CN103018012A - Measuring method and device for transmittance of optical element - Google Patents
Measuring method and device for transmittance of optical element Download PDFInfo
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- CN103018012A CN103018012A CN2012105249435A CN201210524943A CN103018012A CN 103018012 A CN103018012 A CN 103018012A CN 2012105249435 A CN2012105249435 A CN 2012105249435A CN 201210524943 A CN201210524943 A CN 201210524943A CN 103018012 A CN103018012 A CN 103018012A
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Abstract
The invention discloses a measuring method and device for transmittance of an optical element. The method comprises the steps of splitting a laser beam with a specific wavelength to obtain two beams of laser, enabling the two beams of laser to pass through a reference light path and a measuring light path respectively, not placing the optical element on the measuring light path, and obtaining energy E1 of the laser beam passing through the reference light path and energy E2 of the laser passing through the measuring light path by measurement; placing the optical element on the measuring light path, and obtaining energy E1' of the laser beam passing through the reference light path and energy E3 of the laser passing through the measuring light path by measurement; and calculating the transmittance T of the optical element according to an equation T=(E1*E3)/(E1'*E2). According to the measuring method and device, Dual light path aplanatism measurement is adopted, the aim of real-time on-line measurement is achieved, influence of light source energy shake on repeatability of measuring results and measurement of the transmittance of a light-transmission lens can be effectively eliminated, and the transmittance of the optical element used for any ultraviolet pulse laser can be measured accurately and conveniently.
Description
Technical field
The invention belongs to the laser measuring technique field, be specifically related to a kind of measuring method and device of optical element transmitance, especially for measuring method and the device thereof of the optical mirror slip transmitance of macro-energy, high repetition ultraviolet pulse laser.
Background technology
The optical element transmitance refers to that it is the important indicator of optical element Energy Transfer from the irradiation luminous flux of optical element outgoing and the ratio of the irradiation luminous flux that projects this optical element.Because the optical element transmitance directly reflected the loss of its irradiation luminous flux and the quality of image quality, so be very important to the measurement of the transmitance of optical element.
The method of the laser transmittance of measurement optical element commonly used is the single channel mensuration at present.As shown in Figure 1, adopt the Solid State Laser light source of high stable, place the power of optical element to be measured front and back by same position on the measurement outgoing laser optical path, obtain optical element transmitance to be measured by power ratio.
Yet there is intrinsic shortcoming in the single channel mensuration, and for example: for the 193nm uv excimer laser of relative pulse energy jitter sigma=± 5%, establishing its average energy is E
AvgOptical element is lens, and the true transmitance of lens to be measured is T
Real, then the pulsed laser energy real-time measurement values may be energy-minimum E
Avg+ σ
Min* E
AvgTo maximal value E
Avg+ σ
Max* E
AvgBetween scope in some values.σ
MinAnd σ
MaxMinimum value and maximal value for energy deviation average factor sigma.Come the transmitance of these lens to be measured is measured with this traditional single channel mensuration.For example, under a certain extreme case, recording energy when not adding lens to be measured is 0.95E
Avg(or 1.05E
Avg, 0.95E
AvgIt is relative pulse energy jitter sigma
Minσ in the time of=-5%
MaxThe lower limit E of=5% laser energy shake
Avg+ σ
Min* E
Avg, 1.05E
AvgThe higher limit E of the energy shake of the laser when being the shake of relative pulse energy
Avg+ σ
Max* E
Avg), recording energy when adding lens to be measured is 1.05E
Avg* T
Real(or 0.95E
Avg* T
Real), measurement result is done the ratio computing, the transmitance that obtains is 1.105T
Real(or 0.905T
Real), i.e. truer transmitance 10% the deviation of will having an appointment, obviously homogeneous measurement result deviation is very not large, and measuring repeatability can't guarantee, does not satisfy and measures requirement.On the other hand, if the transmitance of known lens to be measured is greater than 1-| σ |, at this moment, the variation that adds lens to be measured front and back luminous energy may be submerged in laser energy and shake among the luminous energy variation that causes.As seen, use traditional optical element transmitance measuring method will be difficult to measure the transmitance of optical element under the ultraviolet pulse laser.
