AU2017100332A4 - Method of pumping in a system of vacuum pumps and system of vacuum pumps - Google Patents

Method of pumping in a system of vacuum pumps and system of vacuum pumps Download PDF

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Publication number
AU2017100332A4
AU2017100332A4 AU2017100332A AU2017100332A AU2017100332A4 AU 2017100332 A4 AU2017100332 A4 AU 2017100332A4 AU 2017100332 A AU2017100332 A AU 2017100332A AU 2017100332 A AU2017100332 A AU 2017100332A AU 2017100332 A4 AU2017100332 A4 AU 2017100332A4
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Prior art keywords
rotary vane
vacuum pump
lubricated rotary
vane vacuum
auxiliary
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AU2017100332A
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Théodore ILTCHEV
Jean Eric LARCHER
Didier MÜLLER
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Ateliers Busch SA
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Ateliers Busch SA
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2/00—Rotary-piston machines or pumps
    • F04C2/30—Rotary-piston machines or pumps having the characteristics covered by two or more groups F04C2/02, F04C2/08, F04C2/22, F04C2/24 or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C2/34—Rotary-piston machines or pumps having the characteristics covered by two or more groups F04C2/02, F04C2/08, F04C2/22, F04C2/24 or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in groups F04C2/08 or F04C2/22 and relative reciprocation between the co-operating members
    • F04C2/344—Rotary-piston machines or pumps having the characteristics covered by two or more groups F04C2/02, F04C2/08, F04C2/22, F04C2/24 or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in groups F04C2/08 or F04C2/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/0085—Prime movers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F04C29/026—Lubricant separation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F04C29/124—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps
    • F04C29/126—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps of the non-return type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/30—Casings or housings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/18—Pressure
    • F04C2270/185—Controlled or regulated

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

Abstract The present invention relates to a pumping method in a pumping system (SP, SPP) comprising: a main lubricated rotary vane vacuum pump (3) with a gas inlet port (2) connected to a vacuum chamber (1) and a gas outlet 5 port (4) leading into a conduit (5) before coming out into the gas outlet (8) of the pumping system (SP, SPP), a non-return valve (6) positioned in the conduit (5) between the gas outlet port (4) and the gas outlet (8), and an auxiliary lubricated rotary vane vacuum pump (7) connected in parallel to the non-return valve (6). According to this method, the main lubricated rotary vane vacuum 10 pump (3) is activated in order to pump the gases contained in the vacuum chamber (1) through the gas outlet port (4), simultaneously the auxiliary lubricated rotary vane vacuum pump (7) is activated and continues to operate all the while that the main lubricated rotary vane vacuum pump (3) pumps the gases contained in the vacuum chamber (1) and/or all the while that the main 15 lubricated rotary vane vacuum pump (3) maintains a defined pressure in the vacuum chamber (1). The present invention also relates to a pumping system (SP, SPP) able to be used to implement this method. (Figure 1) sPP FIG. 2 7 12

Description

2017100332 22 Mar 2017 1
Method of pumping in a system of vacuum pumps and system of vacuum pumps
The present application is a divisional application from Australian Patent Application No. 2014398770 filed 27 June 2014, the entire contents of which is 5 incorporated herein by reference.
Technical field of the invention
The present invention relates to a pumping method making it possible to reduce the consumption of electrical energy as well as increase the performance in terms of flow rate and final vacuum in a pumping system in io which the main pump is a lubricated rotary vane vacuum pump. The invention likewise relates to a system of vacuum pumps which can be used to achieve the method according to the present invention.
Prior art
The general tendencies to increase the performance of vacuum is pumps, to reduce the costs of installations and the consumption of energy in industries have brought significant developments in terms of performance, energy economy, bulkiness, in the drives, etc.
