CN102674701A - A method for etching a glass wafer, a glass sheet, and an apparatus for etching the glass wafer - Google Patents

A method for etching a glass wafer, a glass sheet, and an apparatus for etching the glass wafer Download PDF

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CN102674701A
CN102674701A CN2012100827496A CN201210082749A CN102674701A CN 102674701 A CN102674701 A CN 102674701A CN 2012100827496 A CN2012100827496 A CN 2012100827496A CN 201210082749 A CN201210082749 A CN 201210082749A CN 102674701 A CN102674701 A CN 102674701A
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glass substrate
etching
spray
spraying
glass
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朴亨根
高星宇
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ECONY Co Ltd
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ECONY Co Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67063—Apparatus for fluid treatment for etching
    • H01L21/67075—Apparatus for fluid treatment for etching for wet etching
    • H01L21/6708—Apparatus for fluid treatment for etching for wet etching using mainly spraying means, e.g. nozzles
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/133302—Rigid substrates, e.g. inorganic substrates

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  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
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  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
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  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Surface Treatment Of Glass (AREA)
  • Liquid Crystal (AREA)

Abstract

An apparatus for etching a glass substrate and glass sheets manufactured thereby is disclosed. The apparatus includes a fixing unit provided under one or more of the glass substrates to detachably fix and support the glass substrate at a predetermined inclination with respect to the ground; and a spray unit provided above the glass substrate to spray etchant to the glass substrates. The spray unit includes one or more nozzle heads and one or more nozzles for spraying the etchant. A terminal tip of the nozzles is spaced from the glass substrates at a predetermined distance, which is determined by a pitch between the nozzles and an etchant spray angle of the nozzles.

Description

Glass substrate etching method, glass board material and glass substrate etching device
The application is that application number is 200910001497.8, the applying date is on January 9th, 2009, denomination of invention is divided an application for the application for a patent for invention of " be used for the device of etching glass thin slice and the glass board material that utilizes this device to process ".
Technical field
The present invention relates to be used for the etching glass substrate reduces the device of thickness of glass substrate; Relate in particular to the device of an etching glass substrate; This device is arranged with a stationary installation at least one glass substrate, and this stationary installation is used for separable with ground the fixing and support glass substrate of certain obliquity to be arranged in advance; This device also is provided with a spray equipment on glass substrate, this spray equipment is used for spraying etching reagent to glass substrate, reduces the thickness of glass substrate with this, and glass board material is also made in the above described manner.
Background technology
Respond the current information development of times, sealed cell and equipment is development and widespread use significantly.Especially, the display equipment of display image of being used for that is used on TV or the PC has received the research of quickening especially.Therefore, more research also is applied to be used for the making method of the glass board material and the glass board material of substrate, and this glass board material is the key part of display equipment.
The traditional method of making exhibited light and thin display panel generally includes mechanical polishing method and chemical wet engraving method.Though at the early stage of development widespread use mechanical polishing method of display equipment, the chemical wet engraving method has fabulous productivity, begins need to be used to the occasion of superfine product recently.
For Wet-type etching method, dip coating at first is applied to be used for the manufacturing of the elongated face plate of Thin Film Transistor-LCD (TFT-LCD).Although spraying (spray) method and jetting method are more advanced than dip coating, their principle is similar.Spraying (spray) method and jetting method and dip coating at the application etching reagent, to disseminate resultant of reaction and remove on macroscopical principle of resultant of reaction be different.
Briefly describe chemical wet engraving method, its utilizes is at etching reagent staple hydrogen ion (H for example +), hydrogen fluoride (HF), bifluoride hydrogen (HF 2 -) and the staple of glass substrate silicon-dioxide (SiO for example 2) chemical reaction after stirring etching reagent.Reaction is carried out according to formula:
SiO 2+4HF→SiF 4+2H 2O
Use comprises HF -Etching reagent comes the processing procedure of etching glass substrate can be divided into following 5 steps, and this step has determined etched quality.These 5 steps are: (1) etching reagent is disseminated on the diffusion layer that closes on glass substrate; (2) composition of etching reagent is absorbed on the surface of glass substrate; (3) composition of etching reagent and glass substrate carry out chemical reaction; (4) behind the chemical reaction, resultant of reaction is separated from glass substrate; (5) resultant of reaction removes from the diffusion layer that closes on glass substrate.
