CN101151197B - 自动材料处理*** - Google Patents
自动材料处理*** Download PDFInfo
- Publication number
- CN101151197B CN101151197B CN2006800103745A CN200680010374A CN101151197B CN 101151197 B CN101151197 B CN 101151197B CN 2006800103745 A CN2006800103745 A CN 2006800103745A CN 200680010374 A CN200680010374 A CN 200680010374A CN 101151197 B CN101151197 B CN 101151197B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67294—Apparatus for monitoring, sorting or marking using identification means, e.g. labels on substrates or labels on containers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0407—Storage devices mechanical using stacker cranes
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
- G06Q10/00—Administration; Management
- G06Q10/06—Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67736—Loading to or unloading from a conveyor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67775—Docking arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Business, Economics & Management (AREA)
- Human Resources & Organizations (AREA)
- Strategic Management (AREA)
- Economics (AREA)
- Entrepreneurship & Innovation (AREA)
- Quality & Reliability (AREA)
- General Business, Economics & Management (AREA)
- Game Theory and Decision Science (AREA)
- Marketing (AREA)
- Operations Research (AREA)
- Educational Administration (AREA)
- Tourism & Hospitality (AREA)
- Development Economics (AREA)
- Theoretical Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- General Factory Administration (AREA)
- Warehouses Or Storage Devices (AREA)
- Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
Abstract
Description
Claims (5)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005091673A JP4915051B2 (ja) | 2005-03-28 | 2005-03-28 | 自動搬送システム |
JP091673/2005 | 2005-03-28 | ||
PCT/JP2006/306194 WO2006104115A1 (ja) | 2005-03-28 | 2006-03-27 | 自動搬送システム |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101151197A CN101151197A (zh) | 2008-03-26 |
CN101151197B true CN101151197B (zh) | 2011-05-11 |
Family
ID=37053371
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2006800103745A Active CN101151197B (zh) | 2005-03-28 | 2006-03-27 | 自动材料处理*** |
Country Status (6)
Country | Link |
---|---|
US (1) | US7917245B2 (zh) |
JP (1) | JP4915051B2 (zh) |
KR (1) | KR20080009092A (zh) |
CN (1) | CN101151197B (zh) |
TW (1) | TWI355360B (zh) |
WO (1) | WO2006104115A1 (zh) |
Families Citing this family (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101707925B1 (ko) * | 2006-08-18 | 2017-02-17 | 브룩스 오토메이션 인코퍼레이티드 | 용량이 축소된 캐리어, 이송, 로드 포트, 버퍼 시스템 |
JP4193186B2 (ja) * | 2006-11-02 | 2008-12-10 | 村田機械株式会社 | 天井走行車 |
JP4378655B2 (ja) * | 2007-03-07 | 2009-12-09 | 株式会社ダイフク | 物品処理設備 |
JP5088468B2 (ja) * | 2007-03-09 | 2012-12-05 | 村田機械株式会社 | 懸垂式搬送台車を用いた搬送システム |
JP2009051623A (ja) * | 2007-08-27 | 2009-03-12 | Asyst Technologies Japan Inc | 搬送システム |
JP4887332B2 (ja) * | 2007-09-20 | 2012-02-29 | 東京エレクトロン株式会社 | 基板の処理装置 |
US8043039B2 (en) | 2007-09-20 | 2011-10-25 | Tokyo Electron Limited | Substrate treatment apparatus |
JP2009093281A (ja) * | 2007-10-04 | 2009-04-30 | Hitachi Global Storage Technologies Netherlands Bv | 搬送制御方法及び搬送制御システム |
EP2051189A1 (en) * | 2007-10-18 | 2009-04-22 | Siemens Aktiengesellschaft | Device for electronic identification of items |
US7992734B2 (en) * | 2008-01-11 | 2011-08-09 | International Business Machines Corporation | Semiconductor automation buffer storage identification system and method |
JP5062485B2 (ja) * | 2008-04-09 | 2012-10-31 | 株式会社ダイフク | 物品搬送設備 |
US8185242B2 (en) * | 2008-05-07 | 2012-05-22 | Lam Research Corporation | Dynamic alignment of wafers using compensation values obtained through a series of wafer movements |
US9048274B2 (en) * | 2008-12-08 | 2015-06-02 | Taiwan Semiconductor Manufacturing Co., Ltd. | Portable stocker and method of using same |
JP5573054B2 (ja) * | 2009-09-08 | 2014-08-20 | 株式会社ニコン | 基板処理方法、基板処理装置、及びデバイスの製造方法 |
JP5435584B2 (ja) * | 2010-07-15 | 2014-03-05 | 信越ポリマー株式会社 | 基板収納容器 |
CN102018277B (zh) * | 2010-11-04 | 2013-03-20 | 昆明昆船物流信息产业有限公司 | 一种纸箱烟包自动化高架醇化库 |
JP6044059B2 (ja) | 2011-09-16 | 2016-12-14 | 富士ゼロックス株式会社 | 物体情報管理システム及びプログラム。 |
US20130123966A1 (en) * | 2011-11-14 | 2013-05-16 | Shenzhen China Star Optoelectronics Technology Co., Ltd. | Spatial three-dimensional inline handling system |
JP6100484B2 (ja) * | 2012-08-09 | 2017-03-22 | リンテック株式会社 | 搬送装置および搬送方法 |
