CN114705229A - Substrate-adjustable optical fiber FP composite temperature and humidity sensor chip based on sensitive material - Google Patents
Substrate-adjustable optical fiber FP composite temperature and humidity sensor chip based on sensitive material Download PDFInfo
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- CN114705229A CN114705229A CN202210319070.8A CN202210319070A CN114705229A CN 114705229 A CN114705229 A CN 114705229A CN 202210319070 A CN202210319070 A CN 202210319070A CN 114705229 A CN114705229 A CN 114705229A
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Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
- G01D5/35306—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement
- G01D5/35309—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer
- G01D5/35312—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer using a Fabry Perot
Abstract
The invention relates to a substrate adjustable optical fiber FP composite temperature and humidity sensor chip based on sensitive materials, which comprises: FP type temperature sensor branch probe, FP type humidity transducer branch probe and peripheral circuit, wherein: the FP type temperature sensor branch probe comprises a first multimode optical fiber and a first hollow capillary tube, wherein one end of the first hollow capillary tube is connected with the first multimode optical fiber, and the other end of the first hollow capillary tube is filled and sealed by a first sensitive material with a certain length; the FP type humidity sensor branch probe comprises a second multimode optical fiber and a second hollow capillary tube, one end of the second hollow capillary tube is connected with the second multimode optical fiber, and the other end of the second hollow capillary tube is filled and sealed by a second sensitive material with a certain length; the first hollow capillary and one end of the first sensitive material which is filled and closed and the second hollow capillary and one end of the second sensitive material which is filled and closed respectively comprise a first additional sensitive film and a second additional sensitive film; the end face of the closed end of the hollow capillary tube and the sensitive material is provided with a concavo-convex rough structure.
Description
Technical Field
The invention relates to the technical field of optical fiber sensor chips, in particular to an optical fiber FP composite temperature and humidity sensor chip with an adjustable substrate based on sensitive materials and a preparation method thereof.
Background
Due to the change of external temperature, pressure, vibration, strain and other parameters, the polarization state, wavelength, phase and other parameters of the optical fiber waveguide can be directly or indirectly changed correspondingly, so that the external environment change and the optical waveguide are combined through the change of the measured parameters, and the sensing measurement of the external environment is realized through theoretical and experimental data analysis. The optical fiber sensor has the advantages of small volume, light weight, electromagnetic interference resistance, high temperature and high pressure resistance and corrosion resistance. With the development of interdisciplines such as micro-processing technology, special optical fiber, data demodulation and the like, the optical fiber is structurally improved in the prior art, various optical fiber sensing models are provided, the types of optical fiber sensors reach hundreds, and the application fields of the optical fiber sensors are more and more extensive. However, the following problems still exist in practical applications:
1. the optical fiber sensors are all of a single sensor type, and cannot be uniformly or compositely used in an application background due to the difference of application materials;
2. the optical fiber is made of traditional materials, and the optical fiber is directly in hard connection with the connected FP cavity, so that the sensor substrate cannot be flexibly changed according to the application environment, and further, the whole optical fiber sensor has poor stability, poor repeatability and low sensitivity;
3. the traditional optical fiber sensor processes optical fibers by using technical means such as welding, pulling and hammering, grating writing and the like, realizes different optical fiber micro structures, is mainly applied to engineering applications such as pressure, stress, vibration and the like, does not use new sensitive materials to widen the application field of optical fiber sensing, and particularly has no breakthrough to the conventional temperature and humidity measurement sensor.
Disclosure of Invention
In order to solve the technical problems, the invention provides an optical fiber FP composite temperature and humidity sensor with an adjustable substrate based on a sensitive material and a preparation method thereof.
The invention aims to provide a substrate adjustable optical fiber FP composite temperature and humidity sensor chip based on sensitive materials, which comprises: FP type temperature sensor branch probe, FP type humidity transducer branch probe and peripheral circuit, wherein:
the FP type temperature sensor branch probe comprises a first multimode optical fiber (11) and a first hollow capillary tube (12), wherein one end of the first hollow capillary tube (12) is connected with the first multimode optical fiber (11), and the other end of the first hollow capillary tube is filled and sealed by a certain length of first sensitive material (15); the first hollow capillary (12) is coated with a gold film (14) on the outside;
the FP type humidity sensor branch probe comprises a second multimode optical fiber (21) and a second hollow capillary tube (22), wherein one end of the second hollow capillary tube (22) is connected with the second multimode optical fiber (21), and the other end of the second hollow capillary tube is filled and sealed by a certain length of second sensitive material;
the peripheral circuit comprises a coupling circuit, a sensor signal transmission circuit, a sensor signal processing circuit and a sensor signal output circuit, wherein the coupling circuit couples the FP type temperature sensor branch probe and the FP type humidity sensor branch probe;
the first hollow capillary (12) and one end filled and closed by the first sensitive material also comprise a first additional sensitive film (13); the second hollow capillary tube (22) and one end filled and closed by the second sensitive material also comprise a second additional sensitive film (23);
the end face of one end of the first hollow capillary (12) and the first sensitive material which are filled and closed has a first concave-convex rough structure formed by processing, so that the first hollow capillary and the first sensitive material can be used as a transfer substrate of the first additional sensitive film (13); the end face of one end of the second hollow capillary (22) and the second sensitive material which are filled and closed has a first concave-convex rough structure formed by processing, so that the second hollow capillary and the second sensitive material can be used as a transfer substrate of the second additional sensitive film (23).