The state of the art shows that to improve the final vacuum and to reduce the consumption of energy supplementary stages must be added in 20 vacuum pumps of the multi-stage Roots or multi-stage claw type. For screw vacuum pumps there must be additional turns of the screw and/or the rate of internal compression must be increased. For lubricated rotary vane vacuum pumps typically one or more supplementary stages must also be added in series in order to increase the rate of internal compression. 25 The state of the art concerning the systems of vacuum pumps which aim to improve the final vacuum and to increase the flow rate show booster pumps of Roots type arranged upstream from main lubricated rotary vane pumps. This type of systems is bulky, operates either with by-pass valves 2017100332 22 Mar 2017 2 presenting problems of reliability or by employing means of measurement, control, adjustment or servo-control. However, these means of control, adjustment or servo-control must be controlled in an active way, which necessarily results in an increase in the number of components of the system, 5 its complexity and its cost.
The following discussion of the background to the invention is intended to facilitate an understanding of the invention. However, it should be appreciated that the discussion is not an acknowledgement or admission that any aspect of the discussion was part of the common general knowledge as at io the priority date of the application.
Where the terms “comprise”, “comprises”, “comprised” or “comprising” are used in this specification (including the claims) they are to be interpreted as specifying the presence of the stated features, integers, steps or components, but not precluding the presence of one or more other features, is integers, steps or components, or group thereto.
Summary of invention
The present invention aims to propose a pumping method in a system of vacuum pumps making it possible to reduce the electrical energy necessary for putting a chamber under vacuum and for maintaining it, as well as 20 to reduce the temperature of the exit gas.
The present invention also aims to propose a pumping method in a system of vacuum pumps making it possible to obtain a higher flow rate at low pressure than that which can be obtained with the aid of a single lubricated rotary vane vacuum pump during the pumping of a vacuum chamber. 25 The present invention likewise aims to propose a pumping method in a system of vacuum pumps making it possible to obtain a better vacuum than that which can be obtained with the aid of a single lubricated rotary vane vacuum pump during the pumping of a vacuum chamber. 2017100332 22 Mar 2017 3
The present invention provides a pumping method which is achieved within the framework of a system of vacuum pumps, the configuration of which consists essentially of a main lubricated rotary vane vacuum pump equipped with a gas inlet port connected to a vacuum chamber and with a gas outlet port 5 leading into a conduit which is equipped with a non-return valve before coming out into the atmosphere or into other apparatuses. The suction end of an auxiliary lubricated rotary vane vacuum pump is connected in parallel to this non-return valve, its exit going into the atmosphere or rejoining the conduit of the main pump after the non-return valve. io The method according to the present invention can consist of making an auxiliary lubricated rotary vane vacuum pump operate continuously all the while that the main lubricated rotary vane vacuum pump pumps the gases contained in the vacuum chamber through the gas inlet port, but also all the while that the main lubricated rotary vane vacuum pump maintains a defined is pressure (for example the final vacuum) in the chamber by discharging the gases rising through its outlet.
In an aspect of the present invention, there is provided a pumping method in a system of vacuum pumps comprising a main lubricated rotary vane vacuum pump with a gas inlet port connected to a vacuum chamber and a gas 20 outlet port leading into a conduit before coming out into the gas outlet of the system of vacuum pumps, a non-return valve positioned in the conduit between the gas outlet port and the gas outlet, and an auxiliary lubricated rotary vane vacuum pump connected in parallel to the non-return valve, wherein the main lubricated rotary vane vacuum pump is activated in order to pump the gases 25 contained in the vacuum chamber through the gas outlet port; simultaneously the auxiliary lubricated rotary vane vacuum pump is activated; and the auxiliary lubricated rotary vane vacuum pump continues to operate all the while that the main lubricated rotary vane vacuum pump pumps the gases contained in the vacuum chamber and/or all the while that the main lubricated rotary vane 30 vacuum pump maintains a defined pressure in the vacuum chamber.
