CN104162527A - Process for cleaning backplane glass during thin-film solar cell production - Google Patents

Process for cleaning backplane glass during thin-film solar cell production Download PDF

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Publication number
CN104162527A
CN104162527A CN201310345690.XA CN201310345690A CN104162527A CN 104162527 A CN104162527 A CN 104162527A CN 201310345690 A CN201310345690 A CN 201310345690A CN 104162527 A CN104162527 A CN 104162527A
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China
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cleaning
chamber
film solar
nozzle
panel glass
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CN201310345690.XA
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CN104162527B (en
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李岩
李兆廷
朱华
郭婷婷
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CHENGDU ZHONGPU TECHNOLOGY Co.,Ltd.
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CHENGDU XUSHUANG SOLAR TECHNOLOGY Co Ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B11/00Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
    • B08B11/04Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto specially adapted for plate glass, e.g. prior to manufacture of windshields
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00Cleaning by methods involving the use of tools
    • B08B1/20Cleaning of moving articles, e.g. of moving webs or of objects on a conveyor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02Cleaning by the force of jets or sprays
    • B08B3/022Cleaning travelling work
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26DRYING
    • F26BDRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B21/00Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Cleaning In General (AREA)
  • Cleaning By Liquid Or Steam (AREA)

Abstract

Provided is a process for cleaning backplane glass during thin-film solar cell production. The process is suitable for pre-cleaning of the backplane glass obtained after edging and chamfering and belongs to the fourth cleaning process of a solar cell production line. According to the process, impurities such as particles, organic matter, oil and chippings remaining on the surface of the backplane glass obtained after edging and chamfering are removed through the process methods of scrubbing conducted through roll brushes, rinsing, drying conducted through air knives and the like, follow-up lamination process quality of the production line can be improved effectively, and the process plays a vital role in improving efficiency of cells.

