CN101386368B - 保管库、带保管库的搬运***以及保管库组 - Google Patents

保管库、带保管库的搬运***以及保管库组 Download PDF

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Publication number: CN101386368B
Authority: CN; China
Prior art keywords: safe; shelf; goods; year; face
Prior art date: 2007-09-06
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

CN2008102134768A

Other languages

English (en)

Chinese (zh)

Other versions

CN101386368A (zh

Inventor

村田正直

山路孝

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Murata Machinery Ltd

Original Assignee

ASYST TECHNOLOGIES

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2007-09-06

Filing date

2008-09-08

Publication date

2012-11-28

2007-09-06 Priority claimed from JP2007231868A external-priority patent/JP5470691B2/ja

2007-09-06 Priority claimed from JP2007231870A external-priority patent/JP2009062155A/ja

2008-09-08 Application filed by ASYST TECHNOLOGIES filed Critical ASYST TECHNOLOGIES

2009-03-18 Publication of CN101386368A publication Critical patent/CN101386368A/zh

2012-11-28 Application granted granted Critical

2012-11-28 Publication of CN101386368B publication Critical patent/CN101386368B/zh

Status Expired - Fee Related legal-status Critical Current

2028-09-08 Anticipated expiration legal-status Critical

Links

Images

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Warehouses Or Storage Devices (AREA)
Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

CN2008102134768A 2007-09-06 2008-09-08 保管库、带保管库的搬运***以及保管库组 Expired - Fee Related CN101386368B (zh)

Applications Claiming Priority (9)

Application Number	Priority Date	Filing Date	Title
JP2007-231868		2007-09-06
JP2007231862		2007-09-06
JP2007-231870		2007-09-06
JP2007231868A JP5470691B2 (ja)	2007-09-06	2007-09-06	保管庫及び保管庫付き搬送システム
JP2007-231862		2007-09-06
JP2007231870		2007-09-06
JP2007231862A JP2009062153A (ja)	2007-09-06	2007-09-06	保管庫
JP2007231870A JP2009062155A (ja)	2007-09-06	2007-09-06	保管庫セット及び保管庫付き搬送システム
JP2007231868		2007-09-06

Publications (2)

Publication Number	Publication Date
CN101386368A CN101386368A (zh)	2009-03-18
CN101386368B true CN101386368B (zh)	2012-11-28

Family

ID=40476086

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CN2008102134768A Expired - Fee Related CN101386368B (zh)	2007-09-06	2008-09-08	保管库、带保管库的搬运***以及保管库组

Country Status (2)

Country	Link
JP (1)	JP2009062153A (ja)
CN (1)	CN101386368B (ja)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
TWI461341B (zh) *	2009-03-30	2014-11-21	Ihi Corp	行駛車系統
JP5515443B2 (ja) *	2009-06-17	2014-06-11	村田機械株式会社	保管庫
JP5492935B2 (ja) *	2012-05-15	2014-05-14	あおい精機株式会社	ラック収納装置
US9520313B2 (en)	2012-06-08	2016-12-13	Murata Machinery, Ltd.	Conveyance system and temporary storage method of articles in conveyance system
KR102174332B1 (ko)	2014-07-30	2020-11-04	삼성전자주식회사	반도체 제조 라인의 스토커 및 상기 스토커를 이용하여 웨이퍼를 이송하는 방법
TWI584398B (zh) *	2015-05-29	2017-05-21		Temporary platform automatic correction device and method thereof
JP6460245B2 (ja) *	2015-08-27	2019-01-30	村田機械株式会社	取出装置及び保管装置
JP2020105006A (ja) *	2018-12-28	2020-07-09	株式会社前川製作所	搬入装置、搬入方法、および位置決め機構
CN109969663B (zh) *	2019-03-12	2021-03-02	苏州得尔达国际物流有限公司	一种用于监测的攀爬机器人及其配套货架
CN110654794B (zh) *	2019-09-27	2021-12-03	日本电产新宝(浙江)有限公司	自动搬运车和搬运***
CN111846727B (zh) *	2020-08-05	2024-04-30	中冶赛迪技术研究中心有限公司	一种无人化钢卷库
JP7294309B2 (ja)	2020-12-18	2023-06-20	株式会社ダイフク	物品搬送設備

