WO2021147624A1 - 掩膜板组件及其制作方法 - Google Patents

掩膜板组件及其制作方法 Download PDF

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Publication number
WO2021147624A1
WO2021147624A1 PCT/CN2020/140567 CN2020140567W WO2021147624A1 WO 2021147624 A1 WO2021147624 A1 WO 2021147624A1 CN 2020140567 W CN2020140567 W CN 2020140567W WO 2021147624 A1 WO2021147624 A1 WO 2021147624A1
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WO
WIPO (PCT)
Prior art keywords
row
mask
column
connecting portions
connecting portion
Prior art date
Application number
PCT/CN2020/140567
Other languages
English (en)
French (fr)
Inventor
肖磊芳
马国强
徐鹏
赵建成
Original Assignee
京东方科技集团股份有限公司
成都京东方光电科技有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 京东方科技集团股份有限公司, 成都京东方光电科技有限公司 filed Critical 京东方科技集团股份有限公司
Priority to US17/309,828 priority Critical patent/US20220307121A1/en
Publication of WO2021147624A1 publication Critical patent/WO2021147624A1/zh

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/20—Bonding
    • B23K26/21—Bonding by welding
    • B23K26/22—Spot welding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/20—Bonding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/20—Bonding
    • B23K26/32—Bonding taking account of the properties of the material involved
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/20—Tools

Definitions

  • the present disclosure relates to the manufacturing field of display products, and in particular to a mask assembly and a manufacturing method thereof.
  • OLED Organic Light-Emitting Display
  • vapor deposition is usually used and the organic light-emitting material is vapor-deposited on the display backplane with the help of a fine metal mask (FMM), and the vapor deposition opening on the mask is used , So that the organic materials of various colors are evaporated to the corresponding positions.
  • FMM fine metal mask
  • the present disclosure aims to provide a mask assembly and a manufacturing method thereof, so as to improve the position accuracy of the evaporation opening of the mask.
  • a mask assembly including:
  • a mask plate which has a mask area and connection areas located on opposite sides of the mask area;
  • a plurality of first connecting parts located in each of the connecting areas wherein the plurality of first connecting parts in each of the connecting areas are arranged in M rows and N columns, and each row includes a plurality of the first connecting parts.
  • M and N are both integers greater than 1
  • M the number of the first connecting parts in the i-th column is greater than 1, where 0 ⁇ i ⁇ N, and i is an odd number.
  • the number of the first connecting parts in each column is one.
  • the number of the first connecting parts in each row is an odd number.
  • the spacing in the column direction of the first connecting parts in every two adjacent rows is equal, and the spacing in the row direction of the first connecting parts in every two adjacent columns is equal.
  • the spacing in the column direction of the first connecting parts in two adjacent rows is equal to the spacing in the row direction of the first connecting parts in two adjacent columns.
  • the orthographic projection of the first connecting portion on the frame is a circle with a diameter between 300 ⁇ m and 500 ⁇ m, and the distance between any two adjacent rows of the first connecting portion in the column direction is between 1000 ⁇ m and 500 ⁇ m. Between 1300 ⁇ m;
  • the spacing in the row direction of the first connecting portions in any two adjacent columns is between 1000 ⁇ m and 1300 ⁇ m.
  • M is 3.
  • the mask assembly further includes at least one second connecting portion and at least one third connecting portion located in each of the connecting areas, and the second connecting portion is connected to the first row of the first connecting portion.
  • the second connecting portions are arranged in the same column, and each of the second connecting portions is arranged in the same row as the first connecting portion in one row;
  • the third connecting portion is arranged in the same column as the first connecting portion in the Nth column, and each of the The third connecting parts are all arranged in parallel with the first connecting parts in one row;
  • the first connecting portion and the second connecting portion are arranged in M rows in the first column, and the first connecting portion and the third connecting portion are arranged in M rows in the Nth column.
  • the shortest distance in the row direction between the edge of the mask plate extending in the column direction and the adjacent first connecting portion in the row direction is between 0.3 mm and 0.6 mm.
  • the first connecting portions on both sides of the mask area are symmetrically distributed.
  • the first connecting portion includes a convex portion and a concave portion surrounding the convex portion, the convex portion protrudes away from the frame, and the bottom end of the concave portion is connected to the mask
  • the vertical distance between the surfaces of the flat part of the board is between 3 ⁇ m and 8 ⁇ m, and the vertical distance between the top end of the convex part and the bottom end of the concave part is between 10 ⁇ m and 20 ⁇ m.
  • the present disclosure also provides a method for manufacturing a mask assembly, including:
  • the mask having a mask area and connection areas located on opposite sides of the mask;
  • a plurality of first connection portions are formed in each of the connection areas, and the mask plate is connected to the frame through a plurality of the first connection portions, wherein the plurality of connection areas in each of the connection areas are connected to the frame.
  • the first connecting portions are arranged in M rows and N columns, each row includes a plurality of the first connecting portions, and each column includes at least one of the first connecting portions. In the same connecting area, any two adjacent rows
  • the connecting parts are arranged in a staggered manner, wherein M and N are both integers greater than 1.
  • the number of the first connecting portions in each row is an odd number greater than 3, the plurality of first connecting portions in each row are evenly distributed, and the first connecting portions in each connecting area are formed row by row ,
  • the step of forming each row of the first connecting portion includes:
  • a target position at a midpoint of a row forms the first connecting portion, and the midpoint of the row is the midpoint of the first and last two target positions;
  • the first connecting portions are formed one by one at the remaining target positions where the first connecting portion is not formed.
  • the step of forming the first connecting portion one by one at the remaining target positions where the first connecting portion is not formed includes: repeating a preset connecting process until each of the target positions has the First connecting part
  • the preset connection process includes:
  • the midpoint between every two adjacent first connecting portions is taken as the segment midpoint;
  • the first connecting portion is formed at the target position at the midpoint of each of the segments, respectively.
  • the first connecting portion is formed at a target position closer to the midpoint of the row, and then the first connecting portion is formed at a target position farther from the midpoint of the row. Connecting part.
  • the first connection portions are formed row by row in a direction away from the mask area.
  • the first connecting portions on both sides of the mask area are symmetrically distributed;
  • Two first connecting portions located on both sides of the mask area and distributed symmetrically are formed at the same time.
  • the manufacturing method further includes:
  • At least one second connecting portion and at least one third connecting portion are formed in each of the connecting regions, wherein the second connecting portions are arranged in the same row as the first connecting portions in the first row, and each of the second connecting portions is arranged in the same row as the first connecting portions in the first row.
  • the connecting parts are arranged in parallel with the first connecting parts in one row; the third connecting parts are arranged in the same column as the first connecting parts in the Nth column, and each third connecting part is arranged in the same row as the first connecting parts in one row.
  • a connecting portion is arranged in a row; the first connecting portion and the second connecting portion in the first column are arranged in M rows, and the first connecting portion and the third connecting portion are arranged in M rows in the Nth column.
  • the first connecting portion, the second connecting portion and the third connecting portion are all formed by irradiating the mask with a laser.
  • Figure 1 is a schematic diagram of the mask and the frame in the comparative example
  • Fig. 2 is a schematic diagram of the solder joint distribution in the connection area in Fig. 1;
  • FIG. 3 is a schematic diagram of a mask assembly provided in some embodiments of the present disclosure.
  • Fig. 4 is a schematic diagram of the two connection areas in Fig. 3;
  • Fig. 5 is an enlarged view of area A1 in Fig. 4;
  • FIG. 6 is a schematic diagram of a mask assembly provided in some other embodiments of the disclosure.
  • Fig. 7 is a schematic diagram of the two connection areas in Fig. 6;
  • Fig. 8 is an enlarged schematic diagram of area A2 in Fig. 7;
  • FIG. 9 is a top view of the first connecting part in some embodiments of the present disclosure.
  • Figure 10 is a cross-sectional view taken along the line A-A' in Figure 9;
  • FIG. 11 is a flowchart of a manufacturing method of a mask assembly provided in some embodiments of the present disclosure.
  • FIG. 12 is a flowchart of forming the first connecting portion of the j-th row provided in some embodiments of the present disclosure
  • 13 to 18 are schematic diagrams of the process of forming the first connecting portion of each row in the embodiment of the disclosure.
