CN2589970Y - Optical parameter measuring device - Google Patents
Optical parameter measuring device Download PDFInfo
- Publication number
- CN2589970Y CN2589970Y CN 02294292 CN02294292U CN2589970Y CN 2589970 Y CN2589970 Y CN 2589970Y CN 02294292 CN02294292 CN 02294292 CN 02294292 U CN02294292 U CN 02294292U CN 2589970 Y CN2589970 Y CN 2589970Y
- Authority
- CN
- China
- Prior art keywords
- optical
- semi
- light
- utility
- model
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 40
- 238000005259 measurement Methods 0.000 claims abstract description 16
- 239000000463 material Substances 0.000 abstract description 11
- 238000001579 optical reflectometry Methods 0.000 abstract description 10
- 230000005540 biological transmission Effects 0.000 description 5
- 238000010521 absorption reaction Methods 0.000 description 3
- 241001269238 Data Species 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 150000002367 halogens Chemical class 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- BJQHLKABXJIVAM-UHFFFAOYSA-N bis(2-ethylhexyl) phthalate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 230000011514 reflex Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The utility model discloses an optical parameter measuring device. The utility model solves the problems that under the condition of perpendicular incidence light, an existing instrument can not measure the optical reflectivity R of material, and R and T (optical transmissivity) are irrelevant in different angle measurement. An optical absorptivity alpha appears negative values, etc. The utility model has the technical proposal that the device mainly comprises an optical source, a standard reflector, an optical splitter, a detector and a computer. The utility model is characterized in that a semi-transparent and semi-reflective lens is additionally arranged in an optical path output by the optical source. The standard reflector is arranged on the place where the incidence light of the semi-transparent and semi-reflective lens forms an angle of 90DEG. Moreover, the vertical bearing between the optical source and the standard reflector is connected with the optical splitter, the detector and the computer in sequence. The utility model can measure the optical reflectivity R of the material under the condition of perpendicular incidence light and ensures the relevant date of R and the vertical optical transmissivity T. Particularly, when the material is a transparent film, even optical interference exists, and the relevant date of R and T can be ensured. The utility model provides the optical parameter measuring device with high measuring accuracy to the family of optical measuring instruments.
Description
Affiliated technical field
The utility model relates to a kind of measurement mechanism of material optical property.
Background technology
Usually light transmission rate T (λ), the light reflectivity R (λ) that measures the dielectric material under different wave length (λ) uses spectrophotometer, in conjunction with thickness of sample d, can calculate its absorption coefficient of light α and optical band gap Eg.During measuring light transmitance T, measuring beam is vertical with sample surfaces.But when measuring light reflectivity R, the light reflectivity R of the next not energy measurement of vertical incidence optical condition material.Normally add a reflection annex F in measuring light path, as shown in Figure 2, make measuring beam shine sample surfaces with certain incident angle, according to reflection law, reflected light penetrates with same angle at sample surfaces normal opposite side.This measurement light path is common in single beam and double beam spectrophotometer, it can only be in limited range transmissivity, the reflectivity of measuring light.This light path is with different incident angle difference measuring light transmitance T and light reflectivity R, will cause certain error at calculating absorption coefficient of light α and optical band gap Eg.Especially measuring transparent thin-film material, two boundary reflections form the error that causes when interfering with even more serious, even can't calculate the result, this mainly be because light reflectivity R and light transmission rate T take measurement of an angle different, so data are uncorrelated.Because the two is not a related data, measurement data may produce the situation of T+R 〉=1, makes absorption coefficient of light α irrational negative value occur.
The utility model content
The utility model designs in order to address the aforementioned drawbacks, its objective is provide a kind of under the vertical incidence optical condition light reflectivity R of energy measurement material, guarantee with light transmission rate T be related data; When the interference of light, can guarantee that also R and T are related datas; Can accurately measure the optical parameter measurement device of material property.
The technical solution of the utility model is: it comprises that mainly light source, standard reflection mirror, optical splitter, detecting device and computing machine constitute; It is characterized in that in the light path of light source output, establishing semi-transparent semi-reflecting lens; The standard reflection mirror is installed in and locate at an angle of 90 by the incident light of semi-transparent semi-reflecting lens, and be connected successively with vertical orientations between the standard reflection mirror at light source, optical splitter, detecting device, computing machine.
