Summary of the invention
The present invention can not meet carrying out the technical problem of the cleaning demand of edging chamfering back-panel glass afterwards in order to solve traditional cleaning, designed the cleaning to back-panel glass in a kind of thin-film solar cells production, utilize this cleaning can remove the impurity such as the particulate of the backboard safety glass remained on surface after edging chamfering, organic matter, grease, chip, can effectively improve follow-up lamination process quality, to improving cell power generation efficiency, play vital effect.
The technical solution used in the present invention is: the cleaning to back-panel glass in a kind of thin-film solar cells production, key is: this technique is to scrub matching purge chamber, again spray wash chamber, rinsing chamber and dry chamber realization by the pre-spray wash chamber, the round brush that set gradually on glass transfer roller, and described processing step comprises:
A, pre-spray clean: will spray in advance wash chamber and be controlled under normal temperature state, using deionized water as cleaning fluid, the one group of nozzle assembly arranging respectively at transfer roller upper and lower 90-110mm place is sprayed in advance as cleaning means, wherein, every group of nozzle assembly comprises 18-25 fan nozzle, and the flow of each nozzle under 0.12-0.16Mpa pressure is 1-1.1 L/Min;
B, round brush are scrubbed matching purge: round brush is scrubbed to matching purge chamber and be controlled at 45 ℃ ± 2 ℃ temperature, using deionized water as spray liquid, the one group of nozzle assembly arranging respectively at transfer roller upper and lower 90-110mm place is sprayed as cleaning means, meanwhile, the round brush that is 300 ~ 600 at the rotating speed arranging respectively apart from transfer roller upper and lower 0-8mm place is scrubbed, wherein, every group of nozzle assembly comprises 30-35 fan nozzle, and the flow of each nozzle under 0.12-0.16Mpa pressure is 1-1.1 L/Min;
C, spray cleaning again: will again spray wash chamber and be controlled under normal temperature state, using deionized water as cleaning agent, the one group of nozzle assembly arranging respectively at transfer roller upper and lower 90-110mm place is sprayed to cleaning again as cleaning means, wherein, every group of nozzle assembly comprises 18-25 fan nozzle, and the flow of each nozzle under 0.3-0.4Mpa pressure is 1-1.15 L/Min;
D, rinsing: in rinsing chamber, the upper and lower surface of back-panel glass is rinsed;
E, oven dry: in drying chamber, by the upper and lower skin drying of back-panel glass, complete whole cleaning process.
The described quantity that again sprays wash chamber is 2, be set in turn in round brush scrub matching purge chamber after, before rinsing chamber.
The quantity of described rinsing chamber is 2, be set in turn in again spray wash chamber after, dry chamber before, rinsing chamber is controlled under normal temperature, the deionized water of usining is carried out rinsing as purificant, one group of nozzle assembly that the glass transfer roller upper and lower 90-110mm place through again spraying after operation is arranged respectively as cleaning means, wherein, every group of nozzle assembly comprises 15-20 fan nozzle, and the flow of each nozzle under 0.12-0.16Mpa pressure is 1-1.15 L/Min.
The quantity of described oven dry chamber is 2, and after being set in turn in rinsing chamber, on this basis, described baking operation step comprises:
E1, one-level air knife purge dries: in the first oven dry chamber, carry out, the one-level air knife that utilizes transfer roller upper and lower 0-8mm place to arrange is respectively dried, and wherein, the angle of one-level air knife and glass direct of travel is 60 °-80 °, the air temperature blowing out is 25 ~ 50 ℃, and air quantity is 200 ~ 700m
3/ h;
E2, secondary air knife purge dries: in the second oven dry chamber, carry out, the secondary air knife that utilizes transfer roller upper and lower 0-8mm place to arrange is respectively dried, and wherein, the angle of secondary air knife and glass direct of travel is 60 °-80 °, the air temperature blowing out is 25 ~ 80 ℃, and air quantity is 200 ~ 700m
3/ h.
The invention has the beneficial effects as follows: 1, by main four steps required in manufacture of solar cells process being cleaned to the research of demand, designed technical solution of the present invention, cleaning in this programme is applicable to the cleaning of the back-panel glass after edging chamfering, broken tradition to the unified way that adopts a kind of cleaning process flow of four step cleaning demands, make the cleaning of glass surface spot more pointed, cleaning performance is more remarkable, and has effectively saved cost; 2, utilize the cleaning of this technique to back-panel glass, can effectively remove the impurity such as particulate, fingerprint, cutting oil, plastics, rubber and glass parting material (lucite, a small amount of remaining chip) on back-panel glass surface; 3, clean front every square metre of glass substrate clearance rate >=95% that granule number is greater than 2000; Before cleaning, granule number is less than 2000, every square metre of granule number <100 after cleaning, and particle size >25 micron, is equal to the requirement of 10000 grade clean rooms; 4, under spotlight, detect by an unaided eye, glass surface is without particle and cut; 5, organic matter: guarantee contact angle≤15 degree of glass after cleaning; 6, former cleaning processing equipment overall length 16000mm, adopts new cleaning processing equipment overall length 4260mm, has reduced cost of investment.
