WO2023072126A1 - Dispositif de coupe d'un système de découpe de barreau de silicium et système de découpe de barreau de silicium - Google Patents

Dispositif de coupe d'un système de découpe de barreau de silicium et système de découpe de barreau de silicium Download PDF

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Publication number
WO2023072126A1
WO2023072126A1 PCT/CN2022/127598 CN2022127598W WO2023072126A1 WO 2023072126 A1 WO2023072126 A1 WO 2023072126A1 CN 2022127598 W CN2022127598 W CN 2022127598W WO 2023072126 A1 WO2023072126 A1 WO 2023072126A1
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WO
WIPO (PCT)
Prior art keywords
cutting
silicon rod
jaw
edge
support
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PCT/CN2022/127598
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English (en)
Chinese (zh)
Inventor
刘克村
孙鹏
郭世锋
戴鑫辉
周聪
杨国栋
Original Assignee
青岛高测科技股份有限公司
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Publication of WO2023072126A1 publication Critical patent/WO2023072126A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0064—Devices for the automatic drive or the program control of the machines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0076—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Definitions

  • the present application relates to the technical field of silicon rod cutting, and in particular, relates to a cutting device of a silicon rod cutting system and a silicon rod cutting system.
  • the field of photovoltaic solar power generation has received more and more attention and development.
  • the usual crystalline silicon solar cells are made on high-quality silicon wafers, which are cut from pulled or cast silicon rods by wire sawing, that is, wire cutting technology.
  • Wire cutting technology is a relatively advanced square root processing technology in the world at present. Its principle is to rub the workpiece (such as silicon rod, sapphire, or other semiconductor hard and brittle materials) through high-speed moving diamond wire, and cut out a square rod. , so as to achieve the purpose of cutting. Compared with the traditional knife saw blade, grinding wheel and internal circle cutting, the wire cutting technology has the advantages of high efficiency, high production capacity and high precision.
  • the existing silicon rod cutting system can no longer meet the requirements of the photovoltaic industry for silicon wafers.
  • the embodiment of the present application provides a cutting device and a silicon rod cutting system with a new structure.
  • a cutting device of a silicon rod cutting system including a cutting head mechanism and a wire saw control unit with a self-learning function, and the cutting head mechanism includes:
  • a wire saw assembly the wire saw assembly has a diamond wire, and the cutting section of the diamond wire is used to cut the vertically arranged silicon rod from top to bottom;
  • the detection component is connected with the wire saw component, and the detection component is used to detect the actual cutting surface formed after each cutting to obtain the shape of the actual cutting surface; wherein, the actual cutting surface formed after the cutting is silicon The actual cut surface after the rod has been cut and the skin has been removed;
  • the wire saw control unit is connected with the detection component; the wire saw control unit is used for:
  • the cutting position of the cutting section is dynamically adjusted during the next cutting process.
  • a silicon rod cutting system including:
  • the above-mentioned cutting device which is used to cut silicon rods to form edges
  • An edge skin collection mechanism has a collection area, and the collection area corresponds to the cutting stations of the silicon rod cutting system one by one;
  • the collection control unit is used to control the scrap clamping mechanism to clamp the scrap, transport and place it in the scrap collection mechanism, and the scrap produced by cutting the same silicon rod is placed in the same collection area.
  • the detection component cooperates with the wire saw control unit with self-learning function.
  • the detection component can detect the actual cutting surface formed after each cutting is completed, and obtain the actual
  • the wire saw control unit can dynamically and accurately adjust the cutting section in the next cutting process to make the cutting surface closer to the plane.
  • Fig. 1 is the schematic diagram of the cutting process of the silicon rod cutting system of the embodiment of the present application
  • FIG. 1A is a schematic diagram of a silicon rod cutting system according to an embodiment of the present application.
  • FIG. 1B and 1C are schematic diagrams of the transfer device of the silicon rod cutting system shown in FIG. 1A transferring round silicon rods from the loading and unloading device to the cutting device;
  • FIG. 2A is a schematic diagram of a loading and unloading device of a silicon rod cutting system according to an embodiment of the present application
  • Fig. 2B is a schematic diagram of another angle of Fig. 2A;
  • Figure 2C is a partially enlarged view of Figure 2B;
  • 3A, 3B and 3C are schematic diagrams of the transfer device of the silicon rod cutting system of the embodiment of the present application.
  • 3D and 3E are schematic diagrams of the upper jaw assembly and the lower jaw assembly of the transfer device of FIG. 3A;
  • FIG. 3F is a schematic diagram of the four crystal lines of the silicon rod at the crystal line endpoints of the end faces of the silicon rod;
  • 4A is a schematic diagram of the cutting head mechanism of the cutting device of the silicon rod cutting system according to the embodiment of the present application;
  • Fig. 4B is a schematic diagram of two cutting head mechanisms of the same cutting device of the silicon rod cutting system of the embodiment of the present application cutting silicon rods from top to bottom;
  • Fig. 4C and Fig. 4D are the schematic diagrams of removing the two side skins formed by one cutting in Fig. 4B from the through hole of the machine head;
  • Fig. 4E is a schematic diagram of the tension wheel assembly of the cutting head mechanism shown in Fig. 4A;
  • Fig. 4F is a schematic diagram of the supporting frame, the lateral feed mechanism and the vertical feed mechanism of the cutting device shown in Fig. 1A;
  • FIG. 4G is a schematic diagram of the silicon rod chuck mechanism and the silicon rod support mechanism of the silicon rod cutting system shown in FIG. 1A cooperating to clamp the silicon rod;
  • Figure 4H is a schematic diagram of the silicon rod support mechanism shown in Figure 4G;
  • Fig. 4I, Fig. 4J and Fig. 4K are the schematic diagrams of the actual cutting curved surface and the theoretical cutting curved surface formed by the cutting of two parallel cutting sections of the cutting device shown in Fig. 4A;
  • Fig. 5 is a schematic diagram of the cooperation of the machine base, two cutting devices and the strip unloading device of the silicon rod cutting system according to the embodiment of the present application;
  • Fig. 5A is a schematic diagram of the edge skin clamping frame of the edge skin unloading device of the silicon rod cutting system according to the embodiment of the present application;
  • Figure 5B is a schematic diagram of the relative position of the edge skin clamping frame (with a cover plate) shown in Figure 5A before clamping the edge skin;
  • Fig. 5C is a schematic diagram of the cooperation of the edge skin clamping frame and the clamping frame moving assembly shown in Fig. 5A to form the edge skin clamping mechanism;
  • Fig. 5D is a schematic diagram of the cooperation between the edge skin clamping frame shown in Fig. 5A and the cutting device of the silicon rod cutting system;
  • 5E is a schematic diagram of collecting the scrap by the scrap collecting mechanism of the scrap unloading device of the silicon rod cutting system according to the embodiment of the present application.
  • the silicon rod cutting system of the embodiment of the present application is used for vertically cutting circular silicon rods placed vertically.
  • the process of cutting silicon rods is shown in Figure 1.
  • a circular silicon rod is cut twice to form a square rod and four sides.
  • Vertical round silicon rods are also called vertical round silicon rods.
  • the silicon rod cutting system of the embodiment of the present application includes:
  • Machine base 1, described machine base 1 has two parallel and spaced apart cutting stations;
  • Two cutting devices 4 are fixed on the base 1, and the two cutting devices 4 correspond to the two cutting stations one by one; wherein, the cutting device 4 has a diamond wire, and the diamond wire
  • the part used to cut the silicon rod in motion is the cutting section, the cutting section is a cutting section arranged horizontally and the cutting section is used to cut the silicon rod vertically placed at the cutting station from top to bottom. cutting;
  • the loading and unloading device 2 is fixed with the machine base 1; wherein, the loading and unloading device 2 is used for loading of circular silicon rods and blanking of square rods formed by cutting;
  • the transfer device 3 is installed on the machine base 1 and is located between the two cutting stations; wherein, the transfer device 3 is used to transfer the silicon rods loaded by the loading and unloading device 2 to two
  • the cutting station is used to transfer the square bars formed on the two cutting stations to the loading and unloading device 2 . That is, the transfer device is used to transfer silicon rods and square rods between the loading and unloading device 2 and the cutting device 4 .
  • the height direction of the silicon rod cutting system is the Z direction of the silicon rod cutting system, that is, the Z direction of the silicon rod cutting system is the vertical direction, and the direction in which the two cutting stations are arranged is the X direction of the silicon rod cutting system.
  • the Y direction of the rod cutting system is perpendicular to the X and Z directions of the silicon rod cutting system.
  • Two independent cutting stations are arranged in parallel at intervals on the machine base, and each of the two cutting stations corresponds to a cutting device, and the two cutting stations share a set of loading and unloading device 2, transfer device 3 and edge skin unloading device 5.
  • the two cutting stations in the silicon rod cutting system share a loading and unloading device and a transfer device, so that the silicon rod cutting system has fewer components and occupies less space.
  • the silicon rod cutting system further includes a trim unloading device 5 for clamping, transporting and collecting the trim formed by cutting silicon rods.
  • described edge skin unloading device 5 comprises:
  • a skin collection mechanism 53 the skin collection mechanism 53 has a collection area, and the collection area corresponds to the cutting station one by one;
  • the edge skin clamping mechanism 51 is used to clamp the edge skin formed by cutting the silicon rod at the cutting station, and transport the edge skin to be placed in the edge skin collection mechanism, and cut the edge skin formed by the same silicon rod. The skins are placed in the same collection area.
  • the two cutting stations share one edge skin clamping mechanism, and the edge skins formed by the two cutting stations are transported and placed in the same edge skin collecting mechanism.
  • the two cutting stations in the silicon rod cutting system share a scrap clamping mechanism and a scrap collecting mechanism, so that the silicon rod cutting system has fewer components and occupies less space.
  • each of the cutting devices has two oppositely arranged cutting head mechanisms 41, and the cutting head
  • the mechanism 41 has a diamond wire and a vertical head through hole 411-1, and the cutting section of the diamond wire and the head through hole 411-1 are staggered, that is, they do not interfere with each other; wherein, the cutting section is the diamond wire in the The part used to cut silicon rods in motion;
  • the edge skin clamping mechanism is specifically used to clamp the edge skin by entering between the two cutting head mechanisms 41 from the through hole of the machine head, and withdraw from the through hole 411-1 of the machine head The edge skin is taken out between the two cutting head mechanisms 41 .
  • the first component the structure of the frame of the silicon rod cutting system
  • the base of the silicon rod cutting system is a basic support with high rigidity and stability. In the layout of the workshop, the base of the silicon rod cutting system can be connected with the bases of other systems to form a complete production line.
  • the second component the structure of the loading and unloading device of the silicon rod cutting system
  • the loading and unloading device 2 of the silicon rod cutting system includes a round rod feeding assembly, and the round rod feeding assembly includes:
  • the loading and unloading device also includes:
  • the loading and unloading support frame 23, the round bar loading frame 211 is rotatably connected to the loading and unloading support frame 23;
  • the feeding and turning drive device is respectively fixed with the bottom of the loading and unloading support frame and the outer bottom of the round bar feeding rack, and the feeding turning driving device is used to drive the round bar feeding rack from the round bar
  • the initial position of the rack is turned 90 degrees
  • the feeding processing unit is used to control the feeding turning drive device to control the round bar feeding rack to accelerate the turning first, and when the round bar feeding rack turns over to reach a preset angle, reduce the rotation speed of the round bar feeding rack Flip speed until flipped to 90 degrees.
  • the value range of the preset angle is greater than or equal to 60 degrees and less than or equal to 85 degrees.
  • the feeding and turning drive device adopts the feeding and turning oil cylinder 216;
  • the cylinder body of the described feeding turning oil cylinder 216 is fixed on the bottom of the described loading and unloading support frame, and the upper end of the guide bar of the described feeding turning oil cylinder 216 is fixed with the outer bottom of the described round rod feeding frame 211, and the upper end
  • the material turning cylinder 216 is used to drive the round bar feeding rack 211 to turn over 90 degrees from the initial position of the round bar feeding rack;
  • the feeding processing unit is specifically used to reduce the elongation speed of the feeding turning cylinder 211 to reduce the turning speed of the round bar feeding rack 211 when the round bar feeding rack 211 is overturned to a preset angle. .
  • the loading and unloading device also includes:
  • the deceleration proximity switch 217 is connected with the feeding processing unit, fixed on the long arm of the round bar feeding rack and flipped to a preset angle position;
  • the material loading processing unit is specifically configured to adjust the flow rate of the oil inlet of the material loading and turning cylinder to reduce the turning speed until turning to 90 degrees after receiving the in-position signal of the deceleration proximity switch.
  • the combination of the deceleration proximity switch and the feeding processing unit realizes that when the round rod feeding rack is turned close to 90 degrees, that is, when the silicon rod is turned close to 90 degrees, the turning speed is reduced, so that the silicon rod is turned to 90 degrees.
  • the speed is low, the impact on the silicon rod is small, which plays a role in protecting the silicon rod.
  • the inner side of the short arm of the round bar feeding rack 211 is the length measurement reference plane 211-1;
  • the round bar feeding assembly also includes:
  • the round rod supporting mechanism 212 is fixed on the inner side of the long arm of the round rod feeding rack 211, and is used to support a horizontally placed circular silicon rod when the long arm of the round rod feeding rack 211 is placed horizontally;
  • Round bar clamping block 213 and round bar clamping drive device described round bar clamping drive device is respectively fixed with described round bar support mechanism and round bar clamping block; Wherein, described round bar clamping block 213 is used for Driven by the round rod clamping drive device, the circular silicon rod located on the round rod support mechanism is pushed to withstand the length measurement reference plane 211-1 and clamped and fixed;
  • the clamping block displacement measuring device 215 is fixed with the round bar feeding rack 211 and is used to measure the displacement of the round bar clamping block 213;
  • the feeding processing unit is also used to obtain the length of the round silicon rod according to the distance between the initial position of the round rod clamping block and the distance between the length measurement reference plane and the displacement of the round rod clamping block ;
  • the initial position of the round bar clamping block is the position where the round bar clamping block is located when the round bar clamping driving device is extended to the maximum length.
  • the L-shaped round rod feeding rack is placed horizontally with the long arm of the round rod feeding rack; after that, the round silicon rods are placed horizontally On the round bar support mechanism, the detection of material is carried out. For the subsequent transfer and cutting of silicon rods, the length of silicon rods needs to be measured. The distance between the position of the length measurement reference plane and the initial position of the round bar clamping block is determined.
  • the round bar clamping block is driven by the round bar clamping cylinder to move from the round bar clamping block to pushing the end face of one side of the silicon rod until it bears against the length side beam reference plane,
  • the clamping block displacement measuring device measures the displacement of the round rod clamping block, and then the round rod processing unit calculates the length of the circular silicon rod.
  • the detection of material is carried out through the photoelectric switch used for detection of material in the loading and unloading device.
  • the round bar clamping drive device adopts a round bar clamping cylinder 214, the cylinder body of the round bar clamping cylinder 214 is fixed to the round bar feeding rack 211, and the round bar clamping block 213 is fixed on the The upper end of the guide rod of the round rod clamping cylinder 214;
  • the round rod clamping block 213 is used to drive the round rod clamping cylinder 214 to push the circular silicon rod located on the round rod supporting mechanism to withstand the length measurement reference
  • the surface 211-1 is clamped and fixed; the initial position of the round bar clamping block is the position where the round bar clamping block is located when the guide rod of the round bar clamping cylinder is extended to the maximum length.
  • the feeding processing unit is specifically used to obtain the length L of the circular silicon rod according to the following relational formula:
  • K is the distance between the initial position of the round bar clamping block and the length measurement reference plane
  • S is the displacement of the round bar clamping block
  • the clamping block displacement measuring device is a tensile encoder.
  • the tensile encoder has a compact structure and is easy to install. Cooperating with the feeding processing unit, it can conveniently realize the length measurement of the circular silicon rod, and the measurement accuracy is also high.
  • the loading and unloading device also includes:
  • the photoelectric switch fixed on the round bar feeding frame detects and sends out a material signal, then the round bar clamps the cylinder to ventilate, and when the round bar clamps the cylinder to move, it drives the round bar clamping block to rotate and eject; then, the round bar clamps the cylinder Continue to drive the round rod clamping block to move, push the silicon rod from one end of the silicon rod until the other end of the silicon rod withstands the round rod clamping cylinder and clamps and fixes it.
  • the feeding and turning oil cylinder rotates around the axis by pushing the outer bottom of the round bar feeding rack.
  • the deceleration proximity switch detects the position, and adjusts the flow rate of the oil inlet of the feeding and turning cylinder through the feeding processing unit. , so that the turning speed is reduced until turning 90° in place.
  • the cutting process of the square bar is as follows:
  • the third component the structure of the transfer device of the silicon rod cutting system
  • the transfer device 3 of the silicon rod cutting system includes:
  • the upper jaw assembly and the lower jaw assembly are installed in parallel on the same side of the upper and lower material jaw frame 31 at intervals up and down;
  • the transfer driving assembly is used to drive the upper jaw assembly to move up and down in the vertical direction relative to the lower jaw assembly, and is also used to drive the upper jaw assembly and the lower jaw assembly to move up and down synchronously.
  • the direction in which the upper jaw assembly and the lower jaw assembly move up and down is the vertical direction, that is, the Z direction of the silicon rod cutting system.
  • the transfer drive assembly includes an upper jaw transfer drive device, which is respectively fixed to the lower jaw assembly and the upper jaw assembly and drives the upper jaw assembly to move up and down relative to the lower jaw assembly;
  • the lower jaw transfer driving device is respectively fixed with the loading and unloading jaw frame and the lower jaw assembly and drives the lower jaw assembly, upper jaw assembly and the upper jaw transfer driving device to move up and down synchronously.
