CN201811834U - Automatic calibrating device for laser parameter property test - Google Patents
Automatic calibrating device for laser parameter property test Download PDFInfo
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- CN201811834U CN201811834U CN2010205104748U CN201020510474U CN201811834U CN 201811834 U CN201811834 U CN 201811834U CN 2010205104748 U CN2010205104748 U CN 2010205104748U CN 201020510474 U CN201020510474 U CN 201020510474U CN 201811834 U CN201811834 U CN 201811834U
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- automatic calibration
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Abstract
The utility model relates to an automatic calibrating device for a laser parameter property test, which comprises a laser device, an optical fiber head and a reflector. The calibrating device also comprises a off-axis parabolic mirror arranged on the emergent light path of the reflector, and the optical fiber head is arranged between the laser device and the reflector and deviates from the emergent light path of the off-axis parabolic mirror. The automatic calibrating device for the laser parameter property test can effectively calibrate deviation between real parameters of all indictors and standards in a ShenGuang III host laser parameter diagnosis measurement system and can give correction factors, thereby better ensuring the accuracy on laser parameter measurement and diagnosis by the ShenGuang III host laser parameter system.
Description
Technical field
The utility model relates to the automatic calibration device of refreshing light three main frame laser parameter measurement system performance index.
Background technology
Along with refreshing light three host apparatus big science engineerings are carried out in a deep going way, the performance parameter sampling and measurings at different levels diagnosis of light laser is seemed more and more important.The laser activity parameter measurement system is mainly measured refreshing light three main frames laser parameters at different levels such as near field percentage modulation wavefront distortion, time, energy etc., requires measuring accuracy and repeatability all very high.Because refreshing light three main frame optical maser wavelengths are 1053nm and 351nm, optical device in the conventional parameter measuring system and all kinds of explorer response are lower, stray light is big, and all kinds of performance parameters will descend, and directly influences the accuracy of refreshing light three host apparatus laser activity parameter measurements.The automatic calibration device of present domestic demarcation host parameter measure of system performance does not also have, usually simply utilize fiber laser and collimating mirror to build a simple and easy light source and produce a branch of collimation directional light, can only demarcate near field and wavefront in the main frame laser parameter measurement system, can't be on same device the deadline, the measurement of other parameters such as energy, and when measuring because the instability of laser power causes standard sources near field and wavefront to change, and can't the control measurement standard sources, also influence simultaneously the accuracy that host parameter is measured, the host parameter measuring system of producing in enormous quantities is carried out calibration measurements to waste time and energy.To sum up, this measurement mechanism repeatability and measuring accuracy are low, and the measurement standard stability of light source with above-mentioned measurement device laser activity parameter measurement system, can make the demarcation confidence level of host parameter measure of system performance index reduce greatly in real time.
The utility model content
In order to solve existing technical matters in the background technology, the utility model proposes a kind of laser parameter performance test automatic calibration device, can effectively demarcate the deviation of the actual parameter of each index in the intensive light three main frame laser parameter diagnostic measurement systems and standard and can provide correction factor, well guarantee the accuracy that refreshing light three main frame laser parameter systems carry out laser parameter measurement and diagnosis.
Technical solution of the present utility model is: 1, a kind of laser parameter performance test automatic calibration device, comprise laser instrument, optical fiber head, catoptron, its special character is: described caliberating device comprises off-axis parabolic mirror, described off-axis parabolic mirror is arranged on the emitting light path of catoptron, described optical fiber head is arranged between the lasers and mirrors, departs from the emitting light path of off-axis parabolic mirror.
Above-mentioned laser instrument is two different wavelength of laser devices, and described optical fiber head is two, and described optical fiber head is arranged on the optical fiber head electronic control translation stage.
Above-mentioned caliberating device also comprises probe unit, probe unit comprises first dichroic reflector and detector, described first dichroic reflector is arranged on the emitting light path of off-axis parabolic mirror, and described detector is arranged on the emitting light path of first dichroic reflector.
Be provided with soft change diaphragm between the above-mentioned off-axis parabolic mirror and first spectroscope.
Above-mentioned detector is one or more, and described detector is arranged on to be surveyed on the electronic control translation stage.
Be provided with the light beam bundle device that contracts between above-mentioned first dichroic reflector and the detector.
Above-mentioned caliberating device also comprises the energy coefficient probe unit, described energy probe unit comprises second dichroic reflector, the 3rd dichroic reflector and laser powermeter, described second dichroic reflector is arranged on the transmitted light path of first dichroic reflector, and described second dichroic reflector is arranged on the energy measurement electronic control translation stage; Described the 3rd dichroic reflector is arranged on the reflected light path of second dichroic reflector, and described laser powermeter is two, is separately positioned in the transmission and reflected light path of the 3rd dichroic reflector.
Above-mentioned detector is time detector, ccd detector, Hartman wavefront detector or its combination.
Above-mentioned laser powermeter is plane or integration ball-type laser powermeter.
Above-mentioned laser instrument is 351nm picosecond pulse laser device and 1053nm picosecond pulse laser device.
The utility model has the advantages that:
1, standard sources of the present utility model is through catoptron, off-axis parabolic mirror, and what send is a branch of standard flat ripple, and it utilizes from the axle parallel light tube, and the laser instrument different wave length at its focal plane place can freely switch, and forms the standard flat ripple of different wave length;
2, on light path, adopt the soft change diaphragm not only can the confine optical beam bore, and can homogenize standard near-field beam edge diffraction effect;
3, adopting dichroic reflector that the standard sources outgoing beam is divided into two-way light is measuring light and reference light, and utilizes probe unit can measure in real time parameters such as reference light near field, wavefront, times, compare; Stability is high, good reproducibility, measurement result degree of confidence height; And can compare correction in real time to system index;
4, the energy coefficient probe unit adopts integration ball-type laser light rate meter, can measure flat board, energy transmission and the reflection coefficient of lens subassembly under specific optical maser wavelength condition in real time, and measurement range is big;
5, automatic calibration device of the present utility model increases substantially the demarcation automaticity of refreshing light three main frame laser parameter measurement systems, is applicable to the mass test, has saved labour and cost.
Description of drawings
Fig. 1 is a structural representation of the present utility model;
Embodiment
Referring to Fig. 1, laser parameter performance test automatic calibration device of the present utility model is made up of three parts, is respectively light source 23, probe unit 24 and energy system probe unit 25; Light source 23 comprises first pulsed laser 1, second pulsed laser 3, first optical fiber head 2, second optical fiber head 4, optical fiber head electronic control translation stage 5, catoptron 6, off-axis parabolic mirror 7 and soft change diaphragm 8, first pulsed laser 1 is a 351nm picosecond pulse laser device, second pulsed laser 3 is 1053nm picosecond pulse laser devices, first optical fiber head 3 is 351nm optical fiber heads, second optical fiber head 4 is 1053nm optical fiber heads, first optical fiber head 3 and second optical fiber head 4 are arranged on the optical fiber head electronic control translation stage 5 and can move around, catoptron 6 and off-axis parabolic mirror 7 constitute parallel light tube, are used for producing a branch of parallel pulsed light beam.This near-field beam is the plane wave of standard, and the burst length is a picosecond magnitude.First pulsed laser 1 and second pulsed laser, 3 energy can be regulated as required.The LASER Light Source at place, off axis paraboloid mirror parallel light tube focal plane can be switched by translation stage 5.Light source makes light change to needed bore through soft change diaphragm 8, make through the laser of soft change diaphragm 8 can be more concentrated through on first dichroic reflector 9 of probe unit 24.
Energy coefficient probe unit 25 comprises the automatically controlled displacement platform 15 of energy measurement, second dichroic reflector 16, the 3rd dichroic reflector 18, first integral ball-type laser powermeter 19, second integral ball-type laser powermeter 20 and energy beam split measurement of reflection-factor bag 21.The automatically controlled displacement platform combination of dichroic reflector and energy measurement, light beam is received by integration ball-type power meter, be used for measuring host parameter measuring system energy coefficient, integration ball-type power meter can be measured the light beam of multi-angle, measurement range is wideer than the plane, under less demanding situation, also can adopt the planar power measurement mechanism, light beam is divided into two bundles through the effect of the 3rd dichroic reflector 18, enter first integral ball-type laser powermeter 19, the second ball integration ball-type laser powermeter 20 respectively, measure simultaneously, improved efficiency of measurement.Dichroic reflector all is printing opacities 95%, reflective 5% dichroic reflector.
During work, refreshing light three main frames are measured bag 17 be placed on the corresponding test station, open all kinds of detectors in the host parameter measuring system by the difference in functionality demand.During test, at first drive first pulsed laser 1 (during the 351nm light velocity measurement) or second pulsed laser 3 (during the 1053nm light velocity measurement); Open at first pulsed laser 1,,, open, move, second optical fiber head (1053nm optical fiber head) is cut by electronic control translation stage 5 at second pulsed laser 3 with first optical fiber head (351nm optical fiber head) incision by moving of electronic control translation stage 5; Afterwards, the a branch of standard flat ripple of parallel light tube collimation outgoing that laser is formed by catoptron 6 and off-axis parabolic mirror 7, through first dichroic reflector 9 light beam is divided into measuring beam (transmitted light) and reference beam (reflected light), measuring beam directly enters refreshing light three main frames and measures 17 pairs of all kinds of measurements of bag; The reference beam process contracts after the bundle device 10, the three kinds of detector time detectors 12, ccd detector 13, the Hartman wavefront detector 14 that are installed on the automatically controlled displacement platform 11 move automatically and receive, and measurement result is as the right normal data of near field, wavefront and the time ratio of reference light beam.
When needing to measure energy coefficient, utilize energy measurement electronic control translation stage 15 automatically controlled moving, light path is measured in 16 incisions of second dichroic reflector, light beam runs into 90 ° of back turnovers, be divided into transmitted light and reflected light through the 3rd dichroic reflector 18 again, transmitted light directly enters first integral ball-type laser powermeter 19, reflected light enters second integral ball-type laser powermeter 20 after by energy beam split measurement of reflection-factor bag 21, gathers data and calculating energy coefficient that first integral ball-type laser powermeter 19, second integral ball-type laser powermeter 20 are measured simultaneously.The data that measure receive by control and collecting computer 22 and handle, and control and collecting computer 22 are also controlled moving of translation stage.
