CN107843198A - A kind of device for being used to measure the division displacement of light logic gates - Google Patents
A kind of device for being used to measure the division displacement of light logic gates Download PDFInfo
- Publication number
- CN107843198A CN107843198A CN201710969479.3A CN201710969479A CN107843198A CN 107843198 A CN107843198 A CN 107843198A CN 201710969479 A CN201710969479 A CN 201710969479A CN 107843198 A CN107843198 A CN 107843198A
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- China
- Prior art keywords
- lens group
- polarizer
- sample
- measure
- logic gates
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- 238000006073 displacement reaction Methods 0.000 title claims abstract description 23
- 238000003384 imaging method Methods 0.000 claims abstract description 11
- 238000013519 translation Methods 0.000 claims description 7
- 230000014616 translation Effects 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 4
- 229910052755 nonmetal Inorganic materials 0.000 claims description 4
- 238000005259 measurement Methods 0.000 abstract description 9
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 238000001514 detection method Methods 0.000 abstract description 2
- 230000010287 polarization Effects 0.000 description 5
- 230000005355 Hall effect Effects 0.000 description 4
- 238000009738 saturating Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J4/00—Measuring polarisation of light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J4/00—Measuring polarisation of light
- G01J4/04—Polarimeters using electric detection means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a kind of device for being used to measure the division displacement of light logic gates, including：LASER Light Source, polarizer, lens group, sample console, photosensitive imaging device and computer.The with a tight waist of LASER Light Source is located in the front focus of lens group；The rear focus of lens group is located on the tested film surface of sample；The front focus of lens group and the rear focus of lens group are in same position.The beneficial effects of the invention are as follows：The simple in measurement system structure, belong to Non-contact nondestructive detection, measurement accuracy is high, and easy to operation, use range is wide.
Description
Technical field
It is more particularly to a kind of to be used to measure light spin Hall the present invention relates to a kind of measurement apparatus of nanoscale optics displacement
Effect divides the device of displacement.
Background technology
When a branch of linearly polarized light incides air and prism interface, due to the refractive index uneven distribution of medium,
The circularly polarized light of two beams in opposite direction is split into when reflection or refraction, this phenomenon is called light logic gates.
Spin of photon Hall effect is a kind of sensitive physical effect, and traversing value in nanostructured for tying caused by it
The change of structure parameter is very sensitive, therefore spin of photon Hall effect can turn into a kind of potential Precision measurement tools, also may be used
To realize spin state of detection and manipulation electronics etc..Based on its wide application prospect, the present invention proposes a kind of in measurement light
Logic gates divide the device of displacement.
The content of the invention
The technical problems to be solved by the invention be to provide it is a kind of have light high-precision, simple in construction, easy to operation from
Revolve the measurement apparatus of Hall effect division displacement.
In order to solve the above-mentioned technical problem, the technical solution adopted by the present invention is：One kind is used to measure light spin Hall effect
The device of displacement should be divided, including：LASER Light Source, the first polarizer, the first lens group, sample console, the second lens group,
Two polarizers, photosensitive imaging device and computer, the with a tight waist of the LASER Light Source are located in the front focus of first lens group；
The rear focus of first lens group is located on the surface of sample；The front focus of second lens group and described first saturating
The rear focus of microscope group is in same position.
The sample is metal or nonmetal film.
The LASER Light Source is monochromatic source, and institute's shoot laser is vertically through the first polarizer, the first lens group, second saturating
Microscope group, the second polarizer, and finally impinge perpendicularly on the photosurface of photosensitive imaging device；The LASER Light Source, the first polarization
Piece, the first lens group, the second lens group, the second polarizer center in the same plane.
First polarizer be positioned between LASER Light Source and the first lens group or the first lens group and sample it
Between.
Second polarizer is positioned between the second lens group and photosensitive imaging device or sample and the second lens
Between group.
The sample console includes XYZ D translations guide rail and corner platform, and the XYZ D translations guide rail is in XYZ
Linear motion is realized in direction, and the corner platform rotates in X/Y plane.
The beneficial effects of the invention are as follows：The present invention realizes the high-acruracy survey to nanoscale light spin-spin splitting displacement, and
It is the simple in measurement system structure, easy to operation, applied widely；Pass through the thickness of the measurable metal of this device or nonmetal film
Degree.
Brief description of the drawings
Fig. 1 is the schematic device that the present invention is used to measure light logic gates,
Fig. 2 is the schematic diagram that sample of the present invention is placed on sample console.
Embodiment
The present invention is described in further detail with reference to the accompanying drawings and detailed description：
After incident light incides sample surface at an angle, light logic gates, reflected light and transmission occurs
Light is left-handed and right hand component can divide, and the displacement of division can be according to the difference of the parameter of reflecting interface, and incidence
Angle difference and change.
As shown in Figure 1 and Figure 2, a kind of device for being used to measure the division displacement of light logic gates, including：LASER Light Source
1st, the first polarizer 2, the first lens group 3, sample console 4, the second lens group 6, the second polarizer 7, the and of photosensitive imaging device 8
Computer 9, the with a tight waist of LASER Light Source 1 are located in the front focus of the first lens group 3；The rear focus of first lens group 3 is positioned at tested
On the surface of sample 5；The rear focus of the front focus of second lens group 6 and the first lens group 3 is in same position.LASER Light Source is monochrome
Light source, institute's shoot laser should vertically pass through the first polarizer 2, the second lens group 3, the second lens group 6, the first polarizer 7, and most
Impinge perpendicularly on eventually on the photosurface of photosensitive imaging device 8.LASER Light Source 1, the first polarizer 2, the first lens group 3, second are saturating
Microscope group 6, the second polarizer 7 center in the same plane.First polarizer 2 can be positioned over the lens group 3 of LASER Light Source 1 and first
Between or the first lens group 3 and sample 5 between.Second polarizer 7 can be positioned over the second lens group 6 and photosensitive imaging device
Between 8 or between the lens group 6 of sample 5 and first.Sample 5 is metal or nonmetal film, through measuring obtained light
Logic gates division displacement can calculate film thickness.
Sample console 4 is made up of XYZ D translations guide rail 401 and corner platform 402, and XYZ D translations guide rail can be with
Realize and move along a straight line in XYZ directions, corner platform 402 can rotate in X/Y plane.
Measurement process：
It is changed into linearly polarized light after polarizer 2 from the laser vertical that LASER Light Source 1 is sent, by adjusting polarizer 2
Polarization direction, institute's shoot laser can be changed into the linearly polarized light that the required angle of polarization is γ, then perpendicular through biconvex lens 3 after
It is focused onto the surface of sample 5 placed on corner platform 402.Adjust XYZ D translations guide rail 401 and corner platform 402
The original incident angle θ 0 for making incident light to choose incides the surface of sample 5.Incident light reflects at this interface, the concurrent third contact of a total solar or lunar eclipse
Logic gates, and then produce spin-spin splitting.Reflected light passes perpendicularly through lens group 6 and polarizer 7, is polarized by adjusting
The polarization direction of piece 7, institute's shoot laser is changed into the linearly polarized light that the required angle of polarization is the ± Δs of γ+90.By the institute of polarizer 7 thoroughly
The laser penetrated, impinge perpendicularly on the photosurface of photosensitive imaging device 8, be in image is sent to computer 9, then by computer
9 pairs of reflected images obtained carry out a series of image procossing and calculated, and finally draw the value δ of left-handed component division displacement.
Then by adjusting corner platform 401, change incident angle θ successively, and record the spin measured by incidence angles degree successively
Divide shift value δ (θ), thus sketch out the experiment curv that spin-spin splitting shift value changes with incident angle.
When sample is changed to film, the division displacement of each film of gained is handled, obtains film thickness information.Than
Such as, we can be drawn in golden film 0-100 nanometers under any thickness by theoretical calculation, incidence angle and the theory of division displacement
Respective value.When the incidence angle that measurement obtains, divide the incidence angle in the data and 0-100 nanometers of displacement under any thickness and division
The theoretical respective value of displacement, is matched and is compared, if measured obtained data and theoretical value at 50 nanometers are closest,
The thickness that so we are considered as tested film is 50 nanometers.
The present invention is in addition to above-mentioned embodiment, also other embodiment, every to use equivalent substitution or equivalent transformation shape
Into technical scheme, all fall within the protection domains of application claims.