Below be to description based on dip coating, spraying (spray) method and the jetting method of the chemical wet engraving method of above-mentioned chemical reaction.Dip coating is in an etching bath, to comprise etching reagent, glass substrate is immersed in the etching reagent and in the etching bath bottom produces bubble, so bubble produces etching reagent continuously on the surface of glass substrate.Here, bubble is relevant with the kinestate of etching reagent or resultant of reaction, disseminating of etching reagent for example, and the separation of resultant of reaction and resultant of reaction remove from diffusion layer.Because bubble has increased the motor capacity of etching reagent and resultant of reaction, thus quickened etching reagent and resultant of reaction contact, disseminate and separate.
In other words, bubble is used for using new etching reagent for glass substrate apace, and removes etching reagent from glass baseplate surface.Because etching reagent has been full of etching bath, the state that some glass substrates can be fit to deck is placed into simultaneously, and therefore the dip coating based on above principle has large-duty advantage.Yet, as the shortcoming of dip coating, remain in the surface that the inner resultant of reaction of etching bath is bonded at glass substrate, therefore caused the spinoff of surface quality.The result makes through increasing etch quantity and reduces the thickness of glass substrate difficulty that becomes, and therefore, a large amount of etching reagents is used for the etching glass substrate.
Spraying (spray) method is the defective that is used for remedying dip coating.Spraying (spray) method is more than the dip coating high-grade qualitatively.As shown in Figure 1, spraying (spray) method comprises from nozzle 11 to glass substrate 13 spraying etching reagents 12.Step based on the dip coating of the etching step of etching principle and above description is the same.Yet spraying (spray) method is used the instrument as atomizer, and to glass substrate, this atomizer produces a large amount of power capacities through vertical injection etching reagent, and can be more fast and new etching reagent is provided uniformly and removes resultant of reaction.In addition, compare with dip coating, spraying (spray) method can obtain higher quality and the rate of etch of Geng Gao under same temperature.
Spraying (spray) method can be used a groove with comparatively large capacity, so resultant of reaction can remove easily and etching reagent can constantly flow through this groove and etching space.In addition, spraying (spray) method can advantageously keep fabulous surface quality and because etching reagent can constantly use, can also reduce the quantity of the etching reagent of use when handling anti-resultant.Yet because the processed glass substrate that spraying (spray) method can only be one by one, the production efficiency of spraying (spray) method is lower.
Jetting method is designed and overcomes the above problem of mentioning.Jetting method can be regarded as the combination of dip coating and spraying (spray) method.Fluid jet comprises etching reagent is filled up in etching bath, and glass substrate is immersed in the etching reagent, produces the powerful flow of etching reagent in one side, and it acts on as the bubble in the dip coating.In addition, new etching reagent constantly is applied to etching bath, and a part that flows through the etching reagent of etching bath is collected and utilizes again.Even fluid jet can increase productivity, but a shortcoming is arranged is exactly that initial cost is very high for it.
Summary of the invention
The present invention is with the problems referred to above that solve prior art.
An object of the present invention is to provide and be used for the device of etching glass substrate, this device is arranged with a stationary installation at least one glass substrate, and this stationary installation separable fixing and support glass substrate make it with ground certain obliquity arranged in advance; This device also is provided with a spray equipment on glass substrate, this spray equipment is used for spraying etching reagent to glass substrate, so that reduce the thickness of glass substrate.
Another object of the present invention provided a quality improvement of making by said apparatus glass substrate.
According to one object of the present invention, the device of etching glass substrate can comprise a stationary installation that is arranged under one or more glass substrate, and the separable fixing and support glass substrate of this stationary installation makes it with ground certain obliquity arranged in advance; This device also comprises a spray equipment that is arranged on above the glass substrate, on glass substrate, sprays etching reagent, has reduced the thickness of this glass substrate through etching.
In one embodiment of the invention, spray equipment can comprise one or more injector head and one or more nozzle that is used for spraying etching reagent.
In another one embodiment of the present invention, terminal nozzle is arranged on the position of leaving glass substrate with the distance that is provided with in advance, and this distance is confirmed by the angle of the etching reagent spraying of spacing between the nozzle and nozzle.
In a further embodiment of the present invention, glass substrate favours the vertical surface that extends to nozzle, and the angular range of inclination is the 0-45 degree.