Description

Cleaning to back-panel glass in a kind of thin-film solar cells production
Technical field
The invention belongs to thin-film solar cells manufacturing technology field, relate to the cleaning in thin-film solar cells production process, be specifically applicable to carry out the cleaning of the back-panel glass after edging chamfering before lamination.
Background technology
On existing amorphous silicon thin-film solar cell production line, before lamination, to the cleaning machine of the back-panel glass after edging chamfering, be all the cleaning machine of continuing to use TFT production line, cleaning is also to continue to use the cleaning of TFT production line.Thin-film solar cells in process of production, at least needing to carry out four times cleans, be respectively: the cleaning of the transparent TCO base plate glass after edging chamfering, transparent TCO base plate glass carried out before the cleaning after laser ablation for the first time, lamination to the cleaning to the back-panel glass after edging chamfering before the cleaning of the transparent TCO base plate glass after the 4th the clear limit of P4 laser ablation and lamination, traditional method is to utilize the cleaning on TFT production line to use a cleaning machine to complete four cleanings.And after different operation, glass surface can residual different impurity and residue in thin-film solar cells production process, the technique of its cleaning and method are inevitable different.Obviously the basic like this demand that can not meet cleannes, can not shoot the arrow at the target according to the difference of impurity and residue.Utilize the cleaning machine on TFT production line can not be applicable to the individual character requirement for cleaning to the back-panel glass after edging chamfering, cleaning machine technique more complicated on TFT production line, long flow path, cost is high, investment is large, makes like this manufacturing cost of amorphous silicon thin-film solar cell greatly increase.
Summary of the invention
The present invention can not meet carrying out the technical problem of the cleaning demand of edging chamfering back-panel glass afterwards in order to solve traditional cleaning, designed the cleaning to back-panel glass in a kind of thin-film solar cells production, utilize this cleaning can remove the impurity such as the particulate of the backboard safety glass remained on surface after edging chamfering, organic matter, grease, chip, can effectively improve follow-up lamination process quality, to improving cell power generation efficiency, play vital effect.
The technical solution used in the present invention is: the cleaning to back-panel glass in a kind of thin-film solar cells production, key is: this technique is to scrub matching purge chamber, again spray wash chamber, rinsing chamber and dry chamber realization by the pre-spray wash chamber, the round brush that set gradually on glass transfer roller, and described processing step comprises:
A, pre-spray clean: will spray in advance wash chamber and be controlled under normal temperature state, using deionized water as cleaning fluid, the one group of nozzle assembly arranging respectively at transfer roller upper and lower 90-110mm place is sprayed in advance as cleaning means, wherein, every group of nozzle assembly comprises 18-25 fan nozzle, and the flow of each nozzle under 0.12-0.16Mpa pressure is 1-1.1 L/Min;
B, round brush are scrubbed matching purge: round brush is scrubbed to matching purge chamber and be controlled at 45 ℃ ± 2 ℃ temperature, using deionized water as spray liquid, the one group of nozzle assembly arranging respectively at transfer roller upper and lower 90-110mm place is sprayed as cleaning means, meanwhile, the round brush that is 300 ~ 600 at the rotating speed arranging respectively apart from transfer roller upper and lower 0-8mm place is scrubbed, wherein, every group of nozzle assembly comprises 30-35 fan nozzle, and the flow of each nozzle under 0.12-0.16Mpa pressure is 1-1.1 L/Min;
C, spray cleaning again: will again spray wash chamber and be controlled under normal temperature state, using deionized water as cleaning agent, the one group of nozzle assembly arranging respectively at transfer roller upper and lower 90-110mm place is sprayed to cleaning again as cleaning means, wherein, every group of nozzle assembly comprises 18-25 fan nozzle, and the flow of each nozzle under 0.3-0.4Mpa pressure is 1-1.15 L/Min;
D, rinsing: in rinsing chamber, the upper and lower surface of back-panel glass is rinsed;
E, oven dry: in drying chamber, by the upper and lower skin drying of back-panel glass, complete whole cleaning process.
The described quantity that again sprays wash chamber is 2, be set in turn in round brush scrub matching purge chamber after, before rinsing chamber.
The quantity of described rinsing chamber is 2, be set in turn in again spray wash chamber after, dry chamber before, rinsing chamber is controlled under normal temperature, the deionized water of usining is carried out rinsing as purificant, one group of nozzle assembly that the glass transfer roller upper and lower 90-110mm place through again spraying after operation is arranged respectively as cleaning means, wherein, every group of nozzle assembly comprises 15-20 fan nozzle, and the flow of each nozzle under 0.12-0.16Mpa pressure is 1-1.15 L/Min.
The quantity of described oven dry chamber is 2, and after being set in turn in rinsing chamber, on this basis, described baking operation step comprises:
E1, one-level air knife purge dries: in the first oven dry chamber, carry out, the one-level air knife that utilizes transfer roller upper and lower 0-8mm place to arrange is respectively dried, and wherein, the angle of one-level air knife and glass direct of travel is 60 °-80 °, the air temperature blowing out is 25 ~ 50 ℃, and air quantity is 200 ~ 700m 3/ h;
E2, secondary air knife purge dries: in the second oven dry chamber, carry out, the secondary air knife that utilizes transfer roller upper and lower 0-8mm place to arrange is respectively dried, and wherein, the angle of secondary air knife and glass direct of travel is 60 °-80 °, the air temperature blowing out is 25 ~ 80 ℃, and air quantity is 200 ~ 700m 3/ h.
The invention has the beneficial effects as follows: 1, by main four steps required in manufacture of solar cells process being cleaned to the research of demand, designed technical solution of the present invention, cleaning in this programme is applicable to the cleaning of the back-panel glass after edging chamfering, broken tradition to the unified way that adopts a kind of cleaning process flow of four step cleaning demands, make the cleaning of glass surface spot more pointed, cleaning performance is more remarkable, and has effectively saved cost; 2, utilize the cleaning of this technique to back-panel glass, can effectively remove the impurity such as particulate, fingerprint, cutting oil, plastics, rubber and glass parting material (lucite, a small amount of remaining chip) on back-panel glass surface; 3, clean front every square metre of glass substrate clearance rate >=95% that granule number is greater than 2000; Before cleaning, granule number is less than 2000, every square metre of granule number <100 after cleaning, and particle size >25 micron, is equal to the requirement of 10000 grade clean rooms; 4, under spotlight, detect by an unaided eye, glass surface is without particle and cut; 5, organic matter: guarantee contact angle≤15 degree of glass after cleaning; 6, former cleaning processing equipment overall length 16000mm, adopts new cleaning processing equipment overall length 4260mm, has reduced cost of investment.
Accompanying drawing explanation
The structural representation of each chamber in the present invention.
In accompanying drawing, the 1st, spray in advance wash chamber, the 2nd, round brush is scrubbed matching purge chamber, and the 3rd, again spray wash chamber, the 4th, rinsing chamber, the 5th, dry chamber, 4-1 is the first rinsing chamber, 4-2 is the second rinsing chamber, 5-1 is the first oven dry chamber, 5-2 is the second oven dry chamber, the 6th, and secondary air knife, 6-1 is secondary air blast, 6-2 is heater, 6-3 is secondary air filter, the 7th, and one-level air knife, 6-1 is one-level air blast, 6-2 is main air filter, the 8th, round brush, the 9th, transfer roller, arrow represents back-panel glass direction of transfer.
The specific embodiment
Cleaning to back-panel glass in a kind of thin-film solar cells production, this technique is to scrub matching purge chamber 2, again spray wash chamber 3, rinsing chamber 4 and dry chamber 5 realizations by the pre-spray wash chamber 1, the round brush that set gradually on glass transfer roller 9, and described processing step comprises:
A, pre-spray clean: will spray in advance wash chamber 1 and be controlled under normal temperature state, using deionized water as cleaning fluid, the one group of nozzle assembly arranging respectively at transfer roller upper and lower 90-110mm place is sprayed in advance as cleaning means, wherein, every group of nozzle assembly comprises 18-25 fan nozzle, and the flow of each nozzle under 0.12-0.16Mpa pressure is 1-1.1 L/Min;
B, round brush are scrubbed matching purge: round brush is scrubbed to matching purge chamber 2 and be controlled at 45 ℃ ± 2 ℃ temperature, using deionized water as spray liquid, the one group of nozzle assembly arranging respectively at transfer roller upper and lower 90-110mm place is sprayed as cleaning means, meanwhile, the round brush 8 that is 300 ~ 600 at the rotating speed arranging respectively apart from transfer roller upper and lower 0-8mm place is scrubbed, wherein, every group of nozzle assembly comprises 30-35 fan nozzle, and the flow of each nozzle under 0.12-0.16Mpa pressure is 1-1.1 L/Min;
C, spray cleaning again: will again spray wash chamber 3 and be controlled under normal temperature state, using deionized water as cleaning agent, the one group of nozzle assembly arranging respectively at transfer roller upper and lower 90-110mm place is sprayed to cleaning again as cleaning means, wherein, every group of nozzle assembly comprises 18-25 fan nozzle, and the flow of each nozzle under 0.3-0.4Mpa pressure is 1-1.15 L/Min;
D, rinsing: in rinsing chamber 4, the upper and lower surface of back-panel glass is rinsed;
E, oven dry: in drying chamber 5, by the upper and lower skin drying of back-panel glass, complete whole cleaning process.
For the thoroughly impurity removing to the base plate glass remained on surface after round brush and cleaning agent matching purge, the described quantity that again sprays wash chamber 3 is 2, be set in turn in round brush scrub matching purge chamber 2 after, before rinsing chamber 4.
In order to strengthen wash effect so that the cleaning of glass meets cleannes demand, the quantity of described rinsing chamber 4 is 2, after being set in turn in and again spraying wash chamber 3, before drying chamber 5, rinsing chamber 4 is controlled at normal temperatures, using deionized water as purificant, by through again spraying on the transfer roller after operation, one group of nozzle assembly that 90-110mm place, below arranges respectively carries out rinsing as cleaning means, wherein, every group of nozzle assembly comprises 15-20 fan nozzle, the flow of each nozzle under 0.12-0.16Mpa pressure is 1-1.15 L/Min.
In order to strengthen drying effect, the quantity of described oven dry chamber 5 is 2, and after being set in turn in rinsing chamber 4, on this basis, described baking operation step comprises:
E1, one-level air knife purge dries: in the first oven dry chamber 5-1, carry out, the one-level air knife 7 that utilizes transfer roller upper and lower 0-8mm place to arrange is respectively dried, wherein, one-level air knife 7 is 60 °-80 ° with the angle of glass direct of travel, the air temperature blowing out is 25 ~ 50 ℃, and air quantity is 200 ~ 700m 3/ h;
