SG155795A1 - Water resistant ultra-low pressure sensor and method of fabrication of same - Google Patents

Water resistant ultra-low pressure sensor and method of fabrication of same

Info

Publication number
SG155795A1
SG155795A1 SG200802224-6A SG2008022246A SG155795A1 SG 155795 A1 SG155795 A1 SG 155795A1 SG 2008022246 A SG2008022246 A SG 2008022246A SG 155795 A1 SG155795 A1 SG 155795A1
Authority
SG
Singapore
Prior art keywords
backplate
water resistant
fabrication
diaphragm
pressure sensor
Prior art date
Application number
SG200802224-6A
Inventor
Kok Kitt-Wai
Ong Kok Meng
Karthikeyan Kumaraswamy
Bryan Keith Patmon
Kathirgamasundaram Sooriakumar
Angeline Tee Lay Har
Original Assignee
Sensfab Pte Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sensfab Pte Ltd filed Critical Sensfab Pte Ltd
Priority to SG200802224-6A priority Critical patent/SG155795A1/en
Priority to PCT/SG2009/000099 priority patent/WO2009116957A2/en
Publication of SG155795A1 publication Critical patent/SG155795A1/en

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
    • H04R2201/003—Mems transducers or their use

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Manufacturing & Machinery (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)

Abstract

A sensor including: a backplate of electrically conductive or semi-conductive material, the backplate including a plurality of backplate holes; a diaphragm of electrically conductive or semi-conductive material that is connected to, and insulated from the backplate, the diaphragm defining a flexible member having a top side and a bottom side, and an air gap associated with the flexible member, the flexible member and air gap defined by the diaphragm extending beneath the plurality of backplate holes;a bond pad formed on an area of the backplate surrounding the backplate holes; and a bond pad formed on an area of the diaphragm surrounding the air gap;wherein the bottom side of the flexible layer is provided with a water resistant layer.
SG200802224-6A 2008-03-19 2008-03-19 Water resistant ultra-low pressure sensor and method of fabrication of same SG155795A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
SG200802224-6A SG155795A1 (en) 2008-03-19 2008-03-19 Water resistant ultra-low pressure sensor and method of fabrication of same
PCT/SG2009/000099 WO2009116957A2 (en) 2008-03-19 2009-03-19 Water resistant ultra-low pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SG200802224-6A SG155795A1 (en) 2008-03-19 2008-03-19 Water resistant ultra-low pressure sensor and method of fabrication of same

Publications (1)

Publication Number Publication Date
SG155795A1 true SG155795A1 (en) 2009-10-29

Family

ID=41091431

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200802224-6A SG155795A1 (en) 2008-03-19 2008-03-19 Water resistant ultra-low pressure sensor and method of fabrication of same

Country Status (2)

Country Link
SG (1) SG155795A1 (en)
WO (1) WO2009116957A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITTO20120753A1 (en) * 2012-08-30 2014-03-01 St Microelectronics Srl ENCAPSULATED DEVICE EXPOSED TO AIR, ENVIRONMENT AND LIQUIDS AND RELATIVE PROCESS OF MANUFACTURE
US11467025B2 (en) * 2018-08-17 2022-10-11 Invensense, Inc. Techniques for alternate pressure equalization of a sensor

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10260307B4 (en) * 2002-12-20 2007-02-22 Siemens Audiologische Technik Gmbh Electroacoustic miniature transducer for a hearing aid
US7825484B2 (en) * 2005-04-25 2010-11-02 Analog Devices, Inc. Micromachined microphone and multisensor and method for producing same
ATE471635T1 (en) * 2006-03-30 2010-07-15 Sonion Mems As SINGLE-CHIP ACOUSTIC MEMS TRANSDUCER AND MANUFACTURING METHOD

Also Published As

Publication number Publication date
WO2009116957A2 (en) 2009-09-24
WO2009116957A3 (en) 2012-04-26

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