  • FIG. 19 is a flowchart of a manufacturing method of a mask assembly provided in some other embodiments of the present disclosure.
  • an organic light-emitting layer is formed in each pixel area of the display substrate by vapor deposition.
  • the mask used in the vapor deposition process is usually a fine metal mask, which has a mask area in which a plurality of vapor deposition openings are arranged. Because the thickness of the mask is very thin, in the manufacturing process of the mask, after the mask area is formed on the mask, the two ends of the mask are usually fixed to the frame by welding. superior. In addition, during the welding process, the two ends of the mask are usually stretched to generate a certain strength.
  • FIG. 1 is a schematic diagram of the mask and the frame in the comparative example
  • FIG. 2 is a schematic diagram of the solder joint distribution in the connection area in FIG. 1.
  • the two connection areas C of the mask 10 are both fixed on the frame 20 by a plurality of solder joints 11, and in each connection area C, a plurality of solder joints 11 are distributed in a regular array. That is, every two adjacent rows of solder joints 11 are aligned. In this case, when the mask plate 10 is stretched (that is, the tensile force shown in the arrow direction in FIG.
  • the force of the connecting area C is not uniform, It is easy to cause the vapor deposition opening of the mask plate 10 to shift in position during the welding process, thereby affecting the position accuracy of the vapor deposition opening.
  • the welding time will be longer due to the larger width; and the larger the weight of the large-size masks, the tensile force increases accordingly, which leads to the evaporation opening in the welding process.
  • the position in will change significantly.
  • the organic light emitting display device prepared by using the mask plate 10 will have poor color mixing.
  • FIG. 3 is a schematic diagram of the mask assembly provided in some embodiments of the disclosure
  • FIG. 4 is a schematic diagram of the two connection areas in FIG. 3.
  • the mask assembly includes a frame 20 and a mask 10.
  • the mask 10 has a mask area MA and connection areas C1 and C2 located on opposite sides of the mask area MA.
  • the connecting areas C1 and C2 are located on both sides of the preset stretching direction of the mask area MA, and the preset stretching direction is: the stretching applied to the mask 10 when the mask 10 is fixedly connected to the frame 20 The direction of extension.
  • the preset stretching direction is the length direction of the mask plate 10.
  • the two sides of the mask area MA along the length direction are respectively provided with connection areas C1 and C2.
  • the mask assembly further includes a plurality of first connection portions 31 located in each connection area C1/C2.
  • the plurality of first connection portions 31 in each connection area C1/C2 are arranged in M rows and N columns, each row includes a plurality of first connection portions 31, and the arrangement direction of the plurality of first connection portions 31 in each row Perpendicular to the preset stretching direction.
  • Each column includes at least one first connecting portion 31.
  • any two adjacent rows of first connecting parts 31 are arranged staggered, where M and N are both positive integers greater than 1, and the mask plate 10 is fixed to the frame 20 by a plurality of first connecting parts 31 superior.
  • the mask plate 10 is a metal mask plate 10 and is welded to the frame 20, and the first connecting portion 31 is a solder joint formed by the mask plate 10 being fused after being irradiated by a laser.
  • the staggered arrangement of the first connecting portions 31 of any two adjacent rows means that the first connecting portions 31 of any two adjacent rows are alternately arranged in the row direction, and the first connecting portions 31 of any two adjacent rows are arranged alternately in the row direction. 31 does not overlap each other in the column direction, and the first connecting portions 31 of any two adjacent columns do not overlap each other in the row direction. That is to say, in any two adjacent rows, any two first connecting portions 31 are not on the same column; the columns of two adjacent first connecting portions 31 in the same column are not adjacent. For example, in the connection areas C1 and C2 as shown in FIG.
  • the first first connection portion 31 from the left in the first row is located in the first column
  • the first first connection portion 31 from the left in the second row is located in the first column.
  • Two columns, the second first connecting portion 31 from the left in the first row is located in the third column, the second first connecting portion 31 from the left in the second row is located in the fourth column, and so on.
  • the mask 10 provided in the embodiment of the present disclosure is particularly suitable for a wide-format mask 10.
  • the length of the mask 10 is about 1200 mm and the width is about 150 mm; for another example, the length of the mask 10 is about 1200mm, the width is about 350mm.
  • the mask 10 with a length of about 1200 mm when the number of rows of the first connecting portion 31 is too small, the tensile force that can be withstood is insufficient.
  • the size of the upper part is limited, so that the number of rows of the first connecting portion 31 is also limited. Therefore, in order to reduce the wrinkles on the mask 10, in some specific examples, the number of rows M of the first connection portion 31 in each connection area is 3, and the dimensions of the connection areas C1 and C2 in the column direction are both about 5 mm. .
  • the number of first connection parts 31 in each row is an odd number.
  • the number of the first connecting portions 31 in the i-th column is greater than 1, where 0 ⁇ i ⁇ N, and i is an odd number. It should be noted that, in the embodiment of the present disclosure, the first column is the leftmost column in FIG. 6; the i-th column is the i-th column from left to right in FIG. 6.
  • the number of first connecting portions 31 in the i+1th column (for example, the second column, the fourth column, the sixth column, etc.) is 1; when M>3, the i+1th column
  • the number of the first connecting portions 31 in is greater than one.
  • the first first connecting portion 31 in the first row and the first first connecting portion 31 in the third row are located in the first column, and the first first connecting portion 31 in the second row is located in the first column.
  • Two columns, the second first connecting portion 31 in the first row and the second first connecting portion 31 in the third row are located in the third column, and the second first connecting portion 31 in the second row is located in the third column. 4 columns, and so on.
  • FIG. 5 is an enlarged view of the area A1 in FIG. 4, as shown in FIG. 4 and FIG. 5.
  • the spacing between each two adjacent rows of the first connecting portions 31 in the column direction is equal, which is d1;
  • the distances between the first connecting portions 31 of the two columns in the row direction are equal, and both are d2, so that the entire connecting area C1/C2 is uniformly stressed.
  • the central connection of the first connecting portion 31 in the second row and kth column, the first connecting portion 31 in the first row k-1 and the first connecting portion 31 in the first row k+1 constitutes an isosceles Triangle; the first connecting part 31 in the second row and kth column, the first connecting part 31 in the third row and the k-1th column, and the central connection of the first connecting part 31 in the third row and k+1 column form an isosceles triangle .
  • k is an even number greater than 1 and less than N.
  • the distance d1 between the first connecting portions 31 of two adjacent rows in the column direction means that the centers of the two first connecting portions 31 respectively located in two adjacent rows are in the column direction.
  • the distance d2 in the row direction of the first connecting portions 31 of two adjacent columns refers to the distance between the centers of the two first connecting portions 31 located in two adjacent columns in the row direction.
  • the distance between two adjacent first connecting portions 31 in the same row is: the distance between the centers of two adjacent first connecting portions 31 in the same row; two adjacent first connecting portions 31 in the same column
  • the spacing is: the distance between the centers of two adjacent first connecting portions 31 in the same column.
  • the spacing d1 of the first connecting portions 31 in two adjacent rows in the column direction is equal to the spacing d2 of the first connecting portions 31 in two adjacent columns in the row direction.
  • the first first connecting portion 31 in the first row, the first connecting portion 31 in the second row, and the second first connecting portion 31 in the third row are located in a straight line.
  • the first connecting portion 31 in the second row and the kth column, the first connecting portion 31 in the first row and the k-1th column, and the first connecting portion 31 in the first row and k+1th column form an isosceles right triangle.
  • the orthographic projection of the first connection portion 31 on the frame 20 is a circle with a diameter d between 300 ⁇ m and 500 ⁇ m, and any two adjacent rows of the first connection portion 31 are in the column direction.
  • the distance d1 above is between 1000 ⁇ m and 1300 ⁇ m
  • the distance d2 in the row direction between any two adjacent columns of the first connection portion 31 is between 1000 ⁇ m and 1300 ⁇ m. In practical applications, both d1 and d2 are greater than d.
  • d is between 300 ⁇ m and 350 ⁇ m, and d1 and d2 are both between 1000 ⁇ m and 1100 ⁇ m; for example, d is between 350 ⁇ m and 400 ⁇ m, and both d1 and d2 are between 1100 ⁇ m and 1200 ⁇ m; and for example, d is between 400 ⁇ m and 400 ⁇ m. Between 500 ⁇ m, d1 and d2 are both between 1200 ⁇ m and 1300 ⁇ m.