The beneficial effects of the utility model are: owing to set up semi-transparent semi-reflecting lens in the input path of the present utility model, and make light beam and semi-transparent semi-reflecting lens angle at 45 in the input path; Standard reflection mirror and incident light by semi-transparent semi-reflecting lens at an angle of 90, make incident light pass through semi-transparent semi-reflecting lens after vertical irradiation on standard reflection mirror or sample.This light channel structure can be implemented in the light reflectivity R that measures material under the vertical incidence optical condition, and assurance is a related data with light transmission rate T; Especially when material is the transparent membrane and the generation interference of light, can guarantee that also R and T are related datas.The utility model has increased a kind of measurement optical parameter measurement device accurately for optical gauge family.
Description of drawings
Fig. 1 is light path of the present utility model and structural representation block scheme.
Fig. 2 is the light path and the structural representation block scheme of prior art.
Fig. 3 is a single beam spectrophotometer structural representation block scheme of using the utility model light channel structure.
Fig. 4 is a double beam spectrophotometer structural representation block scheme of using the utility model light channel structure.
Embodiment
Below in conjunction with accompanying drawing the utility model is described in further detail.
As shown in Figure 1, it comprises that mainly light source, standard reflection mirror, optical splitter, detecting device and computing machine constitute; It is characterized in that in the light path of light source output, establishing semi-transparent semi-reflecting lens; The standard reflection mirror is installed in and locate at an angle of 90 by the incident light of semi-transparent semi-reflecting lens, and be connected successively with vertical orientations between the standard reflection mirror at light source, optical splitter, detecting device, computing machine.
The best scheme of the utility model is the incident light angle at 45 of semi-transparent semi-reflecting lens M and light source output.
Light source, semi-transparent semi-reflecting lens, standard reflection mirror among Fig. 1 in the frame of broken lines are light channel structures of the present utility model, are feature with this light channel structure, can make annex, are applied to existing optical gauge.Thereby be implemented in the measurement of material optical property under the vertical incidence optical condition.
Embodiment 1
As shown in Figure 3, be that feature is made single beam spectrophotometer with light channel structure of the present utility model.Light source adopts the halogen tungsten lamp light source, and optical splitter JD/FS 82-447, detecting device are photodetector array EG﹠amp; G1453 also can carry out spectroscopic measurements with monochromator and general photosensitive device.Computing machine is EG﹠amp; G1451.The light that the halogen tungsten lamp light source sends is as incident light, in the light path of its output, be provided with one with the semi-transparent semi-reflecting lens M at incident beam angle at 45, thereby guarantee light beam and semi-transparent semi-reflecting lens angle at 45 in the input path; The standard reflection mirror is installed in and locates at an angle of 90 by the incident light of semi-transparent semi-reflecting lens; Vertical irradiation is on standard reflection mirror or sample after making incident light pass through semi-transparent semi-reflecting lens.After the light that light source sends passed through semi-transparent semi-reflecting lens for the first time, it saw through the vertical also reflection with the standard reflection mirror of light and turns back; When light beam arrives semi-transparent semi-reflecting lens M once more, its reflected light and former incident light penetrate at an angle of 90, reflex to spectroscope (directly or by the fiber optics bundle introducing spectroscope JD/FS 82-447), after carrying out beam split, shine photodetector array, detector array detects the light intensity signal of different wave length, is sent to computing machine and handles, and notes the etalon optical power signal.
In like manner, with sample alternate standard catoptron, computing machine is then noted the reflective light intensity signal.
During measuring light transmitance T, sample is placed optical splitter light path before, and make sample surfaces vertical, see through light and after the spectroscope beam split, shine detector array with light beam, and being converted to electric signal input computing machine, computing machine is then noted the light intensity signal that sees through.
Computing machine is compared measuring-signal automatically with standard signal, can draw light transmission rate T and with respect to the light reflectivity R of standard reflection mirror.The measurement of R, T under the different wave length condition, by to detector array electron scanning finish, finishing the single pass prestissimo is 0.05S.