In a further aspect of the present invention, there is provided System of vacuum pumps comprising a main lubricated rotary vane vacuum pump with 2017100332 22 Mar 2017 4 a gas inlet port connected to a vacuum chamber and a gas outlet port leading into a conduit before coming out into the gas outlet of the system of vacuum pumps, a non-return valve positioned in the conduit between the gas outlet port and the gas outlet, and an auxiliary lubricated rotary vane vacuum pump 5 connected in parallel to the non-return valve, the system of vacuum wherein the auxiliary lubricated rotary vane vacuum pump is arranged to be able to be activated all the while that the main lubricated rotary vane vacuum pump pumps the gases contained in the vacuum chamber and/or all the while that the main lubricated rotary vane vacuum pump maintains a defined pressure in the io vacuum chamber.
According to a first variant, the invention can reside in the fact that the coupling of the main lubricated rotary vane vacuum pump and of the auxiliary lubricated rotary vane vacuum pump does not require measurements and specific devices (for example sensors for pressure, temperature, current, is etc.), servo-controls or data management and calculation. Consequently, the pumping system suitable for implementing the pumping method according to the present invention comprises a minimal number of components, has great simplicity and is far less expensive than the existing systems.
According to a second variant of the method of the present invention, 20 to meet specific requirements, the start-up of the auxiliary lubricated rotary vane vacuum pump can be controlled in an "all or nothing" way. The controlling consists in checking one or more parameters and following certain rules in putting into operation the auxiliary lubricated rotary vane vacuum pump or stopping it, depending upon certain predefined rules. The parameters, provided 25 by suitable sensors, are, for example, the motor current of the main lubricated rotary vane vacuum pump, the temperature or the pressure of the gases in the space of the exit conduit of the main lubricated rotary vane vacuum pump, limited by the non-return valve, or a combination of these parameters.
The dimensioning of the auxiliary lubricated rotary vane vacuum 30 pump is determined by the minimal consumption of energy of its motor. It is normally single-staged. Its nominal flow rate is selected as a function of the flow rate of the main lubricated rotary vane vacuum pump but also by taking into 2017100332 22 Mar 2017 5 account the size of the space of the exit conduit of the main lubricated rotary vane vacuum pump, limited by the non-return valve. This flow rate can be 1/500 to 1/5 of the nominal flow rate of the main lubricated rotary vane vacuum pump, but can also be less or greater than these values. 5 The non-return valve, placed in the conduit at the outlet of the main lubricated rotary vane vacuum pump, can be a commercially available standard element. It is dimensioned according to the nominal flow rate of the main lubricated rotary vane vacuum pump. In particular, it is foreseen that the nonreturn valve closes when the pressure at the suction end of the main lubricated io rotary vane vacuum pump is between 500 mbar absolute and the final vacuum (for example 400 mbar).
According to another variant, the main lubricated rotary vane vacuum pump is multi-staged.
According to another variant, the auxiliary lubricated rotary vane is vacuum pump is multi-staged.
The auxiliary lubricated rotary vane vacuum pump is preferably of small size.
According to another variant, the auxiliary lubricated rotary vane vacuum pump discharges the gases into the oil separator of the main lubricated 20 rotary vane vacuum pump.
According to still another variant, the auxiliary lubricated rotary vane vacuum pump is integrated in the oil separator of the main lubricated rotary vane vacuum pump.
Starting with a cycle of evacuation of the chamber, the pressure 25 there is elevated, for example equal to the atmospheric pressure. Given the compression in the main lubricated rotary vane vacuum pump, the pressure of the gases discharged at its outlet is higher than the atmospheric pressure (if the gases at the outlet of the main pump are discharged directly into the 2017100332 22 Mar 2017 6 atmosphere) or higher than the pressure at the inlet of another apparatus connected downstream. This causes the opening of the non-return valve.