  • d 300 ⁇ m
  • the distance between any two adjacent first connecting portions 31 in each row The pitch d3 is 2000 ⁇ m
  • the pitch d4 between two adjacent first connecting portions 31 in the odd-numbered column is 2000 ⁇ m.
  • the closest distance in the row direction between the edge of the mask 10 extending in the column direction and the first connecting portion 31 immediately adjacent thereto is between 0.3 mm and 0.6 mm.
  • the edges of the mask plate 10 extending in the column direction are the edges on the left and right sides.
  • the first connecting portion 31 immediately adjacent thereto refers to the first connecting portion 31 closest to the edge.
  • the immediately adjacent first connecting portion 31 is the first connecting portion 31 located in the first column
  • the shortest distance between the first connecting portion 31 and the left edge in the row direction is: The vertical distance between the left end and the left edge of the first connecting portion 31
  • the immediately adjacent first connecting portion 31 is the first connecting portion 31 located in the last column.
  • the shortest distance between the portion 31 and the right edge in the row direction is: the vertical distance between the right end and the right edge of the first connecting portion 31.
  • the first connecting portions 31 on both sides of the mask area MA are symmetrically distributed. Specifically, in each connection area, a row near the mask area MA is the first row, a row far from the mask area MA is the last row, and a plurality of first connections in the m-th row on the upper side of the mask area MA The portion 31 and the plurality of first connecting portions 31 in the m-th row on the lower side of the mask area MA are one-to-one positive in the column direction, 1 ⁇ m ⁇ M, and m is an integer.
  • the mask assembly further includes at least one second connection portion 32 and at least one third connection portion 33 located in each connection area C1/C2, the second connection portion 32 and the first row
  • the first connecting parts 31 are arranged in the same column, and each of the second connecting parts 32 is arranged in parallel with the first connecting parts 31 of one row.
  • the third connecting portions 33 are arranged in the same column as the first connecting portions 31 in the Nth column, and each third connecting portion 33 is arranged in parallel with the first connecting portions 31 of one row.
  • the first connecting portion 31 and the second connecting portion 32 in the first column are arranged in M rows, and the first connecting portion 31 and the third connecting portion 33 in the Nth column are arranged in M rows.
  • the second connection portion 32 is located in the first column
  • the third connection portion 33 is located in the last column
  • the second connection portion 32 and the third connection portion 33 are all arranged in parallel with the first connecting portion 31 in the second row.
  • FIG. 6 is a schematic diagram of a mask assembly provided in some other embodiments of the present disclosure
  • FIG. 7 is a schematic diagram of two connection areas in FIG. 6,
  • FIG. 8 is an enlarged schematic diagram of area A2 in FIG. 7.
  • the multiple first connecting portions 31 of each connecting area C1/C2 are also arranged in multiple rows and multiple columns, and the first connecting portions of any two adjacent rows 31 staggered settings.
  • the number of the first connecting portions 31 in each column is one. That is, when M>2, the first connecting portions 31 of any two rows are arranged in a staggered manner.
  • the number of rows M of the first connecting portions 31 in each connecting area is 3, and the number of first connecting portions 31 in each row is equal to odd number.
  • the spacing d1 of the first connecting portions 31 in each two adjacent rows in the column direction is the same, and the spacing d2 of the first connecting portions 31 in each two adjacent columns is the same in the row direction. Further, the spacing d1 of the first connecting portions 31 in two adjacent rows in the column direction is equal to the spacing d2 of the first connecting portions 31 in two adjacent columns in the row direction.
  • the plurality of first connecting parts 31 in the connecting area C1/C2 can be divided into a plurality of groups arranged along the row direction, and each group includes three first connecting parts 31, for example, the first connecting parts 31 in the first row
  • the first connecting portion 31, the first first connecting portion 31 in the second row, and the first first connecting portion 31 in the third row constitute the first group
  • the second first connecting portion 31 in the second row
  • the second first connecting portion 31 in the second row, and the second first connecting portion 31 in the third row form the second group; and so on.
  • the three first connecting portions 31 in each group are located on a straight line that forms an angle of 45° with the row direction.
  • the orthographic projection of the first connecting portion 31 on the frame 20 is a circle with a diameter d between 300 ⁇ m and 500 ⁇ m, and any two adjacent ones are adjacent to each other.
  • the distance d1 of the row first connecting parts 31 in the column direction is between 1000 ⁇ m and 1300 ⁇ m; the distance d2 of any two adjacent columns of the first connecting parts 31 in the row direction is between 1000 ⁇ m and 1300 ⁇ m.
  • d 300 ⁇ m
  • the distance d3 between any two adjacent first connecting portions 31 in each row is 3000 ⁇ m.
  • the shortest distance in the row direction between the edge of the mask plate 10 extending in the column direction and the adjacent first connecting portion 31 in the row direction is between 0.3 mm and 0.6 mm.
  • the first connecting portions 31 on both sides of the mask area MA are symmetrically distributed.
  • Each connection area C1/C2 is also provided with at least one second connection portion 32 and at least one third connection portion 33.
  • the second connection portion 32 is arranged in the same row as the first connection portion 31 of the first row, and each The second connecting portions 32 are arranged in parallel with the first connecting portions 31 in one row; the third connecting portions 33 are arranged in the same row as the first connecting portions 31 in the Nth column, and each of the third connecting portions 33 is arranged in the same row as the first connecting portions 31 in the Nth column.
  • a row of the first connecting portions 31 are arranged in a row; the first connecting portion 31 and the second connecting portion 32 are arranged in M rows in the first column, and the first connecting portion 31 and the third connecting portion 33 are arranged in the Nth column Arranged in M rows.
  • two second connecting parts 32 and two third connecting parts 33 are provided in each connecting area C1/C2, and the two second connecting parts 32 are respectively located in the second The first column of the row and the first column of the third row; the two third connecting portions 33 are respectively located in the last column of the first row and the last column of the second row.
  • the first connecting portion 31, the second connecting portion 32, and the third connecting portion 33 in the embodiments of the present disclosure may be solder joints formed by a laser welding process.
  • FIG. 9 is the first connecting portion in some embodiments of the present disclosure.
  • 10 is a cross-sectional view taken along the line AA' in FIG. 9, as shown in FIGS. 9 and 10, the first connecting portion 31 includes a convex portion 31a and a concave portion 31b surrounding the convex portion 31a.
  • the portion 31 a protrudes away from the frame 20, and the concave portion 31 b is bent toward the frame 20.
  • the vertical distance h1 between the top end of the convex portion 31a and the bottom end of the concave portion 31a is between 10 ⁇ m and 20 ⁇ m
  • the projection of the convex portion 31a on the frame 20 is circular or approximately circular, and its diameter d0 Between 40 ⁇ m and 60 ⁇ m.
  • the depth h2 of the recessed portion 31b is between 3 ⁇ m and 8 ⁇ m.
  • the vertical distance h1 between the top end of the convex portion 31a and the bottom end of the concave portion 31a is 15 ⁇ m
  • the depth h2 of the concave portion 31b is 5 ⁇ m
  • the diameter of the convex portion 31a is 50 ⁇ m.
  • the top end of the protruding part 31 a is the end far away from the frame 20, and the bottom end of the recessed part 31 b is the end close to the frame 20.
  • the depth h2 of the recessed portion 31b is the vertical distance from the bottom end of the recessed portion 31b to the surface of the flat portion of the mask 10.
  • the shapes of the second connecting portion 32 and the third connecting portion 33 are the same as those of the first connecting portion 31, and will not be repeated here.
  • FIG. 11 is a flow chart of a manufacturing method of a mask assembly provided in some embodiments of the present disclosure. As shown in conjunction with FIG. 3, FIG. 6 and FIG. 11, the manufacturing method of the mask assembly includes:
  • a frame 20 and a mask 10 are provided.
  • the mask 10 has a mask area MA and connection areas C1 and C2 located on opposite sides of the mask 10.
  • the “opposite two sides” here may specifically refer to two opposite sides along the length of the mask 10.
