JPS62233492A - Oil rotating vacuum pump - Google Patents
Oil rotating vacuum pumpInfo
- Publication number
- JPS62233492A JPS62233492A JP7460186A JP7460186A JPS62233492A JP S62233492 A JPS62233492 A JP S62233492A JP 7460186 A JP7460186 A JP 7460186A JP 7460186 A JP7460186 A JP 7460186A JP S62233492 A JPS62233492 A JP S62233492A
- Authority
- JP
- Japan
- Prior art keywords
- pump
- vacuum
- pump body
- exhaust
- stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000006835 compression Effects 0.000 description 10
- 238000007906 compression Methods 0.000 description 10
- 230000009977 dual effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000001020 rhythmical effect Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
- F04C28/26—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves using bypass channels
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/10—Vacuum
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は、真空機器を用いる各種の分野で広く利用＋Ｔ
ｊ能な二連式の油回転真空ポンプに関するものである。[Detailed Description of the Invention] [Industrial Application Field] The present invention can be widely used in various fields using vacuum equipment.
This invention relates to a dual-barreled oil rotary vacuum pump.
Ｌ従来の技＆］
例えば、１Ｏ−５程度の到達真空度を達成する必要があ
る場合には、二連式の油回転真空ポンプを使用するのが
一般的である。L Conventional Techniques &] For example, when it is necessary to achieve an ultimate vacuum of about 1O-5, it is common to use a dual oil rotary vacuum pump.
しかして、従来の二連式油回転真空ポンプは。However, the conventional double-barreled oil rotary vacuum pump.
ベーン付の回転子をケーシング内の偏心位とに収容して
なる前段側ポンプ本体と、これと同じ構造に有した後段
側ポンプ本体とを油槽内に律動運転ｉｉ１能に収容し、
＋ｉｉｉ段側ポンプ本体の排気ポートと後段側ポンプ
本体の吸気ポートとを中間排気弁を有した中間排気経路
を介してｉ！１通させている。そして、前段側ポンプ本
体の吸気ポートを真空チャンバ等に接続される吸気管に
連通させるとともに、前記中間排気弁と、ｖｋＣ＋側ポ
ンプ本体の排気ポート部分に設けた後段排気弁とを油槽
内の空間を介して排気口に連通させてなる。A front-stage pump body having a rotor with vanes housed eccentrically within a casing and a rear-stage pump body having the same structure are housed in an oil tank for rhythmic operation,
The i! I have sent one. Then, the intake port of the front-stage pump body is communicated with the intake pipe connected to a vacuum chamber, etc., and the intermediate exhaust valve and the rear-stage exhaust valve provided at the exhaust port part of the vkC+ side pump body are connected to the space in the oil tank. It communicates with the exhaust port through.
このような二連式油回転α空ポンプは、前段側ポンプ本
体の理論圧縮動力と、後段側ポンプ本体の理論圧縮動力
との総和が最小になるように設計するのが常識になって
いる。その結果、ｔｎｉｎ側段ンプ本体と後段側ポンプ
本体との排気容積比がｌ＝１〜５：１程度に決定される
のが一般的である。It is common knowledge that such dual oil rotary α-air pumps are designed so that the sum of the theoretical compression power of the front-stage pump body and the theoretical compression power of the rear-stage pump body is minimized. As a result, the exhaust volume ratio between the tnin side pump body and the rear stage pump body is generally determined to be approximately 1 to 5:1.