In another one embodiment of the present invention, glass substrate is arranged on the stationary installation with preset spacing, and this spacing range is 5-300mm.
In a further embodiment of the present invention; The device of etching glass substrate further comprises an etching bath that is connected with spray equipment; With a resultant of reaction groove that is arranged on stationary installation than lower part; This resultant of reaction groove is used for collecting the resultant of reaction that produces in the reaction process between etching reagent and the glass substrate of nozzle spraying, and the non-reacted parts of its etching reagent flows to the etching reagent groove from the resultant of reaction groove.
In another one embodiment of the present invention, the resultant of reaction groove comprises that a filtration unit separates resultant of reaction from the non-reacted parts of etching reagent.
In a further embodiment of the present invention, etching reagent is a hydrogen fluoride, and also different according to the rate of etch of the different glass substrate of etching reagent hydrogen ion, hydrogen fluoride, bifluoride hydrogen concentration.
In further another one embodiment of the present invention, stationary installation comprises a glass substrate contact device, and this contact device is used for easily fixing glass substrate and resultant of reaction flowed into the resultant of reaction groove.
Purpose is used for the device manufacturing of the glass board material of Thin Film Transistor-LCD by above description according to another preferred, and the thickness range of this glass board material is 0.3-1mm, and areal extent is 1000 * 1200mm 2To 1100 * 1300mm 2
Through easily glass substrate being processed as the thin glass plate material, more than the embodiments of the invention of statement can improve productivity, and through allowing etching reagent to flow along glass substrate, the foregoing description can improve glass quality.Further, be lower than 0.3mm, area greater than 1000 * 1200mm at thickness 2On the ultra-fine etching performance that carries out, can improve white war.
Description of drawings
According to the description below in conjunction with accompanying drawing, above and other purposes of some embodiment of the present invention, feature and advantage can be more obvious.
Fig. 1 is a synoptic diagram of describing the substrate etch process of traditional method.
Fig. 2 is used for the skeleton view of first embodiment of the device of etching glass substrate according to the present invention;
The synoptic diagram of Fig. 3 first embodiment of the processing procedure of etching glass substrate according to the present invention.
Fig. 4 is the side and the front view of the geometric construction of glass substrate and vertical surface, and this vertical surface extend perpendicular is to nozzle according to the present invention.
Fig. 5 is the contrast synoptic diagram of glass etching method of the present invention and conventional glass engraving method.
The quantity that Fig. 6 has explained the etching reagent that is applied in glass baseplate surface respectively and the graphic representation that concerns between rate of etch and the surface quality.
Fig. 7 has explained the quantity of the etching reagent that is applied in glass baseplate surface and the graphic representation that between the thickness of glass substrate of vertical direction changes, concerns.
Fig. 8 is the synoptic diagram of showing according to the etched thickness difference that spacing the produced distribution of glass substrate.
The synoptic diagram of the glass substrate that Fig. 9 first embodiment according to the invention is showed and the geometric relationship of nozzle.And
Figure 10 second embodiment according to the present invention shows the synoptic diagram of the geometric relationship between glass substrate and the stationary installation.
Embodiment
According to the accompanying drawing of corresponding example embodiment, will describe the present invention in detail hereinafter.
In the accompanying drawings, Fig. 1 is a synoptic diagram of describing the substrate etch process of traditional method.Fig. 2 is the skeleton view of first embodiment of the present invention's device of being used for the etching glass substrate; Fig. 3 is the synoptic diagram of first embodiment of the processing procedure of etching glass substrate of the present invention.
Fig. 4 is the side and the front view of the geometric construction of glass substrate and vertical plane, and this vertical plane extend perpendicular is to nozzle according to the present invention.Fig. 5 is the contrast synoptic diagram of glass etching method of the present invention and conventional glass engraving method.Fig. 6 be the explanation etching reagent that is applied in glass baseplate surface quantity respectively and the graphic representation that concerns between rate of etch and the surface quality.
Fig. 7 has showed the quantity of the etching reagent that is applied in glass baseplate surface and the graphic representation that between the thickness of glass substrate of vertical direction changes, concerns.Fig. 8 is the synoptic diagram of showing according to the etched thickness difference that spacing the produced distribution of glass substrate.The synoptic diagram of the glass substrate that Fig. 9 first embodiment according to the invention is explained and the geometric relationship of nozzle.