When this non-return valve is open, the action of the auxiliary lubricated rotary vane vacuum pump on the parameters of operation of the main 5 lubricated rotary vane vacuum pump is felt very slightly. In contrast, when the non-return valve closes at a certain pressure (because the pressure in the chamber has dropped in the meantime), the action of the auxiliary lubricated rotary vane vacuum pump brings about a progressive reduction of the difference in pressure between the chamber and the conduit after the valve. io The pressure at the outlet of the main lubricated rotary vane vacuum pump becomes that at the inlet of the small auxiliary lubricated rotary vane vacuum pump, that at its outlet being always the pressure in the conduit after the nonreturn valve. The more the auxiliary lubricated rotary vane vacuum pump pumps, the more the pressure drops at the outlet of the main lubricated rotary is vane vacuum pump, in the closed space, limited by the non-return valve, and consequently the difference in pressure between the chamber and the outlet of the main lubricated rotary vane vacuum pump decreases.
This difference makes the internal leaks more minimal in the main lubricated rotary vane vacuum pump and causes a bigger reduction of the 20 pressure in the chamber, which improves the final vacuum. In addition, the main lubricated rotary vane vacuum pump consumes less and less energy for the compression and produces less and less compression heat.
In the case of controlling of the auxiliary lubricated rotary vane vacuum pump, there exists an initial position for start-up of the pumping system 25 when the sensors are in a defined state or give initial values. As the main lubricated rotary vane vacuum pump pumps the gases of the vacuum chamber, the parameters such as the current of its motor, the temperature and the pressure of the gases in the space of the exit conduit begin to change and reach threshold values detected by the sensors. This causes the switching on of 30 the small auxiliary lubricated rotary vane vacuum pump. When these parameters return to the initial ranges (outside the set values) with a time lag, the auxiliary lubricated rotary vane vacuum pump is stopped. 2017100332 22 Mar 2017 7
On the other hand, it is also evident that the study of the mechanical concept seeks to reduce the space between the gas outlet port of the main lubricated rotary vane vacuum pump and the non-return valve with the aim of being able to reduce the pressure there more quickly. 5 Brief description of drawings
The features and the advantages of the present invention will appear with more details within the context of the description which follows with example embodiments given by way of illustration and in a non-limiting way with reference to the attached drawings: io - Figure 1 represents in a diagrammatic way a system of vacuum pumps suitable for implementation of a pumping method according to a first embodiment of the present invention; - Figure 2 represents in a diagrammatic way a system of vacuum pumps suitable for implementation of a pumping method according to a second is embodiment of the present invention.
Detailed description of embodiments of the invention
Figure 1 represents a pumping system SP suitable for implementing a pumping method according to a first embodiment of the present invention.
This system of vacuum pumps SP comprises a chamber 1, which is 20 connected to the suction port 2 of a main lubricated rotary vane vacuum pump 3. The gas outlet port of the main lubricated rotary vane vacuum pump 3 is connected to a conduit 5. A non-return discharge valve 6 is placed in the conduit 5, which after this non-return valve continues into a gas exit conduit 8. The non-return valve 6, when it is closed, allows the formation of a space 4, 25 contained between the gas outlet port of the main vacuum pump 3 and itself.
The system of vacuum pumps SP also comprises an auxiliary lubricated rotary vane vacuum pump 7, connected in parallel to the non-return 2017100332 22 Mar 2017 8 valve 6. The suction port 9 of the auxiliary lubricated rotary vane vacuum pump 7 is connected to the space 4 of the conduit 5, and its discharge port 10 is connected to the conduit 8.
