WO2023072126A1 - Cutting device of silicon rod cutting system, and silicon rod cutting system - Google Patents

Cutting device of silicon rod cutting system, and silicon rod cutting system Download PDF

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Publication number
WO2023072126A1
WO2023072126A1 PCT/CN2022/127598 CN2022127598W WO2023072126A1 WO 2023072126 A1 WO2023072126 A1 WO 2023072126A1 CN 2022127598 W CN2022127598 W CN 2022127598W WO 2023072126 A1 WO2023072126 A1 WO 2023072126A1
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WO
WIPO (PCT)
Prior art keywords
cutting
silicon rod
jaw
edge
support
Prior art date
Application number
PCT/CN2022/127598
Other languages
French (fr)
Chinese (zh)
Inventor
刘克村
孙鹏
郭世锋
戴鑫辉
周聪
杨国栋
Original Assignee
青岛高测科技股份有限公司
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Publication of WO2023072126A1 publication Critical patent/WO2023072126A1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • B28D5/045Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0064Devices for the automatic drive or the program control of the machines
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0076Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Definitions

  • the present application relates to the technical field of silicon rod cutting, and in particular, relates to a cutting device of a silicon rod cutting system and a silicon rod cutting system.
  • the field of photovoltaic solar power generation has received more and more attention and development.
  • the usual crystalline silicon solar cells are made on high-quality silicon wafers, which are cut from pulled or cast silicon rods by wire sawing, that is, wire cutting technology.
  • Wire cutting technology is a relatively advanced square root processing technology in the world at present. Its principle is to rub the workpiece (such as silicon rod, sapphire, or other semiconductor hard and brittle materials) through high-speed moving diamond wire, and cut out a square rod. , so as to achieve the purpose of cutting. Compared with the traditional knife saw blade, grinding wheel and internal circle cutting, the wire cutting technology has the advantages of high efficiency, high production capacity and high precision.
  • the existing silicon rod cutting system can no longer meet the requirements of the photovoltaic industry for silicon wafers.
  • the embodiment of the present application provides a cutting device and a silicon rod cutting system with a new structure.
  • a cutting device of a silicon rod cutting system including a cutting head mechanism and a wire saw control unit with a self-learning function, and the cutting head mechanism includes:
  • a wire saw assembly the wire saw assembly has a diamond wire, and the cutting section of the diamond wire is used to cut the vertically arranged silicon rod from top to bottom;
  • the detection component is connected with the wire saw component, and the detection component is used to detect the actual cutting surface formed after each cutting to obtain the shape of the actual cutting surface; wherein, the actual cutting surface formed after the cutting is silicon The actual cut surface after the rod has been cut and the skin has been removed;
  • the wire saw control unit is connected with the detection component; the wire saw control unit is used for:
  • the cutting position of the cutting section is dynamically adjusted during the next cutting process.
  • a silicon rod cutting system including:
  • the above-mentioned cutting device which is used to cut silicon rods to form edges
  • An edge skin collection mechanism has a collection area, and the collection area corresponds to the cutting stations of the silicon rod cutting system one by one;
  • the collection control unit is used to control the scrap clamping mechanism to clamp the scrap, transport and place it in the scrap collection mechanism, and the scrap produced by cutting the same silicon rod is placed in the same collection area.
  • the detection component cooperates with the wire saw control unit with self-learning function.
  • the detection component can detect the actual cutting surface formed after each cutting is completed, and obtain the actual
  • the wire saw control unit can dynamically and accurately adjust the cutting section in the next cutting process to make the cutting surface closer to the plane.
  • Fig. 1 is the schematic diagram of the cutting process of the silicon rod cutting system of the embodiment of the present application
  • FIG. 1A is a schematic diagram of a silicon rod cutting system according to an embodiment of the present application.
  • FIG. 1B and 1C are schematic diagrams of the transfer device of the silicon rod cutting system shown in FIG. 1A transferring round silicon rods from the loading and unloading device to the cutting device;
  • FIG. 2A is a schematic diagram of a loading and unloading device of a silicon rod cutting system according to an embodiment of the present application
  • Fig. 2B is a schematic diagram of another angle of Fig. 2A;
  • Figure 2C is a partially enlarged view of Figure 2B;
  • 3A, 3B and 3C are schematic diagrams of the transfer device of the silicon rod cutting system of the embodiment of the present application.
  • 3D and 3E are schematic diagrams of the upper jaw assembly and the lower jaw assembly of the transfer device of FIG. 3A;
  • FIG. 3F is a schematic diagram of the four crystal lines of the silicon rod at the crystal line endpoints of the end faces of the silicon rod;
  • 4A is a schematic diagram of the cutting head mechanism of the cutting device of the silicon rod cutting system according to the embodiment of the present application;
  • Fig. 4B is a schematic diagram of two cutting head mechanisms of the same cutting device of the silicon rod cutting system of the embodiment of the present application cutting silicon rods from top to bottom;
  • Fig. 4C and Fig. 4D are the schematic diagrams of removing the two side skins formed by one cutting in Fig. 4B from the through hole of the machine head;
  • Fig. 4E is a schematic diagram of the tension wheel assembly of the cutting head mechanism shown in Fig. 4A;
  • Fig. 4F is a schematic diagram of the supporting frame, the lateral feed mechanism and the vertical feed mechanism of the cutting device shown in Fig. 1A;
  • FIG. 4G is a schematic diagram of the silicon rod chuck mechanism and the silicon rod support mechanism of the silicon rod cutting system shown in FIG. 1A cooperating to clamp the silicon rod;
  • Figure 4H is a schematic diagram of the silicon rod support mechanism shown in Figure 4G;
  • Fig. 4I, Fig. 4J and Fig. 4K are the schematic diagrams of the actual cutting curved surface and the theoretical cutting curved surface formed by the cutting of two parallel cutting sections of the cutting device shown in Fig. 4A;
  • Fig. 5 is a schematic diagram of the cooperation of the machine base, two cutting devices and the strip unloading device of the silicon rod cutting system according to the embodiment of the present application;
  • Fig. 5A is a schematic diagram of the edge skin clamping frame of the edge skin unloading device of the silicon rod cutting system according to the embodiment of the present application;
  • Figure 5B is a schematic diagram of the relative position of the edge skin clamping frame (with a cover plate) shown in Figure 5A before clamping the edge skin;
  • Fig. 5C is a schematic diagram of the cooperation of the edge skin clamping frame and the clamping frame moving assembly shown in Fig. 5A to form the edge skin clamping mechanism;
  • Fig. 5D is a schematic diagram of the cooperation between the edge skin clamping frame shown in Fig. 5A and the cutting device of the silicon rod cutting system;
  • 5E is a schematic diagram of collecting the scrap by the scrap collecting mechanism of the scrap unloading device of the silicon rod cutting system according to the embodiment of the present application.
  • the silicon rod cutting system of the embodiment of the present application is used for vertically cutting circular silicon rods placed vertically.
  • the process of cutting silicon rods is shown in Figure 1.
  • a circular silicon rod is cut twice to form a square rod and four sides.
  • Vertical round silicon rods are also called vertical round silicon rods.
  • the silicon rod cutting system of the embodiment of the present application includes:
  • Machine base 1, described machine base 1 has two parallel and spaced apart cutting stations;
  • Two cutting devices 4 are fixed on the base 1, and the two cutting devices 4 correspond to the two cutting stations one by one; wherein, the cutting device 4 has a diamond wire, and the diamond wire
  • the part used to cut the silicon rod in motion is the cutting section, the cutting section is a cutting section arranged horizontally and the cutting section is used to cut the silicon rod vertically placed at the cutting station from top to bottom. cutting;
  • the loading and unloading device 2 is fixed with the machine base 1; wherein, the loading and unloading device 2 is used for loading of circular silicon rods and blanking of square rods formed by cutting;
  • the transfer device 3 is installed on the machine base 1 and is located between the two cutting stations; wherein, the transfer device 3 is used to transfer the silicon rods loaded by the loading and unloading device 2 to two
  • the cutting station is used to transfer the square bars formed on the two cutting stations to the loading and unloading device 2 . That is, the transfer device is used to transfer silicon rods and square rods between the loading and unloading device 2 and the cutting device 4 .
  • the height direction of the silicon rod cutting system is the Z direction of the silicon rod cutting system, that is, the Z direction of the silicon rod cutting system is the vertical direction, and the direction in which the two cutting stations are arranged is the X direction of the silicon rod cutting system.
  • the Y direction of the rod cutting system is perpendicular to the X and Z directions of the silicon rod cutting system.
  • Two independent cutting stations are arranged in parallel at intervals on the machine base, and each of the two cutting stations corresponds to a cutting device, and the two cutting stations share a set of loading and unloading device 2, transfer device 3 and edge skin unloading device 5.
  • the two cutting stations in the silicon rod cutting system share a loading and unloading device and a transfer device, so that the silicon rod cutting system has fewer components and occupies less space.
  • the silicon rod cutting system further includes a trim unloading device 5 for clamping, transporting and collecting the trim formed by cutting silicon rods.
  • described edge skin unloading device 5 comprises:
  • a skin collection mechanism 53 the skin collection mechanism 53 has a collection area, and the collection area corresponds to the cutting station one by one;
  • the edge skin clamping mechanism 51 is used to clamp the edge skin formed by cutting the silicon rod at the cutting station, and transport the edge skin to be placed in the edge skin collection mechanism, and cut the edge skin formed by the same silicon rod. The skins are placed in the same collection area.
  • the two cutting stations share one edge skin clamping mechanism, and the edge skins formed by the two cutting stations are transported and placed in the same edge skin collecting mechanism.
  • the two cutting stations in the silicon rod cutting system share a scrap clamping mechanism and a scrap collecting mechanism, so that the silicon rod cutting system has fewer components and occupies less space.
  • each of the cutting devices has two oppositely arranged cutting head mechanisms 41, and the cutting head
  • the mechanism 41 has a diamond wire and a vertical head through hole 411-1, and the cutting section of the diamond wire and the head through hole 411-1 are staggered, that is, they do not interfere with each other; wherein, the cutting section is the diamond wire in the The part used to cut silicon rods in motion;
  • the edge skin clamping mechanism is specifically used to clamp the edge skin by entering between the two cutting head mechanisms 41 from the through hole of the machine head, and withdraw from the through hole 411-1 of the machine head The edge skin is taken out between the two cutting head mechanisms 41 .
  • the first component the structure of the frame of the silicon rod cutting system
  • the base of the silicon rod cutting system is a basic support with high rigidity and stability. In the layout of the workshop, the base of the silicon rod cutting system can be connected with the bases of other systems to form a complete production line.
  • the second component the structure of the loading and unloading device of the silicon rod cutting system
  • the loading and unloading device 2 of the silicon rod cutting system includes a round rod feeding assembly, and the round rod feeding assembly includes:
  • the loading and unloading device also includes:
  • the loading and unloading support frame 23, the round bar loading frame 211 is rotatably connected to the loading and unloading support frame 23;
  • the feeding and turning drive device is respectively fixed with the bottom of the loading and unloading support frame and the outer bottom of the round bar feeding rack, and the feeding turning driving device is used to drive the round bar feeding rack from the round bar
  • the initial position of the rack is turned 90 degrees
  • the feeding processing unit is used to control the feeding turning drive device to control the round bar feeding rack to accelerate the turning first, and when the round bar feeding rack turns over to reach a preset angle, reduce the rotation speed of the round bar feeding rack Flip speed until flipped to 90 degrees.
  • the value range of the preset angle is greater than or equal to 60 degrees and less than or equal to 85 degrees.
  • the feeding and turning drive device adopts the feeding and turning oil cylinder 216;
  • the cylinder body of the described feeding turning oil cylinder 216 is fixed on the bottom of the described loading and unloading support frame, and the upper end of the guide bar of the described feeding turning oil cylinder 216 is fixed with the outer bottom of the described round rod feeding frame 211, and the upper end
  • the material turning cylinder 216 is used to drive the round bar feeding rack 211 to turn over 90 degrees from the initial position of the round bar feeding rack;
  • the feeding processing unit is specifically used to reduce the elongation speed of the feeding turning cylinder 211 to reduce the turning speed of the round bar feeding rack 211 when the round bar feeding rack 211 is overturned to a preset angle. .
  • the loading and unloading device also includes:
  • the deceleration proximity switch 217 is connected with the feeding processing unit, fixed on the long arm of the round bar feeding rack and flipped to a preset angle position;
  • the material loading processing unit is specifically configured to adjust the flow rate of the oil inlet of the material loading and turning cylinder to reduce the turning speed until turning to 90 degrees after receiving the in-position signal of the deceleration proximity switch.
  • the combination of the deceleration proximity switch and the feeding processing unit realizes that when the round rod feeding rack is turned close to 90 degrees, that is, when the silicon rod is turned close to 90 degrees, the turning speed is reduced, so that the silicon rod is turned to 90 degrees.
  • the speed is low, the impact on the silicon rod is small, which plays a role in protecting the silicon rod.
  • the inner side of the short arm of the round bar feeding rack 211 is the length measurement reference plane 211-1;
  • the round bar feeding assembly also includes:
  • the round rod supporting mechanism 212 is fixed on the inner side of the long arm of the round rod feeding rack 211, and is used to support a horizontally placed circular silicon rod when the long arm of the round rod feeding rack 211 is placed horizontally;
  • Round bar clamping block 213 and round bar clamping drive device described round bar clamping drive device is respectively fixed with described round bar support mechanism and round bar clamping block; Wherein, described round bar clamping block 213 is used for Driven by the round rod clamping drive device, the circular silicon rod located on the round rod support mechanism is pushed to withstand the length measurement reference plane 211-1 and clamped and fixed;
  • the clamping block displacement measuring device 215 is fixed with the round bar feeding rack 211 and is used to measure the displacement of the round bar clamping block 213;
  • the feeding processing unit is also used to obtain the length of the round silicon rod according to the distance between the initial position of the round rod clamping block and the distance between the length measurement reference plane and the displacement of the round rod clamping block ;
  • the initial position of the round bar clamping block is the position where the round bar clamping block is located when the round bar clamping driving device is extended to the maximum length.
  • the L-shaped round rod feeding rack is placed horizontally with the long arm of the round rod feeding rack; after that, the round silicon rods are placed horizontally On the round bar support mechanism, the detection of material is carried out. For the subsequent transfer and cutting of silicon rods, the length of silicon rods needs to be measured. The distance between the position of the length measurement reference plane and the initial position of the round bar clamping block is determined.
  • the round bar clamping block is driven by the round bar clamping cylinder to move from the round bar clamping block to pushing the end face of one side of the silicon rod until it bears against the length side beam reference plane,
  • the clamping block displacement measuring device measures the displacement of the round rod clamping block, and then the round rod processing unit calculates the length of the circular silicon rod.
  • the detection of material is carried out through the photoelectric switch used for detection of material in the loading and unloading device.
  • the round bar clamping drive device adopts a round bar clamping cylinder 214, the cylinder body of the round bar clamping cylinder 214 is fixed to the round bar feeding rack 211, and the round bar clamping block 213 is fixed on the The upper end of the guide rod of the round rod clamping cylinder 214;
  • the round rod clamping block 213 is used to drive the round rod clamping cylinder 214 to push the circular silicon rod located on the round rod supporting mechanism to withstand the length measurement reference
  • the surface 211-1 is clamped and fixed; the initial position of the round bar clamping block is the position where the round bar clamping block is located when the guide rod of the round bar clamping cylinder is extended to the maximum length.
  • the feeding processing unit is specifically used to obtain the length L of the circular silicon rod according to the following relational formula:
  • K is the distance between the initial position of the round bar clamping block and the length measurement reference plane
  • S is the displacement of the round bar clamping block
  • the clamping block displacement measuring device is a tensile encoder.
  • the tensile encoder has a compact structure and is easy to install. Cooperating with the feeding processing unit, it can conveniently realize the length measurement of the circular silicon rod, and the measurement accuracy is also high.
  • the loading and unloading device also includes:
  • the photoelectric switch fixed on the round bar feeding frame detects and sends out a material signal, then the round bar clamps the cylinder to ventilate, and when the round bar clamps the cylinder to move, it drives the round bar clamping block to rotate and eject; then, the round bar clamps the cylinder Continue to drive the round rod clamping block to move, push the silicon rod from one end of the silicon rod until the other end of the silicon rod withstands the round rod clamping cylinder and clamps and fixes it.
  • the feeding and turning oil cylinder rotates around the axis by pushing the outer bottom of the round bar feeding rack.
  • the deceleration proximity switch detects the position, and adjusts the flow rate of the oil inlet of the feeding and turning cylinder through the feeding processing unit. , so that the turning speed is reduced until turning 90° in place.
  • the cutting process of the square bar is as follows:
  • the third component the structure of the transfer device of the silicon rod cutting system
  • the transfer device 3 of the silicon rod cutting system includes:
  • the upper jaw assembly and the lower jaw assembly are installed in parallel on the same side of the upper and lower material jaw frame 31 at intervals up and down;
  • the transfer driving assembly is used to drive the upper jaw assembly to move up and down in the vertical direction relative to the lower jaw assembly, and is also used to drive the upper jaw assembly and the lower jaw assembly to move up and down synchronously.
  • the direction in which the upper jaw assembly and the lower jaw assembly move up and down is the vertical direction, that is, the Z direction of the silicon rod cutting system.
  • the transfer drive assembly includes an upper jaw transfer drive device, which is respectively fixed to the lower jaw assembly and the upper jaw assembly and drives the upper jaw assembly to move up and down relative to the lower jaw assembly;
  • the lower jaw transfer driving device is respectively fixed with the loading and unloading jaw frame and the lower jaw assembly and drives the lower jaw assembly, upper jaw assembly and the upper jaw transfer driving device to move up and down synchronously.
  • the transfer drive assembly two functions are realized. One is that the upper jaw assembly can move upwards independently so that the distance between the upper jaw assembly and the lower jaw assembly can be increased, and it can also move downwards independently so that the upper jaw assembly and the distance between the lower jaw assembly resets and becomes smaller.
  • the distance between the upper jaw assembly and the lower jaw assembly may not need to be adjusted, and only the lower jaw assembly needs to be used for clamping; when the silicon rod or square rod is longer , the distance between the upper jaw assembly and the lower jaw assembly can be kept constant and the upper jaw assembly and the lower jaw assembly can be clamped at the same time; when the silicon rod or square rod is extra long, the upper jaw assembly can be increased The distance between the lower jaw assembly and the lower jaw assembly can stably clamp silicon rods or square rods during transfer.
  • the second is that the transfer device holds the silicon rod or the square rod. When it needs to be lifted and rotated, the distance between the upper jaw assembly and the lower jaw assembly remains unchanged, and they move upward synchronously. Or the square rod is lifted to transfer the silicon rod or square rod; after the silicon rod or square rod is transferred in place, the distance between the upper jaw assembly and the lower jaw assembly remains unchanged, and they move downward synchronously. Rod or square stick down.
  • the transport drive assembly includes:
  • the cylinder body of the transfer air-hydraulic cylinder 321 is fixed on the bottom of the loading and unloading jaw frame 31, and the upper end of the guide rod of the transfer air-hydraulic cylinder 321 is fixed to the lower jaw assembly;
  • the gas-liquid converter 322 is connected with the air-liquid cylinder 321; wherein, the gas entering the air-liquid converter 322 squeezes the hydraulic oil into the air-liquid cylinder 321 to drive the air-liquid cylinder 321
  • Transfer air cylinder 323, the cylinder block of described transfer air cylinder 323 is fixed with described lower jaw assembly, the guide rod upper end of described transfer air cylinder 323 is fixed with described upper jaw assembly; Wherein, the air source enters described transfer air cylinder 323 The gas drives the guide rod of the air transfer cylinder 323 to lift up the upper jaw assembly; that is, the lower jaw transfer driving device includes the air transfer cylinder 323 .
  • the combination of the transfer air-hydraulic cylinder and the transfer air cylinder makes the structure of the transfer drive assembly smaller, which can make the overall structure of the transfer device smaller.
  • the air transfer cylinder retracts and the air transfer cylinder extends; when a short silicon rod is clamped, the air transfer cylinder and the air/hydraulic cylinder extend simultaneously.
  • the lower jaw assembly clamps the round silicon rod before cutting or the square rod after cutting, and then the air cylinder moves to lift the silicon rod or square rod. stick for transfer.
  • the distance between the upper jaw assembly and the lower jaw assembly remains unchanged, and they jointly participate in clamping the round silicon rod before cutting or the square rod after cutting.
  • the upper jaw assembly and the lower jaw assembly jointly participate in clamping the round silicon rod before cutting or the square rod after cutting.
  • the upper jaw assembly can move up and down due to the function of the cylinder
  • the vertical direction of the jaw frame moves up and down, which is suitable for the clamping action of different lengths of round silicon rods before cutting or square rods after cutting.
  • the upper jaw assembly and the lower jaw assembly each include:
  • the left jaw 332-1 and the right jaw 332-2 are fixed on the positive side of the transfer jaw fixing plate 331 and are arranged oppositely, and the left jaw 332-1 and the right jaw 332-2 can approach and move away from each other. , to realize clamping and loosening; wherein, the side where the transfer jaw fixing plate fixes the left jaw and the right jaw is the positive side of the transfer jaw fixing plate;
  • the silicon rod detection component is fixed on the positive side of the transfer jaw fixing plate 331, and the silicon rod detection probe 333 of the silicon rod detection component is located at the left jaw 332-1 and the right jaw 332- between 2;
  • the transfer device also includes a silicon rod detection processing unit connected to the silicon rod detection component 333; wherein:
  • the silicon rod detection component is used to maintain a gap between the left jaw 332-1 and the right jaw 332-2 and the silicon rod, that is, the silicon rod is not clamped, and the bottom of the silicon rod is placed on the silicon rod
  • the silicon rod detection probe 333-1 of the silicon rod detection component keeps pressing on the outer peripheral surface of the silicon rod
  • the silicon rod detection processing unit is used to obtain the position of the crystal line of the silicon rod according to the signal of the silicon rod detection probe of the silicon rod detection component, and judge whether the silicon rod meets the preset silicon rod standard.
  • the silicon rod detection processing unit is specifically used for:
  • the number of crystal lines of the silicon rod is less than 4 or greater than 4, it is judged that the silicon rod does not meet the preset silicon rod standard
  • the four crystal lines of the silicon rod 6 are in the crystal line endpoints 61 on the end faces of the silicon rods, and every two adjacent crystal line endpoints 61 Connect the lines to form four cutting lines;
  • any of the four included angles formed by the four cutting straight lines is less than 85 degrees or greater than 95 degrees, it is judged that the silicon ingot does not meet the preset silicon ingot standard, that is, the crystal line of the silicon ingot is too inclined. Even after cutting, the square bar cannot be obtained, and subsequent cutting will not be performed.
  • the silicon rod detection component cooperates with the silicon rod detection processing unit to make a judgment on whether the silicon rod meets the preset silicon rod standard, avoiding the cutting of silicon rods that do not meet the preset silicon rod standard, and improving the efficiency , reducing time wastage.
  • the silicon rod detection processing unit is also used for:
  • the above processing process of the silicon rod detection unit needs to be carried out based on the signal of the silicon rod detection component.
  • the transfer device also includes:
  • Two vertical guide rails 341 are vertically arranged in parallel on one side of the transfer jaw fixing plate 331;
  • Two transfer jaw sliders are fixed on the back side of the transfer jaw fixing plate 331, and the transfer jaw sliders are slidably connected to the vertical guide rail 341;
  • the upper end of the guide rod of the transfer air-hydraulic cylinder 321 is fixed to the transfer jaw fixing plate of the lower jaw assembly, and the upper end of the guide rod of the transfer air cylinder 323 is fixed to the transfer jaw fixing plate of the upper jaw assembly. fixed.
  • the transfer air-hydraulic cylinder can drive the whole lower jaw assembly to move up and down relative to the upper and lower material jaw frame in the height direction of the upper and lower material jaw frame.
  • the transfer air cylinder can drive the whole upper jaw assembly to move up and down in the vertical direction relative to the lower jaw assembly.
  • each of the upper jaw assembly and the lower jaw assembly further includes:
  • a jaw synchronous reverse movement assembly the left jaw and the right jaw are mounted on the transfer jaw fixing plate through the jaw synchronous reverse movement assembly;
  • the jaw synchronous reverse movement assembly is used to drive the left jaw and the right jaw to move synchronously and reversely to approach and move away from each other.
  • the synchronous reverse movement components of the jaws include:
  • Transfer jaw cylinder 351 the cylinder body of the transfer jaw cylinder 351 is fixed with the transfer jaw fixing plate 331;
  • the synchronous gear 354 meshes with the two racks 353 .
  • the transfer device also includes:
  • the transfer rotation mechanism, the frame of the loading and unloading jaws is fixed on the transfer rotation mechanism, the transfer rotation mechanism is installed on the base of the silicon rod cutting system and is located between the two cutting stations of the silicon rod cutting system movement between
  • the transfer rotation mechanism is used to drive the frame of the loading and unloading jaws to rotate, and is also used to move along the transverse direction of the silicon rod cutting system between the two cutting stations of the silicon rod cutting system, and is also used to The Y direction of the rod cutting system moves, and the Y direction of the silicon rod cutting system is consistent with the forward and backward direction of the transfer device approaching and away from the loading and unloading device of the silicon rod cutting system.
  • the transfer rotation mechanism can drive the loading and unloading jaw frame to rotate and can move between the two cutting stations of the silicon rod cutting system, and can drive the loading and unloading jaw frame to approach and move away from the loading and unloading device.
  • the process of transferring silicon rods to the cutting station specifically includes:
  • the process of transporting the cut square bar from the cutting station including:
  • the transfer rotation mechanism is mainly composed of a transfer motor, a transfer harmonic reducer and a revolving base 361 .
  • the flexible wheel of the harmonic reducer is installed on the slewing seat 361 at the same time, and the steel wheel of the harmonic reducer is installed on the frame of the loading and unloading jaws, so that the transfer motor makes the frame of the loading and unloading jaws on the slewing seat through the transfer of the harmonic reducer
  • a rotary towline is installed on the slewing seat, which is used for routing the cables and pipes of the slewing motion.
  • the transfer harmonic reducer greatly improves the transfer accuracy of silicon rods.
  • the fourth component the structure of the cutting device of the silicon rod cutting system
  • each cutting station corresponds to a cutting device 4, and a cutting device is in a cutting process, and two lateral settings of the cutting device
  • the parallel cutting section cuts the silicon rod from top to bottom to form two side skins.
  • the cutting head mechanism of the cutting device is structurally improved.
  • the cutting device of the silicon rod cutting system includes a cutting head mechanism 41, wherein, the cutting head mechanism is used to form a transversely arranged cutting section to a vertically placed Silicon rods are cut.
  • the cutting head mechanism 41 includes a wire saw assembly; the wire saw assembly includes:
  • a wire saw mounting frame 411 the wire saw mounting frame 411 has a vertical machine head through hole 411-1;
  • the diamond wire is arranged on the positive side of the wire saw installation frame 411, and the part of the diamond wire used to cut the silicon rod during the movement is the cutting section;
  • the cutting section and the head through hole 411-1 are arranged in a staggered manner, that is, they do not interfere with each other.
  • Jaw mounting post 511 goes in and out.
  • edge leather clamping frame 51 and the edge leather clamp claw mounting column 511 are described in the fifth component below.
  • the cutting section cuts the silicon rod to form a square rod and a side skin, and the side skin needs to be taken out.
  • Fig. 5A, Fig. 5B, Fig. 5C and Fig. 5D the process of taking out the skin will be described:
  • edge leather clamping claw mounting column 511 of the edge leather clamping frame 51 of the edge leather clamping mechanism passes through the machine head through hole forward, and the edge leather clamping mechanism clamps the edge leather; afterward, it passes backward with the edge leather
  • the machine head passes through the hole 411-1, thereby removing the edge skin from the cutting station.
  • the jigsaw mount itself does not need to move during this process.