In addition, Figure 10 second embodiment according to the present invention shows the synoptic diagram of the geometric relationship between glass substrate and the stationary installation.
As shown in Figures 2 and 3, provide the device 100 that is used for the etching glass substrate, through the surface of etching glass substrate 300, this device has reduced the thickness of glass substrate 300.This device 100 comprises a spray equipment 101, sprays etching reagent downwards to glass substrate 300, comprises that also a stationary installation 200 fixes glass substrate 300.
Arranged one or more glass substrate 300.When several glass substrates 300 are loaded in the device 100, just can produce several glass board materials at one time.This glass substrate 300 need comprise silicon (Si) or silicon oxide (SiO 2), so that can be etched for example hydrogen fluoride (HF) etching of agent.Yet this is not intention restriction the present invention, and this glass substrate 300 can also have other forms.
Stationary installation 200 is used for from following fixing and support glass substrate 300, and therefore, glass substrate 300 favours ground.Here, need be not to be 90 degree array substrate with the etching reagent feeding mechanism.Stationary installation 200 is processed by polymer resin or organic materials, and is configured to use minimum contact area to fix glass substrate 300.This is because etching reagent need be sprayed onto on the glass substrate 300 and and glass substrate complete reaction.Yet, as long as stationary installation 200 ability fixing glass substrates 300 just are not limited to use polymkeric substance.
In addition, stationary installation 200 groove that can be provided with each interval fixes some glass substrates 300.It is identical with glass substrate 300 that the width of stationary installation 200 can be set to, and substrate 300 is fixed on the stationary installation 200 with the area of minimum.
Because several glass substrate 300 can be arranged on the stationary installation 200 regularly, can the assembly of stationary installation 200 and glass substrate 300 be placed on this glass substrate 300 of etching in the etching area, then this assembly is removed etching area.Therefore, because stationary installation 200 the putting into etching area and remove from etching area of aspect very, therefore, several glass substrates 300 can be etched simultaneously.No matter be a glass substrate or a plurality of glass substrate etchings, embodiments of the invention are effective.In addition because spraying (spray) method that provides can be than the more glass substrate of dip coating etching in the embodiments of the invention, therefore be very high yield with economical.
Because glass substrate 300 is not influenced by external force basically, stationary installation 200 can according to circumstances be provided with flexibly.When stationary installation 200 and glass substrate 300 kept in touch, resultant of reaction can be built up on stationary installation 200, had therefore caused the shortcoming such as polluting.In order to address this problem, shown in figure 10, stationary installation 200 comprises a clip 202, and this clip is used for fixing glass substrate 300.Because stationary installation 200 can be prepared according to the model of substrate or processing procedure, therefore this embodiment of the present invention is favourable provides very big degree of freedom.This is to spray to from above on the glass substrate because of etching reagent 104, and especially the surface along glass substrate 300 sprays, and therefore any influence that comes from the outside is minimized.
Provide and be used for etching reagent 104 is sprayed to the spray equipment 101 on the glass substrate 300 from above.Because spray equipment 101 is arranged on above the glass substrate 300 and from top spraying etching reagent, so in fact glass substrate does not receive any external force.Because glass substrate 300 only receives very little external force, so supporting structure just can design easily.Owing to above reason, can be very advantageously the thickness of glass substrate 300 be reduced to 0.1mm or thinner, the etching area reaches 1000 * 1200mm 2Perhaps bigger.
Spray equipment 101 perhaps comprises one or more injector head 103 on a plurality of nozzles 102 at each.Each nozzle 102 all designs and is used for spraying (spray) etching reagent.
As shown in Figure 5, owing to use a spot of etching reagent just can bigger area and the etched thickness of etching can suitably adjust, adopt spraying (spray) method.Spray equipment 101 is arranged on to minimize above the glass substrate 300 and when etching reagent 104 is sprayed, is applied to the pressure on the glass substrate 300.When etching reagent 104 etching glass substrate surfaces, at first contact top, middle part or the bottom of different glass substrate 300, then under capillary effect, flow downward along glass substrate 300.Contrast, as shown in Figure 1, because spraying agent 12 is sprayed directly on the glass substrate 13, traditional spraying (spray) method has applied a large amount of pressure on glass substrate 13.