  • a plurality of first connecting portions 31 are formed in each connecting area, and the mask plate 10 is connected to the frame 20 through the plurality of first connecting portions 31, wherein the plurality of first connecting portions 31 in each connecting area Arranged in M rows and N columns, each row includes a plurality of first connecting portions, and each column includes at least one first connecting portion 31.
  • the first connecting portions 31 of any two adjacent rows are staggered, wherein , M and N are both positive integers greater than 1.
  • the number of the first connecting portions 31 in each row is an odd number greater than 3, and the plurality of first connecting portions 31 in each row are evenly distributed.
  • the first connection portions 31 in each connection area are formed row by row.
  • FIG. 12 is a flowchart of forming the first connecting portion of each row provided in some embodiments of the present disclosure.
  • FIG. 13 to FIG. 18 are schematic diagrams of the process of forming the first connecting portion of the j-th row in the embodiments of the present disclosure.
  • the sequence number above each first connecting portion 31 in 18 indicates the order of formation of the first connecting portion 31.
  • the process of forming the first connecting portion 31 in the j-th row (1 ⁇ j ⁇ M, j is an integer) includes steps S201 to S204.
  • Step S201 Determine a plurality of target positions T corresponding to the plurality of first connecting portions in the j-th row in a one-to-one manner.
  • the distribution of multiple target positions T is shown in FIG. 13, and each target position T is used to form the first connecting portion 31.
  • Step S202 A first connecting portion 31 is formed at the target position T at the midpoint of the row, such as the first connecting portion 31 labeled with a serial number "1" in FIG. 14. Among them, the midpoint of the row is the midpoint of the first and last two target positions T in the j-th row.
  • Step S203 forming a first connecting portion 31 at the two target positions T at the beginning and the end of the j-th row, respectively, such as the first connecting portions 31 marked with serial numbers "2" and "3" in FIG. 15.
  • the order in which the first connecting portions 31 at the first and last target positions T in the j-th row are formed is not limited.
  • Step S204 forming the first connecting parts 31 one by one at the remaining target positions T where the first connecting parts 31 are not formed, as shown in FIGS. 16 to 18.
  • step S204 includes: repeating the preset connection process until each target position T is formed with a first connection part.
  • the preset connection process includes:
  • S2041 for the plurality of first connecting portions 31 currently formed, use the midpoint between every two adjacent first connecting portions 31 as the segment midpoint.
  • step S2042 for the target positions T at the midpoints of any two segments, if the distances from the two target positions T to the center of the line are different, first set the target position T closer to the midpoint of the line.
  • the first connecting portion is formed, and then the first connecting portion is formed at a target position T farther from the midpoint of the row.
  • the first connecting portions 31 are formed in sequence.
  • the first connecting portion 31 with serial numbers "10", "11", "12”!17" is marked.
  • each time step S2041 is performed if there are multiple segment midpoints on both sides of the row center, then each time a first connecting portion 31 is formed on one side of the row center, it will be located on the other side of the row center.
  • a first connecting portion 31 is formed symmetrically on one side.
  • FIGS. 13 to 13 Shown in 18 In order to reflect the formation order of the multiple first connecting portions 31 in each row, FIGS. 13 to 18 only take 17 first connecting portions 31 in each row as an example for illustration, but in actual production In each row, the number of first connecting portions 31 in each row can be much greater than 17, for example, for a mask 10 with a width of 150 mm, the number of first connecting portions 31 in each row is about 100. For the mask 10 with a width of 350 mm, the number of the first connecting portions 31 in each row is about 200.
  • each first connecting portion 31 can be formed by irradiating the mask plate 10 with laser light.
  • the first connecting portion 31 of each row when the first connecting portion 31 of each row is formed, the first connecting portion 31 at the center of the row is formed first to fix the middle of the mask plate 10 to the frame 20; after that, each time at the center of the row After forming a first connecting portion 31 on one side of the row center, a first connecting portion 31 is formed symmetrically on the other side of the row center, so that the mask plate 10 and the frame 20 can be fixed symmetrically, reducing the welding process The position shift occurs; and, as a whole, the first connecting portions 31 of each row are sequentially formed from the middle to the two sides, so that the wrinkles on the mask 10 are far away from the mask area MA, and the mask 10 is improved.
  • the position accuracy of the vapor deposition opening when the first connecting portion 31 of each row is formed, the first connecting portion 31 at the center of the row is formed first to fix the middle of the mask plate 10 to the frame 20; after that, each time at the center of the row After forming a first connecting portion 31 on one side of the row center
  • the first connection portion 31 is formed row by row in a direction away from the mask area MA. That is, in FIG. 3 and FIG. 6, for the same connection area C1/C2, the first connection portion 31 of the row closest to the mask area MA is formed first; the row of first connection portions 31 farthest from the mask area MA is formed first. The portion 31 is finally formed, so that the wrinkles on the mask plate 10 are far away from the mask area MA.
  • the first connecting portions 31 on both sides of the mask area MA are symmetrically distributed.
  • two symmetrically distributed first connecting portions 31 on both sides of the mask area MA may be formed at the same time.
  • two laser emitting devices can be used to irradiate lasers at two target positions T at the same time to form two first connecting portions 31 welded to the frame 20 at the same time.
  • FIG. 19 is a flowchart of a manufacturing method of a mask assembly provided in some other embodiments of the present disclosure. As shown in FIG. 19, the manufacturing method further includes the following steps performed after steps S101 and S102:
  • Step S103 at least one second connecting portion 32 and at least one third connecting portion 33 are formed in each connecting area, and the overall arrangement of the second connecting portion 32, the third connecting portion 33 and the first connecting portion 31 is shown in FIG. 4 and As shown in FIG. 7, the second connecting portions 32 are arranged in the same column as the first connecting portions 31 in the first column, and each second connecting portion 32 is arranged in parallel with the first connecting portions 31 of one row; the third connecting portion 33 It is arranged in the same column as the first connecting portion 31 in the Nth column, and each third connecting portion 33 is arranged in parallel with one row of the first connecting portion 31; the first connecting portion 31 in the first column and the second connecting portion 32 are arranged in M rows , The first connecting portion 31 and the third connecting portion 33 in the Nth column are arranged in M rows.
  • the second connecting portion 32 and the third connecting portion 33 are both formed by irradiating the mask 10 with a laser. It can be understood that the second connecting portions 32 in the two connecting regions C1 and C2 are also symmetrically distributed. In actual production, any two symmetrical second connecting portions 32 can be formed at the same time, and any two symmetrical third connecting portions 33 can be formed at the same time, so as to improve production efficiency.