US8881297B2 (en) | 2012-09-06 | 2014-11-04 | Brooks Automation, Inc. | Access arbitration module and system for semiconductor fabrication equipment and methods for using and operating the same |
TWI560125B (en) * | 2013-10-15 | 2016-12-01 | Inotera Memories Inc | Overhead hoist transport system |
IL230866A0 (en) * | 2014-02-06 | 2014-09-30 | Dan Yehuda Schlesinger | Device for surface transportation |
US9852934B2 (en) * | 2014-02-14 | 2017-12-26 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor wafer transportation |
JP6287657B2 (ja) * | 2014-07-16 | 2018-03-07 | 株式会社ダイフク | 物品搬送設備 |
KR102174332B1 (ko) | 2014-07-30 | 2020-11-04 | 삼성전자주식회사 | 반도체 제조 라인의 스토커 및 상기 스토커를 이용하여 웨이퍼를 이송하는 방법 |
KR101616706B1 (ko) * | 2014-11-14 | 2016-05-13 | 오학서 | 자동 반송 시스템용 rf 통신 시스템 및 방법 |
JP6477439B2 (ja) * | 2015-11-17 | 2019-03-06 | 株式会社ダイフク | 物品搬送設備 |
CN108257900A (zh) * | 2016-12-28 | 2018-07-06 | 惠特科技股份有限公司 | 半导体制程输送***及方法 |
US11069549B2 (en) | 2017-08-16 | 2021-07-20 | Murata Machinery, Ltd. | Overhead transport vehicle, overhead transport system, and control method for overhead transport vehicle |
KR101936296B1 (ko) * | 2017-12-14 | 2019-04-03 | 오학서 | 자동 반송 시스템에서 무인 이송 장치와 설비간의 rf 통신 방법 |
US10947049B2 (en) | 2018-04-06 | 2021-03-16 | Sst Systems, Inc. | Conveyor system with automated carriers |
JP7331484B2 (ja) * | 2019-06-19 | 2023-08-23 | オムロン株式会社 | 搬送制御システム、搬送制御方法、および制御プログラム。 |
US11295973B2 (en) * | 2020-02-11 | 2022-04-05 | Taiwan Semiconductor Manufacturing Company, Ltd. | Apparatus and method for automated wafer carrier handling |
CN113539879B (zh) * | 2020-04-21 | 2023-12-12 | 长鑫存储技术有限公司 | 半导体制造过程中的故障监测***及方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5828322A (en) * | 1995-05-06 | 1998-10-27 | Eberhard; Hans Joachim | System for controlling delivery and return of printed matter |
CN1224237A (zh) * | 1998-01-23 | 1999-07-28 | 日本电气株式会社 | 工件传送方法及*** |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0784245B2 (ja) * | 1988-07-12 | 1995-09-13 | 富士電機株式会社 | 物流設備 |
JPH09283595A (ja) | 1996-04-17 | 1997-10-31 | Shinko Electric Co Ltd | クリーンルームにおける物品搬送管理方法及び物品搬送処理システム |
JP2000255714A (ja) * | 1999-03-08 | 2000-09-19 | Toshiba Corp | 物品管理システム |
JP2002182743A (ja) * | 2000-12-11 | 2002-06-26 | Murata Mach Ltd | Idリーダーを搭載した搬送車システム及びid情報相違時の復旧方法 |
JP2003076422A (ja) * | 2001-09-04 | 2003-03-14 | Nippon Yusoki Co Ltd | 荷役システム |
JP4470576B2 (ja) | 2003-05-20 | 2010-06-02 | ムラテックオートメーション株式会社 | 搬送システム |
-
2005
- 2005-03-28 JP JP2005091673A patent/JP4915051B2/ja active Active
-
2006
- 2006-03-27 CN CN2006800103745A patent/CN101151197B/zh active Active
- 2006-03-27 US US11/887,278 patent/US7917245B2/en active Active
- 2006-03-27 WO PCT/JP2006/306194 patent/WO2006104115A1/ja active Application Filing
- 2006-03-27 KR KR1020077024603A patent/KR20080009092A/ko not_active Application Discontinuation
- 2006-03-28 TW TW095110624A patent/TWI355360B/zh active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5828322A (en) * | 1995-05-06 | 1998-10-27 | Eberhard; Hans Joachim | System for controlling delivery and return of printed matter |
CN1224237A (zh) * | 1998-01-23 | 1999-07-28 | 日本电气株式会社 | 工件传送方法及*** |
Also Published As
Publication number | Publication date |
---|---|
KR20080009092A (ko) | 2008-01-24 |
US20090276082A1 (en) | 2009-11-05 |
TW200704573A (en) | 2007-02-01 |
US7917245B2 (en) | 2011-03-29 |
TWI355360B (en) | 2012-01-01 |
WO2006104115A1 (ja) | 2006-10-05 |
JP4915051B2 (ja) | 2012-04-11 |
CN101151197A (zh) | 2008-03-26 |
JP2006273457A (ja) | 2006-10-12 |
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Legal Events
Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: MURATA MACHINE CO., LTD. Free format text: FORMER OWNER: ASYST SCIENCE AND TECHNOLOGY CO., LTD. Effective date: 20091211 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20091211 Address after: Kyoto City Applicant after: Murata Machinery Co., Ltd. Address before: Mie, Japan Applicant before: Asyst Shinko Inc. |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: MURATA MACHINERY CO., LTD. Free format text: FORMER OWNER: ASYST TECHNOLOGIES Effective date: 20130516 |
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C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20130516 Address after: Kyoto Japan Patentee after: Murata Machinery Co., Ltd. Address before: Kyoto City Patentee before: Asyst Technologies |