CN203030560U - Glass substrate cleaning unit - Google Patents
Glass substrate cleaning unit Download PDFInfo
- Publication number
- CN203030560U CN203030560U CN 201220660038 CN201220660038U CN203030560U CN 203030560 U CN203030560 U CN 203030560U CN 201220660038 CN201220660038 CN 201220660038 CN 201220660038 U CN201220660038 U CN 201220660038U CN 203030560 U CN203030560 U CN 203030560U
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- CN
- China
- Prior art keywords
- glass substrate
- cleaning nozzles
- cleaning
- washer jet
- cavity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model relates to an installation and arrangement mode of a cleaning machine nozzle of a N2 annealing furnace before rapid annealing and provides a glass substrate cleaning unit which comprises main cleaning nozzles and auxiliary cleaning nozzles, wherein the main cleaning nozzles and the auxiliary cleaning nozzles are opposite to a glass substrate transmitted to a cavity. The main cleaning nozzles are arranged at the front section of the cavity. The auxiliary cleaning nozzles are arranged at the rear section of the cavity. An inclined angle between the ejection outlet direction of the auxiliary cleaning nozzles and the transmission direction of the glass substrate is less than 90 degrees. A nozzle arrangement distribution mode of combination of the main cleaning nozzles and the auxiliary cleaning nozzles is adopted, compared with the existing cleaning unit with cleaning nozzles which are perpendicular to the glass substrate, due to the fact that the auxiliary cleaning nozzles are additionally arranged at the rear section of the cavity, capacity of removing smaller particles on the glass substrate by the whole cleaning unit is enhanced, the cleaned particles are prevented from being again attached to the glass substrate, flow direction of cleaning waste water on the glass substrate is opposite to the flow direction of the glass substrate, and probability of the particles entering the adjacent cavity is reduced.
Description
Technical field
The utility model relates to a kind of for AMOLED(active matrix light-emitting display) processing procedure N
2Glass substrate cleaning unit before annealing furnace and the short annealing.
Background technology
The AMOLED processing procedure requires very harsh to cleanliness factor, particle is very big to properties of product, yield influence, short annealing, N
2All need before the processing procedures such as annealing glass substrate is cleaned, reduce the particle on the glass substrate, reduce product and defective or bad probability occur, thereby enhance product performance and yield.Cleaning machine in the existing AMOLED processing procedure, the nozzle of its cleaning unit is vertical with glass substrate, is easy to wash bigger particle, and is relatively poor to the clearance than granule, and the particle that remains on the glass substrate enters adjacent chamber with the transmission of glass substrate, has caused the pollution to adjacent chamber.
The utility model content
The glass substrate cleaning unit that provides a kind of cleaning performance good is provided the purpose of this utility model.
For achieving the above object, the utility model has adopted following technical scheme.
Comprise the main washer jet and the secondary washer jet that are oppositely arranged with the glass substrate that is conveyed in the chamber, described main washer jet is arranged in the leading portion of chamber, secondary washer jet is arranged in the back segment of chamber, and the angle a between the jet exit direction of secondary washer jet and the direction of transfer of glass substrate is less than 90 degree.
Angle a between the jet exit direction of described secondary washer jet and the direction of transfer of glass substrate is smaller or equal to 45 degree, more than or equal to 30 degree.
The jet exit direction of described main washer jet is vertical with glass substrate.
Described main washer jet and secondary washer jet are rotatable.
The nozzle that glass substrate cleaning unit described in the utility model adopts main washer jet and secondary washer jet to combine is installed arrangement mode, compare with existing only comprising with the cleaning unit of the vertical washer jet of glass substrate, the utility model is by arranging secondary washer jet in the increase of chamber back segment, strengthened whole cleaning unit on the glass substrate than the removal ability of granule, stop the particle that washes to adhere again on the glass substrate, make the cleaning waste water flow direction on the glass substrate opposite with the flow direction of glass substrate simultaneously, reduced particle and entered the probability of adjacent chamber.
Description of drawings
Fig. 1 is structural representation of the present utility model;
Among Fig. 1: chamber 1, glass substrate 2, main washer jet 3, secondary washer jet 4, jet exit direction 5, direction of transfer 6, air knife 7.