E2, secondary air knife purge dries: in the second oven dry chamber 5-2, carry out, the secondary air knife 6 that utilizes transfer roller upper and lower 0-8mm place to arrange is respectively dried, wherein, secondary air knife 6 is 60 °-80 ° with the angle of glass direct of travel, the air temperature blowing out is 25 ~ 80 ℃, and air quantity is 200 ~ 700m 3/ h.
For the fingerprint of glass surface, cutting wet goods residue are removed, described alkalescent cleaning agent is that concentration is 2% ~ 5% NaOH or KOH or TMAH cleaning agent.
In order to meet the cleaning pressure demand in this technical process, described nozzle is that material is that SUS303, bore are that 1/8 cun, spray angle are the fan nozzle of 90 °.
The material of described round brush 8 is that nylon 612, diameter are ¢ 0.1 ~ ¢ 0.063.Use the round brush of this material and diameter, can, when protective substrate glass surface is not by scratching, reach good cleaning effect.
The air feed system structure of described one-level air knife 7 comprises one-level air blast 7-1 and the main air filter 7-2 being connected with one-level air blast wind-force output, and the output of main air filter 7-2 is connected with the wind-force input of one-level air knife 7.
The air feed system structure of described secondary air knife 6 comprises secondary air blast 6-1, the heater 6-2 being connected with secondary air blast wind-force output and the secondary air filter 6-3 being connected with heater output, and the output of secondary air filter 6-3 is connected with the wind-force input of secondary air knife 6.
Described one-level air knife 7, secondary air knife 6 are that material is the cylinder structure of SUS304.
In the specific implementation, referring to the structural representation of the purging system based on this cleaning shown in accompanying drawing 1.On back-panel glass transfer roller 9, according to production line order, setting gradually pre-spray wash chamber 1, round brush scrubs 2,2 of matching purge chambers and again sprays wash chamber, 2 rinsing chambers and 2 and dry chambers, back-panel glass to be cleaned is passed through to above-mentioned each chamber successively, utilize this cover cleaning can remove the impurity such as the particulate of the back-panel glass remained on surface after edging chamfering, organic matter, grease, chip, can effectively improve the lamination quality of production line subsequent technique.
In pre-spray wash chamber 1, the one group of nozzle assembly arranging respectively at back-panel glass transfer roller 9 upper and lower 90-110mm places.In cleaning process, this chamber temp is controlled to normal temperature, by deionized water, spray in advance, wherein, nozzle is that material is that SUS303, bore are that 1/8 cun, spray angle are the fan nozzle of 90 °, every group of nozzle assembly comprises 21 fan nozzles, and the flow of each nozzle under 0.15Mpa pressure is 1.06 L/Min.
At round brush, scrub in matching purge chamber 2, the one group of nozzle assembly arranging respectively at transfer roller 9 upper and lower 90-110mm places, temperature in this chamber is controlled at 45 ℃ ± 2 ℃, by deionized water, spray, and the round brush that is 300 ~ 600 at the rotating speed arranging respectively apart from transfer roller upper and lower 0-8mm place is scrubbed, wherein, every group of nozzle assembly comprises 32 fan nozzles, and the flow of each nozzle under 0.15Mpa pressure is 1.06L/Min;
At each, again spray in wash chamber 3, the one group of nozzle assembly arranging respectively at transfer roller upper and lower 90-110mm place, to again spray wash chamber is controlled under normal temperature state, with deionized water, spray, wherein, every group of nozzle assembly comprises 21 fan nozzles, and it is that 1 L/Min or the flow of employing under 0.4Mpa pressure are the nozzle of 1.15 L/Min that nozzle is used the flow under 0.3 Mpa pressure;
The quantity of described rinsing chamber 4 is 2, after being set in turn in and again spraying wash chamber 3, before drying chamber 5, rinsing chamber 4 is controlled at normal temperatures, using deionized water as purificant, by through again spraying on the back-panel glass transfer roller after operation, one group of nozzle assembly that 90-110mm place, below arranges respectively carries out rinsing as cleaning means, wherein, every group of nozzle assembly comprises 15-20 fan nozzle, the flow of each nozzle under 0.12-0.16Mpa pressure is 1-1.15 L/Min, during concrete use, can be by the transfer roller in the first rinsing chamber 4-1, the nozzle quantity of below is set to 21, flow under 0.3 Mpa pressure is that the flow under 1L/Min or 0.4 Mpa pressure is 1.15L/Min, by on the transfer roller in the second rinsing chamber 4-2, the nozzle quantity of below is set to 17, flow under 0.15 Mpa pressure is 1.06L/Min.
In order to strengthen drying effect, the quantity of described oven dry chamber 5 is 2, first dry chamber 5-1 and the second oven dry chamber 5-2, after two chambers are set in turn in rinsing chamber 4, in the first oven dry chamber 5-1, carry out, the one-level air knife 7 that utilizes transfer roller upper and lower 0-8mm place to arrange is respectively dried, wherein, one-level air knife 7 is 60 °-80 ° with the angle of back-panel glass direct of travel, with the angle of the perpendicular direction of back-panel glass direct of travel be 15 ° ~ 20 °, the air temperature blowing out is 25 ~ 50 ℃, and air quantity is 200 ~ 700m 3/ h, the air feed power source of one-level air knife is one-level air blast 7-1, the air that one-level air blast 7-1 blows out flows to one-level air knife 7 through main air filter 7-2; In the second oven dry chamber 5-2, the secondary air knife 6 that utilizes transfer roller upper and lower 0-8mm place to arrange is respectively dried, wherein, secondary air knife 6 is 60 °-80 ° with the angle of back-panel glass direct of travel, angle with the perpendicular direction of glass direct of travel: 15 ° ~ 20 °, the air temperature blowing out is 25 ~ 80 ℃, and air quantity is 200 ~ 700m 3/ h.