  • the transfer drive assembly two functions are realized. One is that the upper jaw assembly can move upwards independently so that the distance between the upper jaw assembly and the lower jaw assembly can be increased, and it can also move downwards independently so that the upper jaw assembly and the distance between the lower jaw assembly resets and becomes smaller.
  • the distance between the upper jaw assembly and the lower jaw assembly may not need to be adjusted, and only the lower jaw assembly needs to be used for clamping; when the silicon rod or square rod is longer , the distance between the upper jaw assembly and the lower jaw assembly can be kept constant and the upper jaw assembly and the lower jaw assembly can be clamped at the same time; when the silicon rod or square rod is extra long, the upper jaw assembly can be increased The distance between the lower jaw assembly and the lower jaw assembly can stably clamp silicon rods or square rods during transfer.
  • the second is that the transfer device holds the silicon rod or the square rod. When it needs to be lifted and rotated, the distance between the upper jaw assembly and the lower jaw assembly remains unchanged, and they move upward synchronously. Or the square rod is lifted to transfer the silicon rod or square rod; after the silicon rod or square rod is transferred in place, the distance between the upper jaw assembly and the lower jaw assembly remains unchanged, and they move downward synchronously. Rod or square stick down.
  • the transport drive assembly includes:
  • the cylinder body of the transfer air-hydraulic cylinder 321 is fixed on the bottom of the loading and unloading jaw frame 31, and the upper end of the guide rod of the transfer air-hydraulic cylinder 321 is fixed to the lower jaw assembly;
  • the gas-liquid converter 322 is connected with the air-liquid cylinder 321; wherein, the gas entering the air-liquid converter 322 squeezes the hydraulic oil into the air-liquid cylinder 321 to drive the air-liquid cylinder 321
  • Transfer air cylinder 323, the cylinder block of described transfer air cylinder 323 is fixed with described lower jaw assembly, the guide rod upper end of described transfer air cylinder 323 is fixed with described upper jaw assembly; Wherein, the air source enters described transfer air cylinder 323 The gas drives the guide rod of the air transfer cylinder 323 to lift up the upper jaw assembly; that is, the lower jaw transfer driving device includes the air transfer cylinder 323 .
  • the combination of the transfer air-hydraulic cylinder and the transfer air cylinder makes the structure of the transfer drive assembly smaller, which can make the overall structure of the transfer device smaller.
  • the air transfer cylinder retracts and the air transfer cylinder extends; when a short silicon rod is clamped, the air transfer cylinder and the air/hydraulic cylinder extend simultaneously.
  • the lower jaw assembly clamps the round silicon rod before cutting or the square rod after cutting, and then the air cylinder moves to lift the silicon rod or square rod. stick for transfer.
  • the distance between the upper jaw assembly and the lower jaw assembly remains unchanged, and they jointly participate in clamping the round silicon rod before cutting or the square rod after cutting.
  • the upper jaw assembly and the lower jaw assembly jointly participate in clamping the round silicon rod before cutting or the square rod after cutting.
  • the upper jaw assembly can move up and down due to the function of the cylinder
  • the vertical direction of the jaw frame moves up and down, which is suitable for the clamping action of different lengths of round silicon rods before cutting or square rods after cutting.
  • the upper jaw assembly and the lower jaw assembly each include:
  • the left jaw 332-1 and the right jaw 332-2 are fixed on the positive side of the transfer jaw fixing plate 331 and are arranged oppositely, and the left jaw 332-1 and the right jaw 332-2 can approach and move away from each other. , to realize clamping and loosening; wherein, the side where the transfer jaw fixing plate fixes the left jaw and the right jaw is the positive side of the transfer jaw fixing plate;
  • the silicon rod detection component is fixed on the positive side of the transfer jaw fixing plate 331, and the silicon rod detection probe 333 of the silicon rod detection component is located at the left jaw 332-1 and the right jaw 332- between 2;
  • the transfer device also includes a silicon rod detection processing unit connected to the silicon rod detection component 333; wherein:
  • the silicon rod detection component is used to maintain a gap between the left jaw 332-1 and the right jaw 332-2 and the silicon rod, that is, the silicon rod is not clamped, and the bottom of the silicon rod is placed on the silicon rod
  • the silicon rod detection probe 333-1 of the silicon rod detection component keeps pressing on the outer peripheral surface of the silicon rod
  • the silicon rod detection processing unit is used to obtain the position of the crystal line of the silicon rod according to the signal of the silicon rod detection probe of the silicon rod detection component, and judge whether the silicon rod meets the preset silicon rod standard.
  • the silicon rod detection processing unit is specifically used for:
  • the number of crystal lines of the silicon rod is less than 4 or greater than 4, it is judged that the silicon rod does not meet the preset silicon rod standard
  • the four crystal lines of the silicon rod 6 are in the crystal line endpoints 61 on the end faces of the silicon rods, and every two adjacent crystal line endpoints 61 Connect the lines to form four cutting lines;
  • any of the four included angles formed by the four cutting straight lines is less than 85 degrees or greater than 95 degrees, it is judged that the silicon ingot does not meet the preset silicon ingot standard, that is, the crystal line of the silicon ingot is too inclined. Even after cutting, the square bar cannot be obtained, and subsequent cutting will not be performed.
  • the silicon rod detection component cooperates with the silicon rod detection processing unit to make a judgment on whether the silicon rod meets the preset silicon rod standard, avoiding the cutting of silicon rods that do not meet the preset silicon rod standard, and improving the efficiency , reducing time wastage.
  • the silicon rod detection processing unit is also used for:
  • the above processing process of the silicon rod detection unit needs to be carried out based on the signal of the silicon rod detection component.
  • the transfer device also includes:
  • Two vertical guide rails 341 are vertically arranged in parallel on one side of the transfer jaw fixing plate 331;
  • Two transfer jaw sliders are fixed on the back side of the transfer jaw fixing plate 331, and the transfer jaw sliders are slidably connected to the vertical guide rail 341;
  • the upper end of the guide rod of the transfer air-hydraulic cylinder 321 is fixed to the transfer jaw fixing plate of the lower jaw assembly, and the upper end of the guide rod of the transfer air cylinder 323 is fixed to the transfer jaw fixing plate of the upper jaw assembly. fixed.
  • the transfer air-hydraulic cylinder can drive the whole lower jaw assembly to move up and down relative to the upper and lower material jaw frame in the height direction of the upper and lower material jaw frame.
  • the transfer air cylinder can drive the whole upper jaw assembly to move up and down in the vertical direction relative to the lower jaw assembly.
  • each of the upper jaw assembly and the lower jaw assembly further includes:
  • a jaw synchronous reverse movement assembly the left jaw and the right jaw are mounted on the transfer jaw fixing plate through the jaw synchronous reverse movement assembly;
  • the jaw synchronous reverse movement assembly is used to drive the left jaw and the right jaw to move synchronously and reversely to approach and move away from each other.
  • the synchronous reverse movement components of the jaws include:
  • Transfer jaw cylinder 351 the cylinder body of the transfer jaw cylinder 351 is fixed with the transfer jaw fixing plate 331;
  • the synchronous gear 354 meshes with the two racks 353 .
  • the transfer device also includes:
  • the transfer rotation mechanism, the frame of the loading and unloading jaws is fixed on the transfer rotation mechanism, the transfer rotation mechanism is installed on the base of the silicon rod cutting system and is located between the two cutting stations of the silicon rod cutting system movement between
  • the transfer rotation mechanism is used to drive the frame of the loading and unloading jaws to rotate, and is also used to move along the transverse direction of the silicon rod cutting system between the two cutting stations of the silicon rod cutting system, and is also used to The Y direction of the rod cutting system moves, and the Y direction of the silicon rod cutting system is consistent with the forward and backward direction of the transfer device approaching and away from the loading and unloading device of the silicon rod cutting system.
  • the transfer rotation mechanism can drive the loading and unloading jaw frame to rotate and can move between the two cutting stations of the silicon rod cutting system, and can drive the loading and unloading jaw frame to approach and move away from the loading and unloading device.
  • the process of transferring silicon rods to the cutting station specifically includes:
  • the process of transporting the cut square bar from the cutting station including:
  • the transfer rotation mechanism is mainly composed of a transfer motor, a transfer harmonic reducer and a revolving base 361 .
  • the flexible wheel of the harmonic reducer is installed on the slewing seat 361 at the same time, and the steel wheel of the harmonic reducer is installed on the frame of the loading and unloading jaws, so that the transfer motor makes the frame of the loading and unloading jaws on the slewing seat through the transfer of the harmonic reducer
  • a rotary towline is installed on the slewing seat, which is used for routing the cables and pipes of the slewing motion.
  • the transfer harmonic reducer greatly improves the transfer accuracy of silicon rods.
  • the fourth component the structure of the cutting device of the silicon rod cutting system
  • each cutting station corresponds to a cutting device 4, and a cutting device is in a cutting process, and two lateral settings of the cutting device
  • the parallel cutting section cuts the silicon rod from top to bottom to form two side skins.
  • the cutting head mechanism of the cutting device is structurally improved.
  • the cutting device of the silicon rod cutting system includes a cutting head mechanism 41, wherein, the cutting head mechanism is used to form a transversely arranged cutting section to a vertically placed Silicon rods are cut.
  • the cutting head mechanism 41 includes a wire saw assembly; the wire saw assembly includes:
  • a wire saw mounting frame 411 the wire saw mounting frame 411 has a vertical machine head through hole 411-1;
  • the diamond wire is arranged on the positive side of the wire saw installation frame 411, and the part of the diamond wire used to cut the silicon rod during the movement is the cutting section;
  • the cutting section and the head through hole 411-1 are arranged in a staggered manner, that is, they do not interfere with each other.
  • Jaw mounting post 511 goes in and out.
  • edge leather clamping frame 51 and the edge leather clamp claw mounting column 511 are described in the fifth component below.
  • the cutting section cuts the silicon rod to form a square rod and a side skin, and the side skin needs to be taken out.
  • Fig. 5A, Fig. 5B, Fig. 5C and Fig. 5D the process of taking out the skin will be described:
  • edge leather clamping claw mounting column 511 of the edge leather clamping frame 51 of the edge leather clamping mechanism passes through the machine head through hole forward, and the edge leather clamping mechanism clamps the edge leather; afterward, it passes backward with the edge leather
  • the machine head passes through the hole 411-1, thereby removing the edge skin from the cutting station.
  • the jigsaw mount itself does not need to move during this process.
  • Cutting device because the wire saw mounting frame of the wire saw assembly of the cutting machine head mechanism is provided with a machine head through hole, the process of moving the edge skin from the cutting station does not need to move the wire saw mounting frame, which saves time and improves In order to improve the efficiency of removing the edge skin, the process of removing the edge skin from the cutting station is relatively simple, which in turn makes the efficiency of the silicon rod cutting system higher.
  • the machine head through hole 411-1 is a vertically elongated machine head through hole.
  • the wire saw mounting frame is a rigid wire saw mounting frame.
  • the cutting head mechanism also includes:
  • the detection component 415 is connected with the wire saw component, and the detection component 415 is used to detect the actual cutting curved surface formed after each cutting, so as to obtain the shape of the actual cutting curved surface.
  • the detection component can detect the actual cutting surface formed after each cutting, and there are two possibilities to obtain the shape of the actual cutting surface: one is a cutting surface with a convex middle and flat ends, and the other is a concave middle and flat ends Cut surfaces. It provides a basis for dynamically and accurately adjusting the cutting section in the next cutting process.
  • the cutting head mechanism further includes a wire saw control unit connected to the detection component 415; the wire saw control unit is used for:
  • the cutting position of the cutting section is dynamically adjusted during the next cutting process, and the dynamic adjustment includes:
  • the direction of adjustment of the cutting section is opposite to the bending direction of the actual cutting surface last time
  • the degree of adjustment of the cutting position of the cutting segment is the difference between the curvature degree of the actual cutting surface and the curvature degree of the theoretical cutting surface last time.
  • the detection component cooperates with the wire saw control unit. Firstly, the detection component can detect the actual cutting surface formed after each cutting. Afterwards, the wire saw control unit can dynamically and accurately adjust the cutting section in the next cutting process so that the actual cutting surface is closer to the plane.
  • the cutting segments are two and arranged in parallel, and the two cutting segments are respectively the left cutting segment and the right cutting segment, and the actual cutting formed by the two cutting segments
  • the cutting surfaces are the left actual cutting surface SJQM1 and the right actual cutting surface SJQM2 in turn.
  • Fig. 4I shows that the left actual cutting surface SJQM1 and the right actual cutting surface SJQM2 are both the actual cutting surfaces with a convex middle and flat ends;
  • Fig. 4J shows that the left actual cutting surface SJQM1 and the right actual cutting surface SJQM2 are both concave in the middle and flat at both ends
  • Figure 4K shows that the left actual cutting surface SJQM1 is an actual cutting surface with a convex middle and two flat ends, and the right actual cutting surface SJQM2 is an actual cutting surface with a concave middle and two flat ends.
  • the dynamic adjustment specifically includes:
  • the adjustment direction of the left cutting segment is opposite to the bending direction of the last actual left cutting surface
  • the degree of adjustment of the cutting position of the left cutting section is the difference between the degree of curvature of the actual left cutting surface and the degree of curvature of the theoretical cutting surface LLQM1;
  • the direction of adjustment of the right cutting segment is opposite to the bending direction of the last actual right cutting curved surface SJQM2;
  • the adjustment degree of the cutting position of the right cutting segment is the difference ⁇ L between the curvature degree of the right actual cutting curved surface SJQM2 last time and the curvature degree of the theoretical cutting curved surface.
  • the detection component and the wire saw control unit work together to realize the dynamic and precise adjustment of the left cutting section and the right cutting section so that the actual cutting surface formed by each is closer to the plane.
  • the detection component 415 is located under the cutting section; wherein:
  • the detection component 415 is specifically used to detect the actual cutting surface formed by cutting the silicon rod and removing the edge skin during the process of the cutting head mechanism 41 retreating from bottom to top after each cutting is completed, and obtain the actual cutting surface. Cut the shape of the surface.
  • the cutting section is a cutting section arranged transversely and lower than the head through hole 411 - 1 .
  • the cutting head mechanism can move from top to bottom to cut silicon rods.
  • the horizontally arranged cutting section cuts the vertically arranged silicon rods from top to bottom. After the cutting is completed, the cut section is lower than the lower end surface of the silicon rod. At this time, during the process that the edge skin is removed from the cutting station through the through hole of the machine head, since the cutting section is lower than the through hole of the machine head, the cutting section will not interfere with the moving edge skin.
  • the wire saw assembly further includes:
  • the driving wheel assembly 412-1 and the lower transition wheel 412-2 are respectively arranged on the positive side of the wire saw installation frame 411;
  • the tension wheel assembly 412-3 and the upper transition wheel 412-4 are respectively arranged on the front side of the wire saw installation frame 411;
  • the annular diamond wire is wound around the outer peripheral surface of the driving wheel of the driving wheel assembly 412-1, the lower transition wheel 412-2, the tension wheel of the tension wheel assembly 412-3 and the upper transition wheel 412-4.
  • the driving wheel and the bottom end of the lower transition wheel form the cutting section, and the diamond wire does not interfere with the through hole of the machine head.
  • the driving wheel assembly is arranged at the lower part of the positive side of the wire saw installation frame.
  • the tension wheel assembly applies tension to the annular diamond wire, so that the annular diamond wire maintains a certain tension to effectively cut the silicon rod.
  • the lower transition wheel and the upper transition wheel adjust the direction of the annular diamond wire.
  • one cutting station of the silicon rod cutting system corresponds to one cutting device, one said cutting device includes two said cutting head mechanisms 41, and two said The cutting sections of the cutting head mechanism 41 are arranged oppositely.
  • a cutting device has two cutting head mechanisms, and the cutting segments of the two cutting head mechanisms are arranged oppositely. In this way, a cutting device can cut the opposite sides of the silicon rod vertically arranged at the cutting station to form two The sides opposite to each other make the cutting efficiency of silicon rods higher.
  • each said cutting head mechanism also includes:
  • the cleaning component is fixed on the positive side of the wire saw installation frame
  • the cleaning assembly has a plurality of cleaning nozzles, the first part of the cleaning nozzles is used to clean the cutting head mechanism on the opposite side and the current side, and the second part of the cleaning nozzles is used to clean the cutting head mechanism on the opposite side.
  • the cutting head mechanism on this side can also be cleaned by the first part cleaning nozzle of the cutting head mechanism on this side, the first part cleaning nozzle of the cutting mechanism on the opposite side and the second part cleaning nozzle of the cutting head mechanism on the opposite side,
  • the cutting head mechanism on this side is also cleaned by cleaning nozzles in multiple directions, so that each cutting head mechanism is cleaned by cleaning nozzles in multiple directions, and the cleaning efficiency is high.
  • the cleaning component is mainly to clean the cutting head mechanism on the opposite side, and also to clean the cutting head mechanism on this side.
  • the cleaning assembly includes:
  • the first lower cleaning assembly 413-1 is fixed on the front side of the jigsaw installation frame 411 and located above the driving wheel assembly 412-1, and the first part of the cleaning spray head of the first lower cleaning assembly is used for The driving wheel of the driving wheel assembly 412-1 of the cutting head mechanism on the side and this side is cleaned, and the second part of the cleaning nozzle is used to clean the driving wheel of the driving wheel assembly of the cutting head mechanism on the opposite side;
  • the second lower cleaning assembly 413-2 is fixed on the positive side of the wire saw installation frame 411 and is located above the lower transition wheel 412-2.
  • the first part of the cleaning nozzle of the second lower cleaning assembly is used for pairing The lower transition wheel 412-2 of the cutting head mechanism on the side and this side is cleaned, and the second part of the cleaning nozzle is used to clean the lower transition wheel of the cutting head mechanism on the opposite side.