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Abstract

一种掩膜板组件及其制作方法，掩膜板组件包括：框架（20）；掩膜板（10），其具有掩膜区（MA）和位于所述掩膜区（MA）相对两侧的连接区（C1、C2）；位于每个所述连接区（C1、C2）中的多个第一连接部（31），其中，每个所述连接区（C1、C2）中的多个所述第一连接部（31）排成M行N列，每行包括多个所述第一连接部（31），每列包括至少一个所述第一连接部（31），在同一个所述连接区（C1、C2）中，任意相邻两行的连接部（31）交错设置，其中，M、N均为大于1的整数，所述掩膜板（10）通过多个所述第一连接部（31）固定在所述框架（20）上。

Description

掩膜板组件及其制作方法 技术领域
本公开涉及显示产品的制作领域，具体涉及一种掩膜板组件及其制作方法。
背景技术
有机发光二极管显示(Organic Light-Emitting Display，OLED)技术具有自发光、亮度高、画质好以及省电等优点，已经成为显示技术领域的主流发展方向。
在制作有机发光显示装置时，通常采用蒸镀的方式并借助精细金属掩膜板(Fine Metal Mask，FMM)，将有机发光材料蒸镀到显示背板上，利用掩膜板上的蒸镀开口，使得各种颜色的有机材料蒸镀到相应的位置上。
发明内容
本公开旨在提供一种掩膜板组件及其制作方法，以提高掩膜板的蒸镀开口的位置精度。
为了实现上述目的，本公开提供一种掩膜板组件，包括：
框架；
掩膜板，其具有掩膜区和位于所述掩膜区相对两侧的连接区；
位于每个所述连接区中的多个第一连接部，其中，每个所述连接区中的多个所述第一连接部排成M行N列，每行包括多个所述第一连接部，每列包括至少一个所述第一连接部，在同一个所述连接区中，任意相邻两行的连接部交错设置，其中，M、N均为大于1的整数，所述掩膜板通过多个所述第一连接部固定在所述框架上。
可选地，M＞2，第i列中的所述第一连接部的数量大于1，其中，0＜i≤N，且i为奇数。
可选地，每列中的所述第一连接部的数量均为1。
可选地，每行中的所述第一连接部的数量均为奇数。
可选地，每相邻两行所述第一连接部在列方向上的间距相等，每相邻两列所述第一连接部在行方向上的间距相等。
可选地，相邻两行所述第一连接部在列方向上的间距与相邻两列所述第一连接部在行方向上的间距相等。
可选地，所述第一连接部在所述框架上的正投影为直径在300μm～500μm之间的圆形，任意相邻两行所述第一连接部在列方向上的间距在1000μm～1300μm之间；
任意相邻两列所述第一连接部在行方向上的间距在1000μm～1300μm之间。
可选地，M为3。
可选地，所述掩膜板组件还包括位于每个所述连接区中的至少一个第二连接部和至少一个第三连接部，所述第二连接部与第一列所述第一连接部同列设置，且每个所述第二连接部均与其中一行所述第一连接部同行设置；所述第三连接部与第N列所述第一连接部同列设置，且每个所述第三连接部均与其中一行所述第一连接部同行设置；
第一列所述第一连接部与所述第二连接部排成M行，第N列所述第一连接部与所述第三连接部排成M行。
可选地，所述掩膜板沿列方向延伸的边缘与其紧邻的所述第一连接部在行方向上的最近距离在0.3mm～0.6mm之间。
可选地，所述掩膜区两侧的所述第一连接部对称分布。
可选地，所述第一连接部包括凸起部分和环绕所述凸起部分的凹陷部分，所述凸起部分背向所述框架凸出，所述凹陷部分的底端与所 述掩膜板的平坦部分的表面之间的垂直距离在3μm～8μm之间，所述凸起部分的顶端与所述凹陷部分的底端之间的垂直距离在10μm～20μm之间。
相应地，本公开还提供一种掩膜板组件的制作方法，包括：
提供框架和掩膜板，所述掩膜板具有掩膜区和位于所述掩膜板相对两侧的连接区；
在每个所述连接区形成多个第一连接部，并使所述掩膜板通过多个所述第一连接部与所述框架连接，其中，每个所述连接区中的多个所述第一连接部排成M行N列，每行包括多个所述第一连接部，每列包括至少一个所述第一连接部，在同一个所述连接区中，任意相邻两行的所述连接部交错设置，其中，M、N均为大于1的整数。
可选地，每行所述第一连接部的数量为大于3的奇数，每行中的多个所述第一连接部均匀分布，每个所述连接区中的第一连接部逐行形成，形成每行所述第一连接部的步骤包括：
确定与该行中的多个所述第一连接部一一对应的多个目标位置；
在行中点处的目标位置形成所述第一连接部，所述行中点为首尾两个所述目标位置的中点；
分别在首尾两个所述目标位置形成所述第一连接部；
在其余未形成第一连接部的所述目标位置逐个形成所述第一连接部。
可选地，所述在其余未形成第一连接部的所述目标位置逐个形成所述第一连接部的步骤包括：重复进行预设连接过程，直至每个所述目标位置均形成有所述第一连接部；
其中，所述预设连接过程包括：
对于当前形成的多个所述第一连接部，将每相邻两个所述第一连接部之间的中点作为分段中点；
分别在每个所述分段中点处的目标位置形成所述第一连接部。
可选地，在所述分别在每个所述分段中点处的目标位置形成所述第一连接部的步骤中，对于任意两个分段中点处的目标位置，若该两个目标位置到所述行中心的距离不同，则先在距离所述行中点较近的目标位置形成所述第一连接部，之后在距离所述行中点较远的目标位置形成所述第一连接部。
可选地，在每个所述连接区，沿远离所述掩膜区的方向逐行形成所述第一连接部。
可选地，所述掩膜区两侧的第一连接部对称分布；
位于所述掩膜区两侧、且对称分布的两个第一连接部同时形成。
可选地，所述制作方法还包括：
在每个所述连接区形成至少一个第二连接部和至少一个第三连接部，其中，所述第二连接部与第一列所述第一连接部同列设置，且每个所述第二连接部均与其中一行所述第一连接部同行设置；所述第三连接部与第N列所述第一连接部同列设置，且每个所述第三连接部均与其中一行所述第一连接部同行设置；第一列所述第一连接部与所述第二连接部排成M行，第N列所述第一连接部与所述第三连接部排成M行。
可选地，所述第一连接部、所述第二连接部和所述第三连接部均通过对所述掩膜板进行激光照射形成。
附图说明
附图是用来提供对本公开的进一步理解，并且构成说明书的一部分，与下面的具体实施方式一起用于解释本公开，但并不构成对本公开的限制。在附图中：
图1为对比示例中的掩膜板与框架的示意图；
图2为图1中连接区中的焊点分布示意图；
图3为本公开的一些实施例中提供的掩膜板组件的示意图；
图4为图3中两个连接区的示意图；
图5为图4中A1区域的放大图；
图6为本公开的另一些实施例中提供的掩膜板组件的示意图；
图7为图6中两个连接区的示意图；
图8为图7中A2区域的放大示意图；
图9为本公开的一些实施例中的第一连接部的俯视图；
图10为沿图9中A-A’线的剖视图；
图11为本公开的一些实施例中提供的掩膜板组件的制作方法流程图；
图12为本公开的一些实施例中提供的形成第j行第一连接部的流程图；
图13至图18为本公开实施例中形成每行第一连接部的过程示意图；
图19为本公开的另一些实施例中提供的掩膜板组件的制作方法流程图。
具体实施方式
以下结合附图对本公开的具体实施方式进行详细说明。应当理解的是，此处所描述的具体实施方式仅用于说明和解释本公开，并不用于限制本公开。
这里用于描述本公开的实施例的术语并非旨在限制和/或限定本公开的范围。例如，除非另外定义，本公开使用的技术术语或者科学术语应当为本公开所属领域内具有一般技能的人士所理解的通常意义。应该理解的是，本公开中使用的“第一”、“第二”以及类似的词语 并不表示任何顺序、数量或者重要性，而只是用来区分不同的组成部分。除非上下文另外清楚地指出，否则单数形式“一个”、“一”或者“该”等类似词语也不表示数量限制，而是表示存在至少一个。
将进一步理解的是，术语“包括”或者“包含”等类似的词语意指出现该词前面的元件或者物件涵盖出现在该词后面列举的元件或者物件及其等同，而不排除其他元件或者物件。“连接”或者“耦接”等类似的词语并非限定于物理的或者机械的连接，而是可以包括电性的连接，不管是直接的还是间接的。“上”、“下”、“左”、“右”等仅用于表示相对位置关系，当被描述对象的绝对位置改变后，则该相对位置关系也可能相应地改变。
