CN102034749A - 阵列基板及其制造方法 - Google Patents
阵列基板及其制造方法 Download PDFInfo
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- CN102034749A CN102034749A CN2009100931962A CN200910093196A CN102034749A CN 102034749 A CN102034749 A CN 102034749A CN 2009100931962 A CN2009100931962 A CN 2009100931962A CN 200910093196 A CN200910093196 A CN 200910093196A CN 102034749 A CN102034749 A CN 102034749A
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- 239000000758 substrate Substances 0.000 title claims abstract description 45
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 22
- 238000005530 etching Methods 0.000 claims abstract description 27
- 238000000034 method Methods 0.000 claims abstract description 26
- 239000000203 mixture Substances 0.000 claims abstract description 13
- 230000004888 barrier function Effects 0.000 claims description 94
- 210000001503 joint Anatomy 0.000 claims description 72
- 229920002120 photoresistant polymer Polymers 0.000 claims description 27
- 230000008021 deposition Effects 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 12
- 230000015572 biosynthetic process Effects 0.000 claims description 6
- 238000004380 ashing Methods 0.000 claims description 4
- 238000003384 imaging method Methods 0.000 claims description 4
- 230000008569 process Effects 0.000 abstract description 4
- 238000002161 passivation Methods 0.000 description 17
- 239000012212 insulator Substances 0.000 description 14
- 238000002360 preparation method Methods 0.000 description 12
- 239000011810 insulating material Substances 0.000 description 8
- 238000001312 dry etching Methods 0.000 description 5
- 239000000047 product Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- 238000003325 tomography Methods 0.000 description 3
- 239000004020 conductor Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000009401 outcrossing Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
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Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
- H01L27/1288—Multistep manufacturing methods employing particular masking sequences or specially adapted masks, e.g. half-tone mask
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136286—Wiring, e.g. gate line, drain line
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/124—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136231—Active matrix addressed cells for reducing the number of lithographic steps
- G02F1/136236—Active matrix addressed cells for reducing the number of lithographic steps using a grey or half tone lithographic process
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/12—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode
- G02F2201/123—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode pixel
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Mathematical Physics (AREA)
- Manufacturing & Machinery (AREA)
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
Description
Claims (12)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009100931962A CN102034749B (zh) | 2009-09-25 | 2009-09-25 | 阵列基板及其制造方法 |
US12/888,144 US9431436B2 (en) | 2009-09-25 | 2010-09-22 | Array substrate and manufacturing method thereof |
US15/219,819 US20160336360A1 (en) | 2009-09-25 | 2016-07-26 | Array substrate and manufacturing method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009100931962A CN102034749B (zh) | 2009-09-25 | 2009-09-25 | 阵列基板及其制造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102034749A true CN102034749A (zh) | 2011-04-27 |
CN102034749B CN102034749B (zh) | 2013-09-04 |
Family
ID=43779737
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2009100931962A Expired - Fee Related CN102034749B (zh) | 2009-09-25 | 2009-09-25 | 阵列基板及其制造方法 |
Country Status (2)
Country | Link |
---|---|
US (2) | US9431436B2 (zh) |
CN (1) | CN102034749B (zh) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103901691A (zh) * | 2012-12-26 | 2014-07-02 | 上海天马微电子有限公司 | 液晶显示面板及制造方法 |
WO2016090689A1 (zh) * | 2014-12-12 | 2016-06-16 | 深圳市华星光电技术有限公司 | 一种阵列基板的掺杂方法及制造设备 |
CN105762111A (zh) * | 2016-02-01 | 2016-07-13 | 京东方科技集团股份有限公司 | 显示基板及其制造方法和显示装置 |
CN106206623A (zh) * | 2016-09-26 | 2016-12-07 | 京东方科技集团股份有限公司 | 一种显示基板、其制作方法、显示面板及显示装置 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103928400A (zh) * | 2014-03-31 | 2014-07-16 | 京东方科技集团股份有限公司 | 阵列基板及其制作方法、显示装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020000553A1 (en) * | 2000-06-29 | 2002-01-03 | Acer Display Technology, Inc. | Thin film transistor liquid crystal display and manufacturing method thereof |
