CN105115701A - Device for accurately measuring optical lens transmittance in high power laser environment and method - Google Patents
Device for accurately measuring optical lens transmittance in high power laser environment and method Download PDFInfo
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- CN105115701A CN105115701A CN201510497130.5A CN201510497130A CN105115701A CN 105115701 A CN105115701 A CN 105115701A CN 201510497130 A CN201510497130 A CN 201510497130A CN 105115701 A CN105115701 A CN 105115701A
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Abstract
The present invention discloses an optical lens transmittance measuring device which comprises a laser light source, a beam expanding device, a 45-degree optical divider ratio 50/50 film coating beam splitter, a compensation piece, a slit, a first power meter and a second power meter. In the measurement, firstly the laser light source is opened, the readings P1 and P2 of the first power meter and the second power meter are recorded, and a power ratio c=P1/P2 is obtained. Then a lens to be measured is placed in the transmission light path of the optical lens transmittance measurement device, the position and angle of the lens to be measured are adjusted by using the calibration device of the lens to be measured, and the readings P1' and P2' of the first power meter and the second power meter are recorded. Finally, the transmittance T of the lens to be measured is calculated through the following formula T= P2'c/P1'. According to the device and the method, the requirement of light source stability is low, the thickness of the lens to be measured is not required, and the influence of surface reflection before and after light splitting and optical film coating lens film system uniformity on a testing result can be eliminated.
Description
Technical field
The invention belongs to field of laser device technology, particularly the method and apparatus of optical mirror slip transmitance in a kind of accurate measurement high power laser light environment.
Background technology
Optical mirror slip transmitance is an important references amount to the reflection of the irradiation luminous flux of optical mirror slip and evaluation of imaging quality, therefore extremely important to its measurement carried out.
Measurement people for optical mirror slip transmitance do excessive quantifier elimination, also make some progress.Past adopts traditional single channel mensuration, i.e. the ratio of luminous flux that do not obtained by tested eyeglass of the luminous flux that obtained by tested eyeglass of light beam and light beam.Single channel method of testing apparatus structure is simple, convenient operation, but its disadvantage is that this method can cause the irradiation luminous flux of twice test in front and back to shake due to the power swing of light source own, thus causes the inaccuracy of whole test.
In order to make up the deficiency of single channel test macro, available binary channels test macro carries out transmission measurement.A kind of existing testing scheme is spectrophotometer method, although this method can measure eyeglass transmitance accurately, but its eyeglass transmitance records all under low power scenarios, and the characteristic of eyeglass originally under high energy strong illumination state probably changes, so the test under low power state cannot illustrate high power situation.In addition, when utilizing spectrophotometer measurement, the thickness of multipair eyeglass to be measured has requirement, and it is less to the daylighting region on eyeglass.
As shown in Figure 1, it can utilize transmitted light path and reflected light path to realize the test of lens transmission rate in high power situation to another existing proving installation.Although this method has abandoned the impact of the stability of light source own, and can measure under upper state, but as shown in Figure 1, light splitting piece has former and later two surfaces, and in reflected light, existing front surface reflection light, has again rear surface reflected light, because the two light path is different, so the changed power trend caused by substrate absorption etc. is also not quite similar, treats if do not distinguish, error can be introduced to test result.In addition, when the angle that eyeglass to be measured is placed and change in location, indirectly can change laser incident angle and irradiation position, thus itself transmitance can produce subtle change, therefore, when measuring multi-disc eyeglass transmitance to be measured, need position and the angle of calibrating each.
On the other hand, the height of transmissivity is not only by the impact of optical mirror slip (air entrapment, dirt etc.) itself, on plated film lens, the impact of film system homogeneity is also fairly obvious, and current transmitance detects spininess to small-bore or measure with pointolite, notable difference is there is in this with regard to the very possible transmitance recorded at diverse location place, therefore can not obtain transmitance very accurately for large-aperture optical eyeglass, this just needs the heavy caliber transmissivity measuring eyeglass.
Summary of the invention
(1) technical matters that will solve
The present invention is intended to effectively eliminate the factors such as light source power instability, the reflection of light splitting piece front and rear surfaces, plated film lens film system homogeneity to optical mirror slip Transmissivity measurement result, and the impact of measurement result repeatability.
