CN105115701B - The device and method of optical mirror slip transmitance in precise measurement high power laser light environment - Google Patents
The device and method of optical mirror slip transmitance in precise measurement high power laser light environment Download PDFInfo
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- CN105115701B CN105115701B CN201510497130.5A CN201510497130A CN105115701B CN 105115701 B CN105115701 B CN 105115701B CN 201510497130 A CN201510497130 A CN 201510497130A CN 105115701 B CN105115701 B CN 105115701B
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Abstract
The invention discloses a kind of optical mirror slip Transmissivity measurement devices, including laser light source, beam expander device, the plated film light splitting piece of 45° angle splitting ratio 50/50, compensating plate, slit, the first power meter and the second power meter.In measurement, it is first turned on the laser light source, records the reading P of the first power meter and the second power meter at this time1And P2, obtain power ratio c=P1/P2.Then, eyeglass to be measured is put into the transmitted light path of the optical mirror slip Transmissivity measurement device, position and the angle of eyeglass to be measured is adjusted using eyeglass calibrating installation to be measured, read the reading P of the first power meter and the second power meter1' and P2′；Finally, calculating the transmitance T:T=P of eyeglass to be measured by following equation2′c/P1′.The present invention is lower to light source stability requirement, to lens thickness no requirement (NR) to be measured, can eliminate the influence to test result such as the reflection of light splitting piece front and rear surfaces, optical coating eyeglass membrane system uniformity.
Description
Technical field
The invention belongs to field of laser device technology, in particular to optical mirror slip in a kind of precise measurement high power laser light environment
The method and apparatus of transmitance.
Background technique
Optical mirror slip transmitance is an important ginseng of the irradiation luminous flux reflection and evaluation of imaging quality to optical mirror slip
It considers, therefore the measurement carried out to it is extremely important.
Excessive quantifier elimination is done for the measurement people of optical mirror slip transmitance, is also made some progress.Past is more
Using traditional single channel mensuration, i.e. light beam is not obtained by tested eyeglass by being tested the luminous flux that eyeglass obtains with light beam
Luminous flux ratio.Single channel method of testing apparatus structure is simple, and convenient for operation, but its disadvantage is that this method can be due to light
The irradiation luminous flux shake that source power swing itself causes front and back to test twice, so as to cause the inaccuracy entirely tested.
In order to make up the deficiency of single channel test macro, transmission measurement can be carried out with binary channels test macro.One kind is existing
Some testing schemes are spectrophotometer method, although this method can accurately measure eyeglass transmitance, its eyeglass is penetrated
Rate all measures under low power scenarios, and characteristic of the eyeglass under high energy strong illumination state itself is likely occurred change
Change, so the test under low power state can not illustrate high power situation.In addition, when using spectrophotometer measurement, it is multipair to
The thickness for surveying eyeglass requires, and it is smaller to the daylighting region on eyeglass.
Another existing test device is as shown in Figure 1, it can use transmitted light path and reflected light path realizes Gao Gong
The test of lens transmission rate in the case of rate.Although this method has abandoned the influence of light source stability itself, and can be in high energy
It is measured under state, but as shown in Figure 1, light splitting piece has former and later two surfaces, existing front surface reflection light in reflected light, and has rear table
Face reflected light, since the two light path is different, so the changed power trend as caused by substrate absorption etc. is also not quite similar, if not area
Divide and treat, test result can be given to introduce error.In addition, can change indirectly and swash when the angles and positions that eyeglass to be measured is placed change
Therefore angle of light and irradiation position, penetrate so that itself transmitance can generate minor change to multi-disc eyeglass to be measured
When rate measures, need to calibrate each position and angle.
On the other hand, the height of transmissivity is not only influenced, mirror coating by optical mirror slip itself (air entrapment, dirt etc.)
The influence of on piece membrane system uniformity is also fairly obvious, and current transmitance detection spininess is to small-bore or surveyed with point light source
There is notable difference in amount, this transmitance just probably measured at different locations, therefore not for large-aperture optical eyeglass
Very accurate transmitance can be obtained, this just needs to measure the heavy caliber transmissivity of eyeglass.
Summary of the invention
(1) technical problems to be solved
The present invention is directed to effectively eliminate, light source power is unstable, light splitting piece front and rear surfaces reflect, plated film lens membrane system is equal
The factors such as even property to optical mirror slip Transmissivity measurement as a result, and measurement result repeatability influence.
