WO2018010701A1 - Optical fibre sensor and sound wave detection application method therefor - Google Patents

Optical fibre sensor and sound wave detection application method therefor Download PDF

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Publication number
WO2018010701A1
WO2018010701A1 PCT/CN2017/100770 CN2017100770W WO2018010701A1 WO 2018010701 A1 WO2018010701 A1 WO 2018010701A1 CN 2017100770 W CN2017100770 W CN 2017100770W WO 2018010701 A1 WO2018010701 A1 WO 2018010701A1
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optical fiber
micro
nano structure
fiber
sensor according
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PCT/CN2017/100770
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French (fr)
Chinese (zh)
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杨天
周鑫
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上海交通大学
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre

Definitions

  • the invention belongs to the fields of optics, acoustics, biosensing and micro-nano processing, in particular to a fiber-optic sensor with a metal micro-nano structure on its end face and its application method in the field of acoustic wave detection.
  • the surface plasmon resonance (SPR) phenomenon is a phenomenon in which the free electrons on the metal surface and the electromagnetic field are coupled to each other under the irradiation of light waves of a specific wavelength.
  • the specific resonant wavelength varies depending on factors such as the refractive index of the environment, the period of the shape of the surface structure, the incident angle, and the like. Therefore, changes in the refractive index, device geometry, and the like can be detected by detecting the drift of the surface plasmon resonance wavelength.
  • the transmission of sound waves in the medium causes the oscillation of the refractive index of the medium and the dimensional variation of the device geometry.
  • the refractive index oscillation and the frequency and amplitude of the device geometry change and the characteristics and materials of the acoustic wave.
  • Features are directly related. Therefore, by detecting changes in surface plasmon resonance, we can obtain information on sound waves.
  • the current ultrasonic detection products are mainly hydrophones.
  • research on the measurement of refractive index changes by micro-rings, prism-coupled SPR and other new methods has been carried out at home and abroad.
  • the ultrasonic detection bandwidth of these two new methods is an order of magnitude higher than that of the hydrophone, and it has an amazing performance, but it has the disadvantages of low integration, difficulty in inserting a small space, and inability to effectively avoid the interference of complex environments in vivo.
  • an object of the present invention is to provide a fiber optic sensor and an application method thereof.
  • the present invention integrates acoustic wave detection with a fiber optic sensor, has high integration, has a wide frequency response, and has an angular response flat. , stable response, low noise and so on.
  • the present invention provides a fiber optic sensor, the optical fiber and a metal micro/nano structure on the end face of the fiber, when a broad spectrum fiber guided wave is incident on the metal micro/nano structure, the reflection thereof a spectral or transmission spectrum having spectral valleys or spectral peaks caused by surface plasmon resonance;
  • the optical fiber sensor is used for acoustic wave detection, and the optical fiber sensor is incident on a light having a wavelength in a range of a surface plasmon resonance spectrum or a spectral peak
  • Light enters the fiber and measures its change based on the reflected power or transmitted power of the acoustic signal in real time to detect the information of the acoustic signal.
  • the sound wave is an infrasound wave, an audible sound wave or an ultrasonic wave.
  • the incident light has a wavelength ranging from 800 nm to 900 nm or 1400 nm to 1700 nm.
  • the incident light is light emitted by a laser or a light emitting diode.
  • surface plasmon resonance occurs at a surface of the metal micro/nano structure near the end face of the optical fiber, or surface plasmon resonance occurs at a surface of the metal micro/nano structure facing away from the end face of the optical fiber.
  • the metal micro/nano structure is a micro-nano structure on an Au film, an Ag film or an Al film.
  • the metal micro-nano structure is circular or polygonal.
  • the metal micro-nano structure has a thickness of 10 to 200 nm.
  • the metal micro-nanostructure comprises a first periodic micro-nanostructure and a second periodic micro-nanostructure on the metal thin film.
  • the first periodic micro-nanostructure is a micro-nano structure having a two-dimensional periodic grid-like nanowire groove on a metal film;
  • the second periodic micro-nano structure is a two-dimensional periodicity on the metal film
  • the micro/nano structure of the grid-like nanowire groove is either a micro-nano structure having a one-dimensional periodic strip-shaped nanowire groove on the metal film, or a combination of the two.
  • the nanowire groove has a width of 10 to 200 nm and a depth of 10 to 200 nm.
  • the first periodic micro-nanostructure is located in a central region of the optical fiber, aligned with the core layer of the optical fiber; and the second periodic micro-nanostructure surrounds the first periodic micro-nanostructure.
  • said first periodic micro-nanostructure is coupled to an incident fiber waveguide to form a surface plasmon, said second periodic micro-nanostructure for reflecting said surface plasmon in a direction parallel to the end face of the fiber .
  • the period of the first periodic micro-nanostructure is approximately equal to the wavelength of the surface plasmon resonance on the metal film, the approximately equal to indicating a numerical deviation within ⁇ 20%.
  • the period of the second periodic micro-nanostructure is approximately equal to a half wavelength of the surface plasmon resonance on the metal film, the approximately equal to indicating a numerical deviation within ⁇ 20%.
  • the first periodic micro-nanostructure bit has a spacing between the second periodic micro-nanostructure and the pitch is 0-5 ⁇ m.
  • the optical fiber is a single mode fiber to the incident light.
  • the metal micro/nano structure is bonded to the end face of the fiber by an adhesive.
  • the adhesive is a UV curable adhesive or a thermosetting adhesive.
  • the invention also provides an acoustic wave detection application method for a fiber optic sensor, the application method comprising the following steps:
  • Step S1 placing an end surface of the optical fiber sensor at or near the medium having sound waves, the optical fiber sensor comprising an optical fiber and a metal micro-nano structure located on the end surface of the optical fiber;
  • Step S2 incident light is transmitted along the optical fiber and reaches the end face of the optical fiber, and surface plasmon resonance and harmony occur. After the wave acts, forming reflected light reflected back to the optical fiber or forming transmitted light penetrating the metal micro-nano structure;
  • Step S3 Obtain information of the acoustic wave signal according to a real-time change of the reflected power of the reflected light or the transmitted power of the transmitted light.
  • the reflected light is reflected light reflected back to the optical fiber after surface plasmon resonance occurs at a surface of the metal micro/nano structure near the end face of the optical fiber, or The reflected light reflected back to the fiber after the surface plasmon resonance occurs at the surface of the metal micro/nano structure that faces away from the end face of the fiber.
  • the transmitted light is transmitted light that penetrates the metal micro/nano structure after surface plasmon resonance occurs at a surface of the metal micro/nano structure near the end face of the optical fiber, or Transmitted light after surface plasmon resonance occurs at a surface of the metal micro/nano structure that faces away from the fiber end face.
  • the reflection spectrum has a spectral valley or peak formed by surface plasmon resonance
  • the surface plasmon resonance is formed in the transmission spectrum.
  • the spectral valley or peak is a spectral valley or peak.
  • the incident light is light having a wavelength in a range of spectral valleys or peaks formed by surface plasmon resonance.
  • the incident light has a wavelength ranging from 800 nm to 900 nm or 1400 nm to 1700 nm.
  • the incident light is light emitted by a laser or a light emitting diode.
  • the optical fiber is a single mode fiber to the incident light.
  • the information of the acoustic wave signal includes one or a combination of two or more of amplitude, phase, and frequency.
  • the medium is a liquid, a gas, a solid or a gel.
  • the sound wave is an infrasound wave, an audible sound wave or an ultrasonic wave.
  • the invention also provides an acoustic wave detection application system for a fiber optic sensor, the application system comprising: a fiber optic sensor for acoustic wave detection, a circulator or a multimode fiber, a laser, and an optical power detector, wherein the laser is connected to the optical fiber through the optical fiber a first end of the circulator, the second end of the circulator being connected to the optical fiber sensor by an optical fiber, the third end of the circulator being connected to the optical power detector by an optical fiber; or the laser passing through the optical fiber Connected to the fiber optic sensor, one end of the multimode fiber is coupled to an optical power detector, and the other end of the multimode fiber is opposite the fiber optic sensor.
  • an optical fiber sensor and an acoustic wave detecting application method thereof have the following beneficial effects:
  • the invention uses the fiber plasmon resonance based fiber optic sensor to realize the detection of sound waves, has high integration degree, can be inserted into a small space such as a blood vessel, and has the advantages of detecting frequency bandwidth, flat angular response, stable measurement, low noise and the like.
  • the invention can effectively reduce the interference of the complex environment on the sound wave detection by utilizing the surface plasmon resonance on the surface which is not in contact with the environment (that is, the surface of the metal micro-nano structure close to the fiber end surface side), so that the interference can be effectively solved by solving the complex environment Sound wave detection in the body.
  • Fig. 1a is a schematic view showing the metal micro/nano structure of the end face of the optical fiber sensor of the present invention.
  • Figure 1b shows a scanning electron microscope (SEM) image of the metal micro-nanostructure of the end face of the fiber optic sensor of the present invention.
  • Figure 1c is a partial enlarged view of the SEM image of the metal micro-nanostructure of the end face of the fiber optic sensor of Figure 1b in the present invention.
  • FIG. 2 is a schematic diagram showing the steps of an application method of the optical fiber sensor in the second embodiment of the present invention.
  • 3a is a schematic view showing the wavelength shift of the reflection spectrum valley caused by the optical fiber sensor in the third embodiment of the present invention when changing the refractive index of the adhesive, wherein a, b, c, d, e, and f respectively represent adhesion.
  • the refractive index of the agent is 1.50, 1.52, 1.54, 1.56, 1.58, 1.60.
  • Fig. 3b is a schematic view showing a reflection spectrum valley of the optical fiber sensor in the third embodiment of the present invention.
  • FIG. 4 is a schematic diagram showing an application system of a fiber optic sensor in Embodiment 4 of the present invention.
  • Figure 5a is a graph showing the measurement of an ultrasonic signal using a fiber optic sensor in Embodiment 4 of the present invention, wherein the input laser intensity is 5 mW.
  • Fig. 5b is a view showing the measurement of the ultrasonic signal by the transducer using the glass sheet reflection method in the fourth embodiment of the present invention.
  • the embodiment provides an optical fiber sensor, the optical fiber sensor comprising: an optical fiber 101 and a metal micro-nano structure on the end surface of the optical fiber, when a broad-spectrum optical fiber guided wave is incident on the metal micro- In the nanostructure, there is a spectral valley or spectral peak caused by surface plasmon resonance in the reflection spectrum or the transmission spectrum; the optical fiber sensor is used for acoustic wave detection, and the optical fiber sensor has a wavelength in the surface plasmon resonance spectrum valley or peak The light in the range enters the fiber as incident light, and measures the change of the reflected power or the transmitted power based on the acoustic signal in real time to detect the information of the acoustic signal.
  • the sound wave is an infrasound wave, and an acoustic wave or an ultrasonic wave is audible.
  • the incident light has a wavelength in the range of 800 nm to 900 nm or 1400 nm to 1700 nm.
  • the fiber end face is an end face of the fiber substantially perpendicular to the optical fiber 101.
  • the substantially vertical means that the angle between the end face and the optical fiber 101 ranges from 90 ⁇ 8 degrees, preferably 90 ⁇ 2 degrees.
  • the optical fiber sensor is used for acoustic wave detection, and the optical fiber sensor enters the optical fiber 101 with the laser as incident light, so that the wavelength of the laser is within the range of spectral valleys or peaks formed by surface plasmon resonance, and is measured in real time. It is based on a change in reflected power or transmitted power affected by the acoustic signal to detect information of the acoustic signal.
  • the optical fiber 101 is a single mode fiber to the incident light.
  • the optical fiber sensor may generate surface plasmon resonance at a surface of the metal micro/nano structure near the end face of the optical fiber, or may generate surface plasmon resonance at a surface of the metal micro/nano structure facing away from the end face of the optical fiber. .
  • the incident light may be light emitted by the light emitting diode or light emitted by other light emitting elements.
  • the metal micro/nano structure is a micro/nano structure on a metal film such as an Au film, an Ag film, or an Al film.
  • the metal micro/nano structure is circular or polygonal.
  • the metal micro-nano structure has a thickness of 10 to 200 nm.
  • the metal micro-nano structure includes a first periodic micro-nanostructure 102 and a second periodic micro-nanostructure 103 on the metal thin film.
  • the first periodic micro-nanostructure 102 is a micro-nano structure having a two-dimensional periodic grid-like nanowire trough on a metal thin film.
  • the second periodic micro/nanostructure 103 is a micro/nano structure having a two-dimensional periodic grid-like nanowire groove on a metal film, or a micro-nano structure having a one-dimensional periodic strip-shaped nanowire groove on a metal film. .