  • Cutting device because the wire saw mounting frame of the wire saw assembly of the cutting machine head mechanism is provided with a machine head through hole, the process of moving the edge skin from the cutting station does not need to move the wire saw mounting frame, which saves time and improves In order to improve the efficiency of removing the edge skin, the process of removing the edge skin from the cutting station is relatively simple, which in turn makes the efficiency of the silicon rod cutting system higher.
  • the machine head through hole 411-1 is a vertically elongated machine head through hole.
  • the wire saw mounting frame is a rigid wire saw mounting frame.
  • the cutting head mechanism also includes:
  • the detection component 415 is connected with the wire saw component, and the detection component 415 is used to detect the actual cutting curved surface formed after each cutting, so as to obtain the shape of the actual cutting curved surface.
  • the detection component can detect the actual cutting surface formed after each cutting, and there are two possibilities to obtain the shape of the actual cutting surface: one is a cutting surface with a convex middle and flat ends, and the other is a concave middle and flat ends Cut surfaces. It provides a basis for dynamically and accurately adjusting the cutting section in the next cutting process.
  • the cutting head mechanism further includes a wire saw control unit connected to the detection component 415; the wire saw control unit is used for:
  • the cutting position of the cutting section is dynamically adjusted during the next cutting process, and the dynamic adjustment includes:
  • the direction of adjustment of the cutting section is opposite to the bending direction of the actual cutting surface last time
  • the degree of adjustment of the cutting position of the cutting segment is the difference between the curvature degree of the actual cutting surface and the curvature degree of the theoretical cutting surface last time.
  • the detection component cooperates with the wire saw control unit. Firstly, the detection component can detect the actual cutting surface formed after each cutting. Afterwards, the wire saw control unit can dynamically and accurately adjust the cutting section in the next cutting process so that the actual cutting surface is closer to the plane.
  • the cutting segments are two and arranged in parallel, and the two cutting segments are respectively the left cutting segment and the right cutting segment, and the actual cutting formed by the two cutting segments
  • the cutting surfaces are the left actual cutting surface SJQM1 and the right actual cutting surface SJQM2 in turn.
  • Fig. 4I shows that the left actual cutting surface SJQM1 and the right actual cutting surface SJQM2 are both the actual cutting surfaces with a convex middle and flat ends;
  • Fig. 4J shows that the left actual cutting surface SJQM1 and the right actual cutting surface SJQM2 are both concave in the middle and flat at both ends
  • Figure 4K shows that the left actual cutting surface SJQM1 is an actual cutting surface with a convex middle and two flat ends, and the right actual cutting surface SJQM2 is an actual cutting surface with a concave middle and two flat ends.
  • the dynamic adjustment specifically includes:
  • the adjustment direction of the left cutting segment is opposite to the bending direction of the last actual left cutting surface
  • the degree of adjustment of the cutting position of the left cutting section is the difference between the degree of curvature of the actual left cutting surface and the degree of curvature of the theoretical cutting surface LLQM1;
  • the direction of adjustment of the right cutting segment is opposite to the bending direction of the last actual right cutting curved surface SJQM2;
  • the adjustment degree of the cutting position of the right cutting segment is the difference ⁇ L between the curvature degree of the right actual cutting curved surface SJQM2 last time and the curvature degree of the theoretical cutting curved surface.
  • the detection component and the wire saw control unit work together to realize the dynamic and precise adjustment of the left cutting section and the right cutting section so that the actual cutting surface formed by each is closer to the plane.
  • the detection component 415 is located under the cutting section; wherein:
  • the detection component 415 is specifically used to detect the actual cutting surface formed by cutting the silicon rod and removing the edge skin during the process of the cutting head mechanism 41 retreating from bottom to top after each cutting is completed, and obtain the actual cutting surface. Cut the shape of the surface.
  • the cutting section is a cutting section arranged transversely and lower than the head through hole 411 - 1 .
  • the cutting head mechanism can move from top to bottom to cut silicon rods.
  • the horizontally arranged cutting section cuts the vertically arranged silicon rods from top to bottom. After the cutting is completed, the cut section is lower than the lower end surface of the silicon rod. At this time, during the process that the edge skin is removed from the cutting station through the through hole of the machine head, since the cutting section is lower than the through hole of the machine head, the cutting section will not interfere with the moving edge skin.
  • the wire saw assembly further includes:
  • the driving wheel assembly 412-1 and the lower transition wheel 412-2 are respectively arranged on the positive side of the wire saw installation frame 411;
  • the tension wheel assembly 412-3 and the upper transition wheel 412-4 are respectively arranged on the front side of the wire saw installation frame 411;
  • the annular diamond wire is wound around the outer peripheral surface of the driving wheel of the driving wheel assembly 412-1, the lower transition wheel 412-2, the tension wheel of the tension wheel assembly 412-3 and the upper transition wheel 412-4.
  • the driving wheel and the bottom end of the lower transition wheel form the cutting section, and the diamond wire does not interfere with the through hole of the machine head.
  • the driving wheel assembly is arranged at the lower part of the positive side of the wire saw installation frame.
  • the tension wheel assembly applies tension to the annular diamond wire, so that the annular diamond wire maintains a certain tension to effectively cut the silicon rod.
  • the lower transition wheel and the upper transition wheel adjust the direction of the annular diamond wire.
  • one cutting station of the silicon rod cutting system corresponds to one cutting device, one said cutting device includes two said cutting head mechanisms 41, and two said The cutting sections of the cutting head mechanism 41 are arranged oppositely.
  • a cutting device has two cutting head mechanisms, and the cutting segments of the two cutting head mechanisms are arranged oppositely. In this way, a cutting device can cut the opposite sides of the silicon rod vertically arranged at the cutting station to form two The sides opposite to each other make the cutting efficiency of silicon rods higher.
  • each said cutting head mechanism also includes:
  • the cleaning component is fixed on the positive side of the wire saw installation frame
  • the cleaning assembly has a plurality of cleaning nozzles, the first part of the cleaning nozzles is used to clean the cutting head mechanism on the opposite side and the current side, and the second part of the cleaning nozzles is used to clean the cutting head mechanism on the opposite side.
  • the cutting head mechanism on this side can also be cleaned by the first part cleaning nozzle of the cutting head mechanism on this side, the first part cleaning nozzle of the cutting mechanism on the opposite side and the second part cleaning nozzle of the cutting head mechanism on the opposite side,
  • the cutting head mechanism on this side is also cleaned by cleaning nozzles in multiple directions, so that each cutting head mechanism is cleaned by cleaning nozzles in multiple directions, and the cleaning efficiency is high.
  • the cleaning component is mainly to clean the cutting head mechanism on the opposite side, and also to clean the cutting head mechanism on this side.
  • the cleaning assembly includes:
  • the first lower cleaning assembly 413-1 is fixed on the front side of the jigsaw installation frame 411 and located above the driving wheel assembly 412-1, and the first part of the cleaning spray head of the first lower cleaning assembly is used for The driving wheel of the driving wheel assembly 412-1 of the cutting head mechanism on the side and this side is cleaned, and the second part of the cleaning nozzle is used to clean the driving wheel of the driving wheel assembly of the cutting head mechanism on the opposite side;
  • the second lower cleaning assembly 413-2 is fixed on the positive side of the wire saw installation frame 411 and is located above the lower transition wheel 412-2.
  • the first part of the cleaning nozzle of the second lower cleaning assembly is used for pairing The lower transition wheel 412-2 of the cutting head mechanism on the side and this side is cleaned, and the second part of the cleaning nozzle is used to clean the lower transition wheel of the cutting head mechanism on the opposite side.
  • the respective cleaning functions are realized.
  • the respective cleaning functions are realized by adjusting the orientations of the first part of the cleaning nozzles and the second part of the cleaning nozzles of the second lower cleaning component.
  • the cleaning assembly also includes:
  • the first upper cleaning assembly 413-3 is fixed on the front side of the wire saw installation frame 411 and is located above the tension wheel assembly 412-3, and the first part of the cleaning nozzle of the first lower cleaning assembly is used for The tension wheel of the tension wheel assembly 412-3 of the cutting head mechanism on the side and this side is cleaned, and the second part of the cleaning nozzle is used to clean the tension wheel of the tension wheel assembly of the cutting head mechanism on the opposite side;
  • the second upper cleaning assembly 413-4 is fixed on the positive side of the wire saw installation frame and above the upper transition wheel 412-3, and the first part of the cleaning spray head of the second upper cleaning assembly is used for the opposite side Clean with the upper transition wheel 412-3 of the cutting head mechanism on this side, and the second part of the cleaning nozzle is used to clean the upper transition wheel of the cutting head mechanism on the opposite side.
  • respective cleaning functions are realized.
  • the respective cleaning functions are realized by adjusting the orientations of the first part of the cleaning nozzles and the second part of the cleaning nozzles of the second upper cleaning component.
  • the positions of the first lower cleaning assembly and the second lower cleaning assembly are located outside the silicon rod, that is, the first lower cleaning assembly and the The second lower cleaning component and the silicon rods are respectively arranged in a staggered manner, that is, they do not interfere with each other.
  • the first lower cleaning assembly and the second lower cleaning assembly can clean the cutting head mechanism on the opposite side without being blocked by silicon rods.
  • the first upper cleaning assembly 413-3 and the second upper cleaning assembly 413-4 are higher than the cut silicon rods.
  • the silicon rods can be cleaned from above the cut silicon rods, and the cut silicon rods can be cleaned from top to bottom by virtue of the cleaning liquid flowing downward.
  • the cutting head mechanism also includes:
  • a spray assembly the spray assembly is fixed on the positive side of the wire saw installation frame; the spray assembly sprays during the preset pre-spray time and spray process before each cutting;
  • the spraying assembly has a spraying head, and the spraying head is used for spraying and cooling the silicon rod and the cutting slit formed by cutting the silicon rod with the annular diamond wire.
  • the spray head of the spray assembly sprays the cutting fluid on the cutting seam formed by cutting the silicon rod and the ring diamond wire.
  • it is beneficial to the cutting of the silicon rod.
  • it can also cool the ring diamond wire to avoid temperature too high.
  • the spray assembly includes:
  • the lower spray assembly 414-1 is fixed on the positive side of the wire saw installation frame 411; wherein, the lower spray assembly 414-1 has a plurality of lower spray nozzles arranged at intervals up and down, and the lower spray assembly Multiple lower spray nozzles of 414-1 are used to spray the cutting seam of cutting silicon rods in the cutting section;
  • the upper spray assembly 414-2 is fixed on the front side of the wire saw installation frame 411 and is located between the tension wheel assembly 412-3 and the machine head through hole 411-1; wherein, the upper spray The assembly 414-2 has a plurality of upper shower nozzles arranged laterally at intervals, and the plurality of upper shower nozzles of the upper shower assembly are used to spray the upper end surface of the silicon rod.
  • the cutting fluid is sprayed on the cutting slit of the cutting section to cut the silicon rod; shower.
  • Multiple upper spray nozzles of the upper spray assembly spray the cutting fluid on the upper surface of the silicon rod, making the cutting faster.
  • the cutting fluid also follows the cutting The downward flow of the segment also serves to cool the ring diamond wire, especially the cutting segment.
  • the tension wheel assembly 412-3 is composed of a tension motor 412-31, a speed reducer 412-32, a tension swing rod 412-33 and a tension wheel 412-34. Achieve high torque output from small motors and save motor costs. Limiting blocks are arranged on both sides of the tension pendulum so that the tension pendulum can rotate within a certain angle.
  • support frame 44 The structure of support frame 44, lateral feed mechanism and vertical feed mechanism
  • the cutting device 4 also includes:
  • Support frame 44 for being installed on the base 1 of the silicon rod cutting system
  • the lateral feed mechanism 451 corresponding to the cutting head mechanism 41 one by one, the cutting head mechanism and the corresponding lateral feed mechanism 451 are fixed and the two cutting sections are arranged oppositely, the lateral feed
  • the mechanism 451 is relatively slidably connected with the support frame to drive the two cutting sections closer to and farther away.
  • the transverse feed mechanism 451 is used to drive the two cutting head mechanisms 41 to move closer to and away from and to adjust the distance between the cutting sections of the two cutting head mechanisms of the same cutting device.
  • the two cutting head mechanisms of the same cutting device can approach and move away, so that the distance between the cutting segments of the two cutting head mechanisms of the same cutting device can be adjusted. That is, the two cutting sections of the same cutting head mechanism are arranged in parallel and the distance between the two cutting sections is adjustable.
  • the beneficial effect is that the cutting device is suitable for cutting silicon rods of various diameters, making the cutting device highly versatile.
  • the horizontal feed mechanism and the vertical feed mechanism form a feed mechanism.
  • the cutting device also includes:
  • the vertical feed mechanism 452 corresponding to the horizontal feed mechanism one by one is vertically fixed on the same side of the support frame 44 respectively, and the vertical feed mechanism 452 and the corresponding horizontal feed mechanism 451 fixed to drive the cutting head mechanism to move in the vertical direction;
  • the two vertical feeding mechanisms 452 are used to drive the two horizontal feeding mechanisms to move in the vertical direction, and then drive the cutting head mechanism to move in the vertical direction.
  • the vertical feed mechanism can drive the corresponding horizontal feed mechanism to move in the vertical direction, that is, the Z direction, and then drive the cutting head mechanism and its cutting section to move in the vertical direction, that is, the Z direction.
  • the placed silicon rod is cut from top to bottom in the Z direction, and drives the cutting head mechanism and its cutting section to reset after each cutting is completed.
  • the infeed mechanism includes:
  • Wire saw horizontal guide rail screw the screw nut of the wire saw horizontal guide rail screw is fixed at the vertical feed mechanism; wherein, the guiding direction of the guide rail of the wire saw horizontal guide rail screw is two cutting The direction of the segment approaching and moving away;
  • the wire saw horizontal sliding plate 451-1 is fixed to the slider of the wire saw horizontal guide rail lead screw and fixed to the cutting head mechanism;
  • a wire saw lateral drive motor and a wire saw lateral reducer, the wire saw lateral drive motor and the wire saw lateral reducer are connected to output rotary motion to the wire saw lateral guide rail screw;
  • the wire saw transverse guideway lead screw is used to convert the received rotational motion into linear motion along the guide rail of the wire saw transverse guideway lead screw, and through the slider and the wire of the wire saw transverse guideway lead screw
  • the saw transverse slide plate drives the cutting head mechanism to move in the transverse direction, that is, in the X direction.
  • the wire saw transverse guide rail lead screw and the wire saw transverse slide plate realize the transverse feed mechanism through a simple structure.
  • the vertical feed mechanism includes:
  • Wire saw vertical guide rail screw the screw nut of the wire saw vertical guide rail screw is fixed at the support frame; wherein, the guiding direction of the guide rail of the wire saw vertical guide rail screw is the vertical direction up and down That is, the Z direction;
  • the wire saw vertical slide plate 452-1 is fixed to the slider of the wire saw vertical guide rail screw and fixed to the wire nut of the wire saw horizontal guide rail screw;
  • a wire saw vertical drive motor and a wire saw vertical reducer output rotary motion to the wire saw vertical guide rail screw;
  • the wire saw vertical guide rail screw is used to convert the received rotational motion into linear motion along the guide rail of the wire saw vertical guide rail screw, and through the sliding motion of the wire saw vertical guide rail screw
  • the block drives the infeed mechanism and the cutting head mechanism to move in the vertical direction.
  • the screw nut and the support frame of the wire saw vertical guide rail lead screw are fixed as a whole and fixed relative to the machine base.
  • the slide block of the wire saw vertical guide rail screw and the screw nut of the wire saw horizontal guide rail screw are fixed as a whole.
  • the slider of the wire saw vertical guide rail screw, the wire saw vertical slide plate and the screw nut of the wire saw horizontal guide rail screw can move in the vertical direction as a whole, and then drive the lateral feed mechanism to move in the vertical direction, thereby driving The cutting head mechanism and its cutting segments move in the vertical direction.
  • the cutting device also includes:
  • the feed control unit is respectively connected with two wire saw horizontal drive motors and two wire saw vertical drive motors of the same cutting device, and is used to control the distance between the cutting sections of the two cutting head mechanisms, and also uses It is used to control the movement of the two cutting head mechanisms in the vertical direction.
  • the feed control unit, the horizontal drive motor of the wire saw and the vertical drive motor of the wire saw cooperate to realize the convenient control of the distance between the cutting sections of the two cutting head mechanisms in the lateral direction, and also realize the The movement of the cutting section of the mechanism in the vertical direction cuts, that is, the cutting can be controlled.
  • the vertical feed mechanism also includes:
  • the blocking pin 461, the socket of the blocking pin 461 is fixed on the upper part of the side of the support frame 44;
  • the blocking strip 462 is horizontally fixed on the vertical sliding plate 452-1 of the jigsaw;
  • the blocking pin is used for when the cutting head mechanism moves to the highest position, the plug of the blocking pin can extend out to block the downward movement of the blocking bar, thereby preventing the jigsaw from sliding vertically and cutting The head mechanism moves downward.
  • the cutting device includes a silicon rod chuck mechanism 42, and the silicon rod chuck mechanism 42 includes:
  • the upper floating head 422 is installed at the chuck frame 421 and is used to press on the upper end surface of the vertically placed silicon rod;
  • the supporting edge leather support is connected with the chuck frame 421 and can extend downwards and reset upwards.
  • the supporting edge leather support is used to extend downwards and support the outer peripheral surface of the silicon rod.
  • the supporting edge leather support It is also used to reset upwards away from the outer peripheral surface of the silicon rod.
  • the collet frame is the basis for the installation.
  • the upper floating head is used to press on the upper surface of the vertically placed silicon rod to realize the vertical clamping of the silicon rod.
  • the upper floating head itself can be tilted at a preset angle to reduce or counteract the stress generated by the cutting.
  • an edge skin support is provided.
  • the supporting edge leather support is connected with the collet frame and the supporting edge leather support can stretch out downwards and reset upwards.
  • the edge skin support is stretched out downwards and supported on the outer peripheral surface of the silicon rod, so that the silicon rod is cut at the cutting section to form a square rod and a side skin, and the edge skin support Hold the side skin on the outer side of the upper end to avoid the possibility of the side skin falling over.
  • the edge skin support is reset upwards, no longer contacts with the edge skin, and the edge skin can be taken away.
  • the collet frame is a rigid collet frame.
  • the chuck frame can move up and down and the upper floating head is used to press against the upper end surface of the vertically placed silicon rod.
  • the upper floating head is installed on the downward facing end surface of the chuck frame.
  • the upper floating head can be conveniently pressed against the upper end surface of the vertically placed silicon rod, and can also be easily separated from the upper end surface of the cut silicon rod.
  • the buttress skin support includes:
  • the supporting part 423-1 of the support leather bracket is fixed with the chuck frame;
  • the support bar fixing part 423-2 and the side skin support bar 423-3, the side skin support bar 423-3 is fixed on the side of the support bar fixing part 423-2 away from the upper floating head and protrudes downward ;
  • the edge skin driving device is respectively connected with the edge skin support mounting part and the pole fixing part, and is used to drive the pole fixing part and the skin pole to extend downward and reset upward.
  • the buttress leather driving device is a buttress leather driving cylinder 423-4, and the cylinder body of the buttress leather driving cylinder is fixed to the buttress leather support mounting part 423-1.
  • the guide rod of the side support skin driving cylinder is fixed with the support rod fixing part 423-2, and the guide rod of the side support skin driving cylinder stretches and drives the support rod fixing part 423-2 and the side skin support rod 423-3 extends downward and resets upward.
  • the support rod fixing part and the side skin support rod are fixed as a whole, and are connected with the side skin support mounting part through the side skin driving cylinder.
  • the guide rod elongation of the side skin driving cylinder, the side skin support rod and the side skin support rod extend downward as a whole, and the side skin support rod is supported on the outer peripheral surface of the silicon rod.
  • the guide rod of the side skin driving cylinder is retracted, and the side skin support rod is retracted upwards as a whole, and the side skin support rod is driven to retract upwards and leave the silicon rod.
  • the edge skin support rod extends downward to support the outer peripheral surface of the silicon rod.
  • the edge bar is retracted upwards, removing both edges.
  • the silicon rod chuck mechanism also includes:
  • the chuck frame vertical movement assembly 424 is fixed to the support frame 44 and is located between the two cutting head mechanisms 41;
  • the collet frame is connected with the vertical movement component of the collet frame, and the vertical movement component of the collet frame is used to drive the collet frame to move up and down in the vertical direction, that is, the Z direction, so as to drive the upward floating
  • the head presses on the upper end surface of the vertically placed silicon rod and leaves the upper end surface of the cut silicon rod.
  • the cutting device further includes a silicon rod support mechanism 43 for supporting the lower end surface of the vertically placed silicon rod, and the silicon rod support mechanism 43 is fixed at the cutting station.
  • the silicon rod support mechanism includes:
  • the silicon rod support mounting base 431, the silicon rod support mounting base 431 is fixed at the base of the silicon rod cutting system; that is, the silicon rod support mechanism is fixed at the position corresponding to a cutting station at the base;
  • the lower floating head 432 for supporting the lower end surface of the vertical silicon rod is installed above the silicon rod support mounting base 431 .
  • the lower floating head itself can be tilted at a preset angle to reduce or counteract the stress generated by the cutting.
  • the stress generated by the cutting will be reduced or offset by the inclination of the lower floating head, so as to prevent edge chipping when cutting to the lower part of the silicon rod.
  • the silicon rod support mechanism further includes a skin support assembly, and the skin support assembly includes:
  • the driving device for supporting the edge is fixed on the silicon rod support mounting seat 431 and arranged at a distance from the lower floating head;
  • edge skin support head 433-1 that is cut to form the edge skin position in the lower end surface of the silicon rod, and the edge skin support head 433-1 is fixed on the top of the edge skin support driving device; wherein, the The driving device for supporting the edge skin is used for locking when the silicon rod is cut into square rods and the edge skin so that the edge skin support head maintains a height to support the edge skin.
  • the process of placing the silicon rod on the silicon rod support mechanism is as follows:
  • the edge support head is at the initial position, and the top of the edge support head at the initial position is lower than the top of the lower floating head support head;
  • the silicon rod is placed on the lower floating head, and after the support head of the lower floating head is supported by the lower end surface of the silicon rod;
  • edge skin supporting head is pushed upwards tightly, and the edge skin supporting is locked with a driving device to the height of the edge skin supporting head.
  • the stress generated by the cutting drives the lower floating head to tilt a little, and the edge skin support head keeps supporting the edge skin all the time; like this, the lower floating head and the edge skin
  • the supporting head cooperates to reduce or counteract the stress generated by cutting, so as to prevent edge chipping when cutting to the lower part of the silicon rod.
  • the driving device for supporting the edge is the cylinder 433-2 for supporting the edge;
  • the cylinder body of the edge support cylinder 433-2 is fixed to the silicon rod support mounting seat 431, and the guide rod of the edge support cylinder 433-2 is fixed to the edge support head 433-1.
  • the lower floating head has three lower floating head support heads 432 - 1 protruding upward, and the three lower floating head support heads 432 - 1 are located at three vertices of a triangle.
  • the three lower floating head support heads can define a plane, so that each of the three lower floating head support heads supports the lower end surface of the silicon rod.
  • the upper floating head has three upper floating head pressing heads protruding downward, and the three upper floating head pressing heads are located at three vertices of a triangle.
  • the three upper floating head pressing heads can determine a plane, so that each of the three upper floating head pressing heads is pressed against the lower end surface of the silicon rod.
  • the lower floating head When the cutting section of the cutting head mechanism is cutting from top to bottom, the lower floating head is driven by the stress generated by the cutting to cause a slight inclination of the floating head, and the upper floating head can compensate, so that the silicon rod can be stably clamped on the lower floating head. between the head and the floating head.
  • edge support assemblies there are four edge support assemblies, and the four edge support assemblies are located at four vertices of a rectangle; two of the edge support assemblies are used to support an edge formed by cutting a silicon rod.
  • a pair of edge skin supporting components can effectively support one edge skin.
  • the silicon rod support mechanism also includes a silicon rod rotating assembly, and the silicon rod rotating assembly includes:
  • Silicon rod rotating shaft 434-1 the lower floating head is fixed on the silicon rod rotating shaft 434-1, and the silicon rod rotating shaft 434-1 is rotatably connected to the silicon rod supporting mounting seat 431;
  • the silicon rod driving motor 434 - 2 is fixed under the silicon rod support mount 431 and connected with the silicon rod rotating shaft 434 - 1 to drive the silicon rod rotating shaft 434 to rotate.
  • the edge support head After the first cut of the silicon rod, two edges are formed and removed, the edge support head is moved downwards to reset.
  • the silicon rod driving motor drives the rotating shaft of the silicon rod to rotate 90 degrees, and drives the lower floating head and the silicon rod sandwiched between the lower floating head and the upper floating head to rotate 90 degrees.
  • the silicon rod drive motor can actively drive the silicon rod rotation axis to rotate 90 degrees, and the silicon rod is passively rotated 90 degrees to prepare for the subsequent second cutting.
  • the fifth component the structure of the strip unloading device 5 of the silicon rod cutting system
  • two cutting devices 4 are fixed on the machine base 1, and the cutting devices 4 are used to cut the silicon rod from top to bottom to form square rods and edges, and the edges are unloaded by the edges. uninstall.
  • the edge skin unloading device 5 of the silicon rod cutting system includes:
  • the scrap clamping mechanism is used to hold the scrap formed by cutting silicon rods into square rods, and transport them to the scrap collection mechanism 53 for storage.
  • the skin collection mechanism 53 has a collection area, and the collection area corresponds to the cutting stations of the silicon rod cutting system one by one;
  • the scrap unloading device also includes a collection control unit, which is used to control the scrap clamping mechanism to clamp the scrap produced by the cut silicon rod from each cutting station, and transport and place it on the scrap collection mechanism. Inside, and the skin produced by cutting the same silicon rod is placed in the same collection area.
  • the scrap collecting mechanism is divided into a collection area, and the collection area corresponds to the cutting stations of the silicon rod cutting system one by one.
  • control the strip clamping mechanism to clamp the strips produced by the cut silicon rod from each cutting station, and transport the collection sequence placed in the strip collection mechanism, and cut the strips produced by the same silicon rod It is placed in the same collection area, that is, the four edges produced by cutting the same silicon rod into square rods are collected in the same collection area of the edge collection mechanism, which can meet the subsequent labeling of the four edges produced by the same silicon rod and provide the basis for subsequent management.
  • the silicon rods are coded to form a silicon rod code, so as to distinguish each silicon rod.
  • the silicon rod is cut to form a square rod and four edges, and the four edges from the same silicon rod are collected in the same collection area of the edge collection mechanism. In this way, the edge skins placed in the same collection area all come from the same silicon rod, which is convenient for encoding the subsequent edge skins.
  • the coding of the edge skins includes silicon rod codes and digital codes, such as silicon rod code-1, silicon rod code-2 , Rod Code-3 and Rod Code-4.
  • edge skin clamping mechanism 51 The structure of edge skin clamping mechanism 51
  • the edge leather clamping mechanism includes an edge leather clamping frame 51, and the edge leather clamping frame 51 includes:
  • the top jaw 512-1 and the bottom jaw 512-2 are installed on the front side of the side leather jaw mounting column 511 and are set up and down opposite to each other;
  • connection between at least one of the top jaw 512-1 and the bottom jaw 512-2 and the mounting column of the edge leather jaw is a sliding connection, and can be along the vertical direction, that is, the silicon rod
  • the Z direction of the cutting system moves up and down, and the side where the top jaw 512-1 and the bottom jaw 512-2 are installed on the edge leather jaw mounting column is the positive side.
  • the edge skin clamping frame of the edge skin clamping mechanism, the edge skin clamp jaw installation column is the installation basis of the top jaw and the bottom jaw.
  • the connection between at least one of the top jaw 512-1 and the bottom jaw 512-2 and the mounting column of the edge leather jaw is a sliding connection, so that the top jaw 512-1 and the bottom jaw 512-1 The distance between 512-2 can be adjusted.
  • the mounting column of the edge skin gripper is a rigid mounting column of the edge skin gripper.
  • the bottom jaw 512-2 is fixed on the bottom end of the side skin jaw mounting column 511;
  • connection between the top jaw 512-1 and the side leather jaw mounting column 511 is a sliding connection, and the top jaw 512-1 can move up and down along the vertical direction, that is, the Z direction of the silicon rod cutting system .
  • the bottom jaw is fixed on the bottom of the side leather jaw mounting column, and the top jaw is slidably installed on the top of the mounting column, and the top jaw and the bottom jaw are arranged oppositely.
  • the top jaw can move up and down along the vertical direction, that is, the Z direction of the silicon rod cutting system, so that the distance between the top jaw and the bottom jaw can be adjusted.
  • the top clamp When it is necessary to clamp the vertical edge, first adjust the distance between the top jaw and the bottom jaw to be larger than the edge to be clamped, and load the lower end surface of the vertical edge with the bottom jaw; after that, the top clamp The claw moves down along the Z direction until it presses against the upper end surface of the edge skin; at this time, the clamping of the edge skin has been realized.
  • the edge skin clamping frame 51 also includes:
  • edge leather claw slide plate 514 The edge leather claw slide plate 514, the edge leather claw slide plate 514 is placed on a plate surface of the edge leather claw back plate 513 and the connection with the edge leather claw back plate 513 is a sliding connection, And the edge leather gripper slide plate can move in the horizontal direction along the edge leather gripper back plate, and the movement direction of the edge leather gripper slider is consistent with the X direction of the silicon rod cutting system where the edge leather unloading device is located;
  • edge leather claw mounting column fixing plate 515, the two opposite ends of the edge leather claw mounting column fixing plate 515 are respectively fixed with the edge leather claw sliding plate 514 and the edge leather claw mounting column 511, Make the described edge leather claw mounting column 511, the edge leather claw mounting column fixing plate 515 and the edge leather claw sliding plate 514 be fixed as one;
  • edge leather jaw slide plate 514 moves left and right along the X direction of the silicon rod cutting system, driving the top jaw 512-1 and the bottom jaw 512-2 installed on the edge leather jaw mounting column 511 to be able to Move left and right in the X direction of the silicon rod cutting system.
  • the side leather gripper mounting column, the side leather gripper installation post fixing plate and the side leather gripper slide plate are fixed as one, as a whole, they can move left and right along the X direction of the silicon rod cutting system, so that they can be installed on the same side
  • the top jaw and the bottom jaw of the leather jaw mounting column can move left and right in the X direction of the silicon rod cutting system as a whole.
  • the side leather clamping mechanism can move left and right in the X direction of the silicon rod cutting system, so that the top jaw and the bottom jaw installed on the same side leather jaw mounting column can approach the X direction of the silicon rod cutting system to be clamped. Hold the vertical side skin.
  • each side leather clamp claw mounting column 511 there are two side leather clamp claw mounting columns 511, and the front side of each side leather clamp claw mounting column 511 is installed with the top clip Jaw 512-1 and bottom jaw 512-2;
  • fixing plates 515 for the mounting column of the edge leather claw there are two fixing plates 515 for the mounting column of the edge leather claw, each of which fixes one of the mounting column 511 of the edge leather claw;
  • the front sides of the two leather gripper claw mounting columns 511 are oppositely arranged.
  • the distance between the top jaw and the bottom jaw installed on the two side leather jaw mounting columns can be adjusted in the X direction of the silicon rod cutting system. Adjustment. It is especially suitable for the clamping of two opposite sides when the same silicon rod is cut into square rods.
  • the edge skin clamping frame 51 also includes:
  • Top jaw Z-direction guide rails 516 each of the side leather jaw mounting columns 511 has two top jaw Z-direction guide rails 516 arranged in parallel; wherein, the guiding direction of the top jaw Z-direction guide rails 516 is vertical direction, and consistent with the Z direction of the silicon rod cutting system;
  • the Z-direction slider of the top jaw is arranged on the back side of the top jaw 512-1;
  • the Z-direction movement cylinder of the top jaw is fixed at the mounting column 511 of the side leather jaw, and the piston rod of the Z-direction movement cylinder of the top jaw is fixed to the back side of the top jaw;
  • the cylinder for moving the top jaw in the Z direction is used to push the top jaw 512-1 to move up and down in the vertical direction, ie, the Z direction of the silicon rod cutting system, along the Z-direction rail of the top jaw.
  • the vertical movement of the top jaw can be realized through a simple structure.
  • the edge skin clamping frame also includes:
  • the X-direction guide rail of the gripper claw, the back plate of the side leather gripper claw near the plate surface of the side leather gripper claw slide plate has two parallel X-direction gripper jaw guide rails; wherein, the guiding direction of the gripper jaw X-direction guide rail is the same as The X direction of the silicon rod cutting system is consistent;
  • the slider in the X direction of the jaw is arranged on the surface of the side leather jaw slide plate close to the back plate of the side leather jaw;
  • the X-direction movement cylinder of the jaw is fixed at the back plate of the Bianpi gripper, and the piston rod of the X-direction movement cylinder of the gripper is fixed to the slider of the Bianpi gripper;
  • the cylinder for moving the jaws in the X direction is used to push the sliding plate of the side leather jaws to move along the guide rail in the X direction of the jaws, and then drive the top jaw and the bottom jaw installed on the fixed plate of a side leather jaw mounting column
  • the jaws can move closer or farther away in the X direction relative to the top jaw and the bottom jaw of the other side leather jaw mounting column fixing plate.
  • the lateral movement of the side leather jaw mounting column fixing plate in the X direction of the silicon rod cutting system can be realized through a simple structure. , so as to realize that the top jaw and the bottom jaw installed on the fixed plate of the claw mounting column of one side skin can be compared with the top jaw and the bottom jaw of the mounting column fixing plate of the other side leather jaw in the X of the silicon rod cutting system direction towards or away from.
  • the height of the mounting column fixing plate 515 of the edge leather jaw is smaller than the height of the mounting column 511 of the edge leather jaw, and the height of the edge leather jaw mounting column 511 is The height of the back plate 513 is smaller than the height of the mounting column 511 of the edge leather gripper.
  • the height requirement of the mounting column fixing plate for the side skin clamping jaws is relatively high, so as to adapt to the side skins produced by silicon rods of various heights.
  • the heights of the side leather gripper mounting column fixing plate, side leather gripper sliding plate and side leather gripper back plate are all smaller than the height of the side leather gripper installation column.
  • the fixed plate 515 of the mounting column of the side leather gripper is fixed at the middle position of the mounting post 511 of the side leather gripper, and the side wallet
  • the ratio of the length of the claw mounting column fixing plate 515 in the Z direction to the height of the edge leather clamping claw mounting column 511 is greater than or equal to one-third and less than two-thirds.
  • the position where the edge leather clamp claw mounting column fixed plate exerts force on the edge leather clamp claw mounting column is at the middle position of the height of the edge leather clamp claw mounting column, so that the silicon rods of various heights clamped by the edge leather clamping mechanism produce When the side skin is used, it is relatively stable, and the mounting column fixing plate of the side skin jaw is not easy to be damaged and deformed.
  • the fixing plate of the mounting column of the edge leather gripper, the mounting column of the edge leather gripper claw, and the sliding plate of the edge leather gripper claw are detachably connected.
  • the Bian leather gripper mounting column, the Bian leather gripper mounting post fixing plate and the Bian leather gripper sliding plate are three parts, which are fixed by detachable connection, and the requirements for manufacturing precision are relatively low. At the same time, when any part is damaged, such as when the mounting column fixing plate of the side leather gripper that bears a large downward force in the Z direction is damaged, only the damaged part needs to be replaced.
  • the edge skin clamping mechanism also includes:
  • the clamping frame movement assembly is fixed to the back plate of the edge leather gripper and installed on the base of the silicon rod cutting system, and the Y direction of the silicon rod cutting system is the same as the X direction and Z direction of the silicon rod cutting system. vertical;
  • the clamping frame moving component is used to drive the clamping frame to linearly reciprocate in three directions of X direction, Y direction and Z direction of the silicon rod cutting system.
  • the clamping frame movement assembly includes:
  • the X-direction guide rail 521-1 of the clamping frame is used to be fixed on the upper surface of the machine base of the silicon rod cutting system; wherein, the guiding direction of the X-direction guide rail of the clamping frame is consistent with the X direction of the silicon rod cutting system;
  • the X-direction movement slider of the clamping frame is fixed on the outer bottom of the X-direction mounting seat of the clamping frame, and the X-direction movement slider of the clamping frame cooperates with the X-direction movement guide rail of the clamping frame;
  • the X-direction mounting seat of the clamping frame can move along the X-direction guide rail of the clamping frame in the X-direction of the silicon rod cutting system, and drives the clamping frame to move in the X-direction of the silicon rod cutting system.
  • the clamping frame movement assembly further includes:
  • the clamping frame Y-direction rack and the clamping frame Y-direction gear that mesh with each other, the clamping frame Y-direction rack is fixed on the upper surface of the clamping frame X-direction mounting seat; wherein, the clamping frame Y
  • the guiding direction of the direction rack is consistent with the Y direction of the silicon rod cutting system, and the Y direction gear of the clamping frame is fixed on the outer bottom of the Y direction mounting seat of the clamping frame.
  • the clamping frame movement assembly further includes:
  • the clamping frame Z-direction guide rail screw, the screw nut of the clamping frame Z-direction guide rail screw is fixed on the upper surface of the clamping frame Y-direction mounting seat; wherein, the clamping frame Z-direction guide rail screw
  • the guiding direction of the guide rail is the vertical direction and is consistent with the Z direction of the silicon rod cutting system, and the slider of the Z-direction guide rail lead screw of the clamping frame is fixed at the back plate of the edge leather gripper;
  • the Z-direction guide rail screw of the clamping frame is used to convert the received rotational motion into a linear motion along the guide rail of the Z-direction guide rail screw of the clamping frame, and through the Z-direction guide rail screw of the clamping frame
  • the slider of the bar outputs linear motion.
  • the guide rail lead screw in the Z direction of the clamping frame is driven by a motor.
  • the skin collection mechanism 53 includes:
  • each group of leather boxes has at least one leather box 532, and one of the leather boxes is used as a collection area;
  • a leather box synchronous reverse movement assembly for driving the two leather boxes 532 to move synchronously and reversely.
  • the leather box synchronously reverse movement assembly is fixed on the collection chassis 531.
  • the box 532 is fixed with the synchronous reverse movement assembly of the leather box.
  • the synchronous reverse movement component of the side leather boxes enables the two sets of side leather boxes to realize synchronous reverse switching, which is convenient to operate; at the same time, it also prevents the two sets of side leather boxes from being located on the same side, causing interference to the placement of the side leather boxes.
  • the leather box synchronous reverse movement assembly includes:
  • Two side leather box guide rails 533-1 are fixed on the upper surface of the collection chassis 531 in parallel at intervals;
  • Two leather box sliders 533-2 are respectively arranged on the outer bottoms of two groups of leather boxes 532, and the leather box sliders 533-2 and the leather box guide rails 533-1 are slidingly matched;
  • the leather boxes in each group of leather boxes are arranged at intervals along the length direction of the leather box guide rail.
  • the leather box synchronous reverse movement assembly also includes:
  • the cylinder 533-3 for sliding the leather box is fixed on the collection bottom frame 531, and the piston rod of the cylinder 533-3 for sliding the leather box is fixed to the outer bottom of the first group of leather boxes;
  • the leather box is a group of side leather boxes that are fixed with the piston rod of the cylinder 533-3 for sliding the side leather box, and the second group of side leather boxes is a group of sides that are not fixed with the piston rod of the cylinder 533-3 for sliding the side leather box Leather box;
  • the synchronous wheel 533-4 is fixed on the upper surface of the collection chassis 531 and is located between the two groups of edge boxes 532;
  • Synchronous belt 533-5 the synchronous belt 533-5 bypasses the synchronous wheel 533-4 and the two ends of the synchronous belt 533-5 are respectively fixed with two sets of side leather boxes 532; wherein, the side leather boxes
  • the sliding cylinder 533-3 is used to push the first group of leather boxes to reciprocate and linearly move along the leather box guide rail 533-1, and then drive the second group of leather boxes to reciprocate and linearly move in the opposite direction.
  • each of the edge leather boxes 532 has four edge skin storage positions, and the four edge skin storage positions are arranged in two rows, and the two rows of edge skin storage positions are arranged along the edge of the edge skin.
  • the guiding direction of the cassette rails is provided next to each other.
  • one end of the two edge leather box guide rails is set as the edge leather position
  • the skin collection mechanism also includes:
  • the photoelectric support 534-1 is fixed with the collection bottom frame 531;
  • Two pairs of storage position facing photoelectric modules 534-2 are arranged in two rows; each pair of storage position facing photoelectric modules 534-2 is relatively fixed on the photoelectric bracket, and two pairs of storage position facing photoelectric modules 534-2 It is used to detect whether the edge skin is placed in the edge skin storage position of the edge leather box at the position to be edged.
  • the four strip storage positions of the same strip box are used to carry the four strips cut off from the same silicon rod after being cut into square bars, so as to encode the four strips from the same silicon rod.

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Abstract

A cutting device (4) of a silicon rod cutting system, and a silicon rod cutting system. The cutting device (4) comprises a wire saw assembly, a cutting section of a diamond wire being used for cutting a vertically arranged silicon rod from top to bottom; a detection assembly (415) connected to the wire saw assembly, wherein the detection assembly (415) is used for detecting an actual cutting curved surface formed after each cutting is completed, so as to obtain the shape of the actual cutting curved surface; the actual cutting curved surface formed after cutting is completed is an actual cutting curved surface after the silicon rod is cut and the edge skins are removed; and a wire saw control unit connected to the detection assembly (415), the wire saw control unit being used for: dynamically adjusting the cutting position of the cutting section in the next cutting process according to the bending direction and the bending degree of the actual cutting curved surface in the previous cutting. The silicon rod cutting system comprises the cutting device (4). According to embodiments, the actual cutting curved surface formed after each cutting is completed can be detected, so that the cutting section is dynamically and accurately adjusted in the next cutting process.

Description

硅棒切割***的切割装置及硅棒切割***Cutting device of silicon rod cutting system and silicon rod cutting system 技术领域technical field
本申请涉及硅棒切割技术领域,具体地,涉及一种硅棒切割***的切割装置及硅棒切割***。The present application relates to the technical field of silicon rod cutting, and in particular, relates to a cutting device of a silicon rod cutting system and a silicon rod cutting system.
背景技术Background technique
目前,随着社会对绿色可再生能源利用的重视和开放,光伏太阳能发电领域越来越得到重视和发展。光伏发电领域中,通常的晶体硅太阳能电池是在高质量硅片上制成的,这种硅片从提拉或浇铸的硅棒后通过线锯切割而成,即线切割技术。At present, with the society's attention and openness to the utilization of green and renewable energy, the field of photovoltaic solar power generation has received more and more attention and development. In the field of photovoltaic power generation, the usual crystalline silicon solar cells are made on high-quality silicon wafers, which are cut from pulled or cast silicon rods by wire sawing, that is, wire cutting technology.
线切割技术是目前世界上比较先进的开方加工技术,它的原理是通过高速运动的金刚线对待加工工件(例如:硅棒、蓝宝石、或其他半导体硬脆材料)进行摩擦,切出方棒,从而达到切割目的。线切割技术与传统的刀锯片、砂轮片及内圆切割相比具有效率高、产能高、精度高等优点。Wire cutting technology is a relatively advanced square root processing technology in the world at present. Its principle is to rub the workpiece (such as silicon rod, sapphire, or other semiconductor hard and brittle materials) through high-speed moving diamond wire, and cut out a square rod. , so as to achieve the purpose of cutting. Compared with the traditional knife saw blade, grinding wheel and internal circle cutting, the wire cutting technology has the advantages of high efficiency, high production capacity and high precision.
技术问题technical problem
现有的硅棒切割***已经无法满足光伏行业对硅片的要求。The existing silicon rod cutting system can no longer meet the requirements of the photovoltaic industry for silicon wafers.
技术解决方案technical solution
本申请实施例提供了一种新结构的硅棒切割***的切割装置及硅棒切割***。The embodiment of the present application provides a cutting device and a silicon rod cutting system with a new structure.
根据本申请实施例的第一个方面,提供了一种硅棒切割***的切割装置,包括切割机头机构和具有自学习功能的线锯控制单元,所述切割机头机构包括:According to the first aspect of the embodiment of the present application, a cutting device of a silicon rod cutting system is provided, including a cutting head mechanism and a wire saw control unit with a self-learning function, and the cutting head mechanism includes:
线锯组件,所述线锯组件具有金刚线,所述金刚线的切割段用于自上而下对竖向设置的硅棒进行切割;A wire saw assembly, the wire saw assembly has a diamond wire, and the cutting section of the diamond wire is used to cut the vertically arranged silicon rod from top to bottom;
检测组件,与所述线锯组件连接,所述检测组件用于对每次切割完成后形成的实际切割曲面进行检测,得到实际切割曲面的形状;其中,切割完成后形成的实际切割曲面是硅棒被切割后且边皮被取走后的实际切割曲面;The detection component is connected with the wire saw component, and the detection component is used to detect the actual cutting surface formed after each cutting to obtain the shape of the actual cutting surface; wherein, the actual cutting surface formed after the cutting is silicon The actual cut surface after the rod has been cut and the skin has been removed;
线锯控制单元,与检测组件连接;所述线锯控制单元用于:The wire saw control unit is connected with the detection component; the wire saw control unit is used for:
根据上次切割的实际切割曲面的弯曲方向和弯曲程度,在下次切割过程中对切割段的切割位置进行动态调整。According to the bending direction and bending degree of the actual cutting surface of the last cutting, the cutting position of the cutting section is dynamically adjusted during the next cutting process.
根据本申请实施例的第二个方面,提供了一种硅棒切割***,包括:According to a second aspect of the embodiments of the present application, a silicon rod cutting system is provided, including:
上述的切割装置,所述切割装置用于对硅棒进行切割形成边皮;The above-mentioned cutting device, which is used to cut silicon rods to form edges;
边皮夹持机构;Edge clamping mechanism;
边皮收集机构,所述边皮收集机构具有收集区域,所述收集区域与硅棒切割***的切割工位一一对应;An edge skin collection mechanism, the edge skin collection mechanism has a collection area, and the collection area corresponds to the cutting stations of the silicon rod cutting system one by one;
收集控制单元,用于控制所述边皮夹持机构夹持住边皮,并运送放置在所述边皮收集机构内,且切割同一硅棒产生的边皮被置于同一收集区域。The collection control unit is used to control the scrap clamping mechanism to clamp the scrap, transport and place it in the scrap collection mechanism, and the scrap produced by cutting the same silicon rod is placed in the same collection area.
有益效果Beneficial effect
本申请实施例由于采用以上技术方案,具有以下技术效果:检测组件和自学***的切割曲面,另一种是中间凹两端平的切割曲面。之后,线锯控制单元,能够对下次切割过程中的切割段进行动态精确调整以使切割取面更接***面。The embodiment of the present application has the following technical effects due to the adoption of the above technical scheme: the detection component cooperates with the wire saw control unit with self-learning function. First, the detection component can detect the actual cutting surface formed after each cutting is completed, and obtain the actual There are two possibilities for the shape of the cutting surface: one is a cutting surface with a convex middle and flat ends, and the other is a cutting surface with a concave middle and flat ends. Afterwards, the wire saw control unit can dynamically and accurately adjust the cutting section in the next cutting process to make the cutting surface closer to the plane.
附图说明Description of drawings
图1为本申请实施例的硅棒切割***的切割流程示意图;Fig. 1 is the schematic diagram of the cutting process of the silicon rod cutting system of the embodiment of the present application;
图1A为本申请实施例的硅棒切割***的示意图;FIG. 1A is a schematic diagram of a silicon rod cutting system according to an embodiment of the present application;
图1B和图1C为图1A所示的硅棒切割***的转运装置将圆形的硅棒从上下料装置处转运至切割装置的示意图;1B and 1C are schematic diagrams of the transfer device of the silicon rod cutting system shown in FIG. 1A transferring round silicon rods from the loading and unloading device to the cutting device;
图2A为本申请实施例的硅棒切割***的上下料装置的示意图;2A is a schematic diagram of a loading and unloading device of a silicon rod cutting system according to an embodiment of the present application;
图2B为图2A另一角度的示意图;Fig. 2B is a schematic diagram of another angle of Fig. 2A;
图2C是图2B的局部放大图;Figure 2C is a partially enlarged view of Figure 2B;
图3A、图3B和图3C为本申请实施例硅棒切割***的转运装置的示意图;3A, 3B and 3C are schematic diagrams of the transfer device of the silicon rod cutting system of the embodiment of the present application;
图3D和图3E为图3A的转运装置的上夹爪组件和下夹爪组件的示意图;3D and 3E are schematic diagrams of the upper jaw assembly and the lower jaw assembly of the transfer device of FIG. 3A;
图3F为硅棒的四个晶线在硅棒的端面的晶线端点的示意图;FIG. 3F is a schematic diagram of the four crystal lines of the silicon rod at the crystal line endpoints of the end faces of the silicon rod;
图4A为本申请实施例硅棒切割***切割装置的切割机头机构的示意图;4A is a schematic diagram of the cutting head mechanism of the cutting device of the silicon rod cutting system according to the embodiment of the present application;
图4B为本申请实施例的硅棒切割***的同一切割装置的两个切割机头机构自上而下对硅棒切割完成的示意图;Fig. 4B is a schematic diagram of two cutting head mechanisms of the same cutting device of the silicon rod cutting system of the embodiment of the present application cutting silicon rods from top to bottom;
图4C和图4D为将图4B中一次切割形成的两个边皮从机头通孔中移走的示意图;Fig. 4C and Fig. 4D are the schematic diagrams of removing the two side skins formed by one cutting in Fig. 4B from the through hole of the machine head;
图4E为图4A所示的切割机头机构的张力轮组件的示意图;Fig. 4E is a schematic diagram of the tension wheel assembly of the cutting head mechanism shown in Fig. 4A;
图4F为图1A所示切割装置的支撑框架、横向进给机构和垂向进给机构的示意图;Fig. 4F is a schematic diagram of the supporting frame, the lateral feed mechanism and the vertical feed mechanism of the cutting device shown in Fig. 1A;
图4G为图1A所示硅棒切割***的硅棒夹头机构和硅棒支撑机构配合夹紧硅棒的示意图;FIG. 4G is a schematic diagram of the silicon rod chuck mechanism and the silicon rod support mechanism of the silicon rod cutting system shown in FIG. 1A cooperating to clamp the silicon rod;
图4H为图4G所示的硅棒支撑机构的示意图;Figure 4H is a schematic diagram of the silicon rod support mechanism shown in Figure 4G;
图4I、图4J和图4K为图4A所示切割装置的两个平行的切割段切割形成的实际切割曲面和理论切割曲面的示意图;Fig. 4I, Fig. 4J and Fig. 4K are the schematic diagrams of the actual cutting curved surface and the theoretical cutting curved surface formed by the cutting of two parallel cutting sections of the cutting device shown in Fig. 4A;
图5为本申请实施例的硅棒切割***的机座、两个切割装置和边皮卸载装置配合的示意图;Fig. 5 is a schematic diagram of the cooperation of the machine base, two cutting devices and the strip unloading device of the silicon rod cutting system according to the embodiment of the present application;
图5A为本申请实施例的硅棒切割***的边皮卸载装置的边皮夹持框架的示意图;Fig. 5A is a schematic diagram of the edge skin clamping frame of the edge skin unloading device of the silicon rod cutting system according to the embodiment of the present application;
图5B为图5A所示的边皮夹持框架(具有罩板)在夹持边皮之前的相对位置示意图;Figure 5B is a schematic diagram of the relative position of the edge skin clamping frame (with a cover plate) shown in Figure 5A before clamping the edge skin;
图5C为图5A所示的边皮夹持框架和夹持框架运动组件配合形成边皮夹持机构的示意图;Fig. 5C is a schematic diagram of the cooperation of the edge skin clamping frame and the clamping frame moving assembly shown in Fig. 5A to form the edge skin clamping mechanism;
图5D为图5A所示的边皮夹持框架和硅棒切割***的切割装置相互配合的示意图;Fig. 5D is a schematic diagram of the cooperation between the edge skin clamping frame shown in Fig. 5A and the cutting device of the silicon rod cutting system;
图5E为本申请实施例的硅棒切割***的边皮卸载装置的边皮收集机构收集边皮的示意图。5E is a schematic diagram of collecting the scrap by the scrap collecting mechanism of the scrap unloading device of the silicon rod cutting system according to the embodiment of the present application.
本发明的最佳实施方式BEST MODE FOR CARRYING OUT THE INVENTION
以下结合附图对本申请的示例性实施例进行进一步详细的说明。Exemplary embodiments of the present application will be further described in detail below with reference to the accompanying drawings.
本申请实施例的硅棒切割***,用于对竖向放置的圆形的硅棒进行竖向切割。对硅棒进行切割的过程如图1所示,对圆形的硅棒进行两次切割,形成一个方棒和四个边皮。竖向放置的圆形的硅棒又称为立式的圆形的硅棒。The silicon rod cutting system of the embodiment of the present application is used for vertically cutting circular silicon rods placed vertically. The process of cutting silicon rods is shown in Figure 1. A circular silicon rod is cut twice to form a square rod and four sides. Vertical round silicon rods are also called vertical round silicon rods.
如图1A,图1B和图1C所示,本申请实施例的硅棒切割***,包括:As shown in Figure 1A, Figure 1B and Figure 1C, the silicon rod cutting system of the embodiment of the present application includes:
机座1,所述机座1具有两个平行且间隔设置的切割工位;Machine base 1, described machine base 1 has two parallel and spaced apart cutting stations;
两个切割装置4,固定在所述机座1之上,两个所述切割装置4和两个所述切割工位一一对应;其中,所述切割装置4具有金刚线,所述金刚线在运动中用于对硅棒进行切割的部分为切割段,所述切割段为横向设置的切割段且所述切割段用于对竖向放置在切割工位处的硅棒自上而下进行切割;Two cutting devices 4 are fixed on the base 1, and the two cutting devices 4 correspond to the two cutting stations one by one; wherein, the cutting device 4 has a diamond wire, and the diamond wire The part used to cut the silicon rod in motion is the cutting section, the cutting section is a cutting section arranged horizontally and the cutting section is used to cut the silicon rod vertically placed at the cutting station from top to bottom. cutting;
上下料装置2,与所述机座1固定;其中,所述上下料装置2用于圆形的硅棒的上料和切割形成的方棒的下料;The loading and unloading device 2 is fixed with the machine base 1; wherein, the loading and unloading device 2 is used for loading of circular silicon rods and blanking of square rods formed by cutting;
转运装置3,安装在所述机座1之上且位于两个所述切割工位之间;其中,所述转运装置3用于将所述上下料装置2上料的硅棒转运至两个所述切割工位,且用于将两个所述切割工位上形成的方棒转运至所述上下料装置2。即转运装置用于实现硅棒和方棒在上下料装置2和切割装置4之间的转运。The transfer device 3 is installed on the machine base 1 and is located between the two cutting stations; wherein, the transfer device 3 is used to transfer the silicon rods loaded by the loading and unloading device 2 to two The cutting station is used to transfer the square bars formed on the two cutting stations to the loading and unloading device 2 . That is, the transfer device is used to transfer silicon rods and square rods between the loading and unloading device 2 and the cutting device 4 .
其中,硅棒切割***的高度方向即为硅棒切割***的Z方向,即硅棒切割***的Z方向为垂向方向,两个切割工位排列的方向为硅棒切割***的X方向,硅棒切割***的Y方向垂直于硅棒切割***的X方向和Z方向。在机座上间隔平行设置有两个独立的切割工位,两个切割工位各自对应一个切割装置,两个切割工位共用一套上下料装置2、转运装置3和边皮卸载装置5。硅棒切割***中两个切割工位共用一个上下料装置和一个转运装置,使得硅棒切割***的部件较少,占用的空间也较小。Among them, the height direction of the silicon rod cutting system is the Z direction of the silicon rod cutting system, that is, the Z direction of the silicon rod cutting system is the vertical direction, and the direction in which the two cutting stations are arranged is the X direction of the silicon rod cutting system. The Y direction of the rod cutting system is perpendicular to the X and Z directions of the silicon rod cutting system. Two independent cutting stations are arranged in parallel at intervals on the machine base, and each of the two cutting stations corresponds to a cutting device, and the two cutting stations share a set of loading and unloading device 2, transfer device 3 and edge skin unloading device 5. The two cutting stations in the silicon rod cutting system share a loading and unloading device and a transfer device, so that the silicon rod cutting system has fewer components and occupies less space.
实施中,如图1A,图1B和图1C所示,硅棒切割***还包括边皮卸载装置5,用于将切割硅棒形成的边皮进行夹持转运和收集。During implementation, as shown in FIG. 1A , FIG. 1B and FIG. 1C , the silicon rod cutting system further includes a trim unloading device 5 for clamping, transporting and collecting the trim formed by cutting silicon rods.
实施中,所述边皮卸载装置5包括:In implementation, described edge skin unloading device 5 comprises:
边皮夹持机构51;Side skin clamping mechanism 51;
边皮收集机构53,所述边皮收集机构53具有收集区域,所述收集区域与切割工位一一对应;A skin collection mechanism 53, the skin collection mechanism 53 has a collection area, and the collection area corresponds to the cutting station one by one;
其中,所述边皮夹持机构51用于在切割工位夹持住切割硅棒形成的边皮,并将边皮运送放置在所述边皮收集机构内,且切割同一硅棒形成的边皮被置于同一收集区域。Wherein, the edge skin clamping mechanism 51 is used to clamp the edge skin formed by cutting the silicon rod at the cutting station, and transport the edge skin to be placed in the edge skin collection mechanism, and cut the edge skin formed by the same silicon rod. The skins are placed in the same collection area.
两个切割工位共用一个边皮夹持机构,对两个切割工位切割形成的边皮运送放置到同一个边皮收集机构内。硅棒切割***中两个切割工位共用一个边皮夹持机构且共用一个边皮收集机构,使得硅棒切割***的部件较少,占用的空间也较小。The two cutting stations share one edge skin clamping mechanism, and the edge skins formed by the two cutting stations are transported and placed in the same edge skin collecting mechanism. The two cutting stations in the silicon rod cutting system share a scrap clamping mechanism and a scrap collecting mechanism, so that the silicon rod cutting system has fewer components and occupies less space.
实施中,如图1A,图1B,图1C,图4A,图4B,图4C和图4D所示,每个所述切割装置具有两个相对设置的切割机头机构41,所述切割机头机构41具有金刚线和竖向的机头通孔411-1,所述金刚线的切割段和机头通孔411-1错开设置,即互不干涉;其中,所述切割段为金刚线在运动中用于对硅棒进行切割的部分;In implementation, as shown in Fig. 1A, Fig. 1B, Fig. 1C, Fig. 4A, Fig. 4B, Fig. 4C and Fig. 4D, each of the cutting devices has two oppositely arranged cutting head mechanisms 41, and the cutting head The mechanism 41 has a diamond wire and a vertical head through hole 411-1, and the cutting section of the diamond wire and the head through hole 411-1 are staggered, that is, they do not interfere with each other; wherein, the cutting section is the diamond wire in the The part used to cut silicon rods in motion;
所述边皮夹持机构具体用于从所述机头通孔通过进入到两个所述切割机头机构41之间夹持住边皮,且从所述机头通孔411-1处退出将边皮从两个所述切割机头机构41之间取出。The edge skin clamping mechanism is specifically used to clamp the edge skin by entering between the two cutting head mechanisms 41 from the through hole of the machine head, and withdraw from the through hole 411-1 of the machine head The edge skin is taken out between the two cutting head mechanisms 41 .
下面分别对硅棒切割***的各个组成部分进行说明。Each component of the silicon rod cutting system is described below.
第一个组成部分:硅棒切割***的机座的结构The first component: the structure of the frame of the silicon rod cutting system
硅棒切割***的机座,是基础支撑件,具有较高的刚性的稳定性。在车间化布局时,硅棒切割***的机座和其他***的机座之间可以实现连接,形成完整的生产线。The base of the silicon rod cutting system is a basic support with high rigidity and stability. In the layout of the workshop, the base of the silicon rod cutting system can be connected with the bases of other systems to form a complete production line.
第二个组成部分:硅棒切割***的上下料装置的结构The second component: the structure of the loading and unloading device of the silicon rod cutting system
实施中,如图1A,图2A,图2B和图2C所示,硅棒切割***的上下料装置2,包括圆棒上料组件,所述圆棒上料组件包括:During implementation, as shown in Figure 1A, Figure 2A, Figure 2B and Figure 2C, the loading and unloading device 2 of the silicon rod cutting system includes a round rod feeding assembly, and the round rod feeding assembly includes:
L形的圆棒上料架211;L-shaped round bar feeding rack 211;
所述上下料装置还包括:The loading and unloading device also includes:
上下料支撑框架23,所述圆棒上料架211和所述上下料支撑框架23转动连接;The loading and unloading support frame 23, the round bar loading frame 211 is rotatably connected to the loading and unloading support frame 23;
上料翻转驱动装置,分别与上下料支撑框架的底部和所述圆棒上料架的外底固定,所述上料翻转驱动装置用于带动所述圆棒上料架自所述圆棒上料架的初始位置翻转90度;The feeding and turning drive device is respectively fixed with the bottom of the loading and unloading support frame and the outer bottom of the round bar feeding rack, and the feeding turning driving device is used to drive the round bar feeding rack from the round bar The initial position of the rack is turned 90 degrees;
上料处理单元,用于控制上料翻转驱动装置以控制所述圆棒上料架先加速翻转,在所述圆棒上料架翻转到达预设角度时,降低所述圆棒上料架的翻转速度直至翻转到90度。The feeding processing unit is used to control the feeding turning drive device to control the round bar feeding rack to accelerate the turning first, and when the round bar feeding rack turns over to reach a preset angle, reduce the rotation speed of the round bar feeding rack Flip speed until flipped to 90 degrees.
具体的,所述预设角度的取值范围为大于等于60度小于等于85度。Specifically, the value range of the preset angle is greater than or equal to 60 degrees and less than or equal to 85 degrees.
实施中,上料翻转驱动装置采用上料翻转油缸216;During implementation, the feeding and turning drive device adopts the feeding and turning oil cylinder 216;
所述上料翻转油缸216的缸体固定在所述上下料支撑框架的底部,所述上料翻转油缸216的导向杆的上端与所述圆棒上料架211的外底固定,所述上料翻转油缸216用于带动所述圆棒上料架211自所述圆棒上料架的初始位置翻转90度;The cylinder body of the described feeding turning oil cylinder 216 is fixed on the bottom of the described loading and unloading support frame, and the upper end of the guide bar of the described feeding turning oil cylinder 216 is fixed with the outer bottom of the described round rod feeding frame 211, and the upper end The material turning cylinder 216 is used to drive the round bar feeding rack 211 to turn over 90 degrees from the initial position of the round bar feeding rack;
所述上料处理单元具体用于在所述圆棒上料架211翻转到达预设角度时,降低所述上料翻转油缸211的伸长速度从而降低所述圆棒上料架211的翻转速度。The feeding processing unit is specifically used to reduce the elongation speed of the feeding turning cylinder 211 to reduce the turning speed of the round bar feeding rack 211 when the round bar feeding rack 211 is overturned to a preset angle. .
实施中,如图2A和图2B所示,所述上下料装置还包括:In implementation, as shown in Figure 2A and Figure 2B, the loading and unloading device also includes:
减速接近开关217,与所述上料处理单元连接,固定在圆棒上料架的长臂翻转到预设角度的位置;The deceleration proximity switch 217 is connected with the feeding processing unit, fixed on the long arm of the round bar feeding rack and flipped to a preset angle position;
其中,所述上料处理单元具体用于在接收到所述减速接近开关的到位信号后,调节所述上料翻转油缸的进油口流量以降低翻转速度,直至翻转到90度。Wherein, the material loading processing unit is specifically configured to adjust the flow rate of the oil inlet of the material loading and turning cylinder to reduce the turning speed until turning to 90 degrees after receiving the in-position signal of the deceleration proximity switch.
减速接近开关和上料处理单元的配合,通过简单的结构,实现了圆棒上料架在翻转接近90度时,即硅棒翻转接近90度时,翻转速度的降低,使得硅棒翻转至90度时的速度较低,对硅棒的冲击较小,起到了保护硅棒的作用。The combination of the deceleration proximity switch and the feeding processing unit, through a simple structure, realizes that when the round rod feeding rack is turned close to 90 degrees, that is, when the silicon rod is turned close to 90 degrees, the turning speed is reduced, so that the silicon rod is turned to 90 degrees. When the speed is low, the impact on the silicon rod is small, which plays a role in protecting the silicon rod.
实施中,如图2A和图2B所示,所述圆棒上料架211的短臂内侧为长度测量基准面211-1;During implementation, as shown in Figure 2A and Figure 2B, the inner side of the short arm of the round bar feeding rack 211 is the length measurement reference plane 211-1;
所述圆棒上料组件还包括:The round bar feeding assembly also includes:
圆棒支撑机构212,固定在所述圆棒上料架211的长臂内侧,用于在所述圆棒上料架211的长臂横向放置时支撑卧式放置的圆形的硅棒;The round rod supporting mechanism 212 is fixed on the inner side of the long arm of the round rod feeding rack 211, and is used to support a horizontally placed circular silicon rod when the long arm of the round rod feeding rack 211 is placed horizontally;
圆棒夹紧块213和圆棒夹紧驱动装置,所述圆棒夹紧驱动装置分别与所述圆棒支撑机构和圆棒夹紧块固定;其中,所述圆棒夹紧块213用于在所述圆棒夹紧驱动装置的带动下,将位于所述圆棒支撑机构之上的圆形的硅棒推动至顶住所述长度测量基准面211-1夹紧固定; Round bar clamping block 213 and round bar clamping drive device, described round bar clamping drive device is respectively fixed with described round bar support mechanism and round bar clamping block; Wherein, described round bar clamping block 213 is used for Driven by the round rod clamping drive device, the circular silicon rod located on the round rod support mechanism is pushed to withstand the length measurement reference plane 211-1 and clamped and fixed;
夹紧块位移测量装置215,与所述圆棒上料架211固定,用于测量所述圆棒夹紧块213的位移;The clamping block displacement measuring device 215 is fixed with the round bar feeding rack 211 and is used to measure the displacement of the round bar clamping block 213;
所述上料处理单元还用于根据所述圆棒夹紧块的初始位置到所述长度测量基准面之间的距离以及所述圆棒夹紧块的位移,得到圆形的硅棒的长度;其中,所述圆棒夹紧块的初始位置为所述圆棒夹紧驱动装置伸长到最大长度时所述圆棒夹紧块所处的位置。The feeding processing unit is also used to obtain the length of the round silicon rod according to the distance between the initial position of the round rod clamping block and the distance between the length measurement reference plane and the displacement of the round rod clamping block ; Wherein, the initial position of the round bar clamping block is the position where the round bar clamping block is located when the round bar clamping driving device is extended to the maximum length.
在需要将圆形的硅棒进行上料时,首先,L形的圆棒上料架以圆棒上料架的长臂横向放置的方式放置;之后,将圆形的硅棒以卧式放置在圆棒支撑机构之上,进行有料检测。为了后续对硅棒转运及切割的需要,需要测量硅棒的长度。长度测量基准面的位置和圆棒夹紧块的初始位置之间的距离是确定的。在有料检测为有料的情况下,圆棒夹紧块在圆棒夹紧气缸的带动下,从圆棒夹紧块开始移动、到推动硅棒的一侧端面直至顶住长度侧梁基准面,夹紧块位移测量装置测量出了圆棒夹紧块的位移,进而圆棒处理单元计算得出圆形的硅棒的长度。When it is necessary to load the round silicon rods, firstly, the L-shaped round rod feeding rack is placed horizontally with the long arm of the round rod feeding rack; after that, the round silicon rods are placed horizontally On the round bar support mechanism, the detection of material is carried out. For the subsequent transfer and cutting of silicon rods, the length of silicon rods needs to be measured. The distance between the position of the length measurement reference plane and the initial position of the round bar clamping block is determined. In the case of material detected as material, the round bar clamping block is driven by the round bar clamping cylinder to move from the round bar clamping block to pushing the end face of one side of the silicon rod until it bears against the length side beam reference plane, The clamping block displacement measuring device measures the displacement of the round rod clamping block, and then the round rod processing unit calculates the length of the circular silicon rod.
具体的,有料检测通过上下料装置的用于有料检测的光电开关进行。Specifically, the detection of material is carried out through the photoelectric switch used for detection of material in the loading and unloading device.
实施中,圆棒夹紧驱动装置采用圆棒夹紧气缸214,所述圆棒夹紧气缸214的缸体与所述圆棒上料架211固定,所述圆棒夹紧块213固定在所述圆棒夹紧气缸214的导向杆的上端;During implementation, the round bar clamping drive device adopts a round bar clamping cylinder 214, the cylinder body of the round bar clamping cylinder 214 is fixed to the round bar feeding rack 211, and the round bar clamping block 213 is fixed on the The upper end of the guide rod of the round rod clamping cylinder 214;
其中,所述圆棒夹紧块213用于在所述圆棒夹紧气缸214的带动下,将位于所述圆棒支撑机构之上的圆形的硅棒推动至顶住所述长度测量基准面211-1夹紧固定;所述圆棒夹紧块的初始位置为所述圆棒夹紧气缸的导向杆伸长到最大长度时所述圆棒夹紧块所处的位置。Wherein, the round rod clamping block 213 is used to drive the round rod clamping cylinder 214 to push the circular silicon rod located on the round rod supporting mechanism to withstand the length measurement reference The surface 211-1 is clamped and fixed; the initial position of the round bar clamping block is the position where the round bar clamping block is located when the guide rod of the round bar clamping cylinder is extended to the maximum length.
实施中,所述上料处理单元具体用于根据下述关系式,得到圆形的硅棒的长度L:In implementation, the feeding processing unit is specifically used to obtain the length L of the circular silicon rod according to the following relational formula:
L=K-S;L=K-S;
其中,K为所述圆棒夹紧块的初始位置到所述长度测量基准面之间的距离,S为圆棒夹紧块的位移。Wherein, K is the distance between the initial position of the round bar clamping block and the length measurement reference plane, and S is the displacement of the round bar clamping block.
这样,能够快速方便的得到硅棒的长度。In this way, the length of the silicon rod can be obtained quickly and conveniently.
实施中,所述夹紧块位移测量装置为拉伸编码器。In implementation, the clamping block displacement measuring device is a tensile encoder.
拉伸编码器作为夹紧块位移测量装置,结构小巧,便于安装,和上料处理单元配合,能够方便的实现圆形的硅棒的长度测量,且测量的准确性也较高。As a clamping block displacement measuring device, the tensile encoder has a compact structure and is easy to install. Cooperating with the feeding processing unit, it can conveniently realize the length measurement of the circular silicon rod, and the measurement accuracy is also high.
具体的,如图2A所示,上下料装置还包括:Specifically, as shown in Figure 2A, the loading and unloading device also includes:
两个方棒下料组件22;Two square bar blanking components 22;
其中,圆棒上料组件为两个,两个圆棒上料组件和两个方棒下料组件平行设置。Wherein, there are two round bar feeding assemblies, and two round bar feeding assemblies and two square bar unloading assemblies are arranged in parallel.
圆形的硅棒上料的流程如下:The process of feeding round silicon rods is as follows:
①圆棒上料架的长臂横向放置在上下料支撑框架之上,硅棒上料到圆棒支撑机构之上;①The long arm of the round rod loading rack is placed horizontally on the loading and unloading support frame, and the silicon rods are loaded onto the round rod support mechanism;
②固定在圆棒上料架处的光电开关检测,并且发出有料信号,然后圆棒夹紧气缸通气,圆棒夹紧气缸运动时带动圆棒夹紧块旋转弹出;然后,圆棒夹紧气缸继续带动圆棒夹紧块运动,从硅棒的一端面推动硅棒,直至硅棒的另一端面顶住到圆棒夹紧气缸夹紧固定。②The photoelectric switch fixed on the round bar feeding frame detects and sends out a material signal, then the round bar clamps the cylinder to ventilate, and when the round bar clamps the cylinder to move, it drives the round bar clamping block to rotate and eject; then, the round bar clamps the cylinder Continue to drive the round rod clamping block to move, push the silicon rod from one end of the silicon rod until the other end of the silicon rod withstands the round rod clamping cylinder and clamps and fixes it.
③上料翻转油缸通过推动圆棒上料架的外底使其绕轴转动,当翻转到减速接近开关位置时,减速接近开关检测到位,通过上料处理单元调节上料翻转油缸进油口流量,使得翻转速度降低,直至翻转90°到位。③The feeding and turning oil cylinder rotates around the axis by pushing the outer bottom of the round bar feeding rack. When turning over to the position of the deceleration proximity switch, the deceleration proximity switch detects the position, and adjusts the flow rate of the oil inlet of the feeding and turning cylinder through the feeding processing unit. , so that the turning speed is reduced until turning 90° in place.
方棒的下料流程如下:The cutting process of the square bar is as follows:
①方棒下料组件先竖起,将切割形成的方棒竖向放置到方棒下料组件;① The square bar blanking assembly is erected first, and the square bar formed by cutting is placed vertically on the square bar blanking assembly;
②方棒下料组件的下料翻转油缸缩回,翻转直至水平位置。②The blanking and turning oil cylinder of the square bar blanking assembly is retracted and turned to a horizontal position.
第三个组成部分:硅棒切割***的转运装置的结构The third component: the structure of the transfer device of the silicon rod cutting system
如图1A,图1B,图1C,图3A,图3B和图3C所示,硅棒切割***的转运装置3包括:As shown in Figure 1A, Figure 1B, Figure 1C, Figure 3A, Figure 3B and Figure 3C, the transfer device 3 of the silicon rod cutting system includes:
上下料夹爪框架31;The loading and unloading jaw frame 31;
上夹爪组件和下夹爪组件,上下间隔平行安装在所述上下料夹爪框架31的同一侧;The upper jaw assembly and the lower jaw assembly are installed in parallel on the same side of the upper and lower material jaw frame 31 at intervals up and down;
转运驱动组件,用于驱动所述上夹爪组件相对于所述下夹爪组件在垂向方向上下运动,还用于驱动所述上夹爪组件和所述下夹爪组件同步上下运动。其中,上夹爪组件和下夹爪组件上下运动的方向为垂向方向,即硅棒切割***的Z方向。The transfer driving assembly is used to drive the upper jaw assembly to move up and down in the vertical direction relative to the lower jaw assembly, and is also used to drive the upper jaw assembly and the lower jaw assembly to move up and down synchronously. Wherein, the direction in which the upper jaw assembly and the lower jaw assembly move up and down is the vertical direction, that is, the Z direction of the silicon rod cutting system.
具体的,转运驱动组件包括上夹爪转运驱动装置,分别与所述下夹爪组件和所述上夹爪组件固定且带动所述上夹爪组件相对于下夹爪组件上下运动;Specifically, the transfer drive assembly includes an upper jaw transfer drive device, which is respectively fixed to the lower jaw assembly and the upper jaw assembly and drives the upper jaw assembly to move up and down relative to the lower jaw assembly;
下夹爪转运驱动装置,分别与所述上下料夹爪框架和所述下夹爪组件固定且带动所述下夹爪组件、上夹爪组件和所述上夹爪转运驱动装置同步上下运动。The lower jaw transfer driving device is respectively fixed with the loading and unloading jaw frame and the lower jaw assembly and drives the lower jaw assembly, upper jaw assembly and the upper jaw transfer driving device to move up and down synchronously.
通过转运驱动组件,实现了两个功能,一是上夹爪组件能够单独向上运动使得上夹爪组件和下夹爪组件之间的距离能够变大,还能够单独向下运动使得上夹爪组件和下夹爪组件之间的距离复位和变小。这样,在硅棒或方棒较短时,上夹爪组件和下夹爪组件之间的距离可能不需要调整,仅需要用下夹爪组件进行夹持;在硅棒或方棒较长时,上夹爪组件和下夹爪组件之间的距离可以保持不变且上夹爪组件和下夹爪组件同时进行夹持;在硅棒或方棒特长时,可以增加增大上夹爪组件和下夹爪组件之间的距离在转运时对硅棒或方棒进行稳定夹持。二是转运装置夹持住硅棒或方棒,需要抬起进行转动时,上夹爪组件和所述下夹爪组件之间的距离保持不变,同步向上运动,即将夹持住的硅棒或方棒抬起,进行硅棒或方棒转运;硅棒或方棒转运到位后,上夹爪组件和下夹爪组件之间的距离保持不变,同步向下运动,即将夹持的方棒或方棒放下。 Through the transfer drive assembly, two functions are realized. One is that the upper jaw assembly can move upwards independently so that the distance between the upper jaw assembly and the lower jaw assembly can be increased, and it can also move downwards independently so that the upper jaw assembly and the distance between the lower jaw assembly resets and becomes smaller. In this way, when the silicon rod or square rod is short, the distance between the upper jaw assembly and the lower jaw assembly may not need to be adjusted, and only the lower jaw assembly needs to be used for clamping; when the silicon rod or square rod is longer , the distance between the upper jaw assembly and the lower jaw assembly can be kept constant and the upper jaw assembly and the lower jaw assembly can be clamped at the same time; when the silicon rod or square rod is extra long, the upper jaw assembly can be increased The distance between the lower jaw assembly and the lower jaw assembly can stably clamp silicon rods or square rods during transfer. The second is that the transfer device holds the silicon rod or the square rod. When it needs to be lifted and rotated, the distance between the upper jaw assembly and the lower jaw assembly remains unchanged, and they move upward synchronously. Or the square rod is lifted to transfer the silicon rod or square rod; after the silicon rod or square rod is transferred in place, the distance between the upper jaw assembly and the lower jaw assembly remains unchanged, and they move downward synchronously. Rod or square stick down.
实施中,如图3C所示,所述转运驱动组件包括:In implementation, as shown in Figure 3C, the transport drive assembly includes:
转运气液缸321,所述转运气液缸321的缸体固定在所述上下料夹爪框架31的底部,所述转运气液缸321的导向杆上端与所述下夹爪组件固定;Transfer the air-liquid cylinder 321, the cylinder body of the transfer air-hydraulic cylinder 321 is fixed on the bottom of the loading and unloading jaw frame 31, and the upper end of the guide rod of the transfer air-hydraulic cylinder 321 is fixed to the lower jaw assembly;
气液转换器322,与所述转运气液缸321连接;其中,进入所述气液转换器322的气体把液压油挤压进入所述转运气液缸321,带动所述转运气液缸321的导向杆将所述下夹爪组件顶起;即上夹爪转运驱动装置包括转运气液缸321和气液转换器322;The gas-liquid converter 322 is connected with the air-liquid cylinder 321; wherein, the gas entering the air-liquid converter 322 squeezes the hydraulic oil into the air-liquid cylinder 321 to drive the air-liquid cylinder 321 The guide rod of the lower jaw assembly jacks up; that is, the upper jaw transfer drive device includes a transfer air-liquid cylinder 321 and an air-liquid converter 322;
转运气缸323,所述转运气缸323的缸体与所述下夹爪组件固定,所述转运气缸323的导向杆上端与所述上夹爪组件固定;其中,气源进入所述转运气缸323的气体,带动所述转运气缸323的导向杆将所述上夹爪组件顶起;即下夹爪转运驱动装置包括转运气缸323。Transfer air cylinder 323, the cylinder block of described transfer air cylinder 323 is fixed with described lower jaw assembly, the guide rod upper end of described transfer air cylinder 323 is fixed with described upper jaw assembly; Wherein, the air source enters described transfer air cylinder 323 The gas drives the guide rod of the air transfer cylinder 323 to lift up the upper jaw assembly; that is, the lower jaw transfer driving device includes the air transfer cylinder 323 .
转运气液缸和转运气缸的组合方式,使得转运驱动组件的结构较小,能够使得转运装置的整体结构较小。The combination of the transfer air-hydraulic cylinder and the transfer air cylinder makes the structure of the transfer drive assembly smaller, which can make the overall structure of the transfer device smaller.
具体的,当夹持较短的硅棒时,转运气缸复位缩回且转运气液缸伸出;当夹持较短的硅棒时,转运气缸和转运气液缸同时伸出。Specifically, when clamping a short silicon rod, the air transfer cylinder retracts and the air transfer cylinder extends; when a short silicon rod is clamped, the air transfer cylinder and the air/hydraulic cylinder extend simultaneously.
如当硅棒长度是大于等于150mm小于等于400mm时,此时只有下夹爪组件夹紧切割前的圆形的硅棒或切割后的方棒,然后转运气液缸动作抬起硅棒或方棒进行转运。For example, when the length of the silicon rod is greater than or equal to 150mm and less than or equal to 400mm, only the lower jaw assembly clamps the round silicon rod before cutting or the square rod after cutting, and then the air cylinder moves to lift the silicon rod or square rod. stick for transfer.
当硅棒长度大于400mm小于等于850mm时,上夹爪组件和下夹爪组件之间的距离保持不变,共同参与夹紧切割前的圆形的硅棒或切割后的方棒。When the length of the silicon rod is greater than 400mm and less than or equal to 850mm, the distance between the upper jaw assembly and the lower jaw assembly remains unchanged, and they jointly participate in clamping the round silicon rod before cutting or the square rod after cutting.
当硅棒长度大于850mm时,上夹爪组件和下夹爪组件共同参与夹紧切割前的圆形的硅棒或切割后的方棒,其中,上夹爪组件因为转运气缸的作用可以在上下料夹爪框架的垂向方向上下运动,适应不同长度的切割前的圆形的硅棒或切割后的方棒进行夹紧动作。When the length of the silicon rod is greater than 850mm, the upper jaw assembly and the lower jaw assembly jointly participate in clamping the round silicon rod before cutting or the square rod after cutting. Among them, the upper jaw assembly can move up and down due to the function of the cylinder The vertical direction of the jaw frame moves up and down, which is suitable for the clamping action of different lengths of round silicon rods before cutting or square rods after cutting.
实施中,如图3A,图3D和图3E所示,所述上夹爪组件和所述下夹爪组件各自包括:In practice, as shown in Figure 3A, Figure 3D and Figure 3E, the upper jaw assembly and the lower jaw assembly each include:
转运夹爪固定板331;Transfer jaw fixing plate 331;
左夹爪332-1和右夹爪332-2,固定在所述转运夹爪固定板331的正侧且相对设置,所述左夹爪332-1和右夹爪332-2能够靠近和远离,以实现夹持和松开;其中,所述转运夹爪固定板固定左夹爪和右夹爪的一侧为转运夹爪固定板的正侧;The left jaw 332-1 and the right jaw 332-2 are fixed on the positive side of the transfer jaw fixing plate 331 and are arranged oppositely, and the left jaw 332-1 and the right jaw 332-2 can approach and move away from each other. , to realize clamping and loosening; wherein, the side where the transfer jaw fixing plate fixes the left jaw and the right jaw is the positive side of the transfer jaw fixing plate;
硅棒检测组件,固定在所述转运夹爪固定板331的正侧,且所述硅棒检测组件的硅棒检测探针333位于所述左夹爪332-1和所述右夹爪332-2之间;The silicon rod detection component is fixed on the positive side of the transfer jaw fixing plate 331, and the silicon rod detection probe 333 of the silicon rod detection component is located at the left jaw 332-1 and the right jaw 332- between 2;
所述转运装置还包括硅棒检测处理单元,与所述硅棒检测组件333连接;其中:The transfer device also includes a silicon rod detection processing unit connected to the silicon rod detection component 333; wherein:
所述硅棒检测组件用于在所述左夹爪332-1和右夹爪332-2相对远离与硅棒之间保持间隙即不对硅棒进行夹持,且硅棒的底部置于硅棒支撑机构之上进行旋转时,所述硅棒检测组件的硅棒检测探针333-1保持压在硅棒的外周面;The silicon rod detection component is used to maintain a gap between the left jaw 332-1 and the right jaw 332-2 and the silicon rod, that is, the silicon rod is not clamped, and the bottom of the silicon rod is placed on the silicon rod When rotating on the support mechanism, the silicon rod detection probe 333-1 of the silicon rod detection component keeps pressing on the outer peripheral surface of the silicon rod;
所述硅棒检测处理单元用于根据所述硅棒检测组件的硅棒检测探针的信号得到硅棒的晶线的位置,判断硅棒是否满足预设的硅棒标准。The silicon rod detection processing unit is used to obtain the position of the crystal line of the silicon rod according to the signal of the silicon rod detection probe of the silicon rod detection component, and judge whether the silicon rod meets the preset silicon rod standard.
实施中,所述硅棒检测处理单元具体用于:In implementation, the silicon rod detection processing unit is specifically used for:
在硅棒的晶线的数量小于4或大于4的情况下,判断硅棒不满足预设的硅棒标准;In the case that the number of crystal lines of the silicon rod is less than 4 or greater than 4, it is judged that the silicon rod does not meet the preset silicon rod standard;
在硅棒的进行的数量为四个的情况下,图3F所示,硅棒6的四个晶线在硅棒的端面的晶线端点61中,每两个相邻的晶线端点61的连线形成四条切割直线;In the case where the number of silicon rods is four, as shown in FIG. 3F, the four crystal lines of the silicon rod 6 are in the crystal line endpoints 61 on the end faces of the silicon rods, and every two adjacent crystal line endpoints 61 Connect the lines to form four cutting lines;
在四条切割直线形成的四个夹角α均大于等于85度小于等于95度时,判断硅棒满足预设的硅棒标准,后续可以进行切割;When the four included angles α formed by the four cutting straight lines are all greater than or equal to 85 degrees and less than or equal to 95 degrees, it is judged that the silicon rod meets the preset silicon rod standard, and subsequent cutting can be performed;
在四条切割直线形成的四个夹角中的任一个小于85度或大于95度,判断硅棒不满足预设的硅棒标准,即硅棒的晶线过于倾斜。即便切割后也无法得到方棒,后续不进行切割。If any of the four included angles formed by the four cutting straight lines is less than 85 degrees or greater than 95 degrees, it is judged that the silicon ingot does not meet the preset silicon ingot standard, that is, the crystal line of the silicon ingot is too inclined. Even after cutting, the square bar cannot be obtained, and subsequent cutting will not be performed.
这样,硅棒检测组件和硅棒检测处理单元相配合,对硅棒是否满足预设的硅棒标准进行一次判断,避免了对不符合预设的硅棒标准的硅棒进行切割,提高了效率,减少了时间的浪费。In this way, the silicon rod detection component cooperates with the silicon rod detection processing unit to make a judgment on whether the silicon rod meets the preset silicon rod standard, avoiding the cutting of silicon rods that do not meet the preset silicon rod standard, and improving the efficiency , reducing time wastage.
所述硅棒检测处理单元还用于:The silicon rod detection processing unit is also used for:
判断置于硅棒支撑机构之上的硅棒相对于硅棒支撑机构的中心的实际偏心度,在实际偏心度超出预设允许的偏心范围,则需要调整硅棒的位置;Judging the actual eccentricity of the silicon rod placed on the silicon rod support mechanism relative to the center of the silicon rod support mechanism, if the actual eccentricity exceeds the preset allowable eccentricity range, the position of the silicon rod needs to be adjusted;
判断置于硅棒支撑机构之上的硅棒的实际倾斜度,在实际倾斜度超出预设允许的倾斜范围,则需要进行人工判断;人工判断,确实超出实际倾斜度超出预设允许的倾斜范围,则不进行切割。Judging the actual inclination of the silicon rod placed on the silicon rod support mechanism, if the actual inclination exceeds the preset allowable inclination range, manual judgment is required; manual judgment, if the actual inclination exceeds the preset allowable inclination range , no cutting is performed.
硅棒检测单元上述处理过程,都需要以硅棒检测组件的信号为基础进行。The above processing process of the silicon rod detection unit needs to be carried out based on the signal of the silicon rod detection component.
实施中,如图3A,图3B和图3C所示,转运装置还包括:In implementation, as shown in Figure 3A, Figure 3B and Figure 3C, the transfer device also includes:
两个竖向导轨341,竖向平行设置在所述转运夹爪固定板331的一侧;Two vertical guide rails 341 are vertically arranged in parallel on one side of the transfer jaw fixing plate 331;
两个转运夹爪滑块,固定在所述转运夹爪固定板331的背侧,所述转运夹爪滑块和所述竖向导轨341滑动连接;Two transfer jaw sliders are fixed on the back side of the transfer jaw fixing plate 331, and the transfer jaw sliders are slidably connected to the vertical guide rail 341;
其中,所述转运气液缸321的导向杆上端与所述下夹爪组件的转运夹爪固定板固定,所述转运气缸323的导向杆上端与所述上夹爪组件的转运夹爪固定板固定。Wherein, the upper end of the guide rod of the transfer air-hydraulic cylinder 321 is fixed to the transfer jaw fixing plate of the lower jaw assembly, and the upper end of the guide rod of the transfer air cylinder 323 is fixed to the transfer jaw fixing plate of the upper jaw assembly. fixed.
所述转运气液缸能够带动下夹爪组件整体能够相对于上下料夹爪框架在上下料夹爪框架的高度方向上下运动。转运气缸能够带动上夹爪组件整体相对于下夹爪组件在垂向方向上下运动。The transfer air-hydraulic cylinder can drive the whole lower jaw assembly to move up and down relative to the upper and lower material jaw frame in the height direction of the upper and lower material jaw frame. The transfer air cylinder can drive the whole upper jaw assembly to move up and down in the vertical direction relative to the lower jaw assembly.
实施中,所述上夹爪组件和所述下夹爪组件各自还包括:In practice, each of the upper jaw assembly and the lower jaw assembly further includes:
夹爪同步反向运动组件,所述左夹爪和所述右夹爪通过所述夹爪同步反向运动组件与所述转运夹爪固定板安装;A jaw synchronous reverse movement assembly, the left jaw and the right jaw are mounted on the transfer jaw fixing plate through the jaw synchronous reverse movement assembly;
其中,所述夹爪同步反向运动组件用于带动所述左夹爪和所述右夹爪同步反向运动以相互靠近和远离。Wherein, the jaw synchronous reverse movement assembly is used to drive the left jaw and the right jaw to move synchronously and reversely to approach and move away from each other.
这样,能够方便的实现左夹爪和右夹爪同时夹持住硅棒,同时松开硅棒。In this way, it is convenient to realize that the silicon rod is held by the left jaw and the right jaw while releasing the silicon rod.
具体的,如图3D和图3E所示,夹爪同步反向运动组件包括:Specifically, as shown in FIG. 3D and FIG. 3E , the synchronous reverse movement components of the jaws include:
转运夹爪气缸351,所述转运夹爪气缸351的缸体与转运夹爪固定板331固定;Transfer jaw cylinder 351, the cylinder body of the transfer jaw cylinder 351 is fixed with the transfer jaw fixing plate 331;
两个连接板352,所述转运夹爪气缸351的导向杆的上端与其中一个连接板固定;Two connecting plates 352, the upper end of the guide rod of the transfer jaw cylinder 351 is fixed with one of the connecting plates;
两个齿条353,两个连接板352相对的一侧分别固定齿条353;Two racks 353, the opposite sides of the two connecting plates 352 respectively fix the racks 353;
同步齿轮354,与两个所述齿条353啮合。The synchronous gear 354 meshes with the two racks 353 .
这样,能够方便的实现左夹爪和右夹爪同时夹持住硅棒或方棒。In this way, it is convenient to realize that the silicon rod or the square rod is clamped by the left jaw and the right jaw at the same time.
实施中,转运装置还包括:In practice, the transfer device also includes:
转运旋转机构,所述上下料夹爪框架固定在所述转运旋转机构之上,所述转运旋转机构安装在硅棒切割***的机座之上且位于硅棒切割***的两个切割工位之间运动;The transfer rotation mechanism, the frame of the loading and unloading jaws is fixed on the transfer rotation mechanism, the transfer rotation mechanism is installed on the base of the silicon rod cutting system and is located between the two cutting stations of the silicon rod cutting system movement between
其中,所述转运旋转机构用于带动所述上下料夹爪框架旋转,还用于在硅棒切割***的两个切割工位之间沿硅棒切割***的横向方向运动,还用于在硅棒切割***的Y方向运动,硅棒切割***的Y方向与转运装置靠近和远离硅棒切割***的上下料装置的前后方向一致。Wherein, the transfer rotation mechanism is used to drive the frame of the loading and unloading jaws to rotate, and is also used to move along the transverse direction of the silicon rod cutting system between the two cutting stations of the silicon rod cutting system, and is also used to The Y direction of the rod cutting system moves, and the Y direction of the silicon rod cutting system is consistent with the forward and backward direction of the transfer device approaching and away from the loading and unloading device of the silicon rod cutting system.
转运旋转机构能够带动上下料夹爪框架旋转且能在硅棒切割***的两个切割工位之间运动,且能够带动上下料夹爪框架靠近和远离上下料装置。这样,就能实现将硅棒转运至切割工位的过程和将切割形成的方棒从切割工位转运走的两个过程。将硅棒转运至切割工位的过程具体包括:The transfer rotation mechanism can drive the loading and unloading jaw frame to rotate and can move between the two cutting stations of the silicon rod cutting system, and can drive the loading and unloading jaw frame to approach and move away from the loading and unloading device. In this way, two processes of transferring the silicon rod to the cutting station and transferring the square rod formed by cutting away from the cutting station can be realized. The process of transferring silicon rods to the cutting station specifically includes:
将上夹爪组件和下夹爪组件转向上下料装置,并靠近上下料装置竖向承载的硅棒,夹持住硅棒并将硅棒抬起;Turn the upper jaw assembly and the lower jaw assembly to the loading and unloading device, and approach the silicon rod vertically carried by the loading and unloading device, clamp the silicon rod and lift the silicon rod;
退回并旋转,使得硅棒朝向其中一个切割工位;retract and rotate so that the rod faces one of the cutting stations;
在硅棒切割***的X方向靠近其中一个切割工位,将硅棒放下并松开不再夹持;完成一个硅棒的转运。Close to one of the cutting stations in the X direction of the silicon rod cutting system, put down the silicon rod and release it from clamping; complete the transfer of a silicon rod.
将切割形成的方棒从切割工位转运走的过程,具体包括:The process of transporting the cut square bar from the cutting station, including:
将上夹爪组件和下夹爪组件转向其中一个切割工位,夹持住切割形成的方棒且将方棒抬起;Turn the upper jaw assembly and the lower jaw assembly to one of the cutting stations, hold the square bar formed by cutting and lift the square bar;
在硅棒切割***的X方向靠近上下料装置,并转向上下料装置的方棒下料组件,将方棒置于方棒下料组件,完成一个方棒的转运,后续由方棒下料组件完成下料。Close to the loading and unloading device in the X direction of the silicon rod cutting system, and turn to the square rod blanking assembly of the loading and unloading device, place the square rod on the square rod blanking assembly, complete the transfer of a square rod, and then use the square rod blanking assembly Complete blanking.
具体的,如图3A所示,转运旋转机构主要由转运电机、转运谐波减速器和回转座361组成。回转座361上同时安装着谐波减速器的柔轮,谐波减速器的钢轮安装在上下料夹爪框架上,这样转运电机通过转运谐波减速器使上下料夹爪框架在回转座上做稳定的旋转运动,由于转运谐波减速机可以消除反向间隙,使得硅棒转运上料精度大大提高。在回转座上同时安装有一条回转拖链,用于回转运动的走线走管。转运谐波减速机极大程度上提高了硅棒的转运精度。Specifically, as shown in FIG. 3A , the transfer rotation mechanism is mainly composed of a transfer motor, a transfer harmonic reducer and a revolving base 361 . The flexible wheel of the harmonic reducer is installed on the slewing seat 361 at the same time, and the steel wheel of the harmonic reducer is installed on the frame of the loading and unloading jaws, so that the transfer motor makes the frame of the loading and unloading jaws on the slewing seat through the transfer of the harmonic reducer Doing stable rotation, since the transfer harmonic reducer can eliminate the backlash, the accuracy of silicon rod transfer and feeding is greatly improved. At the same time, a rotary towline is installed on the slewing seat, which is used for routing the cables and pipes of the slewing motion. The transfer harmonic reducer greatly improves the transfer accuracy of silicon rods.
第四个组成部分:硅棒切割***的切割装置的结构The fourth component: the structure of the cutting device of the silicon rod cutting system
切割机头机构41的结构The structure of cutting head mechanism 41
如图1A,图1B和图1C所示,硅棒切割***的两个切割工位,每一个切割工位对应一个切割装置4,一个切割装置在一个切割过程中,切割装置的两个横向设置的平行的切割段自上而下对硅棒进行切割,形成两个边皮。As shown in Fig. 1A, Fig. 1B and Fig. 1C, two cutting stations of the silicon rod cutting system, each cutting station corresponds to a cutting device 4, and a cutting device is in a cutting process, and two lateral settings of the cutting device The parallel cutting section cuts the silicon rod from top to bottom to form two side skins.
为了在切割后,能够方便的取出边皮,对切割装置的切割机头机构进行了结构上的改进。如图4A,图4B,图4C和图4D所示,硅棒切割***的切割装置包括切割机头机构41,其中,所述切割机头机构用于形成横向设置的切割段对竖向放置的硅棒进行切割。In order to take out the edge skin conveniently after cutting, the cutting head mechanism of the cutting device is structurally improved. As shown in Fig. 4A, Fig. 4B, Fig. 4C and Fig. 4D, the cutting device of the silicon rod cutting system includes a cutting head mechanism 41, wherein, the cutting head mechanism is used to form a transversely arranged cutting section to a vertically placed Silicon rods are cut.
所述切割机头机构41包括线锯组件;所述线锯组件包括:The cutting head mechanism 41 includes a wire saw assembly; the wire saw assembly includes:
线锯安装架411,所述线锯安装架411具有竖向的机头通孔411-1; A wire saw mounting frame 411, the wire saw mounting frame 411 has a vertical machine head through hole 411-1;
金刚线,设置在所述线锯安装架411的正侧,金刚线在运动中用于对硅棒进行切割的部分为切割段; The diamond wire is arranged on the positive side of the wire saw installation frame 411, and the part of the diamond wire used to cut the silicon rod during the movement is the cutting section;
其中,所述切割段与所述机头通孔411-1错开设置,即互不干涉,所述机头通孔411-1用于边皮夹持机构的边皮夹持框架51的边皮夹爪安装柱511进出。Wherein, the cutting section and the head through hole 411-1 are arranged in a staggered manner, that is, they do not interfere with each other. Jaw mounting post 511 goes in and out.
边皮夹持框架51及边皮夹爪安装柱511的结构在下面第五个组成部分进行描述。切割段对硅棒进行切割形成方棒和边皮,需要将边皮取出。结合图5A,图5B,图5C和图5D对将边皮取出的过程进行说明:The structures of the edge leather clamping frame 51 and the edge leather clamp claw mounting column 511 are described in the fifth component below. The cutting section cuts the silicon rod to form a square rod and a side skin, and the side skin needs to be taken out. In conjunction with Fig. 5A, Fig. 5B, Fig. 5C and Fig. 5D, the process of taking out the skin will be described:
边皮夹持机构的边皮夹持框架51的边皮夹爪安装柱511向前穿过机头通孔,边皮夹持机构夹持住边皮;之后,带着边皮向后穿过机头通孔411-1,从而将边皮从切割工位移走。在此过程中,线锯安装架本身不需要移动。切割装置,由于切割机头机构的线锯组件的线锯安装架设置有机头通孔,实现了将边皮从切割工位移动的过程中,不需要移动线锯安装架,节约了时间,提高了取边皮的效率,使得将边皮从切割工位移走的工序较为简单,进而使得硅棒切割***的效率较高。The edge leather clamping claw mounting column 511 of the edge leather clamping frame 51 of the edge leather clamping mechanism passes through the machine head through hole forward, and the edge leather clamping mechanism clamps the edge leather; afterward, it passes backward with the edge leather The machine head passes through the hole 411-1, thereby removing the edge skin from the cutting station. The jigsaw mount itself does not need to move during this process. Cutting device, because the wire saw mounting frame of the wire saw assembly of the cutting machine head mechanism is provided with a machine head through hole, the process of moving the edge skin from the cutting station does not need to move the wire saw mounting frame, which saves time and improves In order to improve the efficiency of removing the edge skin, the process of removing the edge skin from the cutting station is relatively simple, which in turn makes the efficiency of the silicon rod cutting system higher.
具体的,机头通孔411-1是竖向设置的长条形的机头通孔。Specifically, the machine head through hole 411-1 is a vertically elongated machine head through hole.
具体的,所述线锯安装架是刚性的线锯安装架。Specifically, the wire saw mounting frame is a rigid wire saw mounting frame.
 the
实施中,如图4D所示,所述切割机头机构还包括:In implementation, as shown in Figure 4D, the cutting head mechanism also includes:
检测组件415,与所述线锯组件连接,所述检测组件415用于对每次切割完成后形成的实际切割曲面进行检测,得到实际切割曲面的形状。The detection component 415 is connected with the wire saw component, and the detection component 415 is used to detect the actual cutting curved surface formed after each cutting, so as to obtain the shape of the actual cutting curved surface.
检测组件能够对每次切割完成后形成的实际切割曲面进行检测,得到实际切割曲面的形状有两种可能:一种是中间凸两端平的切割曲面,另一种是中间凹两端平的切割曲面。为下次切割过程中动态精确调整切割段提供了基础。The detection component can detect the actual cutting surface formed after each cutting, and there are two possibilities to obtain the shape of the actual cutting surface: one is a cutting surface with a convex middle and flat ends, and the other is a concave middle and flat ends Cut surfaces. It provides a basis for dynamically and accurately adjusting the cutting section in the next cutting process.
 the
实施中,如图4D所示,所述切割机头机构还包括线锯控制单元,与检测组件415连接;所述线锯控制单元用于:During implementation, as shown in FIG. 4D, the cutting head mechanism further includes a wire saw control unit connected to the detection component 415; the wire saw control unit is used for:
根据上次切割的实际切割曲面的弯曲方向和弯曲程度,在下次切割过程中对切割段的切割位置进行动态调整,所述动态调整包括:According to the bending direction and degree of bending of the actual cutting surface of the last cutting, the cutting position of the cutting section is dynamically adjusted during the next cutting process, and the dynamic adjustment includes:
所述切割段调整的方向与上次的实际切割曲面的弯曲方向相反;The direction of adjustment of the cutting section is opposite to the bending direction of the actual cutting surface last time;
所述切割段切割位置的调整的程度为上次的实际切割曲面的弯曲程度与理论切割曲面的弯曲程度之间的差值。The degree of adjustment of the cutting position of the cutting segment is the difference between the curvature degree of the actual cutting surface and the curvature degree of the theoretical cutting surface last time.
检测组件和线锯控制单元共同配合,首先,检测组件能够对每次切割完成后形成的实际切割曲面进行检测。之后,线锯控制单元,能够对下次切割过程中的切割段进行动态精确调整以使实际切割取面更接***面。The detection component cooperates with the wire saw control unit. Firstly, the detection component can detect the actual cutting surface formed after each cutting. Afterwards, the wire saw control unit can dynamically and accurately adjust the cutting section in the next cutting process so that the actual cutting surface is closer to the plane.
 the
实施中,如图4I、图4J和图4K所示,所述切割段为两个且平行设置,两个所述切割段分别为左切割段和右切割段,两个切割段切割形成的实际切割曲面依次为左实际切割曲面SJQM1和右实际切割曲面SJQM2。In implementation, as shown in Fig. 4I, Fig. 4J and Fig. 4K, the cutting segments are two and arranged in parallel, and the two cutting segments are respectively the left cutting segment and the right cutting segment, and the actual cutting formed by the two cutting segments The cutting surfaces are the left actual cutting surface SJQM1 and the right actual cutting surface SJQM2 in turn.
具体的,图4I为左实际切割曲面SJQM1和右实际切割曲面SJQM2均为中间凸两端平的实际切割曲面;图4J为左实际切割曲面SJQM1和右实际切割曲面SJQM2均为中间凹两端平的实际切割曲面;图4K为左实际切割曲面SJQM1为中间凸两端平的实际切割曲面,右实际切割曲面SJQM2为中间凹两端平的实际切割曲面。Specifically, Fig. 4I shows that the left actual cutting surface SJQM1 and the right actual cutting surface SJQM2 are both the actual cutting surfaces with a convex middle and flat ends; Fig. 4J shows that the left actual cutting surface SJQM1 and the right actual cutting surface SJQM2 are both concave in the middle and flat at both ends Figure 4K shows that the left actual cutting surface SJQM1 is an actual cutting surface with a convex middle and two flat ends, and the right actual cutting surface SJQM2 is an actual cutting surface with a concave middle and two flat ends.
实施中,所述动态调整具体包括:In implementation, the dynamic adjustment specifically includes:
所述左切割段调整的方向与上次的左实际切割曲面的弯曲方向相反;The adjustment direction of the left cutting segment is opposite to the bending direction of the last actual left cutting surface;
所述左切割段切割位置的调整的程度为上次的左实际切割曲面的弯曲程度与理论切割曲面LLQM1的弯曲程度之间的差值;The degree of adjustment of the cutting position of the left cutting section is the difference between the degree of curvature of the actual left cutting surface and the degree of curvature of the theoretical cutting surface LLQM1;
所述右切割段调整的方向与上次的右实际切割曲面SJQM2的弯曲方向相反;The direction of adjustment of the right cutting segment is opposite to the bending direction of the last actual right cutting curved surface SJQM2;
所述右切割段切割位置的调整的程度为上次的右实际切割曲面SJQM2的弯曲程度与理论切割曲面的弯曲程度的差值ΔL。The adjustment degree of the cutting position of the right cutting segment is the difference ΔL between the curvature degree of the right actual cutting curved surface SJQM2 last time and the curvature degree of the theoretical cutting curved surface.
检测组件和线锯控制单元共同配合,实现了对左切割段和右切割段的各自动态精确调整以使各自形成的实际切割取面更接***面。The detection component and the wire saw control unit work together to realize the dynamic and precise adjustment of the left cutting section and the right cutting section so that the actual cutting surface formed by each is closer to the plane.
 the
实施中,如图4D所示,所述检测组件415位于所述切割段之下;其中:In implementation, as shown in Figure 4D, the detection component 415 is located under the cutting section; wherein:
所述检测组件415具体用于在每次切割完成后所述切割机头机构41自下而上退线的过程中,对硅棒被切割且取走边皮形成的实际切割曲面进行检测,得到实际切割曲面的形状。The detection component 415 is specifically used to detect the actual cutting surface formed by cutting the silicon rod and removing the edge skin during the process of the cutting head mechanism 41 retreating from bottom to top after each cutting is completed, and obtain the actual cutting surface. Cut the shape of the surface.
这样,在切割机头机构退线的过程中,同步实现了对实际切割曲面的检测,没有增加额外的步骤。In this way, in the process of withdrawing the line of the cutting machine head mechanism, the detection of the actual cutting curved surface is realized synchronously, without adding additional steps.
 the
实施中,如图4A,图4B,图4C和图4D所示,所述切割段为横向设置的切割段且低于所述机头通孔411-1。In practice, as shown in FIG. 4A , FIG. 4B , FIG. 4C and FIG. 4D , the cutting section is a cutting section arranged transversely and lower than the head through hole 411 - 1 .
切割机头机构能够自上而下运动对硅棒进行切割。在切割机头机构自上而下运动的过程中,横向设置的切割段对竖向设置的硅棒自上而下进行切割。在切割完成后,切割段低于硅棒的下端面。此时,边皮通过机头通孔被从切割工位移走的过程,由于切割段低于机头通孔,切割段不会与移动的边皮产生干涉。The cutting head mechanism can move from top to bottom to cut silicon rods. During the top-down movement of the cutting head mechanism, the horizontally arranged cutting section cuts the vertically arranged silicon rods from top to bottom. After the cutting is completed, the cut section is lower than the lower end surface of the silicon rod. At this time, during the process that the edge skin is removed from the cutting station through the through hole of the machine head, since the cutting section is lower than the through hole of the machine head, the cutting section will not interfere with the moving edge skin.
实施中,如图4A所示,所述线锯组件还包括:In implementation, as shown in Figure 4A, the wire saw assembly further includes:
主动轮组件412-1和下过渡轮412-2,分别设置在所述线锯安装架411的正侧;The driving wheel assembly 412-1 and the lower transition wheel 412-2 are respectively arranged on the positive side of the wire saw installation frame 411;
张力轮组件412-3和上过渡轮412-4,分别设置在所述线锯安装架411的正侧;The tension wheel assembly 412-3 and the upper transition wheel 412-4 are respectively arranged on the front side of the wire saw installation frame 411;
环形金刚线,绕在所述主动轮组件412-1的主动轮、下过渡轮412-2、所述张力轮组件412-3的张力轮和上过渡轮412-4的外周面,在所述主动轮和所述下过渡轮的底端形成所述切割段,所述金刚线与所述机头通孔互不干涉。The annular diamond wire is wound around the outer peripheral surface of the driving wheel of the driving wheel assembly 412-1, the lower transition wheel 412-2, the tension wheel of the tension wheel assembly 412-3 and the upper transition wheel 412-4. The driving wheel and the bottom end of the lower transition wheel form the cutting section, and the diamond wire does not interfere with the through hole of the machine head.
主动轮组件设置在线锯安装架的正侧下部。张力轮组件对环形金刚线施加张力,使得环形金刚线保持一定的张力以对硅棒进行有效的切割。下过渡轮和上过渡轮对环形金刚线的走向进行调整。The driving wheel assembly is arranged at the lower part of the positive side of the wire saw installation frame. The tension wheel assembly applies tension to the annular diamond wire, so that the annular diamond wire maintains a certain tension to effectively cut the silicon rod. The lower transition wheel and the upper transition wheel adjust the direction of the annular diamond wire.
实施中,如图4B,图4C和图4D所示,硅棒切割***的一个切割工位对应一个切割装置,一个所述切割装置包括两个所述切割机头机构41,且两个所述切割机头机构41的切割段相对设置。In implementation, as shown in Fig. 4B, Fig. 4C and Fig. 4D, one cutting station of the silicon rod cutting system corresponds to one cutting device, one said cutting device includes two said cutting head mechanisms 41, and two said The cutting sections of the cutting head mechanism 41 are arranged oppositely.
一个切割装置具有两个切割机头机构,两个切割机头机构的切割段相对设置,这样,一个切割装置能够对竖向设置在切割工位的硅棒相对的两侧进行切割,形成两个位置相背的边皮,使得对硅棒的切割效率较高。A cutting device has two cutting head mechanisms, and the cutting segments of the two cutting head mechanisms are arranged oppositely. In this way, a cutting device can cut the opposite sides of the silicon rod vertically arranged at the cutting station to form two The sides opposite to each other make the cutting efficiency of silicon rods higher.
实施中,一个切割装置的两个切割机头机构相对设置,即包括本侧切割机头机构和对侧切割机头机构。每个所述切割机头机构还包括:In practice, the two cutting head mechanisms of one cutting device are arranged oppositely, that is, including the cutting head mechanism on the present side and the cutting head mechanism on the opposite side. Each said cutting head mechanism also includes:
清洗组件,固定在所述线锯安装架的正侧;The cleaning component is fixed on the positive side of the wire saw installation frame;
其中,所述清洗组件具有多个清洗喷头,第一部分清洗喷头用于对对侧和本侧的切割机头机构进行清洗,第二部分清洗喷头用于对对侧的切割机头机构进行清洗。Wherein, the cleaning assembly has a plurality of cleaning nozzles, the first part of the cleaning nozzles is used to clean the cutting head mechanism on the opposite side and the current side, and the second part of the cleaning nozzles is used to clean the cutting head mechanism on the opposite side.
本侧的切割机头机构也能够被本侧的切割机头机构的第一部分清洗喷头、对侧的切割机构的第一部分清洗喷头和对侧的切割机头机构的第二部分清洗喷头进行清洗,使得本侧的切割机头机构也受到多个方向清洗喷头清洗,从而使得每一个切割机头机构都受到多个方向清洗喷头清洗,清洗效率高。清洗组件主要是对对侧的切割机头机构进行清洗,同时也兼顾对本侧的切割机头机构进行清洗。The cutting head mechanism on this side can also be cleaned by the first part cleaning nozzle of the cutting head mechanism on this side, the first part cleaning nozzle of the cutting mechanism on the opposite side and the second part cleaning nozzle of the cutting head mechanism on the opposite side, The cutting head mechanism on this side is also cleaned by cleaning nozzles in multiple directions, so that each cutting head mechanism is cleaned by cleaning nozzles in multiple directions, and the cleaning efficiency is high. The cleaning component is mainly to clean the cutting head mechanism on the opposite side, and also to clean the cutting head mechanism on this side.
实施中,如图4A所示,所述清洗组件包括:In implementation, as shown in Figure 4A, the cleaning assembly includes:
第一下清洗组件413-1,固定在所述线锯安装架411的正侧且位于所述主动轮组件412-1的上方,所述第一下清洗组件的第一部分清洗喷头用于对对侧和本侧的切割机头机构的主动轮组件412-1的主动轮进行清洗,第二部分清洗喷头用于对对侧的切割机头机构的主动轮组件的主动轮进行清洗;The first lower cleaning assembly 413-1 is fixed on the front side of the jigsaw installation frame 411 and located above the driving wheel assembly 412-1, and the first part of the cleaning spray head of the first lower cleaning assembly is used for The driving wheel of the driving wheel assembly 412-1 of the cutting head mechanism on the side and this side is cleaned, and the second part of the cleaning nozzle is used to clean the driving wheel of the driving wheel assembly of the cutting head mechanism on the opposite side;
第二下清洗组件413-2,固定在所述线锯安装架411的正侧且位于所述下过渡轮412-2的上方,所述第二下清洗组件的第一部分清洗喷头用于对对侧和本侧的切割机头机构的下过渡轮412-2进行清洗,第二部分清洗喷头用于对对侧的切割机头机构的下过渡轮进行清洗。The second lower cleaning assembly 413-2 is fixed on the positive side of the wire saw installation frame 411 and is located above the lower transition wheel 412-2. The first part of the cleaning nozzle of the second lower cleaning assembly is used for pairing The lower transition wheel 412-2 of the cutting head mechanism on the side and this side is cleaned, and the second part of the cleaning nozzle is used to clean the lower transition wheel of the cutting head mechanism on the opposite side.
通过调整第一下清洗组件的第一部分清洗喷头和第二部分清洗喷头朝向,实现各自的清洗功能。通过调整第二下清洗组件的第一部分清洗喷头和第二部分清洗喷头的朝向,实现各自的清洗功能。By adjusting the orientation of the first part of the cleaning nozzles and the second part of the cleaning nozzles of the first lower cleaning component, the respective cleaning functions are realized. The respective cleaning functions are realized by adjusting the orientations of the first part of the cleaning nozzles and the second part of the cleaning nozzles of the second lower cleaning component.
实施中,如图4A所示,所述清洗组件还包括:In implementation, as shown in Figure 4A, the cleaning assembly also includes:
第一上清洗组件413-3,固定在所述线锯安装架411的正侧且位于所述张力轮组件412-3的上方,所述第一下清洗组件的第一部分清洗喷头用于对对侧和本侧的切割机头机构的张力轮组件412-3的张力轮进行清洗,第二部分清洗喷头用于对对侧的切割机头机构的张力轮组件的张力轮进行清洗;The first upper cleaning assembly 413-3 is fixed on the front side of the wire saw installation frame 411 and is located above the tension wheel assembly 412-3, and the first part of the cleaning nozzle of the first lower cleaning assembly is used for The tension wheel of the tension wheel assembly 412-3 of the cutting head mechanism on the side and this side is cleaned, and the second part of the cleaning nozzle is used to clean the tension wheel of the tension wheel assembly of the cutting head mechanism on the opposite side;
第二上清洗组件413-4,固定在所述线锯安装架的正侧且位于所述上过渡轮412-3的上方,所述第二上清洗组件的第一部分清洗喷头用于对对侧和本侧的切割机头机构的上过渡轮412-3进行清洗,第二部分清洗喷头用于对对侧的切割机头机构的上过渡轮进行清洗。The second upper cleaning assembly 413-4 is fixed on the positive side of the wire saw installation frame and above the upper transition wheel 412-3, and the first part of the cleaning spray head of the second upper cleaning assembly is used for the opposite side Clean with the upper transition wheel 412-3 of the cutting head mechanism on this side, and the second part of the cleaning nozzle is used to clean the upper transition wheel of the cutting head mechanism on the opposite side.
通过调整第一上清洗组件的第一部分清洗喷头和第二部分清洗喷头的朝向,实现各自的清洗功能。通过调整第二上清洗组件的第一部分清洗喷头和第二部分清洗喷头的朝向,实现各自的清洗功能。By adjusting the orientations of the first part of the cleaning nozzles and the second part of the cleaning nozzles of the first upper cleaning component, respective cleaning functions are realized. The respective cleaning functions are realized by adjusting the orientations of the first part of the cleaning nozzles and the second part of the cleaning nozzles of the second upper cleaning component.
具体的,硅棒竖向放置在切割工位时,所述第一下清洗组件和所述第二下清洗组件的位置位于硅棒之外的位置,即所述第一下清洗组件和所述第二下清洗组件分别与硅棒错开设置,即互不干涉。Specifically, when the silicon rod is vertically placed at the cutting station, the positions of the first lower cleaning assembly and the second lower cleaning assembly are located outside the silicon rod, that is, the first lower cleaning assembly and the The second lower cleaning component and the silicon rods are respectively arranged in a staggered manner, that is, they do not interfere with each other.
这样,所述第一下清洗组件和所述第二下清洗组件能够对对侧的切割机头机构进行清洗,不会受到硅棒的阻挡。In this way, the first lower cleaning assembly and the second lower cleaning assembly can clean the cutting head mechanism on the opposite side without being blocked by silicon rods.
具体的,如图4B,图4C和4D所示,所述第一上清洗组件413-3和所述第二上清洗组件413-4高于切割后的硅棒。Specifically, as shown in FIG. 4B, FIG. 4C and 4D, the first upper cleaning assembly 413-3 and the second upper cleaning assembly 413-4 are higher than the cut silicon rods.
这样,能够从切割后的硅棒上方对硅棒进行清洗,依靠清洗液向下流动的过程,能够对切割后的硅棒自上而下进行清洗。In this way, the silicon rods can be cleaned from above the cut silicon rods, and the cut silicon rods can be cleaned from top to bottom by virtue of the cleaning liquid flowing downward.
实施中,所述切割机头机构还包括:In implementation, the cutting head mechanism also includes:
喷淋组件,所述喷淋组件固定在所述线锯安装架的正侧;喷淋组件在每次切割前的预设前置喷淋时间和喷淋过程中进行喷淋;A spray assembly, the spray assembly is fixed on the positive side of the wire saw installation frame; the spray assembly sprays during the preset pre-spray time and spray process before each cutting;
其中,所述喷淋组件具有喷淋喷头,所述喷淋喷头用于对硅棒和环形金刚线切割硅棒形成的切割缝喷洒切割液且进行冷却。Wherein, the spraying assembly has a spraying head, and the spraying head is used for spraying and cooling the silicon rod and the cutting slit formed by cutting the silicon rod with the annular diamond wire.
喷淋组件的喷淋头对硅棒和环形金刚线切割硅棒形成的切割缝喷洒切割液,一方面有利于对硅棒的切割,另一方面,也能对环形金刚线进行冷却,避免温度过高。The spray head of the spray assembly sprays the cutting fluid on the cutting seam formed by cutting the silicon rod and the ring diamond wire. On the one hand, it is beneficial to the cutting of the silicon rod. On the other hand, it can also cool the ring diamond wire to avoid temperature too high.
实施中,如图4A所示,所述喷淋组件包括:In implementation, as shown in Figure 4A, the spray assembly includes:
下喷淋组件414-1,固定在所述线锯安装架411的正侧;其中,所述下喷淋组件414-1具有上下间隔设置的多个下喷淋喷头,所述下喷淋组件414-1的多个下喷淋喷头用于对切割段切割硅棒的切割缝进行喷淋;The lower spray assembly 414-1 is fixed on the positive side of the wire saw installation frame 411; wherein, the lower spray assembly 414-1 has a plurality of lower spray nozzles arranged at intervals up and down, and the lower spray assembly Multiple lower spray nozzles of 414-1 are used to spray the cutting seam of cutting silicon rods in the cutting section;
上喷淋组件414-2,固定在所述线锯安装架411的正侧且位于所述张力轮组件412-3和所述机头通孔411-1之间;其中,所述上喷淋组件414-2具有横向间隔设置的多个上喷淋喷头,所述上喷淋组件的多个上喷淋喷头用于对硅棒的上端面进行喷淋。The upper spray assembly 414-2 is fixed on the front side of the wire saw installation frame 411 and is located between the tension wheel assembly 412-3 and the machine head through hole 411-1; wherein, the upper spray The assembly 414-2 has a plurality of upper shower nozzles arranged laterally at intervals, and the plurality of upper shower nozzles of the upper shower assembly are used to spray the upper end surface of the silicon rod.
下喷淋组件的多个下喷淋喷头在硅棒之上时,对切割段切割硅棒的切割缝喷淋切割液;在开始切割硅棒时,对环形金刚线尤其是切割段部分进行喷淋。上喷淋组件的多个上喷淋喷头对硅棒的上端面喷淋切割液,使得切割更为快捷,同时,随着切割段对硅棒自上而下的切割,切割液也沿着切割段向下流动,也起到了冷却环形金刚线,尤其是切割段部分。When the multiple lower spray nozzles of the lower spray assembly are above the silicon rod, the cutting fluid is sprayed on the cutting slit of the cutting section to cut the silicon rod; shower. Multiple upper spray nozzles of the upper spray assembly spray the cutting fluid on the upper surface of the silicon rod, making the cutting faster. At the same time, as the cutting section cuts the silicon rod from top to bottom, the cutting fluid also follows the cutting The downward flow of the segment also serves to cool the ring diamond wire, especially the cutting segment.
具体的,如图4E所示,张力轮组件412-3由张力电机412-31、减速机412-32、张力摆杆412-33和张力轮412-34组成,因为减速机作用,能构保证实现小电机输出大扭矩,节省电机成本。张力摆杆两侧设置限位块,使得张力摆杆在一定角度内旋转。Specifically, as shown in Figure 4E, the tension wheel assembly 412-3 is composed of a tension motor 412-31, a speed reducer 412-32, a tension swing rod 412-33 and a tension wheel 412-34. Achieve high torque output from small motors and save motor costs. Limiting blocks are arranged on both sides of the tension pendulum so that the tension pendulum can rotate within a certain angle.
支撑框架44、横向进给机构和垂向进给机构的结构The structure of support frame 44, lateral feed mechanism and vertical feed mechanism
实施中,如图4F所示,切割装置4还包括:In implementation, as shown in Figure 4F, the cutting device 4 also includes:
支撑框架44,用于安装在硅棒切割***的机座1之上;Support frame 44, for being installed on the base 1 of the silicon rod cutting system;
与所述切割机头机构41一一对应的横向进给机构451,所述切割机头机构和与之对应的横向进给机构451固定且两个所述切割段相对设置,所述横向进给机构451与所述支撑框架相对滑动连接以带动两个所述切割段靠近和远离。其中,所述横向进给机构451用于带动两个所述切割机头机构41靠近和远离运动且调整同一切割装置的两个切割机头机构的切割段之间的距离。The lateral feed mechanism 451 corresponding to the cutting head mechanism 41 one by one, the cutting head mechanism and the corresponding lateral feed mechanism 451 are fixed and the two cutting sections are arranged oppositely, the lateral feed The mechanism 451 is relatively slidably connected with the support frame to drive the two cutting sections closer to and farther away. Wherein, the transverse feed mechanism 451 is used to drive the two cutting head mechanisms 41 to move closer to and away from and to adjust the distance between the cutting sections of the two cutting head mechanisms of the same cutting device.
这样,在两个横向进给机构的带动下,同一个切割装置的两个切割机头机构能够靠近和远离,使得同一切割装置的两个切割机头机构的切割段之间的距离能够调整。即同一切割机头机构的两个切割段平行设置且两个切割段之间的距离可调。带来的有益效果是切割装置能够适用于对多种直径的硅棒的切割,使得切割装置的通用性很强。In this way, driven by the two transverse feed mechanisms, the two cutting head mechanisms of the same cutting device can approach and move away, so that the distance between the cutting segments of the two cutting head mechanisms of the same cutting device can be adjusted. That is, the two cutting sections of the same cutting head mechanism are arranged in parallel and the distance between the two cutting sections is adjustable. The beneficial effect is that the cutting device is suitable for cutting silicon rods of various diameters, making the cutting device highly versatile.
横向进给机构和垂向进给机构组成形成进给机构。The horizontal feed mechanism and the vertical feed mechanism form a feed mechanism.
实施中,如图4F所示,切割装置还包括:In implementation, as shown in Figure 4F, the cutting device also includes:
与所述横向进给机构一一对应的垂向进给机构452,分别竖直固定在所述支撑框架44的同一侧,所述垂向进给机构452和与之对应的横向进给机构451固定以带动所述切割机头机构在垂向方向运动;The vertical feed mechanism 452 corresponding to the horizontal feed mechanism one by one is vertically fixed on the same side of the support frame 44 respectively, and the vertical feed mechanism 452 and the corresponding horizontal feed mechanism 451 fixed to drive the cutting head mechanism to move in the vertical direction;
其中,两个所述垂向进给机构452用于带动两个所述横向进给机构垂向方向运动,进而带动所述切割机头机构在垂向方向运动。Wherein, the two vertical feeding mechanisms 452 are used to drive the two horizontal feeding mechanisms to move in the vertical direction, and then drive the cutting head mechanism to move in the vertical direction.
这样,垂向进给机构能够带动与之对应的横向进给机构在垂向方向即Z方向运动,进而带动切割机头机构及其切割段在垂向方向即Z方向运动,从而实现对竖向放置的硅棒在Z方向自上而下进行切割,并在每次切割完成后带动切割机头机构及其切割段复位。In this way, the vertical feed mechanism can drive the corresponding horizontal feed mechanism to move in the vertical direction, that is, the Z direction, and then drive the cutting head mechanism and its cutting section to move in the vertical direction, that is, the Z direction. The placed silicon rod is cut from top to bottom in the Z direction, and drives the cutting head mechanism and its cutting section to reset after each cutting is completed.
实施中,如图4F所示,所述横向进给机构包括:In implementation, as shown in Figure 4F, the infeed mechanism includes:
线锯横向导轨丝杠,所述线锯横向导轨丝杠的丝母固定在所述垂向进给机构处;其中,所述线锯横向导轨丝杠的导轨的导向方向为两个所述切割段靠近和远离的方向;Wire saw horizontal guide rail screw, the screw nut of the wire saw horizontal guide rail screw is fixed at the vertical feed mechanism; wherein, the guiding direction of the guide rail of the wire saw horizontal guide rail screw is two cutting The direction of the segment approaching and moving away;
线锯横向滑板451-1,与所述线锯横向导轨丝杠的滑块固定且与所述切割机头机构固定;The wire saw horizontal sliding plate 451-1 is fixed to the slider of the wire saw horizontal guide rail lead screw and fixed to the cutting head mechanism;
线锯横向驱动电机和线锯横向减速机,所述线锯横向驱动电机和线锯横向减速机连接以输出旋转运动至所述线锯横向导轨丝杠;A wire saw lateral drive motor and a wire saw lateral reducer, the wire saw lateral drive motor and the wire saw lateral reducer are connected to output rotary motion to the wire saw lateral guide rail screw;
其中,所述线锯横向导轨丝杠用于将接收到的旋转运动转化为沿所述线锯横向导轨丝杠的导轨的直线运动,并通过所述线锯横向导轨丝杠的滑块和线锯横向滑板带动所述切割机头机构在横向方向运动,即X方向运动。Wherein, the wire saw transverse guideway lead screw is used to convert the received rotational motion into linear motion along the guide rail of the wire saw transverse guideway lead screw, and through the slider and the wire of the wire saw transverse guideway lead screw The saw transverse slide plate drives the cutting head mechanism to move in the transverse direction, that is, in the X direction.
线锯横向导轨丝杠和线锯横向滑板,通过简单的结构实现了横向进给机构。The wire saw transverse guide rail lead screw and the wire saw transverse slide plate realize the transverse feed mechanism through a simple structure.
实施中,如图4F所示,所述垂向进给机构包括:In implementation, as shown in Figure 4F, the vertical feed mechanism includes:
线锯垂向导轨丝杠,所述线锯垂向导轨丝杠的丝母固定在所述支撑框架处;其中,所述线锯垂向导轨丝杠的导轨的导向方向为上下的垂向方向即Z方向;Wire saw vertical guide rail screw, the screw nut of the wire saw vertical guide rail screw is fixed at the support frame; wherein, the guiding direction of the guide rail of the wire saw vertical guide rail screw is the vertical direction up and down That is, the Z direction;
线锯垂向滑板452-1,与所述线锯垂向导轨丝杠的滑块固定且与所述线锯横向导轨丝杠的丝母固定;The wire saw vertical slide plate 452-1 is fixed to the slider of the wire saw vertical guide rail screw and fixed to the wire nut of the wire saw horizontal guide rail screw;
线锯垂向驱动电机和线锯垂向减速机,所述线锯垂向驱动电机和线锯垂向减速机以输出旋转运动至所述线锯垂向导轨丝杠;A wire saw vertical drive motor and a wire saw vertical reducer, the wire saw vertical drive motor and the wire saw vertical reducer output rotary motion to the wire saw vertical guide rail screw;
其中,所述线锯垂向导轨丝杠用于将接收到的旋转运动转化为沿所述线锯垂向导轨丝杠的导轨的直线运动,并通过所述线锯垂向导轨丝杠的滑块带动所述横向进给机构和所述切割机头机构在垂向方向运动。Wherein, the wire saw vertical guide rail screw is used to convert the received rotational motion into linear motion along the guide rail of the wire saw vertical guide rail screw, and through the sliding motion of the wire saw vertical guide rail screw The block drives the infeed mechanism and the cutting head mechanism to move in the vertical direction.
线锯垂向导轨丝杠的丝母和支撑框架固定为一个整体,相对于机座固定。线锯垂向导轨丝杠的滑块和线锯横向导轨丝杠的丝母固定为一个整体。线锯垂向导轨丝杠的滑块、线锯垂向滑板和线锯横向导轨丝杠的丝母作为一个整体能够沿垂向方向运动,进而带动横向进给机构沿垂向方向运动,从而带动切割机头机构及其切割段在垂向方向运动。The screw nut and the support frame of the wire saw vertical guide rail lead screw are fixed as a whole and fixed relative to the machine base. The slide block of the wire saw vertical guide rail screw and the screw nut of the wire saw horizontal guide rail screw are fixed as a whole. The slider of the wire saw vertical guide rail screw, the wire saw vertical slide plate and the screw nut of the wire saw horizontal guide rail screw can move in the vertical direction as a whole, and then drive the lateral feed mechanism to move in the vertical direction, thereby driving The cutting head mechanism and its cutting segments move in the vertical direction.
实施中,切割装置还包括:In implementation, the cutting device also includes:
进给控制单元,分别与同一切割装置的两个线锯横向驱动电机和两个线锯垂向驱动电机连接,用于控制两个所述切割机头机构的切割段之间的距离,还用于控制两个所述切割机头机构在垂向方向的运动。The feed control unit is respectively connected with two wire saw horizontal drive motors and two wire saw vertical drive motors of the same cutting device, and is used to control the distance between the cutting sections of the two cutting head mechanisms, and also uses It is used to control the movement of the two cutting head mechanisms in the vertical direction.
进给控制单元,线锯横向驱动电机和线锯垂向驱动电机配合,实现了两个切割机头机构的切割段之间在横向方向的距离能够方便的控制,也实现了两个切割机头机构的切割段在垂向方向的运动进行切割,即切割是能够进行控制的。The feed control unit, the horizontal drive motor of the wire saw and the vertical drive motor of the wire saw cooperate to realize the convenient control of the distance between the cutting sections of the two cutting head mechanisms in the lateral direction, and also realize the The movement of the cutting section of the mechanism in the vertical direction cuts, that is, the cutting can be controlled.
实施中,如图4F所示,所述垂向进给机构还包括:In implementation, as shown in Figure 4F, the vertical feed mechanism also includes:
阻挡插销461,所述阻挡插销461的插座固定在所述支撑框架44的侧面的上部;The blocking pin 461, the socket of the blocking pin 461 is fixed on the upper part of the side of the support frame 44;
阻挡条462,横向固定在所述线锯垂向滑板452-1处;The blocking strip 462 is horizontally fixed on the vertical sliding plate 452-1 of the jigsaw;
其中,所述阻挡插销用于在所述切割机头机构运动到最高位置时,所述阻挡插销的插头能够伸出阻挡所述阻挡条向下运动,进而阻止所述线锯垂向滑板和切割机头机构向下运动。Wherein, the blocking pin is used for when the cutting head mechanism moves to the highest position, the plug of the blocking pin can extend out to block the downward movement of the blocking bar, thereby preventing the jigsaw from sliding vertically and cutting The head mechanism moves downward.
通过阻挡插销和阻挡条的配合,通过机械结构实现线锯垂向滑板向下运动。当切割机头机构运动到最高位置时,人员有进入切割机头机构下方维护设备的需求,切割机头机构有可能意外下坠,造成人员伤害。通过阻挡插销和阻挡条的配合的机械阻挡来保证切割机头机构不会意外坠落。Through the cooperation of the blocking bolt and the blocking bar, the downward movement of the vertical slide plate of the wire saw is realized through the mechanical structure. When the cutting head mechanism moves to the highest position, personnel need to enter under the cutting head mechanism to maintain equipment, and the cutting head mechanism may accidentally fall down, causing personal injury. The mechanism of the cutting machine head will not fall accidentally by the mechanical blocking of the cooperation of the blocking pin and the blocking strip.
硅棒夹头机构42的结构The structure of silicon rod chuck mechanism 42
实施中,如图4G所示,切割装置包括硅棒夹头机构42,所述硅棒夹头机构42包括:In implementation, as shown in FIG. 4G, the cutting device includes a silicon rod chuck mechanism 42, and the silicon rod chuck mechanism 42 includes:
夹头架421;Chuck frame 421;
上浮动头422,安装在所述夹头架421处,用于压在竖向放置的硅棒的上端面;The upper floating head 422 is installed at the chuck frame 421 and is used to press on the upper end surface of the vertically placed silicon rod;
扶边皮支架,与所述夹头架421连接且能够向下伸出及向上复位,所述扶边皮支架用于向下伸出且扶在硅棒的外周面,所述扶边皮支架还用于向上复位离开硅棒的外周面。The supporting edge leather support is connected with the chuck frame 421 and can extend downwards and reset upwards. The supporting edge leather support is used to extend downwards and support the outer peripheral surface of the silicon rod. The supporting edge leather support It is also used to reset upwards away from the outer peripheral surface of the silicon rod.
夹头架是安装基础。上浮动头用于压在竖向放置的硅棒的上表面,实现硅棒的竖向方向的夹持。在硅棒被切割的过程中,上浮动头本身能够进行预设角度的倾斜将切割产生的应力减小或抵充掉。为了切割后的硅棒形成的边皮不会发生倾倒,设置了扶边皮支架。扶边皮支架与夹头架连接且扶边皮支架能够向下伸出及向上复位。这样,在切割段置于硅棒的上端面之后,将扶边皮支架向下伸出且扶在硅棒的外周面,使得在切割段切割硅棒形成方棒和边皮,扶边皮支架在上端外侧扶住边皮,避免边皮可能发生倾倒的可能性。在需要将边皮取走时,将扶边皮支架向上复位,不再与边皮发生接触,能够将边皮取走。The collet frame is the basis for the installation. The upper floating head is used to press on the upper surface of the vertically placed silicon rod to realize the vertical clamping of the silicon rod. During the cutting process of the silicon rod, the upper floating head itself can be tilted at a preset angle to reduce or counteract the stress generated by the cutting. In order to prevent the edge skin formed by the cut silicon rods from toppling over, an edge skin support is provided. The supporting edge leather support is connected with the collet frame and the supporting edge leather support can stretch out downwards and reset upwards. Like this, after the cutting section is placed on the upper end surface of the silicon rod, the edge skin support is stretched out downwards and supported on the outer peripheral surface of the silicon rod, so that the silicon rod is cut at the cutting section to form a square rod and a side skin, and the edge skin support Hold the side skin on the outer side of the upper end to avoid the possibility of the side skin falling over. When the edge skin needs to be taken away, the edge skin support is reset upwards, no longer contacts with the edge skin, and the edge skin can be taken away.
具体的,夹头架为刚性的夹头架。Specifically, the collet frame is a rigid collet frame.
具体的,所述夹头架能够上下运动且所述上浮动头用于压在竖向放置的硅棒的上端面。Specifically, the chuck frame can move up and down and the upper floating head is used to press against the upper end surface of the vertically placed silicon rod.
具体的,所述上浮动头安装在所述夹头架的朝下的端面。Specifically, the upper floating head is installed on the downward facing end surface of the chuck frame.
这样,上浮动头能够方便的压在竖向放置的硅棒的上端面,也能够方便的离开被切割后的硅棒的上端面。In this way, the upper floating head can be conveniently pressed against the upper end surface of the vertically placed silicon rod, and can also be easily separated from the upper end surface of the cut silicon rod.
实施中,如图4G所示,所述扶边皮支架包括:In implementation, as shown in Figure 4G, the buttress skin support includes:
扶边皮支架安装件423-1,与所述夹头架固定;The supporting part 423-1 of the support leather bracket is fixed with the chuck frame;
扶杆固定件423-2和边皮扶杆423-3,所述边皮扶杆423-3固定在所述扶杆固定件423-2远离所述上浮动头的一侧且向下伸出;The support bar fixing part 423-2 and the side skin support bar 423-3, the side skin support bar 423-3 is fixed on the side of the support bar fixing part 423-2 away from the upper floating head and protrudes downward ;
扶边皮驱动装置,分别与所述扶边皮支架安装件和所述扶杆固定件连接,用于带动所述扶杆固定件和所述边皮扶杆向下伸出及向上复位。The edge skin driving device is respectively connected with the edge skin support mounting part and the pole fixing part, and is used to drive the pole fixing part and the skin pole to extend downward and reset upward.
具体的,如图4G所示,所述扶边皮驱动装置为扶边皮驱动气缸423-4,所述扶边皮驱动气缸的缸体与所述扶边皮支架安装件423-1固定,所述扶边皮驱动气缸的导向杆与所述扶杆固定件423-2固定,所述扶边皮驱动气缸的导向杆伸缩带动所述扶杆固定件423-2和所述边皮扶杆423-3向下伸出及向上复位。Specifically, as shown in FIG. 4G, the buttress leather driving device is a buttress leather driving cylinder 423-4, and the cylinder body of the buttress leather driving cylinder is fixed to the buttress leather support mounting part 423-1. The guide rod of the side support skin driving cylinder is fixed with the support rod fixing part 423-2, and the guide rod of the side support skin driving cylinder stretches and drives the support rod fixing part 423-2 and the side skin support rod 423-3 extends downward and resets upward.
扶杆固定件和边皮扶杆固定为一个整体,与扶边皮支架安装件之间,通过扶边皮驱动气缸连接。扶边皮驱动气缸的导向杆伸长,扶杆固定件和边皮扶杆作为一个整体向下伸出,边皮扶杆扶在硅棒的外周面。扶边皮驱动气缸的导向杆缩回,扶杆固定件和边皮扶杆作为一个整体向上缩回,带动边皮扶杆向上缩回离开硅棒。The support rod fixing part and the side skin support rod are fixed as a whole, and are connected with the side skin support mounting part through the side skin driving cylinder. The guide rod elongation of the side skin driving cylinder, the side skin support rod and the side skin support rod extend downward as a whole, and the side skin support rod is supported on the outer peripheral surface of the silicon rod. The guide rod of the side skin driving cylinder is retracted, and the side skin support rod is retracted upwards as a whole, and the side skin support rod is driven to retract upwards and leave the silicon rod.
实施中,如图4G所示,一个所述扶杆固定件423-2的四周固定四个所述边皮扶杆423-3。In practice, as shown in FIG. 4G , four side skin poles 423 - 3 are fixed around one pole fixing member 423 - 2 .
这样,两个边皮被一个扶杆固定件的四个边皮扶杆扶在硅棒的外周面处,每一个边皮被两个边皮扶杆扶住。In this way, two side skins are supported on the outer peripheral surface of the silicon rod by four side skin support bars of a support bar fixing part, and each side skin is supported by two side skin support bars.
在切割段置于竖向放置的硅棒的上端面后,边皮扶杆向下伸出扶在硅棒的外周面处。单次切割完成后,边皮扶杆向上缩回,将两个边皮移走。After the cutting section is placed on the upper end surface of the vertically placed silicon rod, the edge skin support rod extends downward to support the outer peripheral surface of the silicon rod. After a single cut is complete, the edge bar is retracted upwards, removing both edges.
具体的,如图4G所示,所述硅棒夹头机构还包括:Specifically, as shown in Figure 4G, the silicon rod chuck mechanism also includes:
夹头架竖向运动组件424,与所述支撑框架44固定且位于两个所述切割机头机构41之间;The chuck frame vertical movement assembly 424 is fixed to the support frame 44 and is located between the two cutting head mechanisms 41;
其中,所述夹头架与所述夹头架竖向运动组件连接,所述夹头架竖向运动组件用于带动所述夹头架在竖向方向即Z方向上下运动,以带动上浮动头压在竖向放置的硅棒的上端面和离开被切割后的硅棒的上端面。Wherein, the collet frame is connected with the vertical movement component of the collet frame, and the vertical movement component of the collet frame is used to drive the collet frame to move up and down in the vertical direction, that is, the Z direction, so as to drive the upward floating The head presses on the upper end surface of the vertically placed silicon rod and leaves the upper end surface of the cut silicon rod.
硅棒支撑机构43的结构The structure of silicon rod supporting mechanism 43
实施中,如图4H所示,切割装置还包括硅棒支撑机构43,用于支撑竖向放置的硅棒的下端面,硅棒支撑机构43固定在切割工位处。所述硅棒支撑机构包括:During implementation, as shown in FIG. 4H , the cutting device further includes a silicon rod support mechanism 43 for supporting the lower end surface of the vertically placed silicon rod, and the silicon rod support mechanism 43 is fixed at the cutting station. The silicon rod support mechanism includes:
硅棒支撑安装座431,所述硅棒支撑安装座431固定在硅棒切割***的机座处;即硅棒支撑机构固定在机座处对应一个切割工位的位置;The silicon rod support mounting base 431, the silicon rod support mounting base 431 is fixed at the base of the silicon rod cutting system; that is, the silicon rod support mechanism is fixed at the position corresponding to a cutting station at the base;
用于支撑竖向硅棒下端面的下浮动头432,所述下浮动头安装在所述硅棒支撑安装座431的上方。The lower floating head 432 for supporting the lower end surface of the vertical silicon rod is installed above the silicon rod support mounting base 431 .
这样,在硅棒被切割的过程中,下浮动头本身能够进行预设角度的倾斜以将切割产生的应力减小或抵充掉。在切割机头机构的切割段自上而下进行切割时,切割产生的应力会被下浮动头的倾斜减小或抵充掉,从而防止切割到硅棒下部时产生崩边。In this way, during the cutting process of the silicon rod, the lower floating head itself can be tilted at a preset angle to reduce or counteract the stress generated by the cutting. When the cutting section of the cutting head mechanism cuts from top to bottom, the stress generated by the cutting will be reduced or offset by the inclination of the lower floating head, so as to prevent edge chipping when cutting to the lower part of the silicon rod.
实施中,如图4H所示,所述硅棒支撑机构还包括边皮支撑组件,所述边皮支撑组件包括:In implementation, as shown in Figure 4H, the silicon rod support mechanism further includes a skin support assembly, and the skin support assembly includes:
边皮支撑用驱动装置,固定在所述硅棒支撑安装座431之上且与所述下浮动头间隔设置;The driving device for supporting the edge is fixed on the silicon rod support mounting seat 431 and arranged at a distance from the lower floating head;
用于支撑硅棒下端面中被切割后形成边皮位置的边皮支撑头433-1,所述边皮支撑头433-1固定在所述边皮支撑用驱动装置的顶端;其中,所述边皮支撑用驱动装置用于在硅棒被切割成方棒和边皮时,锁紧以使得所述边皮支撑头保持高度,对边皮进行支撑。It is used to support the edge skin support head 433-1 that is cut to form the edge skin position in the lower end surface of the silicon rod, and the edge skin support head 433-1 is fixed on the top of the edge skin support driving device; wherein, the The driving device for supporting the edge skin is used for locking when the silicon rod is cut into square rods and the edge skin so that the edge skin support head maintains a height to support the edge skin.
在硅棒放在硅棒支撑机构之上的过程如下:The process of placing the silicon rod on the silicon rod support mechanism is as follows:
首先,边皮支撑头位于初始位置,处于初始位置的边皮支撑头的顶端低于下浮动头支撑头的顶端;First, the edge support head is at the initial position, and the top of the edge support head at the initial position is lower than the top of the lower floating head support head;
之后,将硅棒置于下浮动头之上,在下浮动头支撑头均与硅棒的下端面支撑后;Afterwards, the silicon rod is placed on the lower floating head, and after the support head of the lower floating head is supported by the lower end surface of the silicon rod;
然后,边皮支撑头向上顶紧,边皮支撑用驱动装置锁紧边皮支撑头的高度。Then, the edge skin supporting head is pushed upwards tightly, and the edge skin supporting is locked with a driving device to the height of the edge skin supporting head.
在切割机头机构41的切割段自上而下进行切割时,切割产生的应力带动下浮动头发生少许的倾斜,边皮支撑头始终保持对边皮的支撑;这样,下浮动头和边皮支撑头配合,将切割产生的应力减小或抵充掉,从而防止切割到硅棒下部时产生崩边。When the cutting section of the cutting head mechanism 41 cuts from top to bottom, the stress generated by the cutting drives the lower floating head to tilt a little, and the edge skin support head keeps supporting the edge skin all the time; like this, the lower floating head and the edge skin The supporting head cooperates to reduce or counteract the stress generated by cutting, so as to prevent edge chipping when cutting to the lower part of the silicon rod.
实施中,所述边皮支撑用驱动装置为边皮支撑用气缸433-2;In implementation, the driving device for supporting the edge is the cylinder 433-2 for supporting the edge;
所述边皮支撑用气缸433-2的缸体与所述硅棒支撑安装座431固定,所述边皮支撑用气缸433-2的导向杆与所述边皮支撑头433-1固定。The cylinder body of the edge support cylinder 433-2 is fixed to the silicon rod support mounting seat 431, and the guide rod of the edge support cylinder 433-2 is fixed to the edge support head 433-1.
实施中,如图4H所示,所述下浮动头具有向上凸起的三个下浮动头支撑头432-1,且三个下浮动头支撑头432-1位于一个三角形的三个顶点处。三个下浮动头支撑头能够确定一个平面,使得三个下浮动头支撑头的每一个都支撑硅棒的下端面。In practice, as shown in FIG. 4H , the lower floating head has three lower floating head support heads 432 - 1 protruding upward, and the three lower floating head support heads 432 - 1 are located at three vertices of a triangle. The three lower floating head support heads can define a plane, so that each of the three lower floating head support heads supports the lower end surface of the silicon rod.
实施中,所述上浮动头具有向下凸起的三个上浮动头压紧头,且三个上浮动头压紧头位于一个三角形的三个顶点处。三个上浮动头压紧头能够确定一个平面,使得三个上浮动头压紧头的每一个都压紧在硅棒下端面。In practice, the upper floating head has three upper floating head pressing heads protruding downward, and the three upper floating head pressing heads are located at three vertices of a triangle. The three upper floating head pressing heads can determine a plane, so that each of the three upper floating head pressing heads is pressed against the lower end surface of the silicon rod.
在切割机头机构的切割段自上而下进行切割时,下浮动头在切割产生的应力带动下浮动头发生少许的倾斜,上浮动头能够进行补偿,使得硅棒能够稳定的夹持在下浮动头和上浮动头之间。 When the cutting section of the cutting head mechanism is cutting from top to bottom, the lower floating head is driven by the stress generated by the cutting to cause a slight inclination of the floating head, and the upper floating head can compensate, so that the silicon rod can be stably clamped on the lower floating head. between the head and the floating head.
实施中,所述边皮支撑组件为四个,且四个边皮支撑组件位于一个长方形的四个顶点处;两个所述边皮支撑组件用于支撑一个硅棒切割形成的一个边皮。In practice, there are four edge support assemblies, and the four edge support assemblies are located at four vertices of a rectangle; two of the edge support assemblies are used to support an edge formed by cutting a silicon rod.
一对边皮支撑组件能够对一个边皮进行有效的支撑。A pair of edge skin supporting components can effectively support one edge skin.
实施中,如图4H所示,所述硅棒支撑机构还包括硅棒转动组件,所述硅棒转动组件包括:In implementation, as shown in Figure 4H, the silicon rod support mechanism also includes a silicon rod rotating assembly, and the silicon rod rotating assembly includes:
硅棒转动轴434-1,所述下浮动头固定在所述硅棒转动轴434-1之上,所述硅棒转动轴434-1转动连接在所述硅棒支撑安装座431之上;Silicon rod rotating shaft 434-1, the lower floating head is fixed on the silicon rod rotating shaft 434-1, and the silicon rod rotating shaft 434-1 is rotatably connected to the silicon rod supporting mounting seat 431;
硅棒驱动电机434-2,固定在所述硅棒支撑安装座431之下,与所述硅棒转动轴434-1连接以驱动所述硅棒转动轴434转动。The silicon rod driving motor 434 - 2 is fixed under the silicon rod support mount 431 and connected with the silicon rod rotating shaft 434 - 1 to drive the silicon rod rotating shaft 434 to rotate.
在硅棒的第一次切割,形成两个边皮且将两个边皮移走之后,将边皮支撑头向下运动复位。硅棒驱动电机驱动硅棒转动轴转动90度,带动下浮动头以及夹在下浮动头和上浮动头之间的硅棒转动90度。为了实现硅棒转动90度,硅棒驱动电机能够主动驱动硅棒转动轴转动90度,硅棒被动转动90度,为后续的第二次切割进行准备。After the first cut of the silicon rod, two edges are formed and removed, the edge support head is moved downwards to reset. The silicon rod driving motor drives the rotating shaft of the silicon rod to rotate 90 degrees, and drives the lower floating head and the silicon rod sandwiched between the lower floating head and the upper floating head to rotate 90 degrees. In order to achieve a 90-degree rotation of the silicon rod, the silicon rod drive motor can actively drive the silicon rod rotation axis to rotate 90 degrees, and the silicon rod is passively rotated 90 degrees to prepare for the subsequent second cutting.
第五个组成部分:硅棒切割***的边皮卸载装置5的结构The fifth component: the structure of the strip unloading device 5 of the silicon rod cutting system
如图1A和图5所示,机座1上固定两个切割装置4,切割装置4用于自上而下对硅棒进行切割,形成方棒和边皮,边皮卸载装置5将边皮卸载。As shown in Fig. 1A and Fig. 5, two cutting devices 4 are fixed on the machine base 1, and the cutting devices 4 are used to cut the silicon rod from top to bottom to form square rods and edges, and the edges are unloaded by the edges. uninstall.
实施中,如图1A,图5,图5A,图5B,图5C和图5D所示,硅棒切割***的边皮卸载装置5包括:In implementation, as shown in Figure 1A, Figure 5, Figure 5A, Figure 5B, Figure 5C and Figure 5D, the edge skin unloading device 5 of the silicon rod cutting system includes:
边皮夹持机构;Edge clamping mechanism;
边皮收集机构53;Edge collection mechanism 53;
其中,所述边皮夹持机构用于夹持住硅棒被切割为方棒形成的边皮,并运送至所述边皮收集机构53进行储存。Wherein, the scrap clamping mechanism is used to hold the scrap formed by cutting silicon rods into square rods, and transport them to the scrap collection mechanism 53 for storage.
实施中,所述边皮收集机构53具有收集区域,所述收集区域与硅棒切割***的切割工位一一对应;In practice, the skin collection mechanism 53 has a collection area, and the collection area corresponds to the cutting stations of the silicon rod cutting system one by one;
边皮卸载装置还包括收集控制单元,收集控制单元用于控制所述边皮夹持机构从各个切割工位夹持住被切割硅棒产生的边皮,并运送放置在所述边皮收集机构内,且切割同一硅棒产生的边皮被置于同一收集区域。The scrap unloading device also includes a collection control unit, which is used to control the scrap clamping mechanism to clamp the scrap produced by the cut silicon rod from each cutting station, and transport and place it on the scrap collection mechanism. Inside, and the skin produced by cutting the same silicon rod is placed in the same collection area.
本申请实施例的硅棒切割***的边皮卸载装置,边皮收集机构划分有收集区域,收集区域是与硅棒切割***的切割工位一一对应。通过收集控制单元,控制边皮夹持机构从各个切割工位夹持住被切割硅棒产生的边皮,并运送放置在边皮收集机构内的收集顺序,将切割同一硅棒产生的边皮被置于同一收集区域,即实现了同一硅棒切割成方棒产生的四个边皮被收集在边皮收集机构的同一收集区域,能够满足对同一硅棒产生的四个边皮后续粘贴标识以及进行后续管理提供了基础。In the scrap unloading device of the silicon rod cutting system in the embodiment of the present application, the scrap collecting mechanism is divided into a collection area, and the collection area corresponds to the cutting stations of the silicon rod cutting system one by one. Through the collection control unit, control the strip clamping mechanism to clamp the strips produced by the cut silicon rod from each cutting station, and transport the collection sequence placed in the strip collection mechanism, and cut the strips produced by the same silicon rod It is placed in the same collection area, that is, the four edges produced by cutting the same silicon rod into square rods are collected in the same collection area of the edge collection mechanism, which can meet the subsequent labeling of the four edges produced by the same silicon rod and provide the basis for subsequent management.
具体的,对硅棒进行编码形成硅棒编码,以区别各个硅棒。对硅棒进行切割,形成一个方棒和四个边皮,将来自同一硅棒的四个边皮收集在边皮收集机构的同一收集区域。这样,放在同一收集区域的边皮都是来自同一硅棒,方便对后续的边皮进行编码,边皮的编码包括硅棒编码和数字编码,如硅棒编码-1,硅棒编码-2,硅棒编码-3和硅棒编码-4。Specifically, the silicon rods are coded to form a silicon rod code, so as to distinguish each silicon rod. The silicon rod is cut to form a square rod and four edges, and the four edges from the same silicon rod are collected in the same collection area of the edge collection mechanism. In this way, the edge skins placed in the same collection area all come from the same silicon rod, which is convenient for encoding the subsequent edge skins. The coding of the edge skins includes silicon rod codes and digital codes, such as silicon rod code-1, silicon rod code-2 , Rod Code-3 and Rod Code-4.
边皮夹持机构51的结构The structure of edge skin clamping mechanism 51
实施中,如图5A,图5B,图5C和图5D所示,边皮夹持机构包括边皮夹持框架51,所述边皮夹持框架51包括:In practice, as shown in Figure 5A, Figure 5B, Figure 5C and Figure 5D, the edge leather clamping mechanism includes an edge leather clamping frame 51, and the edge leather clamping frame 51 includes:
边皮夹爪安装柱511;Edge leather jaw mounting column 511;
顶夹爪512-1和底夹爪512-2,安装于所述边皮夹爪安装柱511的正侧上下相对设置;The top jaw 512-1 and the bottom jaw 512-2 are installed on the front side of the side leather jaw mounting column 511 and are set up and down opposite to each other;
其中,所述顶夹爪512-1和所述底夹爪512-2中至少有一个与所述边皮夹爪安装柱之间的连接为滑动连接,且能够沿着垂向方向即硅棒切割***的Z方向上下运动,边皮夹爪安装柱安装顶夹爪512-1和所述底夹爪512-2的一侧为正侧。Wherein, the connection between at least one of the top jaw 512-1 and the bottom jaw 512-2 and the mounting column of the edge leather jaw is a sliding connection, and can be along the vertical direction, that is, the silicon rod The Z direction of the cutting system moves up and down, and the side where the top jaw 512-1 and the bottom jaw 512-2 are installed on the edge leather jaw mounting column is the positive side.
边皮夹持机构的边皮夹持框架,边皮夹爪安装柱是顶夹爪和底夹爪的安装基础。顶夹爪512-1和所述底夹爪512-2中至少有一个与所述边皮夹爪安装柱之间的连接为滑动连接,这样,顶夹爪512-1和所述底夹爪512-2之间的距离能够调整。在需要夹持竖向的边皮时,先调整顶夹爪和底夹爪之间的距离大于待夹持的竖向的边皮;之后,顶夹爪和底夹爪位于竖向的边皮的两端;然后,在硅棒切割***的Z方向调整顶夹爪和底夹爪之间的距离,使得顶夹爪和底夹爪夹持住边皮的两个端面,实现了对竖向的边皮上下方向的夹持。The edge skin clamping frame of the edge skin clamping mechanism, the edge skin clamp jaw installation column is the installation basis of the top jaw and the bottom jaw. The connection between at least one of the top jaw 512-1 and the bottom jaw 512-2 and the mounting column of the edge leather jaw is a sliding connection, so that the top jaw 512-1 and the bottom jaw 512-1 The distance between 512-2 can be adjusted. When it is necessary to clamp the vertical edge, first adjust the distance between the top jaw and the bottom jaw to be greater than the vertical edge to be clamped; after that, the top jaw and the bottom jaw are located on the vertical edge Then, adjust the distance between the top jaw and the bottom jaw in the Z direction of the silicon rod cutting system, so that the top jaw and the bottom jaw clamp the two end faces of the edge skin, realizing the vertical The upper and lower sides of the side skin are clamped.
具体的,边皮夹爪安装柱为刚性的边皮夹爪安装柱。Specifically, the mounting column of the edge skin gripper is a rigid mounting column of the edge skin gripper.
实施中,如图5A,图5B,图5C和图5D所示,所述底夹爪512-2固定在所述边皮夹爪安装柱511的底端;In practice, as shown in Figure 5A, Figure 5B, Figure 5C and Figure 5D, the bottom jaw 512-2 is fixed on the bottom end of the side skin jaw mounting column 511;
所述顶夹爪512-1与所述边皮夹爪安装柱511之间的连接为滑动连接且所述顶夹爪512-1能够沿着垂向方向即硅棒切割***的Z方向上下运动。The connection between the top jaw 512-1 and the side leather jaw mounting column 511 is a sliding connection, and the top jaw 512-1 can move up and down along the vertical direction, that is, the Z direction of the silicon rod cutting system .
底夹爪固定在边皮夹爪安装柱的底端,顶夹爪滑动安装在安装柱的上部,且顶夹爪和底夹爪相对设置。这样,顶夹爪能够沿着垂向方向即硅棒切割***的Z方向上下运动,使得顶夹爪和底夹爪之间的距离能够调整。在需要夹持竖向的边皮时,先调整顶夹爪和底夹爪之间的间距大于待夹持的边皮,将底夹爪承载竖向的边皮的下端面;之后,顶夹爪沿着Z方向向下运动直至压在边皮的上端面;此时,已经实现了对边皮的夹持。The bottom jaw is fixed on the bottom of the side leather jaw mounting column, and the top jaw is slidably installed on the top of the mounting column, and the top jaw and the bottom jaw are arranged oppositely. In this way, the top jaw can move up and down along the vertical direction, that is, the Z direction of the silicon rod cutting system, so that the distance between the top jaw and the bottom jaw can be adjusted. When it is necessary to clamp the vertical edge, first adjust the distance between the top jaw and the bottom jaw to be larger than the edge to be clamped, and load the lower end surface of the vertical edge with the bottom jaw; after that, the top clamp The claw moves down along the Z direction until it presses against the upper end surface of the edge skin; at this time, the clamping of the edge skin has been realized.
实施中,如图5A,图5B,图5C和图5D所示,所述边皮夹持框架51还包括:In practice, as shown in Figure 5A, Figure 5B, Figure 5C and Figure 5D, the edge skin clamping frame 51 also includes:
竖向设置的边皮夹爪背板513;Vertically arranged edge leather claw back plate 513;
边皮夹爪滑板514,所述边皮夹爪滑板514置于在所述边皮夹爪背板513的一个板面且与所述边皮夹爪背板513之间的连接为滑动连接,且所述边皮夹爪滑板能够沿所述边皮夹爪背板在水平方向运动,所述边皮夹爪滑板的运动方向与边皮卸载装置所在的硅棒切割***的X方向一致;The edge leather claw slide plate 514, the edge leather claw slide plate 514 is placed on a plate surface of the edge leather claw back plate 513 and the connection with the edge leather claw back plate 513 is a sliding connection, And the edge leather gripper slide plate can move in the horizontal direction along the edge leather gripper back plate, and the movement direction of the edge leather gripper slider is consistent with the X direction of the silicon rod cutting system where the edge leather unloading device is located;
边皮夹爪安装柱固定板515,所述边皮夹爪安装柱固定板515的相背的两端侧分别与所述边皮夹爪滑板514和所述边皮夹爪安装柱511固定,使得所述边皮夹爪安装柱511、边皮夹爪安装柱固定板515和边皮夹爪滑板514固定为一体;The edge leather claw mounting column fixing plate 515, the two opposite ends of the edge leather claw mounting column fixing plate 515 are respectively fixed with the edge leather claw sliding plate 514 and the edge leather claw mounting column 511, Make the described edge leather claw mounting column 511, the edge leather claw mounting column fixing plate 515 and the edge leather claw sliding plate 514 be fixed as one;
其中,所述边皮夹爪滑板514沿着硅棒切割***的X方向左右运动,带动安装在所述边皮夹爪安装柱511上的顶夹爪512-1和底夹爪512-2能够在硅棒切割***的X方向左右运动。Wherein, the edge leather jaw slide plate 514 moves left and right along the X direction of the silicon rod cutting system, driving the top jaw 512-1 and the bottom jaw 512-2 installed on the edge leather jaw mounting column 511 to be able to Move left and right in the X direction of the silicon rod cutting system.
所述边皮夹爪安装柱、边皮夹爪安装柱固定板和边皮夹爪滑板固定为一体,作为一个整体,能够沿着硅棒切割***的X方向左右运动,进而使得安装于同一边皮夹爪安装柱的顶夹爪和底夹爪作为一个整体能够在硅棒切割***的X方向左右运动。这样,边皮夹持机构能够在硅棒切割***的X方向左右运动,以将安装于同一边皮夹爪安装柱的顶夹爪和底夹爪能够在硅棒切割***的X方向靠近待夹持的竖向的边皮。The side leather gripper mounting column, the side leather gripper installation post fixing plate and the side leather gripper slide plate are fixed as one, as a whole, they can move left and right along the X direction of the silicon rod cutting system, so that they can be installed on the same side The top jaw and the bottom jaw of the leather jaw mounting column can move left and right in the X direction of the silicon rod cutting system as a whole. In this way, the side leather clamping mechanism can move left and right in the X direction of the silicon rod cutting system, so that the top jaw and the bottom jaw installed on the same side leather jaw mounting column can approach the X direction of the silicon rod cutting system to be clamped. Hold the vertical side skin.
实施中,如图5A,图5B,图5C和图5D所示,所述边皮夹爪安装柱511为两个,每个所述边皮夹爪安装柱511的正侧安装所述顶夹爪512-1和底夹爪512-2;During implementation, as shown in Fig. 5A, Fig. 5B, Fig. 5C and Fig. 5D, there are two side leather clamp claw mounting columns 511, and the front side of each side leather clamp claw mounting column 511 is installed with the top clip Jaw 512-1 and bottom jaw 512-2;
所述边皮夹爪安装柱固定板515为两个,各自固定一个所述边皮夹爪安装柱511;There are two fixing plates 515 for the mounting column of the edge leather claw, each of which fixes one of the mounting column 511 of the edge leather claw;
所述边皮夹爪滑板514为两个,各自与一个所述边皮夹爪安装柱固定板515固定;There are two side leather claw slide plates 514, each of which is fixed with one of the side leather claw mounting column fixing plates 515;
其中,两个所述边皮夹爪安装柱511的正侧相对设置。Wherein, the front sides of the two leather gripper claw mounting columns 511 are oppositely arranged.
这样,由于两个边皮夹爪安装柱的正侧相对设置,安装在两个边皮夹爪安装柱的顶夹爪和底夹爪之间的距离就能够在硅棒切割***的X方向进行调整。尤其适用于同一个硅棒被切成成方棒时,位置相背的两个边皮的夹持。In this way, since the front sides of the two side leather jaw mounting columns are oppositely arranged, the distance between the top jaw and the bottom jaw installed on the two side leather jaw mounting columns can be adjusted in the X direction of the silicon rod cutting system. Adjustment. It is especially suitable for the clamping of two opposite sides when the same silicon rod is cut into square rods.
实施中,如图5A,图5B,图5C和图5D所示,所述边皮夹持框架51还包括:In practice, as shown in Figure 5A, Figure 5B, Figure 5C and Figure 5D, the edge skin clamping frame 51 also includes:
顶夹爪Z方向导轨516,每个所述边皮夹爪安装柱511具有两个平行设置所述顶夹爪Z方向导轨516;其中,所述顶夹爪Z方向导轨516的导向方向为垂向方向,且与硅棒切割***的Z方向一致;Top jaw Z-direction guide rails 516, each of the side leather jaw mounting columns 511 has two top jaw Z-direction guide rails 516 arranged in parallel; wherein, the guiding direction of the top jaw Z-direction guide rails 516 is vertical direction, and consistent with the Z direction of the silicon rod cutting system;
顶夹爪Z方向滑块,设置在所述顶夹爪512-1的背侧;The Z-direction slider of the top jaw is arranged on the back side of the top jaw 512-1;
顶夹爪Z方向运动气缸,固定在所述边皮夹爪安装柱511处,所述顶夹爪Z方向运动气缸的活塞杆与所述顶夹爪的背侧固定;The Z-direction movement cylinder of the top jaw is fixed at the mounting column 511 of the side leather jaw, and the piston rod of the Z-direction movement cylinder of the top jaw is fixed to the back side of the top jaw;
其中,所述顶夹爪Z方向运动气缸用于推动所述顶夹爪512-1沿所述顶夹爪Z方向导轨在垂向方向即硅棒切割***的Z方向上下运动。Wherein, the cylinder for moving the top jaw in the Z direction is used to push the top jaw 512-1 to move up and down in the vertical direction, ie, the Z direction of the silicon rod cutting system, along the Z-direction rail of the top jaw.
这样,通过顶夹爪Z方向导轨、顶夹爪Z方向滑块和顶夹爪Z方向运动气缸的配合,通过简单的结构就能实现顶夹爪在垂向方向上下运动。In this way, through the cooperation of the Z-direction guide rail of the top jaw, the Z-direction slider of the top jaw and the Z-direction movement cylinder of the top jaw, the vertical movement of the top jaw can be realized through a simple structure.
实施中,所述边皮夹持框架还包括:In implementation, the edge skin clamping frame also includes:
夹爪X方向导轨,所述边皮夹爪背板靠近所述边皮夹爪滑板的板面具有两个平行设置的夹爪X方向导轨;其中,所述夹爪X方向导轨的导向方向与硅棒切割***的X方向一致;The X-direction guide rail of the gripper claw, the back plate of the side leather gripper claw near the plate surface of the side leather gripper claw slide plate has two parallel X-direction gripper jaw guide rails; wherein, the guiding direction of the gripper jaw X-direction guide rail is the same as The X direction of the silicon rod cutting system is consistent;
夹爪X方向滑块,设置在所述边皮夹爪滑板靠近所述边皮夹爪背板的板面;The slider in the X direction of the jaw is arranged on the surface of the side leather jaw slide plate close to the back plate of the side leather jaw;
夹爪X方向运动气缸,固定在所述边皮夹爪背板处,所述夹爪X方向运动气缸的活塞杆与所述边皮夹爪滑板固定;The X-direction movement cylinder of the jaw is fixed at the back plate of the Bianpi gripper, and the piston rod of the X-direction movement cylinder of the gripper is fixed to the slider of the Bianpi gripper;
其中,所述夹爪X方向运动气缸用于推动所述边皮夹爪滑板沿所述夹爪X方向导轨运动,进而带动安装在一个边皮夹爪安装柱固定板的顶夹爪和底夹爪能够相对于另一个边皮夹爪安装柱固定板的顶夹爪和底夹爪在X方向靠近或远离。Wherein, the cylinder for moving the jaws in the X direction is used to push the sliding plate of the side leather jaws to move along the guide rail in the X direction of the jaws, and then drive the top jaw and the bottom jaw installed on the fixed plate of a side leather jaw mounting column The jaws can move closer or farther away in the X direction relative to the top jaw and the bottom jaw of the other side leather jaw mounting column fixing plate.
这样,通过夹爪X方向导轨、夹爪X方向滑块和夹爪X方向运动气缸的配合,通过简单的结构就能实现边皮夹爪安装柱固定板在硅棒切割***的X方向左右运动,进而实现安装在一个边皮夹爪安装柱固定板的顶夹爪和底夹爪能够相对于另一个边皮夹爪安装柱固定板的顶夹爪和底夹爪在硅棒切割***的X方向靠近或远离。In this way, through the cooperation of the guide rail in the X direction of the jaws, the slider in the X direction of the jaws, and the movement cylinder in the X direction of the jaws, the lateral movement of the side leather jaw mounting column fixing plate in the X direction of the silicon rod cutting system can be realized through a simple structure. , so as to realize that the top jaw and the bottom jaw installed on the fixed plate of the claw mounting column of one side skin can be compared with the top jaw and the bottom jaw of the mounting column fixing plate of the other side leather jaw in the X of the silicon rod cutting system direction towards or away from.
具体的,如图5A,图5B,图5C和图5D所示,所述边皮夹爪安装柱固定板515的高度小于所述边皮夹爪安装柱511的高度,所述边皮夹爪背板513的高度小于所述边皮夹爪安装柱511的高度。Specifically, as shown in Fig. 5A, Fig. 5B, Fig. 5C and Fig. 5D, the height of the mounting column fixing plate 515 of the edge leather jaw is smaller than the height of the mounting column 511 of the edge leather jaw, and the height of the edge leather jaw mounting column 511 is The height of the back plate 513 is smaller than the height of the mounting column 511 of the edge leather gripper.
边皮夹爪安装柱固定板的高度需求较高,以适应多种高度的硅棒产生的边皮。为了减重及减少用料,所述边皮夹爪安装柱固定板、边皮夹爪滑板和边皮夹爪背板的高度均小于边皮夹爪安装柱的高度。The height requirement of the mounting column fixing plate for the side skin clamping jaws is relatively high, so as to adapt to the side skins produced by silicon rods of various heights. In order to reduce weight and materials, the heights of the side leather gripper mounting column fixing plate, side leather gripper sliding plate and side leather gripper back plate are all smaller than the height of the side leather gripper installation column.
具体的,如图5A,图5B,图5C和图5D所示,所述边皮夹爪安装柱固定板515固定在所述边皮夹爪安装柱511的中间位置,且所述边皮夹爪安装柱固定板515在Z方向的长度与所述边皮夹爪安装柱511的高度的比值大于等于三分之一小于三分之二。Specifically, as shown in Fig. 5A, Fig. 5B, Fig. 5C and Fig. 5D, the fixed plate 515 of the mounting column of the side leather gripper is fixed at the middle position of the mounting post 511 of the side leather gripper, and the side wallet The ratio of the length of the claw mounting column fixing plate 515 in the Z direction to the height of the edge leather clamping claw mounting column 511 is greater than or equal to one-third and less than two-thirds.
这样,边皮夹爪安装柱固定板对边皮夹爪安装柱施加力的位置在边皮夹爪安装柱高度的中间位置,使得在边皮夹持机构夹持多种高度的硅棒产生的边皮时,都较为稳固,且边皮夹爪安装柱固定板不易损坏变形。In this way, the position where the edge leather clamp claw mounting column fixed plate exerts force on the edge leather clamp claw mounting column is at the middle position of the height of the edge leather clamp claw mounting column, so that the silicon rods of various heights clamped by the edge leather clamping mechanism produce When the side skin is used, it is relatively stable, and the mounting column fixing plate of the side skin jaw is not easy to be damaged and deformed.
具体的,所述边皮夹爪安装柱固定板与所述边皮夹爪安装柱、所述边皮夹爪滑板之间的固定为可拆卸连接。Specifically, the fixing plate of the mounting column of the edge leather gripper, the mounting column of the edge leather gripper claw, and the sliding plate of the edge leather gripper claw are detachably connected.
边皮夹爪安装柱、边皮夹爪安装柱固定板和边皮夹爪滑板,采用三个部件,通过可拆卸连接的方式进行固定,对制造精度的要求较低。同时,任一部件发生损坏时,如承受较大Z方向向下的作用力的边皮夹爪安装柱固定板发生损坏时,只需要更换损坏的部件即可。The Bian leather gripper mounting column, the Bian leather gripper mounting post fixing plate and the Bian leather gripper sliding plate are three parts, which are fixed by detachable connection, and the requirements for manufacturing precision are relatively low. At the same time, when any part is damaged, such as when the mounting column fixing plate of the side leather gripper that bears a large downward force in the Z direction is damaged, only the damaged part needs to be replaced.
实施中,所述边皮夹持机构还包括:In practice, the edge skin clamping mechanism also includes:
夹持框架运动组件,与所述边皮夹爪背板固定且安装在所述硅棒切割***的机座之上,硅棒切割***的Y方向与硅棒切割***的X方向和Z方向相垂直;The clamping frame movement assembly is fixed to the back plate of the edge leather gripper and installed on the base of the silicon rod cutting system, and the Y direction of the silicon rod cutting system is the same as the X direction and Z direction of the silicon rod cutting system. vertical;
其中,所述夹持框架运动组件用于带动所述夹持框架在硅棒切割***的X方向、Y方向和Z方向三个方向直线往复运动。Wherein, the clamping frame moving component is used to drive the clamping frame to linearly reciprocate in three directions of X direction, Y direction and Z direction of the silicon rod cutting system.
实施中,如图5C所示,所述夹持框架运动组件包括:In implementation, as shown in Figure 5C, the clamping frame movement assembly includes:
夹持框架X方向导轨521-1,用于固定在硅棒切割***的机座的上表面;其中,夹持框架X方向导轨的导向方向与硅棒切割***的X方向一致;The X-direction guide rail 521-1 of the clamping frame is used to be fixed on the upper surface of the machine base of the silicon rod cutting system; wherein, the guiding direction of the X-direction guide rail of the clamping frame is consistent with the X direction of the silicon rod cutting system;
夹持框架X方向安装座521-2;Clamping frame X direction mounting seat 521-2;
夹持框架X方向运动滑块,固定在所述夹持框架X方向安装座的外底部,所述夹持框架X方向运动滑块和夹持框架X方向运动导轨配合;The X-direction movement slider of the clamping frame is fixed on the outer bottom of the X-direction mounting seat of the clamping frame, and the X-direction movement slider of the clamping frame cooperates with the X-direction movement guide rail of the clamping frame;
所述夹持框架X方向安装座能够沿所述夹持框架X方向导轨在硅棒切割***的X方向运动,带动所述夹持框架能够沿硅棒切割***的X方向运动。The X-direction mounting seat of the clamping frame can move along the X-direction guide rail of the clamping frame in the X-direction of the silicon rod cutting system, and drives the clamping frame to move in the X-direction of the silicon rod cutting system.
实施中,如图5C所示,所述夹持框架运动组件还包括:In implementation, as shown in Figure 5C, the clamping frame movement assembly further includes:
夹持框架Y方向安装座522;Clamping frame Y-direction mounting seat 522;
相互啮合的夹持框架Y方向齿条和夹持框架Y方向齿轮,所述夹持框架Y方向齿条固定在所述夹持框架X方向安装座的上表面;其中,所述夹持框架Y方向齿条的导向方向与硅棒切割***的Y方向一致,所述夹持框架Y方向齿轮固定在所述夹持框架Y方向安装座的外底部。The clamping frame Y-direction rack and the clamping frame Y-direction gear that mesh with each other, the clamping frame Y-direction rack is fixed on the upper surface of the clamping frame X-direction mounting seat; wherein, the clamping frame Y The guiding direction of the direction rack is consistent with the Y direction of the silicon rod cutting system, and the Y direction gear of the clamping frame is fixed on the outer bottom of the Y direction mounting seat of the clamping frame.
实施中,如图5C所示,所述夹持框架运动组件还包括:In implementation, as shown in Figure 5C, the clamping frame movement assembly further includes:
夹持框架Z方向安装座523;Clamping frame Z-direction mounting seat 523;
夹持框架Z方向导轨丝杠,所述夹持框架Z方向导轨丝杠的丝母固定在所述夹持框架Y方向安装座的上表面;其中,所述夹持框架Z方向导轨丝杠的导轨的导向方向为垂向方向且与硅棒切割***的Z方向一致,所述夹持框架Z方向导轨丝杠的滑块固定在所述边皮夹爪背板处;The clamping frame Z-direction guide rail screw, the screw nut of the clamping frame Z-direction guide rail screw is fixed on the upper surface of the clamping frame Y-direction mounting seat; wherein, the clamping frame Z-direction guide rail screw The guiding direction of the guide rail is the vertical direction and is consistent with the Z direction of the silicon rod cutting system, and the slider of the Z-direction guide rail lead screw of the clamping frame is fixed at the back plate of the edge leather gripper;
其中,所述夹持框架Z方向导轨丝杠用于将接收到的旋转运动转化为沿所述夹持框架Z方向导轨丝杠的导轨的直线运动,并通过所述夹持框架Z方向导轨丝杠的滑块输出直线运动。Wherein, the Z-direction guide rail screw of the clamping frame is used to convert the received rotational motion into a linear motion along the guide rail of the Z-direction guide rail screw of the clamping frame, and through the Z-direction guide rail screw of the clamping frame The slider of the bar outputs linear motion.
具体的,夹持框架Z方向导轨丝杠由电机进行驱动。Specifically, the guide rail lead screw in the Z direction of the clamping frame is driven by a motor.
边皮收集机构53的结构The structure of edge collection mechanism 53
实施中,如图5E所示,边皮收集机构53包括:In practice, as shown in Figure 5E, the skin collection mechanism 53 includes:
收集底架531;collection chassis 531;
两组边皮盒,每组边皮盒具有至少一个边皮盒532,一个所述边皮盒作为一个所述收集区域;Two groups of leather boxes, each group of leather boxes has at least one leather box 532, and one of the leather boxes is used as a collection area;
用于带动两个所述边皮盒532同步反向运动的边皮盒同步反向运动组件,所述边皮盒同步反向运动组件固定在所述收集底架531之上,两组边皮盒532与所述边皮盒同步反向运动组件固定。A leather box synchronous reverse movement assembly for driving the two leather boxes 532 to move synchronously and reversely. The leather box synchronously reverse movement assembly is fixed on the collection chassis 531. The box 532 is fixed with the synchronous reverse movement assembly of the leather box.
边皮盒同步反向运动组件使得两组边皮盒能够实现同步反向切换,操作方便;同时也避免两组边皮盒位于同一侧,对放置边皮造成干扰。The synchronous reverse movement component of the side leather boxes enables the two sets of side leather boxes to realize synchronous reverse switching, which is convenient to operate; at the same time, it also prevents the two sets of side leather boxes from being located on the same side, causing interference to the placement of the side leather boxes.
实施中,如图5E所示,所述边皮盒同步反向运动组件包括:In implementation, as shown in Figure 5E, the leather box synchronous reverse movement assembly includes:
两个边皮盒导轨533-1,间隔平行固定在所述收集底架531的上表面;Two side leather box guide rails 533-1 are fixed on the upper surface of the collection chassis 531 in parallel at intervals;
两个边皮盒滑块533-2,分别设置在两组边皮盒532的外底部,所述边皮盒滑块533-2和所述边皮盒导轨533-1滑动配合;Two leather box sliders 533-2 are respectively arranged on the outer bottoms of two groups of leather boxes 532, and the leather box sliders 533-2 and the leather box guide rails 533-1 are slidingly matched;
其中,每组边皮盒为两个或两个以上时,每组边皮盒的各个边皮盒沿所述边皮盒导轨的长度方向间隔设置。Wherein, when there are two or more leather boxes in each group, the leather boxes in each group of leather boxes are arranged at intervals along the length direction of the leather box guide rail.
实施中,如图5E所示,所述边皮盒同步反向运动组件还包括:In implementation, as shown in Figure 5E, the leather box synchronous reverse movement assembly also includes:
边皮盒滑动用气缸533-3,固定在所述收集底架531处,所述边皮盒滑动用气缸533-3的活塞杆与第一组边皮盒的外底部固定;第一组边皮盒是与边皮盒滑动用气缸533-3的活塞杆固定的一组边皮盒,第二组边皮盒是未与边皮盒滑动用气缸533-3的活塞杆固定的一组边皮盒;The cylinder 533-3 for sliding the leather box is fixed on the collection bottom frame 531, and the piston rod of the cylinder 533-3 for sliding the leather box is fixed to the outer bottom of the first group of leather boxes; The leather box is a group of side leather boxes that are fixed with the piston rod of the cylinder 533-3 for sliding the side leather box, and the second group of side leather boxes is a group of sides that are not fixed with the piston rod of the cylinder 533-3 for sliding the side leather box Leather box;
同步轮533-4,固定在所述收集底架531的上表面且位于两组边皮盒532之间的位置;The synchronous wheel 533-4 is fixed on the upper surface of the collection chassis 531 and is located between the two groups of edge boxes 532;
同步带533-5,所述同步带533-5绕过所述同步轮533-4且所述同步带533-5的两端分别与两组边皮盒532固定;其中,所述边皮盒滑动用气缸533-3用于推动第一组边皮盒沿所述边皮盒导轨533-1往复直线运动,进而带动第二组边皮盒进行反方向的往复直线运动。Synchronous belt 533-5, the synchronous belt 533-5 bypasses the synchronous wheel 533-4 and the two ends of the synchronous belt 533-5 are respectively fixed with two sets of side leather boxes 532; wherein, the side leather boxes The sliding cylinder 533-3 is used to push the first group of leather boxes to reciprocate and linearly move along the leather box guide rail 533-1, and then drive the second group of leather boxes to reciprocate and linearly move in the opposite direction.
实施中,如图5E所示,每个所述边皮盒532具有四个边皮收纳位置,四个所述边皮收纳位置分两排设置,且两排边皮收纳位置沿所述边皮盒导轨的导向方向紧邻设置。During implementation, as shown in FIG. 5E , each of the edge leather boxes 532 has four edge skin storage positions, and the four edge skin storage positions are arranged in two rows, and the two rows of edge skin storage positions are arranged along the edge of the edge skin. The guiding direction of the cassette rails is provided next to each other.
实施中,如图5E所示,两个所述边皮盒导轨的一端设置为待边皮位;In implementation, as shown in Figure 5E, one end of the two edge leather box guide rails is set as the edge leather position;
所述边皮收集机构还包括:The skin collection mechanism also includes:
光电支架534-1,与所述收集底架531固定;The photoelectric support 534-1 is fixed with the collection bottom frame 531;
两对收纳位置对射光电模块534-2,分两排设置;每对收纳位置对射光电模块534-2相对固定在所述光电支架上,两对所述收纳位置对射光电模块534-2用于检测位于待边皮位的边皮盒边皮收纳位置是否放置了边皮。Two pairs of storage position facing photoelectric modules 534-2 are arranged in two rows; each pair of storage position facing photoelectric modules 534-2 is relatively fixed on the photoelectric bracket, and two pairs of storage position facing photoelectric modules 534-2 It is used to detect whether the edge skin is placed in the edge skin storage position of the edge leather box at the position to be edged.
具体的,同一所述边皮盒的四个边皮收纳位置用于承载同一个硅棒被切成方棒后被切掉的四条边皮,以便对来自同一硅棒的四条边皮进行编码。Specifically, the four strip storage positions of the same strip box are used to carry the four strips cut off from the same silicon rod after being cut into square bars, so as to encode the four strips from the same silicon rod.

Claims (10)

  1. 一种硅棒切割***的切割装置,其特征在于,包括切割机头机构和具有自学习功能的线锯控制单元,所述切割机头机构包括:A cutting device of a silicon rod cutting system is characterized in that it includes a cutting head mechanism and a wire saw control unit with a self-learning function, and the cutting head mechanism includes:
    线锯组件,所述线锯组件具有金刚线,所述金刚线的切割段用于自上而下对竖向设置的硅棒进行切割;A wire saw assembly, the wire saw assembly has a diamond wire, and the cutting section of the diamond wire is used to cut the vertically arranged silicon rod from top to bottom;
    检测组件,与所述线锯组件连接,所述检测组件用于对每次切割完成后形成的实际切割曲面进行检测,得到实际切割曲面的形状;其中,切割完成后形成的实际切割曲面是硅棒被切割后且边皮被取走后的实际切割曲面;The detection component is connected with the wire saw component, and the detection component is used to detect the actual cutting surface formed after each cutting to obtain the shape of the actual cutting surface; wherein, the actual cutting surface formed after the cutting is silicon The actual cut surface after the rod has been cut and the skin has been removed;
    线锯控制单元,与检测组件连接;所述线锯控制单元用于:The wire saw control unit is connected with the detection component; the wire saw control unit is used for:
    根据上次切割的实际切割曲面的弯曲方向和弯曲程度,在下次切割过程中对切割段的切割位置进行动态调整。According to the bending direction and bending degree of the actual cutting surface of the last cutting, the cutting position of the cutting section is dynamically adjusted during the next cutting process.
  2. 根据权利要求1所述的切割装置,其特征在于,所述动态调整包括:The cutting device according to claim 1, wherein the dynamic adjustment comprises:
    所述切割段调整的方向与上次的实际切割曲面的弯曲方向相反;The direction of adjustment of the cutting section is opposite to the bending direction of the actual cutting surface last time;
    所述切割段切割位置的调整的程度为上次的实际切割曲面的弯曲程度与理论切割曲面的弯曲程度之间的差值。The degree of adjustment of the cutting position of the cutting segment is the difference between the curvature degree of the actual cutting surface and the curvature degree of the theoretical cutting surface last time.
  3. 根据权利要求2所述的切割装置,其特征在于,所述切割段为两个且平行设置,两个所述切割段分别为左切割段和右切割段,两个切割段切割形成的实际切割曲面依次为左实际切割曲面和右实际切割曲面;The cutting device according to claim 2, characterized in that, there are two cutting segments arranged in parallel, the two cutting segments are respectively a left cutting segment and a right cutting segment, and the actual cutting formed by the two cutting segments The surfaces are the left actual cutting surface and the right actual cutting surface in turn;
    所述动态调整具体包括:The dynamic adjustment specifically includes:
    所述左切割段调整的方向与上次的左实际切割曲面的弯曲方向相反;The adjustment direction of the left cutting segment is opposite to the bending direction of the last actual left cutting surface;
    所述左切割段切割位置的调整的程度为上次的左实际切割曲面的弯曲程度与理论切割曲面的弯曲程度之间的差值;The degree of adjustment of the cutting position of the left cutting section is the difference between the degree of curvature of the actual left cutting surface and the degree of curvature of the theoretical cutting surface;
    所述右切割段调整的方向与上次的右实际切割曲面的弯曲方向相反;The adjustment direction of the right cutting segment is opposite to the bending direction of the last actual right cutting curved surface;
    所述右切割段切割位置的调整的程度为上次的右实际切割曲面的弯曲程度与理论切割曲面的弯曲程度的差值。The adjustment degree of the cutting position of the right cutting segment is the difference between the curvature degree of the right actual cutting surface and the curvature degree of the theoretical cutting surface last time.
  4. 根据权利要求3所述的切割装置,其特征在于,所述线锯组件包括:The cutting device of claim 3, wherein the wire saw assembly comprises:
    线锯安装架;Wire saw mounting bracket;
    所述金刚线,设置在所述线锯安装架的正侧;所述检测组件位于所述切割段之下;The diamond wire is arranged on the front side of the wire saw installation frame; the detection component is located under the cutting section;
    所述检测组件具体用于在每次切割完成后所述切割机头机构自下而上退线的过程中,对硅棒被切割且取走边皮形成的实际切割曲面进行检测,得到实际切割曲面的形状。The detection component is specifically used to detect the actual cutting surface formed by cutting the silicon rod and removing the edge skin during the process of the cutting head mechanism retreating from bottom to top after each cutting is completed, so as to obtain the actual cutting surface shape.
  5. 根据权利要求4所述的切割装置,其特征在于,所述线锯安装架具有竖向的机头通孔,所述金刚线的切割段和机头通孔互不干涉,且所述切割段低于所述机头通孔;The cutting device according to claim 4, wherein the wire saw installation frame has a vertical head through hole, the cutting section of the diamond wire and the head through hole do not interfere with each other, and the cutting section lower than the nose through hole;
    其中,所述机头通孔用于硅棒被切割形成的边皮取出。Wherein, the head through hole is used to take out the edge formed by cutting the silicon rod.
  6. 根据权利要求4所述的切割装置,其特征在于,还包括硅棒夹头机构,所述硅棒夹头机构包括:The cutting device according to claim 4, further comprising a silicon rod chuck mechanism, the silicon rod chuck mechanism comprising:
    夹头架;Chuck rack;
    上浮动头,安装在所述夹头架处;所述夹头架能够上下运动且所述上浮动头用于压在竖向放置的硅棒的上端面;The upper floating head is installed at the chuck frame; the chuck frame can move up and down and the upper floating head is used to press on the upper end surface of the vertically placed silicon rod;
    扶边皮支架,与所述夹头架连接且能够向下伸出及向上复位,所述扶边皮支架用于向下伸出且扶在硅棒的外周面,所述扶边皮支架还用于向上复位离开硅棒的外周面;The supporting edge leather support is connected with the chuck frame and can extend downwards and reset upwards. The supporting edge leather support is used to extend downwards and support the outer peripheral surface of the silicon rod. The supporting edge leather support is also Used to reset upwards away from the outer peripheral surface of the silicon rod;
    夹头架竖向运动组件,所述夹头架与所述夹头架竖向运动组件连接,所述夹头架竖向运动组件用于带动所述夹头架垂向方向上下运动,以带动上浮动头压在竖向放置的硅棒的上端面和离开被切割后的硅棒的上端面。The vertical movement assembly of the collet frame, the collet frame is connected with the vertical movement assembly of the collet frame, and the vertical movement assembly of the collet frame is used to drive the collet frame to move up and down in the vertical direction to drive The upper floating head presses on the upper end surface of the vertically placed silicon rod and leaves the upper end surface of the cut silicon rod.
  7. 根据权利要求5所述的切割装置,其特征在于,所述切割机头机构还包括硅棒支撑机构,所述硅棒支撑机构包括:The cutting device according to claim 5, wherein the cutting head mechanism further comprises a silicon rod support mechanism, and the silicon rod support mechanism comprises:
    硅棒支撑安装座;Silicon rod support mount;
    用于支撑竖向硅棒下端面的下浮动头,所述下浮动头安装在所述硅棒支撑安装座的上方;A lower floating head for supporting the lower end surface of the vertical silicon rod, the lower floating head is installed above the silicon rod support mounting seat;
    边皮支撑组件,所述边皮支撑组件包括:The edge skin support assembly, the edge skin support assembly includes:
    边皮支撑用驱动装置,固定在所述硅棒支撑安装座之上且与所述下浮动头间隔设置;The driving device for edge support is fixed on the silicon rod support mounting seat and is spaced apart from the lower floating head;
    用于支撑硅棒下端面中被切割后形成边皮位置的边皮支撑头,所述边皮支撑头固定在所述边皮支撑用驱动装置的顶端;其中,所述边皮支撑用驱动装置用于在硅棒被切割成方棒和边皮时,锁紧以使得所述边皮支撑头保持高度,对边皮进行支撑。Used to support the edge skin support head that is cut to form the edge skin position in the lower end surface of the silicon rod, and the edge skin support head is fixed on the top of the edge skin support driving device; wherein, the edge skin support driving device When the silicon rod is cut into a square rod and a side skin, it is locked so that the side skin support head maintains a height to support the side skin.
  8. 一种硅棒切割***,其特征在于,包括:A silicon rod cutting system is characterized in that it comprises:
    权利要求1至7任一所述的切割装置,所述切割装置用于对硅棒进行切割形成边皮;The cutting device according to any one of claims 1 to 7, which is used for cutting silicon rods to form edges;
    边皮夹持机构;Edge clamping mechanism;
    边皮收集机构,所述边皮收集机构具有收集区域,所述收集区域与硅棒切割***的切割工位一一对应;An edge skin collection mechanism, the edge skin collection mechanism has a collection area, and the collection area corresponds to the cutting stations of the silicon rod cutting system one by one;
    收集控制单元,用于控制所述边皮夹持机构夹持住边皮,并运送放置在所述边皮收集机构内,且切割同一硅棒产生的边皮被置于同一收集区域。The collection control unit is used to control the scrap clamping mechanism to clamp the scrap, transport and place it in the scrap collection mechanism, and the scrap produced by cutting the same silicon rod is placed in the same collection area.
  9. 根据权利要求8所述的硅棒切割***,其特征在于,所述边皮夹持机构包括边皮夹持框架,所述边皮夹持框架包括:The silicon rod cutting system according to claim 8, wherein the edge strip clamping mechanism comprises an edge strip clamping frame, and the edge strip clamping frame comprises:
    边皮夹爪安装柱;Side skin gripper mounting column;
    顶夹爪和底夹爪,安装于所述边皮夹爪安装柱的正侧且上下相对设置;The top jaw and the bottom jaw are installed on the front side of the mounting column of the edge leather jaw and are arranged opposite to each other up and down;
    其中,所述顶夹爪和所述底夹爪中至少有一个与所述边皮夹爪安装柱之间的连接为滑动连接且能够沿着垂向方向上下运动,所述边皮夹爪安装柱安装顶夹爪和所述底夹爪的一侧为边皮夹爪安装柱的正侧。Wherein, the connection between at least one of the top jaw and the bottom jaw and the side leather jaw mounting column is a sliding connection and can move up and down along the vertical direction, and the side leather jaw is installed The side where the top jaw and the bottom jaw are installed on the column is the positive side where the side leather jaw is installed on the column.
  10. 根据权利要求9所述的硅棒切割***,其特征在于,所述底夹爪固定在所述边皮夹爪安装柱的底端;The silicon rod cutting system according to claim 9, wherein the bottom jaw is fixed on the bottom end of the side leather jaw mounting column;
    所述顶夹爪与所述边皮夹爪安装柱之间的连接为滑动连接且所述顶夹爪能够沿着垂向方向上下运动。The connection between the top jaw and the mounting column of the edge leather jaw is a sliding connection, and the top jaw can move up and down along the vertical direction.
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