CN205037998U - Optic fibre F -P chamber stress release pressure sensor - Google Patents
Optic fibre F -P chamber stress release pressure sensor Download PDFInfo
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- CN205037998U CN205037998U CN201520493761.5U CN201520493761U CN205037998U CN 205037998 U CN205037998 U CN 205037998U CN 201520493761 U CN201520493761 U CN 201520493761U CN 205037998 U CN205037998 U CN 205037998U
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Abstract
The utility model discloses an optic fibre F -P chamber stress release pressure sensor, including making the last lock pin that has the F -P chamber, connect firmly lower lock pin as an organic whole and insert with last lock pin axial the optic fibre of lower lock pin, and the cover is in the pressure membrane of F -P chamber port, wherein pressure membrane is connected formation F -P chamber with last lock pin. Pressure membrane's bonded region and the regional design of pressure sensing have the release of stress structure, the release of stress structure comprises the holes to relax stress who distributes in above -mentioned bonded regional and pressure sensing region, and thermal mismatching between pressure membrane and the last lock pin and the stress that produces release through the through -hole of these different shapes. Through the utility model discloses the regional release of stress through -hole of bonded can release the stress that produces owing to the thermal mismatching between pressure membrane and the last lock pin. Eliminate F -P chamber pressure sensor's temperature sensitivity well. The utility model discloses simple structure makes convenient and fast, and is with low costs, can realize the pressure sensing of high accuracy.
Description
Technical field
The present invention relates to a kind of F-P cavity pressure transducer being widely used in the physical quantity such as stress, strain, pressure, temperature of different field, particularly relate to a kind of fiber F-P cavity pressure transducer with strain relief.
Background technology
The sensing unit of fiber F-P cavity pressure transducer is fiber F-P cavity, after light enters fiber F-P cavity, will reflect multiple reflections between end faces, form multiple-beam interference spectrum two.When carrying out pressure test, the change of ambient pressure causes the change of fiber F-P cavity length, thus causes multiple-beam interference spectrum to change, and utilizes outside demodulated equipment to calculate force value.Fiber F-P cavity pressure transducer gets up along with the development of optical fiber communication technology, because it has, signal is not subject to the interference of electromagnetic field, insulativity is high, explosion-proof good, structure is simple, volume is little, high reliability, high sensitivity, the plurality of advantages such as the response time is short, the prospect all in an increasingly wide range of applications in civilian and military field at present.Such as, at medical domain, the measurement utilizing fibre optic compression sensor to carry out cranium pressure, chest pressure, abdominal pressure etc. can reduce the risk of corrective surgery to greatest extent; And when carrying out tomoscan (CT) and nuclear magnetic resonance (NMR), it still can measure the pressure of patient part exactly, highlight the characteristic of its electromagnetism interference.
Domestic and international many scientific research institutions, such as: Virginia Institute of Technology of Nanjing Normal University, the U.S., Stanford University; Univ Heriot Watt of Britain; The work of fiber F-P cavity Study on pressure sensor is all being done by the Maribor university etc. of Slovenia.According to the difference of sensor material, method for making etc., fiber F-P cavity pressure transducer can be divided into all optical fibre structure and MEMS diaphragm type.
The basic structure of all optical fibre structure F-P cavity pressure transducer be using the end face of two optical fiber as reflecting surface, make two fiber end face perfect parallelism, coaxial, form a cavity with hollow optical fiber.When cavity one timing, its deflection is directly proportional to suffered pressure, and the optical path difference of incident light and reflected light in the variable effect of cavity length to optical fiber.Because the main part of all optical fibre structure F-P fibre optic compression sensor all adopts fiber optic materials, therefore its principal feature has good thermal stability.But can still there is many defects such as complex process, material temperature and mechanical characteristic difference in fiber end face manufacturing technology at present, so all optical fibre structure F-P cavity pressure transducer is not suitable for mass production, limit its application.
