WO2019057579A1 - Machine de finissage - Google Patents

Machine de finissage Download PDF

Info

Publication number
WO2019057579A1
WO2019057579A1 PCT/EP2018/074584 EP2018074584W WO2019057579A1 WO 2019057579 A1 WO2019057579 A1 WO 2019057579A1 EP 2018074584 W EP2018074584 W EP 2018074584W WO 2019057579 A1 WO2019057579 A1 WO 2019057579A1
Authority
WO
WIPO (PCT)
Prior art keywords
tool
finishing machine
rotor
drive
stator
Prior art date
Application number
PCT/EP2018/074584
Other languages
German (de)
English (en)
Inventor
Markus Mueller
Raphael Koenig
Daniel Sonntag
Original Assignee
Supfina Grieshaber Gmbh & Co. Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Supfina Grieshaber Gmbh & Co. Kg filed Critical Supfina Grieshaber Gmbh & Co. Kg
Priority to CN201880054747.1A priority Critical patent/CN111093899A/zh
Priority to CH00328/20A priority patent/CH715468B1/de
Publication of WO2019057579A1 publication Critical patent/WO2019057579A1/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00—Drives or gearings; Equipment therefor
    • B24B47/10—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
    • B24B47/12—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces by mechanical gearing or electric power
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping

Definitions

  • the invention relates to a finishing machine, with a tool that has a rotating effective surface for
  • Rotary drive of the tool a drive is provided, which is the tool to a perpendicular to the active surface
  • the present invention has for its object to provide a fining machine with the simplest possible structure.
  • This object is achieved according to the invention in a finishing machine of the type mentioned in that the drive is designed in the form of a torque motor having a stator and a rotor, wherein the rotor is connected to the tool without the interposition of other transmission elements and the tool to the
  • a compact drive which makes it possible to arrange further bulky additional components of a fine-machining machine such that
  • the torque motor according to the invention is low-maintenance and is therefore particularly suitable for fine-machining machines that are permanently in use.
  • the drive according to the invention is low-vibration, which further simplifies the construction of the fine-machining machine; it can be a relatively simple frame
  • stator-side housing with a frame of
  • Finishing machine can be connected.
  • the supply of the electrical energy required for the torque motor is simplified.
  • a stator-side housing for supplying a machining fluid (in particular an emulsion for cooling and / or lubrication in a working area in which the active surface of the tool is in contact with the workpiece to be machined).
  • Rotor housing part bounded by a concentric to the axis of rotation cavity. This is particularly advantageous if the rotor is located inside with respect to the stator
  • Rotor housing parts can be used to arrange other components of the finishing machine. This may be in the simplest case to electrical, pneumatic or hydraulic lines.
  • Another way to use the cavity of the rotor is a sensor element, which serves to detect a processing parameter, in the cavity
  • This may, for example, a
  • Act sensor element by means of which a material removal, which results from the machining of the workpiece detected.
  • the ablated layer thickness can be detected, from which then the remaining (residual) thickness of
  • Sensor element other processing parameters (for example, temperature and / or pressure) detected.
  • Another way to use the cavity of the rotor is to arrange an assembly in the cavity, which comprises at least one bearing, by means of which the tool and the rotor are rotatably mounted about the axis of rotation on a stator housing.
  • a cavity of the rotor can be used optimally and a particularly compact drive unit can be provided; in the radially outer environment of the stator creates free space.
  • At least one tool of the finishing machine by means of an axial-radial bearing is mounted on a stator housing part. This makes it possible to provide a tool which is particularly precisely aligned with regard to both its axial position and its radial position, with respect to the axis of rotation. This is particularly advantageous when the finishing machine has multiple tools.
  • Finishing machine has multiple tools, it is preferred if at least one tool of
  • Finishing machine is mounted by means of a tapered roller bearing on a stator housing.
  • a particularly stable and inexpensive storage of a tool is possible.
  • For a tolerance compensation is advantageously provided that between the
  • Such a compensation element forms in the context of the present invention, no transmission element
  • a transmission element is rather understood an element by means of which a transfer or reduction or a deflection of a drive movement is realized.
  • Finishing machine is or are flat.
  • the tool is a grinding tool, lapping tool or polishing tool.
  • Finishing machine is designed in the form of a double-sided surface grinding machine.
  • Grinding machine has two grinding tools with two mutually facing flat active surfaces that limit a working area.
  • a separate drive in each case in the form of a torque motor, is provided for each of these grinding tools.
  • Fig. 1 is a perspective view of a
  • Fig. 2 is a perspective view of a first
  • Fig. 3 is a perspective view of a second
  • FIG. 1 Assembly of the fine machining machine according to FIG. 1.
  • an embodiment of a finishing machine is shown, which is generally designated by the reference numeral 10.
  • the reference numeral 10 In the
  • Finishing machine 10 is a
  • Double side grinding machine This one has
  • Machine frame 12 which has a stationary frame member 14 in the form of a cylindrical wall, the
  • Receiving screws 16 is used, by means of which a first assembly 18 shown in Figure 2 is attached to the frame 12.
  • the frame 12 also has a reference to the
  • the carriage 22 has a slide member 24, for example in the form of a
  • the first assembly 18 has a receiving disc 30 for receiving and cooling for a first, lower
  • Abrasive tool 32 which is covered with an abrasive layer 34 having a flat active surface 36 of the
  • Abrasive tool 32 forms.
  • the second assembly 28 has a receiving disk 38 for receiving and cooling a second, upper grinding tool 40 in a corresponding manner. This one is with one Abrasive layer 42 is provided, which forms a flat active surface 44.