Preferably, the first concavo-convex roughness structure and the second concavo-convex roughness structure are in a regular shape including a ring shape, a square shape or a figure 8 or an irregular shape including a semicircular or irregular concavo-convex surface.
Preferably, the sensitive material in the FP type temperature sensor branch probe is polymer polydimethylsiloxane.
Preferably, the sensitive material in the FP type humidity sensor branch probe is a complex formed by a matrix polymer and an alkali metal salt.
Preferably, the first hollow capillary (12) and the second hollow capillary (22) are ceramic hollow capillaries, glass hollow capillaries or quartz hollow capillaries.
Preferably, the first additional sensitive film (13) and the second additional sensitive film (23) are zinc oxide films, silicon dioxide films, titanium dioxide films or aluminum oxide films, so that deformation of the functional substrate is adjusted by matching the first concave-convex rough structure and the second concave-convex rough structure in a force, heat, light or magnetic mode, and structural parameters of depth and width of grooves formed in the concave-convex rough structure and shape and space of the grooves are controlled.
The invention also aims to provide a manufacturing method of the substrate adjustable optical fiber FP composite temperature and humidity sensor chip based on the sensitive material, which comprises the following steps:
s1, processing the FP type temperature sensor branch probe;
s2, processing the FP type humidity sensor branch probe; and
and S3, assembling the FP type temperature sensor branch probe, the FP type humidity sensor branch probe and a peripheral circuit.
In a preferred embodiment, in S1, the processing FP type temperature sensor branch probe includes:
s11, preparing a processing material and processing equipment and preprocessing the first multimode optical fiber, wherein the processing material comprises the first multimode optical fiber, a first hollow capillary, polydimethylsiloxane and analytically pure absolute ethyl alcohol; the processing equipment comprises a welding machine, a high-temperature electric furnace and a super-depth-of-field three-dimensional microscopic system; pre-processing the first multimode optical fiber comprises: plating a layer of metal silver film on the end face of the plastic-clad quartz optical fiber by utilizing silver mirror reaction, then inserting the end face into a glass tube filled with alcohol, and packaging the two ends by adopting ultraviolet glue;
s12, welding FP structure: etching the multimode optical fiber by using hydrofluoric acid, modifying a chemically synthesized zinc oxide nano rod to an etched lumbar vertebra region (16), stripping the coating layers of the modified multimode optical fiber and the hollow capillary by using a wire stripper, wiping the region stripped with the coating layers by using dust-free paper dipped with alcohol, flattening the end face by using a cutting knife, and finally putting the fiber into a welding machine for multiple welding to obtain better welding parameters;
s13, filled polymer polydimethylsiloxane: putting a certain amount of thermosetting polymer polydimethylsiloxane into a liquid pipe, vertically inserting the welded FP structure into the polymer polydimethylsiloxane, and dip-coating for 50 s; removing the probe, and wiping off redundant complexes around the probe by using dust-free paper dipped with alcohol; fixing a probe on a glass sheet, placing the glass sheet in a high-temperature electric furnace, heating and curing the complex, and keeping the temperature at 180 ℃ for 1 hour to form a complex-filled FP type structure;
s14, fusing the FBG: a porous anodic zinc oxide film is adhered to and connected in series with a multimode fiber section of the FP type humidity sensor branch probe by ultraviolet glue, wherein the porous anodic zinc oxide film is prepared and formed on a high-purity zinc sheet substrate by adopting an anodic oxidation technology;
the S2 processing the FP type humidity sensor branch probe includes:
s21, preparing processing materials and processing equipment, wherein the processing materials comprise multimode optical fibers, hollow capillaries, matrix polymers, alkali metal salts and analytically pure absolute ethyl alcohol; the processing equipment comprises a welding machine, a high-temperature electric furnace and a super-depth-of-field three-dimensional microscopic system;
s22, welding FP structure: etching the multimode optical fiber by using hydrofluoric acid, modifying a chemically synthesized zinc oxide nano rod to an etched lumbar vertebra region, stripping a coating layer of the modified multimode optical fiber and a coating layer of a hollow capillary tube by using a wire stripper, wiping the coating layer stripped region by using dust-free paper dipped with alcohol, flattening the end face by using a cutting knife, and finally putting the fiber into a welding machine for welding for multiple times to obtain better welding parameters;
s23, filling the complex formed by the matrix polymer and the alkali metal salt: putting a certain amount of thermosetting complex into a 4ml liquid pipe, vertically inserting the welded FP structure into the complex, and controlling the dip-coating time by adopting a complex filling system corresponding to a method of online monitoring by a spectrometer; removing the probe, and wiping off redundant complexes around the probe by using dust-free paper dipped with alcohol; fixing a probe on a glass sheet, placing the glass sheet in a high-temperature electric furnace, heating and curing the complex, and keeping the temperature at 180 ℃ for 1 hour to form a complex-filled FP type structure;
s24, fusing the FBG: a multi-mode optical fiber section of a branch probe of the FP type humidity sensor is connected with a porous anodic aluminum oxide film in series by ultraviolet glue, wherein the porous anodic aluminum oxide film is prepared and formed on a high-purity aluminum sheet substrate by adopting an anodic oxidation technology.