Embodiment 2
With light channel structure of the present utility model is that feature is made double beam spectrophotometer.As shown in Figure 4, add three catoptrons in addition in light channel structure of the present utility model (annex), finally make emergent light coaxial with original incident light, will insert respectively with the annex of three catoptrons among reference beam and the measuring beam, the M among Fig. 4 is a semi-transparent semi-reflecting lens, M
1-M
6Be common optical mirror.Optical splitter monochromator, detecting device are photo-detector, and all the other are identical with embodiment 1.In the reference path annex, insert the standard reflection mirror, measure in the light path annex and insert sample, start spectrophotometer and scan the vertical reflection rate R (λ) under the promptly exportable different wave length.If the light beam by above-mentioned annex is not a directional light, in the annex light path, add lens or face mirror, so that the light path that extends is thus compensated.
Claims (2)
1. an optical parameter measurement device comprises that mainly light source, standard reflection mirror, optical splitter, detecting device and computing machine constitute; It is characterized in that in the light path of light source output, establishing semi-transparent semi-reflecting lens; The standard reflection mirror is installed in and locate at an angle of 90 by the incident light of semi-transparent semi-reflecting lens, and be connected successively with vertical orientations between the standard reflection mirror at light source, optical splitter, detecting device, computing machine.
2. according to the optical parameter measurement device described in the claim 1, it is characterized in that semi-transparent semi-reflecting lens and incident light angle at 45.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02294292 CN2589970Y (en) | 2002-12-26 | 2002-12-26 | Optical parameter measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02294292 CN2589970Y (en) | 2002-12-26 | 2002-12-26 | Optical parameter measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2589970Y true CN2589970Y (en) | 2003-12-03 |
Family
ID=33751798
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 02294292 Expired - Lifetime CN2589970Y (en) | 2002-12-26 | 2002-12-26 | Optical parameter measuring device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2589970Y (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101915660A (en) * | 2010-08-10 | 2010-12-15 | 杭州科汀光学技术有限公司 | Vertical incidence thin-film reflectometer with symmetry and self-alignment |
| CN103149181A (en) * | 2013-01-31 | 2013-06-12 | 杭州华光光电有限公司 | Glass light transmittance detection device |
| CN105115701A (en) * | 2015-08-13 | 2015-12-02 | 中国科学院光电研究院 | Device for accurately measuring optical lens transmittance in high power laser environment and method |
| CN106124162A (en) * | 2016-06-13 | 2016-11-16 | 首航节能光热技术股份有限公司 | A kind of portable mirror reflectance test instrument |
-
2002
- 2002-12-26 CN CN 02294292 patent/CN2589970Y/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101915660A (en) * | 2010-08-10 | 2010-12-15 | 杭州科汀光学技术有限公司 | Vertical incidence thin-film reflectometer with symmetry and self-alignment |
| CN103149181A (en) * | 2013-01-31 | 2013-06-12 | 杭州华光光电有限公司 | Glass light transmittance detection device |
| CN103149181B (en) * | 2013-01-31 | 2015-04-01 | 杭州华光光电有限公司 | Glass light transmittance detection device |
| CN105115701A (en) * | 2015-08-13 | 2015-12-02 | 中国科学院光电研究院 | Device for accurately measuring optical lens transmittance in high power laser environment and method |
| CN105115701B (en) * | 2015-08-13 | 2018-12-18 | 中国科学院光电研究院 | The device and method of optical mirror slip transmitance in precise measurement high power laser light environment |
| CN106124162A (en) * | 2016-06-13 | 2016-11-16 | 首航节能光热技术股份有限公司 | A kind of portable mirror reflectance test instrument |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7411685B2 (en) | Spectrometric measuring instrument | |
| SG50599A1 (en) | Optical gap measuring apparatus and method | |
| Jäger et al. | Angular resolved scattering measurements of nano-textured substrates in a broad wavelength range | |
| WO2021179592A1 (en) | Liquid absorption coefficient measurement device and measurement method | |
| JPS6257936B2 (en) | ||
| US5170049A (en) | Coating thickness gauge using linearly polarized light | |
