CN101852591A - Imaging ellipsometer based on magneto-optical effect - Google Patents
Imaging ellipsometer based on magneto-optical effect Download PDFInfo
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Abstract
The invention discloses an imaging ellipsometer based on magneto-optical effect, which relates to a film thickness measurement method and a device, particularly to a method and a device for observing the thickness distribution of a nano film on the surface of a sample. The ellipsometer is characterized in that a polarizer, a compensator and an analyzer capable of rotating in the direction of a transmission axis are adopted to correct a system, a magneto-optical modulation technology is adopted to change the polarization direction of the received light, a plane array detector is adopted to record the ellipsometry images of the film on the surface of the sample, iterative algorithm is adopted to process the data, and the shape parameters of the film on the surface of the sample are precisely measured. The imaging ellipsometer based on magneto-optical effect solves the defects of the prior art, improves the precision in detecting the polarization of the received light, and improves the measurement speed.
Description
Technical field
The present invention relates to a kind of measuring method and device of film thickness, particularly be applied to the method and apparatus that sample surfaces nanoscale film thickness is distributed and observes.
Background technology
The ellipsometric measurement method is to utilize the measuring technique of polarized light measurement film or interface parameter, changes parameters such as obtaining sample thickness and refractive index by the polarization state of measuring through sample reflection (or transmission) light.Ellipsometer is widely used in the mensuration of film thickness and optical constant, can measure multilayer film simultaneously, and the film thickness measuring scope is big, can be from several nanometers to 1 micron.Ellipsometer be a kind of fast, high precision, non-contact optical surveying instrument, can under various complex environments, use, can analyze various semiconductors and oxide components, the gradient film of compound semiconductor composition and the refractive index and the physical structural characteristics such as thickness and microstructure of transparent membrane.
Using more at present, ellipsometer has single wavelength ellipsometer, spectroscopic ellipsometers and infrared ellipsometer.But above-mentioned ellipsometer all is based on spot measurement, promptly the sample area that hot spot covered is thought the information of a point.Because spot size is generally a millimeter magnitude, in order to improve the lateral resolution of ellipsometer, ellipsometer is combined with imaging system, just formed imaging ellipsometer, it utilizes imaging system to obtain the ellipse inclined to one side image of sample surfaces film, thereby obtain the pattern information and the thickness distribution of film, to obtain the spatial detail information higher than common single-point ellipsometer.
But the optical axis direction that existing imaging ellipsometer device adopts stepper motor to change the polarizer, compensator or analyzer is usually realized measuring, and measuring accuracy is subjected to the restriction of mechanical mechanism controls precision, and measuring repeatability and stability are all limited.The control rate of mechanical mechanism has also limited the measuring speed of ellipsometer greatly in addition, can't satisfy real-time, online measurement requirement.
Summary of the invention
The objective of the invention is to propose a kind of new ellipse inclined to one side method and apparatus of the imaging based on magneto-optic effect, effectively solve the deficiency of existing method, can accurately measure, can improve measurement stability and speed simultaneously the sample surfaces film morphology.
The present invention proposes a kind of novel imaging ellipsometer based on magneto-optic effect.Can change the principle of light polarization based on magneto-optic effect, utilize magneto-optic modulator to replace the measurement that method that traditional stepper motor rotates the polarizer, compensator or analyzer optical axis realizes ellipsometer.Because magneto-optic modulator is controlled by Circuits System, modulating speed is fast, the modulation accuracy height, and do not have mechanical rotation in the whole measuring process.Thereby can improve measuring accuracy, stability and the speed of imaging ellipsometer.
According to an aspect of the present invention, provide a kind of imaging ellipsometer, comprised setting gradually along a light path based on magneto-optic effect:
Light source is used to send the unifrequency light that shines object to be measured;
The collimator and extender device is used for the light that described light source sends is collimated and expands bundle;
The polarizer is used for the light of the random polarization state of described collimator and extender device output is transformed into linearly polarized light;
Analyzer is used to change the polarisation of light direction from described object to be measured that is received, and polarization light output;
It is characterized in that described imaging ellipsometer further comprises:
A magneto-optic modulator, described magneto-optic modulator are set at described light path on the part between the described polarizer and the described analyzer, are used for the polarisation of light direction of the described magneto-optic modulator of incident is rotated a certain angle.
According to another aspect of the present invention, provide a kind of imaging ellipsometer measuring method, having comprised based on magneto-optic effect:
The light that utilizes a collimator and extender device that a light source is sent collimates and expands bundle;
Utilize a polarizer that the light of the random polarization state of described collimator and extender device output is transformed into linearly polarized light;
Utilize an analyzer to change the polarisation of light direction that is received from described object to be measured, and polarization light output;
It is characterized in that further comprising:
Utilization is arranged on the magneto-optic modulator of described light path on the part between the described polarizer and the described analyzer, will rotate a certain angle along the polarisation of light direction of the described magneto-optic modulator of described light path incident.
Description of drawings
Fig. 1 is a kind of imaging ellipsometer device synoptic diagram based on magneto-optic effect according to an embodiment of the invention.
Fig. 2 is the principle of work synoptic diagram as the magneto-optic modulator that adopts among Fig. 1.
Fig. 3 is a kind of imaging ellipsometer workflow synoptic diagram based on magneto-optic effect according to an embodiment of the invention.
Fig. 4 is according to an embodiment of the invention a kind of based on magneto-optic effect imaging ellipsometer device synoptic diagram, and magneto-optic modulator places polarizer position afterwards.
Fig. 5 is according to an embodiment of the invention a kind of based on magneto-optic effect imaging ellipsometer device synoptic diagram, and magneto-optic modulator places compensator position afterwards.
Embodiment
Shown in Fig. 1,4 and 5, the invention is characterized in, contain: have the incident arm of polarization state and spot size control assembly, have the reception arm and the control system of polarization state and spot size control assembly, wherein:
Have the incident arm (1) of polarization state and spot size control assembly, contain: light source (3), collimator and extender device (4), the polarizer (5), Spin Control platform (6), compensator (7), Spin Control platform (8), incident diaphragm (10), wherein:
Light source (3) is used to send the unifrequency light that shines object to be measured;
Collimator and extender device (4) is used for the laser beam collimation that laser instrument (3) is sent and expands bundle, makes emergent light become directional light;
The polarizer (6) is used for the directional light of random polarization state is become the directional light of linear polarization;
Spin Control platform (7), be used to rotate the polarizer (6) make its optical axis with directional light direction of propagation vertical plane in rotate; The polarizer (6) is fixed on this Spin Control platform (7), and Spin Control platform (7) is controlled by second driver (19);
Compensator (8), normally a wave plate as quartz or mica, is used for producing certain phase delay on orthogonal two polarization directions, and linearly polarized light is become elliptically polarized light; The optical axis direction angle of the optical axis direction of compensator (8) and the polarizer (6) is the α degree, 0 °＜α＜90 °;
Spin Control platform (9), be used for rotation compensation device (7) make its optical axis with linear polarization directional light direction of propagation vertical plane in rotate; Compensator (8) is fixed on this Spin Control platform (9), and Spin Control platform (9) is controlled by second driver (19);
Incident diaphragm (10) is used to change the beam sizes size; Diaphragm (10) center overlaps with beam center, can change the size of outgoing beam by the aperture of regulating diaphragm (10);
Have the reception arm (2) of polarization state and spot size control assembly, contain: outgoing diaphragm (11), magneto-optic modulator (12), analyzer (13), Spin Control platform (14), imaging system (15), planar array detector (16), wherein:
Outgoing diaphragm (11) is used to change the beam sizes size; Outgoing diaphragm (11) center overlaps with beam center, can change the size of outgoing beam by the aperture of regulating diaphragm (11);
Magneto-optic modulator (12) is used for its polarization of incident light direction is rotated a certain angle; The emergent light polarization direction anglec of rotation by magneto-optic modulator (12) is controlled by first driver (18);
Analyzer (13) is used for changing reception polarisation of light direction, is linearly polarized light through the emergent light behind the analyzer (13);
Spin Control platform (14), be used to rotate analyzer (13) make its optical axis with directional light direction of propagation vertical plane in rotate; Analyzer (13) is fixed on this Spin Control platform (14), and Spin Control platform (14) is controlled by second driver (19);
Imaging system (15) is used for the distortionless light-sensitive surface that is focused at planar array detector (16) of hot spot;
Planar array detector (16), the two-dimensional space light signal that is used for receiving are converted into electric signal output, as face battle array silicon photocell or charge-coupled device (CCD) or CMOS;
Control system (3), contain: computing machine (17), first driver (18), second driver (19), image pick-up card (20), wherein:
Computing machine (17), the drive signal and the image pick-up card (20) that are used to control first driver (18) and second driver (19) are finished image acquisition, receive the feedback signal of first driver (18) and second driver (19) and the picture signal of image pick-up card (20);
First driver (18) is used for producing the drive signal of controlling magneto-optic modulator (12);
Second driver (19) is used for producing control Spin Control platform (7), the drive signal of Spin Control platform (8) and Spin Control platform (9);
Image pick-up card (20) is used for the analog electrical signal of the output of planar array detector (16) is converted to digital electric signal and this signal is transferred to computing machine (17).
Measured film thickness device according to an embodiment of the invention as shown in Figure 1.This device comprises three parts: have the incident arm (1) of polarization state and spot size control assembly, have the reception arm (2) and the control system (3) of polarization state and spot size control assembly.Wherein, such as the light source (4) of laser instrument, collimator and extender device (5), the polarizer (6), Spin Control platform (7), compensator (8), Spin Control platform (9) and diaphragm (10) are included in the incident arm (1) that has polarization state and spot size control assembly; Diaphragm (11), magneto-optic modulator (12), analyzer (13), Spin Control platform (14), imaging system (15) and planar array detector (16) are included in the reception arm (2) that has polarization state and spot size control assembly; Computing machine (17), first driver (18), second driver (19) and image pick-up card (20) forming control system (3).
The workflow of measured film thickness device according to an embodiment of the invention as shown in Figure 3.Wherein N represents magneto-optic modulator (12) with the polarization of incident light direction equal angles needed number of revolutions that rotates a circle, and then passing through magneto-optic modulator (12) the each anglec of rotation in emergent light polarization direction afterwards is the 360/N degree; I represents through magneto-optic modulator (12) emergent light polarization direction afterwards the I time equal angles rotation to take place, and is the 360I/N degree and pass through magneto-optic modulator (12) emergent light polarization direction afterwards with respect to the anglec of rotation of polarization of incident light direction.The value of N is a positive integer, and the value of I is a nonnegative integer.
As shown in Figure 3, at first, initialization experimental provision (step S301), comprise by computing machine (17) control second driver (19) and rotate polarizer Spin Control platform (7), compensator Spin Control platform (9), analyzer Spin Control platform (14) respectively, thereby change the optical axis direction of the polarizer (6), compensator (8), analyzer (13), make that the polarizer (6) and the optical axis direction angle of compensator (8) are the α degree, the polarizer (8) is the β degree with the optical axis included angle of analyzer (13).
After the initialization correction is finished, set the value (step S302) of I=0 and N.
Subsequently, computing machine (17) is by the ellipse inclined to one side picture signal (step S303) of image pick-up card (20) record surface array detector (16).
Computing machine (17) control first driver (18) makes magneto-optic modulator (12) emergent light polarization direction with respect to current polarization direction rotation 360/N degree, and sets I=I+1 (step S304).
Then, whether the rotation outgoing light polarization direction number of times I that judges current magneto-optic modulator (12) is less than N (step S305): if "Yes", then turn back to step S303, computing machine (17) is by the ellipse inclined to one side picture signal of image pick-up card (20) record surface array detector (16), and control first driver (18) and make magneto-optic modulator (12) emergent light polarization direction with respect to current polarization direction rotation 360/N degree, and set I=I+1 (step S304), continue to judge that whether I is less than N; If "No", then computing machine (17) control first driver (18) stops to drive magneto-optic modulator (12) (step S306).Then, whole measuring process finishes.
After measurement is finished, adopt the fitting algorithm of ellipsometry data processing that the N that records is opened ellipse inclined to one side image and handle, can obtain the shape appearance figure that the sample surfaces film thickness distributes.
The measuring principle of this experimental provision is as follows:
The ultimate principle of ellipsometric measurement method is:
Wherein, R
PAnd R
SFor reflecting the p component of back reflection coefficient and the complex amplitude of s component through sample surfaces;
The ratio of the amplitude of expression reflection coefficient p component and s component; Δ is represented the phase differential of two components;
Being called as ellipse inclined to one side parameter with Δ, is the parameter that ellipsometer directly records; ρ is the elliptic function of sample.
