WO2022137844A1 - 放射線検出器、放射線検出器の製造方法、及びシンチレータパネルユニット - Google Patents
放射線検出器、放射線検出器の製造方法、及びシンチレータパネルユニット Download PDFInfo
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- WO2022137844A1 WO2022137844A1 PCT/JP2021/040995 JP2021040995W WO2022137844A1 WO 2022137844 A1 WO2022137844 A1 WO 2022137844A1 JP 2021040995 W JP2021040995 W JP 2021040995W WO 2022137844 A1 WO2022137844 A1 WO 2022137844A1
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- scintillator panel
- scintillator
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- substrate
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Classifications
-
- G—PHYSICS
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- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
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- G01T1/16—Measuring radiation intensity
- G01T1/20—Measuring radiation intensity with scintillation detectors
- G01T1/202—Measuring radiation intensity with scintillation detectors the detector being a crystal
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/24—Measuring radiation intensity with semiconductor detectors
- G01T1/241—Electrode arrangements, e.g. continuous or parallel strips or the like
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
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- G01T1/16—Measuring radiation intensity
- G01T1/20—Measuring radiation intensity with scintillation detectors
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Definitions
- a radiation detector comprising a sensor panel having a light receiving surface and a scintillator panel arranged on the light receiving surface, wherein the scintillator layer is composed of a plurality of columnar crystals in the scintillator panel, and the surface of the scintillator panel on the sensor panel side. It is known that the angle formed with the side surface of the scintillator panel exceeds 90 degrees (see, for example, Patent Document 1).
- the area of the radiation detection area is required to be increased as the area of the sensor panel is increased.
- the scintillator layer is composed of a plurality of columnar crystals in the scintillator panel, although it is easy to acquire a high-resolution radiation image, the shape of the scintillator panel is not taken into consideration and the area of the radiation detection area is increased. It is difficult to increase the area of the scintillator panel.
- the present disclosure provides a radiation detector capable of achieving both a large area of a radiation detection region and a high resolution of a radiation image, a method for manufacturing such a radiation detector, and a scintillator panel unit suitable for them.
- the purpose is to do.
- the first scintillator panel has a second scintillator layer containing a plurality of columnar crystals formed in, and the first scintillator panel is placed on the light receiving surface with the first scintillator layer located on the light receiving surface side with respect to the first substrate.
- the second scintillator panel is arranged on the light receiving surface in a state where the second scintillator layer is located on the light receiving surface side with respect to the second substrate, and the second scintillator panel is arranged when viewed from the first scintillator layer side.
- the outer edge of the first substrate includes a first portion extending along the second scintillator panel, the first scintillator layer reaches at least the first portion, and the second substrate when viewed from the second scintillator layer side.
- the outer edge of the scintillator includes a second portion extending along the first scintillator panel, the second scintillator layer reaches at least the second portion, and the surface of the first scintillator panel on the sensor panel side and the first scintillator panel.
- the first scintillator panel and the second scintillator panel are arranged on the light receiving surface of the sensor panel in a state of being adjacent to each other along the light receiving surface of the sensor panel.
- the first scintillator layer reaches the first portion of the outer edge of the first substrate extending along the second scintillator panel, and the second scintillator layer is the second. Of the outer edge of the substrate, it reaches a second portion extending along the first scintillator panel.
- the first substrate and the second substrate may each have flexibility. According to this, it is possible to improve workability when each of the first scintillator panel and the second scintillator panel is adhered to the light receiving surface of the sensor panel.
- the first angle and the second angle are each less than 90 degrees, and the sensor panel may have flexibility. According to this, the entire radiation detector can be bent according to the installation environment of the radiation detector and the like. Further, when the entire radiation detector is bent so that the sensor panel is on the outside with respect to the first scintillator panel and the second scintillator panel, the first scintillator panel and the second scintillator panel physically interfere with each other. Can be prevented.
- the radiation detector on one aspect of the present disclosure further comprises an adhesive layer arranged between the light receiving surface and the first scintillator panel and between the light receiving surface and the second scintillator panel, and further includes a first scintillator panel and a second scintillator.
- Each of the panels may be adhered to the light receiving surface by an adhesive layer. According to this, each of the first scintillator panel and the second scintillator panel can be reliably arranged on the light receiving surface of the sensor panel.
- the adhesive layer may contain an adhesive or an adhesive. According to this, each of the first scintillator panel and the second scintillator panel can be surely adhered to the light receiving surface of the sensor panel.
- the first scintillator panel further has a first protective layer covering the first substrate and the first scintillator layer
- the second scintillator panel includes the second substrate and the second scintillator layer.
- a second protective layer may be further provided to cover the surface. According to this, it is possible to more reliably protect a plurality of columnar crystals having deliquescent properties.
- the radiation detector on one aspect of the present disclosure further comprises a moisture-proof layer arranged on the first scintillator panel and the second scintillator panel on the opposite side of the sensor panel, and the moisture-proof layer includes the first scintillator panel and the second scintillator. It may be continuous across the panels. According to this, it is possible to prevent water from entering the joint portion between the first scintillator panel and the second scintillator panel, and it is possible to reliably protect a plurality of columnar crystals having deliquescent properties.
- the radiation detector on one aspect of the present disclosure further comprises a sealing member, the outer edge of the moisture-proof layer reaches the surface of the sensor panel around the light-receiving surface, and the sealing member is defined by the sensor panel and the moisture-proof layer.
- the outer edge of the moisture-proof layer may be sealed on the surface of the sensor panel in a state where the pressure is reduced. According to this, the moisture-proof layer can be brought into close contact with the first scintillator panel and the second scintillator panel without using the adhesive layer.
- the radiation detector on one side of the present disclosure has a first moisture-proof layer arranged on the first scintillator panel on the opposite side of the sensor panel and a second scintillator panel arranged on the second scintillator panel on the opposite side of the sensor panel.
- the moisture-proof layer, a first protective layer covering the first scintillator panel and the first moisture-proof layer, and a second protective layer covering the second scintillator panel and the second moisture-proof layer may be further provided. According to this, it is possible to protect a plurality of columnar crystals having deliquescent properties.
- the method for manufacturing a radiation detector according to one aspect of the present disclosure is the above-mentioned method for manufacturing a radiation detector, which includes a step of preparing a sensor panel, a step of preparing a first scintillator panel and a second scintillator panel, and a light receiving light.
- a step of preparing a sensor panel a step of preparing a first scintillator panel and a second scintillator panel
- a light receiving light In the step of arranging each of the first scintillator panel and the second scintillator panel on the surface, and in the step of preparing the first scintillator panel and the second scintillator panel, the surface of the first scintillator panel on the sensor panel side.
- the above-mentioned radiation detector can be easily and surely obtained.
- the scintillator panel unit on one side of the present disclosure includes a support layer and a first scintillator panel and a second scintillator panel arranged on the support layer in a state of being adjacent to each other along the support layer, and the first scintillator panel.
- the first scintillator panel, the second scintillator panel, and the support layer can be handled in an integrated state.
- the support layer is an adhesive layer
- the first scintillator panel is placed on the adhesive layer with the first scintillator layer located on the adhesive layer side with respect to the first substrate.
- the second scintillator panel is arranged on the adhesive layer with the second scintillator layer located on the adhesive layer side with respect to the second substrate, and the adhesive layer is the first scintillator panel and the first scintillator panel. It may be continuous over two scintillator panels. According to this, the first scintillator panel, the second scintillator panel, and the adhesive layer can be handled in a state where they are integrated.
- the support layer is a moisture-proof layer
- the first scintillator panel is placed on the moisture-proof layer with the first substrate located on the moisture-proof layer side with respect to the first scintillator layer.
- the second scintillator panel is arranged on the moisture-proof layer with the second substrate located on the moisture-proof layer side with respect to the second scintillator layer, and the moisture-proof layer is the first scintillator panel and the first scintillator panel. 2 It may be continuous over the scintillator panel. According to this, the first scintillator panel, the second scintillator panel, and the moisture-proof layer can be handled in a state where they are integrated.
- a radiation detector capable of achieving both a large area of a radiation detection region and a high resolution of a radiation image, a method for manufacturing such a radiation detector, and a scintillator panel unit suitable for them. Can be provided.
- FIG. 1 is a cross-sectional view of the radiation detector of one embodiment.
- FIG. 2 is a cross-sectional view of the scintillator panel unit of one embodiment.
- FIG. 3 is a cross-sectional view of the radiation detector in one step of the method for manufacturing the radiation detector of one embodiment.
- FIG. 4 is a cross-sectional view of the radiation detector of the modified example.
- FIG. 5 is a cross-sectional view of a part of the radiation detector of the modified example.
- FIG. 6 is a cross-sectional view of the scintillator panel unit of the modified example.
- FIG. 7 is a cross-sectional view of the radiation detector of the modified example.
- FIG. 8 is a cross-sectional view of the radiation detector of the modified example.
- FIG. 9 is a cross-sectional view of the scintillator panel unit of the modified example.
- FIG. 10 is a cross-sectional view of the scintillator panel unit of the modified example.
- the first scintillator panel 10 and the second scintillator panel 20 are arranged on the light receiving surface 2a in a state of being adjacent to each other along the light receiving surface 2a.
- the first scintillator panel 10 has a first substrate 11, a first scintillator layer 12, and a first protective layer 13.
- the second scintillator panel 20 has a second substrate 21, a second scintillator layer 22, and a second protective layer 23.
- the first scintillator layer 12 contains a plurality of columnar crystals formed on the first substrate 11.
- the second scintillator layer 22 contains a plurality of columnar crystals formed on the second substrate 21.
- the plurality of columnar crystals are formed on the first substrate 11 or the second substrate 21 by, for example, depositing a scintillator material on the first substrate 11 or the second substrate 21.
- the materials of the first scintillator layer 12 and the second scintillator layer 22 are, for example, CsI: Tl (cesium iodide containing tallium as an activator), CsI: Na (cesium iodide containing sodium as an activator), CsI.
- each of the first scintillator layer 12 and the second scintillator layer 22 is, for example, 100 ⁇ m or more and 1000 ⁇ m or less (preferably 400 ⁇ m or more and 800 ⁇ m or less).
- the first protective layer 13 covers the first substrate 11 and the first scintillator layer 12.
- the second protective layer 23 covers the second substrate 21 and the second scintillator layer 22.
- the respective materials of the first protective layer 13 and the second protective layer 23 are, for example, parylene (polyparaxylene).
- the thickness of each of the first protective layer 13 and the second protective layer 23 is, for example, 0.5 ⁇ m or more and 20 ⁇ m or less.
- the first scintillator panel 10 is arranged on the light receiving surface 2a with the first scintillator layer 12 located on the light receiving surface 2a side with respect to the first substrate 11.
- the first scintillator panel 10 has a rectangular shape having a side length of 300 mm or more when viewed from the thickness direction of the first substrate 11.
- the second scintillator panel 20 is arranged on the light receiving surface 2a with the second scintillator layer 22 located on the light receiving surface 2a side with respect to the second substrate 21.
- the second scintillator panel 20 has a rectangular shape having a side length of 300 mm or more when viewed from the thickness direction of the second substrate 21.
- the first substrate 11 and the first scintillator layer 12 are formed after the scintillator layer including the portions corresponding to the plurality of first scintillator layers 12 is formed on the substrate including the portions corresponding to the plurality of first substrates 11. , The substrate and the scintillator layer were cut to obtain the product.
- the second substrate 21 and the second scintillator layer 22 are the same after the scintillator layer including the portions corresponding to the plurality of second scintillator layers 22 is formed on the substrate including the portions corresponding to the plurality of second substrates 21. It was obtained by cutting the substrate and the scintillator layer.
- the first substrate 11 and the first scintillator layer 12 are the same after the scintillator layer including the portion corresponding to one first scintillator layer 12 is formed on the substrate including the portion corresponding to one first substrate 11. It may be obtained by cutting out the substrate and the scintillator layer.
- the second substrate 21 and the second scintillator layer 22 are said after the scintillator layer including the portion corresponding to one second scintillator layer 22 is formed on the substrate including the portion corresponding to one second substrate 21. It may be obtained by cutting out the substrate and the scintillator layer.
- ⁇ 1 is 45 degrees or more and less than 90 degrees.
- the surface 10a and the entire side surface of the first scintillator panel 10 form an angle of 45 degrees or more and less than 90 degrees.
- the adhesive layer 3 is arranged between the light receiving surface 2a and the first scintillator panel 10 and between the light receiving surface 2a and the second scintillator panel 20.
- the first scintillator panel 10 is adhered to the light receiving surface 2a by the adhesive layer 3 in a state where the first scintillator layer 12 is located on the light receiving surface 2a side with respect to the first substrate 11.
- the second scintillator panel 20 is adhered to the light receiving surface 2a by the adhesive layer 3 in a state where the second scintillator layer 22 is located on the light receiving surface 2a side with respect to the second substrate 21.
- the adhesive layer 3 is continuous over the first scintillator panel 10 and the second scintillator panel 20. That is, the adhesive layer 3 is not separated for each of the first scintillator panel 10 and the second scintillator panel 20, but is integrally formed.
- the adhesive layer 3 is an adhesive or an adhesive.
- Adhesive means one that does not cure after adhesion.
- Adhesive means one that cures after adhesion.
- the material of the adhesive layer 3 is, for example, a light-transmitting organic material (for example, OCA (Optical Clear Adhesive)).
- the thickness of the adhesive layer 3 is, for example, 0.1 ⁇ m or more and 100 ⁇ m or less (preferably 25 ⁇ m or less).
- the granular phosphor 4 is arranged between the first scintillator panel 10 and the second scintillator panel 20. More specifically, the granular phosphor 4 is arranged in a groove having a V-shaped cross section formed by the side surface 10b of the first scintillator panel 10 and the side surface 20b of the second scintillator panel 20.
- the material of the granular phosphor 4 is, for example, GOS (gadolinium acid sulfide).
- the moisture-proof layer 5 covers the first scintillator panel 10 and the second scintillator panel 20 on the sensor panel 2.
- the moisture-proof layer 5 is arranged on the first scintillator panel 10 and the second scintillator panel 20 on the side opposite to the sensor panel 2, and is continuous over the first scintillator panel 10 and the second scintillator panel 20.
- the outer edge 5a of the moisture-proof layer 5 reaches the surface 2b of the sensor panel 2 (the surface around the light receiving surface 2a).
- the moisture-proof layer 5 has a main body layer 51 and an inorganic layer 52.
- the body layer 51 has flexibility.
- the inorganic layer 52 is arranged on the main body layer 51.
- the inorganic layer 52 is integrated with the main body layer 51, for example, by being adhered to the main body layer 51.
- the moisture-proof layer 5 is arranged on the first scintillator panel 10 and the second scintillator panel 20 with the inorganic layer 52 located on the first scintillator panel 10 and the second scintillator panel 20 side with respect to the main body layer 51. ..
- the material of the main body layer 51 is, for example, PET, PEN, PI, PP, PE or PMMA.
- the thickness of the main body layer 51 is, for example, 50 ⁇ m or more and 250 ⁇ m or less.
- the material of the inorganic layer 52 is, for example, Al (aluminum), Cu (copper), Ti (titanium), Fe (iron) or SUS (stainless steel).
- the thickness of the inorganic layer 52 is, for example, 10 ⁇ m or more and 100 ⁇ m or less.
- the adhesive layer 6 is arranged between the first scintillator panel 10 and the moisture-proof layer 5, between the second scintillator panel 20 and the moisture-proof layer 5, and between the surface 2b of the sensor panel 2 and the moisture-proof layer 5. ..
- the moisture-proof layer 5 is adhered to the surface 2b of the first scintillator panel 10, the second scintillator panel 20, and the sensor panel 2.
- the adhesive layer 6 is an adhesive or an adhesive.
- the thickness of the adhesive layer 6 is, for example, 0.1 ⁇ m or more and 100 ⁇ m or less (preferably 25 ⁇ m or less).
- the sealing member 7 seals the outer edge 5a of the moisture-proof layer 5 on the surface 2b of the sensor panel 2.
- the sealing member 7 extends in a frame shape along the outer edge 5a.
- the material of the sealing member 7 is, for example, epoxy, silicone, fluorine, urethane or acrylic.
- the material of the sealing member 7 may contain a filler material made of an inorganic material such as glass.
- the material of the filler material may have a moisture resistance higher than that of the main material of the sealing member 7, for example, SiO 2 (silicon dioxide), Al 2 O 3 (aluminum oxide) or TiO 2 (. Titanium oxide).
- the first scintillator panel 10 and the second scintillator panel 20 are arranged on the light receiving surface 2a of the sensor panel 2 in a state of being adjacent to each other along the light receiving surface 2a of the sensor panel 2.
- the first scintillator layer 12 reaches the first portion 11b extending along the second scintillator panel 20 in the outer edge 11a of the first substrate 11.
- the 2 scintillator layer 22 reaches the second portion 21b extending along the first scintillator panel 10 in the outer edge 21a of the second substrate 21.
- the first angle ⁇ 1 formed by the surface 10a on the sensor panel 2 side of the first scintillator panel 10 and the side surface 10b on the second scintillator panel 20 side of the first scintillator panel 10 is 90 degrees or less
- the second angle ⁇ 2 formed by the surface 20a on the sensor panel 2 side and the side surface 20b on the first scintillator panel 10 side in the second scintillator panel 20 is 90 degrees or less.
- first scintillator layer 12 and the second scintillator layer 22 come close to each other, it is possible to suppress deterioration of the image quality of the radiation image at the joint portion between the first scintillator panel 10 and the second scintillator panel 20. Can be done. As described above, according to the radiation detector 1, it is possible to achieve both a large area of the radiation detection region and a high resolution of the radiation image.
- the first angle ⁇ 1 and the second angle ⁇ 2 are 45 degrees or more and less than 90 degrees, respectively. Thereby, it is possible to more reliably prevent the joint portion from peeling from the light receiving surface 2a due to the thermal expansion of air at the joint portion between the first scintillator panel 10 and the second scintillator panel 20. ..
- the first substrate 11 and the second substrate 21 have flexibility, respectively. This makes it possible to improve workability when each of the first scintillator panel 10 and the second scintillator panel 20 is adhered to the light receiving surface 2a.
- the first angle ⁇ 1 and the second angle ⁇ 2 are each less than 90 degrees, and the sensor panel 2 has flexibility.
- the entire radiation detector 1 can be bent according to the installation environment of the radiation detector 1 and the like. Further, when the entire radiation detector 1 is bent so that the sensor panel 2 is on the outside with respect to the first scintillator panel 10 and the second scintillator panel 20, the first scintillator panel 10 and the second scintillator panel 20 Can be prevented from physically interfering with each other.
- the entire radiation detector 1 can be bent so that the first scintillator panel 10 and the second scintillator panel 20 are arranged along the cylindrical surface S.
- the first angle ⁇ 1 and the second angle ⁇ 2 are each less than 90 degrees, it is possible to prevent the first scintillator panel 10 and the second scintillator panel 20 from physically interfering with each other.
- the radiation detector 1 shown in FIG. 4 does not include the granular phosphor 4, the moisture-proof layer 5, the adhesive layer 6, and the sealing member 7, but includes them as necessary. May be good.
- the adhesive layer 3 is arranged between the light receiving surface 2a and the first scintillator panel 10 and between the light receiving surface 2a and the second scintillator panel 20, and the first scintillator panel 10 and the second scintillator are arranged.
- Each of the panels 20 is adhered to the light receiving surface 2a by the adhesive layer 3.
- each of the first scintillator panel 10 and the second scintillator panel 20 can be reliably arranged on the light receiving surface 2a.
- the adhesive layer 3 contains an adhesive or an adhesive.
- the moisture-proof layer 5 is arranged on the first scintillator panel 10 and the second scintillator panel 20 on the side opposite to the sensor panel 2, and the moisture-proof layer 5 is the first scintillator panel 10 and the second scintillator. It is continuous over the panel 20. As a result, it is possible to prevent water from entering the joint portion between the first scintillator panel 10 and the second scintillator panel 20, and it is possible to reliably protect a plurality of columnar crystals having deliquescent properties.
- the first scintillator panel 10 and the second scintillator panel 20 It is possible to prevent the joint portion with and from the light receiving surface 2a from peeling off.
- the moisture-proof layer 5 has a flexible main body layer 51 and an inorganic layer 52 arranged on the main body layer 51, and the moisture-proof layer 5 has a moisture-proof layer 5 with respect to the main body layer 51.
- the inorganic layer 52 is arranged on the first scintillator panel 10 and the second scintillator panel 20 in a state where the inorganic layer 52 is located on the first scintillator panel 10 and the second scintillator panel 20 side.
- the inorganic layer 52 can function as the moisture-proof layer 5
- the main body layer 51 can function as the protective layer.
- the adhesive layer 3 arranged between the light receiving surface 2a and the first scintillator panel 10 and between the light receiving surface 2a and the second scintillator panel 20 is a first scintillator panel 10 and a second scintillator panel. It is continuous for 20 years. This makes it possible to prevent each of the first scintillator panel 10 and the second scintillator panel 20 from peeling off from the light receiving surface 2a.
- the first scintillator panel 10 has a rectangular shape with a side length of 300 mm or more when viewed from the thickness direction of the first substrate 11, and the second scintillator panel 20 has a second scintillator panel 20. 2 When viewed from the thickness direction of the substrate 21, it has a rectangular shape with a side length of 300 mm or more. As a result, it is possible to easily and surely increase the area of the radiation detection area.
- the scintillator panel unit 100 includes a first scintillator panel 10, a second scintillator panel 20, an adhesive layer 3, and a release sheet 8.
- the scintillator panel unit 100 is used, for example, when manufacturing the above-mentioned radiation detector 1.
- the first scintillator panel 10 and the second scintillator panel 20 are arranged on the adhesive layer 3 as a support layer in a state of being adjacent to each other along the adhesive layer 3.
- the adhesive layer 3 is continuous over the first scintillator panel 10 and the second scintillator panel 20.
- the release sheet 8 covers the adhesive layer 3 from the side opposite to the first scintillator panel 10 and the second scintillator panel 20.
- the adhesive force of the adhesive layer 3 to the surface 8a of the release sheet 8 is lower than the adhesive force of the adhesive layer 3 to the first scintillator panel 10 and the second scintillator panel 20.
- the adhesive layer 3 is an adhesive layer.
- the first scintillator panel 10 is arranged on the adhesive layer 3 with the first scintillator layer 12 located on the adhesive layer 3 side with respect to the first substrate 11.
- the second scintillator panel 20 is arranged on the adhesive layer 3 with the second scintillator layer 22 located on the adhesive layer 3 side with respect to the second substrate 21. That is, the method of arranging the first scintillator panel 10 and the second scintillator panel 20 on the adhesive layer 3 of the scintillator panel unit 100 is the above-mentioned method of arranging the first scintillator panel 10 and the first scintillator panel 10 on the adhesive layer 3 of the radiation detector 1. 2
- the arrangement of the scintillator panel 20 is the same.
- the first scintillator panel 10 the second scintillator panel 20, and the adhesive layer 3 can be handled in a state where they are integrated.
- the first scintillator panel 10 has a first protective layer 13 that covers the first substrate 11 and the first scintillator layer 12, and the second scintillator panel 20 has the second substrate 21 and the second. It has a second protective layer 23 that covers the scintillator layer 22. This makes it possible to protect a plurality of columnar crystals having deliquescent properties.
- the sensor panel 2 is prepared (the process of preparing the sensor panel 2).
- the first scintillator panel 10 and the second scintillator panel 20 are prepared in the state of the scintillator panel unit 100 shown in FIG. 2 (step of preparing the first scintillator panel 10 and the second scintillator panel 20).
- the first angle ⁇ 1 and the second angle ⁇ 2 are 45 degrees or more and less than 90 degrees, respectively (see FIG. 1).
- any step may be carried out first, or both steps are carried out at the same time. You may.
- each of the first scintillator panel 10 and the second scintillator panel 20 is adhered to the light receiving surface 2a by the adhesive layer 3. Is done (the process of gluing). That is, each of the first scintillator panel 10 and the second scintillator panel 20 is arranged on the light receiving surface 2a (a step of arranging each of the first scintillator panel 10 and the second scintillator panel 20). In the bonding step, the adhesive layer 3 is continuous over the first scintillator panel 10 and the second scintillator panel 20.
- the adhesive layer 3 is arranged on each of the first scintillator panel 10 and the second scintillator panel 20 before each of the first scintillator panel 10 and the second scintillator panel 20 is adhered to the light receiving surface 2a.
- the first scintillator panel 10 and the second scintillator panel 10 and the second scintillator panel 20 are bent while bending the first scintillator panel 10 and the second scintillator panel 20.
- Each of the scintillator panels 20 can be gradually adhered to the light receiving surface 2a from one side. At this time, the corners of the second scintillator panel 20 formed by the surface 20a and the side surface 20b can be reliably brought into contact with the corners of the first scintillator panel 10 formed by the surface 10a and the side surface 10b.
- the first scintillator panel 10 and the second scintillator panel 20 are covered with the moisture-proof layer 5 on the sensor panel 2. That is, the moisture-proof layer 5 is arranged on the first scintillator panel 10 and the second scintillator panel 20 on the side opposite to the sensor panel 2 (step of arranging the moisture-proof layer 5). In the step of arranging the moisture-proof layer 5, the moisture-proof layer 5 is continuous over the first scintillator panel 10 and the second scintillator panel 20. Subsequently, on the surface 2b of the sensor panel 2, the outer edge 5a of the moisture-proof layer 5 is sealed by the sealing member 7, and the radiation detector 1 is obtained. In the present embodiment, the step of arranging each of the first scintillator panel 10 and the second scintillator panel 20 is performed before the step of arranging the moisture-proof layer 5.
- the above-mentioned radiation detector 1 can be easily and surely obtained.
- the first scintillator panel 10 and the second scintillator panel 20 are bonded before each of the first scintillator panel 10 and the second scintillator panel 20 is bonded to the light receiving surface 2a.
- An adhesive layer 3 is arranged in each. Thereby, the first scintillator panel 10, the second scintillator panel 20, and the adhesive layer 3 can be handled in a state where they are integrated.
- the step of arranging each of the first scintillator panel 10 and the second scintillator panel 20 is performed before the step of arranging the moisture-proof layer 5.
- the moisture-proof layer 5 is arranged on the first scintillator panel 10 and the second scintillator panel 20 on the side opposite to the sensor panel 2, the sensor panel 2, the first scintillator panel 10, and the second scintillator panel 20 are placed. They can be handled in an integrated state.
- the moisture-proof layer 5 covers the first scintillator panel 10 and the second scintillator panel 20, and is between the first scintillator panel 10 and the moisture-proof layer 5 and the second scintillator panel 20.
- An adhesive layer 6 is arranged between the moisture-proof layer 5 and the moisture-proof layer 5.
- an adhesive layer 3 is arranged between the first scintillator panel 10 and the release sheet 8 and between the second scintillator panel 20 and the release sheet 8, and between the outer edge 5a of the moisture-proof layer 5 and the release sheet 8.
- the adhesive layer 6 is arranged on the surface.
- the adhesive layer 3 and the adhesive layer 6 are adhesive layers, respectively.
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Abstract
Description
[放射線検出器の構成]
[シンチレータパネルユニットの構成]
[放射線検出器の製造方法]
[変形例]
Claims (18)
- 受光面を有するセンサパネルと、
前記受光面に沿って互いに隣接した状態で前記受光面上に配置された第1シンチレータパネル及び第2シンチレータパネルと、を備え、
前記第1シンチレータパネルは、第1基板と、前記第1基板上に形成された複数の柱状結晶を含む第1シンチレータ層と、を有し、
前記第2シンチレータパネルは、第2基板と、前記第2基板上に形成された複数の柱状結晶を含む第2シンチレータ層と、を有し、
前記第1シンチレータパネルは、前記第1基板に対して前記第1シンチレータ層が前記受光面側に位置した状態で、前記受光面上に配置されており、
前記第2シンチレータパネルは、前記第2基板に対して前記第2シンチレータ層が前記受光面側に位置した状態で、前記受光面上に配置されており、
前記第1シンチレータ層側から見た場合における前記第1基板の外縁は、前記第2シンチレータパネルに沿って延在する第1部分を含み、前記第1シンチレータ層は、少なくとも前記第1部分に至っており、
前記第2シンチレータ層側から見た場合における前記第2基板の外縁は、前記第1シンチレータパネルに沿って延在する第2部分を含み、前記第2シンチレータ層は、少なくとも前記第2部分に至っており、
前記第1シンチレータパネルにおける前記センサパネル側の表面と前記第1シンチレータパネルにおける前記第2シンチレータパネル側の側面との成す第1角度は、90度以下であり、
前記第2シンチレータパネルにおける前記センサパネル側の表面と前記第2シンチレータパネルにおける前記第1シンチレータパネル側の側面との成す第2角度は、90度以下である、放射線検出器。 - 前記第1角度及び前記第2角度は、それぞれ、45度以上90度未満である、請求項1に記載の放射線検出器。
- 前記第1基板及び前記第2基板は、それぞれ、可撓性を有する、請求項1又は2に記載の放射線検出器。
- 前記第1角度及び前記第2角度は、それぞれ、90度未満であり、
前記センサパネルは、可撓性を有する、請求項3に記載の放射線検出器。 - 前記受光面と前記第1シンチレータパネルとの間及び前記受光面と前記第2シンチレータパネルとの間に配置された接着層を更に備え、
前記第1シンチレータパネル及び前記第2シンチレータパネルのそれぞれは、前記接着層によって前記受光面に接着されている、請求項1~4のいずれか一項に記載の放射線検出器。 - 前記接着層は、粘着剤又は接着剤を含む、請求項5に記載の放射線検出器。
- 前記第1シンチレータパネルは、前記第1基板及び前記第1シンチレータ層を覆う第1保護層を更に有し、
前記第2シンチレータパネルは、前記第2基板及び前記第2シンチレータ層を覆う第2保護層を更に有する、請求項1~6のいずれか一項に記載の放射線検出器。 - 前記第1シンチレータパネルと前記第2シンチレータパネルとの間に配置された粒状蛍光体を更に備える、請求項1~7のいずれか一項に記載の放射線検出器。
- 前記センサパネルとは反対側において前記第1シンチレータパネル及び前記第2シンチレータパネル上に配置された防湿層を更に備え、
前記防湿層は、前記第1シンチレータパネル及び前記第2シンチレータパネルに渡って連続している、請求項1~8のいずれか一項に記載の放射線検出器。 - 前記防湿層は、
可撓性を有する本体層と、
前記本体層上に配置された無機層と、を有し、
前記防湿層は、前記本体層に対して前記無機層が前記第1シンチレータパネル及び前記第2シンチレータパネル側に位置した状態で、前記第1シンチレータパネル及び前記第2シンチレータパネル上に配置されている、請求項9に記載の放射線検出器。 - 封止部材を更に備え、
前記防湿層の外縁は、前記受光面の周囲の前記センサパネルの表面に至っており、
前記封止部材は、前記センサパネル及び前記防湿層によって画定された領域が減圧された状態で、前記センサパネルの前記表面において前記防湿層の前記外縁を封止している、請求項9又は10に記載の放射線検出器。 - 前記センサパネルとは反対側において前記第1シンチレータパネル上に配置された第1防湿層と、
前記センサパネルとは反対側において前記第2シンチレータパネル上に配置された第2防湿層と、
前記第1シンチレータパネル及び前記第1防湿層を覆う第1保護層と、
前記第2シンチレータパネル及び前記第2防湿層を覆う第2保護層と、を更に備える、請求項1~6のいずれか一項に記載の放射線検出器。 - 請求項1~12のいずれか一項に記載の放射線検出器の製造方法であって、
前記センサパネルを用意する工程と、
前記第1シンチレータパネル及び前記第2シンチレータパネルを用意する工程と、
前記受光面上に前記第1シンチレータパネル及び前記第2シンチレータパネルのそれぞれを配置する工程と、を備え、
前記第1シンチレータパネル及び前記第2シンチレータパネルを用意する工程においては、
前記第1シンチレータパネルにおける前記センサパネル側の表面と前記第1シンチレータパネルにおける前記第2シンチレータパネル側の側面との成す第1角度が90度以下であり、
前記第2シンチレータパネルにおける前記センサパネル側の表面と前記第2シンチレータパネルにおける前記第1シンチレータパネル側の側面との成す第2角度が90度以下である、放射線検出器の製造方法。 - 支持層と、
前記支持層に沿って互いに隣接した状態で前記支持層上に配置された第1シンチレータパネル及び第2シンチレータパネルと、を備え、
前記第1シンチレータパネルは、第1基板と、前記第1基板上に形成された複数の柱状結晶を含む第1シンチレータ層と、を有し、
前記第2シンチレータパネルは、第2基板と、前記第2基板上に形成された複数の柱状結晶を含む第2シンチレータ層と、を有し、
前記第1シンチレータ層側から見た場合における前記第1基板の外縁は、前記第2シンチレータパネルに沿って延在する第1部分を含み、前記第1シンチレータ層は、少なくとも前記第1部分に至っており、
前記第2シンチレータ層側から見た場合における前記第2基板の外縁は、前記第1シンチレータパネルに沿って延在する第2部分を含み、前記第2シンチレータ層は、少なくとも前記第2部分に至っており、
前記第1シンチレータパネルにおける前記第1シンチレータ層側の表面と前記第1シンチレータパネルにおける前記第2シンチレータパネル側の側面との成す第1角度は、90度以下であり、
前記第2シンチレータパネルにおける前記第2シンチレータ層側の表面と前記第2シンチレータパネルにおける前記第1シンチレータパネル側の側面との成す第2角度は、90度以下である、シンチレータパネルユニット。 - 前記支持層は、接着層であり、
前記第1シンチレータパネルは、前記第1基板に対して前記第1シンチレータ層が前記接着層側に位置した状態で、前記接着層上に配置されており、
前記第2シンチレータパネルは、前記第2基板に対して前記第2シンチレータ層が前記接着層側に位置した状態で、前記接着層上に配置されており、
前記接着層は、前記第1シンチレータパネル及び前記第2シンチレータパネルに渡って連続している、請求項14に記載のシンチレータパネルユニット。 - 前記支持層は、防湿層であり、
前記第1シンチレータパネルは、前記第1シンチレータ層に対して前記第1基板が前記防湿層側に位置した状態で、前記防湿層上に配置されており、
前記第2シンチレータパネルは、前記第2シンチレータ層に対して前記第2基板が前記防湿層側に位置した状態で、前記防湿層上に配置されており、
前記防湿層は、前記第1シンチレータパネル及び前記第2シンチレータパネルに渡って連続している、請求項14に記載のシンチレータパネルユニット。 - 前記第1シンチレータパネルは、前記第1基板及び前記第1シンチレータ層を覆う第1保護層を更に有し、
前記第2シンチレータパネルは、前記第2基板及び前記第2シンチレータ層を覆う第2保護層を更に有する、請求項14~16のいずれか一項に記載のシンチレータパネルユニット。 - 前記接着層とは反対側において前記第1シンチレータパネル上に配置された第1防湿層と、
前記接着層とは反対側において前記第2シンチレータパネル上に配置された第2防湿層と、
前記第1シンチレータパネル及び前記第1防湿層を覆う第1保護層と、
前記第2シンチレータパネル及び前記第2防湿層を覆う第2保護層と、を更に備える、請求項15に記載のシンチレータパネルユニット。
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EP21909998.3A EP4242695A1 (en) | 2020-12-23 | 2021-11-08 | Radiation detector, radiation detector manufacturing method, and scintillator panel unit |
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JP2022099513A (ja) | 2022-07-05 |
CN116648643A (zh) | 2023-08-25 |
US20240045085A1 (en) | 2024-02-08 |
EP4242695A1 (en) | 2023-09-13 |
TW202226273A (zh) | 2022-07-01 |
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