Ｅ発明が解決しようとする閤題点］
ところが、この種の真空ポンプにおいては、潤滑および
シール性壱を向上させるだけでなくポンプ室内のデッド
ボリュームを埋めて排気特性を良好ならしめるために、
各ポンプ本体内に油槽内の油を逐次導入するようにして
おり、その油を排気とともにベーンにより付勢して循環
させるようにしている。そのため、この油回転真空ポン
プを運転するには、吸気口から導入した気体を圧縮して
排出するための圧縮動力だけではなく、前記油を付勢し
て循環させるための油村勢用の動力をも付加して供給す
る必要がある。この油村勢用の動力はポンプ本体の排気
容積の増大に伴なって大幅に増、１１１１するものであ
り、また、二連式の油回転真空ポンプは、単一のポンプ
本体のみで排気を行なうものに比べて油村勢用動力の割
合がきわめて大きい、しかも、この油村勢用の動力は、
油の粘度変化に応じて犬きく変動する。そのため、冬場
で油の粘瓜が晶い場合等における始動には多大な動力を
必要とする。したがって、このような状況に対応させて
駆動用の電動機を選択すると非常に大形なものになり、
無駄が多くなる。逆に、このような！ト情を考慮せずに
゛電動機を選定すると、冷間始動時に、起動とサーマル
リレーの９１断による停止）−とを繰り返すことになり
、油の温度がｔ ′ｉ４するまで正常な運転を行なうこ
とができないという不几合が生じる。Problems to be Solved by the Invention] However, in this type of vacuum pump, in order to not only improve lubrication and sealing performance, but also to fill the dead volume in the pump chamber and improve exhaust characteristics,
The oil in the oil tank is sequentially introduced into each pump body, and the oil is circulated while being energized by vanes while being exhausted. Therefore, in order to operate this oil rotary vacuum pump, it is necessary to use not only the compression power to compress and discharge the gas introduced from the intake port, but also the power for the oil pressure force to energize and circulate the oil. It is also necessary to supply it in addition. The power for this oil pump greatly increases to 1111 as the pump body's exhaust volume increases, and dual oil rotary vacuum pumps perform exhaustion with only a single pump body. The proportion of power used by the Aburamura forces is extremely large compared to that of the
It fluctuates depending on the change in the viscosity of the oil. Therefore, a large amount of power is required to start the engine in winter when the oil is thick and viscous. Therefore, if a drive electric motor is selected in response to this situation, it will be very large.
There will be more waste. On the contrary, like this! If you select an electric motor without taking this into account, the engine will repeat startup and stop due to thermal relay disconnection during cold start, and will continue to operate normally until the oil temperature reaches t'i4. There will be a problem of not being able to do this.
本発明は、以Ｈのような問題点を解消することを目的と
している。The present invention aims to solve the following problems.
〔１＾１題点な解決するための手段］
本発明は、゛かかる目的を達成するために、前述したよ
うな二連式の油回転真空ポンプにおいて。[1^1 Means for Solving Problems] In order to achieve the above object, the present invention provides a double-barreled oil rotary vacuum pump as described above.
前記中間排気経路の中間排気弁よりも後段部分に、真空
度が設定値よりも真空寄りの値に達した場合にのみ開成
する制御弁を介設したことを特徴とするものである。The present invention is characterized in that a control valve that opens only when the degree of vacuum reaches a value closer to vacuum than a set value is provided in a portion of the intermediate exhaust path downstream of the intermediate exhaust valve.
１作用１
このような構成によれば、真空度が設定値に達するまで
は、制御弁が閉じて中間排気経路が閉鎖されるため１本
来のα空排気作業は前段側ポンプ本体のみにより行なわ
れる。そして、真空度が設定イめよりも真空寄りのイめ
にまで達すると前記制御弁が開成し、前段側ポンプ本体
の排気ポートと後段側ポンプ本体の吸気ポートとが中間
排気経路を介して連通することになる。その結果、前段
側ポンプ本体の排気ポート部分の圧力が後段側ポンプ本
体による真空排気作用により低ドすることになり、前段
側ポンプ本体の前後差圧が減少する。そのため、この前
段側ポンプ本体の吸気ポート側の圧力をさらに真空寄り
の４４にまで導くことができる。1 Effect 1 According to such a configuration, until the degree of vacuum reaches the set value, the control valve closes and the intermediate exhaust path is closed, so 1 The original α air exhaust work is performed only by the front pump body. . When the degree of vacuum reaches a point closer to vacuum than the set point, the control valve opens, and the exhaust port of the front-stage pump body and the intake port of the rear-stage pump body communicate via the intermediate exhaust path. I will do it. As a result, the pressure at the exhaust port portion of the front-stage pump body is lowered by the evacuation action of the rear-stage pump body, and the differential pressure across the front-stage pump body decreases. Therefore, the pressure on the intake port side of this front-stage pump main body can be guided even further to 44, which is closer to vacuum.