Claims (6)
1. a kind of device for being used to measure the division displacement of light logic gates, including：LASER Light Source (1), the first polarizer
(2), the first lens group (3), sample console (4), the second lens group (6), the second polarizer (7), photosensitive imaging device (8) and
Computer (9), it is characterized in that：The with a tight waist of the LASER Light Source (1) is located in the front focus of first lens group (3)；It is described
The rear focus of first lens group (3) is located on the surface of sample (5)；The front focus of second lens group (6) with it is described
The rear focus of first lens group (3) is in same position.
2. a kind of device for being used to measure the division displacement of light logic gates according to claim 1, it is characterized in that：Institute
It is metal or nonmetal film to state sample (5).
3. a kind of device for being used to measure the division displacement of light logic gates according to claim 1 or 2, its feature
It is：The LASER Light Source (1) is monochromatic source, and institute's shoot laser is vertically through the first polarizer (2), the first lens group (3), the
Two lens groups (6), the second polarizer (7), and finally impinge perpendicularly on the photosurface of photosensitive imaging device (8)；The laser
Light source (1), the first polarizer (2), the first lens group (3), the second lens group (6), the center of the second polarizer (7) are same flat
In face.
4. a kind of device for being used to measure the division displacement of light logic gates according to claim 1 or 2, its feature
It is：First polarizer (2) is positioned between LASER Light Source (1) and the first lens group (3) or the first lens group (3) is with being tested
Between sample (5).
5. a kind of device for being used to measure the division displacement of light logic gates according to claim 1 or 2, its feature
It is：Second polarizer (7) is positioned between the second lens group (6) and photosensitive imaging device (8) or sample (5) and the
Between two lens groups (6).
6. a kind of device for being used to measure the division displacement of light logic gates according to claim 1 or 2, its feature
It is：The sample console (4) includes XYZ D translations guide rail (401) and corner platform (402), and the XYZ D translations are led
Rail realizes and moved along a straight line that the corner platform (402) rotates in X/Y plane in XYZ directions.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710969479.3A CN107843198A (en) | 2017-10-18 | 2017-10-18 | A kind of device for being used to measure the division displacement of light logic gates |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710969479.3A CN107843198A (en) | 2017-10-18 | 2017-10-18 | A kind of device for being used to measure the division displacement of light logic gates |
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| Publication Number | Publication Date |
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| CN107843198A true CN107843198A (en) | 2018-03-27 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201710969479.3A Pending CN107843198A (en) | 2017-10-18 | 2017-10-18 | A kind of device for being used to measure the division displacement of light logic gates |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110285766A (en) * | 2019-07-26 | 2019-09-27 | 郑州轻工业学院 | A method of nano-level thin-membrane thickness is measured using spin of photon Hall effect |
Citations (4)
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|---|---|---|---|---|
| JP2013228330A (en) * | 2012-04-26 | 2013-11-07 | Jfe Steel Corp | Film thickness measuring apparatus and film thickness measuring method |
| CN103512653A (en) * | 2012-06-29 | 2014-01-15 | 新昌县冠阳技术开发有限公司 | Device capable of measuring spin Hall effect of reflected light |
| CN106018273A (en) * | 2016-05-13 | 2016-10-12 | 河海大学常州校区 | Light beam transverse micro-displacement generation system based on spin Hall effect of light and MIM structure |
| CN107246844A (en) * | 2017-07-17 | 2017-10-13 | 天津大学 | SHEL for measuring film thickness divides displacement measurement method |
-
2017
- 2017-10-18 CN CN201710969479.3A patent/CN107843198A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013228330A (en) * | 2012-04-26 | 2013-11-07 | Jfe Steel Corp | Film thickness measuring apparatus and film thickness measuring method |
| CN103512653A (en) * | 2012-06-29 | 2014-01-15 | 新昌县冠阳技术开发有限公司 | Device capable of measuring spin Hall effect of reflected light |
| CN106018273A (en) * | 2016-05-13 | 2016-10-12 | 河海大学常州校区 | Light beam transverse micro-displacement generation system based on spin Hall effect of light and MIM structure |
| CN107246844A (en) * | 2017-07-17 | 2017-10-13 | 天津大学 | SHEL for measuring film thickness divides displacement measurement method |
Non-Patent Citations (1)
| Title |
|---|
| 李星等: "纳米金属薄膜中光子自旋霍尔效应的最佳弱测量", 《光学学报》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110285766A (en) * | 2019-07-26 | 2019-09-27 | 郑州轻工业学院 | A method of nano-level thin-membrane thickness is measured using spin of photon Hall effect |
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Application publication date: 20180327 |