(2) technical solution
The present invention proposes a kind of optical mirror slip Transmissivity measurement device, including laser light source, beam expander device, 45° angle
Plated film light splitting piece, compensating plate, slit, the first power meter and the second power meter of splitting ratio 50/50, wherein the laser light source
For generating high power laser light；The beam expander device is used to the laser that laser light source emits carrying out shaping and expand；Institute
The light splitting piece for stating 45° angle splitting ratio 50/50 is used to receive the testing laser of beam expander device output and is divided into transmitted light
And reflected light, light splitting piece tool have plated film there are two opposite parallel reflective faces on one of reflecting surface；The compensation
Piece is placed in the side with plated film of the light splitting piece, in the transmitted light and reflected light for receiving and transmiting light splitting piece output
It one, is absorbed with compensating the substrate of the laser exported from plated film light splitting piece；The slit is used for reflecting from the light splitting piece
Laser is constrained, only to allow the laser from the reflective surface with plated film of the light splitting piece to pass through；Described first
Power meter is used to detect the power of the laser by the slit；Second power meter is for detecting from lens transmission to be measured
The power of laser.
According to the preferred embodiment of the present invention, optical mirror slip Transmissivity measurement device further includes eyeglass calibrating installation,
Position and angle for carrying out to eyeglass to be measured are calibrated.
According to the preferred embodiment of the present invention, eyeglass calibrating installation to be measured includes laser indicating apparatus, aperture and anti-
Penetrate mirror, wherein laser of the laser indicating apparatus output for calibration, the laser is by passing through aperture after lens reflecting to be measured
It is incident on reflecting mirror, the laser that the position of the eyeglass to be measured and angle reflect the reflecting mirror continues through aperture original
Road returns, and completes lens position to be measured and angle calibration system.
According to the preferred embodiment of the present invention, optical mirror slip Transmissivity measurement device further includes seal box, is used for pair
The optical path and element of the optical mirror slip Transmissivity measurement device are sealed.
According to the preferred embodiment of the present invention, filled with protection gas in seal box described in optical mirror slip Transmissivity measurement device
Body.
The present invention also proposes a kind of optical mirror slip Transmissivity measurement method, is filled using optical mirror slip Transmissivity measurement above-mentioned
It sets, and includes the following steps:
S1, the laser light source is opened, records the reading P of the first power meter and the second power meter at this time1And P2, obtain function
Rate ratio c=P1/P2；
S2, eyeglass to be measured is put into the transmitted light path of the optical mirror slip Transmissivity measurement device, utilizes eyeglass to be measured
Calibrating installation adjusts position and the angle of eyeglass to be measured, reads the reading P of the first power meter and second1' and P2′；
S3, the transmitance T that eyeglass to be measured is calculated by following equation:
T=P2′c/P1′。
(3) beneficial effect
The method and apparatus of optical mirror slip transmitance, right in a kind of precise measurement high power laser light environment proposed by the present invention
Light source stability requirement is relatively low, to lens thickness no requirement (NR) to be measured, can eliminate the reflection of light splitting piece front and rear surfaces, optics plating
The influence to test result such as film glass membrane system uniformity, and may be implemented to penetrate eyeglass to be measured by beam expander device
The heavy caliber of rate is tested.
Detailed description of the invention
Fig. 1 is the existing conceptual scheme that the test of optical mirror slip transmissivity is carried out using light splitting piece；
Fig. 2 is of the test device of optical mirror slip transmitance in precise measurement high power laser light environment proposed by the present invention
The structural schematic diagram of one embodiment；
Fig. 3 is the test device second of optical mirror slip transmitance in precise measurement high power laser light environment proposed by the present invention
The structural schematic diagram of embodiment.
Specific embodiment
The device of optical mirror slip transmitance is using double light path etc. in precise measurement high power laser light environment proposed by the present invention
Light path measurement, including laser light source, beam expander device, the plated film light splitting piece of 45° angle splitting ratio 50/50, compensating plate, mirror to be measured
Calibrator, slit, the first power meter and the second power meter.
Laser light source is for generating high power laser light.
Beam expander device is used to the laser that laser light source emits carrying out shaping and expand.The beam expander device
Light source laser beam transformation is expanded, so as to carry out heavy caliber Transmissivity measurement to eyeglass to be measured.
The light splitting piece of 45° angle splitting ratio 50/50 is used to receive the testing laser of beam expander device output and is divided into
Transmitted light and reflected light.Light splitting piece tool has plated film there are two opposite parallel reflective faces on one of reflecting surface.Institute
It places at 50/50 plated film light splitting piece of 45° angle splitting ratio and the laser beam axis angle at 45 ° stated.
Compensating plate is placed in the side with plated film of light splitting piece, for receiving and transmiting light splitting piece output transmitted light and reflection
It one in light, is absorbed with compensating the substrate of the laser exported from plated film light splitting piece.The material of the compensating plate, thickness with it is described
50/50 plated film light splitting piece of 45° angle splitting ratio is identical, and places with laser optical path also angle at 45 °.
Slit is for constraining the laser reflected from the light splitting piece, only to allow having from the light splitting piece
The laser of the reflective surface of plated film passes through.
First power meter is used to detect the power of the laser by slit.
Second power meter is used to detect the power of the laser from lens transmission to be measured.
The position and angle that eyeglass calibrating installation is used to carry out eyeglass to be measured are calibrated, when to guarantee repeatedly to measure
Eyeglass placement location to be measured, angle are identical, eliminate the measurement error that eyeglass to be measured places different introducings.
Eyeglass to be measured is placed in the optical path of the transmitted light of plated film light splitting piece.
A kind of embodiment of eyeglass calibrating installation to be measured be include laser indicating apparatus, aperture and reflecting mirror.Laser
Laser of the marking instrument output for calibration, the laser are adjusted by being incident on reflecting mirror by aperture after lens reflecting to be measured
The laser that lens position and angle to be measured reflect reflecting mirror continues through aperture backtracking, completes lens position to be measured
And angle calibration system.
The light that laser light source issues is incident on 50/50 plated film light splitting piece of 45° angle splitting ratio after beam expander device
On, reflection laser is constrained using slit, only the reflected light of light splitting piece coated surface is allowed to pass through, and be incident on the first power
Meter.The second power meter is ultimately incident upon after transmitted through the laser output of eyeglass to be measured.
Preferably, measuring device of the invention further includes seal box, and seal box is used for above-mentioned each component seal.In seal box
N can be filled with2Equal protective gas, to prevent factors such as atmospheric environment etc. from affecting to test result.
Lens transmission rate measuring process to be measured are as follows:
S1, laser light source is opened, records the reading P of the first power meter and the second power meter at this time1And P2, obtain power ratio
Value c=P1/P2；
S2, eyeglass to be measured is put into the transmitted light path of measuring device, adjusts mirror to be measured using eyeglass calibrating installation to be measured
The position of piece and angle read the reading P of the first power meter and second1' and P2'；
S3, the transmitance T that eyeglass to be measured is calculated by following equation:
T=P2’c/P1’。
To make the objectives, technical solutions, and advantages of the present invention clearer, below in conjunction with specific embodiment, and reference
Attached drawing, the present invention is described in further detail.
The structure of the first embodiment of the present invention is as shown in Figure 2.1 is laser light source, for generating high power laser light；2 are
Beam expander device, the laser for emitting laser light source carries out shaping and expands, so as to lens transmission rate to be measured
Carry out heavy caliber measurement；3 be the plated film light splitting piece of 45° angle splitting ratio 50/50, for receiving the survey of the output of beam expander device 2
Examination laser is simultaneously divided into transmitted light and reflected light, and coated surface is located in laser output face；4 be compensating plate, for receiving simultaneously
The laser that plated film light splitting piece 3 transmits is transmitted, the substrate for compensating the laser transmitted from plated film light splitting piece 3 absorbs；5 be slit,
For constraining the laser reflected from the plated film light splitting piece 3, only to allow the coated surface from the plated film light splitting piece 3
The laser of reflection passes through；6 be the first power meter, for detecting the power for passing through the laser of the slit 5；7 be eyeglass to be measured, is made
From the laser light of the compensating plate 4 transmission eyeglass 7 to be measured；8 be laser indicating apparatus, and for exporting red laser, 9 be aperture
Diaphragm, 10 be reflecting mirror, and laser indicating apparatus 8, aperture 9, reflecting mirror 10 constitute eyeglass calibrating installation to be measured, so as to difference
When eyeglass to be measured carries out Transmissivity measurement, its position and angle are calibrated；11 be the second power meter, saturating from eyeglass to be measured for detecting
The power for the laser penetrated；12 be seal box, for light beam to be protected bundle device 2, plated film light splitting piece 3, compensating plate 4, slit 5, first
Power meter 6, the second power meter 11, eyeglass calibrating installation to be measured and reflecting mirror 10 are sealed, in sealing N2It is realized under environment
The measurement of lens transmission rate.
The light that laser light source 1 issues is incident on 50/50 plated film light splitting piece of 45° angle splitting ratio after beam expander device 2
On 3, reflection laser is constrained using slit 5, only the reflected light of light splitting piece coated surface is allowed to pass through, and be incident on the first function
Rate meter 6；It is exported after compensating plate 4 through laser, is ultimately incident upon the second power meter 11.To the first power meter 6 and the second function
The association that rate meter 11 is controlled such that can record the survey of a certain moment the first power meter 6 and the second power meter 11 simultaneously
Try numerical value.Whole device is placed in seal box 12 and is tested, and fills N2Protection prevents factors such as atmospheric environment etc. from tying to test
Fruit affects.
The arrangement method of eyeglass calibrating installation to be measured is as shown in Fig. 2, laser indicating apparatus 8 and aperture 9, reflecting mirror 10 divide
Vertical transmitted light path two sides, symmetry arrangement；Laser indicating apparatus 8 is located above transmitted light path, and output light is macroscopic visible sharp
Light, output light are put with transmitted light path in θ angle；Aperture 9 and reflecting mirror 10 are located at below transmitted light path, where the two
Plane is respectively put with transmitted light path in (90 ° of-θ) angle, and by 9 center of aperture, with transmitted light path be in-θ angle
Light to pass through the center of reflecting mirror, and the intersection point of this light and 8 output light of laser indicating apparatus will be located at transmitted light path light
On axis, and this intersection point is also the intersection point of lens posterior surface and optical axis to be measured simultaneously.In this way, the light being emitted by laser indicating apparatus, enters
It is mapped to lens posterior surface to be measured, by finely tuning the angles and positions of eyeglass to be measured, enables its reflected light by aperture 9
Center, and 10 surface of reflecting mirror, then the backtracking after reflecting mirror reflects are incident on, at this point, lens angle to be measured, position school
Standard finishes.
As shown in Fig. 2, the reflected light path and transmitted light path is roughly equal in the light path of free space.
If spectroscope 3 with a thickness of d, refractive index n, the then laser reflected through light splitting piece coated surface institute inside eyeglass
The light path walked isDue to the compensation effect of compensating plate, the light path walked inside eyeglass is also transmitted lightIn this way, the light path that reflection laser and transmission laser are walked in identical material eyeglass substrate is identical, even if in high energy
Under the accumulative effects such as irradiation, time passage, substrate absorption etc. is roughly the same, can guarantee test result to the greatest extent
Accuracy.
As shown in Fig. 2, plated film light splitting piece 3 with a thickness of 5mm, refractive index 1.5, through light splitting piece coated surface reflection
The light path that laser is walked inside eyeglass isTransmitted light is walked inside eyeglass due to the compensation effect of compensating plate
Light path be alsoIn this way, the light path that reflection laser and transmission laser are walked in identical material eyeglass substrate is identical,
Even if substrate absorption etc. also can be roughly the same under the accumulative effects such as high-energy irradiation, time passage, can be maximum
Guarantee the accuracy of test result.
Steps are as follows for eyeglass transmission measurement to be measured:
S1, the power supply for opening laser light source 1 record the reading P of the first power meter 6 and the second power meter 11 at this time1And P2,
Obtain power ratio c=P1/P2, close the power supply of laser light source 1.
S2, eyeglass 7 to be measured is put into transmitted light path, and complete with red laser marking instrument 8, aperture 9 and to feux rouges
Anti- reflecting mirror 10 carries out the calibration of eyeglass 7 position, angle to be measured.It opens the power supply of laser light source 1 again, reads record at this time the
The reading P of one power meter 6 and the second power meter 111' and P2′。
S3, eyeglass transmitance T to be measured is calculated:
T=P2′/(P1'/c)=P2′c/P1′。
The power for changing laser light source 1, repeats the above steps, then under available different capacity state, eyeglass 7 to be measured
Transmitance.The structure of the second embodiment of the present invention is as shown in Figure 3.Different from the first embodiment the plated film of the embodiment
The coated surface of light splitting piece 3 is located on laser input face, and compensating plate 4, for receiving and transmiting swashing from the reflection of plated film light splitting piece 3
Light, with compensate the reflection laser substrate absorb it is similar with first embodiment, plated film light splitting piece 3 with a thickness of 5mm, refractive index
It is 1.5, the laser through the reflection of 3 coated surface of plated film light splitting piece is in the light path that 4 inside of compensating plate is walkedTransmission
Light light path for being walked inside light splitting eyeglass is alsoEqually, reflection laser and transmission laser are in identical material mirror
The light path walked in piece substrate is identical, even if under the accumulative effects such as high-energy irradiation, time passage, the substantially phase such as substrate absorption
Together, it can guarantee the accuracy of test result to the greatest extent.Eyeglass transmission measurement step to be measured is identical with the first embodiment,
Details are not described herein.