Abroad proposed the seventies and eighties in last century based on diaphragm design F-P pressure sensor structure, what optical reflection plane adopted is to pressure-sensitive diaphragm, and when diaphragm along with the change of pressure produces displacement, the chamber of F-P cavity is long also to change thereupon.Along with the continuous maturation of technology, there is a variety of different structure in optical fiber F-P pressure sensor, and wherein pressure sensor sensor is one of them part and parcel.Since entering 21 century, the application of microelectromechanical systems (MEMS) technology in optical arena is very noticeable, optical fiber sensing technology and MEMS technology is combined and makes the new focus that novel optical fiber MEMS sensor has become Fibre Optical Sensor making field.The introducing of MEMS technology, the reliability of F-P pressure transducer, electromagnetism interference and corrosion resistivity are all improved, and F-P cavity MEMS fibre optic compression sensor also has the plurality of advantages such as size is little, accuracy is high, dynamic range is large, simultaneously, produce because MEMS is suitable for large scale integration, once technology maturation, product approval, can reduce the cost of sensor greatly.Along with the continuous maturation of MEMS technology is perfect, external Duo Jia colleges and universities and research institution have all carried out the research work of F-P pressure sensor, and have occurred the F-P pressure sensor of different structure.Wherein the pressure sensitive film of a part of sensor uses bulk silicon technological and surface sacrificial process to make, and some sensor utilizes fiber optical corrosive fusion joining process to make.
But, current pressure sensor sensor also also exists difficulties, as China Patent Publication No. CN103644987A, CN103698080A) described in, the pressure-sensitive diaphragm of silicon materials and glass groove are formed by connecting by the mode of anode linkage, but this structure also exists the problem of two aspects:
1, different materials belonging to pressure-sensitive diaphragm and glass groove, due to the difference of their thermal expansivity, makes pressure-sensitive diaphragm and glass groove bonding place there is larger stress, thus it is large to make fiber F-P cavity pressure transducer temperature float coefficient, poor linearity;
2, by the thermal stress mismatch of pressure-sensitive diaphragm and glass groove bonding, pressure-sensitive diaphragm is varied with temperature, produce additional deformation, thus fiber F-P cavity pressure transducer repeatability declines, time drift increase, reduce the precision of F-P pressure transducer further.
The difficulties of current puzzlement optical fiber F-P pressure sensor combination property, is because temperature effect makes fiber F-P cavity pressure sensor inside produce extra-stress, causes sensor accuracy and reliability decrease.
Summary of the invention
For solving the difficulties of puzzlement optical fiber F-P pressure sensor combination property, object of the present invention provides a kind of mechanical characteristic good, highly sensitive, precision is high, have high reliability, the linearity is good simultaneously, a kind of fiber F-P cavity pressure transducer with strain relief.
Object of the present invention can adopt following technical scheme to realize: a kind of fiber F-P cavity stress relief pressure transducer, comprise the upper lock pin being shaped with F-P cavity, the lower lock pin be axially fixedly connected with upper lock pin and the optical fiber inserting described lower lock pin, and cover the pressure-sensitive diaphragm of described F-P cavity port, wherein said pressure-sensitive diaphragm and upper lock pin are connected to form F-P cavity, it is characterized in that: have strain relief in the bond area of described pressure-sensitive diaphragm and pressure-sensitive zone design, described strain relief is made up of the stress relief hole be distributed in above-mentioned bond area and pressure-sensitive region, thermal mismatching between pressure-sensitive diaphragm and upper lock pin and the stress produced are discharged by these difform stress relief holes.
The present invention adopts the fiber F-P cavity pressure transducer with strain relief, by the strain relief that the shape of pressure-sensitive diaphragm sense nip design is square, rhombus, circle, hexagonal hole, on it, hole depth is that these stress relief holes of 1/3 of pressure-sensitive diaphragm thickness can temperature internal stress in relief pressure diaphragm pressure-sensitive region, thus ensures the linearity of the pressure-sensitive diaphragm pressure-sensitive of pressure to external world.