As shown in Figure 4, glass substrate 300 is determined by the etching reagent spray angle (angle of nozzle 102 spraying etching reagents 104 just) of the spacing between the nozzle 102 and nozzle 102 to the distance of the end of nozzle 102 jointly.The reason of confirming like this from glass substrate 300 to the distance the terminal nozzle 102 is that all parts that can guarantee glass substrate 300 all are exposed within the spraying scope of etching reagent 104.Distance h from glass substrate 300 to nozzle 102 the end is determined by following formula 1:
h ≥ N p 2 Tan θ 2 , h ≥ H p 2 Tan θ 2 .... formula 1
N wherein pBe the spacing between the nozzle 102, H pRepresent the spacing between the injector head 103, and θ is the angle of the etching reagent spraying of a nozzle.
Distance from glass substrate 300 to nozzle 102 need have the geometric properties of all conditions that can satisfy above equation 1.All parts that are not glass substrate 300 all are exposed to below the etching reagent 104, only if when viewed from above as shown in Figure 4, the formula 2 below the spacing d between the angle of glass substrate 300 and outmost nozzle 102 satisfies:
d ≤ h Tan θ 2 .... formula 2
In addition, as shown in Figure 4, the spacing d ' between the one side of glass substrate 300 and the outmost nozzle 102 needs to satisfy following formula 3:
d ′ ≥ h Tan θ 2 .... formula 3
Obliquity between the vertical surface of glass substrate 300 and nozzle is defined as between 0 to 45 degree, and this vertical surface is along the nozzle extend perpendicular.As shown in Figure 9, preferably the angle between glass substrate 300 and the vertical surface that extends along nozzle 102 is 0 degree.When the angle between the vertical surface of glass substrate 300 and nozzle 102 is 30 when spending, there is not the thickness difference in fact in vertical direction.Yet, if obliquity is 47 degree, because resultant of reaction can not remove by effectively, glass substrate 300 just thin than other parts than lower part.Best, the pitch angle is confirmed in the above scope that provides.
Be arranged in the spacing 5-300mm preferably between the some glass substrates 300 on the stationary installation 200.It is in order to increase productivity through a large amount of glass substrate 300 of while etching that spacing between the glass substrate 300 is confirmed as above scope.In practice, want 5 times with 8mm spacing arranged glass substrate than the productivity height of arranging same glass substrate with the 40mm spacing.Go down after this manner, the spacing between the glass substrate is the important factor of decision productivity.The spacing that reduces between the glass substrate 300 increases productivity, and it also need reduce the spacing between the injector head 103.Spacing between the minimizing injector head 103 also need reduce the diameter of injector head, therefore, the difficulty more of the etching reagent change of sufficient amount is provided to nozzle 102.In such cases, owing to need particular components to come the alternate standard assembly, manufacturing cost will increase.In addition, the maintenance of nozzle 102 is also very difficult.
Therefore, the spacing between the glass substrate 300 is preferably confirmed in above-described scope.In addition, because the glass substrate of once placing decision obtainable whole etching quantity in an etch process.Need to consider the specification of etching system, the capacity of groove for example, keep etching reagent can be under a pressure in advance from the specification of the pipeline of nozzle ejection and the capacity of pump.
Spray equipment 101 is equipped with the etching reagent groove, and this etching reagent groove configuration comes ability and the contact of resultant of reaction groove.The etching reagent groove comprises hydrogen fluoride, and hydrogen fluoride ionic concentration and quantity processing procedure according to the present invention are adjusted.
The resultant of reaction groove is arranged on the bottom of stationary installation 200; Be used for collecting resultant of reaction; This resultant of reaction generates through etching reagent 104 and the reaction between the glass substrate 300 from nozzle 102 sprayings, and therefore unreacted etching reagent can be from the resultant of reaction concentrated flow to the etching reagent groove.The resultant of reaction that generates through the reaction between etching reagent 104 and the glass substrate 300 flows into the resultant of reaction groove fast. and the interconnection or shared space of resultant of reaction groove and etching reagent groove makes unreacted etching reagent recycle.This unreacted etching reagent that comes from resultant of reaction can be introduced the etching reagent groove once more and use new etching reagent fast and remove resultant of reaction, therefore, improves surface property.The resultant of reaction groove comprises a filtration unit resultant of reaction is separated from etching reagent 104.