The specific embodiment
The utility model is described in further detail below in conjunction with accompanying drawing.
Referring to Fig. 1, the utility model comprises main washer jet 3 and the secondary washer jet 4 that is oppositely arranged with the glass substrate 2 that is conveyed in the chamber 1, described main washer jet 3 is arranged in the leading portion of chamber 1, the jet exit direction 5 of described main washer jet 3 is vertical with glass substrate 2, secondary washer jet 4 is arranged in the back segment of chamber 1, angle a between the jet exit direction 5 of secondary washer jet 4 and the direction of transfer 6 of glass substrate 2 is less than 90 degree, described main washer jet 3 and secondary washer jet 4 are rotatable, are convenient to adjust the angle of inclination of nozzle.
Angle a between the jet exit direction 5 of described secondary washer jet 4 and the direction of transfer 6 of glass substrate 2 is smaller or equal to 45 degree, when spending more than or equal to 30, and cleaning performance is better.
During cleaning unit work, the glass substrate 2 that enters chamber 1 cleans under the effect of main washer jet 3 earlier, enter the working region of secondary washer jet 4 then, because the angle a between the jet exit direction 5 of secondary washer jet 4 and the direction of transfer 6 of glass substrate 2 is less than 90 degree, make that the cleaning action direction of secondary washer jet 4 is opposite with the flow direction of glass substrate 2, can better remove the granule on the glass substrate, simultaneously, make that cleaning waste water can not enter next chamber along with the flow direction of glass substrate, reduced the pollution of particle to adjacent chamber, entrance in adjacent chamber is provided with drying device, such as air knife (air knife) 7, be used for the glass substrate after cleaning is carried out drying.
Claims (4)
1. glass substrate cleaning unit, it is characterized in that: comprise the main washer jet (3) and the secondary washer jet (4) that are oppositely arranged with the glass substrate (2) that is conveyed in the chamber (1), described main washer jet (3) is arranged in the leading portion of chamber (1), secondary washer jet (4) is arranged in the back segment of chamber (1), and the angle a between the jet exit direction (5) of secondary washer jet (4) and the direction of transfer (6) of glass substrate (2) is less than 90 degree.
2. according to the described a kind of glass substrate cleaning unit of claim 1, it is characterized in that: the angle a between the jet exit direction (5) of described secondary washer jet (4) and the direction of transfer (6) of glass substrate (2) is smaller or equal to 45 degree, more than or equal to 30 degree.
3. according to the described a kind of glass substrate cleaning unit of claim 1, it is characterized in that: the jet exit direction (5) of described main washer jet (3) is vertical with glass substrate (2).
4. according to the described a kind of glass substrate cleaning unit of claim 1, it is characterized in that: described main washer jet (3) and secondary washer jet (4) are rotatable.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220660038 CN203030560U (en) | 2012-12-04 | 2012-12-04 | Glass substrate cleaning unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220660038 CN203030560U (en) | 2012-12-04 | 2012-12-04 | Glass substrate cleaning unit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203030560U true CN203030560U (en) | 2013-07-03 |
Family
ID=48682702
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220660038 Expired - Fee Related CN203030560U (en) | 2012-12-04 | 2012-12-04 | Glass substrate cleaning unit |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203030560U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104698156A (en) * | 2015-02-12 | 2015-06-10 | 沭阳鑫达新材料有限公司 | Flat glass quality detection device and using method thereof |
| CN108262291A (en) * | 2017-12-30 | 2018-07-10 | 南京超华电子信息科技有限公司 | A kind of automatically-controlled door door lock cleaning device and its method |
-
2012
- 2012-12-04 CN CN 201220660038 patent/CN203030560U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104698156A (en) * | 2015-02-12 | 2015-06-10 | 沭阳鑫达新材料有限公司 | Flat glass quality detection device and using method thereof |
| CN108262291A (en) * | 2017-12-30 | 2018-07-10 | 南京超华电子信息科技有限公司 | A kind of automatically-controlled door door lock cleaning device and its method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130703 Termination date: 20151204 |
|
| EXPY | Termination of patent right or utility model |