From the start of the main lubricated rotary vane vacuum pump 3, the 5 auxiliary lubricated rotary vane vacuum pump 7 is also started up. The main lubricated rotary vane vacuum pump 3 suctions the gases in the chamber 1 through the port 2 connected at its inlet and compresses them to discharge them afterwards at its outlet in the conduit 5 and then through the non-return valve 6. When the closure pressure for the non-return valve 6 is reached, it io closes. Starting from this moment the pumping of the auxiliary lubricated rotary vane vacuum pump 7 makes the pressure in the space 4 decrease progressively to its limit pressure. In parallel, the power consumed by the main lubricated rotary vane vacuum pump 3 decreases progressively. This takes place in a short time period, for example for a certain cycle in 5 to 10 seconds. is With a clever adjustment of the flow rate of the auxiliary lubricated rotary vane vacuum pump 7 and of the closure pressure of the non-return valve 6 as a function of the flow rate of the main lubricated rotary vane vacuum pump 3 and the space of the chamber 1, it is moreover possible to reduce the time before the closure of the non-return valve 6 with respect to the duration of the 20 evacuation cycle and thus reduce the electrical energy of the motor of the auxiliary lubricated rotary vane vacuum pump 7 during the time before the closure of the non-return valve 6. On the other hand, the advantage of simplicity gives an excellent reliability to the system as well as a lower price in comparison with similar pumps equipped with programmable automatic control 25 and/or speed controller, controlled valves, sensors, etc.
Figure 2 represents a system of vacuum pumps SP suitable for implementation of a pumping method according to a second embodiment of the present invention.
With respect to the system shown in Figure 1, the system 30 represented in Figure 2 represents the "controlled" pumping system SPP, which further comprises suitable sensors 11, 12, 13 which control either the motor 2017100332 22 Mar 2017 9 current (sensor 11) of the main lubricated rotary vane vacuum pump 3, or the pressure (sensor 13) of the gases in the space of the exit conduit of the main lubricated rotary vane vacuum pump, limited by the non-return valve 6, or the temperature (sensor 12) of the gases in the space of the exit conduit of the 5 main lubricated rotary vane vacuum pump, limited by the non-return valve 6, or a combination of these parameters.
In effect, when the main lubricated rotary vane vacuum pump 3 starts to pump the gases of the vacuum chamber 1, the parameters, such as the current of its motor, the temperature and the pressure of the gases in the space io of the exit conduit 4, begin to change and reach threshold values detected by the sensors. For the current of the motor, the threshold value can be a percentage of the maximum value measured during an evacuation cycle without activation of the auxiliary vacuum pump (for example 75%). For the temperature of the gases, measured at a place well defined in the space of the exit conduit is 4, the threshold value can be a percentage (for example 80%) of the maximum value measured during an evacuation cycle without activation of the auxiliary vacuum pump. For the pressure of the gases, the threshold value (for example 100 mbar) is defined as a function in relation to the flow rates of the two pumps, the main one and the auxiliary one. After suitable time lags, specific to each 20 parameter, the activation of the auxiliary lubricated rotary vane vacuum pump 7 is triggered. When these parameters return to the initial ranges (outside the set values), with suitable time lags, specific to each parameter, the auxiliary lubricated rotary vane vacuum pump 7 is stopped.
Certainly the present invention is subject to numerous variations 25 regarding its implementation. Although diverse embodiments have been described, it is well understood that it is not conceivable to identify in an exhaustive way all the possible embodiments. Of course replacing a described means with an equivalent means can be envisaged without departing from the scope of the present invention. All these modifications form part of the common 30 knowledge of one skilled in the art in the field of vacuum technology

Claims (18)

  1. Claims
    1. Pumping method in a system of vacuum pumps comprising: - a main lubricated rotary vane vacuum pump with a gas inlet port connected to a vacuum chamber and a gas outlet port leading into a conduit before coming out into the gas outlet of the system of vacuum pumps, - a non-return valve positioned in the conduit between the gas outlet port and the gas outlet, and - an auxiliary lubricated rotary vane vacuum pump connected in parallel to the non-return valve, wherein the main lubricated rotary vane vacuum pump is activated in order to pump the gases contained in the vacuum chamber through the gas outlet port; simultaneously the auxiliary lubricated rotary vane vacuum pump is activated; and the auxiliary lubricated rotary vane vacuum pump continues to operate all the while that the main lubricated rotary vane vacuum pump pumps the gases contained in the vacuum chamber and/or all the while that the main lubricated rotary vane vacuum pump maintains a defined pressure in the vacuum chamber.
  2. 2. Pumping method according to claim 1, wherein the outlet of the auxiliary lubricated rotary vane vacuum pump rejoins the gas outlet after the nonreturn valve.