The specific embodiment
Cleaning to back-panel glass in a kind of thin-film solar cells production, this technique is to scrub matching purge chamber 2, again spray wash chamber 3, rinsing chamber 4 and dry chamber 5 realizations by the pre-spray wash chamber 1, the round brush that set gradually on glass transfer roller 9, and described processing step comprises:
A, pre-spray clean: will spray in advance wash chamber 1 and be controlled under normal temperature state, using deionized water as cleaning fluid, the one group of nozzle assembly arranging respectively at transfer roller upper and lower 90-110mm place is sprayed in advance as cleaning means, wherein, every group of nozzle assembly comprises 18-25 fan nozzle, and the flow of each nozzle under 0.12-0.16Mpa pressure is 1-1.1 L/Min;
B, round brush are scrubbed matching purge: round brush is scrubbed to matching purge chamber 2 and be controlled at 45 ℃ ± 2 ℃ temperature, using deionized water as spray liquid, the one group of nozzle assembly arranging respectively at transfer roller upper and lower 90-110mm place is sprayed as cleaning means, meanwhile, the round brush 8 that is 300 ~ 600 at the rotating speed arranging respectively apart from transfer roller upper and lower 0-8mm place is scrubbed, wherein, every group of nozzle assembly comprises 30-35 fan nozzle, and the flow of each nozzle under 0.12-0.16Mpa pressure is 1-1.1 L/Min;
C, spray cleaning again: will again spray wash chamber 3 and be controlled under normal temperature state, using deionized water as cleaning agent, the one group of nozzle assembly arranging respectively at transfer roller upper and lower 90-110mm place is sprayed to cleaning again as cleaning means, wherein, every group of nozzle assembly comprises 18-25 fan nozzle, and the flow of each nozzle under 0.3-0.4Mpa pressure is 1-1.15 L/Min;
D, rinsing: in rinsing chamber 4, the upper and lower surface of back-panel glass is rinsed;
E, oven dry: in drying chamber 5, by the upper and lower skin drying of back-panel glass, complete whole cleaning process.
For the thoroughly impurity removing to the base plate glass remained on surface after round brush and cleaning agent matching purge, the described quantity that again sprays wash chamber 3 is 2, be set in turn in round brush scrub matching purge chamber 2 after, before rinsing chamber 4.
In order to strengthen wash effect so that the cleaning of glass meets cleannes demand, the quantity of described rinsing chamber 4 is 2, after being set in turn in and again spraying wash chamber 3, before drying chamber 5, rinsing chamber 4 is controlled at normal temperatures, using deionized water as purificant, by through again spraying on the transfer roller after operation, one group of nozzle assembly that 90-110mm place, below arranges respectively carries out rinsing as cleaning means, wherein, every group of nozzle assembly comprises 15-20 fan nozzle, the flow of each nozzle under 0.12-0.16Mpa pressure is 1-1.15 L/Min.
In order to strengthen drying effect, the quantity of described oven dry chamber 5 is 2, and after being set in turn in rinsing chamber 4, on this basis, described baking operation step comprises:
E1, one-level air knife purge dries: in the first oven dry chamber 5-1, carry out, the one-level air knife 7 that utilizes transfer roller upper and lower 0-8mm place to arrange is respectively dried, wherein, one-level air knife 7 is 60 °-80 ° with the angle of glass direct of travel, the air temperature blowing out is 25 ~ 50 ℃, and air quantity is 200 ~ 700m
3/ h;
E2, secondary air knife purge dries: in the second oven dry chamber 5-2, carry out, the secondary air knife 6 that utilizes transfer roller upper and lower 0-8mm place to arrange is respectively dried, wherein, secondary air knife 6 is 60 °-80 ° with the angle of glass direct of travel, the air temperature blowing out is 25 ~ 80 ℃, and air quantity is 200 ~ 700m
3/ h.
For the fingerprint of glass surface, cutting wet goods residue are removed, described alkalescent cleaning agent is that concentration is 2% ~ 5% NaOH or KOH or TMAH cleaning agent.
In order to meet the cleaning pressure demand in this technical process, described nozzle is that material is that SUS303, bore are that 1/8 cun, spray angle are the fan nozzle of 90 °.
The material of described round brush 8 is that nylon 612, diameter are ¢ 0.1 ~ ¢ 0.063.Use the round brush of this material and diameter, can, when protective substrate glass surface is not by scratching, reach good cleaning effect.