(2) technical scheme
The present invention proposes a kind of optical mirror slip Transmissivity measurement device, comprise LASER Light Source, beam expander device, the plated film light splitting piece of 45° angle splitting ratio 50/50, compensating plate, slit, the first power meter and the second power meter, wherein, described LASER Light Source is for generation of high power laser light; The laser that described beam expander device is used for LASER Light Source is launched carries out shaping and expands; The light splitting piece of described 45° angle splitting ratio 50/50 is used for the testing laser of receiving beam parallel beam expand device output and is divided into transmitted light and reflected light, and this light splitting piece has two relative parallel reflective faces, and one of them reflecting surface has plated film; Described compensating plate is placed in the side with plated film of described light splitting piece, for receive and transmission light splitting piece export transmitted light and reflected light in one, with compensate from plated film light splitting piece export laser substrate absorb; Described slit is used for retraining the laser reflected from described light splitting piece, only to allow to pass through from the laser with the reflective surface of plated film of described light splitting piece; Described first power meter is for detecting the power of the laser by described slit; Described second power meter is for detecting the power of the laser from lens transmission to be measured.
According to the preferred embodiment of the present invention, optical mirror slip Transmissivity measurement device also comprises eyeglass calibrating installation, and it is calibrated for the position of carrying out eyeglass to be measured and angle.
According to the preferred embodiment of the present invention, eyeglass calibrating installation to be measured comprises laser indicating apparatus, aperture and catoptron, wherein, described laser indicating apparatus exports the laser for calibrating, this laser incides catoptron by after lens reflecting to be measured by aperture, the position of described eyeglass to be measured and angle make laser that this catoptron reflects continue through the former road of this aperture to return, complete lens position to be measured and angle calibration system.
According to the preferred embodiment of the present invention, optical mirror slip Transmissivity measurement device also comprises seal box, and it is for sealing the light path of described optical mirror slip Transmissivity measurement device and element.
According to the preferred embodiment of the present invention, in seal box described in optical mirror slip Transmissivity measurement device, be filled with blanket gas.
The present invention also proposes a kind of optical mirror slip Transmissivity measurement method, uses aforesaid optical mirror slip Transmissivity measurement device, and comprises the steps:
S1, open described LASER Light Source, the reading P of record now the first power meter and the second power meter
1and P
2, obtain power ratio c=P
1/ P
2;
S2, eyeglass to be measured is put into the transmitted light path of described optical mirror slip Transmissivity measurement device, utilize eyeglass calibrating installation to be measured to adjust position and the angle of eyeglass to be measured, read the reading P of the first power meter and second
1' with P
2';
S3, transmitance T by following formulae discovery eyeglass to be measured:
T＝P
2′c/P
1′。
(3) beneficial effect
The method and apparatus of optical mirror slip transmitance in a kind of accurate measurement high power laser light environment that the present invention proposes, require relatively low to light source stability, to lens thickness no requirement (NR) to be measured, the impact on test result such as the reflection of light splitting piece front and rear surfaces, optical coating eyeglass film system homogeneity can be eliminated, and can realize testing the heavy caliber of eyeglass transmitance to be measured by beam expander device.
Accompanying drawing explanation
Fig. 1 is the existing conceptual scheme utilizing light splitting piece to carry out the test of optical mirror slip transmissivity;
Fig. 2 is the structural representation of the first embodiment of the proving installation of optical mirror slip transmitance in the accurate measurement high power laser light environment that proposes of the present invention;
Fig. 3 is the structural representation of proving installation second embodiment of optical mirror slip transmitance in the accurate measurement high power laser light environment that proposes of the present invention.
Embodiment
In the accurate measurement high power laser light environment that the present invention proposes, the device of optical mirror slip transmitance adopts double light path aplanatism to measure, and comprises LASER Light Source, beam expander device, the plated film light splitting piece of 45° angle splitting ratio 50/50, compensating plate, eyeglass calibrating installation to be measured, slit, the first power meter and the second power meter.
LASER Light Source is for generation of high power laser light.
The laser that beam expander device is used for LASER Light Source is launched carries out shaping and expands.Light source laser beam transformation expands by described beam expander device, thus can carry out heavy caliber Transmissivity measurement to eyeglass to be measured.
The light splitting piece of 45° angle splitting ratio 50/50 is used for the testing laser of receiving beam parallel beam expand device output and is divided into transmitted light and reflected light.This light splitting piece has two relative parallel reflective faces, and one of them reflecting surface has plated film.Described 45° angle splitting ratio 50/50 plated film light splitting piece and laser beam axis angle at 45 ° are placed.