  • the second periodic micro-nanostructure 103 may also be a combined structure of a micro-nano structure having a two-dimensional periodic grid-like nanowire groove on a metal film and a micro-nano structure having a one-dimensional periodic strip-shaped nanowire groove. Therefore, the manufacturing process is simplified while keeping the detection effect unchanged.
  • the nanowire grooves have a width of 10 to 200 nm and a depth of 10 to 200 nm. In this embodiment, the wavelength position at which surface plasmon resonance occurs can be adjusted by adjusting the period of the metal micro/nano structure.
  • the first periodic micro-nanostructure 102 is located in a central region of the optical fiber and aligned with the core layer of the optical fiber; and the second periodic micro-nanostructure 103 surrounds the first periodic micro-nanostructure 102.
  • the first periodic micro-nanostructure 102 and the second periodic micro-nanostructure 103 have a spacing between 0 and 5 ⁇ m, thereby sufficiently reflecting surface plasmons generated by structural coupling.
  • the first periodic micro/nanostructure 102 is coupled with the incident optical fiber to form a surface plasmon
  • the second periodic micro-nanostructure 103 is used to be parallel to the optical fiber.
  • the surface of the end face reflects the surface plasmon.
  • the overall size of the first periodic micro/nanostructures 102 is equal to or slightly larger than the core diameter of the optical fiber 101; the second periodic micro-nanostructures 103 are sufficiently long in size to fully reflect surface plasmons generated by structural coupling. .
  • the fiber optic sensor 205 is placed in or near a medium having acoustic waves, and then a laser beam is emitted into the optical fiber 101.
  • the laser wavelength is on the side of the inverse/transmission spectrum valley/peak so as with the inverse/transmission spectrum valley/
  • the drift of the peak wavelength can have a large inverse/transmission power variation, and the laser inverse/transmission power changes with time in real time.
  • the surface plasma inverse/transmission spectrum The resonant wavelength will shift and cause the laser reflected power or transmitted power to change accordingly. Real-time measurement of laser reflection power or transmission power with time, you can know the amplitude, frequency, phase and other information of the sound wave.
  • the embodiment provides an acoustic wave detection application method for a fiber optic sensor, and the application method includes the following steps:
  • Step S1 placing the end face of the fiber optic sensor at or near the medium having sound waves, the fiber optic sensor comprising an optical fiber 101 and a metal micro-nano structure on the end face of the fiber.
  • the sound wave is an infrasound wave, and an acoustic wave or an ultrasonic wave is audible.
  • the medium is a liquid, a gas, a solid or a gel. When the medium is solid, the fiber optic sensor is in close proximity to the medium.
  • Step S2 The incident light is transmitted along the optical fiber 101 and reaches the end face of the optical fiber, and surface plasmon resonance occurs and acts with the acoustic wave to form reflected light reflected back to the optical fiber 101.
  • the reflected light is reflected light reflected back to the optical fiber 101 after the surface plasmon resonance occurs at the surface of the metal micro-nano structure near the end face of the optical fiber, which can effectively avoid the surrounding complex.
  • the optical fiber is a single mode fiber to the incident light.
  • the reflection spectrum has a spectral valley or peak formed by surface plasmon resonance.
  • the incident light is a laser or a light emitting diode whose wavelength is within a range of spectral valleys or peaks formed by surface plasmon resonance. Out of the light.
  • the incident light has a wavelength in the range of 800 nm to 900 nm or 1400 nm to 1700 nm.
  • the reflected light is reflected light reflected back to the optical fiber 101 after surface plasmon resonance occurs at a surface of the metal micro-nano structure facing away from the end face of the optical fiber.
  • the detection is subject to environmental disturbance caused by non-sound waves, such as impurities in the liquid being adsorbed on the metal film.
  • Step S3 Obtain information of the acoustic wave signal according to a real-time change of the reflected power of the reflected light.
  • the information of the acoustic wave signal includes one or a combination of two or more of amplitude, phase, and frequency.
  • the information of the acoustic signal can also be obtained from the real-time variation of the transmitted power of the transmitted light.
  • the incident light is transmitted along the optical fiber 101 and reaches the end face of the optical fiber, and surface plasmon resonance and acoustic waves are generated to form a transmitted light that penetrates the metal micro/nano structure, and the transmitted light is directly opposite to the metal micro-nano
  • a multimode fiber of the structure receives and acquires real-time changes in its transmitted power.
  • the transmission spectrum of the transmitted light has a spectral peak or a spectral valley formed by surface plasmon resonance.
  • the transmitted light may be transmitted light that penetrates the metal micro/nano structure after surface plasmon resonance occurs at a surface of the metal micro/nano structure near the end face of the optical fiber, or may be The transmitted light after surface plasmon resonance occurs at the surface of the nanostructure that faces away from the end face of the fiber. Similar to the nature of the reflected light, the transmitted light that penetrates the metal micro/nanostructure after the surface plasmon resonance occurs at the surface of the metal micro/nano structure near the end face of the optical fiber can effectively avoid the interference effects of the surrounding complex environment. . Wherein, if the transmitted light is a broad spectrum, the transmission spectrum has a spectral valley or a peak formed by surface plasmon resonance.
  • the first periodic micro/nanostructure 102 of the optical fiber sensor used in the embodiment is a two-dimensional periodic grid-shaped nanowire groove on a gold film.
  • the gold micro/nano structure wherein the period is 1020 ⁇ 10 nm, and the number of cycles is 13.
  • the second periodic micro/nanostructure 103 is a structure in which a gold micro/nano structure having a two-dimensional periodic grid-like nanowire groove on a gold film and a gold micro/nano structure having a one-dimensional periodic strip-shaped nanowire groove are alternately combined. Wherein, the period is 504 ⁇ 10 nm, and the number of cycles is 120.
  • the spacing between the first periodic micro-nanostructure 102 and the second periodic micro-nanostructure 103 is 540 ⁇ 10 nm.
  • the thickness of the gold film of the first periodic micro-nanostructure 102 and the second periodic micro-nanostructure 103 is 55 ⁇ 10 nm, and the line width of the nanowire groove is 50 ⁇ 10 nm (the nanowire groove penetrates the gold film). It should be noted that the number of periods of the periodic metal micro-nano array structure in FIG. 1a is not consistent with the above description and is for illustrative purposes only.
  • the metal micro/nano structure and the end face of the optical fiber are bonded by an adhesive, and the optical fiber sensor relies on the The surface plasmons at the surface of the metal micro/nano structure near the end face of the fiber are detected, so the fiber sensor is sensitive to the refractive index of the adhesive.
  • FDTD Finite-Difference Time-Domain
  • Figure 3a is a schematic diagram showing the wavelength shift of the reflection spectrum valley caused by the optical fiber sensor changing the refractive index of the adhesive, wherein a, b, c, d, e, and f respectively represent the refractive index of the adhesive of 1.50, 1.52, respectively. Reflectance spectra at 1.54, 1.56, 1.58, and 1.60.
  • Figure 3b shows a schematic diagram of the reflection spectrum valley of the fiber optic sensor in this embodiment.
  • the spectral spectrum of the reflection spectrum of the present embodiment is deep and narrow. After the wavelength of the reflection valley spectrum is drifted, the reflected power can be significantly changed, and the amplitude, frequency and phase of the reflected power change amount can be reflected in real time. The amplitude, frequency and phase information of the acoustic wave, so the optical fiber sensor in this embodiment has a good sound wave detection effect.
  • the adhesive is a UV curable adhesive or a thermosetting adhesive.
  • the optical fiber sensor comprises the steps of: first performing step 1), providing a substrate and an optical fiber, and preparing the substrate surface with the substrate a metal micro-nano structure having low binding force characteristics; then performing step 2), applying a UV-curable adhesive to the surface of the optical fiber or the surface of the metal micro-nano structure; and then performing step 3) adjusting the position of the optical fiber to make Aligning the end face of the fiber with the metal micro-nano structure, and contacting by the ultraviolet-curable glue phase (the fiber end face is not necessarily in direct contact with the metal micro-nano structure); finally, performing step 4),
  • the back side of the substrate (the side without the metal micro/nano structure) is irradiated with ultraviolet light to cure the ultraviolet curable glue through the substrate, and then the end face of the optical fiber and the metal micro/nano structure are peeled off from the surface
  • the substrate is a quartz sheet that is transparent to ultraviolet light
  • the ultraviolet curable glue is methyl acrylate.
  • the refractive index of the UV curable adhesive after curing is about 1.54, and the approximate value is equal to or less than ⁇ 20%.
  • the UV curable light source has a wavelength of 100-400 nm, a curing light source intensity of 1 to 2000 J/cm 2 , and a curing time of 5 to 600 s.
  • the curing wavelength is around 320 nm
  • the curing light intensity is 100 J/cm 2
  • the curing time is 300 s.
  • the optical fiber sensor comprises the steps of: first performing step 1), providing a substrate and an optical fiber, preparing the substrate and the substrate a metal micro/nano structure having low binding force; then performing step 2), applying a thermosetting glue to the surface of the fiber or the surface of the metal micro-nano structure; and then performing step 3) adjusting the position of the fiber so that The end face of the optical fiber is aligned with the position of the metal micro-nano structure, and is contacted by the adhesive (the end face of the fiber is not necessarily in direct contact with the metal micro-nano structure); finally, step 4) heating device contact is performed.
  • the back surface of the substrate (the side without the metal micro/nano structure) is heated to cure the thermosetting glue, the heating temperature is 80-150 ° C, the heating time is 1-30 minutes, and then the fiber end face is Peeling from the surface of the substrate with the metal micro/nano structure to complete the fabrication.
  • the heat curing adhesive is AB glue
  • the AB glue is a two-component adhesive, wherein the A component glue contains bisphenol A diglycidyl ether epoxy resin, and the B component glue contains imidazole.
  • the heating device is an electric soldering iron.
  • the A component and the B component are mixed in a weight ratio of 10:1, and the heating temperature is 150 ° C, and the heating time is 1 to 2 minutes.
  • the application system further includes an optical fiber sensor 205, a circulator 204, a laser 203, and an optical power detector 202.
  • the laser 203 is connected to the first end of the circulator 204 via an optical fiber, and the second end of the circulator 204 is connected to the optical fiber sensor 205 through an optical fiber, and the third end of the circulator 204 is connected to the optical fiber through the optical fiber.
  • the laser 203 is preferably a tunable laser.
  • the laser 203 can also be replaced with a fixed wavelength laser or light emitting diode.
  • the reflection spectrum valley position of the surface plasmon resonance in this embodiment is about 1550 nm, and the corresponding optical fiber 101 used is a single mode fiber having a working wavelength of 1550 nm.
  • the application system uses the reflection spectrum to detect the ultrasonic waves, and therefore includes an oscilloscope 210, an ultrasonic controller 211, and a transducer 212 connected to the ultrasonic controller 211.
  • the oscilloscope 210 is connected to the photodetector 202 by wires.
  • laser 203 is used to excite the surface plasmon resonance of fiber optic sensor 205.
  • the ultrasonic controller 211 controls the transducer 212 to emit ultrasonic waves, and the ultrasonic waves are transmitted through the medium to the optical fiber sensor 205, thereby changing the reflected light power of the optical fiber sensor 205.
  • the transducer 212 can emit ultrasonic waves and can also receive ultrasonic echoes and convert them into corresponding electrical signals.
  • the medium is liquid water 221.
  • the optical fiber sensor 205 in this embodiment has a good response to ultrasonic waves and is suitable for detecting ultrasonic information.
  • the main signal frequencies detected by the two sets of experiments are concentrated at 20 MHz, which is consistent with the information of the ultrasonic signal of the center frequency of the transducer 212 emitted by the transducer 212 at 20 MHz.
  • the waveform shapes in FIGS. 5a and 5b have similar intensity relationships, which indicates that the fiber sensor 205 has a good response to the frequency and intensity of the ultrasonic waves and is suitable for the detection of ultrasonic information.
  • the specific implementation process of detecting the ultrasonic signal emitted by the transducer 212 by using the optical fiber sensor 205 is as follows: a laser having a wavelength of about 1550 nm is passed as incident light through the circulator 204 to the optical fiber sensor 205 in the ultrasonic environment to generate a The reflected signal after the ultrasonic wave, the reflected signal passes through the circulator 204 again to the optical power detector 202, and the optical power detector 202 converts the light intensity of the reflected signal into a voltage signal, and the output is connected to the oscilloscope 201.
  • the information of the ultrasonic signal can be obtained from the voltage signal displayed by the oscilloscope 201, as shown in Fig. 5a.
  • Figure 5a is a measurement diagram of the ultrasonic signal detected using the fiber optic sensor 205, wherein the laser 203 is set to the optimum operating wavelength At 1537 nm, the incident laser intensity of the laser 203 is 5 mW, and the sampling rate of the 210 oscilloscope is 1 GHz.
  • the specific implementation process of detecting the ultrasonic signal emitted by the transducer 212 by using the transducer 212 is: using the ultrasonic wave emitted by the glass sheet reflecting transducer 212, and receiving the ultrasonic wave reflected by the glass sheet through the transducer 212. Thereby, information of the ultrasonic signal emitted by the transducer 212 is obtained, as shown in Fig. 5b.
  • Figure 5b is a measurement diagram of the ultrasonic signal detected by the transducer 212 using a glass sheet reflection method in which the center frequency of the ultrasonic wave emitted by the transducer 212 is 20 MHz.
  • the phase shift of the ultrasonic signal can be clearly observed by moving the distance of the fiber optic sensor 205 relative to the transducer 212. This proves that the ultrasonic detection results are affected by the distance between the fiber sensor and the sound source.
  • optical fiber sensor of the present invention has an advantage that the angular response is flatter by comparing experiments of ultrasonic waves with the fiber sensor 205 and the hydrophone. This is because, in order to obtain effective detection of sound waves, we want the incident sound waves to have the same or similar phase at each point on the detector surface.
  • the diameter of the effective surface of the optical fiber sensor 205 of the present embodiment for receiving the ultrasonic signal is about 9 ⁇ m, and the diameter of the effective surface of the hydrophone used for the experiment to receive the ultrasonic signal is about 1.5 mm.
  • a 15 MHz ultrasonic wave propagates in water, and the wavelength thereof is about 100 ⁇ m, which is much larger than the diameter of the effective surface of the optical fiber sensor 205 of the present embodiment for receiving the ultrasonic signal, so that the phases of the ultrasonic waves on the effective surface are very close.
  • the detection efficiency changes slowly with the direction of the incident ultrasonic wave, which has the advantage of flat angular response.
  • the wavelength of the ultrasonic wave is much smaller than the diameter of the effective surface of the hydrophone used to receive the ultrasonic signal, so that the hydrophone can effectively detect only the ultrasonic waves incident in a small angular range.
  • the transmission spectrum can also be utilized to detect ultrasound.
  • the real-time variation of the transmission power is obtained by the multimode fiber connected to the optical power detector 202, so the laser 203 is directly connected to the fiber sensor 205 through the optical fiber. That is, one end of a multimode fiber is connected to the optical power detector 202; the other end of the multimode fiber is opposite to the fiber sensor 205, and the center is aligned in a straight line, so that the real-time variation of the transmission power can be obtained.
  • Output is the transmission spectrum to detect ultrasonic waves.
  • optical fiber sensor and the sound wave detecting application method of the present invention have the following beneficial effects:
  • the invention uses the fiber plasmon resonance based fiber optic sensor to realize the detection of sound waves, has high integration degree, can be inserted into a small space such as a blood vessel, and has the advantages of detecting frequency bandwidth, flat angular response, stable measurement, low noise and the like.
  • the invention can effectively reduce the interference of the complex environment on the sound wave detection by utilizing the surface plasmon resonance on the surface not contacting the environment (that is, the surface of the metal micro-nano structure near the end face of the fiber), and thus can be used for the body. Sound wave detection.
  • the present invention effectively overcomes various shortcomings in the prior art and has high industrial utilization value.

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  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

An optical fibre sensor and a sound wave detection application method therefor. The optical fibre sensor comprises: an optical fibre (101) and a metal micro-nano structure located on an optical fibre end surface. When broad-spectrum optical fibre guided waves are incident on the metal micro-nano structure, a reflection spectrum or transmission spectrum has spectral valleys or spectral peaks caused by surface plasmon resonance. The optical fibre sensor (205) is used for sound wave detection, the optical fibre sensor (205) using light having a wavelength located within a surface plasmon resonance spectral valley or spectral peak range as incident light entering the optical fibre (101), and measuring sound wave signal-based reflection power or transmission power changes in real time so as to detect sound wave signal information. The present invention integrates the sound wave detection and the optical fibre sensor (205) with a high degree of integration, and has advantages such as a wide frequency response, a flat angular response, response stability and low noise.

Description

一种光纤传感器及其声波探测应用方法Optical fiber sensor and sound wave detecting application method thereof 技术领域Technical field
本发明属于光学、声学、生物传感以及微纳米加工领域，特别是涉及一种端面具有金属微纳米结构的光纤传感器及其在声波探测领域的应用方法。The invention belongs to the fields of optics, acoustics, biosensing and micro-nano processing, in particular to a fiber-optic sensor with a metal micro-nano structure on its end face and its application method in the field of acoustic wave detection.
背景技术Background technique
表面等离子体谐振(surface plasmon resonance，SPR)现象是在特定波长的光波照射下，金属表面的自由电子与电磁场耦合发生集体振荡的现象。该特定的谐振波长随环境折射率、表面结构形状周期等性质、入射角等因素而变化。因此，通过探测表面等离子体谐振波长的漂移就可以探测折射率、器件几何形状尺寸等的变化。另一方面，声波在介质中传输会造成所处介质折射率的震荡及所达到的器件几何形状尺寸的变化，这种折射率震荡和器件几何形状尺寸变化的频率和振幅与声波的特性以及材料特性有直接联系。因此通过探测表面等离子体谐振的变化，我们可以获取声波的信息。The surface plasmon resonance (SPR) phenomenon is a phenomenon in which the free electrons on the metal surface and the electromagnetic field are coupled to each other under the irradiation of light waves of a specific wavelength. The specific resonant wavelength varies depending on factors such as the refractive index of the environment, the period of the shape of the surface structure, the incident angle, and the like. Therefore, changes in the refractive index, device geometry, and the like can be detected by detecting the drift of the surface plasmon resonance wavelength. On the other hand, the transmission of sound waves in the medium causes the oscillation of the refractive index of the medium and the dimensional variation of the device geometry. The refractive index oscillation and the frequency and amplitude of the device geometry change and the characteristics and materials of the acoustic wave. Features are directly related. Therefore, by detecting changes in surface plasmon resonance, we can obtain information on sound waves.
目前的超声波探测产品以水听器为主。近几年，国内外展开了以微环器件(microring)，棱镜耦合SPR等新方法探测折射率变化从而测量超声波信号的研究。这两种新方法的超声波探测带宽比水听器高了一个数量级，得到了惊人的表现，但是存在集成度低、难于***狭小空间、在体内应用时不能有效规避体内复杂环境的干扰等缺点。The current ultrasonic detection products are mainly hydrophones. In recent years, research on the measurement of refractive index changes by micro-rings, prism-coupled SPR and other new methods has been carried out at home and abroad. The ultrasonic detection bandwidth of these two new methods is an order of magnitude higher than that of the hydrophone, and it has an amazing performance, but it has the disadvantages of low integration, difficulty in inserting a small space, and inability to effectively avoid the interference of complex environments in vivo.
发明内容Summary of the invention
鉴于以上所述现有技术的缺点，本发明的目的在于提供一种光纤传感器及其应用方法，本发明将声波探测与光纤传感器集成在一起，集成度高，且具备宽频率响应，角响应平坦，响应稳定，低噪声等优点。In view of the above disadvantages of the prior art, an object of the present invention is to provide a fiber optic sensor and an application method thereof. The present invention integrates acoustic wave detection with a fiber optic sensor, has high integration, has a wide frequency response, and has an angular response flat. , stable response, low noise and so on.
为实现上述目的及其他相关目的，本发明提供一种光纤传感器，所述光纤以及位于所述光纤端面上的金属微纳米结构，当宽谱的光纤导波入射到金属微纳米结构上，其反射谱或透射谱里具有表面等离子体谐振造成的谱谷或谱峰；所述光纤传感器用于声波探测，所述光纤传感器以波长处于表面等离子体谐振谱谷或谱峰的范围内的光作为入射光进入光纤，并实时测量其基于声波信号的反射功率或透射功率的变化，以检测声波信号的信息。To achieve the above and other related objects, the present invention provides a fiber optic sensor, the optical fiber and a metal micro/nano structure on the end face of the fiber, when a broad spectrum fiber guided wave is incident on the metal micro/nano structure, the reflection thereof a spectral or transmission spectrum having spectral valleys or spectral peaks caused by surface plasmon resonance; the optical fiber sensor is used for acoustic wave detection, and the optical fiber sensor is incident on a light having a wavelength in a range of a surface plasmon resonance spectrum or a spectral peak Light enters the fiber and measures its change based on the reflected power or transmitted power of the acoustic signal in real time to detect the information of the acoustic signal.
优选地，所述声波为次声波，可听声波或超声波。Preferably, the sound wave is an infrasound wave, an audible sound wave or an ultrasonic wave.
优选地，所述入射光的波长范围为800nm～900nm或1400nm～1700nm。 Preferably, the incident light has a wavelength ranging from 800 nm to 900 nm or 1400 nm to 1700 nm.
优选地，所述入射光为激光或发光二极管发出的光。Preferably, the incident light is light emitted by a laser or a light emitting diode.
优选地，所述金属微纳米结构的靠近光纤端面一侧的表面处发生表面等离激元谐振，或者所述金属微纳米结构的背离光纤端面一侧的表面处发生表面等离激元谐振。Preferably, surface plasmon resonance occurs at a surface of the metal micro/nano structure near the end face of the optical fiber, or surface plasmon resonance occurs at a surface of the metal micro/nano structure facing away from the end face of the optical fiber.
优选地，所述金属微纳米结构为Au薄膜、Ag薄膜或Al薄膜上的微纳米结构。Preferably, the metal micro/nano structure is a micro-nano structure on an Au film, an Ag film or an Al film.
优选地，所述金属微纳米结构为圆形或多边形状。Preferably, the metal micro-nano structure is circular or polygonal.
优选地，所述金属微纳米结构的厚度为10～200nm。Preferably, the metal micro-nano structure has a thickness of 10 to 200 nm.
优选地，所述金属微纳米结构包括金属薄膜上的第一周期微纳米结构及第二周期微纳米结构。Preferably, the metal micro-nanostructure comprises a first periodic micro-nanostructure and a second periodic micro-nanostructure on the metal thin film.
优选地，所述第一周期微纳米结构为金属薄膜上的具有二维周期性网格状纳米线槽的微纳米结构；所述第二周期微纳米结构为金属薄膜上的具有二维周期性网格状纳米线槽的微纳米结构，或者为金属薄膜上的具有一维周期性条状纳米线槽的微纳米结构，或者为两者的组合。Preferably, the first periodic micro-nanostructure is a micro-nano structure having a two-dimensional periodic grid-like nanowire groove on a metal film; the second periodic micro-nano structure is a two-dimensional periodicity on the metal film The micro/nano structure of the grid-like nanowire groove is either a micro-nano structure having a one-dimensional periodic strip-shaped nanowire groove on the metal film, or a combination of the two.
优选地，所述纳米线槽的宽度为10～200nm，深度为10～200nm。Preferably, the nanowire groove has a width of 10 to 200 nm and a depth of 10 to 200 nm.
优选地，所述第一周期微纳米结构位于光纤的中心区域，与所述光纤的芯层对准；所述第二周期微纳米结构环绕所述第一周期微纳米结构。Preferably, the first periodic micro-nanostructure is located in a central region of the optical fiber, aligned with the core layer of the optical fiber; and the second periodic micro-nanostructure surrounds the first periodic micro-nanostructure.
优选地，所述第一周期微纳米结构与入射的光纤导波耦合形成表面等离激元，所述第二周期微纳米结构用于沿平行于光纤端面的方向反射所述表面等离激元。Advantageously, said first periodic micro-nanostructure is coupled to an incident fiber waveguide to form a surface plasmon, said second periodic micro-nanostructure for reflecting said surface plasmon in a direction parallel to the end face of the fiber .
优选地，所述第一周期微纳米结构的周期约等于表面等离激元谐振在金属薄膜上的波长，所述约等于表示数值偏差为±20％以内。Preferably, the period of the first periodic micro-nanostructure is approximately equal to the wavelength of the surface plasmon resonance on the metal film, the approximately equal to indicating a numerical deviation within ±20%.
优选地，所述第二周期微纳米结构的周期约等于表面等离激元谐振在金属薄膜上的半波长，所述约等于表示数值偏差为±20％以内。Preferably, the period of the second periodic micro-nanostructure is approximately equal to a half wavelength of the surface plasmon resonance on the metal film, the approximately equal to indicating a numerical deviation within ±20%.
优选地，所述第一周期微纳米结构位与所述第二周期微纳米结构之间具有间距，所述间距为0～5μm。Preferably, the first periodic micro-nanostructure bit has a spacing between the second periodic micro-nanostructure and the pitch is 0-5 μm.
优选地，所述光纤对所述入射光为单模光纤。Preferably, the optical fiber is a single mode fiber to the incident light.
优选地，所述金属微纳米结构与光纤端面之间通过粘合剂粘合。Preferably, the metal micro/nano structure is bonded to the end face of the fiber by an adhesive.
优选地，所述粘合剂为紫外固化胶或热固化胶。Preferably, the adhesive is a UV curable adhesive or a thermosetting adhesive.
本发明还提供一种光纤传感器的声波探测应用方法，所述应用方法包括以下步骤：The invention also provides an acoustic wave detection application method for a fiber optic sensor, the application method comprising the following steps:
步骤S1：将光纤传感器的端面置于或靠近有声波的介质，所述光纤传感器包括光纤以及位于所述光纤端面上的金属微纳米结构；Step S1: placing an end surface of the optical fiber sensor at or near the medium having sound waves, the optical fiber sensor comprising an optical fiber and a metal micro-nano structure located on the end surface of the optical fiber;
步骤S2：入射光沿所述光纤传输并达到所述光纤端面，并发生表面等离子体谐振及与声 波作用后，形成反射回光纤的反射光或形成穿透金属微纳米结构的透射光；Step S2: incident light is transmitted along the optical fiber and reaches the end face of the optical fiber, and surface plasmon resonance and harmony occur. After the wave acts, forming reflected light reflected back to the optical fiber or forming transmitted light penetrating the metal micro-nano structure;
步骤S3：根据所述反射光的反射功率或透射光的透射功率的实时变化来获得声波信号的信息。Step S3: Obtain information of the acoustic wave signal according to a real-time change of the reflected power of the reflected light or the transmitted power of the transmitted light.
优选地，所述步骤S2中，所述反射光为在所述金属微纳米结构的靠近光纤端面一侧的表面处发生表面等离激元谐振之后反射回光纤的反射光，或者为在所述金属微纳米结构的背离光纤端面一侧的表面处发生表面等离激元谐振之后反射回光纤的反射光。Preferably, in the step S2, the reflected light is reflected light reflected back to the optical fiber after surface plasmon resonance occurs at a surface of the metal micro/nano structure near the end face of the optical fiber, or The reflected light reflected back to the fiber after the surface plasmon resonance occurs at the surface of the metal micro/nano structure that faces away from the end face of the fiber.
优选地，所述步骤S2中，所述透射光为在所述金属微纳米结构的靠近光纤端面一侧的表面处发生表面等离激元谐振之后穿透金属微纳米结构的透射光，或者为在所述金属微纳米结构的背离光纤端面一侧的表面处发生表面等离激元谐振之后的透射光。Preferably, in the step S2, the transmitted light is transmitted light that penetrates the metal micro/nano structure after surface plasmon resonance occurs at a surface of the metal micro/nano structure near the end face of the optical fiber, or Transmitted light after surface plasmon resonance occurs at a surface of the metal micro/nano structure that faces away from the fiber end face.
优选地，所述反射光如果是宽谱的则其反射谱里具有表面等离子体谐振形成的谱谷或谱峰，所述透射光如果是宽谱的则其透射谱里具有表面等离子体谐振形成的谱谷或谱峰。Preferably, if the reflected light is broad spectrum, the reflection spectrum has a spectral valley or peak formed by surface plasmon resonance, and if the transmitted light is broad spectrum, the surface plasmon resonance is formed in the transmission spectrum. The spectral valley or peak.
优选地，所述入射光为波长处于表面等离子体谐振形成的谱谷或谱峰的范围内的光。Preferably, the incident light is light having a wavelength in a range of spectral valleys or peaks formed by surface plasmon resonance.
优选地，所述入射光的波长范围为800nm～900nm或1400nm～1700nm。Preferably, the incident light has a wavelength ranging from 800 nm to 900 nm or 1400 nm to 1700 nm.
优选地，所述入射光为激光或发光二极管发出的光。Preferably, the incident light is light emitted by a laser or a light emitting diode.
优选地，所述光纤对所述入射光为单模光纤。Preferably, the optical fiber is a single mode fiber to the incident light.
优选地，所述声波信号的信息包括幅度、相位及频率中的一种或两种以上组合。Preferably, the information of the acoustic wave signal includes one or a combination of two or more of amplitude, phase, and frequency.
优选地，所述介质为液体，气体，固体或胶体。Preferably, the medium is a liquid, a gas, a solid or a gel.
优选地，所述声波为次声波，可听声波或超声波。Preferably, the sound wave is an infrasound wave, an audible sound wave or an ultrasonic wave.
本发明还提供一种光纤传感器的声波探测应用***，所述应用***包括：用于声波探测的光纤传感器、环形器或多模光纤、激光器以及光功率探测器，所述激光器通过光纤连接于所述环形器的第一端，所述环形器的第二端通过光纤连接于所述光纤传感器，所述环形器的第三端通过光纤连接于所述光功率探测器；或者所述激光器通过光纤连接于所述光纤传感器，所述多模光纤的一端连接于光功率探测器，所述多模光纤的另一端正对所述光纤传感器。The invention also provides an acoustic wave detection application system for a fiber optic sensor, the application system comprising: a fiber optic sensor for acoustic wave detection, a circulator or a multimode fiber, a laser, and an optical power detector, wherein the laser is connected to the optical fiber through the optical fiber a first end of the circulator, the second end of the circulator being connected to the optical fiber sensor by an optical fiber, the third end of the circulator being connected to the optical power detector by an optical fiber; or the laser passing through the optical fiber Connected to the fiber optic sensor, one end of the multimode fiber is coupled to an optical power detector, and the other end of the multimode fiber is opposite the fiber optic sensor.
如上所述，本发明的一种光纤传感器及其声波探测应用方法，具有以下有益效果：As described above, an optical fiber sensor and an acoustic wave detecting application method thereof have the following beneficial effects:
本发明用基于表面等离子体谐振的光纤传感器来实现对声波的探测，其集成度高，可以***狭小的空间比如血管内，且具备探测频带宽、角响应平坦、测量稳定、低噪声等优点。The invention uses the fiber plasmon resonance based fiber optic sensor to realize the detection of sound waves, has high integration degree, can be inserted into a small space such as a blood vessel, and has the advantages of detecting frequency bandwidth, flat angular response, stable measurement, low noise and the like.
本发明通过利用不接触环境的表面(即所述金属微纳米结构的靠近光纤端面一侧的表面)上的表面等离激元谐振，可以有效减少解决复杂环境对声波探测的干扰，从而可以用于体内声波探测。 The invention can effectively reduce the interference of the complex environment on the sound wave detection by utilizing the surface plasmon resonance on the surface which is not in contact with the environment (that is, the surface of the metal micro-nano structure close to the fiber end surface side), so that the interference can be effectively solved by solving the complex environment Sound wave detection in the body.
附图说明DRAWINGS
图1a显示为本发明中的光纤传感器端面的金属微纳米结构示意图。Fig. 1a is a schematic view showing the metal micro/nano structure of the end face of the optical fiber sensor of the present invention.
图1b显示为本发明中的光纤传感器端面的金属微纳米结构的扫描电子显微镜(SEM)图。Figure 1b shows a scanning electron microscope (SEM) image of the metal micro-nanostructure of the end face of the fiber optic sensor of the present invention.
图1c显示为本发明中的图1b的光纤传感器端面的金属微纳米结构的SEM图虚线框中的局部放大图。Figure 1c is a partial enlarged view of the SEM image of the metal micro-nanostructure of the end face of the fiber optic sensor of Figure 1b in the present invention.
图2显示为本发明的实施例二中的光纤传感器的应用方法的步骤示意图。2 is a schematic diagram showing the steps of an application method of the optical fiber sensor in the second embodiment of the present invention.
图3a显示为本发明的实施例三中的光纤传感器在改变粘合剂的折射率时引起的反射谱谷的波长漂移示意图，其中，a、b、c、d、e、f分别代表粘合剂折射率为1.50、1.52、1.54、1.56、1.58、1.60时的反射谱。3a is a schematic view showing the wavelength shift of the reflection spectrum valley caused by the optical fiber sensor in the third embodiment of the present invention when changing the refractive index of the adhesive, wherein a, b, c, d, e, and f respectively represent adhesion. The refractive index of the agent is 1.50, 1.52, 1.54, 1.56, 1.58, 1.60.
图3b显示为本发明的实施例三中的光纤传感器的反射谱谷的示意图。Fig. 3b is a schematic view showing a reflection spectrum valley of the optical fiber sensor in the third embodiment of the present invention.
图4显示为本发明的实施例四中的光纤传感器的应用***示意图。4 is a schematic diagram showing an application system of a fiber optic sensor in Embodiment 4 of the present invention.
图5a显示为本发明的实施例四中的使用光纤传感器对超声波信号进行探测的测量图，其中，输入激光强度为5mW。Figure 5a is a graph showing the measurement of an ultrasonic signal using a fiber optic sensor in Embodiment 4 of the present invention, wherein the input laser intensity is 5 mW.
图5b显示为本发明的实施例四中的使用玻璃片反射方法，通过换能器对超声波信号进行探测的测量图。Fig. 5b is a view showing the measurement of the ultrasonic signal by the transducer using the glass sheet reflection method in the fourth embodiment of the present invention.
元件标号说明Component label description
101     光纤                       204      环形器101 fiber optic 204 circulator
102     第一周期微纳米结构         205      光纤传感器102 first cycle micro-nano structure 205 fiber optic sensor
103     第二周期微纳米结构         211      超声波控制器103 second cycle micro-nano structure 211 ultrasonic controller
201     示波器                     212      换能器201 Oscilloscope 212 Transducer
202     光功率探测器               221      水202 Optical Power Detector 221 Water
203     激光器                     81～83   步骤203 laser 81~83 steps
具体实施方式detailed description
以下通过特定的具体实例说明本发明的实施方式，本领域技术人员可由本说明书所揭露的内容轻易地了解本发明的其他优点与功效。本发明还可以通过另外不同的具体实施方式加以实施或应用，本说明书中的各项细节也可以基于不同观点与应用，在没有背离本发明的精神下进行各种修饰或改变。The embodiments of the present invention are described below by way of specific examples, and those skilled in the art can readily understand other advantages and effects of the present invention from the disclosure of the present disclosure. The present invention may be embodied or applied in various other specific embodiments, and various modifications and changes can be made without departing from the spirit and scope of the invention.
请参阅图1到图5。需要说明的是，本实施例中所提供的图示仅以示意方式说明本发明的基本构想，遂图示中仅显示与本发明中有关的组件而非按照实际实施时的组件数目、形状 及尺寸绘制，其实际实施时各组件的型态、数量及比例可为一种随意的改变，且其组件布局型态也可能更为复杂。Please refer to Figure 1 to Figure 5. It should be noted that the illustrations provided in the present embodiment merely illustrate the basic concept of the present invention in a schematic manner, and only the components related to the present invention are shown in the drawings, instead of the number and shape of components according to actual implementation. And dimension drawing, the actual type of implementation of each component type, number and proportion can be a random change, and its component layout type may also be more complicated.
实施例一Embodiment 1
如图1a～图1c所示，本实施例提供一种光纤传感器，所述光纤传感器包括：光纤101以及位于所述光纤端面上的金属微纳米结构，当宽谱的光纤导波入射到金属微纳米结构上，其反射谱或透射谱里具有表面等离子体谐振造成的谱谷或谱峰；所述光纤传感器用于声波探测，所述光纤传感器以波长处于表面等离子体谐振谱谷或谱峰的范围内的光作为入射光进入光纤，并实时测量其基于声波信号的反射功率或透射功率的变化，以检测声波信号的信息。As shown in FIG. 1a to FIG. 1c, the embodiment provides an optical fiber sensor, the optical fiber sensor comprising: an optical fiber 101 and a metal micro-nano structure on the end surface of the optical fiber, when a broad-spectrum optical fiber guided wave is incident on the metal micro- In the nanostructure, there is a spectral valley or spectral peak caused by surface plasmon resonance in the reflection spectrum or the transmission spectrum; the optical fiber sensor is used for acoustic wave detection, and the optical fiber sensor has a wavelength in the surface plasmon resonance spectrum valley or peak The light in the range enters the fiber as incident light, and measures the change of the reflected power or the transmitted power based on the acoustic signal in real time to detect the information of the acoustic signal.
其中，所述声波为次声波，可听声波或超声波。所述入射光的波长范围为800nm～900nm或1400nm～1700nm。所述光纤端面为与光纤101基本垂直的光纤端面。在具体的实施例中，所述基本垂直是指端面与光纤101的夹角的范围为90±8度，优选为90±2度。Wherein, the sound wave is an infrasound wave, and an acoustic wave or an ultrasonic wave is audible. The incident light has a wavelength in the range of 800 nm to 900 nm or 1400 nm to 1700 nm. The fiber end face is an end face of the fiber substantially perpendicular to the optical fiber 101. In a particular embodiment, the substantially vertical means that the angle between the end face and the optical fiber 101 ranges from 90 ± 8 degrees, preferably 90 ± 2 degrees.
本实施例中，光纤传感器用于声波探测，所述光纤传感器以激光作为入射光进入光纤101，使所述激光的波长处于表面等离子体谐振形成的谱谷或谱峰的范围内，并实时测量其基于声波信号影响的反射功率或透射功率的变化，以检测声波信号的信息。其中，所述光纤101对所述入射光为单模光纤。所述光纤传感器可以在所述金属微纳米结构的靠近光纤端面一侧的表面处发生表面等离子体谐振，也可以在所述金属微纳米结构的背离光纤端面一侧的表面处发生表面等离子体谐振。但在所述金属微纳米结构的靠近光纤端面一侧的表面处发生表面等离子体谐振，可以有效规避周围复杂环境的干扰影响。其它实施例中，所述入射光可以为发光二极管发出的光或其它发光元件发出的光。In this embodiment, the optical fiber sensor is used for acoustic wave detection, and the optical fiber sensor enters the optical fiber 101 with the laser as incident light, so that the wavelength of the laser is within the range of spectral valleys or peaks formed by surface plasmon resonance, and is measured in real time. It is based on a change in reflected power or transmitted power affected by the acoustic signal to detect information of the acoustic signal. The optical fiber 101 is a single mode fiber to the incident light. The optical fiber sensor may generate surface plasmon resonance at a surface of the metal micro/nano structure near the end face of the optical fiber, or may generate surface plasmon resonance at a surface of the metal micro/nano structure facing away from the end face of the optical fiber. . However, surface plasmon resonance occurs at the surface of the metal micro/nano structure near the end face of the optical fiber, which can effectively avoid the interference effects of the surrounding complex environment. In other embodiments, the incident light may be light emitted by the light emitting diode or light emitted by other light emitting elements.
本实施例中，所述金属微纳米结构为Au薄膜、Ag薄膜或Al薄膜等金属薄膜上的微纳米结构。所述金属微纳米结构为圆形或多边形状。所述金属微纳米结构的厚度为10～200nm。In this embodiment, the metal micro/nano structure is a micro/nano structure on a metal film such as an Au film, an Ag film, or an Al film. The metal micro/nano structure is circular or polygonal. The metal micro-nano structure has a thickness of 10 to 200 nm.
具体的，所述金属微纳米结构包括金属薄膜上的第一周期微纳米结构102及第二周期微纳米结构103。所述第一周期微纳米结构102为金属薄膜上的具有二维周期性网格状纳米线槽的微纳米结构。所述第二周期微纳米结构103为金属薄膜上的具有二维周期性网格状纳米线槽的微纳米结构，或者为金属薄膜上的具有一维周期性条状纳米线槽的微纳米结构。所述第二周期微纳米结构103还可以为金属薄膜上的具有二维周期性网格状纳米线槽的微纳米结构和具有一维周期性条状纳米线槽的微纳米结构的组合结构，从而在保持检测效果不变弱的同时，简化制作工艺。其中，所述纳米线槽的宽度均为10～200nm，深度均为10～200nm。本实施例中，通过调整金属微纳米结构的周期可以调整发生表面等离子体谐振的波长位置。 Specifically, the metal micro-nano structure includes a first periodic micro-nanostructure 102 and a second periodic micro-nanostructure 103 on the metal thin film. The first periodic micro-nanostructure 102 is a micro-nano structure having a two-dimensional periodic grid-like nanowire trough on a metal thin film. The second periodic micro/nanostructure 103 is a micro/nano structure having a two-dimensional periodic grid-like nanowire groove on a metal film, or a micro-nano structure having a one-dimensional periodic strip-shaped nanowire groove on a metal film. . The second periodic micro-nanostructure 103 may also be a combined structure of a micro-nano structure having a two-dimensional periodic grid-like nanowire groove on a metal film and a micro-nano structure having a one-dimensional periodic strip-shaped nanowire groove. Therefore, the manufacturing process is simplified while keeping the detection effect unchanged. The nanowire grooves have a width of 10 to 200 nm and a depth of 10 to 200 nm. In this embodiment, the wavelength position at which surface plasmon resonance occurs can be adjusted by adjusting the period of the metal micro/nano structure.
本实施例中，所述第一周期微纳米结构102位于光纤的中心区域，与所述光纤的芯层对准；所述第二周期微纳米结构103环绕所述第一周期微纳米结构102。所述第一周期微纳米结构102与所述第二周期微纳米结构103之间具有间距，所述间距为0～5μm，从而充分反射结构耦合产生的表面等离激元。具体的，当光从光纤101的芯层入射时，所述第一周期微纳米结构102与入射的光纤导波耦合形成表面等离激元，第二周期微纳米结构103用于沿平行于光纤端面的方向反射所述表面等离激元。其中，所述第一周期微纳米结构102的整体尺寸等于或略大于光纤101的芯径；所述第二周期微纳米结构103的尺寸足够长，从而充分反射结构耦合产生的表面等离激元。In this embodiment, the first periodic micro-nanostructure 102 is located in a central region of the optical fiber and aligned with the core layer of the optical fiber; and the second periodic micro-nanostructure 103 surrounds the first periodic micro-nanostructure 102. The first periodic micro-nanostructure 102 and the second periodic micro-nanostructure 103 have a spacing between 0 and 5 μm, thereby sufficiently reflecting surface plasmons generated by structural coupling. Specifically, when light is incident from the core layer of the optical fiber 101, the first periodic micro/nanostructure 102 is coupled with the incident optical fiber to form a surface plasmon, and the second periodic micro-nanostructure 103 is used to be parallel to the optical fiber. The surface of the end face reflects the surface plasmon. The overall size of the first periodic micro/nanostructures 102 is equal to or slightly larger than the core diameter of the optical fiber 101; the second periodic micro-nanostructures 103 are sufficiently long in size to fully reflect surface plasmons generated by structural coupling. .
本实施例中，把光纤传感器205放入或靠近具有声波的介质，然后向光纤101里发射一束激光，激光波长处于反/透射谱谷/峰的一侧从而随着反/透射谱谷/峰的波长的漂移能够有较大的反/透射功率变化，实时测量激光反/透射功率随时间的变化。当声波打到光纤传感器205上时，由于构成光纤传感器205的材料折射率在声波压强下变化，和/或传感器本身的形状和尺寸也在声波压强下变化，所以表面等离子体反/透射谱的谐振波长会移动并造成激光反射功率或透射功率也相应地发生变化。实时测量激光反射功率或透射功率随时间的变化，可以获知声波的幅值，频率，相位等信息。In this embodiment, the fiber optic sensor 205 is placed in or near a medium having acoustic waves, and then a laser beam is emitted into the optical fiber 101. The laser wavelength is on the side of the inverse/transmission spectrum valley/peak so as with the inverse/transmission spectrum valley/ The drift of the peak wavelength can have a large inverse/transmission power variation, and the laser inverse/transmission power changes with time in real time. When the sound wave hits the fiber sensor 205, since the refractive index of the material constituting the fiber sensor 205 changes under the acoustic wave pressure, and/or the shape and size of the sensor itself also changes under the acoustic wave pressure, the surface plasma inverse/transmission spectrum The resonant wavelength will shift and cause the laser reflected power or transmitted power to change accordingly. Real-time measurement of laser reflection power or transmission power with time, you can know the amplitude, frequency, phase and other information of the sound wave.
实施例二 Embodiment 2
如图2所示，根据实施例一，本实施例提供一种光纤传感器的声波探测应用方法，所述应用方法包括以下步骤：As shown in FIG. 2, according to the first embodiment, the embodiment provides an acoustic wave detection application method for a fiber optic sensor, and the application method includes the following steps:
步骤S1：将光纤传感器的端面置于或靠近有声波的介质，所述光纤传感器包括光纤101以及位于所述光纤端面上的金属微纳米结构。Step S1: placing the end face of the fiber optic sensor at or near the medium having sound waves, the fiber optic sensor comprising an optical fiber 101 and a metal micro-nano structure on the end face of the fiber.
具体的，所述声波为次声波，可听声波或超声波。所述介质为液体，气体，固体或胶体。当所述介质为固体时，所述光纤传感器紧靠着所述介质。Specifically, the sound wave is an infrasound wave, and an acoustic wave or an ultrasonic wave is audible. The medium is a liquid, a gas, a solid or a gel. When the medium is solid, the fiber optic sensor is in close proximity to the medium.
步骤S2：入射光沿所述光纤101传输并达到所述光纤端面，并发生表面等离子体谐振及与声波作用，形成反射回光纤101的反射光。Step S2: The incident light is transmitted along the optical fiber 101 and reaches the end face of the optical fiber, and surface plasmon resonance occurs and acts with the acoustic wave to form reflected light reflected back to the optical fiber 101.
其中，所述步骤S2中，所述反射光为在所述金属微纳米结构的靠近光纤端面一侧的表面处发生表面等离激元谐振之后反射回光纤101的反射光，可以有效规避周围复杂环境的干扰影响。所述光纤对所述入射光为单模光纤。In the step S2, the reflected light is reflected light reflected back to the optical fiber 101 after the surface plasmon resonance occurs at the surface of the metal micro-nano structure near the end face of the optical fiber, which can effectively avoid the surrounding complex. Environmental interference effects. The optical fiber is a single mode fiber to the incident light.
其中，所述反射光如果是宽谱的则其反射谱里具有表面等离子体谐振形成的谱谷或谱峰。所述入射光为波长处于表面等离子体谐振形成的谱谷或谱峰的范围内的激光或发光二极管发 出的光。所述入射光的波长范围为800nm～900nm或1400nm～1700nm。Wherein, if the reflected light is broad spectrum, the reflection spectrum has a spectral valley or peak formed by surface plasmon resonance. The incident light is a laser or a light emitting diode whose wavelength is within a range of spectral valleys or peaks formed by surface plasmon resonance. Out of the light. The incident light has a wavelength in the range of 800 nm to 900 nm or 1400 nm to 1700 nm.
其他实施例中，所述步骤S2中，所述反射光为在所述金属微纳米结构的背离光纤端面一侧的表面处发生表面等离激元谐振之后反射回光纤101的反射光。但由于金属微纳米结构的背离光纤端面一侧的表面处的表面等离激元容易受到外界环境的影响，所以探测会受到非声波引起的环境干扰，比如液体里的杂质吸附在金属薄膜上。In other embodiments, in the step S2, the reflected light is reflected light reflected back to the optical fiber 101 after surface plasmon resonance occurs at a surface of the metal micro-nano structure facing away from the end face of the optical fiber. However, since the surface plasmon at the surface of the metal micro/nano structure facing away from the end face of the fiber is susceptible to the external environment, the detection is subject to environmental disturbance caused by non-sound waves, such as impurities in the liquid being adsorbed on the metal film.
步骤S3：根据所述反射光的反射功率的实时变化来获得声波信号的信息。Step S3: Obtain information of the acoustic wave signal according to a real-time change of the reflected power of the reflected light.
具体的，所述声波信号的信息包括幅度、相位及频率中的一种或两种以上的组合。Specifically, the information of the acoustic wave signal includes one or a combination of two or more of amplitude, phase, and frequency.
其它实施例中，也可以根据透射光的透射功率的实时变化来获得声波信号的信息。In other embodiments, the information of the acoustic signal can also be obtained from the real-time variation of the transmitted power of the transmitted light.
具体的，入射光沿所述光纤101传输并达到所述光纤端面，并发生表面等离子体谐振及与声波作用，形成穿透金属微纳米结构的透射光，所述透射光由正对金属微纳米结构的一根多模光纤接收，并获取其透射功率的实时变化情况。当然，根据实际情况，除了多模光纤，也可以选用其他装置接收，在此不限。其中，所述透射光的透射谱里具有表面等离子体谐振形成的谱峰或谱谷。Specifically, the incident light is transmitted along the optical fiber 101 and reaches the end face of the optical fiber, and surface plasmon resonance and acoustic waves are generated to form a transmitted light that penetrates the metal micro/nano structure, and the transmitted light is directly opposite to the metal micro-nano A multimode fiber of the structure receives and acquires real-time changes in its transmitted power. Of course, according to the actual situation, in addition to the multimode fiber, other devices can be selected for reception, which is not limited herein. Wherein, the transmission spectrum of the transmitted light has a spectral peak or a spectral valley formed by surface plasmon resonance.
其中，所述透射光可以为在所述金属微纳米结构的靠近光纤端面一侧的表面处发生表面等离激元谐振之后穿透金属微纳米结构的透射光，也可以为在所述金属微纳米结构的背离光纤端面一侧的表面处发生表面等离激元谐振之后的透射光。与反射光的性质类似，在所述金属微纳米结构的靠近光纤端面一侧的表面处发生表面等离激元谐振之后穿透金属微纳米结构的透射光，可以有效规避周围复杂环境的干扰影响。其中，所述透射光如果是宽谱的则其透射谱里具有表面等离子体谐振形成的谱谷或谱峰。Wherein, the transmitted light may be transmitted light that penetrates the metal micro/nano structure after surface plasmon resonance occurs at a surface of the metal micro/nano structure near the end face of the optical fiber, or may be The transmitted light after surface plasmon resonance occurs at the surface of the nanostructure that faces away from the end face of the fiber. Similar to the nature of the reflected light, the transmitted light that penetrates the metal micro/nanostructure after the surface plasmon resonance occurs at the surface of the metal micro/nano structure near the end face of the optical fiber can effectively avoid the interference effects of the surrounding complex environment. . Wherein, if the transmitted light is a broad spectrum, the transmission spectrum has a spectral valley or a peak formed by surface plasmon resonance.
实施例三 Embodiment 3
如图1a～1c所示，根据实施例一或实施例二，本实施例中使用的光纤传感器的第一周期微纳米结构102为在金薄膜上的具有二维周期性网格状纳米线槽的金微纳米结构，其中，周期为1020±10nm，周期数为13。第二周期微纳米结构103为在金薄膜上的具有二维周期性网格状纳米线槽的金微纳米结构和具有一维周期性条状纳米线槽的金微纳米结构交替分布组合的结构，其中，周期为504±10nm，周期数为120。所述第一周期微纳米结构102与所述第二周期微纳米结构103之间的间距为540±10nm。所述第一周期微纳米结构102和第二周期微纳米结构103的金薄膜的厚度均为55±10nm，纳米线槽的线宽均为50±10nm(纳米线槽贯穿金薄膜)。需要注意，图1a中的周期性金属微纳米阵列结构的周期个数与以上描述并不相符，仅作为示意用。As shown in FIG. 1a to FIG. 1c, according to the first embodiment or the second embodiment, the first periodic micro/nanostructure 102 of the optical fiber sensor used in the embodiment is a two-dimensional periodic grid-shaped nanowire groove on a gold film. The gold micro/nano structure, wherein the period is 1020 ± 10 nm, and the number of cycles is 13. The second periodic micro/nanostructure 103 is a structure in which a gold micro/nano structure having a two-dimensional periodic grid-like nanowire groove on a gold film and a gold micro/nano structure having a one-dimensional periodic strip-shaped nanowire groove are alternately combined. Wherein, the period is 504±10 nm, and the number of cycles is 120. The spacing between the first periodic micro-nanostructure 102 and the second periodic micro-nanostructure 103 is 540 ± 10 nm. The thickness of the gold film of the first periodic micro-nanostructure 102 and the second periodic micro-nanostructure 103 is 55±10 nm, and the line width of the nanowire groove is 50±10 nm (the nanowire groove penetrates the gold film). It should be noted that the number of periods of the periodic metal micro-nano array structure in FIG. 1a is not consistent with the above description and is for illustrative purposes only.
本实施例中，金属微纳米结构与光纤端面之间通过粘合剂粘合，而且光纤传感器依靠所 述金属微纳米结构的靠近光纤端面一侧的表面处的表面等离激元进行探测，所以所述光纤传感器对所述粘合剂的折射率敏感。本实施例通过时域有限差分法(Finite-Difference Time-Domain，FDTD)，仿真改变所述粘合剂的折射率从而引起反射谱谷的波长漂移，如图3a所示，可知反射谱谷的波长随着粘合剂的折射率改变发生线性的漂移。图3a显示为光纤传感器在改变粘合剂的折射率时引起的反射谱谷的波长漂移示意图，其中，a、b、c、d、e、f分别代表粘合剂折射率为1.50、1.52、1.54、1.56、1.58、1.60时的反射谱。In this embodiment, the metal micro/nano structure and the end face of the optical fiber are bonded by an adhesive, and the optical fiber sensor relies on the The surface plasmons at the surface of the metal micro/nano structure near the end face of the fiber are detected, so the fiber sensor is sensitive to the refractive index of the adhesive. In this embodiment, by using a Finite-Difference Time-Domain (FDTD) method, the refractive index of the adhesive is changed to cause a wavelength shift of the reflection spectrum valley. As shown in FIG. 3a, the reflection spectrum valley is known. The wavelength drifts linearly as the refractive index of the adhesive changes. Figure 3a is a schematic diagram showing the wavelength shift of the reflection spectrum valley caused by the optical fiber sensor changing the refractive index of the adhesive, wherein a, b, c, d, e, and f respectively represent the refractive index of the adhesive of 1.50, 1.52, respectively. Reflectance spectra at 1.54, 1.56, 1.58, and 1.60.
一般来说，如果光纤传感器中的激光波长处于更窄更深的反射谱谷的一侧时，随着反射谱谷波长的发生线性漂移，能够得到更大的反射功率变化。图3b显示为本实施例中的光纤传感器的反射谱谷的示意图。如图3b所示，本实施例的反射谱谷谱深且窄，在反射谷谱的波长漂移后，反射功率能有明显地变化，且反射功率改变量的幅值，频率和相位能够实时反应声波的幅值，频率和相位信息，所以本实施例中的光纤传感器对声波探测效果好。In general, if the laser wavelength in the fiber sensor is on one side of the narrower and deeper reflection spectrum valley, a larger drift power variation can be obtained as the wavelength of the reflection spectrum is linearly shifted. Figure 3b shows a schematic diagram of the reflection spectrum valley of the fiber optic sensor in this embodiment. As shown in FIG. 3b, the spectral spectrum of the reflection spectrum of the present embodiment is deep and narrow. After the wavelength of the reflection valley spectrum is drifted, the reflected power can be significantly changed, and the amplitude, frequency and phase of the reflected power change amount can be reflected in real time. The amplitude, frequency and phase information of the acoustic wave, so the optical fiber sensor in this embodiment has a good sound wave detection effect.
本实施例中，粘合剂为紫外固化胶或热固化胶。当所述粘合剂为紫外固化胶时，在具体的实施过程中，所述光纤传感器的制作包括步骤：首先进行步骤1)，提供基底及光纤，于所述基底表面制备与所述基底具有低结合力特性的金属微纳米结构；然后进行步骤2)，于所述光纤端面或所述金属微纳米结构的表面涂敷紫外固化胶；然后进行步骤3)调整所述光纤的位置以使所述光纤端面与所述金属微纳米结构的位置对准，并通过所述紫外固化胶相接触(所述光纤端面与所述金属微纳米结构未必直接接触)；最后进行步骤4)，从所述基底的背面(没有金属微纳米结构的一面)透过基底用紫外光来照射所述紫外固化胶以使之固化，然后将所述光纤端面与所述金属微纳米结构从所述基底表面进行剥离，以完成制作。In this embodiment, the adhesive is a UV curable adhesive or a thermosetting adhesive. When the adhesive is a UV curable adhesive, in a specific implementation, the optical fiber sensor comprises the steps of: first performing step 1), providing a substrate and an optical fiber, and preparing the substrate surface with the substrate a metal micro-nano structure having low binding force characteristics; then performing step 2), applying a UV-curable adhesive to the surface of the optical fiber or the surface of the metal micro-nano structure; and then performing step 3) adjusting the position of the optical fiber to make Aligning the end face of the fiber with the metal micro-nano structure, and contacting by the ultraviolet-curable glue phase (the fiber end face is not necessarily in direct contact with the metal micro-nano structure); finally, performing step 4), The back side of the substrate (the side without the metal micro/nano structure) is irradiated with ultraviolet light to cure the ultraviolet curable glue through the substrate, and then the end face of the optical fiber and the metal micro/nano structure are peeled off from the surface of the substrate To complete the production.
作为示例，所述基底为对紫外光透明的石英片，所述紫外固化胶为丙烯酸甲酯。所述紫外固化胶固化后的折射率约为1.54，所述约等于表示数值偏差为±20％以内。所述紫外固化胶的紫外固化光源波长为100～400nm，固化光源强度为1～2000J/cm2，固化时间为5～600s。优选地，所述固化波长为320nm附近，固化光强度为100J/cm2，固化时间为300s。As an example, the substrate is a quartz sheet that is transparent to ultraviolet light, and the ultraviolet curable glue is methyl acrylate. The refractive index of the UV curable adhesive after curing is about 1.54, and the approximate value is equal to or less than ±20%. The UV curable light source has a wavelength of 100-400 nm, a curing light source intensity of 1 to 2000 J/cm 2 , and a curing time of 5 to 600 s. Preferably, the curing wavelength is around 320 nm, the curing light intensity is 100 J/cm 2 , and the curing time is 300 s.
在另一种实施例中，当所述粘合剂为热固化胶时，所述光纤传感器的制作包括步骤：首先进行步骤1)，提供基底及光纤，于所述基底表面制备与所述基底具有低结合力特性的金属微纳米结构；然后进行步骤2)，于所述光纤端面或所述金属微纳米结构的表面涂敷热固化胶；然后进行步骤3)调整所述光纤的位置以使所述光纤端面与所述金属微纳米结构的位置对准，并通过所述粘合剂相接触(所述光纤端面与所述金属微纳米结构未必直接接触)；最后进行步骤4)加热装置接触所述基底的背面(没有金属微纳米结构的一面)对所述热固化胶加热以使之固化，加热温度为80～150℃，加热时间为1～30分钟，然后将所述光纤端面 与所述金属微纳米结构从所述基底表面进行剥离，以完成制作。In another embodiment, when the adhesive is a thermosetting adhesive, the optical fiber sensor comprises the steps of: first performing step 1), providing a substrate and an optical fiber, preparing the substrate and the substrate a metal micro/nano structure having low binding force; then performing step 2), applying a thermosetting glue to the surface of the fiber or the surface of the metal micro-nano structure; and then performing step 3) adjusting the position of the fiber so that The end face of the optical fiber is aligned with the position of the metal micro-nano structure, and is contacted by the adhesive (the end face of the fiber is not necessarily in direct contact with the metal micro-nano structure); finally, step 4) heating device contact is performed. The back surface of the substrate (the side without the metal micro/nano structure) is heated to cure the thermosetting glue, the heating temperature is 80-150 ° C, the heating time is 1-30 minutes, and then the fiber end face is Peeling from the surface of the substrate with the metal micro/nano structure to complete the fabrication.
作为示例，所述的热固化胶为AB胶，AB胶是双组分胶粘剂，其中，A组分胶含有双酚A二缩水甘油醚环氧树脂，B组分胶含有咪唑。所述加热装置为电烙铁。在实施例中，所述A组分和B组分按照10∶1的重量比混合，加热温度为150℃，所述加热时间为1～2分钟。As an example, the heat curing adhesive is AB glue, and the AB glue is a two-component adhesive, wherein the A component glue contains bisphenol A diglycidyl ether epoxy resin, and the B component glue contains imidazole. The heating device is an electric soldering iron. In the embodiment, the A component and the B component are mixed in a weight ratio of 10:1, and the heating temperature is 150 ° C, and the heating time is 1 to 2 minutes.
实施例四Embodiment 4
如图4所示，根据实施例三，本实施例还提供一种光纤传感器205的应用***，所述应用***包括：光纤传感器205、环形器204、激光器203以及光功率探测器202。所述激光器203通过光纤连接于所述环形器204的第一端，所述环形器204的第二端通过光纤连接于所述光纤传感器205，所述环形器204的第三端通过光纤连接于所述光功率探测器202。其中，所述激光器203优选为可调激光器。其它实施例中，所述激光器203还可以替换为固定波长的激光器或发光二极管。本实施例中的表面等离子体谐振的反射谱谷位置在1550nm左右，相应的所使用的光纤101为工作波长在1550nm的单模光纤。As shown in FIG. 4, according to the third embodiment, the application system further includes an optical fiber sensor 205, a circulator 204, a laser 203, and an optical power detector 202. The laser 203 is connected to the first end of the circulator 204 via an optical fiber, and the second end of the circulator 204 is connected to the optical fiber sensor 205 through an optical fiber, and the third end of the circulator 204 is connected to the optical fiber through the optical fiber. The optical power detector 202. Wherein, the laser 203 is preferably a tunable laser. In other embodiments, the laser 203 can also be replaced with a fixed wavelength laser or light emitting diode. The reflection spectrum valley position of the surface plasmon resonance in this embodiment is about 1550 nm, and the corresponding optical fiber 101 used is a single mode fiber having a working wavelength of 1550 nm.
本实施例中，所述应用***利用反射谱来探测超声波，所以还包括示波器210，超声波控制器211及与所述超声波控制器211连接的换能器212。所述示波器210通过电线连接于所述光电探测器202。使用时，激光器203用来激发光纤传感器205的表面等离子体谐振。超声波控制器211控制换能器212发出超声波，超声波通过介质发射到光纤传感器205上，从而改变了光纤传感器205的反射光功率。其中，换能器212能发射超声波，也能接收超声波回波并转换成相应电信号。本实施例中，所述介质为液体水221。In this embodiment, the application system uses the reflection spectrum to detect the ultrasonic waves, and therefore includes an oscilloscope 210, an ultrasonic controller 211, and a transducer 212 connected to the ultrasonic controller 211. The oscilloscope 210 is connected to the photodetector 202 by wires. In use, laser 203 is used to excite the surface plasmon resonance of fiber optic sensor 205. The ultrasonic controller 211 controls the transducer 212 to emit ultrasonic waves, and the ultrasonic waves are transmitted through the medium to the optical fiber sensor 205, thereby changing the reflected light power of the optical fiber sensor 205. The transducer 212 can emit ultrasonic waves and can also receive ultrasonic echoes and convert them into corresponding electrical signals. In this embodiment, the medium is liquid water 221.
本实施例中，通过用光纤传感器205与换能器212分别对超声波进行探测的对比实验发现，本实施例中的光纤传感器205对超声波具有良好的响应，适用于超声波信息的检测。具体的，如图5a和图5b所示，两组实验检测到的主要的信号频率都集中在20MHz，这与换能器212发出的中心频率在20MHz的超声波信号的信息一致。而且，图5a和图5b中的曲线波形形状，强度关系均相似，这说明光纤传感器205对超声波的频率和强度都具有良好的响应，适用于超声波信息的检测。In the present embodiment, by comparing the ultrasonic waves with the optical fiber sensor 205 and the transducer 212, it is found that the optical fiber sensor 205 in this embodiment has a good response to ultrasonic waves and is suitable for detecting ultrasonic information. Specifically, as shown in FIG. 5a and FIG. 5b, the main signal frequencies detected by the two sets of experiments are concentrated at 20 MHz, which is consistent with the information of the ultrasonic signal of the center frequency of the transducer 212 emitted by the transducer 212 at 20 MHz. Moreover, the waveform shapes in FIGS. 5a and 5b have similar intensity relationships, which indicates that the fiber sensor 205 has a good response to the frequency and intensity of the ultrasonic waves and is suitable for the detection of ultrasonic information.
其中，利用光纤传感器205对换能器212发出的超声波信号进行探测的具体实施过程为：波长在1550nm左右的激光作为入射光经过环形器204，到达处于超声波环境中的光纤传感器205，产生一个被超声波作用后的反射信号，所述反射信号再次经过环形器204到达光功率探测器202，光功率探测器202将反射信号的光强转换成电压信号，输出接入示波器201。这样从示波器201显示的电压信号就可以得出超声波信号的信息，如图5a所示。图5a为使用光纤传感器205对超声波信号进行探测的测量图，其中，激光器203设置为最佳工作波长 1537nm，激光器203的入射激光强度为5mW，210示波器的采样率为1GHz，。The specific implementation process of detecting the ultrasonic signal emitted by the transducer 212 by using the optical fiber sensor 205 is as follows: a laser having a wavelength of about 1550 nm is passed as incident light through the circulator 204 to the optical fiber sensor 205 in the ultrasonic environment to generate a The reflected signal after the ultrasonic wave, the reflected signal passes through the circulator 204 again to the optical power detector 202, and the optical power detector 202 converts the light intensity of the reflected signal into a voltage signal, and the output is connected to the oscilloscope 201. Thus, the information of the ultrasonic signal can be obtained from the voltage signal displayed by the oscilloscope 201, as shown in Fig. 5a. Figure 5a is a measurement diagram of the ultrasonic signal detected using the fiber optic sensor 205, wherein the laser 203 is set to the optimum operating wavelength At 1537 nm, the incident laser intensity of the laser 203 is 5 mW, and the sampling rate of the 210 oscilloscope is 1 GHz.
其中，利用换能器212对自身发出的超声波信号进行探测的具体实施过程为：使用玻璃片反射换能器212发出的超声波，并通过所述换能器212接收所述玻璃片反射的超声波，从而获得所述换能器212发出的超声波信号的信息，如图5b所示。图5b为使用玻璃片反射方法，通过换能器212对超声波信号进行探测的测量图，其中，换能器212发出的超声波的中心频率为20MHz。The specific implementation process of detecting the ultrasonic signal emitted by the transducer 212 by using the transducer 212 is: using the ultrasonic wave emitted by the glass sheet reflecting transducer 212, and receiving the ultrasonic wave reflected by the glass sheet through the transducer 212. Thereby, information of the ultrasonic signal emitted by the transducer 212 is obtained, as shown in Fig. 5b. Figure 5b is a measurement diagram of the ultrasonic signal detected by the transducer 212 using a glass sheet reflection method in which the center frequency of the ultrasonic wave emitted by the transducer 212 is 20 MHz.
其他实施例中，通过移动光纤传感器205相对换能器212的距离，能明显观测到超声波信号的相位移动。这证明了超声波探测结果会受到光纤传感器和声源之间的距离的影响。In other embodiments, the phase shift of the ultrasonic signal can be clearly observed by moving the distance of the fiber optic sensor 205 relative to the transducer 212. This proves that the ultrasonic detection results are affected by the distance between the fiber sensor and the sound source.
本实施例还通过用光纤传感器205与水听器分别对超声波进行探测的对比实验发现，本发明的光纤传感器具有角响应更加平坦的优势。这是因为，为了得到对声波的有效探测，我们希望入射声波在探测器表面的各点具有相同或相近的相位。本实施例的光纤传感器205接收超声波信号的有效表面的直径是9μm左右，而实验中使用的水听器接收超声波信号的有效表面的直径为1.5mm左右。以15MHz的超声波在水中传播为例，其波长为100μm左右，这远大于本实施例的光纤传感器205接收超声波信号的有效表面的直径，所以超声波在此有效表面上各点的相位都很接近，探测效率随入射超声波的方向变化较慢，从而具有角响应平坦的优势。而此超声波的波长远小于所用的水听器接收超声波信号的有效表面的直径，因此水听器仅对较小角度范围内入射的超声波能有效的探测。This embodiment also finds that the optical fiber sensor of the present invention has an advantage that the angular response is flatter by comparing experiments of ultrasonic waves with the fiber sensor 205 and the hydrophone. This is because, in order to obtain effective detection of sound waves, we want the incident sound waves to have the same or similar phase at each point on the detector surface. The diameter of the effective surface of the optical fiber sensor 205 of the present embodiment for receiving the ultrasonic signal is about 9 μm, and the diameter of the effective surface of the hydrophone used for the experiment to receive the ultrasonic signal is about 1.5 mm. For example, a 15 MHz ultrasonic wave propagates in water, and the wavelength thereof is about 100 μm, which is much larger than the diameter of the effective surface of the optical fiber sensor 205 of the present embodiment for receiving the ultrasonic signal, so that the phases of the ultrasonic waves on the effective surface are very close. The detection efficiency changes slowly with the direction of the incident ultrasonic wave, which has the advantage of flat angular response. The wavelength of the ultrasonic wave is much smaller than the diameter of the effective surface of the hydrophone used to receive the ultrasonic signal, so that the hydrophone can effectively detect only the ultrasonic waves incident in a small angular range.
其它实施例中，还可以利用透射谱来探测超声波。所述应用***利用透射谱来探测超声波时，通过连接于所述光功率探测器202的多模光纤来获取透射功率的实时变化情况，所以激光器203通过光纤直接连接于所述光纤传感器205。也就是说，一根多模光纤的一端连接于光功率探测器202；多模光纤的另一端正对所述光纤传感器205，且中心对齐呈一条直线，就可以获取透射功率的实时变化情况并输出。In other embodiments, the transmission spectrum can also be utilized to detect ultrasound. When the application system utilizes the transmission spectrum to detect ultrasonic waves, the real-time variation of the transmission power is obtained by the multimode fiber connected to the optical power detector 202, so the laser 203 is directly connected to the fiber sensor 205 through the optical fiber. That is, one end of a multimode fiber is connected to the optical power detector 202; the other end of the multimode fiber is opposite to the fiber sensor 205, and the center is aligned in a straight line, so that the real-time variation of the transmission power can be obtained. Output.
综上所述，本发明的一种光纤传感器及其声波探测应用方法，具有以下有益效果：In summary, the optical fiber sensor and the sound wave detecting application method of the present invention have the following beneficial effects:
本发明用基于表面等离子体谐振的光纤传感器来实现对声波的探测，其集成度高，可以***狭小的空间比如血管内，且具备探测频带宽、角响应平坦、测量稳定、低噪声等优点。The invention uses the fiber plasmon resonance based fiber optic sensor to realize the detection of sound waves, has high integration degree, can be inserted into a small space such as a blood vessel, and has the advantages of detecting frequency bandwidth, flat angular response, stable measurement, low noise and the like.
本发明通过利用不接触环境的表面(即所述金属微纳米结构的靠近光纤端面一侧的表面)上的表面等离子体谐振，可以有效减少解决复杂环境对声波探测的干扰，从而可以用于体内声波探测。The invention can effectively reduce the interference of the complex environment on the sound wave detection by utilizing the surface plasmon resonance on the surface not contacting the environment (that is, the surface of the metal micro-nano structure near the end face of the fiber), and thus can be used for the body. Sound wave detection.
所以，本发明有效克服了现有技术中的种种缺点而具高度产业利用价值。Therefore, the present invention effectively overcomes various shortcomings in the prior art and has high industrial utilization value.
上述实施例仅例示性说明本发明的原理及其功效，而非用于限制本发明。任何熟悉此技术 的人士皆可在不违背本发明的精神及范畴下，对上述实施例进行修饰或改变。因此，举凡所属技术领域中具有通常知识者在未脱离本发明所揭示的精神与技术思想下所完成的一切等效修饰或改变，仍应由本发明的权利要求所涵盖。 The above-described embodiments are merely illustrative of the principles of the invention and its effects, and are not intended to limit the invention. Any familiar with this technology Modifications or variations of the above embodiments may be made without departing from the spirit and scope of the invention. Therefore, all equivalent modifications or changes made by those skilled in the art without departing from the spirit and scope of the invention will be covered by the appended claims.

Claims (31)

  1. 一种光纤传感器，其特征在于，所述光纤传感器包括：光纤以及位于所述光纤端面上的金属微纳米结构，当宽谱的光纤导波入射到金属微纳米结构上，其反射谱或透射谱里具有表面等离子体谐振造成的谱谷或谱峰；所述光纤传感器用于声波探测，所述光纤传感器以波长处于表面等离子体谐振谱谷或谱峰的范围内的光作为入射光进入光纤，并实时测量其基于声波信号的反射功率或透射功率的变化，以检测声波信号的信息。An optical fiber sensor, comprising: an optical fiber and a metal micro/nano structure on an end face of the optical fiber, wherein a broad spectrum of the optical fiber guided wave is incident on the metal micro/nano structure, and the reflection spectrum or the transmission spectrum thereof a spectral valley or spectral peak caused by surface plasmon resonance; the optical fiber sensor is used for acoustic wave detection, and the optical fiber sensor enters the optical fiber as incident light with light having a wavelength in a range of a surface plasmon resonance spectrum valley or a spectral peak. The change of the reflected power or the transmitted power based on the acoustic signal is measured in real time to detect the information of the acoustic signal.
  2. 根据权利要求1所述的光纤传感器，其特征在于：所述声波为次声波，可听声波或超声波。The optical fiber sensor according to claim 1, wherein said sound wave is an infrasound wave, and an acoustic wave or an ultrasonic wave is audible.
  3. 根据权利要求1所述的光纤传感器，其特征在于：所述入射光的波长范围为800nm～900nm或1400nm～1700nm。The optical fiber sensor according to claim 1, wherein the incident light has a wavelength in the range of 800 nm to 900 nm or 1400 nm to 1700 nm.
  4. 根据权利要求1所述的光纤传感器，其特征在于：所述入射光为激光或发光二极管发出的光。The fiber optic sensor according to claim 1, wherein the incident light is light emitted by a laser or a light emitting diode.
  5. 根据权利要求1所述的光纤传感器，其特征在于：所述金属微纳米结构的靠近光纤端面一侧的表面处发生表面等离激元谐振，或者所述金属微纳米结构的背离光纤端面一侧的表面处发生表面等离激元谐振。The optical fiber sensor according to claim 1, wherein a surface plasmon resonance occurs at a surface of the metal micro/nano structure near a fiber end surface side, or a side of the metal micro/nano structure facing away from the fiber end surface Surface plasmon resonance occurs at the surface of the surface.
  6. 根据权利要求1所述的光纤传感器，其特征在于：所述金属微纳米结构为Au薄膜、Ag薄膜或Al薄膜上的微纳米结构。The optical fiber sensor according to claim 1, wherein the metal micro/nano structure is a micro-nano structure on an Au film, an Ag film or an Al film.
  7. 根据权利要求1所述的光纤传感器，其特征在于：所述金属微纳米结构为圆形或多边形状。The optical fiber sensor according to claim 1, wherein the metal micro/nano structure is circular or polygonal.
  8. 根据权利要求1所述的光纤传感器，其特征在于：所述金属微纳米结构的厚度为10～200nm。The optical fiber sensor according to claim 1, wherein the metal micro/nano structure has a thickness of 10 to 200 nm.
  9. 根据权利要求1所述的光纤传感器，其特征在于：所述金属微纳米结构包括金属薄膜上的第一周期微纳米结构及第二周期微纳米结构。The optical fiber sensor according to claim 1, wherein the metal micro/nanostructure comprises a first periodic micro-nano structure and a second periodic micro-nano structure on the metal thin film.
  10. 根据权利要求9所述的光纤传感器，其特征在于：所述第一周期微纳米结构为金属薄膜上的具有二维周期性网格状纳米线槽的微纳米结构；所述第二周期微纳米结构为金属薄 膜上的具有二维周期性网格状纳米线槽的微纳米结构，或者为金属薄膜上的具有一维周期性条状纳米线槽的微纳米结构，或者为两者的组合。The optical fiber sensor according to claim 9, wherein the first periodic micro-nanostructure is a micro-nano structure having a two-dimensional periodic grid-like nanowire groove on a metal film; the second period micro-nano The structure is thin metal A micro/nano structure having a two-dimensional periodic grid-like nanowire groove on the film, or a micro-nano structure having a one-dimensional periodic strip-shaped nanowire groove on the metal film, or a combination of the two.
  11. 根据权利要求10所述的光纤传感器，其特征在于：所述纳米线槽的宽度为10～200nm，深度为10～200nm。The optical fiber sensor according to claim 10, wherein the nanowire groove has a width of 10 to 200 nm and a depth of 10 to 200 nm.
  12. 根据权利要求9所述的光纤传感器，其特征在于：所述第一周期微纳米结构位于光纤的中心区域，与所述光纤的芯层对准；所述第二周期微纳米结构环绕所述第一周期微纳米结构。The fiber optic sensor of claim 9 wherein said first periodic micro/nanostructure is located in a central region of the optical fiber and aligned with a core layer of said optical fiber; said second periodic micro/nano structure surrounding said first One cycle of micro-nanostructures.
  13. 根据权利要求9所述的光纤传感器，其特征在于：所述第一周期微纳米结构与入射的光纤导波耦合形成表面等离激元，所述第二周期微纳米结构用于沿平行于光纤端面的方向反射所述表面等离激元。The fiber optic sensor of claim 9 wherein said first periodic micro/nanostructure is coupled to an incident fiber guide to form a surface plasmon, said second periodic micro-nanostructure being used parallel to the fiber The surface of the end face reflects the surface plasmon.
  14. 根据权利要求9所述的光纤传感器，其特征在于：所述第一周期微纳米结构的周期约等于表面等离激元谐振在金属薄膜上的波长，所述约等于表示数值偏差为±20％以内。The optical fiber sensor according to claim 9, wherein the period of the first periodic micro/nanostructure is approximately equal to the wavelength of the surface plasmon resonance on the metal thin film, and the approximately equal value indicates a numerical deviation of ±20%. Within.
  15. 根据权利要求9所述的光纤传感器，其特征在于：所述第二周期金属微纳米结构的周期约等于表面等离激元谐振在金属薄膜上的半波长，所述约等于表示数值偏差为±20％以内。The optical fiber sensor according to claim 9, wherein the period of the second periodic metal micro-nanostructure is approximately equal to a half wavelength of the surface plasmon resonance on the metal thin film, and the approximately equal value indicates a numerical deviation of ± Within 20%.
  16. 根据权利要求9所述的光纤传感器，其特征在于：所述第一周期微纳米结构与所述第二周期微纳米结构之间具有间距，所述间距为0～5μm。The optical fiber sensor according to claim 9, wherein the first periodic micro-nano structure and the second periodic micro-nano structure have a spacing between 0 and 5 μm.
  17. 根据权利要求1所述的光纤传感器，其特征在于：所述光纤对所述入射光为单模光纤。The fiber optic sensor of claim 1 wherein said fiber is a single mode fiber to said incident light.
  18. 根据权利要求1到17中任一项所述的光纤传感器，其特征在于：所述金属微纳米结构与光纤端面之间通过粘合剂粘合。The optical fiber sensor according to any one of claims 1 to 17, wherein the metal micro/nano structure is bonded to the end face of the optical fiber by an adhesive.
  19. 根据权利要求18所述的光纤传感器，其特征在于：所述粘合剂为紫外固化胶或热固化胶。 The optical fiber sensor according to claim 18, wherein the adhesive is a UV curable adhesive or a thermosetting adhesive.
  20. 一种光纤传感器的声波探测应用方法，其特征在于，所述应用方法包括以下步骤：A method for applying acoustic wave detection of a fiber optic sensor, characterized in that the application method comprises the following steps:
    步骤S1：将光纤传感器的端面置于或靠近有声波的介质，所述光纤传感器包括光纤以及位于所述光纤端面上的金属微纳米结构；Step S1: placing an end surface of the optical fiber sensor at or near the medium having sound waves, the optical fiber sensor comprising an optical fiber and a metal micro-nano structure located on the end surface of the optical fiber;
    步骤S2：入射光沿所述光纤传输并达到所述光纤端面，并发生表面等离子体谐振及与声波作用，形成反射回光纤的反射光或形成穿透金属微纳米结构的透射光；Step S2: incident light is transmitted along the optical fiber and reaches the end face of the optical fiber, and surface plasmon resonance occurs and acts with sound waves to form reflected light reflected back to the optical fiber or form transmitted light penetrating the metal micro-nano structure;
    步骤S3：根据所述反射光的反射功率或透射光的透射功率的实时变化来获得声波信号的信息。Step S3: Obtain information of the acoustic wave signal according to a real-time change of the reflected power of the reflected light or the transmitted power of the transmitted light.
  21. 根据权利要求20所述的光纤传感器的声波探测应用方法，其特征在于：所述步骤S2中，所述反射光为在所述金属微纳米结构的靠近光纤端面一侧的表面处发生表面等离激元谐振之后反射回光纤的反射光，或者为在所述金属微纳米结构的背离光纤端面一侧的表面处发生表面等离激元谐振之后反射回光纤的反射光。The method for applying acoustic wave detection of a fiber-optic sensor according to claim 20, wherein in the step S2, the reflected light is surface-isolated at a surface of the metal micro-nano structure near the end face of the optical fiber. The reflected light that is reflected back to the fiber after the exciter resonance, or the reflected light that is reflected back to the fiber after surface plasmon resonance occurs at the surface of the metal micro/nano structure that faces away from the end face of the fiber.
  22. 根据权利要求20所述的光纤传感器的声波探测应用方法，其特征在于：所述步骤S2中，所述透射光为在所述金属微纳米结构的靠近光纤端面一侧的表面处发生表面等离激元谐振之后穿透金属微纳米结构的透射光，或者为在所述金属微纳米结构的背离光纤端面一侧的表面处发生表面等离激元谐振之后的透射光。The method for applying sound wave detection of a fiber-optic sensor according to claim 20, wherein in the step S2, the transmitted light is surface-isolated at a surface of the metal micro-nano structure near the end face of the optical fiber. The transmitted light that penetrates the metal micro/nanostructure after the exciter resonance, or the transmitted light after the surface plasmon resonance occurs at the surface of the metal micro-nano structure that faces away from the end face of the optical fiber.
  23. 根据权利要求20所述的光纤传感器的声波探测应用方法，其特征在于：所述反射光如果是宽谱的则其反射谱里具有表面等离子体谐振形成的谱谷或谱峰，所述透射光如果是宽谱的则其透射谱里具有表面等离子体谐振形成的谱谷或谱峰。The method for applying sound wave detection of a fiber-optic sensor according to claim 20, wherein if the reflected light is broad-spectrum, the reflection spectrum has a spectral valley or a peak formed by surface plasmon resonance, and the transmitted light If it is broad spectrum, its transmission spectrum has a spectral valley or peak formed by surface plasmon resonance.
  24. 根据权利要求20中所述的光纤传感器的声波探测应用方法，其特征在于：所述入射光为波长处于表面等离子体谐振形成的谱谷或谱峰的范围内的光。A method of applying sound wave detection for a fiber optic sensor according to claim 20, wherein said incident light is light having a wavelength within a range of spectral valleys or peaks formed by surface plasmon resonance.
  25. 根据权利要求20所述的光纤传感器的声波探测应用方法，其特征在于：所述入射光的波长范围为800nm～900nm或1400nm～1700nm。The method for applying acoustic wave detection of an optical fiber sensor according to claim 20, wherein the incident light has a wavelength ranging from 800 nm to 900 nm or from 1400 nm to 1700 nm.
  26. 根据权利要求20所述的光纤传感器的声波探测应用方法，其特征在于：所述入射光为激光或发光二极管发出的光。 The method for applying sound wave detection of a fiber optic sensor according to claim 20, wherein the incident light is light emitted by a laser or a light emitting diode.
  27. 根据权利要求20所述的光纤传感器的声波探测应用方法，其特征在于：所述光纤对所述入射光为单模光纤。The method for applying sound wave detection of a fiber optic sensor according to claim 20, wherein the optical fiber is a single mode fiber to the incident light.
  28. 根据权利要求20所述的光纤传感器的声波探测应用方法，其特征在于：所述声波信号的信息包括幅度、相位及频率中的一种或两种以上的组合。The acoustic wave detecting application method of an optical fiber sensor according to claim 20, wherein the information of the acoustic wave signal comprises one or a combination of two or more of amplitude, phase and frequency.
  29. 根据权利要求20所述的光纤传感器的声波探测应用方法，其特征在于：所述介质为液体，气体，固体或胶体。A method of applying sound wave detection for a fiber optic sensor according to claim 20, wherein the medium is a liquid, a gas, a solid or a gel.
  30. 根据权利要求20所述的光纤传感器的声波探测应用方法，其特征在于：所述声波为次声波，可听声波或超声波。The acoustic wave detecting application method of a fiber-optic sensor according to claim 20, wherein the sound wave is an infrasound wave, and an acoustic wave or an ultrasonic wave is audible.
  31. 一种光纤传感器的声波探测应用***，其特征在于，所述声波探测应用***包括：权利要求1到19中任一项所述的光纤传感器、环形器或多模光纤、激光器以及光功率探测器，An acoustic wave detecting application system for an optical fiber sensor, comprising: the optical fiber sensor, the circulator or the multimode optical fiber, the laser, and the optical power detector according to any one of claims 1 to 19. ,
    所述激光器通过光纤连接于所述环形器的第一端，所述环形器的第二端通过光纤连接于所述光纤传感器，所述环形器的第三端通过光纤连接于所述光功率探测器；或者所述激光器通过光纤连接于所述光纤传感器，所述多模光纤的一端连接于光功率探测器，所述多模光纤的另一端正对所述光纤传感器。 The laser is connected to the first end of the circulator through an optical fiber, and the second end of the circulator is connected to the optical fiber sensor through an optical fiber, and the third end of the circulator is connected to the optical power by optical fiber Or the laser is connected to the optical fiber sensor through an optical fiber, one end of the multimode optical fiber is connected to an optical power detector, and the other end of the multimode optical fiber is opposite to the optical fiber sensor.
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