Etching reagent 104 is a hydrogen fluoride, and the rate of etch of glass substrate is by the hydrogen ion (H in the etching reagent 104 +), HF and HF 2Concentration decision.According to hydrogen ion (H +), HF and HF 2The difference of concentration, rate of etch changes to some extent, rate of etch is disproportionate with the quantity that is applied to the etching reagent on the glass substrate 300.
As shown in Figure 6, the quantity or the more etching reagent 104 of predetermined etching reagent 104 be can use and rate of etch and surface quality guaranteed.Because the quantity of etching reagent 104 and rate of etch and surface quality are disproportionate, etching reagent 104 can be confirmed good quantity in advance.With reference to figure 6 and Fig. 7; When pre-set quantity or more etching reagent have been used in the substrate bottom; Even then etching reagent 104 is supplied with from the top of glass substrate 300, between the top 302 of glass substrate 300 and bottom 303, can not exist thickness difference and quality to distinguish yet.That is to say that when pre-set quantity or more etching reagent always keep in touch the surface of glass substrate 300, then rate of etch and favorable surface quality just can guarantee.
Shown in figure 10, the stationary installation 200 of embodiments of the invention comprises a contact member 201 and makes things convenient for fixing glass substrate 300 and keep resultant of reaction to move to the resultant of reaction concentrated flow.Glass substrate contact member 201 is ring texturees, and this contact member is at least by one of them formations of compsns such as anti-hydrogen fluoride material, pvc material (PVC), polyetheretherketonematerials materials (Peek), tetrafluoroethylene.This glass substrate contact member 201 is not limited to above material of mentioning and shape, but is made up of any material that is beneficial to etching reagent 104 and resultant of reaction mobile Any shape.In addition, realize between glass substrate contact member 201 and the glass substrate 300 that some contact the mobile maximization that makes resultant of reaction, and the thickness of the gap ratio glass substrate of member 201 is wanted greatly.
By being used for the common thickness range of glass board material that the device of etching glass substrate makes between 0.3-1mm, and can be manufactured into 0.1mm or thinner thickness.It is 1000 * 1200mm that the device of etching glass substrate can be made areal extent 2To 1100 * 1300mm 2Between film-type transistor (TFT-LCD) glass board material.
Be one embodiment of the present of invention below, described that spacing between the glass substrate 300 changes and thickness difference between the upper and lower of the glass substrate 300 that causes.In addition, as another one embodiment of the present invention, the thickness difference of the upper and lower of the glass substrate 300 that causes based on the spacing between spacing between the nozzle and the glass substrate 300 has been described.
Embodiment 1
In order to verify that there is not the thickness difference in vertical direction in fact in glass substrate when preset some amount or more etching reagent are provided.Upper nozzle is with 50 * 50mm 2Spacing arrange, and the quantity of etching reagent that is applied in glass baseplate surface is according to the difference of glasses interval and difference, that spacing comprises is infinite, 90mm and 30mm.Here, the amount of nozzles spray be the 0.1-2 liter/minute, the area of glass substrate is 370 * 470mm 2, and thickness is 0.63mm, is etched to 300 μ m.
Table 1
Glasses interval Infinite 90mm 30mm
Thickness difference in vertical direction ?12μm 5-10μm 15-20μm
With reference to above table 1 and Fig. 8,, some amount or more etching reagent satisfy code requirement through being provided in advance.The quantity that can increase the etching reagent that provides from above obtains unified thickness distribution.Through the quantity of the etching reagent that provides above increasing, and reduce glasses interval, can be in a space a large amount of glass substrate of etching simultaneously, thereby increase productivity.
Embodiment 2
The thickness unified specification of LCD substrate is about ± 20 μ m at present.Through changing between the nozzle and the spacing between the glass substrate detects the upper section and the difference of the thickness between the lower part of glass substrate, to determine whether to have guaranteed the consistence of thickness.In this embodiment, (area is 590 * 670mm to the combination panel of low density glass substrate 2And thickness is 1.26mm) for example TFT-LCD alkali-free glass substrate (NEG OA21 or SCP E2K) be sprayed onto 0.6mm.