For single thin film testing sample shown in Figure 1, measure the thickness and the refractive index of the film (21) in the substrate (22).The refractive index of elliptic function ρ and film, extinction coefficient and thicknesses of layers satisfy following relation:
ρ＝f(n
0，n
1，n
2，k
0，k
1，k
2，d
1，λ，θ) (2)
Wherein, n
0, n
1, n
2Be respectively the refractive index of incident air layer, thin layer (21) and basalis (22), k
0, k
1, k
2Be respectively the extinction coefficient of incident air layer, thin layer (21) and basalis (22), d
1Be the thicknesses of layers of thin layer (21), λ is a lambda1-wavelength, and θ is an incident angle.Ellipsometer records ellipse inclined to one side parameter
Behind Δ, calculate parameters such as the thickness can obtain testing sample, refractive index by numerical inversion.
The principle of work of magneto-optic modulator as shown in Figure 2.If a branch of linearly polarized light is arranged to be propagated along the axis direction of magneto-optical crystal (25), utilize modulation power source (26) loading current on the coil that is wound in magneto-optical crystal (25), thereby on the direction of propagation, produce D.C. magnetic field perpendicular to light, the polarization direction of emergent light will rotate an angle γ degree, and this phenomenon is called magneto-optic effect.Experiment shows that magneto-optic effect satisfies following rule:
γ＝VlB (3)
Wherein, γ is the angle of light wave polarization direction rotation, and V is Wei Erdai (Verdet) constant, and l is magneto-optical crystal (a 25) length, and B is a magnetic induction density.The electric current that changes on the coil by modulation power source (26) changes magnetic induction density B, thereby can change the angle γ of light wave polarization direction rotation.
When experimental provision of the present invention is measured, the fixing polarizer (6), compensator (8), the optical axis direction of analyzer (13), wherein the polarizer and compensator optical axis included angle are the α degree, the polarizer and analyzer optical axis included angle are the β degree.After magneto-optic modulator (12) carries out I rotatory polarization direction modulation to reception light, its change of polarization γ
I(I=0,1, L, N-1) degree, the light intensity signal that corresponding planar array detector receives is I
I(x, and y) (I=0,1, L, N-1), wherein (x y) is the pairing cell coordinate of planar array detector.Can obtain I thus
I(x, the form of expression formula y) is:
Wherein, G is system's light intensity gain, G, and α and β are constant, I
I(x, y) and γ
IBut be measuring amount,
Be to be measured with Δ.
At first set up the physical model of testing sample surface film before the measurement, comprise the film number of plies, material and vertically distributed intelligence, adopt iterative algorithm to calculate according to formula (4)
And Δ, set up evaluation function and be:
Wherein,
And Δ
*Be calculated value according to the model of the testing sample surface film correlation parameter set up,
And Δ
iBe the single measurement value.When RSS got minimum value, iterative algorithm stopped, and had promptly obtained
With the optimum solution of Δ, can obtain the thickness and the refractive index information of film again by formula (1) and (2).
The spot size of apparatus of the present invention incident light and reception light is adjustable, and (x y) all can detect light intensity signal I to each pixel of planar array detector (16)
I(x y) and with electrical signal form exports.The light-sensitive surface of planar array detector (16) is regional corresponding with being detected of testing sample, because the pixel quantity of planar array detector (16) is many, size is little and with array format, so can obtain the details resolution characteristic higher than traditional spot measurement ellipsometer.In addition, apparatus of the present invention adopt the optical axis of stepper motor the rotation polarizer, compensator and analyzer before measuring beginning device parameter to be proofreaied and correct.During measurement, the fixing optical axis position of the polarizer, compensator and analyzer, first driver (18) is by the output current value of the modulation power source (26) of control magneto-optic modulator (12), and the polarization direction of the emergent light of control magneto-optic modulator (12), planar array detector (16) record light intensity signal I
I(x, y).
The method that apparatus of the present invention adopt magneto-optic modulator to replace traditional stepper motor the rotation polarizer, compensator or analyzer optical axis realizes the collection of ellipse inclined to one side image, and stepper motor rotates the polarizer, compensator or analyzer optical axis only as the device correction of measuring before beginning.Adopt magneto-optic modulator to change reception polarisation of light direction and can obtain, and the modulating speed of magneto-optic modulator has improved measuring speed soon than mechanical type the rotation polarizer, compensator or higher polarization direction control accuracy and the repeatable accuracy of analyzer optical axis.The calibration of apparatus of the present invention, measurements and calculations process can be measured testing sample automatically all by computer control, directly generate testing sample thickness distribution figure.
Fig. 4 has shown the measured film thickness device according to a further embodiment of the present invention; Present embodiment and difference embodiment illustrated in fig. 1 are: magneto-optic modulator (12) is arranged in the light path between the polarizer (6) and the compensator (7).
Fig. 5 has shown measured film thickness device according to still another embodiment of the invention; The difference of embodiment shown in present embodiment and the figure is: magneto-optic modulator (12) is arranged in the light path between compensator (7) and the measurand (film (21)).
Should be understood that, in above narration and explanation to just explanation but not determinate of description that the present invention carried out, and do not breaking away under the prerequisite of the present invention that limits as appended claims, can carry out various changes, distortion and/or correction the foregoing description.
Claims (10)
1. imaging ellipsometer based on magneto-optic effect comprises setting gradually along a light path:
Light source (4) is used to send the unifrequency light that shines object to be measured;
Collimator and extender device (5) is used for the light that described light source (4) sends is collimated and expands bundle;
The polarizer (6) is used for the light of the random polarization state of described collimator and extender device (5) output is transformed into linearly polarized light;
Analyzer (13) is used to change the polarisation of light direction from described object to be measured that is received, and polarization light output;
It is characterized in that described imaging ellipsometer further comprises:
A magneto-optic modulator (12), described magneto-optic modulator (12) is set at described light path and is positioned on the part between the described polarizer (6) and the described analyzer (13), is used for the polarisation of light direction of the described magneto-optic modulator of incident (12) is rotated a certain angle.
2. ellipsometer according to claim 1 is characterized in that:
Described magneto-optic modulator (12) further comprises:
A magneto-optical crystal (25), described magneto-optical crystal (25) are set at described light path and are positioned on the part between the described polarizer (6) and the described analyzer (13), and the axis of magneto-optical crystal (25) is along described light path,
Around a coil of described magneto-optical crystal (25), and
A modulation power source (26) is used for to described coil loading current,
Described ellipsometer further comprises:
One first driver (18) is used to control the size that described modulation power source (26) is loaded into the described electric current on the described coil.
3. imaging ellipsometer according to claim 1 and 2 is characterized in that further comprising:
An imaging system (15), it is set on the described light path in described analyzer (13) downstream,
A planar array detector (16), it is set on the described light path in described imaging system (15) downstream,
A polarizer Spin Control platform (7) is used to make the optical axis of the described polarizer (6) to rotate in a plane vertical with described light path;
A compensator (8), be used on orthogonal two polarization directions, producing a phase delay, thereby linearly polarized light is become elliptically polarized light, and the optical axis direction of the optical axis direction of wherein said compensator (8) and the described polarizer (6) has an angle α and 0 °＜α＜90 °
A compensator Spin Control platform (9) is used to make the optical axis of described compensator (7) to rotate in a plane vertical with described light path;
An analyzer Spin Control platform (14) is used to make the optical axis of described analyzer (13) to rotate in a plane vertical with described light path;
One second driver (19) is used to control the rotation of described polarizer Spin Control platform (7), compensator Spin Control platform (9) and analyzer Spin Control platform (14).
4. ellipsometer according to claim 3 is characterized in that described magneto-optic modulator (12) is set at one of following two positions:
The part of described light path from the described polarizer (6) to described compensator (8),
The part of described light path from described compensator (8) to described analyzer (13).
5. ellipsometer according to claim 4, wherein said light source (4) comprises a laser instrument, it is characterized in that further comprising:
An incident diaphragm (10) is used to change along the size of described light path photograph to the light beam of described object to be measured;
An outgoing diaphragm (11) is used to change along the size of described light path from the light beam of described object to be measured;
An image pick-up card (20) is used for converting the analog electrical signal of the output of described planar array detector (16) to digital electric signal;
A computing machine (17) is used to control described first driver (18) and described second driver (19) and receives and handle described digital electric signal from described image pick-up card (20).