Citations (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3232455A (en) *	1962-10-31	1966-02-01	Conco Engineering Works Inc	Crane mechanism
JP2000091401A (ja) *	1998-09-09	2000-03-31	Toshiba Corp	カセット搬送システム、半導体露光装置、及びレチクル運搬方法
EP1134641A1 (en) *	2000-03-16	2001-09-19	Applied Materials, Inc.	Apparatus for storing and moving a cassette
JP2002244738A (ja) *	2001-02-15	2002-08-30	Matsushita Electric Ind Co Ltd	物流自動化工場でのキャリア搬送制御方法
JP2004238191A (ja) *	2003-02-10	2004-08-26	Murata Mach Ltd	天井走行車システム
JP2005203498A (ja) *	2004-01-14	2005-07-28	Renesas Technology Corp	ウエハストッカ、半導体装置の搬送システムおよび搬送方法
JP2006049454A (ja) *	2004-08-03	2006-02-16	Asyst Shinko Inc	ストッカ

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP3669057B2 (ja) *	1996-06-03	2005-07-06	アシストシンコー株式会社	ストッカへの搬送システム

2007
- 2007-09-06 JP JP2007231862A patent/JP2009062153A/ja active Pending
2008
- 2008-09-08 CN CN2008102134768A patent/CN101386368B/zh not_active Expired - Fee Related

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3232455A (en) *	1962-10-31	1966-02-01	Conco Engineering Works Inc	Crane mechanism
JP2000091401A (ja) *	1998-09-09	2000-03-31	Toshiba Corp	カセット搬送システム、半導体露光装置、及びレチクル運搬方法
EP1134641A1 (en) *	2000-03-16	2001-09-19	Applied Materials, Inc.	Apparatus for storing and moving a cassette
JP2002244738A (ja) *	2001-02-15	2002-08-30	Matsushita Electric Ind Co Ltd	物流自動化工場でのキャリア搬送制御方法
JP2004238191A (ja) *	2003-02-10	2004-08-26	Murata Mach Ltd	天井走行車システム
JP2005203498A (ja) *	2004-01-14	2005-07-28	Renesas Technology Corp	ウエハストッカ、半導体装置の搬送システムおよび搬送方法
JP2006049454A (ja) *	2004-08-03	2006-02-16	Asyst Shinko Inc	ストッカ

Also Published As

Publication number	Publication date
CN101386368A (zh)	2009-03-18
JP2009062153A (ja)	2009-03-26

Legal Events

Date	Code	Title	Description
2009-03-18	C06	Publication
2009-03-18	PB01	Publication
2010-01-27	ASS	Succession or assignment of patent right	Owner name: MURATA AUTOMATIC MACHINERY CO., LTD. Free format text: FORMER OWNER: JAPAN AXIST TECHNOLOGY CO., LTD. Effective date: 20091225
2010-01-27	C41	Transfer of patent application or patent right or utility model
2010-01-27	TA01	Transfer of patent application right	Effective date of registration: 20091225 Address after: Kyoto Japan Applicant after: Asyst Technologies Address before: Mie, Japan Applicant before: Asyst Technologies Japan Inc.
2010-09-29	C10	Entry into substantive examination
2010-09-29	SE01	Entry into force of request for substantive examination
2012-11-28	C14	Grant of patent or utility model
2012-11-28	GR01	Patent grant
2013-06-12	ASS	Succession or assignment of patent right	Owner name: MURATA MACHINERY CO., LTD. Free format text: FORMER OWNER: ASYST TECHNOLOGIES Effective date: 20130514
2013-06-12	C41	Transfer of patent application or patent right or utility model
2013-06-12	TR01	Transfer of patent right	Effective date of registration: 20130514 Address after: Kyoto Japan Patentee after: Murata Machinery Co., Ltd. Address before: Kyoto Japan Patentee before: Asyst Technologies
2018-08-28	CF01	Termination of patent right due to non-payment of annual fee	Granted publication date: 20121128 Termination date: 20170908
2018-08-28	CF01	Termination of patent right due to non-payment of annual fee

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