Compensating plate is placed in the side with plated film of light splitting piece, exporting one in transmitted light and reflected light, absorbing with the substrate compensating the laser exported from plated film light splitting piece for receiving also transmission light splitting piece.Material, the thickness of described compensating plate are identical with described 45° angle splitting ratio 50/50 plated film light splitting piece, and place with laser optical path also angle at 45 °.
Slit is used for retraining the laser reflected from described light splitting piece, only to allow to pass through from the laser with the reflective surface of plated film of described light splitting piece.
First power meter is for detecting the power of the laser by slit.
Second power meter is for detecting the power of the laser from lens transmission to be measured.
Eyeglass calibrating installation is used for the position of carrying out eyeglass to be measured and angle is calibrated, so that eyeglass placement location to be measured when ensureing repetitive measurement, angle are identical, eliminate eyeglass to be measured and places the different measuring error introduced.
Eyeglass to be measured is placed in the light path of the transmitted light of plated film light splitting piece.
A kind of embodiment of eyeglass calibrating installation to be measured comprises laser indicating apparatus, aperture and catoptron.Laser indicating apparatus exports the laser for calibrating, this laser incides catoptron by after lens reflecting to be measured by aperture, adjust laser that lens position to be measured and angle make catoptron reflect to continue through the former road of aperture and return, complete lens position to be measured and angle calibration system.
The light that LASER Light Source sends, after beam expander device, incides on 45° angle splitting ratio 50/50 plated film light splitting piece, utilizes slit to retrain reflects laser, only allows the reflected light of light splitting piece coated surface to pass through, and incides the first power meter.The second power meter is finally incided transmitted through after the Laser output of eyeglass to be measured.
Preferably, measurement mechanism of the present invention also comprises seal box, and seal box is used for above-mentioned each component seal.N can be filled with in seal box
2deng blanket gas, to prevent factors such as atmospheric environment etc. impact is brought on test result.
Lens transmission rate measuring process to be measured is:
S1, open LASER Light Source, the reading P of record now the first power meter and the second power meter
1and P
2, obtain power ratio c=P
1/ P
2;
S2, eyeglass to be measured is put into the transmitted light path of measurement mechanism, utilize eyeglass calibrating installation to be measured to adjust position and the angle of eyeglass to be measured, read the reading P of the first power meter and second
1' and P
2';
S3, transmitance T by following formulae discovery eyeglass to be measured:
T＝P
2’c/P
1’。
For making the object, technical solutions and advantages of the present invention clearly understand, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in further detail.
The structure of the first embodiment of the present invention as shown in Figure 2.1 is LASER Light Source, for generation of high power laser light; 2 is beam expander device, carries out shaping for laser LASER Light Source launched and expands, thus can carry out heavy caliber measurement to lens transmission rate to be measured; 3 is the plated film light splitting piece of 45° angle splitting ratio 50/50, and the testing laser exported for receiving beam parallel beam expand device 2 is also divided into transmitted light and reflected light, and its coated surface is positioned on Laser output face; 4 is compensating plate, for receiving and the laser of transmission plated film light splitting piece 3 transmission, absorbs from the substrate of the laser of plated film light splitting piece 3 transmission for compensating; 5 is slit, for retraining, only to allow the laser reflected from the coated surface of described plated film light splitting piece 3 to pass through the laser reflected from described plated film light splitting piece 3; 6 is the first power meter, for detecting the power of the laser by described slit 5; 7 is eyeglass to be measured, makes this eyeglass 7 to be measured of laser light from the transmission of described compensating plate 4; 8 is laser indicating apparatus, and for exporting red laser, 9 is aperture, 10 is catoptron, laser indicating apparatus 8, aperture 9, catoptron 10 form eyeglass calibrating installation to be measured, when carrying out Transmissivity measurement to difference eyeglass to be measured, to calibrate its position and angle; 11 is the second power meter, for detecting the power of the laser from lens transmission to be measured; 12 is seal box, seals for light beam being protected bundle device 2, plated film light splitting piece 3, compensating plate 4, slit 5, first power meter 6, second power meter 11, eyeglass calibrating installation to be measured and catoptron 10, at sealing N
2the measurement of lens transmission rate is realized under environment.