CN1702530A (zh) * | 2004-05-27 | 2005-11-30 | Lg.菲利浦Lcd株式会社 | 液晶显示器件及其制造方法 |
JP3765203B2 (ja) * | 1999-07-29 | 2006-04-12 | 株式会社日立製作所 | 液晶表示装置 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3463006B2 (ja) * | 1998-10-26 | 2003-11-05 | シャープ株式会社 | 液晶表示装置の製造方法および液晶表示装置 |
KR100591902B1 (ko) * | 2000-02-19 | 2006-06-20 | 엘지.필립스 엘시디 주식회사 | 액정표시장치용 어레이기판의 데이터패드 과식각 방지방법 |
KR100372579B1 (ko) * | 2000-06-21 | 2003-02-17 | 엘지.필립스 엘시디 주식회사 | 액정표시장치용 어레이기판과 그 제조방법 |
KR100650401B1 (ko) * | 2000-12-29 | 2006-11-27 | 엘지.필립스 엘시디 주식회사 | 액정 표시 장치용 어레이 기판 및 그의 제조 방법 |
KR20020083249A (ko) * | 2001-04-26 | 2002-11-02 | 삼성전자 주식회사 | 배선의 접촉 구조 및 그의 제조 방법과 이를 포함하는박막 트랜지스터 기판 및 그 제조 방법 |
US6888586B2 (en) * | 2001-06-05 | 2005-05-03 | Lg. Philips Lcd Co., Ltd. | Array substrate for liquid crystal display and method for fabricating the same |
DE60336441D1 (de) * | 2002-09-02 | 2011-05-05 | Samsung Electronics Co Ltd | Kontaktstruktur für eine Halbleitervorrichtung, dünnschichtige Transistoranordnung mit einer solchen Kontaktstruktur und dessen Herstellungsmethode |
KR100925458B1 (ko) * | 2003-01-17 | 2009-11-06 | 삼성전자주식회사 | 박막 트랜지스터 표시판 및 그 제조 방법 |
JP2004241774A (ja) * | 2003-02-03 | 2004-08-26 | Samsung Electronics Co Ltd | 薄膜トランジスタ表示板及びその製造方法とそのためのマスク |
US7279370B2 (en) * | 2003-10-11 | 2007-10-09 | Lg.Philips Lcd Co., Ltd. | Thin film transistor array substrate and method of fabricating the same |
KR20050060963A (ko) * | 2003-12-17 | 2005-06-22 | 엘지.필립스 엘시디 주식회사 | 박막 트랜지스터 어레이 기판 및 그 제조방법 |
KR101121620B1 (ko) * | 2004-06-05 | 2012-02-28 | 엘지디스플레이 주식회사 | 표시 소자용 박막 트랜지스터 기판 및 그 제조 방법 |
KR101298693B1 (ko) * | 2006-07-19 | 2013-08-21 | 삼성디스플레이 주식회사 | 액정표시패널 및 이의 제조 방법 |
CN101718950B (zh) * | 2008-10-09 | 2011-12-28 | 北京京东方光电科技有限公司 | 薄膜构图方法及制造液晶显示装置的方法 |
CN102023433B (zh) * | 2009-09-18 | 2012-02-29 | 北京京东方光电科技有限公司 | Tft-lcd阵列基板及其制造方法 |
-
2009
- 2009-09-25 CN CN2009100931962A patent/CN102034749B/zh not_active Expired - Fee Related
-
2010
- 2010-09-22 US US12/888,144 patent/US9431436B2/en active Active
-
2016
- 2016-07-26 US US15/219,819 patent/US20160336360A1/en not_active Abandoned
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3765203B2 (ja) * | 1999-07-29 | 2006-04-12 | 株式会社日立製作所 | 液晶表示装置 |
US20020000553A1 (en) * | 2000-06-29 | 2002-01-03 | Acer Display Technology, Inc. | Thin film transistor liquid crystal display and manufacturing method thereof |
CN1702530A (zh) * | 2004-05-27 | 2005-11-30 | Lg.菲利浦Lcd株式会社 | 液晶显示器件及其制造方法 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103901691A (zh) * | 2012-12-26 | 2014-07-02 | 上海天马微电子有限公司 | 液晶显示面板及制造方法 |
CN103901691B (zh) * | 2012-12-26 | 2016-08-17 | 上海天马微电子有限公司 | 液晶显示面板及制造方法 |
WO2016090689A1 (zh) * | 2014-12-12 | 2016-06-16 | 深圳市华星光电技术有限公司 | 一种阵列基板的掺杂方法及制造设备 |
CN105762111A (zh) * | 2016-02-01 | 2016-07-13 | 京东方科技集团股份有限公司 | 显示基板及其制造方法和显示装置 |
CN105762111B (zh) * | 2016-02-01 | 2018-12-18 | 京东方科技集团股份有限公司 | 显示基板及其制造方法和显示装置 |
CN106206623A (zh) * | 2016-09-26 | 2016-12-07 | 京东方科技集团股份有限公司 | 一种显示基板、其制作方法、显示面板及显示装置 |
CN106206623B (zh) * | 2016-09-26 | 2019-03-01 | 京东方科技集团股份有限公司 | 一种显示基板、其制作方法、显示面板及显示装置 |
Also Published As
Publication number | Publication date |
---|---|
US9431436B2 (en) | 2016-08-30 |
CN102034749B (zh) | 2013-09-04 |
US20160336360A1 (en) | 2016-11-17 |
US20110074663A1 (en) | 2011-03-31 |
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Owner name: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY Effective date: 20150626 Owner name: JINGDONGFANG SCIENCE AND TECHNOLOGY GROUP CO., LTD Free format text: FORMER OWNER: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY CO., LTD. Effective date: 20150626 |
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Effective date of registration: 20150626 Address after: 100015 Jiuxianqiao Road, Beijing, No. 10, No. Patentee after: BOE Technology Group Co., Ltd. Patentee after: Beijing BOE Photoelectricity Science & Technology Co., Ltd. Address before: 100176 Beijing economic and Technological Development Zone, West Central Road, No. 8 Patentee before: Beijing BOE Photoelectricity Science & Technology Co., Ltd. |
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CF01 | Termination of patent right due to non-payment of annual fee | ||
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Granted publication date: 20130904 Termination date: 20200925 |