Compared with prior art, the present invention has larger breakthrough technically: principal feature of the present invention has strain relief in fiber F-P cavity pressure sensor design.This strain relief has and mainly contains two main effects:
1), by the stress relief through hole of bond area, the stress produced due to the thermal mismatching between pressure-sensitive diaphragm and upper lock pin can be discharged.The temperature sensitivity of F-P cavity pressure transducer can be eliminated so well, reduce the temperature drift coefficient of sensor, improve the linearity of sensor;
2), the stress relief in pressure-sensitive region can discharge material internal stress caused by temperature effect, reduces the impact of pressure-sensitive diaphragm by temperature, promotes the repeatability of sensor, float during reduction, thus improve the synthesis precision of sensor.
Accompanying drawing explanation
Fig. 1 is the cut-open view of a kind of fiber F-P cavity stress relief of the present invention pressure sensor systems structural principle.
Fig. 2 is the strain relief schematic diagram of Fig. 1 of the present invention, and wherein (a) is vertical view, and (b) is side view.
Fig. 3 is the schematic diagram of Fig. 1.
In figure: 1, pressure-sensitive diaphragm, 2, upper lock pin, 3, lower lock pin, 4, optical fiber.
Embodiment
In the most preferred embodiment of as shown in Figure 1, a kind of fiber F-P cavity stress relief pressure transducer, be shaped with the upper lock pin of F-P cavity, the lower lock pin be axially fixedly connected with upper lock pin and the optical fiber inserting described lower lock pin, and cover the pressure-sensitive diaphragm of described F-P cavity port, wherein said pressure-sensitive diaphragm and upper lock pin are connected to form F-P cavity, and wherein, pressure-sensitive diaphragm 1 and upper lock pin 2 are connected to form F-P cavity by anode linkage technique.Optical fiber 4 part inserts lower lock pin 3, and with its top surface being parallel, another part is positioned at outside lower lock pin 3, is connected with demodulated equipment as conduction optical fiber, and upper lock pin 2 and lower lock pin 3 pass through laser bonding or glue line interconnect integrally.Upper lock pin is connected by laser bonding or glue with lower lock pin.The strain relief of its pressure-sensitive diaphragm design lays respectively at bond area and pressure-sensitive region.The shape of pressure-sensitive diaphragm can carry out the shape of selection pressure diaphragm according to the requirement of different packing forms and system accuracy, the shape of pressure-sensitive diaphragm can be square, rhombus, circle, hexagonal one or more.The strain relief of the bond area design of pressure-sensitive diaphragm is made up of the stress relief hole be distributed in above-mentioned bond area and pressure-sensitive region, the thermal mismatching between pressure-sensitive diaphragm and upper lock pin and the stress that produces is discharged by these difform through holes.The stress relief hole of these planforms can be square, rhombus, circle, hexagon through hole.The degree of depth of stress relief hole is 1/3 of pressure-sensitive diaphragm thickness.Select the shape of strain relief according to the requirement of system accuracy, discharge by these difform stress relief holes the stress produced due to the thermal mismatching between pressure-sensitive diaphragm and upper lock pin.
The method for making of the fiber F-P cavity pressure transducer of the present embodiment, its processing technology step is as follows:
Choose the high-quality silicon chip without warpage, surface smoothness good (fluctuating is less than 1nm), 100 crystal orientation, thickness is 50-300um, utilizes observing and controlling to sputter at silicon chip one side and grows at least one deck Si
3n
4, Ta
2o
5film, the thickness of multilayer film is 100-1000nm.Also observing and controlling can be utilized to sputter at silicon chip one side growth one deck SiO
2film, the thickness of film is 100-1000nm; On upper lock pin (3) groove floor silicon chip, observing and controlling sputtering grows at least one deck SiO
2, Ta
2o
5, Si
3n
4film, the thickness of multilayer film is 50/100/60nm.Utilize mask lithography technique to make stress relief hole in the bond area of pressure-sensitive diaphragm 1, the shape in hole is circular, and diameter is 0.5-10um, and pitch of holes is 2-10 times of bore dia; RIE ion etching machine engraving is utilized to lose SiO
2film, the Graphic transitions of photoresist to SiO
2on film, the gas of etching is CF4/Ar
2.ICP ion etching machine or wet etching solution is utilized to make the stress relief hole of bond area.Repeat the stress relief hole that (a)-(d) process makes pressure-sensitive region; Utilize standard MEMS processes, according to designing requirement, groove is made to upper lock pin 2, and is connected to form F-P cavity by anode linkage technique and pressure-sensitive diaphragm 1; Conduction optical fiber 3 one end is fully ground smooth, and fixing with the jack of lower lock pin 3, and flush with the top of lower lock pin 3.Utilize laser bonding or glue technique to be connected with lower lock pin 3 by upper lock pin 2, complete the making of fiber F-P cavity pressure transducer.