As a preferred embodiment, the S12 and the S22 include: setting a manual mode, and adjusting the positions of the multimode optical fiber and the hollow capillary; executing a welding program, and welding the multimode optical fiber and the hollow capillary tube; the desired hollow capillary length was adjusted under the microscope and cut to obtain the cut FP structures.
As a preferred embodiment, the complex filling system comprises: the device comprises a light source, a spectrometer and a coupler, wherein one end of the welded FP structure is connected with a single-mode jumper, the single-mode jumper is connected into the coupler, and two ends of the coupler are respectively connected with the light source and the spectrometer.
The invention has the beneficial effects that:
(1) the temperature and humidity are measured in a coupling mode at the same time, the micro MEMS sensor structure with the similar technological requirements is adopted, the application scene is expanded, and the processing cost is reduced. Particularly, the special concave-convex structure adopts mechanical processing or laser processing, has controllable structure and good consistency, and is beneficial to realizing the consistency of probe manufacture; in addition, the temperature measurement stability of the probe is high, the crosstalk of temperature to the humidity sensing probe can be well solved, and the temperature and humidity integrated measurement of the sensor is facilitated.
(2) The substrate adsorbed by the additional sensitive film is the hollow capillary, but compared with the prior art, the end face of the hollow capillary adopts a concave-convex structure and is made of functional materials sensitive to the action of force, heat, light, magnetism and the like, the regulation and control of the membrane-tube interface stress are carried out, and the high-response output of the F-P probe is realized in a mechanical sensitization mode.
(3) The concave-convex structure arranged on the end face of the hollow capillary tube can be in a regular shape or an irregular shape, and can be used for releasing the internal stress of the additional sensitive film to different degrees or releasing the local internal stress of the additional sensitive film, so that the overall performance of the optical fiber F-P probe is improved, or the acoustic signal response adjustment in a certain specific frequency band is realized.
(4) The humidity sensor has stable performance in the processes of moisture absorption and dehumidification, has good repeatability, and meanwhile, the adopted high polymer material has good temperature expansion characteristic and temperature responsiveness, and can generate a red shift phenomenon along with the rise of temperature, so that the measurement precision and the stability are improved.
Drawings
In order to more clearly illustrate the technical solution of the embodiments of the present invention, the drawings required to be used in the embodiments will be briefly described as follows:
fig. 1 is a schematic structural diagram of a branch probe of an FP type temperature sensor provided in an embodiment of the present application.
FIG. 2 is a schematic diagram of a branch probe of an FP type humidity sensor according to an embodiment of the present disclosure
Fig. 3 is a flowchart of a manufacturing method of a substrate-adjustable optical fiber FP composite temperature and humidity sensor chip based on a sensitive material according to an embodiment of the present application.
Fig. 4 is a structural diagram of a complex filling system provided in an embodiment of the present application.
Detailed Description
In the following description, for purposes of explanation and not limitation, specific details are set forth, such as particular system structures, techniques, etc. in order to provide a thorough understanding of the embodiments of the present application. It will be apparent, however, to one skilled in the art that the present application may be practiced in other embodiments that depart from these specific details. In other instances, detailed descriptions of well-known systems, devices, circuits, and methods are omitted so as not to obscure the description of the present application with unnecessary detail.
It will be understood that the terms "comprises" and/or "comprising," when used in this specification and the appended claims, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof.
It should also be understood that the term "and/or" as used in this specification and the appended claims refers to and includes any and all possible combinations of one or more of the associated listed items.