| CN209372679U (en) | Long light path sample cell for gas concentration detection | |
| CN113777049A (en) | Angle-resolved snapshot ellipsometer and measuring system and method thereof | |
| CN108548658A (en) | A kind of method of monofilm optical element stress and optical loss measurement simultaneously | |
| JP2002098591A (en) | Spectral oval polarimeter provided with refractive lighting optical system | |
| Bai et al. | A new method to measure spectral reflectance and film thickness using a modified chromatic confocal sensor | |
| CN101609002B (en) | New method for measuring optical band gap of semiconductor film material | |
| CN2589970Y (en) | Optical parameter measuring device | |
| Zwinkels et al. | Procedures and standards for accurate spectrophotometric measurements of specular reflectance | |
| CN109799204B (en) | Low concentration COD measuring device based on spectrum method | |
| CN2798070Y (en) | Accurate measurement device for extinction ratio of polarization splitting film | |
| CN1510413A (en) | Optical parameter measuring apparatus | |
| CN101995224B (en) | Spectroscopic reflectometer and measuring method of reflectivity | |
| CN210664764U (en) | High-precision laser power sampling and measuring device | |
| US7081957B2 (en) | Aperture to reduce sensitivity to sample tilt in small spotsize reflectometers | |
| US5517032A (en) | Thin film thickness measuring system | |
| JP3520379B2 (en) | Optical constant measuring method and device | |
| Wang et al. | Polarized angle-resolved spectral reflectometry for real-time ultra-thin film measurement | |
| CN2589968Y (en) | Multifunctional photoelectric parameter measuring device | |
| CN205786353U (en) | A kind of transmittance meter based on rotating filtering sheet monochromator |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20090206 Address after: Jiangnan hi tech park, South Ring Road, Licheng District, Fujian City, Quanzhou Province, China: 362000 Patentee after: Fujian Golden Sun Solar Technic Co., Ltd. Address before: Tianjin City, Wei Jin Road No. 94, zip code: 300071 Patentee before: Nankai University |
|
| ASS | Succession or assignment of patent right |
Owner name: FUJIAN JUNSHI ENERGY CO., LTD. Free format text: FORMER OWNER: NANKAI UNIV. Effective date: 20090206 |
|
| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Apollo Precision (Fujian) Limited Assignor: Fujian Golden Sun Solar Technic Co., Ltd. Contract fulfillment period: 2009.6.1 to 2012.5.31 Contract record no.: 2009350000197 Denomination of utility model: Optical parameter measuring apparatus Granted publication date: 20031203 License type: General permission Record date: 20090826 |
|
| LIC | Patent licence contract for exploitation submitted for record |
Free format text: COMMON LICENSE; TIME LIMIT OF IMPLEMENTING CONTACT: 2009.6.1 TO 2012.5.31; CHANGE OF CONTRACT Name of requester: FUJIAN APOLLO PRECISION EQUIPMENT CO., LTD. Effective date: 20090826 |
|
| ASS | Succession or assignment of patent right |
Owner name: HANERGY HOLDING GROUP CO., LTD. Free format text: FORMER OWNER: FUJIAN GOLDEN SUN SOLAR TECHNIC CO., LTD. Effective date: 20111121 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 362000 QUANZHOU, FUJIAN PROVINCE TO: 101407 HUAIROU, BEIJING |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20111121 Address after: 101407 Beijing Huairou Yanqi Industrial Development Zone District No. 59 room 148 Patentee after: Hina Holding Group Co. Ltd. Address before: 362000 Jiangnan hi tech park, South Ring Road, Licheng District, Quanzhou, Fujian Patentee before: Fujian Golden Sun Solar Technic Co., Ltd. |
|
| ASS | Succession or assignment of patent right |
Owner name: KUNMING BOYANG YUANHONG ENERGY TECHNOLOGY CO., LTD Free format text: FORMER OWNER: HANERGY HOLDING GROUP CO., LTD. Effective date: 20120718 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 101407 HUAIROU, BEIJING TO: 650031 KUNMING, YUNNAN PROVINCE |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20120718 Address after: 650031 Kunming development and opening, No. 3, science and Technology Innovation Park, room A25-6 Patentee after: KUNMING APOLLO YUANHONG ENERGY SCIENCE & TECHNOLOGY CO., LTD. Address before: 101407 Beijing Huairou Yanqi Industrial Development Zone District No. 59 room 148 Patentee before: Hina Holding Group Co. Ltd. |
|
| C17 | Cessation of patent right | ||
| CX01 | Expiry of patent term |
Expiration termination date: 20121226 Granted publication date: 20031203 |