Although describe the present invention in detail with reference to above-described embodiment, should be appreciated that the present invention is not limited to the disclosed embodiments.
Principle of work of the present invention:
Fibre optic compression sensor sensing principle is to cause the long change of Fa-Po cavity by pressure, realizes pressure sensing demodulation by precision measurement change of cavity length amount.Figure 1 shows that Fabry-Perot sensor structure, there is former and later two reflectings surface in Fa-Po cavity.The reflectivity of F-P cavity first reflecting surface is determined by controlling coated reflection rate, second reflecting surface is pressure-sensitive diaphragm reflectivity, the light intensity inciding Fa-Po cavity reflecting surface is considered as Gaussian distribution, above-mentioned two reflective surface light are coupled into multimode optical fiber again, if the reflectivity of two reflectings surface and loss factor are respectively
,
If incident intensity is I
0, then the coupling light intensity of two reflectings surface is respectively
, interference fringe is expressed as
Wherein representing phasic difference, the change that the change of ambient pressure can cause, knowing extraneous pressure by measuring.
Claims (9)
1. a fiber F-P cavity stress relief pressure transducer, comprise the upper lock pin being shaped with F-P cavity, the lower lock pin be axially fixedly connected with upper lock pin and the optical fiber inserting described lower lock pin, and cover the pressure-sensitive diaphragm (1) of described F-P cavity port, wherein said pressure-sensitive diaphragm and upper lock pin are connected to form F-P cavity, it is characterized in that: have strain relief in the bond area of described pressure-sensitive diaphragm and pressure-sensitive zone design, described strain relief is made up of the stress relief hole be distributed in above-mentioned bond area and pressure-sensitive region, thermal mismatching between pressure-sensitive diaphragm (1) and upper lock pin (3) and the stress produced are discharged by these difform stress relief holes.
2. fiber F-P cavity stress relief pressure transducer according to claim 1, it is characterized in that: using the silicon chip in 100 crystal orientation as pressure-sensitive diaphragm (1), pressure-sensitive diaphragm (1) thickness is 50-300um.
3. fiber F-P cavity stress relief pressure transducer according to claim 2, is characterized in that: utilize observing and controlling to sputter at silicon chip one side and grow at least one deck Si
3n
4, Ta
2o
5film, the thickness of multilayer film is 100-1000nm.
4. fiber F-P cavity stress relief pressure transducer according to claim 1, is characterized in that: on upper lock pin (3) groove floor silicon chip, observing and controlling sputtering grows at least one deck SiO
2,ta
2o
5,si
3n
4film, the thickness of multilayer film is 50,100,60nm.
5. fiber F-P cavity stress relief pressure transducer according to claim 1, it is characterized in that: utilize mask lithography technique to make stress relief hole in the bond area of pressure-sensitive diaphragm 1, the shape in hole is circular, and diameter is 0.5-10um, and pitch of holes is 2-10 times of bore dia.
6. a kind of fiber F-P cavity stress relief pressure transducer according to claim 1, is characterized in that: the shape of pressure-sensitive diaphragm is square, rhombus, circle or hexagon.