As used in this specification and the appended claims, the term "if" may be interpreted contextually as "when", "upon" or "in response to" determining "or" in response to detecting ". Similarly, the phrase "if it is determined" or "if a [ described condition or event ] is detected" may be interpreted contextually to mean "upon determining" or "in response to determining" or "upon detecting [ described condition or event ]" or "in response to detecting [ described condition or event ]".
Furthermore, in the description of the present application and the appended claims, the terms "first," "second," "third," and the like are used for distinguishing between descriptions and not necessarily for describing or implying relative importance.
Reference throughout this specification to "one embodiment" or "some embodiments," or the like, means that a particular feature, structure, or characteristic described in connection with the embodiment is included in one or more embodiments of the present application. Thus, appearances of the phrases "in one embodiment," "in some embodiments," "in other embodiments," or the like, in various places throughout this specification are not necessarily all referring to the same embodiment, but rather "one or more but not all embodiments" unless specifically stated otherwise. The terms "comprising," "including," "having," and variations thereof mean "including, but not limited to," unless expressly specified otherwise.
In order to explain the technical means described in the present application, the following description will be given by way of specific embodiments.
As shown in fig. 1-2, the present embodiment provides a substrate-adjustable optical fiber FP composite temperature and humidity sensor chip based on a sensitive material, including: FP type temperature sensor branch probe, FP type humidity transducer branch probe and peripheral circuit, wherein:
as shown in fig. 1, the FP type temperature sensor branch probe includes a first multimode optical fiber 11, a first hollow capillary 12, wherein one end of the first hollow capillary 12 is connected with the first multimode optical fiber 11, and the other end is filled and closed by a length of a first sensitive material 15; the first hollow capillary 12 is coated with a gold film 14;
as shown in fig. 2, the FP type humidity sensor branch probe includes a second multimode optical fiber 21, a second hollow capillary 22, wherein one end of the second hollow capillary 22 is connected to the second multimode optical fiber 21, and the other end is filled and closed with a length of a second sensitive material;
the peripheral circuit comprises a coupling circuit, a sensor signal transmission circuit, a sensor signal processing circuit and a sensor signal output circuit, wherein the coupling circuit couples the FP type temperature sensor branch probe and the FP type humidity sensor branch probe.
As a preferred embodiment, the first hollow capillary 12 and one end filled and closed with the first sensitive material further comprise a first additional sensitive film 13; the second hollow capillary 22, with the second sensing material filled and closed end, further comprises a second additional sensing film 23.
As a preferred embodiment, the end face of the first hollow capillary 12 and the end face of the first sensitive material filled and closed end has a first concavo-convex rough structure formed by machining so as to serve as a transfer substrate of the first additional sensitive film 13, and the first concavo-convex rough structure is a regular shape, such as a symmetrical shape of a ring shape, a square shape, a 8 shape, and the like, or an irregular shape, such as a semicircular shape, an irregular concavo-convex surface; the end face of the second hollow capillary 22 and the end face of the second sensitive material filled and sealed has a first concavo-convex rough structure formed by machining so as to be used as a transfer substrate of the second additional sensitive film 23, and the second concavo-convex rough structure is in a regular shape, such as a symmetrical shape like a ring shape, a square shape, a 8 shape and the like, or in a non-regular shape, such as a semicircular shape and an irregular concavo-convex surface.
In a preferred embodiment, the sensitive material in the FP type temperature sensor branch probe is polymer polydimethylsiloxane; the sensitive material in the FP type humidity sensor branch probe is a complex formed by a matrix polymer and an alkali metal salt, and the complex is very sensitive to the effects of force, heat, light, magnetism and the like. The first hollow capillary 12 and the second hollow capillary 22 are ceramic hollow capillaries, glass hollow capillaries or quartz hollow capillaries.
As a preferred embodiment, the first additional sensitive film 13 and the second additional sensitive film 23 are zinc oxide films, silicon dioxide films, titanium dioxide films or aluminum oxide films, so that the deformation of the functional substrate is adjusted by matching with the concave-convex rough structure in a force, heat, light or magnetic manner, the structural parameters of the depth and width of the groove formed in the concave-convex rough structure and the shape and the distance of the groove are controlled, the adsorption energy between the two groups of additional sensitive films suspended above the two grooves and the hollow capillary tube is further adjusted, the adjustment of the interface stress between the additional sensitive films and the hollow capillary tube is realized, and the sensor performance of the FP probe is optimized. Taking the second hollow capillary as an example, when the additional sensitive film is adsorbed on the end face of the second hollow capillary 22 by wet transfer, the suspended second additional sensitive film 23 generates a pre-stress in the suspended graphene film due to the adsorption of van der waals force to the interface between the side wall of the central hole of the second hollow capillary 22, and the concave-convex structure on the end face of the second hollow capillary 22 can reduce the adsorption energy between the second additional sensitive film 23 and the second hollow capillary 22, so that the pre-stress on the surface of the second additional sensitive film 23 in the suspension region is released to a certain extent, and the parameters of the concave-convex structure, such as the number, the width, the depth or the height, and the distance between the concave-convex structure and the central hole of the second hollow capillary 22 are closely related to the magnitude of the adsorption energy of the membrane-tube interface, thereby realizing the regulation and control of the membrane-tube interface stress. The hollow capillary 22 as the base of the transfer additional sensitive film 23 is made of functional materials sensitive to force, heat, light or magnetic action, and the deformation of the hollow capillary can be adjusted by means of regulation and control modes such as force, heat, light or magnetism, so that the adjustment of the interface stress of the film-tube is realized.