The another kind of method of measuring the optical element transmitance is spectrophotometer method.The method adopts hydrogen arc lamp and halogen tungsten lamp light source, produces ultraviolet to infrared wide range light, by obtaining specific wavelength light after the monochromator light splitting, utilizes light to pass through determinand front and back spectral intensity and changes, and obtains the light transmission rate of determinand.Therefore, although this method can be measured the optical element transmitance accurately, but because its light source is lower powered hydrogen arc lamp and halogen tungsten lamp, the optical element transmitance all records in the low-power situation, can't differentiate the transmitance situation of optical element under the Long-Duration Exposure state of macro-energy, high Repetition Frequency Laser pulse.For the measurement difficult problem of the optical element transmitance that solves ultraviolet pulse laser, need exploitation a kind of new optical element transmitance measuring method and device badly.
Summary of the invention
The technical matters that (one) will solve
This patent quasi-solution certainly draws the problem of comparatively accurate transmitance value in the unsettled situation of the energy of light source own, design suitable light path and optimize measuring condition, can realize the high-acruracy survey of optical element transmitance under macro-energy, high repetition condition.
(2) technical scheme
The present invention proposes a kind of optical element transmitance measuring method, be used for measuring optical element for the transmitance of the laser beam of specific wavelength, the method comprises the steps: the laser beam of described specific wavelength is carried out beam splitting, obtain two bundle laser, make it respectively by a reference path and an optical path; On optical path, do not place described optical element, measure the ENERGY E by the laser beam of reference path
1, be E by the laser energy of optical path
2Place described unit at optical path and learn element, measure the ENERGY E by the laser beam of reference path
1', be E by the laser energy of optical path
3According to formula T=E
1E
3/ E
1' E
2Calculate the transmitance T of this optical element.
The present invention also proposes a kind of optical element transmitance measurement mechanism, be used for measuring optical element for the transmitance of the laser beam of specific wavelength, this device comprises the laser generator for generation of the laser beam of this specific wavelength, this optical element transmitance measurement mechanism also comprises beam splitter, the first photo-detector and the second photo-detector, described beam splitter is used for the laser that described laser generator produces is divided into two bundles, a branch ofly pass through an optical path, another bundle is by a reference path; Described first, second detector is used for measuring the energy that throws the laser beam on it; Wherein said optical element can be removably mounted on the described optical path, and when this optical element is installed on this optical path, described laser beam transmissive incides described the first photo-detector after crossing this optical element to be measured, and the laser of described reference path is directly incident on the second photo-detector.
The present invention also proposes another kind of optical element transmitance measurement mechanism, be used for measuring optical element for the transmitance of the laser beam of specific wavelength, this device comprises the laser generator for generation of the laser beam with specific wavelength and first repetition frequency, this optical element transmitance measurement mechanism also comprises beam splitter, optical chopper, beam splitter, the first lock-in amplifier, the second lock-in amplifier and photo-detector, described laser generator also is used for producing synchronously a repetition signal, and this repetition signal sent to described optical chopper and the first lock-in amplifier, this repetition signal frequency equals laser pulse repetition frequency; Described beam splitter is used for the laser that described laser generator produces is divided into two bundles, a branch ofly passes through an optical path, and another bundle is by a reference path; Described optical chopper is used for receiving the laser that passes through described reference path by the beam splitter outgoing, the repetition signal that sends with described laser generator is as trigger pip, according to a modulation signal laser that receives is carried out chopping modulation, the laser that output has the second repetition frequency, this frequency modulating signal equals the second repetition frequency; Described beam splitter is used for the laser of described optical path and described reference path is merged respectively and is generated as two and restraints mixed light beams measuring light direction and reference light direction; Before inciding this beam splitter, optical path direction and reference path direction quadrature, measure light and reference light same position generation transmission and reflection on beam splitter, measure the synthetic a branch of mixed light beam of reflected light of optical transmission light and reference light, the transmitted light of measuring reflection of light light and reference light then synthesizes another bundle mixed light beam, this two bundle mixed light beam quadrature outgoing beam splitter in same position place on beam splitter; Described photo-detector is used for measuring the energy signal of described mixed light beam, and it is inputted respectively described first, second lock-in amplifier; Described the first lock-in amplifier and the second lock-in amplifier are used for receiving respectively the modulation signal that repetition signal that described laser generator sends and described optical chopper send, and respectively with the first repetition frequency and the second repetition frequency as its reference frequency, be respectively the laser energy signal of described the first repetition frequency and described the second repetition frequency to detect respectively frequency from the energy signal of described mixed light beam, these two signals correspond respectively to the light intensity of measuring beam and reference beam; Optical element to be measured can be removably mounted on the optical path, and when this optical element was installed on this optical path, described laser beam transmissive incided beam splitter after crossing this optical element to be measured.
(3) beneficial effect
Optical element measuring method and device thereof that the present invention proposes, adopt the double light path aplanatism to measure, reached the purpose of real-time online measuring, effectively eliminated the energy of light source shake to the repeatability of measurement result and the impact that high transmission eyeglass transmitance is measured, can the optical element transmitance that be used for any ultraviolet pulse laser have been realized accurately and measure easily.
Description of drawings
Fig. 1 is the structural representation of traditional optical element transmitance measurement mechanism;
Fig. 2 is the structural representation of the first embodiment of the optical element transmitance measurement mechanism that is used for macro-energy, high repetition ultraviolet pulse laser that proposes of the present invention;
Fig. 3 is the structural representation of the second embodiment of the optical element transmitance measurement mechanism that is used for macro-energy, high repetition ultraviolet pulse laser that proposes of the present invention.
Embodiment
The object of the present invention is to provide a kind of accurate measurement method and device thereof of the optical element transmitance for macro-energy, high repetition ultraviolet pulse laser.
According to an aspect of the present invention, propose a kind of optical element transmitance measuring method, the method is at first carried out beam splitting with the laser beam of described specific wavelength, obtains two bundle laser, makes it respectively by a reference path and an optical path.
Owing to there is the measuring error that is difficult to eliminate between the different photo-detectors, same photo-detector can occur to wear out to cause measurement result to change after working after a while, and the splitting ratio of beam splitter is difficult to accurate control.Therefore, when measuring the transmitance of optical element by this measurement mechanism, at first on optical path, do not add optical element to be measured, reference path and optical path are carried out energy calibration, obtain the reference light ENERGY E
1With measurement luminous energy E
2The laser energy ratio k, i.e. k=E
1/ E
2K has reflected the dichroism of whole light path, and is irrelevant with the variation of LASER Light Source, the response condition of photo-detector etc.
Then, optical element to be measured is put into optical path, incide the first photo-detector after making laser see through optical element to be measured, obtain the measurement luminous energy E of this moment
3With the reference light ENERGY E
1'.Because dichroism remains unchanged, the measuring beam energy when supposing actual measurement when optical path does not add optical element is E
2', then according to equation k=E
1/ E
2=E
1'/E
2', calculate E
2'=E
1'/k, thus, the transmitance that can obtain lens to be measured is T=E
3/ (E
1'/k)=E
3/ [E
1'/(E
1/ E
2)]=E
1E
3/ E
1' E
2
According to another aspect of the present invention, a kind of optical element transmitance measurement mechanism is provided, it is the two probe measurement devices of kind of double light path, and this device comprises a laser generator, beam splitter and two photo-detectors (first, second photo-detector).Laser generator is for generation of the laser of specific wavelength and energy, and beam splitter is divided into two bundles with the laser that produces, and a branch of by optical path, another bundle passes through reference path.Optical element to be measured can be removably mounted on the optical path, so that the laser-transmitting on the optical path incides the first photo-detector after crossing optical element to be measured; The laser of reference path is directly incident on the second photo-detector.
When measuring, on optical path, do not place described optical element first, measure the ENERGY E by the laser beam of reference path
1, be E by the laser energy of optical path
2Place described unit at optical path and learn element, measure the ENERGY E by the laser beam of reference path
1', be E by the laser energy of optical path
3According to formula T=E
1E
3/ E
1' E
2Calculate the transmitance T of this optical element.
According to a further aspect of the invention, the optical element transmitance measurement mechanism that provides is a double light path list probe measurement device, and this device comprises a laser generator, a beam splitter, an optical chopper, beam splitter, two lock-in amplifiers (first, second lock-in amplifier) and a photo-detector.
Laser generator is for generation of the laser of specific wavelength, repetition frequency and energy, and to optical chopper and repetition signal of the first lock-in amplifier output, the frequency of this repetition signal equals laser pulse repetition frequency.The repetition frequency of the initial laser that laser generator produces is referred to here as the first repetition frequency.
The laser that beam splitter produces laser generator is divided into two bundles, and a branch of by optical path, another bundle passes through reference path.Optical element to be measured can be removably mounted on the optical path, so that incide beam splitter after crossing optical element to be measured by the laser-transmitting of optical path.
Optical chopper is used for receiving the laser that passes through reference path by the beam splitter outgoing, the repetition signal that sends with described laser generator is as trigger pip, according to a modulation signal laser that receives is carried out chopping modulation, the laser that output has the second repetition frequency, this second repetition frequency equals the chopping modulation frequency.
Beam splitter is used for and will merges into mixed light beam by the laser of optical path and reference path.In one embodiment, before inciding beam splitter, optical path direction and reference path direction quadrature, measure light and reference light by same position generation transmission and reflection on the beam splitter, measure the synthetic a branch of mixed light beam of reflected light of optical transmission light and reference light, the transmitted light of measuring reflection of light light and reference light then synthesizes another bundle mixed light beam, this two bundle mixed light beam quadrature outgoing beam splitter in same position place on beam splitter, and wherein a branch of mixed light beam arrives photo-detector.
The modulation signal that the repetition signal that laser generator sends and optical chopper send sends into respectively first, the second lock-in amplifier is as its reference frequency, simultaneously, the energy signal of the mixed light beam that photo-detector is recorded input respectively lock-in amplifier and signal input part, then first, the second lock-in amplifier can detect respectively the signal that frequency is respectively the frequency of described repetition signal and described modulation signal from the mixed light beam energy signal, these two signals correspond respectively to the beam energy of optical path and reference path, thereby measure when realizing two light path energy.
When measuring, similarly, at first on optical path, do not add optical element to be measured, reference path and optical path are carried out energy calibration, obtain reference light ENERGY E (f
1) and measure light E (f
2), obtain ratio k=E (f
1)/E (f
2).Then optical element to be measured is put into optical path, obtains the reference light ENERGY E ' (f
1) and measure light E ' (f
2).According to equation k=E (f
1)/E (f
2)=E ' (f
1)/E ' (f
2), calculate E ' (f
2)=E ' (f
1)/k, thus, can obtain optical element transmitance to be measured is T=E ' (f
1)/(E ' (f
1)/k).
For making the purpose, technical solutions and advantages of the present invention clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in further detail.
The first embodiment
Fig. 2 is the structural representation of the first embodiment of the optical element transmitance measurement mechanism that is used for macro-energy, high repetition ultraviolet pulse laser that proposes of the present invention.As shown in Figure 2, this device is the two probes of a kind of double light path (photodetector) devices, comprises LASER Light Source 100, optical attenuator 200, beam splitter 210, the first aperture plate 300, second orifice plate 301, element under test clamping device 510, the first photo-detector 600, the second photo-detector 601 and computing machine 800.The measured optical element of the device of this embodiment is lens 500.
LASER Light Source 100 is the ultraviolet pulse laser light source, for generation of ultraviolet pulse laser.Optical attenuator 200 is used for receiving the ultraviolet pulse laser of described LASER Light Source 100 outgoing, and the energy of this ultraviolet pulse laser is controlled at the threshold range of the first photo-detector 600 and the second photo-detector 601.LASER Light Source 100 has the repetition frequency f usually
1
Be provided with the aperture that passes through for laser on described the first aperture plate 300 and the second orifice plate 301, this aperture is used for regulating the laser beam size, so that beam size is near the light area commonly used area of lens 500 to be measured, to adapt to the measurement needs.In this embodiment, the pore size of the first aperture plate 300 and second orifice plate 301 can be regulated, to guarantee by the laser beam in the same size behind the aperture plate.
Described lens to be measured 500 removably are fixed in the optical path of described measurement mechanism by described element under test clamping device 510.
Described the first photo-detector 600 and the second photo-detector 601 are for detection of the energy size of the ultraviolet pulse laser of incident on it, produce the laser energy signal, it both can be photodetector head assembly, also can be thermoelectric detecting head, the two can be different, but are preferably same type and surveying range is identical.
Described computing machine 800 is used for receiving the laser energy signal that is recorded by the first photo-detector 600 and the second photo-detector 601, obtains the transmitance of described lens to be measured 500 after described laser energy signal is processed.Computing machine 800 also can have other data processing equipment with data processing function to realize, such as data acquisition process integrated circuit board.
As mentioned above, the ultraviolet pulse laser that sends from LASER Light Source 100 is divided into two-beam after beam splitter 210 beam splitting, and wherein beam of laser arrives the first photo-detector 600 by optical path, and another Shu Jiguang arrives the second photo-detector 601 by reference path.According to laser characteristics as can be known, optical path and reference path can be regarded approximate aplanatism as, and namely two bundle laser almost arrive the first photo-detector 600 and the second photo-detector 601 simultaneously.
When measuring, at first determine the logical light size of lens 500 to be measured, regulate as required the pore size of the first aperture plate 300 and second orifice plate 301, make from aperture plate 300,301 laser beams that penetrate to have suitable size.Select suitable element under test clamping device according to lens 500 to be measured again, but lens 500 to be measured are not held on this element under test clamping device 510.The light path of calibrating installation coincides the center of each element in the device and light path light axis.Open the switch of LASER Light Source 100, read and record the second photo-detector 601 reading E this moment
1Reading E with the first photo-detector 600
2, obtain ratio k=E
1/ E
2, close laser.
Then, lens 500 to be measured are held on described element under test clamping device 510, open the emission switch of LASER Light Source 100, read and record the first photo-detector 600 reading E this moment
3With the second photo-detector 601 reading E
1'.According to equation k=E
1/ E
2=E
1'/E
2', calculate E
2'=E
1'/k, thus, the transmitance that can obtain lens 500 to be measured is T=E
3/ (E
1'/k).
The second embodiment
Fig. 3 is the structural representation of the second embodiment of the optical element transmitance measurement mechanism that is used for macro-energy, high repetition ultraviolet pulse laser that proposes of the present invention.As shown in Figure 3, this device is a kind of double light path list probe (photodetector) device, comprises LASER Light Source 100, optical attenuator 200, beam splitter 210, the first aperture plate 300, second orifice plate 301, optical chopper 400, the first catoptron 220, the second catoptron 221, beam splitter 211, optical beam dump 230, element under test clamping device 510, photo-detector 600, the first lock-in amplifier 700 and the second lock-in amplifier 701 and computing machine 800.The measured optical element of the device of this second embodiment also is lens 500.