7. fiber F-P cavity stress relief pressure transducer according to claim 1, is characterized in that: the strain relief of the bond area of pressure-sensitive diaphragm is square, rhombus, circle or hexagon through hole.
8. a kind of fiber F-P cavity stress relief pressure transducer according to claim 1, is characterized in that: the square of the strain relief in pressure-sensitive diaphragm pressure-sensitive district, rhombus, circle or hexagonal hole, the degree of depth in hole is 1/3 of pressure-sensitive diaphragm thickness.
9. fiber F-P cavity stress relief pressure transducer according to claim 1, is characterized in that: upper lock pin is connected by laser bonding or glue with lower lock pin.
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| CN201520493761.5U CN205037998U (en) | 2015-07-10 | 2015-07-10 | Optic fibre F -P chamber stress release pressure sensor |
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| CN201520493761.5U CN205037998U (en) | 2015-07-10 | 2015-07-10 | Optic fibre F -P chamber stress release pressure sensor |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105606277A (en) * | 2016-02-23 | 2016-05-25 | 成都凯天电子股份有限公司 | Integrated fiber F-P chamber pressure sensor |
| CN106017756A (en) * | 2016-07-08 | 2016-10-12 | 燕山大学 | Submicron ultra-smooth metal film based highly sensitive FP pressure sensor |
| CN106323515A (en) * | 2015-07-10 | 2017-01-11 | 成都凯天电子股份有限公司 | Optical fiber F-P cavity stress relief pressure sensor |
| CN107764441A (en) * | 2017-09-12 | 2018-03-06 | 天津大学 | Pressure sensor F P intracavitary residual pressure measuring systems and method |
| CN108444623A (en) * | 2018-04-25 | 2018-08-24 | 北京东方锐择科技有限公司 | High sensibility pressure transducer and preparation method thereof based on silicon thin film |
| CN112433182A (en) * | 2020-10-15 | 2021-03-02 | 西安理工大学 | Device and method for accurately measuring magnetostriction micro deformation |
| CN112857489A (en) * | 2021-01-07 | 2021-05-28 | 北京化工大学 | Graphene film-based liquid micro-flow metering device and manufacturing method thereof |
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2015
- 2015-07-10 CN CN201520493761.5U patent/CN205037998U/en active Active
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106323515A (en) * | 2015-07-10 | 2017-01-11 | 成都凯天电子股份有限公司 | Optical fiber F-P cavity stress relief pressure sensor |
| CN105606277A (en) * | 2016-02-23 | 2016-05-25 | 成都凯天电子股份有限公司 | Integrated fiber F-P chamber pressure sensor |
| CN106017756A (en) * | 2016-07-08 | 2016-10-12 | 燕山大学 | Submicron ultra-smooth metal film based highly sensitive FP pressure sensor |
| CN107764441A (en) * | 2017-09-12 | 2018-03-06 | 天津大学 | Pressure sensor F P intracavitary residual pressure measuring systems and method |
| WO2019052173A1 (en) * | 2017-09-12 | 2019-03-21 | 天津大学 | System and method for measuring residual pressure in f-p cavity of optical fiber mems pressure sensor |
| CN107764441B (en) * | 2017-09-12 | 2021-03-26 | 天津大学 | System and method for measuring residual pressure in F-P cavity of optical fiber MEMS pressure sensor |
| US11473992B2 (en) | 2017-09-12 | 2022-10-18 | Tianjin University | Residual pressure measurement system for Fabry-Perot cavity of optical MEMS pressure sensor and method thereof |
| CN108444623A (en) * | 2018-04-25 | 2018-08-24 | 北京东方锐择科技有限公司 | High sensibility pressure transducer and preparation method thereof based on silicon thin film |
| CN112433182A (en) * | 2020-10-15 | 2021-03-02 | 西安理工大学 | Device and method for accurately measuring magnetostriction micro deformation |
| CN112857489A (en) * | 2021-01-07 | 2021-05-28 | 北京化工大学 | Graphene film-based liquid micro-flow metering device and manufacturing method thereof |
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