The specific action mechanism is as follows:
(1) temperature measurement: after the multimode fiber and the hollow capillary are welded, the sensing material is filled in the hollow capillary to form a small concave surface, a certain interval exists between the multimode fiber and the sensing material to form an air cavity, the theoretical FSR and the theoretical temperature sensitivity of the sensor are obtained according to the interference theory,
(2) and (3) humidity measurement: manufacturing a hollow capillary tube with a sensitive material core insert by using a sensitive material, and further processing a concave-convex structure on the end face of the hollow capillary tube adsorbed by the film by mechanical processing or laser processing under the condition of using an additional sensitive film; meanwhile, two end faces of the hollow capillary tube form a closed air cavity, namely, the closed air cavity is used as an FP cavity, wherein the end face of the multimode optical fiber is a reflecting face I, and the inner surface of the sensitive material is a reflecting face I I. When light is emitted from the light source and transmitted to the FP sensor probe through the multimode optical fiber, one part of light is reflected at the reflecting surface I, the other part of light is transmitted to the reflecting surface I I through the air cavity and is reflected, and the two beams of reflected light are reflected back to the multimode optical fiber through reflection to form an optical path difference and generate an interference phenomenon. Because the reflectivity of the end face of the optical fiber and the section of the sensitive material (the invention adopts the complex formed by the matrix polymer and the alkali metal salt) is very small, the multiple reflection phenomenon of light at the two interfaces can be ignored, and only the influence of the reflected light at the two interfaces needs to be considered. When the humidity sensing probe is exposed to different humidity environment conditions, the sensitive material expands, so that the cavity length of the air cavity changes, the phase difference of two beams of reflected light changes, the interference spectrum changes, and the FP-type humidity sensor branch probe achieves the purpose of detecting the environment temperature through small change based on the length of the air cavity.
As shown in fig. 3, the present embodiment provides a method for manufacturing a substrate-adjustable optical fiber FP composite temperature and humidity sensor chip based on a sensitive material, including:
s1, processing the FP type temperature sensor branch probe;
s2, processing the FP type humidity sensor branch probe; and
s3, the FP type temperature sensor branch probe, the FP type humidity sensor branch probe, and the peripheral circuit are assembled.
In a preferred embodiment, S1, the method for processing the FP type temperature sensor branch probe includes:
s11, preparing a processing material and processing equipment and pretreating the first multimode optical fiber, wherein the processing material comprises the first multimode optical fiber (9/125 microns in the embodiment), a first hollow capillary (80/125 microns in the embodiment), polydimethylsiloxane and analytically pure absolute ethyl alcohol; the processing equipment comprises a welding machine, a high-temperature electric furnace and a super-depth-of-field three-dimensional microscopic system; pre-processing the first multimode optical fiber comprises: a layer of metal silver film is plated on the end face of the plastic cladding quartz optical fiber by utilizing silver mirror reaction, then the end face is inserted into a glass tube filled with alcohol, and the two ends are packaged by adopting ultraviolet glue. Because the alcohol has good thermo-optic effect, the refractive index of the alcohol can change along with the temperature change, and meanwhile, the optical fiber with the end surface coated with the silver film is very sensitive to the refractive index change, so that the temperature sensing sensitivity is further improved;
s12, welding FP structure: etching the multimode optical fiber by using hydrofluoric acid, modifying a chemically synthesized zinc oxide nano rod to an etched lumbar vertebra region 16, stripping a coating layer of the modified multimode optical fiber and a coating layer of a hollow capillary by using a wire stripper, wiping the coating layer stripped region by using dust-free paper dipped with alcohol, flattening the end face by using a cutting knife, and finally putting the fiber into a welding machine for welding for multiple times to obtain better welding parameters;
s13, filled polymer polydimethylsiloxane: putting a certain amount of thermosetting polymer polydimethylsiloxane into a 4ml liquid tube, vertically inserting the welded FP structure into the polymer polydimethylsiloxane, wherein the dip-coating time is about 50s, and the complex can slowly permeate into the hollow capillary tube to seal the tube orifice due to the capillary adsorption effect; removing the probe, and wiping off redundant complexes around the probe by using dust-free paper dipped with alcohol; fixing a probe on a glass sheet, placing the glass sheet in a high-temperature electric furnace, heating and curing the complex, and keeping the temperature at 180 ℃ for 1 hour to form a complex-filled FP type structure; in the preferred embodiment, the complexes were all 25.93 microns filled, with air cavity lengths of 67.07 microns;
s14, fusing the FBG: considering that the FP type humidity sensor branch probe has certain responsiveness to temperature, a multi-mode optical fiber section of the FP type humidity sensor branch probe is connected with a porous anodic zinc oxide film in series by ultraviolet adhesive, wherein the porous anodic zinc oxide film is prepared on a high-purity zinc sheet substrate by adopting an anodic oxidation technology.
