AU2003302525A1 - Circuit pattern inspection device and circuit pattern inspection method - Google Patents

Circuit pattern inspection device and circuit pattern inspection method

Info

Publication number
AU2003302525A1
AU2003302525A1 AU2003302525A AU2003302525A AU2003302525A1 AU 2003302525 A1 AU2003302525 A1 AU 2003302525A1 AU 2003302525 A AU2003302525 A AU 2003302525A AU 2003302525 A AU2003302525 A AU 2003302525A AU 2003302525 A1 AU2003302525 A1 AU 2003302525A1
Authority
AU
Australia
Prior art keywords
circuit pattern
pattern inspection
inspection device
inspection method
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003302525A
Inventor
Hiroshi Hamori
Shogo Ishioka
Shuji Yamaoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OHT Inc
Original Assignee
OHT Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OHT Inc filed Critical OHT Inc
Publication of AU2003302525A1 publication Critical patent/AU2003302525A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/2806—Apparatus therefor, e.g. test stations, drivers, analysers, conveyors

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
AU2003302525A 2002-11-30 2003-11-28 Circuit pattern inspection device and circuit pattern inspection method Abandoned AU2003302525A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2002-382813 2002-11-30
JP2002382813 2002-11-30
JP2003436043A JP3978178B2 (en) 2002-11-30 2003-11-28 Circuit pattern inspection apparatus and circuit pattern inspection method
PCT/JP2003/015290 WO2004051290A1 (en) 2002-11-30 2003-11-28 Circuit pattern inspection device and circuit pattern inspection method
JP2003-436043 2003-11-28

Publications (1)

Publication Number Publication Date
AU2003302525A1 true AU2003302525A1 (en) 2004-06-23

Family

ID=32473767

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003302525A Abandoned AU2003302525A1 (en) 2002-11-30 2003-11-28 Circuit pattern inspection device and circuit pattern inspection method

Country Status (5)

Country Link
JP (1) JP3978178B2 (en)
KR (1) KR101013243B1 (en)
AU (1) AU2003302525A1 (en)
TW (1) TWI247904B (en)
WO (1) WO2004051290A1 (en)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4417858B2 (en) * 2005-01-19 2010-02-17 オー・エイチ・ティー株式会社 Circuit pattern inspection apparatus and method
JP3989488B2 (en) 2005-01-19 2007-10-10 オー・エイチ・ティー株式会社 Inspection device, inspection method, and sensor for inspection device
JP2006284545A (en) * 2005-04-04 2006-10-19 Quanta Display Inc Apparatus and method for inspecting and repairing circuit defect
JP2006300665A (en) * 2005-04-19 2006-11-02 Oht Inc Inspection device, and conductive pattern inspection method
JP5276774B2 (en) * 2005-11-29 2013-08-28 株式会社日本マイクロニクス Inspection method and apparatus
JP4730904B2 (en) * 2006-04-28 2011-07-20 日本電産リード株式会社 Substrate inspection apparatus and substrate inspection method
JP4861755B2 (en) * 2006-06-23 2012-01-25 オー・エイチ・ティー株式会社 Jig for position calibration of sensor part of circuit pattern inspection equipment
KR100799161B1 (en) * 2006-07-20 2008-01-29 마이크로 인스펙션 주식회사 Non-contact type single side probe and inspection apparatus and method for open/short test of pattern electrodes used thereof
JP4634353B2 (en) * 2006-09-20 2011-02-16 オー・エイチ・ティー株式会社 Circuit pattern inspection device
JP2008249522A (en) * 2007-03-30 2008-10-16 Aisin Seiki Co Ltd Glass breakage detection apparatus
JP4644745B2 (en) * 2009-08-04 2011-03-02 オー・エイチ・ティー株式会社 Circuit pattern inspection device
JP4723664B2 (en) * 2009-08-17 2011-07-13 株式会社エフカム Conductive pattern inspection apparatus and inspection method
JP5334197B2 (en) 2009-12-15 2013-11-06 株式会社ジャパンディスプレイ Capacitance input device, inspection method for capacitance input device, drive device for capacitance input device
JP5305111B2 (en) * 2011-01-21 2013-10-02 オー・エイチ・ティー株式会社 Circuit pattern inspection device
JP5432213B2 (en) * 2011-05-20 2014-03-05 株式会社ユニオンアロー・テクノロジー Pattern inspection device
JP5865734B2 (en) * 2012-03-01 2016-02-17 株式会社Ｓｃｒｅｅｎホールディングス Area classification apparatus, program therefor, board inspection apparatus, and area classification method
JP5417651B1 (en) * 2013-01-08 2014-02-19 オー・エイチ・ティー株式会社 Circuit pattern inspection device
JP6311223B2 (en) * 2013-06-07 2018-04-18 日本電産リード株式会社 Inspection device, calibration method of inspection device, and inspection method
JP6202452B1 (en) * 2016-06-01 2017-09-27 オー・エイチ・ティー株式会社 Non-contact type substrate inspection apparatus and inspection method thereof
CN107567199B (en) * 2016-06-30 2020-01-07 Oht株式会社 Non-contact circuit pattern inspection and repair device
JP6476234B2 (en) * 2016-06-30 2019-02-27 オー・エイチ・ティー株式会社 Non-contact type circuit pattern inspection and repair device

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3693353B2 (en) * 1992-04-28 2005-09-07 松下電器産業株式会社 Electrical inspection machine for printed wiring boards
JPH05333357A (en) * 1992-05-29 1993-12-17 Idemitsu Kosan Co Ltd Method and device for inspecting stripe electrode pattern of liquid crystal display element
JPH07146323A (en) * 1993-11-22 1995-06-06 Inter Tec:Kk Method and device for inspecting glass substrate for liquid crystal display
JP3617013B2 (en) * 1994-08-15 2005-02-02 オー・エイチ・ティー株式会社 Electronic circuit board inspection apparatus and electronic circuit inspection method
JPH10206485A (en) * 1997-01-21 1998-08-07 Hioki Ee Corp Substrate inspecting apparatus
JP3311698B2 (en) * 1998-11-19 2002-08-05 オー・エイチ・ティー株式会社 Circuit board continuity inspection device, continuity inspection method, continuity inspection jig, and recording medium
JP2000221227A (en) * 1999-01-30 2000-08-11 Koperu Denshi Kk Apparatus and method for inspecting conductive pattern
JP2001084905A (en) * 1999-09-14 2001-03-30 Dainippon Printing Co Ltd Inspection device for electrode and method therefor
JP2002365325A (en) * 2001-06-11 2002-12-18 Oht Inc Circuit pattern inspection device, circuit pattern inspection method and storage medium

Also Published As

Publication number Publication date
TWI247904B (en) 2006-01-21
TW200417742A (en) 2004-09-16
KR20050084001A (en) 2005-08-26
KR101013243B1 (en) 2011-02-09
JP2004191381A (en) 2004-07-08
JP3978178B2 (en) 2007-09-19
WO2004051290A1 (en) 2004-06-17

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase