CN107878983B - 物品搬运设备 - Google Patents

物品搬运设备 Download PDF

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Publication number
CN107878983B
CN107878983B CN201710907212.1A CN201710907212A CN107878983B CN 107878983 B CN107878983 B CN 107878983B CN 201710907212 A CN201710907212 A CN 201710907212A CN 107878983 B CN107878983 B CN 107878983B
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CN
China
Prior art keywords
port
washing
container
article
washing machine
Prior art date
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Active
Application number
CN201710907212.1A
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English (en)
Chinese (zh)
Other versions
CN107878983A (zh
Inventor
田中诚
嶋村淳一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daifuku Co Ltd
Original Assignee
Daifuku Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daifuku Co Ltd filed Critical Daifuku Co Ltd
Publication of CN107878983A publication Critical patent/CN107878983A/zh
Application granted granted Critical
Publication of CN107878983B publication Critical patent/CN107878983B/zh
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0407—Storage devices mechanical using stacker cranes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0478—Storage devices mechanical for matrix-arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Mathematical Physics (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Cleaning By Liquid Or Steam (AREA)
CN201710907212.1A 2016-09-30 2017-09-29 物品搬运设备 Active CN107878983B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016-193915 2016-09-30
JP2016193915A JP6601360B2 (ja) 2016-09-30 2016-09-30 物品搬送設備

Publications (2)

Publication Number Publication Date
CN107878983A CN107878983A (zh) 2018-04-06
CN107878983B true CN107878983B (zh) 2021-05-14

Family

ID=61781035

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201710907212.1A Active CN107878983B (zh) 2016-09-30 2017-09-29 物品搬运设备

Country Status (4)

Country Link
JP (1) JP6601360B2 (ja)
KR (1) KR102419509B1 (ja)
CN (1) CN107878983B (ja)
TW (1) TWI741028B (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6835031B2 (ja) * 2018-04-27 2021-02-24 株式会社ダイフク 物品搬送設備

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5525106A (en) * 1993-04-12 1996-06-11 Daifuku Co., Ltd. Load storing equipment with cleaning device
CN1351758A (zh) * 1999-05-19 2002-05-29 因芬尼昂技术股份公司 处理晶片的装置
CN1426087A (zh) * 2001-11-30 2003-06-25 东京毅力科创株式会社 衬底处理***
CN1672068A (zh) * 2002-07-22 2005-09-21 大日本印刷株式会社 生产线***和在该***中使用的自动仓库
CN1717796A (zh) * 2003-09-01 2006-01-04 东京毅力科创株式会社 基板处理装置
CN1819135A (zh) * 2005-01-28 2006-08-16 大日本网目版制造株式会社 基板处理装置
CN101211757A (zh) * 2006-12-27 2008-07-02 大日本网目版制造株式会社 基板处理装置以及基板处理方法
JP2009057117A (ja) * 2007-08-29 2009-03-19 Sharp Corp 搬送制御システム、搬送制御方法、及び搬送制御プログラム
CN103171842A (zh) * 2011-12-21 2013-06-26 株式会社大福 物品保管设备以及物品保管设备中的维修方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07122531A (ja) * 1993-10-22 1995-05-12 Dainippon Screen Mfg Co Ltd 基板処理液収容装置およびそれを備えた基板処理装置
JP3143700B2 (ja) * 1995-06-27 2001-03-07 東京エレクトロン株式会社 位置合せ装置
JP3682170B2 (ja) * 1998-09-09 2005-08-10 株式会社東芝 カセット搬送システム、半導体露光装置、及びレチクル運搬方法
JP2004303835A (ja) * 2003-03-28 2004-10-28 Ｆａｓｌ Ｊａｐａｎ 株式会社 基板保管装置
JP5610009B2 (ja) * 2013-02-26 2014-10-22 東京エレクトロン株式会社 基板処理装置

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5525106A (en) * 1993-04-12 1996-06-11 Daifuku Co., Ltd. Load storing equipment with cleaning device
CN1351758A (zh) * 1999-05-19 2002-05-29 因芬尼昂技术股份公司 处理晶片的装置
CN1426087A (zh) * 2001-11-30 2003-06-25 东京毅力科创株式会社 衬底处理***
CN1672068A (zh) * 2002-07-22 2005-09-21 大日本印刷株式会社 生产线***和在该***中使用的自动仓库
CN1717796A (zh) * 2003-09-01 2006-01-04 东京毅力科创株式会社 基板处理装置
CN1819135A (zh) * 2005-01-28 2006-08-16 大日本网目版制造株式会社 基板处理装置
CN101211757A (zh) * 2006-12-27 2008-07-02 大日本网目版制造株式会社 基板处理装置以及基板处理方法
JP2009057117A (ja) * 2007-08-29 2009-03-19 Sharp Corp 搬送制御システム、搬送制御方法、及び搬送制御プログラム
CN103171842A (zh) * 2011-12-21 2013-06-26 株式会社大福 物品保管设备以及物品保管设备中的维修方法

Also Published As

Publication number Publication date
CN107878983A (zh) 2018-04-06
JP2018052724A (ja) 2018-04-05
KR102419509B1 (ko) 2022-07-08
TWI741028B (zh) 2021-10-01
KR20180036576A (ko) 2018-04-09
TW201814815A (zh) 2018-04-16
JP6601360B2 (ja) 2019-11-06

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