Table 2
Injector spacing 50mm 40mm 15mm 50mm
Glasses interval 40mm 30mm 8mm 8mm
Thickness difference on the vertical direction 19-26μm 13-21μm 9-18μm 35-50μm
The nozzle quantity for spray that uses among the embodiment 2 is 0.3 liter/minute.In the practice, glass substrate to be exceeded 5 times with the arrangement of 8mm spacing than the productivity of arranging same glass substrate with the 40mm spacing.After this manner, the spacing between the glass substrate is an important factors of decision productivity.Though the spacing between the minimizing glass substrate can increase productivity, reduce the diameter that spacing between the injector head also need reduce injector head, like this, the very difficulty that just becomes to the enough etching reagents of nozzle application.In such cases,, just increased production cost owing to will use special device to replace standard package.In addition, the maintenance of nozzle 102 is also very difficult.Because the quantity of the glass substrate of once putting into has been represented the etching quantity at an etch process; Need to consider the specification of etching system; The capacity of groove for example, keep etching reagent can be under a pressure in advance from the specification of the pipeline of nozzle ejection, and the capacity of pump.Need provide and pre-set the quality that quantity or more etching reagent are guaranteed similar display equipment to the glass substrate.In this experiment, coefficient C fNeed satisfy formula 4:
C f = Nozzle × G Ptch Nh Ptch × Nv Ptch .... formula 4
Its Nozzle representes the quantity (m that the nozzle PM sprays 3/ min), G PtchThe size (m) that expression glasses interval or glass substrate are arranged, Nh PtchExpression injector spacing or the arrangement size (m) of nozzle on width, NV PtchExpression injector spacing or the arrangement size (m) of nozzle on length.
Coefficient C fIn embodiment 2, being regarded as variable, is a key factor.Do not consider the length of glass substrate because only considering the spacing of glass substrate, coefficient C in digital equation 4 fUnit be m 2/ min, and coefficient C fReal unit be m 3/ min.This is because the length of glass substrate is not an important factor.
In this experiment, the quantity for spray of nozzle PM approximately is 0.3 liter.The Cf value of setting according to the spacing of the spacing of nozzle and glass substrate is in following table 3.
Table 3
Injector spacing 0.05m 0.04m 0.015m 0.05m
Glasses interval 0.04m 0.03m 0.008m 0.008m
Cf(m 2/min) 0.0048 0.00563 0.01067 0.00096
Shown in above table 3, be that 50mm (0.05m) and glass substrate are under the situation of 8mm (0.008m) in injector spacing, other scope of the caliper zones of glass substrate in vertical direction from 35 to 50 μ m.This range section is within specification, and other scope of caliper zones is 10-15 μ m.Because before etching, with respect to thickness a surplus capacity (margin) is arranged, injector spacing 50mm and glasses interval 8mm are geometric senses, this geometric sense can not be applied in the practice.
The invention still further relates to the method for chemially etching of the thickness that is used for reducing glass substrate.In traditional dip coating, the surperficial thickness of perhaps controlling whole base plate exactly that etching uniformly has the whole glass substrate of larger area is very difficult.In addition, increase the spray pressure of etching reagent and caused air-flow because traditional spraying (spray) method both sides spray (spray) etching reagent, and made large-area glass substrate overcome very difficulty of terrestrial gravitation, just caused structure problem.
In order to address these problems, the present invention will minimize the external force influence of glass substrate through above glass substrate, spraying etching reagent.In addition, for example, through etched thickness be 1.26 or the FTF-LCD of 1.0mm to combine panel can produce thickness be 1.0mm or littler film (for example, 0.9mm, 0.8mm, 0.6mm etc.).Etching system of the present invention, elongated etch not only can be applied in and be used for TFT-LCD, and OLED (OLED) etc. combine panel, can also be applied to unconjugated glass substrate or silicon wafer.In addition, etching system of the present invention is the process technique that can improve surface quality and productivity, and it has obtained relatively low cost.
The present invention is according to the description to several embodiment, will be understood by those skilled in the art that on the various forms with details on change all without prejudice to by claim or determined spirit of the present invention of other counterparts and essence.

Claims (10)

1. a glass substrate etching method is characterized in that, may further comprise the steps:
A) step is arranged said glass substrate with a plurality of glass substrates with respect to the mode in terrain slope 45 degree～90 degree scopes; And
B) step sprays (spray) etching reagent downwards and the said glass substrate of etching with predetermined spraying (spray) angle to the substrate surface of said glass substrate from being positioned at than a plurality of places of the position of said glass-based plate hight,
Said etching reagent be used for flow down and the surface of the said glass substrate of etching along said glass substrate after said glass substrate contacts.
