CN101427593B - 单裸片微机电***声学换能器及制造方法 - Google Patents
单裸片微机电***声学换能器及制造方法 Download PDFInfo
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- CN101427593B CN101427593B CN2007800109869A CN200780010986A CN101427593B CN 101427593 B CN101427593 B CN 101427593B CN 2007800109869 A CN2007800109869 A CN 2007800109869A CN 200780010986 A CN200780010986 A CN 200780010986A CN 101427593 B CN101427593 B CN 101427593B
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Images
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/04—Microphones
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/005—Electrostatic transducers using semiconductor materials
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Manufacturing & Machinery (AREA)
- Pressure Sensors (AREA)
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
Abstract
Description
Claims (41)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US78755906P | 2006-03-30 | 2006-03-30 | |
US60/787,559 | 2006-03-30 | ||
PCT/DK2007/000157 WO2007112743A1 (en) | 2006-03-30 | 2007-03-29 | Single die mems acoustic transducer and manufacturing method |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101427593A CN101427593A (zh) | 2009-05-06 |
CN101427593B true CN101427593B (zh) | 2012-09-19 |
Family
ID=37432486
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2007800109869A Expired - Fee Related CN101427593B (zh) | 2006-03-30 | 2007-03-29 | 单裸片微机电***声学换能器及制造方法 |
Country Status (8)
Country | Link |
---|---|
US (1) | US8188557B2 (zh) |
EP (1) | EP2005789B1 (zh) |
JP (1) | JP4966370B2 (zh) |
KR (1) | KR101398667B1 (zh) |
CN (1) | CN101427593B (zh) |
AT (1) | ATE471635T1 (zh) |
DE (1) | DE602007007198D1 (zh) |
WO (1) | WO2007112743A1 (zh) |
Families Citing this family (76)
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GB0605576D0 (en) * | 2006-03-20 | 2006-04-26 | Oligon Ltd | MEMS device |
EP2123112A1 (en) * | 2006-12-15 | 2009-11-25 | The Regents of the University of California | Acoustic substrate |
US20080290494A1 (en) * | 2007-05-21 | 2008-11-27 | Markus Lutz | Backside release and/or encapsulation of microelectromechanical structures and method of manufacturing same |
US8542850B2 (en) | 2007-09-12 | 2013-09-24 | Epcos Pte Ltd | Miniature microphone assembly with hydrophobic surface coating |
SG155795A1 (en) * | 2008-03-19 | 2009-10-29 | Sensfab Pte Ltd | Water resistant ultra-low pressure sensor and method of fabrication of same |
SG158758A1 (en) * | 2008-07-14 | 2010-02-26 | Sensfab Pte Ltd | Extended sensor back volume |
DE102008040597A1 (de) | 2008-07-22 | 2010-01-28 | Robert Bosch Gmbh | Mikromechanisches Bauelement mit Rückvolumen |
US7951636B2 (en) * | 2008-09-22 | 2011-05-31 | Solid State System Co. Ltd. | Method for fabricating micro-electro-mechanical system (MEMS) device |
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DE102009000053A1 (de) * | 2009-01-07 | 2010-07-08 | Robert Bosch Gmbh | Bauelement mit einer mikromechanischen Mikrofonstruktur |
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- 2007-03-29 US US12/295,220 patent/US8188557B2/en active Active
- 2007-03-29 EP EP07711298A patent/EP2005789B1/en active Active
- 2007-03-29 AT AT07711298T patent/ATE471635T1/de not_active IP Right Cessation
- 2007-03-29 KR KR1020087023362A patent/KR101398667B1/ko not_active IP Right Cessation
- 2007-03-29 WO PCT/DK2007/000157 patent/WO2007112743A1/en active Application Filing
- 2007-03-29 JP JP2009501852A patent/JP4966370B2/ja active Active
- 2007-03-29 CN CN2007800109869A patent/CN101427593B/zh not_active Expired - Fee Related
- 2007-03-29 DE DE602007007198T patent/DE602007007198D1/de active Active
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Also Published As
Publication number | Publication date |
---|---|
WO2007112743A1 (en) | 2007-10-11 |
JP4966370B2 (ja) | 2012-07-04 |
ATE471635T1 (de) | 2010-07-15 |
EP2005789A1 (en) | 2008-12-24 |
DE602007007198D1 (de) | 2010-07-29 |
US20090169035A1 (en) | 2009-07-02 |
KR101398667B1 (ko) | 2014-05-27 |
JP2009531884A (ja) | 2009-09-03 |
KR20080109001A (ko) | 2008-12-16 |
EP2005789B1 (en) | 2010-06-16 |
CN101427593A (zh) | 2009-05-06 |
US8188557B2 (en) | 2012-05-29 |
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