LASER Light Source 100 is the ultraviolet pulse laser light source, for generation of having the first repetition frequency f
1Ultraviolet pulse laser.Simultaneously, LASER Light Source also produces a repetition signal F
1, and with this repetition signal F
1Send to optical chopper 400 and the first lock-in amplifier 700, this repetition signal frequency equals laser pulse repetition frequency.Optical attenuator 200 is used for receiving the ultraviolet pulse laser of described LASER Light Source 100 outgoing, and the energy of this ultraviolet pulse laser is controlled at the threshold range of photo-detector 600.
Described the first aperture plate 300 is used for regulating the laser beam size with second orifice plate 301, so that beam size is near the light area commonly used area of lens 500 to be measured, to adapt to the measurement needs.In this embodiment, the pore size of the first aperture plate 300 and second orifice plate 301 can be regulated, to guarantee by the laser beam in the same size behind the aperture plate.
Described lens to be measured 500 removably are fixed in the optical path of described measurement mechanism by described element under test clamping device 510.
Described optical chopper 400 is used for receiving the laser that passes through reference path by beam splitter 210 outgoing, and the repetition signal F that LASER Light Source 100 is sent
1As trigger pip, according to a modulation signal F
2The laser that receives is carried out chopping modulation, and output has the second repetition frequency f
2Laser.This second repetition frequency equals its chopping modulation frequency.
Described the first catoptron 220 and the second catoptron 221 are respectively applied to laser reflection with the laser of optical path and reference path to beam splitter 211.In this embodiment, as shown in Figure 3, the first catoptron 220 and the second catoptron 211 are all with 45° angle total-reflection laser light beam.
Described beam splitter 211 is used for the laser of optical path and reference path synthetic a branch of respectively at measurement light direction and reference light direction.Before inciding this beam splitter, optical path direction and reference path direction quadrature, measure light and reference light same position generation transmission and reflection on beam splitter, measure the synthetic a branch of mixed light beam of reflected light of optical transmission light and reference light, the transmitted light of measuring reflection of light light and reference light then synthesizes another bundle mixed light beam, this two bundle mixed light beam quadrature outgoing beam splitter in same position place on beam splitter.
Described photo-detector 600 is used for receiving the mixed light beam by the outgoing on the direction of beam splitter 211, detects the energy size of this ultraviolet pulse laser, produces the laser energy signal.Photo-detector 600 both can be photodetector head assembly, also can be thermoelectric detecting head.
Described optical beam dump 230 is used for collecting from the light beam of the light path orthogonal directions of the mixed light beam that receives with photo-detector of beam splitter 211 outgoing.
The laser energy signal that described the first lock-in amplifier 700 and the second lock-in amplifier 701 are used for detecting according to photo-detector 600 obtains respectively the laser energy signal of measuring beam and the laser energy signal of reference beam.The repetition signal F that LASER Light Source 100 is sent
1The modulation signal F that sends with optical chopper 400
2Send into respectively the first lock-in amplifier 700 and the second lock-in amplifier 701 as its reference frequency, the laser energy signal of the mixed light beam that simultaneously, photo-detector 600 is recorded is inputted respectively the signal input part of the first lock-in amplifier 700 and the second lock-in amplifier 701.Thus, to be output as the repetition frequency be f to the first lock-in amplifier 700
1The laser energy signal intensity, thereby detect the intensity of measuring beam; It is f that the second lock-in amplifier 701 is output as the repetition frequency
2The laser energy signal intensity, thereby detect the intensity of reference beam.
Described computing machine 800 is used for receiving described measurement laser energy signal and reference laser energy signal, for the transmitance that obtains described lens to be measured 500 after two laser energy signals are processed.