しかして、このものは、α空排気をできるだけ前段側ポ
ンプ本体の機迩のみを利用して行なわせ、この前段側ポ
ンプ本体の排気イ七力が限界に近づいた場合に限り、後
段側ポンプ本体をも補助的に使用するものである。その
ため、排気の初期役階から後段側ポンプ本体をもａ山さ
せて前段側ポンプ本体の圧！ｌｉＩ動力を低減させるこ
とによって。However, this method uses only the mechanism of the front-stage pump body to perform α air exhaust as much as possible, and only when the exhaust power of the front-stage pump body approaches its limit, the rear-stage pump body It is also used auxiliary. Therefore, from the initial role of exhaust, the rear pump body is also raised to a peak, and the pressure of the front pump body is reduced. By reducing the liI power.
トータルの圧縮動力をＩＩｒ及的に少なくすることを１
１標に設計されたものに比べて後段側ポンプ本体の排気
容Ｈ，Ｉをはるかに小さなものにすることができる。し
たがって、前段側ポンプ本体の圧縮動力とｖｋ没側ポン
プ本体の圧縮動力との合計は、従来のものよりも若干大
きくなることは否めないが。1. To reduce the total compression power as much as possible.
The exhaust volumes H and I of the downstream pump body can be made much smaller than those designed with one standard. Therefore, it cannot be denied that the sum of the compression power of the front-stage pump body and the compression power of the VK retraction-side pump body is slightly larger than that of the conventional pump body.
末完１１＋のものは後段側ポンプ本体の排気容部を小さ
くすることによって前述した油村勢用の動力を大幅に低
減させることが可イ敞とな４Ｊ、駆動用の全動力を従来
のものよりも低減させることができる。By reducing the exhaust capacity of the latter-stage pump body, it is possible to significantly reduce the power for the above-mentioned Yumura force with the 4J, and the total power for driving is lower than that of the conventional 4J. can also be reduced.
【実施例Ｊ 以ド１本発明の一実施例を図面を参照して説明する。[Example J An embodiment of the present invention will now be described with reference to the drawings.
第１図は本発明に係る油回転真空ポンプの構成を示す縦
断面図である。FIG. 1 is a longitudinal sectional view showing the configuration of an oil rotary vacuum pump according to the present invention.
油回転「を空ポンプｌは所定階の油０を貯留した油槽ｚ
内に排気機能を営む前段側ポンプ本体３と後段側ポンプ
本体６とを配設してなる二段式のものである。これら各
ポンプ本体３．６は、各々円筒体状のケーシング４，５
内の偏心位置にベーン７．８付の回転子９．１１を収容
してなるもので、これら各ケーシング４．５と前記回転
子９、１１との間にはベーン７．８に区画されｉｉｉ記
回転回転子９１の回転に伴ってＩ！￥錆の変化する前段
側ポンプ室１２および後段側ポンプ室１３が形成されて
いる。なお、１６段側のポンプ室１３は前段側のポンプ
室１２の略２０分の１の容精に設定されている。The oil rotary empty pump l is the oil tank z that stores oil on a predetermined floor.
It is a two-stage pump in which a front-stage pump main body 3 and a rear-stage pump main body 6 are disposed, each of which performs an exhaust function. Each of these pump bodies 3.6 has a cylindrical casing 4, 5, respectively.
A rotor 9.11 with a vane 7.8 is housed in an eccentric position within the casing 4.5, and a vane 7.8 is partitioned between each of these casings 4.5 and the rotors 9, 11. As the rotating rotor 91 rotates, I! A front-stage pump chamber 12 and a rear-stage pump chamber 13 in which rust changes are formed. The capacity of the pump chamber 13 on the 16th stage side is approximately 1/20th that of the pump chamber 12 on the previous stage side.