The light that LASER Light Source 1 sends, after beam expander device 2, incides on 45° angle splitting ratio 50/50 plated film light splitting piece 3, utilizes slit 5 pairs of reflects laser to retrain, and only allows the reflected light of light splitting piece coated surface to pass through, and incides the first power meter 6; Export after compensating plate 4 through laser, finally incide the second power meter 11.Control to make it to associate with the second power meter 11 to the first power meter 6, just can record the test number of a certain moment first power meter 6 and the second power meter 11 simultaneously.Whole device is placed in seal box 12 and tests, and fills N
2protection, prevents the factors etc. such as atmospheric environment from bringing impact to test result.
The arrangement method of eyeglass calibrating installation to be measured as shown in Figure 2, laser indicating apparatus 8 and aperture 9, the discrete transmitted light path both sides of catoptron 10, symmetry arrangement; Laser indicating apparatus 8 is positioned at above transmitted light path, and exporting light is macroscopic visible laser, and it exports light and transmitted light path is that θ angle is put; Aperture 9 and catoptron 10 are positioned at below transmitted light path, both place planes are put in (90 ° of-θ) angle with transmitted light path separately, and by aperture 9 center, will through the center of catoptron in the light of-θ angle with transmitted light path, and the intersection point that this light and laser indicating apparatus 8 export light will be positioned on transmitted light path optical axis, and this intersection point is also the intersection point of lens posterior surface to be measured and optical axis simultaneously.Like this, by the light of laser indicating apparatus outgoing, incide lens posterior surface to be measured, by finely tuning angle and the position of eyeglass to be measured, make its reflected light through the center of aperture 9, and catoptron 10 surface can be incided, then return through catoptron reflection Hou Yuan road, now, lens angle to be measured, position correction are complete.
As shown in Figure 2, described reflected light path and transmitted light path roughly equal at the light path of free space.
If the thickness of spectroscope 3 is d, refractive index is n, then the light path walked in eyeglass inside through the laser of light splitting piece coated surface reflection is
transmitted light is due to the compensation effect of compensating plate, and the light path walked in eyeglass inside is also
like this, reflects laser is identical with the light path that transmission laser is walked in same material eyeglass substrate, even if under the accumulative effects such as high-energy irradiation, passage of time, substrate absorption etc. are roughly the same, farthest can ensure the accuracy of test result.
As shown in Figure 2, the thickness of plated film light splitting piece 3 is 5mm, and refractive index is 1.5, and the light path that the laser through the reflection of this light splitting piece coated surface is walked in eyeglass inside is
transmitted light is due to the compensation effect of compensating plate, and the light path walked in eyeglass inside is also
like this, reflects laser is identical with the light path that transmission laser is walked in same material eyeglass substrate, even if under the accumulative effects such as high-energy irradiation, passage of time, substrate absorption etc. also can be roughly the same, farthest can ensure the accuracy of test result.
Eyeglass transmission measurement step to be measured is as follows:
S1, open the power supply of LASER Light Source 1, the reading P of record now the first power meter 6 and the second power meter 11
1and P
2, obtain power ratio c=P
1/ P
2, close the power supply of LASER Light Source 1.
S2, eyeglass 7 to be measured is put into transmitted light path, and with red laser marking instrument 8, aperture 9 and the calibration catoptron 10 that ruddiness is all-trans being carried out to eyeglass 7 position to be measured, angle.Open the power supply of LASER Light Source 1 again, read the reading P recording now the first power meter 6 and the second power meter 11
1' with P
2'.
S3, calculate eyeglass transmitance T to be measured:
T＝P
2′/(P
1′/c)＝P
2′c/P
1′。
Change the power of LASER Light Source 1, repeat above-mentioned steps, then under can obtaining different capacity state, the transmitance of eyeglass 7 to be measured.The structure of the second embodiment of the present invention as shown in Figure 3.With the first embodiment unlike, the coated surface of the plated film light splitting piece 3 of this embodiment is positioned on laser input face, and compensating plate 4, for receiving the laser that also transmission is reflected from plated film light splitting piece 3, absorb with the first embodiment similar with the substrate compensating the laser of this reflection, the thickness of plated film light splitting piece 3 is 5mm, and refractive index is 1.5, and the light path that the laser through the reflection of plated film light splitting piece 3 coated surface is walked in compensating plate 4 inside is
the light path that transmitted light is walked in light splitting eyeglass inside is also
equally, reflects laser is identical with the light path that transmission laser is walked in same material eyeglass substrate, even if under the accumulative effects such as high-energy irradiation, passage of time, substrate absorption etc. are roughly the same, farthest can ensure the accuracy of test result.Eyeglass transmission measurement step to be measured is identical with the first embodiment, does not repeat them here.