2. a glass substrate etching method is characterized in that, may further comprise the steps:
A) step is fixed on a plurality of glass substrates on the said stationary installation with the mode of spending in～90 degree scopes with respect to the bottom surface inclination 45 of stationary installation; And
B) step sprays (spray) etching reagent downwards and the said glass substrate of etching with predetermined spraying (spray) angle to the substrate surface of said glass substrate from being disposed at than the spraying that comprises a plurality of nozzles (spray) device of the position of said glass-based plate hight,
Said etching reagent be used for flow down and the surface of the said glass substrate of etching along said glass substrate after said glass substrate contacts.
3. glass substrate etching method as claimed in claim 2 is characterized in that,
Interval between the end of said nozzle and the upper end of said glass substrate is adjusted according to etching reagent spraying (spray) angle of spacing between the said nozzle and said nozzle, so that all parts of said glass substrate all are exposed within the spray regime of said etching reagent.
4. glass substrate etching method as claimed in claim 2 is characterized in that,
Said spraying (spray) device possesses a plurality of injector heads, and said a plurality of injector heads comprise a plurality of nozzles respectively,
Interval between the end of said nozzle and the upper end of said glass substrate is adjusted according to etching reagent spraying (spray) angle of spacing between the said injector head and said nozzle, so that all parts of said glass substrate all are exposed within the spray regime of said etching reagent.
5. like each described glass substrate etching method in the claim 2～4, it is characterized in that,
In bottom surface inclination 60 degree～90 degree scopes of said a plurality of glass substrate with respect to said stationary installation.
6. like each described glass substrate etching method in the claim 2～4, it is characterized in that,
Further comprising the steps of:
After said a) step and said b) before the step, said stationary installation is put into the step of the below of said spraying (spray) device; And
At said b) after the step, the step that said stationary installation is removed from the position of the below of said spraying (spray) device.
7. glass substrate etching method as claimed in claim 5 is characterized in that,
Said stationary installation comprises the clip (202) that is used to support said glass substrate and is used for a member that contacts (201).
8. a glass board material uses the described glass substrate etching method of claim 5 to make.
9. a glass substrate etching device reduces the thickness of said glass substrate through the etching glass substrate, it is characterized in that, comprising:
Stationary installation, this stationary installation can support said glass substrate separably with the mode that a plurality of glass substrates are spent with respect to bottom surface inclination 45 degree～90 of said etching system; And
Spraying (spray) device; This spraying (spray) device is arranged on the top than said glass-based plate hight; And be used for, and comprise a plurality of nozzles and a plurality of injector head with predetermined spraying (spray) angle the downward spraying in surface (spray) etching reagent to said glass substrate
Said etching reagent be used for flow down and the surface of the said glass substrate of etching along said glass substrate after said glass substrate contacts,
Spacing (h) between the end of said nozzle and the said glass substrate and the spacing (N between the said nozzle p) and said etching reagent spraying (spray) angle (θ) of said nozzle satisfy following formula so that all parts of said glass substrate all are exposed within the spray regime of said etching reagent,
h ≥ N p 2 tan θ 2 .
10. a glass substrate etching device reduces the thickness of said glass substrate through the etching glass substrate, it is characterized in that, comprising:
Stationary installation, this stationary installation can support said glass substrate separably with the mode that a plurality of glass substrates are spent with respect to bottom surface inclination 45 degree～90 of said etching system; And
Spraying (spray) device, this spraying (spray) device is arranged on the top than said glass-based plate hight, and is used for predetermined spraying (spray) the angle downward spraying in surface (spray) etching reagent to said glass substrate,
Said etching reagent be used for flow down and the surface of the said glass substrate of etching along said glass substrate after said glass substrate contacts,
Spacing (h) between the end of said nozzle and the said glass substrate and the spacing (H between the said injector head p) and said etching reagent spraying (spray) angle (θ) of said nozzle satisfy following formula so that all parts of said glass substrate all are exposed within the spray regime of said etching reagent,
h ≥ H p 2 tan θ 2 .
CN2012100827496A 2008-01-09 2009-01-09 A method for etching a glass wafer, a glass sheet, and an apparatus for etching the glass wafer Withdrawn CN102674701A (en)

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CN101481217A (en) 2009-07-15

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