そして、前記各々の回転子９．１１の吐接する側の一端
は、両ケーシング４．５を連結する中間１（セ１４に回
転自由に軸支させた回転軸１５により連結されており、
更に前段側の回転子９の他端には動力源からの動力を伝
達する入力軸１６の一端が固Ｉｔされている。One end of each of the rotors 9.11 on the discharge contact side is connected by a rotating shaft 15 that is freely rotatably supported by the intermediate 1 (center 14) that connects both the casings 4.5.
Further, one end of an input shaft 16 for transmitting power from a power source is fixedly attached to the other end of the rotor 9 on the front stage side.
また、前記前段側ポンプ室１２の吸気側Ａに設けた吸気
ボー）１０に吸気管１７の内方端を接続している。この
吸供管１７は真空チャンバ等に接続されるようになって
おり、その外方端はポンプ外に突出させである。Further, the inner end of the intake pipe 17 is connected to an intake bow 10 provided on the intake side A of the front pump chamber 12. This suction pipe 17 is connected to a vacuum chamber or the like, and its outer end projects outside the pump.
更に前記前段側ポンプ室１２の排気側Ｂに設けた排気ポ
ート１８と後段側ポンプ室１３の吸気側Ｃに開設された
吸気ポート１９とを中間排気経路２１を介してｉ１！通
させている。この中間排気経路２１の始端部には前段側
ポンプ室１２の排気ポート１８を油槽ｚ内の空間２２に
開口させる中間排気口２３が設けてあり、またその開口
端面には中間排気弁２４が設けられている。Furthermore, the exhaust port 18 provided on the exhaust side B of the former pump chamber 12 and the intake port 19 provided on the intake side C of the latter pump chamber 13 are connected via the intermediate exhaust path 21 to i1! I'm letting it pass. An intermediate exhaust port 23 that opens the exhaust port 18 of the front pump chamber 12 into the space 22 in the oil tank z is provided at the starting end of the intermediate exhaust path 21, and an intermediate exhaust valve 24 is provided at the opening end surface of the intermediate exhaust port 23. It is being
そして、前記中間排気経路２１の中間排気弁２４よりも
後段側に当該油回転真空ポンプｌの作動による真空度が
設定値（例えば、１Ｔａｌｌ）よりも更に真空寄りの値
に達した場合にのみ開成する制御ｊ？たる１ヒ磁弁２５
を介設している。すなわち。Then, the valve is opened only when the degree of vacuum caused by the operation of the oil rotary vacuum pump l on the downstream side of the intermediate exhaust valve 24 of the intermediate exhaust path 21 reaches a value closer to vacuum than the set value (for example, 1 Tall). Control j? Barrel 1 magnetic valve 25
are intervening. Namely.
前記電磁弁２５は前段側ポンプ本体３の排気ポート１８
と後段側ポンプ本体６の吸気ポート１９とのｉ！１！通
を断続させるもので、制御回路２６によって制御されて
いる。制御回路２６は前段側ポンプ本体３の吸気’！？
１７内の真空度を検出する圧力センサ２６ａからの信
号と、予め設定した設定値とを比較し、その検出された
真空度が設定ｆｔｉ以ヒになった場合に前記電磁５ｐ２
５を開く旨の信号を出力する一方、設定値未満では電磁
弁２５を閉じる旨の信号を出すように構成されている。The solenoid valve 25 is connected to the exhaust port 18 of the front pump body 3.
i! and the intake port 19 of the rear pump body 6! 1! It is controlled by a control circuit 26. The control circuit 26 controls the air intake of the front pump main body 3! ?
The signal from the pressure sensor 26a that detects the degree of vacuum inside the electromagnetic 5p2 is compared with a preset value, and if the detected degree of vacuum is less than the setting fti, the electromagnetic 5p2
The electromagnetic valve 25 is configured to output a signal to open the electromagnetic valve 25, while outputting a signal to close the electromagnetic valve 25 when the value is less than a set value.
