AU2003302525A1 - Circuit pattern inspection device and circuit pattern inspection method - Google Patents

Circuit pattern inspection device and circuit pattern inspection method

Info

Publication number
AU2003302525A1
AU2003302525A1 AU2003302525A AU2003302525A AU2003302525A1 AU 2003302525 A1 AU2003302525 A1 AU 2003302525A1 AU 2003302525 A AU2003302525 A AU 2003302525A AU 2003302525 A AU2003302525 A AU 2003302525A AU 2003302525 A1 AU2003302525 A1 AU 2003302525A1
Authority
AU
Australia
Prior art keywords
circuit pattern
pattern inspection
inspection device
inspection method
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003302525A
Other languages
English (en)
Inventor
Hiroshi Hamori
Shogo Ishioka
Shuji Yamaoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OHT Inc
Original Assignee
OHT Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OHT Inc filed Critical OHT Inc
Publication of AU2003302525A1 publication Critical patent/AU2003302525A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/2806Apparatus therefor, e.g. test stations, drivers, analysers, conveyors

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
AU2003302525A 2002-11-30 2003-11-28 Circuit pattern inspection device and circuit pattern inspection method Abandoned AU2003302525A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2002-382813 2002-11-30
JP2002382813 2002-11-30
JP2003-436043 2003-11-28
JP2003436043A JP3978178B2 (ja) 2002-11-30 2003-11-28 回路パターン検査装置及び回路パターン検査方法
PCT/JP2003/015290 WO2004051290A1 (ja) 2002-11-30 2003-11-28 回路パターン検査装置及び回路パターン検査方法

Publications (1)

Publication Number Publication Date
AU2003302525A1 true AU2003302525A1 (en) 2004-06-23

Family

ID=32473767

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003302525A Abandoned AU2003302525A1 (en) 2002-11-30 2003-11-28 Circuit pattern inspection device and circuit pattern inspection method

Country Status (5)

Country Link
JP (1) JP3978178B2 (ja)
KR (1) KR101013243B1 (ja)
AU (1) AU2003302525A1 (ja)
TW (1) TWI247904B (ja)
WO (1) WO2004051290A1 (ja)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3989488B2 (ja) * 2005-01-19 2007-10-10 オー・エイチ・ティー株式会社 検査装置及び検査方法並びに検査装置用センサ
JP4417858B2 (ja) * 2005-01-19 2010-02-17 オー・エイチ・ティー株式会社 回路パターン検査装置およびその方法
JP2006284545A (ja) * 2005-04-04 2006-10-19 Quanta Display Inc 回路欠陥検査補修装置及び方法
JP2006300665A (ja) * 2005-04-19 2006-11-02 Oht Inc 検査装置および導電パターン検査方法
JP5276774B2 (ja) * 2005-11-29 2013-08-28 株式会社日本マイクロニクス 検査方法及び装置
JP4730904B2 (ja) * 2006-04-28 2011-07-20 日本電産リード株式会社 基板検査装置及び基板検査方法
JP4861755B2 (ja) * 2006-06-23 2012-01-25 オー・エイチ・ティー株式会社 回路パターン検査装置のセンサ部位置校正用治具
KR100799161B1 (ko) * 2006-07-20 2008-01-29 마이크로 인스펙션 주식회사 비접촉 싱글사이드 프로브와 이를 이용한 패턴전극의 단선및 단락 검사장치 및 그 방법
JP4634353B2 (ja) * 2006-09-20 2011-02-16 オー・エイチ・ティー株式会社 回路パターン検査装置
JP2008249522A (ja) * 2007-03-30 2008-10-16 Aisin Seiki Co Ltd ガラス破損検知装置
JP4644745B2 (ja) * 2009-08-04 2011-03-02 オー・エイチ・ティー株式会社 回路パターン検査装置
JP4723664B2 (ja) * 2009-08-17 2011-07-13 株式会社エフカム 導電パターン検査装置及び検査方法
JP5334197B2 (ja) 2009-12-15 2013-11-06 株式会社ジャパンディスプレイ 静電容量型入力装置、静電容量型入力装置の検査方法、静電容量型入力装置用駆動装置
JP5305111B2 (ja) * 2011-01-21 2013-10-02 オー・エイチ・ティー株式会社 回路パターン検査装置
JP5432213B2 (ja) * 2011-05-20 2014-03-05 株式会社ユニオンアロー・テクノロジー パターン検査装置
JP5865734B2 (ja) * 2012-03-01 2016-02-17 株式会社Screenホールディングス 領域分類装置、そのプログラム、基板検査装置、および領域分類方法
JP5417651B1 (ja) * 2013-01-08 2014-02-19 オー・エイチ・ティー株式会社 回路パターン検査装置
JP6311223B2 (ja) * 2013-06-07 2018-04-18 日本電産リード株式会社 検査装置、検査装置のキャリブレーション方法及び検査方法
JP6202452B1 (ja) * 2016-06-01 2017-09-27 オー・エイチ・ティー株式会社 非接触型基板検査装置及びその検査方法
JP6476234B2 (ja) * 2016-06-30 2019-02-27 オー・エイチ・ティー株式会社 非接触型回路パターン検査修復装置
CN107567199B (zh) * 2016-06-30 2020-01-07 Oht株式会社 非接触型电路图案检查修复装置
JP7408129B2 (ja) * 2019-11-25 2024-01-05 株式会社エヌエフホールディングス 電荷増幅回路および測定回路

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3693353B2 (ja) * 1992-04-28 2005-09-07 松下電器産業株式会社 プリント配線板用電気検査機
JPH05333357A (ja) * 1992-05-29 1993-12-17 Idemitsu Kosan Co Ltd 液晶表示素子におけるストライプ電極パターンの検査方法及び検査装置
JPH07146323A (ja) * 1993-11-22 1995-06-06 Inter Tec:Kk 液晶表示器用ガラス基板の検査方法及び検査装置
JP3617013B2 (ja) * 1994-08-15 2005-02-02 オー・エイチ・ティー株式会社 電子回路基板の検査装置及び電子回路の検査方法
JPH10206485A (ja) 1997-01-21 1998-08-07 Hioki Ee Corp 基板検査装置
JP3311698B2 (ja) 1998-11-19 2002-08-05 オー・エイチ・ティー株式会社 回路基板の導通検査装置、導通検査方法、導通検査用治具および記録媒体
JP2000221227A (ja) * 1999-01-30 2000-08-11 Koperu Denshi Kk 導電パターン検査装置及び方法
JP2001084905A (ja) * 1999-09-14 2001-03-30 Dainippon Printing Co Ltd 電極検査装置及び電極検査方法
JP2002365325A (ja) * 2001-06-11 2002-12-18 Oht Inc 回路パターン検査装置並びに回路パターン検査方法及び記録媒体

Also Published As

Publication number Publication date
KR101013243B1 (ko) 2011-02-09
JP2004191381A (ja) 2004-07-08
TWI247904B (en) 2006-01-21
JP3978178B2 (ja) 2007-09-19
TW200417742A (en) 2004-09-16
KR20050084001A (ko) 2005-08-26
WO2004051290A1 (ja) 2004-06-17

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase