallic layers of 1nm-50nm.
Technical solution of the present invention is described in detail in embodiment described above, it should be understood that the above is only
For specific embodiments of the present invention, it is not intended to restrict the invention, all any modifications made in spirit of the invention,
Supplement or similar fashion substitution etc., should all be included in the protection scope of the present invention.
Claims (10)
1. the flying-spot microscope probe of electricity and magnetics signal acquisition function is had both, including probe bodies and a carbon nanotube,
Probe bodies include feeler arm and probe tip；It is characterized in that：Along the length direction of carbon nanotube, one end of carbon nanotube with
Probe tip forms electrical connection, and in the tube wall of carbon nanotube, other than the tube wall apart from other end certain length, remaining
Tube wall cladded magnetic metal layer.
2. the flying-spot microscope probe of electricity and magnetics signal acquisition function is had both as described in claim 1, it is characterized in that：Institute
Stating probe bodies is silicon probe or silicon nitrate probes.
3. the flying-spot microscope probe of electricity and magnetics signal acquisition function is had both as described in claim 1, it is characterized in that：Institute
The magnetic metallic layers stated are with a thickness of 1nm-50nm.
4. the preparation method of the flying-spot microscope probe of electricity and magnetics signal acquisition function is had both, it is characterized in that：Including as follows
Step：
(1) carbon nanotube is welded in probe tip growth in situ, chemical gluing or bias, makes the carbon nanotube along length
The one end for spending direction is electrically connected with probe tip formation, extension terminal of the other end as probe tip；
(2) along the length direction of carbon nanotube, the position of the other end certain length apart from carbon nanotube as initial position,
Using the method for focused ion beam, in the tube wall deposited magnetic metal layer from the initial position to carbon nanotube rear end；Alternatively,
Along the length direction of carbon nanotube, the position of the other end certain length apart from carbon nanotube is adopted as final position
With the method for focused ion beam, in the tube wall deposited magnetic metal layer from carbon nanotube one end to the final position.
5. the preparation method of the flying-spot microscope probe of electricity and magnetics signal acquisition function is had both as claimed in claim 4,
It is characterized in that：The growth in situ is：Catalyst granules is placed in probe tip, then utilizes carbon nano tube growth technology,
The in-situ growing carbon nano tube at catalyst granules.
6. the preparation method of the flying-spot microscope probe of electricity and magnetics signal acquisition function is had both as claimed in claim 5,
It is characterized in that：The catalyst granules includes gold nano grain and/or nano nickel particles；
Preferably, the carbon nano tube growth method includes chemical vapour deposition technique.
7. the preparation method of the flying-spot microscope probe of electricity and magnetics signal acquisition function is had both as claimed in claim 5,
It is characterized in that：Regulate and control the diameter and/or length of carbon nanotube by changing catalyst particle size and/or growth conditions.
8. the preparation method of the flying-spot microscope probe of electricity and magnetics signal acquisition function is had both as claimed in claim 4,
It is characterized in that：The magnetic metallic layers are with a thickness of 1nm-50nm.
9. the preparation method of the flying-spot microscope probe of electricity and magnetics signal acquisition function is had both as claimed in claim 4,
It is characterized in that：Probe bodies are silicon probe or silicon nitrate probes.
10. as described in any claim in claim 4 to 9 have both electricity and the scanning of magnetics signal acquisition function is micro-
The preparation method of mirror probe, it is characterized in that：In step (1), carbon nanotube is cut using focused ion beam.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710373454.7A CN108931667A (en) | 2017-05-24 | 2017-05-24 | Have both the flying-spot microscope probe and preparation method thereof of electricity and magnetics signal acquisition function |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710373454.7A CN108931667A (en) | 2017-05-24 | 2017-05-24 | Have both the flying-spot microscope probe and preparation method thereof of electricity and magnetics signal acquisition function |
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| CN108931667A true CN108931667A (en) | 2018-12-04 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022227230A1 (en) * | 2021-04-28 | 2022-11-03 | 西安交通大学 | Preparation method for carbon nanotube probe |
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| EP1054249A1 (en) * | 1998-12-03 | 2000-11-22 | Daiken Chemical Co. Ltd. | Electronic device surface signal control probe and method of manufacturing the probe |
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Patent Citations (7)
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| EP1054249A1 (en) * | 1998-12-03 | 2000-11-22 | Daiken Chemical Co. Ltd. | Electronic device surface signal control probe and method of manufacturing the probe |
| CN1397012A (en) * | 2000-11-26 | 2003-02-12 | 大研化学工业株式会社 | Probe for scanning microscope produced by focused ion beam machining |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022227230A1 (en) * | 2021-04-28 | 2022-11-03 | 西安交通大学 | Preparation method for carbon nanotube probe |
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