As mentioned above, the repetition frequency of sending from LASER Light Source 100 is f
1High repetition ultraviolet pulse laser after beam splitter 210 beam splitting, be divided into two-beam, wherein light beam arrives photo-detector 600 by optical path.The repetition signal F that optical chopper 400 sends with the LASER Light Source 100 that receives
1As trigger pip, with modulating frequency f
2Light by reference path is carried out chopping modulation.Reference laser after the modulation arrives photo-detector 600 simultaneously with measurement light behind beam splitter 211.The repetition signal F that LASER Light Source 100 is sent
1(repetition signal F
1Frequency and the repetition frequency f of the laser pulse that sends of LASER Light Source 100
1Equate) the modulation signal F that sends with optical chopper 400
2(modulation signal F
2Frequency equal the chopping modulation frequency f of optical chopper 400
2) send into respectively the first lock-in amplifier 700 and the second lock-in amplifier 701 as its reference frequency, simultaneously, the mixed signal that photo-detector 600 is recorded is inputted respectively the signal input part of the first lock-in amplifier 700 and the second lock-in amplifier 701, and then can to detect respectively frequency from mixed signal be f to two lock-in amplifiers 700,701
1With f
2The laser energy signal, these two signals correspond respectively to the light intensity of the laser of optical path and reference path, thereby measure when realizing two light path energy.
When measuring, at first determine the logical light size of lens 500 to be measured, regulate as required the pore size of the first aperture plate 300 and second orifice plate 301, make from aperture plate 300,301 laser beams that penetrate to have suitable size.Select suitable element under test clamping device according to lens 500 to be measured again, but lens 500 to be measured are not held on this element under test clamping device 510.The light path of calibrating installation coincides the center of each element in the device and light path light axis.
Then, open the emission switch of LASER Light Source 100, read and record photo-detector 600 reading E (f this moment
1) and E (f
2), obtain ratio k=E (f
1)/E (f
2), close LASER Light Source 100.
Then lens 500 to be measured are held on described element under test clamping device 510, open the emission switch of LASER Light Source 100, read and record photo-detector 600 reading E ' (f this moment
1) and E ' (f
2).According to equation k=E (f
1)/E (f
2)=E ' (f
1)/E ' (f
2), calculate E ' (f
2)=E ' (f
1)/k, thus, can obtain lens transmitance to be measured is T=E ' (f
1)/(E ' (f
1)/k).
Above-described specific embodiment; purpose of the present invention, technical scheme and beneficial effect are further described; be understood that; the above only is specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any modification of making, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (10)
1. an optical element transmitance measuring method is used for measuring optical element for the transmitance of the laser beam of specific wavelength, it is characterized in that the method comprises the steps:
The laser beam of described specific wavelength is carried out beam splitting, obtain two bundle laser, make it respectively by a reference path and an optical path;
On optical path, do not place described optical element, measure the ENERGY E by the laser beam of reference path
1, be E by the laser energy of optical path
2
Place described unit at optical path and learn element, measure the ENERGY E by the laser beam of reference path
1', be E by the laser energy of optical path
3
According to formula T=E
1E
3/ E
1' E
2Calculate the transmitance T of this optical element.
2. optical element transmitance measurement mechanism, be used for measuring optical element for the transmitance of the laser beam of specific wavelength, this device comprises the laser generator for generation of the laser beam of this specific wavelength, it is characterized in that, this optical element transmitance measurement mechanism also comprises beam splitter, the first photo-detector and the second photo-detector
Described beam splitter is used for the laser that described laser generator produces is divided into two bundles, a branch ofly passes through an optical path, and another bundle is by a reference path;
Described first, second detector is used for measuring the energy that throws the laser beam on it; Wherein
Described optical element can be removably mounted on the described optical path, and when this optical element was installed on this optical path, described laser beam transmissive incided described the first photo-detector after crossing this optical element to be measured, and
The laser of described reference path is directly incident on the second photo-detector.
3. optical element transmitance measurement mechanism as claimed in claim 2, it is characterized in that, include aperture plate in described reference path and described optical path, be provided with the aperture that passes through for laser on the described aperture plate, this aperture is used for regulating the laser beam size, so that the light area area of beam size and described optical element is suitable.