Claims (10)

  1. A thin-film solar cells produce in cleaning to back-panel glass, it is characterized in that: this technique is to scrub matching purge chamber (2), again spray wash chamber (3), rinsing chamber (4) and dry chamber (5) realization by the pre-spray wash chamber (1), the round brush that set gradually on glass transfer roller (9), and described processing step comprises:
    A, pre-spray clean: will spray in advance wash chamber (1) and be controlled under normal temperature state, using deionized water as cleaning fluid, the one group of nozzle assembly arranging respectively at transfer roller upper and lower 90-110mm place is sprayed in advance as cleaning means, wherein, every group of nozzle assembly comprises 18-25 fan nozzle, and the flow of each nozzle under 0.12-0.16Mpa pressure is 1-1.1 L/Min;
    B, round brush are scrubbed matching purge: round brush is scrubbed to matching purge chamber (2) and be controlled at 45 ℃ ± 2 ℃ temperature, using deionized water as spray liquid, the one group of nozzle assembly arranging respectively at transfer roller upper and lower 90-110mm place is sprayed as cleaning means, meanwhile, the round brush (8) that is 300 ~ 600 at the rotating speed arranging respectively apart from transfer roller upper and lower 0-8mm place is scrubbed, wherein, every group of nozzle assembly comprises 30-35 fan nozzle, and the flow of each nozzle under 0.12-0.16Mpa pressure is 1-1.1 L/Min;
    C, spray cleaning again: will again spray wash chamber (3) and be controlled under normal temperature state, using deionized water as cleaning agent, the one group of nozzle assembly arranging respectively at transfer roller upper and lower 90-110mm place is sprayed to cleaning again as cleaning means, wherein, every group of nozzle assembly comprises 18-25 fan nozzle, and the flow of each nozzle under 0.3-0.4Mpa pressure is 1-1.15 L/Min;
    D, rinsing: in rinsing chamber (4), the upper and lower surface of back-panel glass is rinsed;
    E, oven dry: in drying chamber (5), by the upper and lower skin drying of back-panel glass, complete whole cleaning process.
  2. A kind of thin-film solar cells according to claim 1 produce in cleaning to back-panel glass, it is characterized in that: the quantity of the described wash chamber of spray again (3) is 2, be set in turn in round brush scrub matching purge chamber (2) afterwards, rinsing chamber (4) before.
  3. A kind of thin-film solar cells according to claim 1 produce in cleaning to back-panel glass, it is characterized in that: the quantity of described rinsing chamber (4) is 2, be set in turn in and again spray wash chamber (3) afterwards, dry chamber (5) before, rinsing chamber (4) is controlled at normal temperatures, using deionized water as purificant, by through again spraying on the transfer roller after operation, one group of nozzle assembly that 90-110mm place, below arranges respectively carries out rinsing as cleaning means, wherein, every group of nozzle assembly comprises 15-20 fan nozzle, the flow of each nozzle under 0.12-0.16Mpa pressure is 1-1.15 L/Min.
  4. A kind of thin-film solar cells according to claim 1 produce in cleaning to back-panel glass, it is characterized in that: the quantity of described oven dry chamber (5) is 2, be set in turn in rinsing chamber (4) afterwards, on this basis, described baking operation step comprises:
    E1, one-level air knife purge dries: in the first oven dry chamber (5-1), carry out, utilize the one-level air knife (7) that transfer roller upper and lower 0-8mm place arranges respectively to dry, wherein, one-level air knife (7) is 60 °-80 ° with the angle of glass direct of travel, the air temperature blowing out is 25 ~ 50 ℃, and air quantity is 200 ~ 700m 3/ h;
    E2, secondary air knife purge dries: in the second oven dry chamber (5-2), carry out, utilize the secondary air knife (6) that transfer roller upper and lower 0-8mm place arranges respectively to dry, wherein, secondary air knife (6) is 60 °-80 ° with the angle of glass direct of travel, the air temperature blowing out is 25 ~ 80 ℃, and air quantity is 200 ~ 700m 3/ h.
  5. 5. the cleaning to back-panel glass in producing according to a kind of thin-film solar cells described in claim 1 or 3, is characterized in that: described fan nozzle is that material is that SUS303, bore are that 1/8 cun, spray angle are the fan nozzle of 90 °.
  6. 6. the cleaning to back-panel glass in a kind of thin-film solar cells production according to claim 1, is characterized in that: the material of described round brush (8) is that nylon 612, diameter are ¢ 0.1 ~ ¢ 0.063.
  7. A kind of thin-film solar cells according to claim 4 produce in cleaning to back-panel glass, it is characterized in that: the air feed system structure of described one-level air knife (7) comprises one-level air blast (7-1) and the main air filter (7-2) being connected with one-level air blast wind-force output, and the output of main air filter (7-2) is connected with the wind-force input of one-level air knife (7).
  8. A kind of thin-film solar cells according to claim 4 produce in cleaning to back-panel glass, it is characterized in that: the air feed system structure of described secondary air knife (6) comprises secondary air blast (6-1), the heater (6-2) being connected with secondary air blast wind-force output and the secondary air filter (6-3) being connected with heater output, and the output of secondary air filter (6-3) is connected with the wind-force input of secondary air knife (6).
  9. 9. the cleaning to back-panel glass in a kind of thin-film solar cells production according to claim 4, is characterized in that: described one-level air knife (7) is that material is the cylinder structure of SUS304.
  10. 10. the cleaning to back-panel glass in a kind of thin-film solar cells production according to claim 4, is characterized in that: described secondary air knife (6) is that material is the cylinder structure of SUS304.
CN201310345690.XA 2013-08-09 2013-08-09 Cleaning to back-panel glass in a kind of thin-film solar cells production Active CN104162527B (en)