The air feed system structure of described one-level air knife 7 comprises one-level air blast 7-1 and the main air filter 7-2 being connected with one-level air blast wind-force output, and the output of main air filter 7-2 is connected with the wind-force input of one-level air knife 7.
The air feed system structure of described secondary air knife 6 comprises secondary air blast 6-1, the heater 6-2 being connected with secondary air blast wind-force output and the secondary air filter 6-3 being connected with heater output, and the output of secondary air filter 6-3 is connected with the wind-force input of secondary air knife 6.
Described one-level air knife 7, secondary air knife 6 are that material is the cylinder structure of SUS304.
In the specific implementation, referring to the structural representation of the purging system based on this cleaning shown in accompanying drawing 1.On back-panel glass transfer roller 9, according to production line order, setting gradually pre-spray wash chamber 1, round brush scrubs 2,2 of matching purge chambers and again sprays wash chamber, 2 rinsing chambers and 2 and dry chambers, back-panel glass to be cleaned is passed through to above-mentioned each chamber successively, utilize this cover cleaning can remove the impurity such as the particulate of the back-panel glass remained on surface after edging chamfering, organic matter, grease, chip, can effectively improve the lamination quality of production line subsequent technique.
In pre-spray wash chamber 1, the one group of nozzle assembly arranging respectively at back-panel glass transfer roller 9 upper and lower 90-110mm places.In cleaning process, this chamber temp is controlled to normal temperature, by deionized water, spray in advance, wherein, nozzle is that material is that SUS303, bore are that 1/8 cun, spray angle are the fan nozzle of 90 °, every group of nozzle assembly comprises 21 fan nozzles, and the flow of each nozzle under 0.15Mpa pressure is 1.06 L/Min.
At round brush, scrub in matching purge chamber 2, the one group of nozzle assembly arranging respectively at transfer roller 9 upper and lower 90-110mm places, temperature in this chamber is controlled at 45 ℃ ± 2 ℃, by deionized water, spray, and the round brush that is 300 ~ 600 at the rotating speed arranging respectively apart from transfer roller upper and lower 0-8mm place is scrubbed, wherein, every group of nozzle assembly comprises 32 fan nozzles, and the flow of each nozzle under 0.15Mpa pressure is 1.06L/Min;
At each, again spray in wash chamber 3, the one group of nozzle assembly arranging respectively at transfer roller upper and lower 90-110mm place, to again spray wash chamber is controlled under normal temperature state, with deionized water, spray, wherein, every group of nozzle assembly comprises 21 fan nozzles, and it is that 1 L/Min or the flow of employing under 0.4Mpa pressure are the nozzle of 1.15 L/Min that nozzle is used the flow under 0.3 Mpa pressure;
The quantity of described rinsing chamber 4 is 2, after being set in turn in and again spraying wash chamber 3, before drying chamber 5, rinsing chamber 4 is controlled at normal temperatures, using deionized water as purificant, by through again spraying on the back-panel glass transfer roller after operation, one group of nozzle assembly that 90-110mm place, below arranges respectively carries out rinsing as cleaning means, wherein, every group of nozzle assembly comprises 15-20 fan nozzle, the flow of each nozzle under 0.12-0.16Mpa pressure is 1-1.15 L/Min, during concrete use, can be by the transfer roller in the first rinsing chamber 4-1, the nozzle quantity of below is set to 21, flow under 0.3 Mpa pressure is that the flow under 1L/Min or 0.4 Mpa pressure is 1.15L/Min, by on the transfer roller in the second rinsing chamber 4-2, the nozzle quantity of below is set to 17, flow under 0.15 Mpa pressure is 1.06L/Min.
In order to strengthen drying effect, the quantity of described oven dry chamber 5 is 2, first dry chamber 5-1 and the second oven dry chamber 5-2, after two chambers are set in turn in rinsing chamber 4, in the first oven dry chamber 5-1, carry out, the one-level air knife 7 that utilizes transfer roller upper and lower 0-8mm place to arrange is respectively dried, wherein, one-level air knife 7 is 60 °-80 ° with the angle of back-panel glass direct of travel, with the angle of the perpendicular direction of back-panel glass direct of travel be 15 ° ~ 20 °, the air temperature blowing out is 25 ~ 50 ℃, and air quantity is 200 ~ 700m
3/ h, the air feed power source of one-level air knife is one-level air blast 7-1, the air that one-level air blast 7-1 blows out flows to one-level air knife 7 through main air filter 7-2; In the second oven dry chamber 5-2, the secondary air knife 6 that utilizes transfer roller upper and lower 0-8mm place to arrange is respectively dried, wherein, secondary air knife 6 is 60 °-80 ° with the angle of back-panel glass direct of travel, angle with the perpendicular direction of glass direct of travel: 15 ° ~ 20 °, the air temperature blowing out is 25 ~ 80 ℃, and air quantity is 200 ~ 700m
3/ h.