4. optical element transmitance measurement mechanism as claimed in claim 2 is characterized in that, described optical element (500) removably is fixed in the optical path of described measurement mechanism by described element under test clamping device (510).
5. optical element transmitance measurement mechanism as claimed in claim 2, it is characterized in that, also comprise data processing equipment (800), it is used for receiving the laser energy signal that is recorded by the first photo-detector (600) and the second photo-detector (601), obtains the transmitance of described optical element (500) after described laser energy signal is processed.
6. optical element transmitance measurement mechanism, be used for measuring optical element for the transmitance of the laser beam of specific wavelength, this device comprises the laser generator for generation of the laser beam with specific wavelength and first repetition frequency, it is characterized in that, this optical element transmitance measurement mechanism also comprises beam splitter, optical chopper, beam splitter, the first lock-in amplifier, the second lock-in amplifier and photo-detector
Described laser generator also is used for producing synchronously a repetition signal, and this repetition signal is sent to described optical chopper and the first lock-in amplifier, and this repetition signal frequency equals laser pulse repetition frequency;
Described beam splitter is used for the laser that described laser generator produces is divided into two bundles, a branch ofly passes through an optical path, and another bundle is by a reference path;
Described optical chopper is used for receiving the laser that passes through described reference path by the beam splitter outgoing, the repetition signal that sends with described laser generator is as trigger pip, according to a modulation signal laser that receives is carried out chopping modulation, the laser that output has the second repetition frequency, this frequency modulating signal equals the second repetition frequency;
Described beam splitter is used for the laser of described optical path and described reference path is merged respectively and is generated as two and restraints mixed light beams measuring light direction and reference light direction; Before inciding this beam splitter, optical path direction and reference path direction quadrature, measure light and reference light same position generation transmission and reflection on beam splitter, measure the synthetic a branch of mixed light beam of reflected light of optical transmission light and reference light, the transmitted light of measuring reflection of light light and reference light then synthesizes another bundle mixed light beam, this two bundle mixed light beam quadrature outgoing beam splitter in same position place on beam splitter;
Described photo-detector is used for measuring the energy signal of described mixed light beam, and it is inputted respectively described first, second lock-in amplifier;
Described the first lock-in amplifier and the second lock-in amplifier are used for receiving respectively the modulation signal that repetition signal that described laser generator sends and described optical chopper send, and respectively with the first repetition frequency and the second repetition frequency as its reference frequency, be respectively the laser energy signal of described the first repetition frequency and described the second repetition frequency to detect respectively frequency from the energy signal of described mixed light beam, these two signals correspond respectively to the light intensity of measuring beam and reference beam;
Optical element to be measured can be removably mounted on the optical path, and when this optical element was installed on this optical path, described laser beam transmissive incided beam splitter after crossing this optical element to be measured.
7. optical element transmitance measurement mechanism as claimed in claim 6, it is characterized in that, include aperture plate in described reference path and described optical path, be provided with the aperture that passes through for laser on the described aperture plate, this aperture is used for regulating the laser beam size, so that beam size is suitable with the light area area of stating optical element.
8. optical element transmitance measurement mechanism as claimed in claim 6 is characterized in that, described optical element (500) removably is fixed in the optical path of described measurement mechanism by described element under test clamping device (510).
9. optical element transmitance measurement mechanism as claimed in claim 6, it is characterized in that, also comprise data processing equipment (800), it is used for receiving the described laser energy signal that has the first repetition frequency and have described the second repetition frequency, obtains the transmitance of described optical element (500) after these two laser energy signals are processed.
10. optical element transmitance measurement mechanism as claimed in claim 6 is characterized in that, also comprises the first catoptron and the second catoptron, and it is respectively applied to laser reflection with the laser of optical path and reference path to beam splitter.
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