また４前記後段側ポンプ’ｌ １３の排気側りに排気ポ
ート２７を設け、この排気ポート２７を後段排気弁２８
を介して油槽２内の空間２２にｉＩ！通させてあり、更
に前記空間２２は、油槽２の丘端に開（された排気口２
９により外部へ開口させである。In addition, an exhaust port 27 is provided on the exhaust side of the rear-stage pump 'l 13, and this exhaust port 27 is connected to the rear-stage exhaust valve 28.
iI! to the space 22 in the oil tank 2 via the iI! Furthermore, the space 22 has an exhaust port 2 opened at the end of the oil tank 2.
9 to open to the outside.
このような構成のものであれば、電動機等により人力軸
１６を駆動すると、ベーン７．８付の回転子９，１１が
回転して排気作用が営まれ、吸気管１７に接続された真
空ナヤンバ等の排気が行われることになるが、前記吸気
ＩｒＦ１７内の真空度が設定値（ｌ Ｔｏｌｌ）未満の
領域では１ｕＩ段側ポンプ室１２の排気ポート１８と後
段側ポンプ室１３の吸気ポート１９とをｉ！ｌ！通ずる
φ問排気経路２１が電ｍ：１Ｐ２５により遮断されるた
め１曲没側ポンプ室１２から排出される気体は全て中間
排気ブｐ２４を介して直接油槽２内の空間２２に排出さ
れる。すなわち、この領域においては、前段側ポンプ本
体３のみにより排気が行われることになる。一方。With such a configuration, when the human power shaft 16 is driven by an electric motor or the like, the rotors 9 and 11 with vanes 7.8 rotate to carry out an exhaust action, and the vacuum nayan bar connected to the intake pipe 17 is However, in the region where the degree of vacuum in the intake IrF 17 is less than the set value (l Toll), the exhaust port 18 of the 1uI stage side pump chamber 12 and the intake port 19 of the rear stage side pump chamber 13 are i! l! Since the connecting φ exhaust path 21 is blocked by the electric current m:1P25, all the gas discharged from the pump chamber 12 on the first bend side is directly discharged into the space 22 in the oil tank 2 via the intermediate exhaust valve p24. That is, in this region, exhaust is performed only by the front pump body 3. on the other hand.
＋ｉｉｉ記吸気管１７内の１．ＩＬ空度が設定（Ｉｔよ
りＩ’＋６い領域では、 ’ｉｌｊ磁弁２５が開成して
前段側ポンプ室１２から排出される気体の一部または全
部が後段側ポンプ室１３へ４かれる。よって、この領域
では２つのポンプ本体３．４により排気作業が行われる
ことになる。その結髪、前段側ポンプ本体３の排気ポー
ト１８部分の圧力が後段側ポンプ本体６によるａ室排気
作用により低下することになり、前段側ポンプ本体３の
前後差圧が減少する。そのため、この前段側ポンプ本体
３の吸気ポートｌＯ側の圧力をさらに真空寄りの値、例
えば１０−５に近い値にまで導くことができる。+iii 1. in the intake pipe 17. When the IL emptyness is set (I'+6 below It, the 'ilj magnetic valve 25 opens and some or all of the gas discharged from the front pump chamber 12 is discharged to the rear pump chamber 13. In this region, exhaust work is performed by the two pump bodies 3.4.The pressure at the exhaust port 18 portion of the front pump body 3 is reduced by the exhaust action of chamber a by the rear pump body 6. As a result, the differential pressure across the front pump body 3 decreases.Therefore, the pressure on the intake port IO side of the front pump body 3 can be brought to a value closer to vacuum, for example, to a value closer to 10-5. I can do it.