As a preferred embodiment, S2, the method for processing the FP type humidity sensor branch probe includes:
s21, preparing processing materials and processing equipment, wherein the processing materials comprise a multimode optical fiber (9/125 μm in the embodiment), a hollow capillary (80/125 μm in the embodiment), a matrix polymer, an alkali metal salt (potassium salt or sodium salt in the embodiment) and analytically pure absolute ethyl alcohol; the processing equipment comprises a welding machine, a high-temperature electric furnace and a super-depth-of-field three-dimensional microscopic system;
s22, welding FP structure: etching the multimode optical fiber by using hydrofluoric acid, modifying a chemically synthesized zinc oxide nano rod to an etched lumbar vertebra region, stripping a coating layer of the modified multimode optical fiber and a coating layer of a hollow capillary tube by using a wire stripper, wiping the coating layer stripped region by using dust-free paper dipped with alcohol, flattening the end face by using a cutting knife, and finally putting the fiber into a welding machine for welding for multiple times to obtain better welding parameters;
s23, filling the complex formed by the matrix polymer and the alkali metal salt: putting a certain amount of thermosetting complex into a 4ml liquid tube, vertically inserting the welded FP structure into the complex, controlling the dip coating time by a complex filling system corresponding to a method of online monitoring by a spectrometer (the complex is very favorable for an FP type sensor because the complex has good thermal expansion performance, otherwise, the complex filled into an FP cavity is not too much, the thickness of a complex film is too large, meanwhile, because a tube opening is too small, the time for the complex to absorb humidity is prolonged, the recovery performance is poor, and the quick response of the humidity is not facilitated, in comparison, the temperature is all-around for the complex material, so that the filling amount is relatively more than the humidity, and because the size of the cut hollow capillary tube has a certain error, the filling amount cannot be simply evaluated from the time to obtain relatively ideal probe branches, a more advanced online monitoring mode is needed to be adopted to match with the processing process), the time of the embodiment is about 50s, and due to the capillary adsorption effect, the complex can slowly permeate into the hollow capillary to seal the pipe orifice; removing the probe, and wiping off redundant complexes around the probe by using dust-free paper dipped with alcohol; fixing a probe on a glass sheet, placing the glass sheet in a high-temperature electric furnace, heating and curing the complex, and keeping the temperature at 180 ℃ for 1 hour to form a complex-filled FP type structure; in the preferred embodiment, the complexes were all 25.93 microns filled, with air cavity lengths of 67.07 microns;
s24, fusing the FBG: considering that the branch probe of the FP type humidity sensor has certain responsiveness to temperature, a multi-mode optical fiber section of the branch probe of the FP type humidity sensor is connected with a porous anodic aluminum oxide film in series by ultraviolet glue, wherein the porous anodic aluminum oxide film is prepared and formed on a high-purity aluminum sheet substrate by adopting an anodic oxidation technology.
As a preferred embodiment, preferred welding parameters include:
the initial discharge start intensity was 80, the initial discharge end intensity was 80, the initial discharge time was 400ms, the Z push-in distance was 8 micrometers, and the discharge center offset was 50 micrometers.
As a preferred embodiment, S12 and S22 include: setting a manual mode, and adjusting the positions of the multimode optical fiber and the hollow capillary; executing a welding procedure, and welding the multimode optical fiber and the hollow capillary tube; the desired hollow capillary length was adjusted under the microscope and cut to obtain the cut FP structures.
Referring to FIG. 4, as a preferred embodiment, the complex filling system comprises: the device comprises a light source, a spectrometer and a coupler, wherein one end of the welded FP structure is connected with a single-mode jumper, the single-mode jumper is connected into the coupler, and the two ends of the coupler are respectively connected with the light source and the spectrometer. When the prepared complex liquid is dripped into an FP structure, due to the capillary action, the complex liquid can slowly flow into a hollow capillary, an air cavity is squeezed, an interference spectrum can be displayed on a spectrometer, an interference peak on the spectrometer can be changed along with the lapse of filling time, when a required spectrum is obtained, an FP probe is slowly extracted from the complex liquid, redundant complexes around the probe are slightly wiped off by dustless paper dipped with alcohol, finally the probe is placed into a heating box to be cured for one hour at constant temperature of 120 ℃, and the probe is circulated for three times at a temperature gradient of 10 ℃ in a range of 30-120 ℃ to release internal stress. The number of interference peaks and the average Free Spectral Range (FSR) are obtained through the spectrums of the interference peaks read by the spectrometer under different filling time, when the number of the interference peaks is gradually reduced along with the increase of time, the free spectral range is gradually increased, the complex liquid is slowly filled into the capillary, the length of the air cavity in the FP structure is gradually compressed, the length of the air cavity is judged according to the number of the interference peaks and the FSR, and a relatively ideal interference spectrum is obtained.
The above-mentioned embodiments are only used for illustrating the technical solutions of the present application, and not for limiting the same; although the present application has been described in detail with reference to the foregoing embodiments, it should be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications and substitutions do not substantially depart from the spirit and scope of the embodiments of the present application and are intended to be included within the scope of the present application.
Claims (10)
1. The utility model provides an adjustable optic fibre FP complex temperature and humidity sensor chip in base based on sensitive material which characterized in that includes: FP type temperature sensor branch probe, FP type humidity transducer branch probe and peripheral circuit, wherein:
the FP type temperature sensor branch probe comprises a first multimode optical fiber (11) and a first hollow capillary tube (12), wherein one end of the first hollow capillary tube (12) is connected with the first multimode optical fiber (11), and the other end of the first hollow capillary tube is filled and sealed by a certain length of first sensitive material (15); the first hollow capillary (12) is coated with a gold film (14) on the outside;
the FP type humidity sensor branch probe comprises a second multimode optical fiber (21) and a second hollow capillary tube (22), wherein one end of the second hollow capillary tube (22) is connected with the second multimode optical fiber (21), and the other end of the second hollow capillary tube is filled and sealed by a certain length of second sensitive material;
the peripheral circuit comprises a coupling circuit, a sensor signal transmission circuit, a sensor signal processing circuit and a sensor signal output circuit, wherein the coupling circuit couples the FP type temperature sensor branch probe and the FP type humidity sensor branch probe;
the first hollow capillary (12) and one end filled and closed by the first sensitive material also comprise a first additional sensitive film (13); the second hollow capillary (22) and one end filled and closed by the second sensitive material also comprise a second additional sensitive film (23);
the end face of one end of the first hollow capillary (12) and the first sensitive material which are filled and closed has a first concave-convex rough structure formed by processing, so that the first hollow capillary and the first sensitive material can be used as a transfer substrate of the first additional sensitive film (13); the end face of one end of the second hollow capillary (22) and the second sensitive material which are filled and closed has a first concave-convex rough structure formed by processing, so that the second hollow capillary and the second sensitive material can be used as a transfer substrate of the second additional sensitive film (23).
2. The substrate-adjustable optical fiber FP composite temperature and humidity sensor chip based on sensitive materials according to claim 1, wherein the first concave-convex rough structure and the second concave-convex rough structure are regular shapes or irregular shapes, the regular shapes comprise rings, squares or 8-shaped shapes, and the irregular shapes comprise semicircular or irregular concave-convex surfaces.
3. The substrate-adjustable optical fiber FP composite temperature and humidity sensor chip based on the sensitive material of claim 2, wherein the sensitive material in the FP type temperature sensor branch probe is polymer polydimethylsiloxane.
4. The substrate-adjustable optical fiber FP composite temperature and humidity sensor chip based on the sensitive material of claim 3, wherein the sensitive material in the FP type humidity sensor branch probe is a complex formed by a matrix polymer and an alkali metal salt.
5. The substrate-adjustable optical fiber FP composite temperature and humidity sensor chip based on sensitive materials according to claim 4, wherein the first hollow capillary (12) and the second hollow capillary (22) are ceramic hollow capillaries, glass hollow capillaries or quartz hollow capillaries.
6. The substrate-adjustable optical fiber FP composite temperature and humidity sensor chip based on sensitive materials according to claim 5, wherein the first additional sensitive film (13) and the second additional sensitive film (23) are zinc oxide films, silicon dioxide films, titanium dioxide films or aluminum oxide films, so that deformation of a functional substrate is adjusted by matching the first concave-convex rough structure and the second concave-convex rough structure in a force, heat, light or magnetic mode, and structural parameters of depth and width of grooves formed in the concave-convex rough structure and shape and space of the grooves are controlled.
7. The manufacturing method of the substrate adjustable optical fiber FP composite temperature and humidity sensor chip based on the sensitive material as claimed in claim 6, characterized by comprising the following steps:
s1, processing the FP type temperature sensor branch probe;
s2, processing the FP type humidity sensor branch probe; and
and S3, assembling the FP type temperature sensor branch probe, the FP type humidity sensor branch probe and a peripheral circuit.
8. The manufacturing method according to claim 7, wherein, in step S1, the processing the FP type temperature sensor branch probe includes:
s11, preparing a processing material and processing equipment and preprocessing the first multimode optical fiber, wherein the processing material comprises the first multimode optical fiber, a first hollow capillary, polydimethylsiloxane and analytically pure absolute ethyl alcohol; the processing equipment comprises a fusion splicer, a high-temperature electric furnace and a super-depth-of-field three-dimensional microscopic system; pre-processing the first multimode optical fiber comprises: plating a layer of metal silver film on the end face of the plastic-clad quartz optical fiber by utilizing silver mirror reaction, then inserting the end face into a glass tube filled with alcohol, and packaging the two ends by adopting ultraviolet glue;
s12, welding FP structure: etching the multimode optical fiber by using hydrofluoric acid, modifying a chemically synthesized zinc oxide nano rod to an etched lumbar vertebra region (16), stripping the coating layers of the modified multimode optical fiber and the hollow capillary by using a wire stripper, wiping the region stripped with the coating layers by using dust-free paper dipped with alcohol, flattening the end face by using a cutting knife, and finally putting the fiber into a welding machine for multiple welding to obtain better welding parameters;
s13, filled polymer polydimethylsiloxane: putting a certain amount of thermosetting polymer polydimethylsiloxane into a liquid pipe, vertically inserting the welded FP structure into the polymer polydimethylsiloxane, and dip-coating for 50 s; removing the probe, and wiping off redundant complexes around the probe by using dust-free paper dipped with alcohol; fixing a probe on a glass sheet, placing the glass sheet in a high-temperature electric furnace, heating and curing the complex, and keeping the temperature at 180 ℃ for 1 hour to form a complex-filled FP type structure;
s14, fusing the FBG: a porous anodic zinc oxide film is adhered to and connected in series with a multimode fiber section of the FP type humidity sensor branch probe by ultraviolet glue, wherein the porous anodic zinc oxide film is prepared and formed on a high-purity zinc sheet substrate by adopting an anodic oxidation technology;
the S2 processing the FP type humidity sensor branch probe includes:
s21, preparing processing materials and processing equipment, wherein the processing materials comprise multimode optical fibers, hollow capillaries, matrix polymers, alkali metal salts and analytically pure absolute ethyl alcohol; the processing equipment comprises a welding machine, a high-temperature electric furnace and a super-depth-of-field three-dimensional microscopic system;
s22, welding FP structure: etching the multimode optical fiber by using hydrofluoric acid, modifying a chemically synthesized zinc oxide nano rod to an etched lumbar vertebra region, stripping a coating layer of the modified multimode optical fiber and a coating layer of a hollow capillary tube by using a wire stripper, wiping the coating layer stripped region by using dust-free paper dipped with alcohol, flattening the end face by using a cutting knife, and finally putting the fiber into a welding machine for welding for multiple times to obtain better welding parameters;
s23, filling the complex formed by the matrix polymer and the alkali metal salt: putting a certain amount of thermosetting complex into a 4ml liquid pipe, vertically inserting the welded FP structure into the complex, and controlling the dip-coating time by adopting a complex filling system corresponding to a method of online monitoring by a spectrometer; removing the probe, and wiping off redundant complexes around the probe by using dust-free paper dipped with alcohol; fixing a probe on a glass sheet, placing the glass sheet in a high-temperature electric furnace, heating and curing the complex, and keeping the temperature at 180 ℃ for 1 hour to form a complex-filled FP type structure;
s24, fusing the FBG: a multi-mode optical fiber section of a branch probe of the FP type humidity sensor is connected with a porous anodic aluminum oxide film in series by ultraviolet glue, wherein the porous anodic aluminum oxide film is prepared and formed on a high-purity aluminum sheet substrate by adopting an anodic oxidation technology.
9. The manufacturing method according to claim 8, wherein the S12 and the S22 include: setting a manual mode, and adjusting the positions of the multimode optical fiber and the hollow capillary; executing a welding procedure, and welding the multimode optical fiber and the hollow capillary tube; the desired length of the hollow capillary was adjusted under a microscope and cut to obtain the cut FP structure.
10. The method of manufacturing of claim 9, wherein the compound filling system comprises: the device comprises a light source, a spectrometer and a coupler, wherein one end of the welded FP structure is connected with a single-mode jumper, the single-mode jumper is connected into the coupler, and two ends of the coupler are respectively connected with the light source and the spectrometer.
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