在制作有机发光显示装置时，采用蒸镀的方式在显示基板的每个像素区形成有机发光层。其中，蒸镀过程中采用的掩膜板通常为精细金属掩膜板，其具有掩膜区，该掩膜区中设置有多个蒸镀开口。由于掩膜板的厚度很薄，因此，在掩膜板的制作过程中，在掩膜板上形成掩膜区后，通常会采用焊接的方式将掩膜板的两端固定在框架(Frame)上。并且，焊接过程中通常会在掩膜板两端进行拉伸，以使其产生一定强度。
图1为对比示例中的掩膜板与框架的示意图，图2为图1中连接区中的焊点分布示意图。如图1和图2所示，掩膜板10的两个连接区C均通过多个焊点11固定在框架20上，在每个连接区C中，多个焊点11呈规则的阵列分布，即，每相邻两行焊点11是对正的。这种情况下，在对掩膜板10进行拉伸(即，在掩膜板10的两端分别施加如图1中的箭头方向所示的拉力)时，连接区C的受力不均匀，容易导致掩膜板10的蒸镀开口在焊接过程中发生位置偏移，从而影响蒸镀开口的位置精度。尤其是对于大尺寸的掩膜板而言，由于其宽度较大，因此焊接时间会加长；并且大尺寸掩膜板的重量较大，拉伸力也相应 增大，从而导致蒸镀开口在焊接过程中的位置会发生较大变化。掩膜板10的蒸镀开口的位置精度降低时，利用掩膜板10所制备的有机发光显示装置将出现混色不良。
作为本公开的一方面，提供一种掩膜板组件，图3为本公开的一些实施例中提供的掩膜板组件的示意图，图4为图3中两个连接区的示意图。结合图3和图4所示，掩膜板组件包括框架20和掩膜板10，掩膜板10具有掩膜区MA和位于掩膜区MA相对两侧的连接区C1、C2。具体地，连接区C1和C2位于掩膜区MA的预设拉伸方向的两侧，该预设拉伸方向为：将掩膜板10与框架20固定连接时施加在掩膜板10的拉伸力的方向。例如，预设拉伸方向为掩膜板10的长度方向，这种情况下，掩膜区MA的沿长度方向的两侧分别设置有连接区C1和C2。
掩膜板组件还包括位于每个连接区C1/C2中的多个第一连接部31。其中，每个连接区C1/C2中的多个第一连接部31排成M行N列，每行包括多个第一连接部31，每行中的多个第一连接部31的排列方向垂直于预设拉伸方向。每列包括至少一个第一连接部31。在同一个连接区中，任意相邻两行的第一连接部31交错设置，其中，M、N均为大于1的正整数，掩膜板10通过多个第一连接部31固定在框架20上。
在一些实施例中，掩膜板10为金属掩膜板10，且焊接在框架20上，第一连接部31为掩膜板10受到激光照射后发生熔融所形成的焊点。
需要说明的是，任意相邻两行的第一连接部31交错设置是指：任意相邻两行的第一连接部31在行方向上交替设置，并且，任意相邻两行的第一连接部31在列方向上互不交叠，任意相邻两列的第一连接部31在行方向上互不交叠。也就是说，任意相邻两行中，任意两个第一 连接部31均不在同一列上；同一列中相邻的两个第一连接部31所在列并不相邻。例如，如图4中所示的连接区C1和C2，第1行中左起第1个第一连接部31位于第1列，第2行中左起第1个第一连接部31位于第2列，第1行中左起第2个第一连接部31位于第3列，第2行中左起第2个第一连接部31位于第4列，以此类推。
本公开实施例中所提供的掩膜板10尤其适用于宽幅掩膜板10，例如，掩膜板10的长度约为1200mm，宽度约为150mm；又例如，掩膜板10的长度约为1200mm，宽度约为350mm。对于长度约为1200mm的掩膜板10，当第一连接部31的行数过少时，能够承受的拉伸力不足。为了使连接区C1和C2中的第一连接部31整体能够承受足够的拉伸力，在本公开的一些实施例中，第一连接部31的行数M＞2。另外，发明人发现，当第一连接部31的行数过多时，在掩膜板10与框架20焊接过程中，掩膜板10上产生的褶皱较多，且连接区C1和C2在列方向上的尺寸有限，使得第一连接部31的行数也有限。因此，为了减少掩膜板10上的褶皱，在一些具体示例中，每个连接区中的第一连接部31的行数M为3，连接区C1和C2在列方向的尺寸均为5mm左右。每行中的第一连接部31的数量均为奇数。
在一些实施例中，如图4所示，第i列中的第一连接部31的数量大于1，其中，0＜i≤N，且i为奇数。需要说明的是，在本公开实施例中，第1列为图6中最左侧的一列；第i列为图6中从左至右的第i列。
当M＝3时，第i+1列(例如，第2列、第4列、第6列等)中的第一连接部31的数量为1；当M＞3时，第i+1列中的第一连接部31的数量大于1。具体地，第1行中的第1个第一连接部31与第3行中的第1个第一连接部31位于第1列，第2行中的第1个第一连接部31位于第2列，第1行中的第2个第一连接部31与第3行中的第2 个第一连接部31位于第3列，第2行中的第2个第一连接部31位于第4列，以此类推。
图5为图4中A1区域的放大图，结合图4和图5所示，可选地，每相邻两行第一连接部31在列方向上的间距相等，均为d1；每相邻两列第一连接部31在行方向的间距相等，均为d2，从而使连接区C1/C2整体受力均匀。此时，第2行第k列的第一连接部31、第1行第k-1列第一连接部31、第1行第k+1列第一连接部31的中心连线构成等腰三角形；第2行第k列的第一连接部31、第3行第k-1列第一连接部31、第3行第k+1列第一连接部31的中心连线构成等腰三角形。k为大于1小于N的偶数。当然，也可以通过调节d1和d2，使得第2行第k列的第一连接部31、第1行第k-1列第一连接部31、第1行第k+1列第一连接部31的中心连线构成等边三角形。
需要说明的是，本公开实施例中，相邻两行第一连接部31在列方向上的间距d1是指：分别位于相邻两行中的两个第一连接部31的中心在列方向上的距离；相邻两列第一连接部31在行方向的间距d2是指：分别位于相邻两列中的两个第一连接部31的中心在行方向上的距离。同理，同一行中相邻两个第一连接部31的间距为：同一行中相邻两个第一连接部31的中心之间的距离；同一列中相邻两个第一连接部31的间距为：同一列中相邻两个第一连接部31的中心之间的距离。
进一步地，相邻两行第一连接部31在列方向上的间距d1与相邻两列第一连接部31在行方向的间距d2相等。此时，如图4所示，第1行中的第1个第一连接部31、第2行中的第一连接部31、第3行中的第2个第一连接部31位于一条直线上，该直线与行方向之间呈45°夹角。第2行第k列的第一连接部31、第1行第k-1列第一连接部31、第1行第k+1列第一连接部31的中心连线构成等腰直角三角形。
如图5所示，在一具体示例中，第一连接部31在框架20上的正 投影为直径d在300μm～500μm之间的圆形，任意相邻两行第一连接部31在列方向上的间距d1在1000μm～1300μm之间，任意相邻两列第一连接部31在行方向上的间距d2在1000μm～1300μm之间。在实际应用中，d1和d2均大于d。例如，d在300μm～350μm之间，d1和d2均在1000μm～1100μm之间；又例如，d在350μm～400μm之间，d1和d2均在1100μm～1200μm之间；又例如，d在400μm～500μm之间，d1和d2均在1200μm～1300μm之间。在一具体示例中，d＝300μm，d1＝d2＝1000μm，当连接区中的第一连接部31采用图中的排布方式时，每一行中的任意相邻两个第一连接部31的间距d3为2000μm，奇数列中的相邻两个第一连接部31的间距d4为2000μm。
掩膜板10沿列方向延伸的边缘与其紧邻的第一连接部31在行方向上的最近距离在0.3mm～0.6mm之间。其中，掩膜板10沿列方向延伸的边缘为左右两侧的边缘。对于左右两侧边缘中的任意一者，其紧邻的第一连接部31是指，与边缘最接近的第一连接部31。例如，对于掩膜板10的左侧边缘，其紧邻的第一连接部31为位于第1列的第一连接部31，该第一连接部31与左侧边缘在行方向上的最近距离为：第一连接部31的左端与左侧边缘之间的垂直距离；对于掩膜板10的右侧边缘，其紧邻的第一连接部31为位于最后一列的第一连接部31，该第一连接部31与右侧边缘在行方向上的最近距离为：第一连接部31的右端与右侧边缘之间的垂直距离。
如图4所示，掩膜区MA两侧的第一连接部31对称分布。具体地，在每个连接区中，靠近掩膜区MA的一行为第一行，远离掩膜区MA的一行为最后一行，掩膜区MA上侧的第m行中的多个第一连接部31与掩膜区MA下侧的第m行中的多个第一连接部31在列方向上一一对正，1≤m≤M，m为整数。
如图3和图4所示，掩膜板组件还包括位于每个连接区C1/C2中 的至少一个第二连接部32和至少一个第三连接部33，第二连接部32与第一列第一连接部31同列设置，且每个第二连接部32均与其中一行第一连接部31同行设置。第三连接部33与第N列第一连接部31同列设置，且每个第三连接部33均与其中一行第一连接部31同行设置。第一列第一连接部31与第二连接部32排成M行，第N列第一连接部31与第三连接部33排成M行。对于图4中所示的第一连接部31的行数为3行的情况，第二连接部32位于第一列，第三连接部33位于最后一列，第二连接部32和第三连接部33均与第二行第一连接部31同行设置。
图6为本公开的另一些实施例中提供的掩膜板组件的示意图，图7为图6中两个连接区的示意图，图8为图7中A2区域的放大示意图。结合图6至图8所示，在另一些实施例中，每个连接区C1/C2的多个第一连接部31同样排成多行多列，且任意相邻两行的第一连接部31交错设置。与图3所示的实施例中不同的是，在图6至图8中，每列中的第一连接部31的数量均为1。即，当M＞2时，任意两行的第一连接部31是交错排布的。
与图3所示的实施例相同的，在图6至图8中，每个连接区中的第一连接部31的行数M为3，每行中的第一连接部31的数量均为奇数。每相邻两行第一连接部31在列方向上的间距d1相等，每相邻两列第一连接部31在行方向上的间距d2相等。进一步地，相邻两行第一连接部31在列方向的间距d1与相邻两列第一连接部31在行方向上的间距d2相等。这种情况下，连接区C1/C2中的多个第一连接部31可以分为沿行方向排列的多组，每组包括三个第一连接部31，例如，第一行中的第一个连接部31、第二行中的第一个第一连接部31、第三行中的第一个第一连接部31组成第一组；第二行中的第二个第一连接部31、第二行中的第二个第一连接部31、第三行中的第二个第一连接 部31组成第二组；以此类推。每组中的三个第一连接部31位于与行方向呈45°夹角的直线上。
与图3所示的实施例相同的，在图6至图8中，第一连接部31在框架20上的正投影为直径d在300μm～500μm之间的圆形，并且，任意相邻两行第一连接部31在列方向上的间距d1在1000μm～1300μm之间；任意相邻两列第一连接部31在行方向上的间距d2在1000μm～1300μm之间。例如，d＝300μm，d1＝d2＝1000μm。可以理解的是，当采用图6至图8所示的排布方式，且d2＝1000μm时，每一行中的任意相邻两个第一连接部31的间距d3为3000μm。
另外，与图3所示的实施例相同的，在图6中，掩膜板10沿列方向延伸的边缘与其紧邻的第一连接部31在行方向上的最近距离在0.3mm～0.6mm之间。掩膜区MA两侧的第一连接部31对称分布。每个连接区C1/C2中还设置有至少一个第二连接部32和至少一个第三连接部33，所述第二连接部32与第一列第一连接部31同列设置，且每个所述第二连接部32均与其中一行第一连接部31同行设置；所述第三连接部33与第N列第一连接部31同列设置，且每个所述第三连接部33均与其中一行第一连接部31同行设置；第一列所述第一连接部31与所述第二连接部32排成M行，第N列所述第一连接部31与所述第三连接部33排成M行。对于图6至图8所示的排布方式，每个连接区C1/C2中设置有两个第二连接部32和两个第三连接部33，两个第二连接部32分别位于第二行第一列和第三行第一列；两个第三连接部33分别位于第一行最后一列和第二行最后一列。
本公开实施例中的第一连接部31、第二连接部32和第三连接部33可以为通过激光焊接工艺所形成的焊点，图9为本公开的一些实施例中的第一连接部的俯视图，图10为沿图9中A-A’线的剖视图，如图9和图10所示，第一连接部31包括凸起部分31a和环绕凸起部分 31a的凹陷部分31b，凸起部分31a背向框架20凸出，凹陷部分31b朝向框架20弯曲。
其中，凸起部分31a的顶端与凹陷部分31a的底端之间的垂直距离h1在10μm～20μm之间，凸起部分31a在框架20上的投影为圆形或近似为圆形，其直径d0在40μm～60μm之间。凹陷部分31b的深度h2在3μm～8μm之间。在一具体示例中，凸起部分31a的顶端与凹陷部分31a的底端之间的垂直距离h1为15μm，凹陷部分31b的深度h2为5μm，凸起部分31a的直径为50μm。需要说明的是，凸起部分31a顶端为远离框架20的一端，凹陷部分31b的底端为靠近框架20的一端。凹陷部分31b的深度h2为凹陷部分31b的底端到掩膜板10平坦部分的表面的垂直距离。
第二连接部32和第三连接部33的形貌与第一连接部31相同，这里不再赘述。
作为本公开的另一方面，还提供一种上述掩膜板组件的制作方法。图11为本公开的一些实施例中提供的掩膜板组件的制作方法流程图，结合图3、图6和图11所示，掩膜板组件的制作方法包括：
S101、提供框架20和掩膜板10，掩膜板10具有掩膜区MA和位于掩膜板10相对两侧的连接区C1和C2。这里的“相对两侧”具体可以为：沿掩膜板10长度方向的相对两侧。
S102、在每个连接区形成多个第一连接部31，并使得掩膜板10通过多个第一连接部31与框架20连接，其中，每个连接区中的多个第一连接部31排成M行N列，每行包括多个第一连接部，每列包括至少一个第一连接部31，在同一个连接区中，任意相邻两行的第一连接部31交错设置，其中，M、N均为大于1的正整数。
在一些实施例中，每行第一连接部31的数量为大于3的奇数，且每行中的多个第一连接部31均匀分布。每个连接区中的第一连接部 31逐行形成。图12为本公开的一些实施例中提供的形成每行第一连接部的流程图，图13至图18为本公开实施例中形成第j行第一连接部的过程示意图，图14至图18中每个第一连接部31上方的序号表示第一连接部31的形成次序。如图12所示，形成第j(1≤j≤M，j为整数)行第一连接部31的过程包括步骤S201至步骤S204。
步骤S201、确定与第j行中的多个第一连接部一一对应的多个目标位置T。多个目标位置T分布如图13所示，每个目标位置T用于形成第一连接部31。
步骤S202、在行中点的目标位置T形成第一连接部31，如图14中标示序号“1”的第一连接部31。其中，行中点为第j行中的首尾两个目标位置T的中点。
步骤S203、分别在第j行中的首尾两个目标位置T形成第一连接部31，如图15中标示序号“2”和“3”的第一连接部31。其中，对第j行中首尾两个目标位置T处的第一连接部31形成的先后顺序不作限定。
步骤S204、在其余未形成第一连接部31的目标位置T逐个形成第一连接部31，如图16至图18所示。其中，步骤S204包括：重复进行预设连接过程，直至每个目标位置T均形成有第一连接部。具体地，预设连接过程包括：
S2041、对于当前形成的多个第一连接部31，将每相邻两个第一连接部31之间的中点作为分段中点。
S2042、分别在每个分段中点处的目标位置T形成第一连接部31。
可选地，在步骤S2042中，对于任意两个分段中点处的目标位置T，若该两个目标位置T到行中心的距离不同，则先在距离行中点较近的目标位置T形成第一连接部，之后在距离行中点较远的目标位置T形成第一连接部。例如，在得到图17中的9个第一连接部31后，每 相邻两个第一连接部31之间仅存在一个未形成有第一连接部31的目标位置T，此时，依次形成标示序号“10”、“11”、“12”……“17”的第一连接部31。可见，在每次进行步骤S2041时，若行中心的两侧均存在多个分段中点，那么，每次在行中心的一侧形成一个第一连接部31之后，均在行中心的另一侧对称性地形成一个第一连接部31。
需要说明的是，无论连接区中的第一连接部31采用图4中的排布方式，还是图7中的排布方式，每行第一连接部31的形成过程均可以如图13至图18中所示。还需要说明的是，为了体现每一行中的多个第一连接部31的形成次序，图13至图18中仅以每行包括17个第一连接部31为例进行示意，但在实际生产中，每行中的第一连接部31的数量是可以远大于17个的，例如，对于宽度为150mm的掩膜板10，每行中的第一连接部31的数量为100个左右，对于宽度为350mm的掩膜板10，每行中的第一连接部31的数量为200个左右。
可选地，每个第一连接部31均可以采用对掩膜板10进行激光照射而形成。
在本公开实施例中，在形成每行的第一连接部31时，先形成行中心处的第一连接部31，以将掩膜板10中部与框架20固定；之后，每次在行中心的一侧形成一个第一连接部31之后，均在行中心的另一侧对称性地形成一个第一连接部31，从而可以对称性地将掩膜板10与框架20固定，减少焊接过程中发生位置偏移；并且，整体而言，每行的第一连接部31是从中间向两侧依次形成的，从而使掩膜板10上的褶皱远离掩膜区MA，提高掩膜板10的蒸镀开口的位置精度。
在一些实施例中，在每个连接区C1和C2，沿远离掩膜区MA的方向逐行形成第一连接部31。即，在图3和图6中，对于同一个连接区C1/C2而言，离掩膜区MA最近的一行第一连接部31最先形成；离掩膜区MA最远的一行第一连接部31最后形成，从而使掩膜板10上 的褶皱远离掩膜区MA。
在一些实施例中，掩膜区MA两侧的第一连接部31对称分布，这种情况下，位于掩膜区MA两侧、且对称分布的两个第一连接部31可以同时形成。在实际生产中，可以利用两个激光发射装置同时在两个目标位置T进行激光照射，以同时形成两个与框架20焊接的第一连接部31。
图19为本公开的另一些实施例中提供的掩膜板组件的制作方法流程图，如图19所示，所述制作方法还包括在步骤S101和S102之后进行的以下步骤：
步骤S103、在每个连接区形成至少一个第二连接部32和至少一个第三连接部33，第二连接部32、第三连接部33和第一连接部31的整体排布如图4和图7中所示，其中，第二连接部32与第一列第一连接部31同列设置，且每个第二连接部32均与其中一行第一连接部31同行设置；第三连接部33与第N列第一连接部31同列设置，且每个第三连接部33均与其中一行第一连接部31同行设置；第一列第一连接部31与第二连接部32排成M行，第N列第一连接部31与第三连接部33排成M行。
其中，第二连接部32和第三连接部33均通过对掩膜板10进行激光照射形成。可以理解的是，两个连接区C1和C2中的第二连接部32也是对称分布的。在实际生产中，任意两个对称的第二连接部32可以同时形成，任意两个对称的第三连接部33可以同时形成，以提高生产效率。
可以理解的是，以上实施方式仅仅是为了说明本公开的原理而采用的示例性实施方式，然而本公开并不局限于此。对于本领域内的普通技术人员而言，在不脱离本公开的精神和实质的情况下，可以做出各种变型和改进，这些变型和改进也视为本公开的保护范围。

Claims (20)

  1. 一种掩膜板组件，包括：
    框架；
    掩膜板，其具有掩膜区和位于所述掩膜区相对两侧的连接区；
    位于每个所述连接区中的多个第一连接部，其中，每个所述连接区中的多个所述第一连接部排成M行N列，每行包括多个所述第一连接部，每列包括至少一个所述第一连接部，在同一个所述连接区中，任意相邻两行的连接部交错设置，其中，M、N均为大于1的整数，所述掩膜板通过多个所述第一连接部固定在所述框架上。
  2. 根据权利要求1所述的掩膜板组件，其中，M＞2，第i列中的所述第一连接部的数量大于1，其中，0＜i≤N，且i为奇数。
  3. 根据权利要求1所述的掩膜板组件，其中，每列中的所述第一连接部的数量均为1。
  4. 根据权利要求1至3中任意一项所述的掩膜板组件，其中，每行中的所述第一连接部的数量均为奇数。
  5. 根据权利要求1至3中任意一项所述的掩膜板组件，其中，每相邻两行所述第一连接部在列方向上的间距相等，每相邻两列所述第一连接部在行方向上的间距相等。
  6. 根据权利要求5所述的掩膜板组件，其中，相邻两行所述第一连接部在列方向上的间距与相邻两列所述第一连接部在行方向上的间 距相等。
  7. 根据权利要求1至3中任意一项所述的掩膜板组件，其中，所述第一连接部在所述框架上的正投影为直径在300μm～500μm之间的圆形，任意相邻两行所述第一连接部在列方向上的间距在1000μm～1300μm之间；
    任意相邻两列所述第一连接部在行方向上的间距在1000μm～1300μm之间。
  8. 根据权利要求1至3中任意一项所述的掩膜板组件，其中，M为3。
  9. 根据权利要求1至3中任意一项所述的掩膜板组件，其中，所述掩膜板组件还包括位于每个所述连接区中的至少一个第二连接部和至少一个第三连接部，所述第二连接部与第一列所述第一连接部同列设置，且每个所述第二连接部均与其中一行所述第一连接部同行设置；所述第三连接部与第N列所述第一连接部同列设置，且每个所述第三连接部均与其中一行所述第一连接部同行设置；
    第一列所述第一连接部与所述第二连接部排成M行，第N列所述第一连接部与所述第三连接部排成M行。
  10. 根据权利要求1至3中任意一项所述的掩膜板组件，其中，所述掩膜板沿列方向延伸的边缘与其紧邻的所述第一连接部在行方向上的最近距离在0.3mm～0.6mm之间。
  11. 根据权利要求1至3中任意一项所述的掩膜板组件，其中， 所述掩膜区两侧的所述第一连接部对称分布。
  12. 根据权利要求1至3中任意一项所述的掩膜板组件，其中，所述第一连接部包括凸起部分和环绕所述凸起部分的凹陷部分，所述凸起部分背向所述框架凸出，所述凹陷部分的底端与所述掩膜板的平坦部分的表面之间的垂直距离在3μm～8μm之间，所述凸起部分的顶端与所述凹陷部分的底端之间的垂直距离在10μm～20μm之间。
  13. 一种掩膜板组件的制作方法，包括：
    提供框架和掩膜板，所述掩膜板具有掩膜区和位于所述掩膜板相对两侧的连接区；
    在每个所述连接区形成多个第一连接部，并使所述掩膜板通过多个所述第一连接部与所述框架连接，其中，每个所述连接区中的多个所述第一连接部排成M行N列，每行包括多个所述第一连接部，每列包括至少一个所述第一连接部，在同一个所述连接区中，任意相邻两行的所述连接部交错设置，其中，M、N均为大于1的整数。
  14. 根据权利要求13所述的制作方法，其中，每行所述第一连接部的数量为大于3的奇数，每行中的多个所述第一连接部均匀分布，每个所述连接区中的第一连接部逐行形成，形成每行所述第一连接部的步骤包括：
    确定与该行中的多个所述第一连接部一一对应的多个目标位置；
    在行中点处的目标位置形成所述第一连接部，所述行中点为首尾两个所述目标位置的中点；
    分别在首尾两个所述目标位置形成所述第一连接部；
    在其余未形成第一连接部的所述目标位置逐个形成所述第一连接 部。
  15. 根据权利要求14所述的制作方法，其中，所述在其余未形成第一连接部的所述目标位置逐个形成所述第一连接部的步骤包括：重复进行预设连接过程，直至每个所述目标位置均形成有所述第一连接部；
    其中，所述预设连接过程包括：
    对于当前形成的多个所述第一连接部，将每相邻两个所述第一连接部之间的中点作为分段中点；
    分别在每个所述分段中点处的目标位置形成所述第一连接部。
  16. 根据权利要求15所述的制作方法，其中，在所述分别在每个所述分段中点处的目标位置形成所述第一连接部的步骤中，对于任意两个分段中点处的目标位置，若该两个目标位置到所述行中心的距离不同，则先在距离所述行中点较近的目标位置形成所述第一连接部，之后在距离所述行中点较远的目标位置形成所述第一连接部。
  17. 根据权利要求14所述的制作方法，其中，在每个所述连接区，沿远离所述掩膜区的方向逐行形成所述第一连接部。
  18. 根据权利要求13至17中任意一项所述的制作方法，其中，所述掩膜区两侧的第一连接部对称分布；
    位于所述掩膜区两侧、且对称分布的两个第一连接部同时形成。
  19. 根据权利要求13至17中任意一项所述的制作方法，其中，所述制作方法还包括：
    在每个所述连接区形成至少一个第二连接部和至少一个第三连接部，其中，所述第二连接部与第一列所述第一连接部同列设置，且每个所述第二连接部均与其中一行所述第一连接部同行设置；所述第三连接部与第N列所述第一连接部同列设置，且每个所述第三连接部均与其中一行所述第一连接部同行设置；第一列所述第一连接部与所述第二连接部排成M行，第N列所述第一连接部与所述第三连接部排成M行。
  20. 根据权利要求19所述的制作方法，其中，所述第一连接部、所述第二连接部和所述第三连接部均通过对所述掩膜板进行激光照射形成。
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