  • the respective cleaning functions are realized.
  • the respective cleaning functions are realized by adjusting the orientations of the first part of the cleaning nozzles and the second part of the cleaning nozzles of the second lower cleaning component.
  • the cleaning assembly also includes:
  • the first upper cleaning assembly 413-3 is fixed on the front side of the wire saw installation frame 411 and is located above the tension wheel assembly 412-3, and the first part of the cleaning nozzle of the first lower cleaning assembly is used for The tension wheel of the tension wheel assembly 412-3 of the cutting head mechanism on the side and this side is cleaned, and the second part of the cleaning nozzle is used to clean the tension wheel of the tension wheel assembly of the cutting head mechanism on the opposite side;
  • the second upper cleaning assembly 413-4 is fixed on the positive side of the wire saw installation frame and above the upper transition wheel 412-3, and the first part of the cleaning spray head of the second upper cleaning assembly is used for the opposite side Clean with the upper transition wheel 412-3 of the cutting head mechanism on this side, and the second part of the cleaning nozzle is used to clean the upper transition wheel of the cutting head mechanism on the opposite side.
  • respective cleaning functions are realized.
  • the respective cleaning functions are realized by adjusting the orientations of the first part of the cleaning nozzles and the second part of the cleaning nozzles of the second upper cleaning component.
  • the positions of the first lower cleaning assembly and the second lower cleaning assembly are located outside the silicon rod, that is, the first lower cleaning assembly and the The second lower cleaning component and the silicon rods are respectively arranged in a staggered manner, that is, they do not interfere with each other.
  • the first lower cleaning assembly and the second lower cleaning assembly can clean the cutting head mechanism on the opposite side without being blocked by silicon rods.
  • the first upper cleaning assembly 413-3 and the second upper cleaning assembly 413-4 are higher than the cut silicon rods.
  • the silicon rods can be cleaned from above the cut silicon rods, and the cut silicon rods can be cleaned from top to bottom by virtue of the cleaning liquid flowing downward.
  • the cutting head mechanism also includes:
  • a spray assembly the spray assembly is fixed on the positive side of the wire saw installation frame; the spray assembly sprays during the preset pre-spray time and spray process before each cutting;
  • the spraying assembly has a spraying head, and the spraying head is used for spraying and cooling the silicon rod and the cutting slit formed by cutting the silicon rod with the annular diamond wire.
  • the spray head of the spray assembly sprays the cutting fluid on the cutting seam formed by cutting the silicon rod and the ring diamond wire.
  • it is beneficial to the cutting of the silicon rod.
  • it can also cool the ring diamond wire to avoid temperature too high.
  • the spray assembly includes:
  • the lower spray assembly 414-1 is fixed on the positive side of the wire saw installation frame 411; wherein, the lower spray assembly 414-1 has a plurality of lower spray nozzles arranged at intervals up and down, and the lower spray assembly Multiple lower spray nozzles of 414-1 are used to spray the cutting seam of cutting silicon rods in the cutting section;
  • the upper spray assembly 414-2 is fixed on the front side of the wire saw installation frame 411 and is located between the tension wheel assembly 412-3 and the machine head through hole 411-1; wherein, the upper spray The assembly 414-2 has a plurality of upper shower nozzles arranged laterally at intervals, and the plurality of upper shower nozzles of the upper shower assembly are used to spray the upper end surface of the silicon rod.
  • the cutting fluid is sprayed on the cutting slit of the cutting section to cut the silicon rod; shower.
  • Multiple upper spray nozzles of the upper spray assembly spray the cutting fluid on the upper surface of the silicon rod, making the cutting faster.
  • the cutting fluid also follows the cutting The downward flow of the segment also serves to cool the ring diamond wire, especially the cutting segment.
  • the tension wheel assembly 412-3 is composed of a tension motor 412-31, a speed reducer 412-32, a tension swing rod 412-33 and a tension wheel 412-34. Achieve high torque output from small motors and save motor costs. Limiting blocks are arranged on both sides of the tension pendulum so that the tension pendulum can rotate within a certain angle.
  • support frame 44 The structure of support frame 44, lateral feed mechanism and vertical feed mechanism
  • the cutting device 4 also includes:
  • Support frame 44 for being installed on the base 1 of the silicon rod cutting system
  • the lateral feed mechanism 451 corresponding to the cutting head mechanism 41 one by one, the cutting head mechanism and the corresponding lateral feed mechanism 451 are fixed and the two cutting sections are arranged oppositely, the lateral feed
  • the mechanism 451 is relatively slidably connected with the support frame to drive the two cutting sections closer to and farther away.
  • the transverse feed mechanism 451 is used to drive the two cutting head mechanisms 41 to move closer to and away from and to adjust the distance between the cutting sections of the two cutting head mechanisms of the same cutting device.
  • the two cutting head mechanisms of the same cutting device can approach and move away, so that the distance between the cutting segments of the two cutting head mechanisms of the same cutting device can be adjusted. That is, the two cutting sections of the same cutting head mechanism are arranged in parallel and the distance between the two cutting sections is adjustable.
  • the beneficial effect is that the cutting device is suitable for cutting silicon rods of various diameters, making the cutting device highly versatile.
  • the horizontal feed mechanism and the vertical feed mechanism form a feed mechanism.
  • the cutting device also includes:
  • the vertical feed mechanism 452 corresponding to the horizontal feed mechanism one by one is vertically fixed on the same side of the support frame 44 respectively, and the vertical feed mechanism 452 and the corresponding horizontal feed mechanism 451 fixed to drive the cutting head mechanism to move in the vertical direction;
  • the two vertical feeding mechanisms 452 are used to drive the two horizontal feeding mechanisms to move in the vertical direction, and then drive the cutting head mechanism to move in the vertical direction.
  • the vertical feed mechanism can drive the corresponding horizontal feed mechanism to move in the vertical direction, that is, the Z direction, and then drive the cutting head mechanism and its cutting section to move in the vertical direction, that is, the Z direction.
  • the placed silicon rod is cut from top to bottom in the Z direction, and drives the cutting head mechanism and its cutting section to reset after each cutting is completed.
  • the infeed mechanism includes:
  • Wire saw horizontal guide rail screw the screw nut of the wire saw horizontal guide rail screw is fixed at the vertical feed mechanism; wherein, the guiding direction of the guide rail of the wire saw horizontal guide rail screw is two cutting The direction of the segment approaching and moving away;
  • the wire saw horizontal sliding plate 451-1 is fixed to the slider of the wire saw horizontal guide rail lead screw and fixed to the cutting head mechanism;
  • a wire saw lateral drive motor and a wire saw lateral reducer, the wire saw lateral drive motor and the wire saw lateral reducer are connected to output rotary motion to the wire saw lateral guide rail screw;
  • the wire saw transverse guideway lead screw is used to convert the received rotational motion into linear motion along the guide rail of the wire saw transverse guideway lead screw, and through the slider and the wire of the wire saw transverse guideway lead screw
  • the saw transverse slide plate drives the cutting head mechanism to move in the transverse direction, that is, in the X direction.
  • the wire saw transverse guide rail lead screw and the wire saw transverse slide plate realize the transverse feed mechanism through a simple structure.
  • the vertical feed mechanism includes:
  • Wire saw vertical guide rail screw the screw nut of the wire saw vertical guide rail screw is fixed at the support frame; wherein, the guiding direction of the guide rail of the wire saw vertical guide rail screw is the vertical direction up and down That is, the Z direction;
  • the wire saw vertical slide plate 452-1 is fixed to the slider of the wire saw vertical guide rail screw and fixed to the wire nut of the wire saw horizontal guide rail screw;
  • a wire saw vertical drive motor and a wire saw vertical reducer output rotary motion to the wire saw vertical guide rail screw;
  • the wire saw vertical guide rail screw is used to convert the received rotational motion into linear motion along the guide rail of the wire saw vertical guide rail screw, and through the sliding motion of the wire saw vertical guide rail screw
  • the block drives the infeed mechanism and the cutting head mechanism to move in the vertical direction.
  • the screw nut and the support frame of the wire saw vertical guide rail lead screw are fixed as a whole and fixed relative to the machine base.
  • the slide block of the wire saw vertical guide rail screw and the screw nut of the wire saw horizontal guide rail screw are fixed as a whole.
  • the slider of the wire saw vertical guide rail screw, the wire saw vertical slide plate and the screw nut of the wire saw horizontal guide rail screw can move in the vertical direction as a whole, and then drive the lateral feed mechanism to move in the vertical direction, thereby driving The cutting head mechanism and its cutting segments move in the vertical direction.
  • the cutting device also includes:
  • the feed control unit is respectively connected with two wire saw horizontal drive motors and two wire saw vertical drive motors of the same cutting device, and is used to control the distance between the cutting sections of the two cutting head mechanisms, and also uses It is used to control the movement of the two cutting head mechanisms in the vertical direction.
  • the feed control unit, the horizontal drive motor of the wire saw and the vertical drive motor of the wire saw cooperate to realize the convenient control of the distance between the cutting sections of the two cutting head mechanisms in the lateral direction, and also realize the The movement of the cutting section of the mechanism in the vertical direction cuts, that is, the cutting can be controlled.
  • the vertical feed mechanism also includes:
  • the blocking pin 461, the socket of the blocking pin 461 is fixed on the upper part of the side of the support frame 44;
  • the blocking strip 462 is horizontally fixed on the vertical sliding plate 452-1 of the jigsaw;
  • the blocking pin is used for when the cutting head mechanism moves to the highest position, the plug of the blocking pin can extend out to block the downward movement of the blocking bar, thereby preventing the jigsaw from sliding vertically and cutting The head mechanism moves downward.
  • the cutting device includes a silicon rod chuck mechanism 42, and the silicon rod chuck mechanism 42 includes:
  • the upper floating head 422 is installed at the chuck frame 421 and is used to press on the upper end surface of the vertically placed silicon rod;
  • the supporting edge leather support is connected with the chuck frame 421 and can extend downwards and reset upwards.
  • the supporting edge leather support is used to extend downwards and support the outer peripheral surface of the silicon rod.
  • the supporting edge leather support It is also used to reset upwards away from the outer peripheral surface of the silicon rod.
  • the collet frame is the basis for the installation.
  • the upper floating head is used to press on the upper surface of the vertically placed silicon rod to realize the vertical clamping of the silicon rod.
  • the upper floating head itself can be tilted at a preset angle to reduce or counteract the stress generated by the cutting.
  • an edge skin support is provided.
  • the supporting edge leather support is connected with the collet frame and the supporting edge leather support can stretch out downwards and reset upwards.
  • the edge skin support is stretched out downwards and supported on the outer peripheral surface of the silicon rod, so that the silicon rod is cut at the cutting section to form a square rod and a side skin, and the edge skin support Hold the side skin on the outer side of the upper end to avoid the possibility of the side skin falling over.
  • the edge skin support is reset upwards, no longer contacts with the edge skin, and the edge skin can be taken away.
  • the collet frame is a rigid collet frame.
  • the chuck frame can move up and down and the upper floating head is used to press against the upper end surface of the vertically placed silicon rod.
  • the upper floating head is installed on the downward facing end surface of the chuck frame.
  • the upper floating head can be conveniently pressed against the upper end surface of the vertically placed silicon rod, and can also be easily separated from the upper end surface of the cut silicon rod.
  • the buttress skin support includes:
  • the supporting part 423-1 of the support leather bracket is fixed with the chuck frame;
  • the support bar fixing part 423-2 and the side skin support bar 423-3, the side skin support bar 423-3 is fixed on the side of the support bar fixing part 423-2 away from the upper floating head and protrudes downward ;
  • the edge skin driving device is respectively connected with the edge skin support mounting part and the pole fixing part, and is used to drive the pole fixing part and the skin pole to extend downward and reset upward.
  • the buttress leather driving device is a buttress leather driving cylinder 423-4, and the cylinder body of the buttress leather driving cylinder is fixed to the buttress leather support mounting part 423-1.
  • the guide rod of the side support skin driving cylinder is fixed with the support rod fixing part 423-2, and the guide rod of the side support skin driving cylinder stretches and drives the support rod fixing part 423-2 and the side skin support rod 423-3 extends downward and resets upward.
  • the support rod fixing part and the side skin support rod are fixed as a whole, and are connected with the side skin support mounting part through the side skin driving cylinder.
  • the guide rod elongation of the side skin driving cylinder, the side skin support rod and the side skin support rod extend downward as a whole, and the side skin support rod is supported on the outer peripheral surface of the silicon rod.
  • the guide rod of the side skin driving cylinder is retracted, and the side skin support rod is retracted upwards as a whole, and the side skin support rod is driven to retract upwards and leave the silicon rod.
  • the edge skin support rod extends downward to support the outer peripheral surface of the silicon rod.
  • the edge bar is retracted upwards, removing both edges.
  • the silicon rod chuck mechanism also includes:
  • the chuck frame vertical movement assembly 424 is fixed to the support frame 44 and is located between the two cutting head mechanisms 41;
  • the collet frame is connected with the vertical movement component of the collet frame, and the vertical movement component of the collet frame is used to drive the collet frame to move up and down in the vertical direction, that is, the Z direction, so as to drive the upward floating
  • the head presses on the upper end surface of the vertically placed silicon rod and leaves the upper end surface of the cut silicon rod.
  • the cutting device further includes a silicon rod support mechanism 43 for supporting the lower end surface of the vertically placed silicon rod, and the silicon rod support mechanism 43 is fixed at the cutting station.
  • the silicon rod support mechanism includes:
  • the silicon rod support mounting base 431, the silicon rod support mounting base 431 is fixed at the base of the silicon rod cutting system; that is, the silicon rod support mechanism is fixed at the position corresponding to a cutting station at the base;
  • the lower floating head 432 for supporting the lower end surface of the vertical silicon rod is installed above the silicon rod support mounting base 431 .
  • the lower floating head itself can be tilted at a preset angle to reduce or counteract the stress generated by the cutting.
  • the stress generated by the cutting will be reduced or offset by the inclination of the lower floating head, so as to prevent edge chipping when cutting to the lower part of the silicon rod.
  • the silicon rod support mechanism further includes a skin support assembly, and the skin support assembly includes:
  • the driving device for supporting the edge is fixed on the silicon rod support mounting seat 431 and arranged at a distance from the lower floating head;
  • edge skin support head 433-1 that is cut to form the edge skin position in the lower end surface of the silicon rod, and the edge skin support head 433-1 is fixed on the top of the edge skin support driving device; wherein, the The driving device for supporting the edge skin is used for locking when the silicon rod is cut into square rods and the edge skin so that the edge skin support head maintains a height to support the edge skin.
  • the process of placing the silicon rod on the silicon rod support mechanism is as follows:
  • the edge support head is at the initial position, and the top of the edge support head at the initial position is lower than the top of the lower floating head support head;
  • the silicon rod is placed on the lower floating head, and after the support head of the lower floating head is supported by the lower end surface of the silicon rod;
  • edge skin supporting head is pushed upwards tightly, and the edge skin supporting is locked with a driving device to the height of the edge skin supporting head.
  • the stress generated by the cutting drives the lower floating head to tilt a little, and the edge skin support head keeps supporting the edge skin all the time; like this, the lower floating head and the edge skin
  • the supporting head cooperates to reduce or counteract the stress generated by cutting, so as to prevent edge chipping when cutting to the lower part of the silicon rod.
  • the driving device for supporting the edge is the cylinder 433-2 for supporting the edge;
  • the cylinder body of the edge support cylinder 433-2 is fixed to the silicon rod support mounting seat 431, and the guide rod of the edge support cylinder 433-2 is fixed to the edge support head 433-1.
  • the lower floating head has three lower floating head support heads 432 - 1 protruding upward, and the three lower floating head support heads 432 - 1 are located at three vertices of a triangle.
  • the three lower floating head support heads can define a plane, so that each of the three lower floating head support heads supports the lower end surface of the silicon rod.
  • the upper floating head has three upper floating head pressing heads protruding downward, and the three upper floating head pressing heads are located at three vertices of a triangle.
  • the three upper floating head pressing heads can determine a plane, so that each of the three upper floating head pressing heads is pressed against the lower end surface of the silicon rod.
  • the lower floating head When the cutting section of the cutting head mechanism is cutting from top to bottom, the lower floating head is driven by the stress generated by the cutting to cause a slight inclination of the floating head, and the upper floating head can compensate, so that the silicon rod can be stably clamped on the lower floating head. between the head and the floating head.
  • edge support assemblies there are four edge support assemblies, and the four edge support assemblies are located at four vertices of a rectangle; two of the edge support assemblies are used to support an edge formed by cutting a silicon rod.
  • a pair of edge skin supporting components can effectively support one edge skin.
  • the silicon rod support mechanism also includes a silicon rod rotating assembly, and the silicon rod rotating assembly includes:
  • Silicon rod rotating shaft 434-1 the lower floating head is fixed on the silicon rod rotating shaft 434-1, and the silicon rod rotating shaft 434-1 is rotatably connected to the silicon rod supporting mounting seat 431;
  • the silicon rod driving motor 434 - 2 is fixed under the silicon rod support mount 431 and connected with the silicon rod rotating shaft 434 - 1 to drive the silicon rod rotating shaft 434 to rotate.
  • the edge support head After the first cut of the silicon rod, two edges are formed and removed, the edge support head is moved downwards to reset.
  • the silicon rod driving motor drives the rotating shaft of the silicon rod to rotate 90 degrees, and drives the lower floating head and the silicon rod sandwiched between the lower floating head and the upper floating head to rotate 90 degrees.
  • the silicon rod drive motor can actively drive the silicon rod rotation axis to rotate 90 degrees, and the silicon rod is passively rotated 90 degrees to prepare for the subsequent second cutting.
  • the fifth component the structure of the strip unloading device 5 of the silicon rod cutting system
  • two cutting devices 4 are fixed on the machine base 1, and the cutting devices 4 are used to cut the silicon rod from top to bottom to form square rods and edges, and the edges are unloaded by the edges. uninstall.
  • the edge skin unloading device 5 of the silicon rod cutting system includes:
  • the scrap clamping mechanism is used to hold the scrap formed by cutting silicon rods into square rods, and transport them to the scrap collection mechanism 53 for storage.
  • the skin collection mechanism 53 has a collection area, and the collection area corresponds to the cutting stations of the silicon rod cutting system one by one;
  • the scrap unloading device also includes a collection control unit, which is used to control the scrap clamping mechanism to clamp the scrap produced by the cut silicon rod from each cutting station, and transport and place it on the scrap collection mechanism. Inside, and the skin produced by cutting the same silicon rod is placed in the same collection area.
  • the scrap collecting mechanism is divided into a collection area, and the collection area corresponds to the cutting stations of the silicon rod cutting system one by one.
  • control the strip clamping mechanism to clamp the strips produced by the cut silicon rod from each cutting station, and transport the collection sequence placed in the strip collection mechanism, and cut the strips produced by the same silicon rod It is placed in the same collection area, that is, the four edges produced by cutting the same silicon rod into square rods are collected in the same collection area of the edge collection mechanism, which can meet the subsequent labeling of the four edges produced by the same silicon rod and provide the basis for subsequent management.
  • the silicon rods are coded to form a silicon rod code, so as to distinguish each silicon rod.
  • the silicon rod is cut to form a square rod and four edges, and the four edges from the same silicon rod are collected in the same collection area of the edge collection mechanism. In this way, the edge skins placed in the same collection area all come from the same silicon rod, which is convenient for encoding the subsequent edge skins.
  • the coding of the edge skins includes silicon rod codes and digital codes, such as silicon rod code-1, silicon rod code-2 , Rod Code-3 and Rod Code-4.
  • edge skin clamping mechanism 51 The structure of edge skin clamping mechanism 51
  • the edge leather clamping mechanism includes an edge leather clamping frame 51, and the edge leather clamping frame 51 includes:
  • the top jaw 512-1 and the bottom jaw 512-2 are installed on the front side of the side leather jaw mounting column 511 and are set up and down opposite to each other;
  • connection between at least one of the top jaw 512-1 and the bottom jaw 512-2 and the mounting column of the edge leather jaw is a sliding connection, and can be along the vertical direction, that is, the silicon rod
  • the Z direction of the cutting system moves up and down, and the side where the top jaw 512-1 and the bottom jaw 512-2 are installed on the edge leather jaw mounting column is the positive side.
  • the edge skin clamping frame of the edge skin clamping mechanism, the edge skin clamp jaw installation column is the installation basis of the top jaw and the bottom jaw.
  • the connection between at least one of the top jaw 512-1 and the bottom jaw 512-2 and the mounting column of the edge leather jaw is a sliding connection, so that the top jaw 512-1 and the bottom jaw 512-1 The distance between 512-2 can be adjusted.
  • the mounting column of the edge skin gripper is a rigid mounting column of the edge skin gripper.
  • the bottom jaw 512-2 is fixed on the bottom end of the side skin jaw mounting column 511;
  • connection between the top jaw 512-1 and the side leather jaw mounting column 511 is a sliding connection, and the top jaw 512-1 can move up and down along the vertical direction, that is, the Z direction of the silicon rod cutting system .
  • the bottom jaw is fixed on the bottom of the side leather jaw mounting column, and the top jaw is slidably installed on the top of the mounting column, and the top jaw and the bottom jaw are arranged oppositely.
  • the top jaw can move up and down along the vertical direction, that is, the Z direction of the silicon rod cutting system, so that the distance between the top jaw and the bottom jaw can be adjusted.
  • the top clamp When it is necessary to clamp the vertical edge, first adjust the distance between the top jaw and the bottom jaw to be larger than the edge to be clamped, and load the lower end surface of the vertical edge with the bottom jaw; after that, the top clamp The claw moves down along the Z direction until it presses against the upper end surface of the edge skin; at this time, the clamping of the edge skin has been realized.
  • the edge skin clamping frame 51 also includes:
  • edge leather claw slide plate 514 The edge leather claw slide plate 514, the edge leather claw slide plate 514 is placed on a plate surface of the edge leather claw back plate 513 and the connection with the edge leather claw back plate 513 is a sliding connection, And the edge leather gripper slide plate can move in the horizontal direction along the edge leather gripper back plate, and the movement direction of the edge leather gripper slider is consistent with the X direction of the silicon rod cutting system where the edge leather unloading device is located;
  • edge leather claw mounting column fixing plate 515, the two opposite ends of the edge leather claw mounting column fixing plate 515 are respectively fixed with the edge leather claw sliding plate 514 and the edge leather claw mounting column 511, Make the described edge leather claw mounting column 511, the edge leather claw mounting column fixing plate 515 and the edge leather claw sliding plate 514 be fixed as one;
  • edge leather jaw slide plate 514 moves left and right along the X direction of the silicon rod cutting system, driving the top jaw 512-1 and the bottom jaw 512-2 installed on the edge leather jaw mounting column 511 to be able to Move left and right in the X direction of the silicon rod cutting system.
  • the side leather gripper mounting column, the side leather gripper installation post fixing plate and the side leather gripper slide plate are fixed as one, as a whole, they can move left and right along the X direction of the silicon rod cutting system, so that they can be installed on the same side
  • the top jaw and the bottom jaw of the leather jaw mounting column can move left and right in the X direction of the silicon rod cutting system as a whole.
  • the side leather clamping mechanism can move left and right in the X direction of the silicon rod cutting system, so that the top jaw and the bottom jaw installed on the same side leather jaw mounting column can approach the X direction of the silicon rod cutting system to be clamped. Hold the vertical side skin.
  • each side leather clamp claw mounting column 511 there are two side leather clamp claw mounting columns 511, and the front side of each side leather clamp claw mounting column 511 is installed with the top clip Jaw 512-1 and bottom jaw 512-2;
  • fixing plates 515 for the mounting column of the edge leather claw there are two fixing plates 515 for the mounting column of the edge leather claw, each of which fixes one of the mounting column 511 of the edge leather claw;
  • the front sides of the two leather gripper claw mounting columns 511 are oppositely arranged.
  • the distance between the top jaw and the bottom jaw installed on the two side leather jaw mounting columns can be adjusted in the X direction of the silicon rod cutting system. Adjustment. It is especially suitable for the clamping of two opposite sides when the same silicon rod is cut into square rods.
  • the edge skin clamping frame 51 also includes:
  • Top jaw Z-direction guide rails 516 each of the side leather jaw mounting columns 511 has two top jaw Z-direction guide rails 516 arranged in parallel; wherein, the guiding direction of the top jaw Z-direction guide rails 516 is vertical direction, and consistent with the Z direction of the silicon rod cutting system;
  • the Z-direction slider of the top jaw is arranged on the back side of the top jaw 512-1;
  • the Z-direction movement cylinder of the top jaw is fixed at the mounting column 511 of the side leather jaw, and the piston rod of the Z-direction movement cylinder of the top jaw is fixed to the back side of the top jaw;
  • the cylinder for moving the top jaw in the Z direction is used to push the top jaw 512-1 to move up and down in the vertical direction, ie, the Z direction of the silicon rod cutting system, along the Z-direction rail of the top jaw.
  • the vertical movement of the top jaw can be realized through a simple structure.
  • the edge skin clamping frame also includes:
  • the X-direction guide rail of the gripper claw, the back plate of the side leather gripper claw near the plate surface of the side leather gripper claw slide plate has two parallel X-direction gripper jaw guide rails; wherein, the guiding direction of the gripper jaw X-direction guide rail is the same as The X direction of the silicon rod cutting system is consistent;
  • the slider in the X direction of the jaw is arranged on the surface of the side leather jaw slide plate close to the back plate of the side leather jaw;
  • the X-direction movement cylinder of the jaw is fixed at the back plate of the Bianpi gripper, and the piston rod of the X-direction movement cylinder of the gripper is fixed to the slider of the Bianpi gripper;
  • the cylinder for moving the jaws in the X direction is used to push the sliding plate of the side leather jaws to move along the guide rail in the X direction of the jaws, and then drive the top jaw and the bottom jaw installed on the fixed plate of a side leather jaw mounting column
  • the jaws can move closer or farther away in the X direction relative to the top jaw and the bottom jaw of the other side leather jaw mounting column fixing plate.
  • the lateral movement of the side leather jaw mounting column fixing plate in the X direction of the silicon rod cutting system can be realized through a simple structure. , so as to realize that the top jaw and the bottom jaw installed on the fixed plate of the claw mounting column of one side skin can be compared with the top jaw and the bottom jaw of the mounting column fixing plate of the other side leather jaw in the X of the silicon rod cutting system direction towards or away from.
  • the height of the mounting column fixing plate 515 of the edge leather jaw is smaller than the height of the mounting column 511 of the edge leather jaw, and the height of the edge leather jaw mounting column 511 is The height of the back plate 513 is smaller than the height of the mounting column 511 of the edge leather gripper.
  • the height requirement of the mounting column fixing plate for the side skin clamping jaws is relatively high, so as to adapt to the side skins produced by silicon rods of various heights.
  • the heights of the side leather gripper mounting column fixing plate, side leather gripper sliding plate and side leather gripper back plate are all smaller than the height of the side leather gripper installation column.
  • the fixed plate 515 of the mounting column of the side leather gripper is fixed at the middle position of the mounting post 511 of the side leather gripper, and the side wallet
  • the ratio of the length of the claw mounting column fixing plate 515 in the Z direction to the height of the edge leather clamping claw mounting column 511 is greater than or equal to one-third and less than two-thirds.
  • the position where the edge leather clamp claw mounting column fixed plate exerts force on the edge leather clamp claw mounting column is at the middle position of the height of the edge leather clamp claw mounting column, so that the silicon rods of various heights clamped by the edge leather clamping mechanism produce When the side skin is used, it is relatively stable, and the mounting column fixing plate of the side skin jaw is not easy to be damaged and deformed.
  • the fixing plate of the mounting column of the edge leather gripper, the mounting column of the edge leather gripper claw, and the sliding plate of the edge leather gripper claw are detachably connected.
  • the Bian leather gripper mounting column, the Bian leather gripper mounting post fixing plate and the Bian leather gripper sliding plate are three parts, which are fixed by detachable connection, and the requirements for manufacturing precision are relatively low. At the same time, when any part is damaged, such as when the mounting column fixing plate of the side leather gripper that bears a large downward force in the Z direction is damaged, only the damaged part needs to be replaced.
  • the edge skin clamping mechanism also includes:
  • the clamping frame movement assembly is fixed to the back plate of the edge leather gripper and installed on the base of the silicon rod cutting system, and the Y direction of the silicon rod cutting system is the same as the X direction and Z direction of the silicon rod cutting system. vertical;
  • the clamping frame moving component is used to drive the clamping frame to linearly reciprocate in three directions of X direction, Y direction and Z direction of the silicon rod cutting system.
  • the clamping frame movement assembly includes:
  • the X-direction guide rail 521-1 of the clamping frame is used to be fixed on the upper surface of the machine base of the silicon rod cutting system; wherein, the guiding direction of the X-direction guide rail of the clamping frame is consistent with the X direction of the silicon rod cutting system;
  • the X-direction movement slider of the clamping frame is fixed on the outer bottom of the X-direction mounting seat of the clamping frame, and the X-direction movement slider of the clamping frame cooperates with the X-direction movement guide rail of the clamping frame;
  • the X-direction mounting seat of the clamping frame can move along the X-direction guide rail of the clamping frame in the X-direction of the silicon rod cutting system, and drives the clamping frame to move in the X-direction of the silicon rod cutting system.
  • the clamping frame movement assembly further includes:
  • the clamping frame Y-direction rack and the clamping frame Y-direction gear that mesh with each other, the clamping frame Y-direction rack is fixed on the upper surface of the clamping frame X-direction mounting seat; wherein, the clamping frame Y
  • the guiding direction of the direction rack is consistent with the Y direction of the silicon rod cutting system, and the Y direction gear of the clamping frame is fixed on the outer bottom of the Y direction mounting seat of the clamping frame.
  • the clamping frame movement assembly further includes:
  • the clamping frame Z-direction guide rail screw, the screw nut of the clamping frame Z-direction guide rail screw is fixed on the upper surface of the clamping frame Y-direction mounting seat; wherein, the clamping frame Z-direction guide rail screw
  • the guiding direction of the guide rail is the vertical direction and is consistent with the Z direction of the silicon rod cutting system, and the slider of the Z-direction guide rail lead screw of the clamping frame is fixed at the back plate of the edge leather gripper;
  • the Z-direction guide rail screw of the clamping frame is used to convert the received rotational motion into a linear motion along the guide rail of the Z-direction guide rail screw of the clamping frame, and through the Z-direction guide rail screw of the clamping frame
  • the slider of the bar outputs linear motion.
  • the guide rail lead screw in the Z direction of the clamping frame is driven by a motor.
  • the skin collection mechanism 53 includes:
  • each group of leather boxes has at least one leather box 532, and one of the leather boxes is used as a collection area;
  • a leather box synchronous reverse movement assembly for driving the two leather boxes 532 to move synchronously and reversely.
  • the leather box synchronously reverse movement assembly is fixed on the collection chassis 531.
  • the box 532 is fixed with the synchronous reverse movement assembly of the leather box.
  • the synchronous reverse movement component of the side leather boxes enables the two sets of side leather boxes to realize synchronous reverse switching, which is convenient to operate; at the same time, it also prevents the two sets of side leather boxes from being located on the same side, causing interference to the placement of the side leather boxes.
  • the leather box synchronous reverse movement assembly includes:
  • Two side leather box guide rails 533-1 are fixed on the upper surface of the collection chassis 531 in parallel at intervals;
  • Two leather box sliders 533-2 are respectively arranged on the outer bottoms of two groups of leather boxes 532, and the leather box sliders 533-2 and the leather box guide rails 533-1 are slidingly matched;
  • the leather boxes in each group of leather boxes are arranged at intervals along the length direction of the leather box guide rail.
  • the leather box synchronous reverse movement assembly also includes:
  • the cylinder 533-3 for sliding the leather box is fixed on the collection bottom frame 531, and the piston rod of the cylinder 533-3 for sliding the leather box is fixed to the outer bottom of the first group of leather boxes;
  • the leather box is a group of side leather boxes that are fixed with the piston rod of the cylinder 533-3 for sliding the side leather box, and the second group of side leather boxes is a group of sides that are not fixed with the piston rod of the cylinder 533-3 for sliding the side leather box Leather box;
  • the synchronous wheel 533-4 is fixed on the upper surface of the collection chassis 531 and is located between the two groups of edge boxes 532;
  • Synchronous belt 533-5 the synchronous belt 533-5 bypasses the synchronous wheel 533-4 and the two ends of the synchronous belt 533-5 are respectively fixed with two sets of side leather boxes 532; wherein, the side leather boxes
  • the sliding cylinder 533-3 is used to push the first group of leather boxes to reciprocate and linearly move along the leather box guide rail 533-1, and then drive the second group of leather boxes to reciprocate and linearly move in the opposite direction.
  • each of the edge leather boxes 532 has four edge skin storage positions, and the four edge skin storage positions are arranged in two rows, and the two rows of edge skin storage positions are arranged along the edge of the edge skin.
  • the guiding direction of the cassette rails is provided next to each other.
  • one end of the two edge leather box guide rails is set as the edge leather position
  • the skin collection mechanism also includes:
  • the photoelectric support 534-1 is fixed with the collection bottom frame 531;
  • Two pairs of storage position facing photoelectric modules 534-2 are arranged in two rows; each pair of storage position facing photoelectric modules 534-2 is relatively fixed on the photoelectric bracket, and two pairs of storage position facing photoelectric modules 534-2 It is used to detect whether the edge skin is placed in the edge skin storage position of the edge leather box at the position to be edged.
  • the four strip storage positions of the same strip box are used to carry the four strips cut off from the same silicon rod after being cut into square bars, so as to encode the four strips from the same silicon rod.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)

Abstract

L'invention concerne un dispositif de coupe (4) d'un système de découpe de barreau de silicium, et un système de découpe de barreau de silicium. Le dispositif de coupe (4) comprend un ensemble scie à fil, une section de coupe d'un fil de diamant étant utilisée pour découper un barreau de silicium disposé verticalement de haut en bas ; un ensemble de détection (415) relié à l'ensemble scie à fil, l'ensemble de détection (415) étant utilisé pour détecter une surface incurvée de coupe réelle formée après que chaque découpe est achevée, de façon à obtenir la forme de la surface incurvée de découpe réelle ; la surface incurvée de découpe réelle formée après la découpe est achevée est une surface incurvée de découpe réelle après que le barreau de silicium est découpé et que les surfaces de bord sont retirées ; et une unité de commande de scie à fil connectée à l'ensemble de détection (415), l'unité de commande de scie à fil étant utilisée pour : ajuster dynamiquement la position de découpe de la section de découpe dans le processus de découpe suivant en fonction de la direction de courbure et du degré de courbure de la surface incurvée de découpe réelle dans la coupe précédente. Le système de découpe de barreau de silicium comprend le dispositif de coupe (4). Selon des modes de réalisation, la surface incurvée de découpe réelle formée après achèvement de chaque découpe peut être détectée, de telle sorte que la section de découpe est ajustée de manière dynamique et précise dans le processus de découpe suivant.
PCT/CN2022/127598 2021-11-01 2022-10-26 Dispositif de coupe d'un système de découpe de barreau de silicium et système de découpe de barreau de silicium WO2023072126A1 (fr)

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