CN107782918A - A kind of magnetics atomic force microscope probe using magnetic nanometer - Google Patents
A kind of magnetics atomic force microscope probe using magnetic nanometer Download PDFInfo
- Publication number
- CN107782918A CN107782918A CN201610742636.2A CN201610742636A CN107782918A CN 107782918 A CN107782918 A CN 107782918A CN 201610742636 A CN201610742636 A CN 201610742636A CN 107782918 A CN107782918 A CN 107782918A
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- Prior art keywords
- magnetic
- atomic force
- force microscope
- probe
- magnetics
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
- G01Q70/16—Probe manufacture
Abstract
The invention discloses a kind of using magnetics atomic force microscope probe of magnetic nanometer and preparation method thereof, solve the bottleneck problem of current magnetics atomic force microscope probe, substantially increase life-span and the resolution ratio of atomic force microscope probe.Magnetic nanometer probe can use direct bonding method and chemical vapor deposition growth method to prepare.Take full advantage of the ultrahigh resolution and long service life of magnetic one-dimensional nano material probe, solves the short life of magnetics atomic force microscope probe test for a long time, the problems such as easy to wear, the uniformity of test is improved, meet the demand in the different application such as scientific research, production and teaching field.
Description
【Technical field】
The present invention relates to AFM field, especially, is related to a kind of long-life high-resolution magnetics atomic force microscopy
Mirror probe and preparation method thereof.
【Background technology】
AFM (AFM, Atomic Force Microscope) is a kind of to be used for atomic resolution
The important instrument of the performance evaluations such as surface topography, heat, power, electricity, magnetic, optics, is manufacture of semiconductor, Surface Science, nanometer technology
And the important characterization tool in the field such as life science.AFM utilizes a very sharp needle point scanning sample surfaces,
The needle point is connected on cantilever.Cantilever force amount of deflection is detected by laser beam reflected light change in location, then computer disposal
Generate surface topography image.Wherein, AFM probe is the key sensor in AFM.As daily consumptive material, its is main
Manufacturer is distributed in Germany, Switzerland, the U.S., Japan and other countries.Common pattern probe is by using micro electro mechanical system (MEMS) technology
Means (MEMS) process silicon or prepared by silicon nitride.Test to different-shape performance is, it is necessary to match the corresponding of different process preparation
The special probe of performance.Since invention in 1986, the performances such as heat, power, electricity, magnetic, optics have been developed into from initial morphology characterization
Analysis, and it is more and more extensive applied to subjects fields such as physics, chemistry, material, biology, medical science, turn into academia and production
The important test characterization method of industry.
Magnetic force AFM (MFM) is widely used in the field such as magnetic storage, magnetic developing material and manufacture of semiconductor,
New material research, nano material, biochemistry etc..Magnetic force AFM probe is MFM crucial accessory, is in common pattern probe table
The magnetic metallic layers or alloy (such as Ni, Co etc.) that face plating thickness is 10-50nm obtain.However, MFM probes are in use
Its magnetic coating is very easy to abrasion, causes the life-span of its magnetism testing very short, substantially reduces the uniformity of analysis test.Together
When magnetic coating be distributed in whole probe cone point some tens of pm scope, it is rather than most advanced, greatly reduce magnetic property survey
The lateral resolution of examination.In order to improve the resolution ratio of magnetic probe and service life, the exploitation of novel probe is taken seriously.
The problem of in above-mentioned correlation technique, effective solution is not yet proposed at present.
【The content of the invention】
The technical problems to be solved by the invention are：Above-mentioned the deficiencies in the prior art are made up, propose a kind of long-life high score
Magnetic force atomic force microscope probe and preparation method thereof is distinguished, magnetic force AFM testing precision can be significantly improved and divided
Resolution, while service life also greatly prolongs.
The technical problem of the present invention is solved by following technical scheme：
In conventional pattern probe tip an orientation and the controllable magnetic nanometer of size are modified, height is prepared with this
Differentiate the magnetic force atomic force microscope probe with the long-life.Including probe base (3) and probe tip (1) and magnetic nanometer
(2).The probe base (3) is conventional atom force microscope pattern probe (including various patterns use probe), such as silicon probe
Or silicon nitrate probes and other common pattern probe, the needle point of common pattern, length are located on the magnetic nanometer (2)
Can adjust with diameter and orientation to meet various testing requirements, magnetic nanometer (2) material can be Hard Magnetic (such as Fe,
Co, FePt, CoPd, magnetic metal silicide etc.) or soft magnetic materials (Ni-FE, Ni-Zn, Fe-Si etc.).
Preferably, the probe base includes needle stand and cantilever.
Preferably, the magnetic nanometer includes the nano wire using direct bonding and chemical vapor deposition growth.
Preferably, the magnetic nanometer material is remanent magnetism and the suitable Hard Magnetic of coercivity or soft magnetic materials.
Beneficial effects of the present invention：The magnetic force atomic force microscope probe of the present invention substantially increases the service life of probe
With the lateral resolution of detection.So as to solve the problems, such as the bottleneck of magnetic force AFM test for a long time, improve
The uniformity of test.
A kind of preparation method of magnetic force atomic force microscope probe, comprises the following steps：Step 1：From appropriate size
Atomic force microscope probe.According to different applications, there are the suitable cantilever mechanical constant of the selection being directed to, nanowire size etc.；
Step 2：A. micro-nano operating mechanism is used under light microscope or SEM the suitable nano wire of size
Diameter is bonded on needle point.B. magnetic nanometer can also use fixed point catalyst deposit, then chemical vapor deposition growth chi
Very little suitable magnetic nanometer；Step 3：Probe integrally annealed, adjust probe tip stress and change material phase structure as reason
State thought etc.；
【Brief description of the drawings】
In order to illustrate the embodiments of the present invention more clearly, the required accompanying drawing used in embodiment will be made simply below
Introduce, it should be apparent that, drawings in the following description are only some embodiments of the invention, for those of ordinary skill in the art
For, on the premise of not paying creative work, other accompanying drawings can also be obtained according to these accompanying drawings.
Fig. 1 is shown according to a kind of structure of the described long-life high-resolution magnetic force atomic force microscope probe of this practicality invention
It is intended to.
In figure：1st, probe tip；2nd, magnetic nanometer；3rd, needle stand/cantilever.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, rather than whole embodiments.It is based on
Embodiment in the present invention, the every other embodiment that those of ordinary skill in the art are obtained, belong to what the present invention protected
Scope.
Based on the present invention uses conventional atomic force microscope probe, it make use of this probe be easy to get, be inexpensive, be various optional
The advantages of with stablizing.Simultaneously using the high-resolution of magnetic nanometer big L/D ratio and superelevation the advantages of, the two is combined to prepare
The magnetic force atomic force microscope probe of excellent performance.
As shown in figure 1, described magnetic force atomic force microscope probe includes common atom according to an embodiment of the invention
Force microscope probe needle stand 3, needle point 1 and magnetic nanometer 2.Probe needle stand 3 can measure according to magnetic force AFM
Be actually needed from existing market it is existing it is soft rap or hard tapping-mode probe, or even the probe of other pattern is each to meet
The demands such as kind magnetic performance test, magnetic performance operation.Magnetic nanometer 2 can be bonded up the either magnetic of direct growth
Property nano wire is, it is necessary to control the length and diameter and the orientation with needle stand of nano wire.As magnetic measurement, it is necessary to consider rigidity
And lateral resolution, magnetic Nano line length are 50-10000 nanometers, a diameter of 5-500 nanometers.The effect of magnetic nanometer 2 is
The magnetic pole of superelevation lateral resolution is provided, the accuracy of magnetic performance measurement is improved while so as to improve lateral resolution.Magnetic
Property nano wire (2) material can be Hard Magnetic (such as Fe, Co, FePt, CoPd, magnetic metal silicide etc.) or soft magnetic materials (Ni-
FE, Ni-Zn, Fe-Si etc.).
In addition, in a specific embodiment, the magnetic nanometer 2 can be nanotube and nanocone, length
Different parameters can be selected according to concrete application with diameter.
In addition, in a specific embodiment, the magnetic nanometer can be the other functional material of further plating,
Alloy, laminated film etc..And plated film can be reacted into composite in annealing process procedure with nano wire.
In addition, in a specific embodiment, the conventional atomic force microscope probe needle stand 3 can be various moulds
Formula, and have the probe of more than one needle point.
The preparation process schematic diagram of long-life high-resolution atomic force microscope probe shown in Fig. 1, comprises the following steps：
Step 1：From the suitable typical probe of the parameters such as force constant, resonant frequency, then preferred dimension and material are closed again
Suitable magnetic nanometer.
Step 2：A. direct bonding method is used：Control conventional atomic force tip of scanning microscopy contacts with conducting resinl so that
Needle point coats micro bonded adhesives, and directly magnetic is received with micro-nano operating mechanism under optics or SEM
Rice noodles are bonded on needle point；B. or using chemical vapour deposition technique：It is heavy that fixed point is carried out to the typical probe needle point of selection first
Product catalyst, is preferably deposited using nano electrochemical, the various process conditions of chemical vapor deposition is then controlled, directly in pin
Point growth one ruler cun and the controllable magnetic nanometer of material.Whole probe is finally made annealing treatment as needed.Lehr attendant
The practical application that skill is tested according to material and magnetic force AFM is slightly different.In general, anneal in protective atmosphere
Carry out, annealing temperature is controlled at 200-800 DEG C or so, and annealing time is 10-50 minutes.The purpose of this step is the interior of control needle point
Stress, adhesion is improved, while improve the stability of magnetic performance test.
AFM can significantly improve service life and resolution ratio using the probe of the present invention.Common magnetic force atom
The radius of curvature of force microscope probe tip is 50 rans, and the needle point of the magnetic force atomic force microscope probe of the present invention is bent
Rate radius can be as small as several nanometers, so resolution ratio is greatly improved.The probe of the present invention is installed and using upper former with conventional electrical
Sub- force microscope probe is without any difference, because what needle stand was just as.PH effect and microscope work are all just the same, because
This is using above also providing facility.
In summary, by means of the above-mentioned technical proposal of the present invention, magnetic force atomic force microscope probe of the invention is simultaneously
The advantages of being integrated with the ultrahigh resolution and long service life of magnetic nanometer, substantially increase the accuracy of detection of magnetic performance
And service life.Meet the different application demand such as scientific research, industry and teaching, the bottleneck for solving current magnetics test probe.
Above content is to combine specific preferred embodiment further description made for the present invention, it is impossible to is assert
The specific implementation of the present invention is confined to these explanations.For general technical staff of the technical field of the invention,
Some replacements or obvious modification are made on the premise of not departing from present inventive concept, and performance or purposes are identical, should all be considered as
Belong to protection scope of the present invention.
Claims (5)
1. a kind of atomic force microscope probe of nanostructured, more particularly to a kind of to be shown using the magnetics atomic force of magnetic nanometer
Micro mirror probe, it is characterised in that (1) is magnetic nano wire (2) on the needle point.
2. the magnetics atomic force microscope probe according to claim 1 using magnetic nanometer, it is characterised in that：It is described
Needle point (1) is conventional atomic force microscope pattern probe, and material is silicon or silicon nitride, and needle point radius of curvature is 10 nanometers of left sides
The right side, imaging pattern is raps or contact mode, including soft raps and hard tapping-mode.
3. the magnetics atomic force microscope probe according to claim 1 using magnetic nanometer, it is characterised in that：It is described
Magnetic nanometer (2) length is 50-10000 nanometers, a diameter of 5-500 nanometers.
4. the magnetics atomic force microscope probe according to claim 1 using magnetic nanometer, it is characterised in that：It is described
Magnetic nanometer (2) material can be Hard Magnetic (such as Fe, Co, FePt, CoPd, magnetic metal silicide etc.) or soft magnetic materials
(Ni-FE, Ni-Zn, Fe-Si etc.).
5. the magnetics atomic force microscope probe according to claim 1 using magnetic nanometer, it is characterised in that：It is described
Magnetic nanometer can be installed on needle point (1) using direct bonding method, can also be grown in pin using chemical vapour deposition technique
On sharp (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201610742636.2A CN107782918A (en) | 2016-08-29 | 2016-08-29 | A kind of magnetics atomic force microscope probe using magnetic nanometer |
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| CN201610742636.2A CN107782918A (en) | 2016-08-29 | 2016-08-29 | A kind of magnetics atomic force microscope probe using magnetic nanometer |
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Cited By (4)
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| CN108680510A (en) * | 2018-04-24 | 2018-10-19 | 金华职业技术学院 | Surface nanostructure magnetic measurement method |
| CN109765407A (en) * | 2019-01-10 | 2019-05-17 | 西安交通大学 | A kind of big L/D ratio probe preparation method based on monodimension nanometer material |
| CN110373708A (en) * | 2019-07-31 | 2019-10-25 | 东南大学 | Adjustable concentration realizes that the nanometer pinpoint of needle point cone angle control prepares platform and method |
| CN111089988A (en) * | 2019-12-27 | 2020-05-01 | 季华实验室 | High-uniformity magnetic probe and preparation method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109765407A (en) * | 2019-01-10 | 2019-05-17 | 西安交通大学 | A kind of big L/D ratio probe preparation method based on monodimension nanometer material |
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Application publication date: 20180309 |