しかして、このものは、 １ｔｉｉ述したように真空排
気をできるだけ前段側ポンプ本体３のＩａ俺のみを利用
して行なわせ、この前段側ポンプ本体３の排気能力が限
界に近づいた場合に限り、後段側ポンプ本体６をも補助
的に使用するものである。そのため、排気の初期段階か
ら後段側ポンプ本体をもａＴＥさせて前段側ポンプ本体
の圧縮動力を低減させることによってトータルの圧縮動
力をｉｉｊ及的に少なくすることを目標に設計されたも
のに比べて後段側ポンプ本体６の排気容；−をはるかに
小さなものにすることができる。すなわち、後段側ポン
プ本体６の排気容品な前述のように前段側ポンプ本体３
の祷気容針の２０／ｌ程度に設定しても。However, as described in 1.2 above, this system uses only Ia of the front pump body 3 to perform vacuum evacuation as much as possible, and only when the exhaust capacity of the front pump body 3 approaches its limit, The latter pump main body 6 is also used auxiliary. Therefore, compared to those designed with the goal of reducing the total compression power as much as possible by aTEing the rear pump body from the initial stage of exhaust and reducing the compression power of the front pump body. The exhaust capacity of the downstream pump body 6 can be made much smaller. That is, as described above, the exhaust container of the rear pump body 6 is
Even if it is set to about 20/l of the air pressure needle.
到達真空１「は従来と同程度のものを得ることができる
。したがって、前段側ポンプ本体３の圧縮動力と後段側
ポンプ本体６の圧縮動力との合計は。The ultimate vacuum 1" can be obtained at the same level as the conventional one. Therefore, the sum of the compression power of the front-stage pump body 3 and the compression power of the rear-stage pump body 6 is:
従来のものよりも若干大きくなることは否めないが、水
油回転真空ポンプｌは後段側ポンプ本体６の排気容量を
小さくすることによって前述した油村勢用の動力を大幅
に低減させることがＬＩｔ ｔｗとなり、駆動用の全動
力を従来のものよりも低減させることができる。Although it is undeniable that it is slightly larger than the conventional one, the water-oil rotary vacuum pump 1 can significantly reduce the power for the above-mentioned oil pump by reducing the exhaust capacity of the rear pump body 6. Therefore, the total driving power can be reduced compared to the conventional one.
しかも、後段側のポンプ本体６を小形化すれば、ポンプ
全体のコンパクト化を図ることが容易になるだけでなく
、デッドスペースを少なくして効率を向上させることが
可能となり、必要な油のｌＩｌ：も少なくすることがで
きるり、騒音を低減させることもｉｉ（滝になる。Moreover, by downsizing the pump body 6 on the rear stage side, not only will it be easier to make the entire pump more compact, but it will also be possible to reduce dead space and improve efficiency, reducing the amount of oil needed. : It can also reduce noise and reduce noise.
なお、制御弁は、゛屯磁式のものに限られないのは勿論
であり、排気系のα空圧をパイロット圧として作動する
ような構成のもの等であってもよい。The control valve is of course not limited to the magnetic type, and may be configured to operate using the α air pressure of the exhaust system as pilot pressure.
また、後段側のポンプ本体の排気容量は、前段側ポンプ
本体の排気容を町の２０／１に限られないのも勿論であ
り、シール性の改り等により到達真空度を低ドさせるこ
となしに更に小形化を図ることも１１「能である。後段
側ポンプ本体をさらに小形化した場合には１例えば、前
段側ポンプ本体から延出させた回転軸に直接ベーンを保
持させて、この回転軸自体を該１ｇ？擾側ポンプ本体の
ロータとして利用することもできる。In addition, it goes without saying that the exhaust capacity of the rear pump body is not limited to 20/1 of the exhaust capacity of the front pump body, and the ultimate vacuum level may be lowered by changing the sealing properties, etc. It is also possible to further downsize the rear pump body.For example, if the rear pump body is further downsized, the vane may be held directly on the rotating shaft extending from the front pump body. The rotating shaft itself can also be used as the rotor of the 1g pump body.
Ｅ発明の効果ｊ
本発明は、以りのような構成であるから、到達真空度を
低下させることなしに供給する全動力を有効に低減させ
ることが可能であり、しかも、全体のコンパクト化を図
ることができるとともに油５１）を低減させて油の粘度
変化による悪影響を抑制することができ、加えて、騒音
の低ＦｋＪをも図ることができる画期的な油回転真空ポ
ンプを提供できるものである。E Effects of the invention j Since the present invention has the following configuration, it is possible to effectively reduce the total power to be supplied without lowering the ultimate vacuum degree, and moreover, it is possible to reduce the overall size. It is possible to provide an epoch-making oil rotary vacuum pump that can reduce the amount of oil 51) and suppress the adverse effects caused by changes in oil viscosity, and can also achieve low noise FkJ. It is.