Claims (10)
1. laser parameter performance test automatic calibration device, comprise laser instrument, optical fiber head, catoptron, it is characterized in that: described caliberating device comprises off-axis parabolic mirror, described off-axis parabolic mirror is arranged on the emitting light path of catoptron, described optical fiber head is arranged between the lasers and mirrors, departs from the emitting light path of off-axis parabolic mirror.
2. laser parameter performance test automatic calibration device according to claim 1 is characterized in that: described laser instrument is two different wavelength of laser devices, and described optical fiber head is two, and described optical fiber head is arranged on the optical fiber head electronic control translation stage.
3. laser parameter performance test automatic calibration device according to claim 2, it is characterized in that: described caliberating device also comprises probe unit, probe unit comprises first dichroic reflector and detector, described first dichroic reflector is arranged on the emitting light path of off-axis parabolic mirror, and described detector is arranged on the emitting light path of first dichroic reflector.
4. laser parameter performance test automatic calibration device according to claim 3 is characterized in that: be provided with soft change diaphragm between the described off-axis parabolic mirror and first spectroscope.
5. laser parameter performance test automatic calibration device according to claim 4 is characterized in that: described detector is one or more, and described detector is arranged on to be surveyed on the electronic control translation stage.
6. laser parameter performance test automatic calibration device according to claim 6 is characterized in that: be provided with the light beam bundle device that contracts between described first dichroic reflector and the detector.
7. according to claim 1 or 2 or 3 or 4 or 5 or 6 described laser parameter performance test automatic calibration devices, it is characterized in that: described caliberating device also comprises the energy coefficient probe unit, described energy probe unit comprises second dichroic reflector, the 3rd dichroic reflector and laser powermeter, described second dichroic reflector is arranged on the transmitted light path of first dichroic reflector, and described second dichroic reflector is arranged on the energy measurement electronic control translation stage; Described the 3rd dichroic reflector is arranged on the reflected light path of second dichroic reflector, and described laser powermeter is two, is separately positioned in the transmission and reflected light path of the 3rd dichroic reflector.
8. laser parameter performance test automatic calibration device according to claim 7 is characterized in that: described detector is time detector, ccd detector, Hartman wavefront detector or its combination.
9. laser parameter performance test automatic calibration device according to claim 8 is characterized in that: described laser powermeter is plane or integration ball-type laser powermeter.
10. laser parameter performance test automatic calibration device according to claim 9 is characterized in that: described laser instrument is 351nm picosecond pulse laser device and 1053nm picosecond pulse laser device.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205104748U CN201811834U (en) | 2010-08-31 | 2010-08-31 | Automatic calibrating device for laser parameter property test |
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| Application Number | Priority Date | Filing Date | Title |
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| CN2010205104748U CN201811834U (en) | 2010-08-31 | 2010-08-31 | Automatic calibrating device for laser parameter property test |
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| CN201811834U true CN201811834U (en) | 2011-04-27 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102155994A (en) * | 2011-05-03 | 2011-08-17 | 中国兵器工业第二〇五研究所 | Calibration device of infrared radiometer and calibration method of infrared radiometer |
| CN104006878A (en) * | 2014-06-16 | 2014-08-27 | 中国工程物理研究院应用电子学研究所 | High-power halogen tungsten lamp remnant energy radiant efficiency measurement system and method for laser energy meter calibration |
| CN109708843A (en) * | 2017-10-25 | 2019-05-03 | 住友电工光电子器件创新株式会社 | Assess the test equipment and method of optical module |
| CN114295332A (en) * | 2021-12-31 | 2022-04-08 | 中国科学院长春光学精密机械与物理研究所 | Large-caliber telescope calibration system |
-
2010
- 2010-08-31 CN CN2010205104748U patent/CN201811834U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102155994A (en) * | 2011-05-03 | 2011-08-17 | 中国兵器工业第二〇五研究所 | Calibration device of infrared radiometer and calibration method of infrared radiometer |
| CN104006878A (en) * | 2014-06-16 | 2014-08-27 | 中国工程物理研究院应用电子学研究所 | High-power halogen tungsten lamp remnant energy radiant efficiency measurement system and method for laser energy meter calibration |
| CN104006878B (en) * | 2014-06-16 | 2015-12-02 | 中国工程物理研究院应用电子学研究所 | Laser energy meter calibrating high-power halogen tungsten lamp residual amount of energy radiation efficiency measuring system and measuring method |
| CN109708843A (en) * | 2017-10-25 | 2019-05-03 | 住友电工光电子器件创新株式会社 | Assess the test equipment and method of optical module |
| CN114295332A (en) * | 2021-12-31 | 2022-04-08 | 中国科学院长春光学精密机械与物理研究所 | Large-caliber telescope calibration system |
| CN114295332B (en) * | 2021-12-31 | 2023-02-21 | 中国科学院长春光学精密机械与物理研究所 | Large-caliber telescope calibration system |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110427 Termination date: 20130831 |