  3. 3. Pumping method according to claim 1 or 2, wherein the auxiliary lubricated rotary vane vacuum pump is dimensioned so as to have a minimal consumption of energy by its motor.
  4. 4. Pumping method according to any one of the claims 1 to 3, wherein the nominal flow rate of the auxiliary lubricated rotary vane vacuum pump is selected as a function of the volume of the exit conduit of the main lubricated rotary vane vacuum pump which is limited by the non-return valve.
  5. 5. Pumping method according to claim 4, wherein the flow rate of the auxiliary lubricated rotary vane vacuum pump is from 1/500 to 1/5 of the nominal flow rate of the main lubricated rotary vane vacuum pump.
  6. 6. Pumping method according to any one of the claims 1 to 5, wherein the auxiliary lubricated rotary vane vacuum pump is single-staged or multi-staged.
  7. 7. Pumping method according to any one of the claims 1 to 6, wherein the non-return valve closes when the pressure at the suction end of the main lubricated rotary vane vacuum pump is between 500 mbar absolute and the final vacuum.
  8. 8. Pumping method according to any one of the claims 1 to 7, wherein the auxiliary lubricated rotary vane vacuum pump discharges the gases into the oil separator of the main lubricated rotary vane vacuum pump.
  9. 9. Pumping method according to any one of the claims 1 to 8, the auxiliary lubricated rotary vane vacuum pump is integrated in the oil separator of the main lubricated rotary vane vacuum pump.
  10. 10. System of vacuum pumps comprising: - a main lubricated rotary vane vacuum pump with a gas inlet port connected to a vacuum chamber and a gas outlet port leading into a conduit before coming out into the gas outlet of the system of vacuum pumps, - a non-return valve positioned in the conduit between the gas outlet port and the gas outlet, and - an auxiliary lubricated rotary vane vacuum pump connected in parallel to the non-return valve, the system of vacuum wherein the auxiliary lubricated rotary vane vacuum pump is arranged to be able to be activated all the while that the main lubricated rotary vane vacuum pump pumps the gases contained in the vacuum chamber and/or all the while that the main lubricated rotary vane vacuum pump maintains a defined pressure in the vacuum chamber.
  11. 11. System of vacuum pumps according to claim 10 wherein the outlet of the auxiliary lubricated rotary vane vacuum pump rejoins the gas outlet after the nonreturn valve.
  12. 12. System of vacuum pumps according to claim 10 or 11, characterized in that the auxiliary lubricated rotary vane vacuum pump is dimensioned so as to have a minimal consumption of energy by its motor.
  13. 13. System of vacuum pumps according to any one of the claims 10 to 12, wherein the nominal flow rate of the auxiliary lubricated rotary vane vacuum pump is selected as a function of the volume of the exit conduit of the main lubricated rotary vane vacuum pump which is limited by the non-return valve.
  14. 14. System of vacuum pumps according to claim 13, wherein the flow rate of the auxiliary lubricated rotary vane vacuum pump is from 1/500 to 1/5 of the nominal flow rate of the main lubricated rotary vane vacuum pump.
  15. 15. System of vacuum pumps according to any one of the claims 10 to 14, wherein the auxiliary lubricated rotary vane vacuum pump is single-staged or multi-staged.
  16. 16. System of vacuum pumps according to any one of the claims 10 to 15, wherein the non-return valve closes when the pressure at the suction end of the main lubricated rotary vane vacuum pump is between 500 mbar absolute and the final vacuum.
  17. 17. System of vacuum pumps according to any one of the claims 10 to 16, wherein the auxiliary lubricated rotary vane vacuum pump discharges the gases into the oil separator of the main lubricated rotary vane vacuum pump.
  18. 18. System of vacuum pumps according to any one of the claims 10 to 17, wherein the auxiliary lubricated rotary vane vacuum pump is integrated in the oil separator of the main lubricated rotary vane vacuum pump.
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