第１図は本発明の一実施例を示す油回転Ｖ↓空ポンプの
誉断面図、第２図は同実施例の概略的な回路説明図であ
る。
ｌ・・・油回転α空ポンプ
２・・・油槽
３・・・前段側ポンプ本体
６・・・後段側ポンプ本体
１８・・・排気ポート １９・・・吸気ポート２１
・・・中間排気経路 ２４・・・中間排気弁２５・・
パ市磁弁（制御弁）FIG. 1 is a sectional view of an oil rotary V↓air pump showing one embodiment of the present invention, and FIG. 2 is a schematic circuit diagram of the same embodiment. l... Oil rotary α empty pump 2... Oil tank 3... Front side pump body 6... Back side pump body 18... Exhaust port 19... Intake port 21
...Intermediate exhaust path 24...Intermediate exhaust valve 25...
Park magnetic valve (control valve)
Claims (1)
気ポートとを中間排気弁を有した中間排気経路を介して
連通させてなる二連式の油回転真空ポンプであって、前
記中間排気経路の前記中間排気弁よりも後段部分に真空
度が設定値よりも真空寄りの値に達した場合にのみ開成
する制御弁を介設したことを特徴とする油回転真空ポン
プ。A two-barreled oil rotary vacuum pump in which an exhaust port of a front-stage pump body and an intake port of a rear-stage pump body are communicated via an intermediate exhaust route having an intermediate exhaust valve, the intermediate exhaust route having a An oil rotary vacuum pump characterized in that a control valve that opens only when the degree of vacuum reaches a value closer to vacuum than a set value is provided at a stage downstream of the intermediate exhaust valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7460186A JPS62233492A (en) | 1986-03-31 | 1986-03-31 | Oil rotating vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7460186A JPS62233492A (en) | 1986-03-31 | 1986-03-31 | Oil rotating vacuum pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62233492A true JPS62233492A (en) | 1987-10-13 |
Family
ID=13551841
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7460186A Pending JPS62233492A (en) | 1986-03-31 | 1986-03-31 | Oil rotating vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62233492A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0359491U (en) * | 1989-10-12 | 1991-06-12 | ||
| WO2003023229A1 (en) * | 2001-09-06 | 2003-03-20 | Ulvac, Inc. | Vacuum pumping system and method of operating vacuum pumping system |
| EP1536140A1 (en) * | 2003-11-27 | 2005-06-01 | Aisin Seiki Kabushiki Kaisha | Multistage dry vacuum pump |
| WO2010025799A3 (en) * | 2008-09-05 | 2011-01-06 | Ixetic Hückeswagen Gmbh | Mono-vane cell vacuum pump having a bypass channel |
| EP3161318B1 (en) | 2014-06-27 | 2020-02-05 | Ateliers Busch S.A. | Method of pumping in a system of vacuum pumps and system of vacuum pumps |
-
1986
- 1986-03-31 JP JP7460186A patent/JPS62233492A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0359491U (en) * | 1989-10-12 | 1991-06-12 | ||
| WO2003023229A1 (en) * | 2001-09-06 | 2003-03-20 | Ulvac, Inc. | Vacuum pumping system and method of operating vacuum pumping system |
| CN100348865C (en) * | 2001-09-06 | 2007-11-14 | 爱发科股份有限公司 | Vacuum exhaust appts. and drive method of vacuum appts. |
| EP1536140A1 (en) * | 2003-11-27 | 2005-06-01 | Aisin Seiki Kabushiki Kaisha | Multistage dry vacuum pump |
| WO2010025799A3 (en) * | 2008-09-05 | 2011-01-06 | Ixetic Hückeswagen Gmbh | Mono-vane cell vacuum pump having a bypass channel |
| EP3161318B1 (en) | 2014-06-27 | 2020-02-05 | Ateliers Busch S.A. | Method of pumping in a system of vacuum pumps and system of vacuum pumps |
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