Above-described specific embodiment; object of the present invention, technical scheme and beneficial effect are further described; be understood that; the foregoing is only specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any amendment made, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (6)
1. an optical mirror slip Transmissivity measurement device, comprises LASER Light Source, beam expander device, the plated film light splitting piece of 45° angle splitting ratio 50/50, compensating plate, slit, the first power meter and the second power meter, wherein,
Described LASER Light Source is for generation of high power laser light;
The laser that described beam expander device is used for LASER Light Source is launched carries out shaping and expands;
The light splitting piece of described 45° angle splitting ratio 50/50 is used for the testing laser of receiving beam parallel beam expand device output and is divided into transmitted light and reflected light, and this light splitting piece has two relative parallel reflective faces, and one of them reflecting surface has plated film;
Described compensating plate is placed in the side with plated film of described light splitting piece, for receive and transmission light splitting piece export transmitted light and reflected light in one, with compensate from plated film light splitting piece export laser substrate absorb;
Described slit is used for retraining the laser reflected from described light splitting piece, only to allow to pass through from the laser with the reflective surface of plated film of described light splitting piece;
Described first power meter is for detecting the power of the laser by described slit;
Described second power meter is for detecting the power of the laser from lens transmission to be measured.
2. optical mirror slip Transmissivity measurement device as claimed in claim 1, is characterized in that, also comprise eyeglass calibrating installation, and it is calibrated for the position of carrying out eyeglass to be measured and angle.
3. optical mirror slip Transmissivity measurement device as claimed in claim 2, it is characterized in that, eyeglass calibrating installation to be measured comprises laser indicating apparatus, aperture and catoptron, wherein, described laser indicating apparatus exports the laser for calibrating, this laser incides catoptron by after lens reflecting to be measured by aperture, and the position of described eyeglass to be measured and angle make laser that this catoptron reflects continue through the former road of this aperture to return, complete lens position to be measured and angle calibration system.
4. optical mirror slip Transmissivity measurement device as claimed in claim 1, is characterized in that, also comprise seal box, and it is for sealing the light path of described optical mirror slip Transmissivity measurement device and element.
5. optical mirror slip Transmissivity measurement device as claimed in claim 4, is characterized in that, be filled with blanket gas in described seal box.
6. an optical mirror slip Transmissivity measurement method, uses the optical mirror slip Transmissivity measurement device according to any one of claim 1 to 5, and comprises the steps:
S1, open described LASER Light Source, the reading P of record now the first power meter and the second power meter
1and P
2, obtain power ratio c=P
1/ P
2;
S2, eyeglass to be measured is put into the transmitted light path of described optical mirror slip Transmissivity measurement device, utilize eyeglass calibrating installation to be measured to adjust position and the angle of eyeglass to be measured, read the reading P of the first power meter and second
1' with P
2';
S3, transmitance T by following formulae discovery eyeglass to be measured:
T＝P
2′c/P
1′。
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| CN112763187A (en) * | 2020-11-30 | 2021-05-07 | 青岛歌尔声学科技有限公司 | Film material transmission optical performance testing system and method based on telescopic light path |
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| CN112051037A (en) * | 2020-09-03 | 2020-12-08 | Oppo（重庆）智能科技有限公司 | Lens detection method and device and terminal equipment |
| CN112432898A (en) * | 2020-11-03 | 2021-03-02 | 中国科学院上海光学精密机械研究所 | Method for distinguishing KDP crystal cone column growth area and measuring device |
| CN112763187A (en) * | 2020-11-30 | 2021-05-07 | 青岛歌尔声学科技有限公司 | Film material transmission optical performance testing system and method based on telescopic light path |
| CN112763187B (en) * | 2020-11-30 | 2022-10-14 | 青岛歌尔声学科技有限公司 | Film material transmission optical performance testing system and method based on telescopic light path |
| CN112782129A (en) * | 2020-12-29 | 2021-05-11 | 苏州创鑫激光科技有限公司 | Optical film testing method and testing equipment |
| CN112782129B (en) * | 2020-12-29 | 2023-08-08 | 苏州创鑫激光科技有限公司 | Optical film testing method and testing equipment |
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