Particular embodiments described above has carried out further in detail the purpose of the present invention, technical scheme and beneficial effects
Describe in detail bright, it should be understood that the above is only a specific embodiment of the present invention, is not intended to restrict the invention, it is all
Within the spirit and principles in the present invention, any modification, equivalent substitution, improvement and etc. done should be included in protection of the invention
Within the scope of.
Claims (4)
1. a kind of optical mirror slip Transmissivity measurement device, including laser light source, beam expander device, 45° angle splitting ratio 50/50
Plated film light splitting piece, compensating plate, slit, the first power meter and the second power meter, wherein
The laser light source is for generating high power laser light；
The beam expander device is used to the laser that laser light source emits carrying out shaping and expand；
The light splitting piece of the 45° angle splitting ratio 50/50 is used to receive the testing laser of beam expander device output and is divided into
Transmitted light and reflected light, light splitting piece tool have plated film there are two opposite parallel reflective faces on one of reflecting surface；
The compensating plate is placed in the side with plated film of the light splitting piece, for receiving and transmiting the transmitted light of light splitting piece output
With one in reflected light, absorbed with compensating the substrate of the laser exported from plated film light splitting piece；
The slit is for constraining the laser reflected from the light splitting piece, only to allow having from the light splitting piece
The laser of the reflective surface of plated film passes through；
First power meter is used to detect the power of the laser by the slit；
Second power meter is used to detect the power of the laser from lens transmission to be measured；
It further include eyeglass calibrating installation, the position and angle for being used to carry out eyeglass to be measured are calibrated；
Eyeglass calibrating installation to be measured includes laser indicating apparatus, aperture and reflecting mirror, the laser indicating apparatus and the aperture
The laser of diaphragm and the discrete transmitted light path two sides of reflecting mirror, symmetry arrangement, the reflecting mirror reflection continues through the aperture light
Late backtracking, the eyeglass to be measured are arranged vertically with transmitted light path, wherein laser indicating apparatus output the swashing for calibration
Light, by being incident on reflecting mirror by aperture after lens reflecting to be measured, the position of the eyeglass to be measured and angle make the laser
The laser of reflecting mirror reflection continues through the aperture backtracking, completes lens position to be measured and angle calibration system.
2. optical mirror slip Transmissivity measurement device as described in claim 1, which is characterized in that further include seal box, be used for
The optical path and element of the optical mirror slip Transmissivity measurement device are sealed.
3. optical mirror slip Transmissivity measurement device as claimed in claim 2, which is characterized in that filled with protection in the seal box
Gas.
4. a kind of optical mirror slip Transmissivity measurement method, is penetrated using optical mirror slip as claimed any one in claims 1 to 3
Rate measuring device, and include the following steps:
S1, the laser light source is opened, records the reading P of the first power meter and the second power meter at this time1And P2, obtain power ratio
Value c=P1/P2；
S2, eyeglass to be measured is put into the transmitted light path of the optical mirror slip Transmissivity measurement device, is calibrated using eyeglass to be measured
Device adjusts position and the angle of eyeglass to be measured, reads the reading P of the first power meter and second1' and P2'；
S3, the transmitance T that eyeglass to be measured is calculated by following equation:
T=P2’c/P1’。
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109443703A (en) * | 2018-08-21 | 2019-03-08 | 南京波长光电科技股份有限公司 | A kind of detection device and detection method of transmitance and reflectivity |
| CN108872160A (en) * | 2018-09-06 | 2018-11-23 | 北京创思工贸有限公司 | A kind of any angle Transmissivity measurement device and its measurement method |
| CN112051037B (en) * | 2020-09-03 | 2022-11-04 | Oppo（重庆）智能科技有限公司 | Lens detection method and device and terminal equipment |
| CN112432898A (en) * | 2020-11-03 | 2021-03-02 | 中国科学院上海光学精密机械研究所 | Method for distinguishing KDP crystal cone column growth area and measuring device |
| CN112763187B (en) * | 2020-11-30 | 2022-10-14 | 青岛歌尔声学科技有限公司 | Film material transmission optical performance testing system and method based on telescopic light path |
| CN112782129B (en) * | 2020-12-29 | 2023-08-08 | 苏州创鑫激光科技有限公司 | Optical film testing method and testing equipment |
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