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CN104772313A (en) * 2015-04-22 2015-07-15 蓝思科技股份有限公司 Method for cleaning sapphire wafer after film plating
CN111632936A (en) * 2020-07-02 2020-09-08 深圳市汉东电子玻璃清洗设备有限公司 Small-size cover plate cleaning machine and cleaning method thereof
CN114835405A (en) * 2022-04-07 2022-08-02 河北视窗玻璃有限公司 Preparation device and processing method of cold-bending glass
CN115301615A (en) * 2022-09-15 2022-11-08 盐城雅楠智能科技有限公司 Glass cleaning machine of screen production line and cleaning method thereof

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CN102716876A (en) * 2012-05-03 2012-10-10 深圳市正东玻璃机械设备有限公司 Glass cleaning machine and cleaning method thereof

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* Cited by examiner, † Cited by third party
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CN104772313A (en) * 2015-04-22 2015-07-15 蓝思科技股份有限公司 Method for cleaning sapphire wafer after film plating
CN111632936A (en) * 2020-07-02 2020-09-08 深圳市汉东电子玻璃清洗设备有限公司 Small-size cover plate cleaning machine and cleaning method thereof
CN114835405A (en) * 2022-04-07 2022-08-02 河北视窗玻璃有限公司 Preparation device and processing method of cold-bending glass
CN115301615A (en) * 2022-09-15 2022-11-08 盐城雅楠智能科技有限公司 Glass cleaning machine of screen production line and cleaning method thereof
CN115301615B (en) * 2022-09-15 2023-11-14 盐城雅楠智能科技有限公司 Glass cleaning machine for screen production line and cleaning method thereof

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