6. imaging ellipsometer measuring method based on magneto-optic effect comprises:
The light that utilizes a collimator and extender device (5) that a light source (4) is sent collimates and expands bundle;
Utilize a polarizer (6) that the light of the random polarization state of described collimator and extender device (5) output is transformed into linearly polarized light;
Utilize an analyzer (13) to change the polarisation of light direction that is received from described object to be measured, and polarization light output;
It is characterized in that further comprising:
Utilization is arranged on described light path and is positioned at a magneto-optic modulator (12) on the part between the described polarizer (6) and the described analyzer (13), will rotate a certain angle along the polarisation of light direction of the described magneto-optic modulator of described light path incident (12).
7. measuring method according to claim 6, wherein said magneto-optic modulator (12) comprises a magneto-optical crystal (25), and it is characterized in that:
The described step that will rotate a certain angle along the polarisation of light direction of the described magneto-optic modulator of described light path incident (12) comprises:
Described magneto-optical crystal (25) is arranged on described light path is positioned on the part between the described polarizer (6) and the described analyzer (13), the axis that makes described magneto-optical crystal (25) is along described light path, and
Utilize a modulation power source (26) to give a coil loading current that centers on described magneto-optical crystal (25),
And described measuring method further comprises:
Utilize one first driver (18) to control the size that described modulation power source (26) is loaded into the described electric current on the described coil.
8. measuring method according to claim 7 is characterized in that further comprising:
With an imaging system (15) light beam on the described light path in described analyzer (13) downstream is carried out imaging,
Utilize a planar array detector (16) to receive described imaging system (15) imaging, and the two-dimensional space light signal of the picture that will receive is converted into electric signal output;
Utilize a polarizer Spin Control platform (7) that the optical axis of the described polarizer (6) is rotated in a plane vertical with described light path;
Utilize a compensator (8) on orthogonal two polarization directions, to produce a phase delay, thereby linearly polarized light is become elliptically polarized light, the optical axis direction of the optical axis direction of wherein said compensator (8) and the described polarizer (6) has an angle α and 0 °＜α＜90 °, utilizes compensator Spin Control platform (9) that the optical axis of described compensator (7) is rotated in a plane vertical with described light path;
Utilize an analyzer Spin Control platform (14) that the optical axis of described analyzer (13) is rotated in a plane vertical with described light path;
Utilize the rotation of one second driver (19) control described polarizer Spin Control platform (7), compensator Spin Control platform (9) and analyzer Spin Control platform (14).
9. measuring method according to claim 8 is characterized in that described magneto-optic modulator (12) is set at one of following two positions:
The part of described light path from the described polarizer (6) to described compensator (8),
The part of described light path from described compensator (8) to described analyzer (13),
And described measuring method further comprises:
Utilize an incident diaphragm (10) to change along the size of described light path photograph to the light beam of described object to be measured;
Utilize an outgoing diaphragm (11) to change along the size of described light path from the light beam of described object to be measured;
Utilize an image pick-up card (20) to convert the analog electrical signal of the output of described planar array detector (16) to digital electric signal;
Utilize a computing machine (17) control described first driver (18) and described second driver (19) and reception and processing described digital electric signal from described image pick-up card (20).
10. according to any one described measuring method among the claim 5-9, wherein said light source (4) comprises a laser instrument, it is characterized in that further comprising:
Initialization experimental provision (step S301), comprise by described computing machine (17) control second driver (19) and rotate polarizer Spin Control platform (7), compensator Spin Control platform (9), analyzer Spin Control platform (14) respectively, thereby change the optical axis direction of the polarizer (6), compensator (8), analyzer (13), make that the polarizer (6) and the optical axis direction angle of compensator (8) are the α degree, the polarizer (8) is the β degree with the optical axis included angle of analyzer (13);
Set the value (step S302) of I=0 and N;
With the ellipse inclined to one side picture signal (step S303) of described computing machine (17) by described image pick-up card (20) record surface array detector (16);
With described computing machine (17) control first driver (18), make magneto-optic modulator (12) emergent light polarization direction with respect to current polarization direction rotation 360/N degree, and set I=I+1 (step S304);
Whether the rotation outgoing light polarization direction number of times I that judges current magneto-optic modulator (12) less than N (step S305), and:
If "Yes", then turn back to step S303, computing machine (17) is by the ellipse inclined to one side picture signal of image pick-up card (20) record surface array detector (16), and control first driver (18) and make magneto-optic modulator (12) emergent light polarization direction, and set I=I+1 (step S304) with respect to current polarization direction rotation 360/N degree;
If "No", then computing machine (17) control first driver (18) stops to drive magneto-optic modulator (12) (step S306).
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