  • a limited between the mutually parallel active surfaces 36 and 44 working space 46 is used to arrange facing away from each other sides to be sanded workpieces.
  • a rotor disk 48 is provided, with a workpiece disk 50, in which
  • Nests 52 are provided for the arrangement of workpieces to be ground.
  • the workpiece disk 50 is supported between an inner ring 54 and a fixed one
  • the inner ring 54 is at one
  • Rotation axis 58 rotatably driven around.
  • Transfer workpiece disc 50 which rolls on the outer rim 56. Characterized in that the nests 52 eccentric with respect to a central axis of the workpiece disc 50
  • a rotary drive of the rotor disc 48 is designated overall by the reference numeral 60.
  • the drive 60 comprises a drive motor 62, a diagrammatically illustrated 90 ° bevel gear 64 and a drive shaft 66, which
  • Inner rim 54 is provided.
  • the drive shaft 66 extends through a cavity 70 which is concentric with the axis of rotation 58 and which is delimited by a rotor housing part 72 (see FIG. 2) which is connected to an electric rotor 74.
  • Rotor housing part 72 is arranged by means of radially inwardly disposed screws 76 and by means of radially outside
  • Screw 78 is connected to a collar part 80 which is also concentric with the axis of rotation 58 and rotates together with the rotor 74 and the rotor housing part 72 about the rotation axis 58.
  • the collar 80 is further connected to a bearing ring 82 which forms an outer ring of an axial-radial bearing, generally designated by reference numeral 84.
  • the first assembly 18 further includes a stator base plate 86 which is connected to a hollow cylindrical Statorgekoruseteil 88 which defines an electric stator 90 radially outward.
  • the electric stator 90 and the stator housing part 88 are connected to each other via another stator housing part 92
  • the electric rotor 74 and the electric stator 90 together form a torque motor 96.
  • the electric rotor 74 rotates together the rotor housing part 72 and the collar part 80, which in turn is connected to a support plate 98, which with the
  • Grinding tool 32 carries the rotor housing part 72, a total annular index element 100, which cooperates with a (not shown) measuring sensor.
  • Measuring sensor is preferably part of the control of the torque motor 96, so that a monitoring and control of
  • the assembly 28 comprises a carrier disc 102 for attachment of the receiving disc 38, which in turn is connected to the second grinding tool 40 (see Figure 1).
  • the carrier disk 102 is provided with a
  • Rotor shaft 104 connected to which inner rings 106 of tapered roller bearings 108 are arranged.
  • the rotor shaft 104 is connected via a collar disc 110 with an electric rotor 112.
  • the electric rotor 112 cooperates with an electric stator 114.
  • the rotor 112 and the stator 114 together form a torque motor 116.
  • the electric stator 114 is bounded by a
  • the support plate 122 is radially outwardly beyond the
  • Screw 26 connected to the carriage 22. Radial inside is the carrier disk 122 with another
  • Statorgekoruseteil 124 which carries bearing rings 126 which form the outer rings of the tapered roller bearings 108.
  • the electric stator 112 defines a cavity 128, which serves for the arrangement of the above-described, with respect to the rotor 112 radially inner components, in particular the bearing 108 and the rotor shaft 104th
  • the components rotating together with the rotor 112 rotate about a rotation axis 130. This rotation axis is aligned with the rotation axis 58 of the first torque motor 96 of the first assembly 18.
  • the rotor shaft 104 is hollow. This allows the implementation of a supply line 132 of a
  • Carrier disk 102 comprises a compensation element 135 in the form a spherical cap, which enables an angular compensation of the attached to the receiving disk 38 second grinding tool 40.
  • the assemblies 18 and 28 described above form compact drive units for the
  • Replacement assembly to be mounted when a torque motor 96 or 116 is to be maintained.
  • the assembly 18 and 28 each include cooling means 134, 136 for cooling the torque motors 96 and 116, respectively.
  • the cooling means 134 of the torque motor 96 includes a radially inward accessible inlet 138 and an outlet 140. Between the inlet 138 and the outlet 140 a cooling jacket 142 is arranged.
  • the cooling device 136 of the torque motor 116 has an identical structure. Below is an optional cooling
  • An inlet of this optional system is formed, for example, by a coolant inlet 144 (see Figure 3) disposed in the carrier disk 122.
  • Cooling chambers 146 and 148 The refrigerator 146 feeds a Line 150, passes through which cooling fluid into the working space 46 and then from above on the drive pulley 68 of the rotary actuator 60 strikes. From there, the cooling fluid passes through radial bores 152 in the receiving disk 30, so that their cooling channels 154 are supplied.
  • the cooling channels 154 are closable radially on the outside by throttle element 156, so that a fluid flow of the cooling fluid is controllable.
  • the second cooling chamber 148 (see FIG. 3) feeds corresponding cooling channels 158 of the receiving disk 38.
  • Throttling elements 160 are also provided there for controlling a fluid flow.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
  • Turning (AREA)

Abstract

L'invention concerne une machine de finissage, comprenant un outil qui présente une surface active rotative (36, 44) destinée à l'usinage d'une pièce, un mécanisme d'entraînement destiné à l'entraînement en rotation de l'outil permettant d'entraîner l'outil autour d'un axe de rotation (58) perpendiculaire à la surface active, le mécanisme d'entraînement étant conçu sous la forme d'un moteur couple pourvu d'un stator et d'un rotor, le rotor étant relié à l'outil sans faire intervenir d'autres éléments d'engrenage, et entraînant l'outil autour de l'axe de rotation (58).
PCT/EP2018/074584 2017-09-19 2018-09-12 Machine de finissage WO2019057579A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201880054747.1A CN111093899A (zh) 2017-09-19 2018-09-12 精加工机床
CH00328/20A CH715468B1 (de) 2017-09-19 2018-09-12 Doppelseiten-Planschleifmaschine.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102017121692.8A DE102017121692A1 (de) 2017-09-19 2017-09-19 Feinbearbeitungsmaschine
DE102017121692.8 2017-09-19

Publications (1)

Publication Number Publication Date
WO2019057579A1 true WO2019057579A1 (fr) 2019-03-28

Family

ID=63832357

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2018/074584 WO2019057579A1 (fr) 2017-09-19 2018-09-12 Machine de finissage

Country Status (4)

Country Link
CN (1) CN111093899A (fr)
CH (1) CH715468B1 (fr)
DE (1) DE102017121692A1 (fr)
WO (1) WO2019057579A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102022125705A1 (de) * 2022-10-05 2024-04-11 Atm Qness Gmbh Teller-Schleif-/Poliergerät

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6250997B1 (en) * 1998-10-27 2001-06-26 Speedfam-Ipec Co Ltd Processing machine
US20110064971A1 (en) * 2009-09-17 2011-03-17 Asahi Glass Company, Limited Glass substrate manufacturing method, glass substrate polishing method, glass substrate polishing apparatus and glass substrate
EP2689891A2 (fr) 2012-07-25 2014-01-29 FLP Microfinishing GmbH Machine à deux disques pour l'usinage de surface
CN104400622A (zh) * 2014-10-17 2015-03-11 成都泰美克晶体技术有限公司 一种双工位研磨机
CN104400621A (zh) * 2014-10-17 2015-03-11 成都泰美克晶体技术有限公司 一种新型双面研磨机上、下研磨盘的传动分离装置
DE112014003930T5 (de) * 2013-08-28 2016-05-19 Sumco Techxiv Corporation Verfahren und Vorrichtung zum Polieren von Halbleiterwafern
US20170234365A1 (en) * 2016-02-17 2017-08-17 Disco Corporation Processing apparatus

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE29623999U1 (de) * 1995-06-13 2001-03-08 Bertsche Engineering Corp Direkt angetriebener, mehrachsiger Drehspindelkopf für Fräsmaschinen
JP2000052233A (ja) * 1998-08-10 2000-02-22 Sony Corp 研磨装置
ES2169666B1 (es) * 2000-05-17 2004-02-16 Danobat Maquina rectificadora con cabezal portamuela con posibilidad de giro mediante accionamiento directo.
DE102006028164B4 (de) * 2006-06-16 2009-04-02 Satisloh Ag Schleif- und Poliermaschine zum Schleifen und/oder Polieren von Werkstücken in optischer Qualität
CN202271254U (zh) * 2011-07-07 2012-06-13 曹建青 一种双端面磨床用行星式工件夹持装置
CN103331661B (zh) * 2013-06-06 2015-09-16 燕山大学 电动伺服高精密双面研磨机
CN103894920A (zh) * 2014-03-26 2014-07-02 广东工业大学 一种平面研磨机的下盘驱动结构

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6250997B1 (en) * 1998-10-27 2001-06-26 Speedfam-Ipec Co Ltd Processing machine
US20110064971A1 (en) * 2009-09-17 2011-03-17 Asahi Glass Company, Limited Glass substrate manufacturing method, glass substrate polishing method, glass substrate polishing apparatus and glass substrate
EP2689891A2 (fr) 2012-07-25 2014-01-29 FLP Microfinishing GmbH Machine à deux disques pour l'usinage de surface
DE112014003930T5 (de) * 2013-08-28 2016-05-19 Sumco Techxiv Corporation Verfahren und Vorrichtung zum Polieren von Halbleiterwafern
CN104400622A (zh) * 2014-10-17 2015-03-11 成都泰美克晶体技术有限公司 一种双工位研磨机
CN104400621A (zh) * 2014-10-17 2015-03-11 成都泰美克晶体技术有限公司 一种新型双面研磨机上、下研磨盘的传动分离装置
US20170234365A1 (en) * 2016-02-17 2017-08-17 Disco Corporation Processing apparatus

Also Published As

Publication number Publication date
CH715468B1 (de) 2022-02-28
CN111093899A (zh) 2020-05-01
DE102017121692A1 (de) 2019-03-21

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